CN108754398A - The preparation method of high-purity porous ceramics abradable seal coating - Google Patents

The preparation method of high-purity porous ceramics abradable seal coating Download PDF

Info

Publication number
CN108754398A
CN108754398A CN201810631830.2A CN201810631830A CN108754398A CN 108754398 A CN108754398 A CN 108754398A CN 201810631830 A CN201810631830 A CN 201810631830A CN 108754398 A CN108754398 A CN 108754398A
Authority
CN
China
Prior art keywords
powder
preparation
purity
coating
grain size
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201810631830.2A
Other languages
Chinese (zh)
Other versions
CN108754398B (en
Inventor
于月光
沈婕
彭浩然
刘建明
侯伟骜
卢晓亮
刘通
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bgrimm Advanced Materials Science & Technology Co Ltd
BGRIMM Technology Group Co Ltd
Original Assignee
Bgrimm Advanced Materials Science & Technology Co Ltd
BGRIMM Technology Group Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bgrimm Advanced Materials Science & Technology Co Ltd, BGRIMM Technology Group Co Ltd filed Critical Bgrimm Advanced Materials Science & Technology Co Ltd
Priority to CN201810631830.2A priority Critical patent/CN108754398B/en
Publication of CN108754398A publication Critical patent/CN108754398A/en
Application granted granted Critical
Publication of CN108754398B publication Critical patent/CN108754398B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/134—Plasma spraying
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
    • C23C4/11—Oxides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Coating By Spraying Or Casting (AREA)

Abstract

The invention discloses a kind of preparation methods of high-purity porous ceramics abradable seal coating, belong to seal coating technical field.Use the high-purity ceramic powder without pore creating material, with bimodal grain size grading for raw material, high-purity porous abradable seal coating of high porosity high bond strength is prepared by high energy plasma spraying process, effectively improve the anti-sintering property of coating, and then coating temperature in use is improved, extend coating service life.

Description

The preparation method of high-purity porous ceramics abradable seal coating
Technical field
The invention belongs to seal coating technical fields, are related to a kind of high-purity porous ceramics abradable seal painting of no pore creating material Layer preparation method.
Background technology
Abradable seal coating can effectively reduce the gap between engine rotor and stator, reduce oil consumption, improve and start Engine efficiency and safety in operation.Ceramic base abradable seal coating has the advantages that high temperature resistant, corrosion-resistant and heat-insulated, widely answers For being using temperature up to 1000 DEG C or more at the mesohigh turbine outer ring position of aero-engine and ground gas turbine At present using the highest a kind of abradable seal coating of temperature.With the development of aircraft industry, the performance of seal coating is proposed Higher demand.It is required that seal coating it is long when service temperature be more than 1050 DEG C, and have smaller pore-size, higher Porosity and bond strength.
Powder of the preparation generally use containing pore creating materials such as polybenzoate of conventional ceramic base seal coating is raw material, pore creating material Content is generally more than 10wt%, at the same time, Fe in material2O3、SiO2、Al2O3, impurity contents >=0.5% such as CaO.In coating During preparation, due to distribution and the volatilization of pore creating material and uneven, eventually leading to coat inside, there are a large amount of interconnected pores Defect, the bond strength and service life of coating are relatively low.And Fe in coating2O3、SiO2、Al2O3, the impurity such as CaO presence make When working long hours under 1050 DEG C or more of military service operating mode at coating, easily undergoes phase transition, Sintering Problem, lead to coating cracking Failure.In addition conventional plasma spray coating process due to energy density it is low, powder-processed amount is small (< 50g/min), the pottery of preparation Porcelain seal coating pore-size is difficult to control, bond strength is low.
Invention content
The object of the present invention is to provide a kind of ceramic abradable seal coating temperature in use of raising, and keep coating smaller The preparation method of pore-size, higher porosity and bond strength characteristic, to effectively promote the application of ceramic seal coating Performance.Present invention employs, as raw material, effectively promote coating porosity uniformity, and pass through material without pore creating material ceramic powders The high pure and ultra-fine characteristic of material improves the temperature in use and toughness of coating.It can efficient stable preparation by high energy plasma spraying process The ceramic seal coating of smaller pore-size, higher porosity and bond strength.
High-purity porous ceramics abradable seal coating preparation method, includes the following steps：
(1) use the high-purity ceramic powder without pore creating material for raw material；
(2) bimodal grain size grading is carried out to powder, realizes the thickness blending powder of powder；
(3) on the workpiece for having prepared bond coating, it is porous that high-purity ceramic is prepared by high energy plasma spraying process Coating, coating layer thickness 0.5mm~5mm.
In some specific embodiments, step (1) high-purity ceramic powder purity >=99.5%, impurity content≤ 0.5%.Further, high-purity ceramic powder purity >=99.9%, impurity content≤0.1%.
In some specific embodiments, step (1) the high-purity ceramic powder particle grain size is 5~1000nm.Into one Step ground, the high-purity ceramic powder particle grain size are 10~200nm.
In some specific embodiments, step (1) the high-purity ceramic powder is zirconium oxide, yttrium oxide, dysprosia, oxygen Change one or more of ytterbium, gadolinium oxide, lanthana, cerium oxide, magnesia.
In some specific embodiments, step (2) is described to carry out bimodal grain size grading to powder, is by coarse powder and fine powder Mixture by a certain percentage, wherein coarse powder grain size peak value are 75~400 μm, and fine powder grain size peak value is 10~75 μm.Further, slightly Powder 60~80wt% of accounting, 40~20wt% of fine powder accounting.
In some specific embodiments, step (3) the high energy plasma spraying process is using high power or cascade Formula plasma gun is sprayed in air, low pressure or noble gas environmental protection.
In some specific embodiments, the porosity of step (3) the ceramic porous seal coating is 15~45%, hole 5~40 μm of gap size.
The preparation method of high-purity porous ceramics abradable seal coating provided by the invention, relative to conventionally employed containing a large amount of The preparation process of the ceramic powder stock combination normal atmospheric plasma spraying of pore creating material has coating porosity size uniform can The features such as control, bond strength high, simple for process.
Description of the drawings
Fig. 1 is specific embodiment of the invention ceramic powders bimodal size distribution schematic diagram.
Fig. 2 is ceramic abradable seal coating Cross Section Morphology SEM figures prepared by the specific embodiment of the invention.
Fig. 3 is part SEM figures in ceramic abradable seal coating section prepared by the specific embodiment of the invention.
Specific implementation mode
With reference to the attached drawing in the embodiment of the present invention, technical solution in the embodiment of the present invention carries out clear, complete Ground describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.Based on this The embodiment of invention, every other implementation obtained by those of ordinary skill in the art without making creative efforts Example, belongs to protection scope of the present invention.
The specific implementation mode of the present invention provides high-purity porous ceramics abradable seal coating preparation method, including：
Step (1)：Raw material using the high-purity ceramic powder without any pore creating material as ceramic abradable seal coating Powder.Wherein, ceramic powders purity >=99.9%, impurity content≤0.1%, ceramic powders primary particle degree are 5~1000nm, Its Typical particle degree is 10~200nm.And the ingredient of ceramic powders is zirconium oxide, yttrium oxide, dysprosia, ytterbium oxide, oxidation One or more of gadolinium, lanthana, cerium oxide, magnesia.
Step (2)：Ceramic powders without pore creating material are subjected to grading according to specific granularity ratio, and full and uniform mixed It closes, obtains the ceramic seal coating powder raw material with bimodal grain size grading characteristic.Wherein coarse powder grain size peak value is 75~400 μ M, fine powder grain size peak value be 10~75 μm, typical size blend proportion be coarse powder 60%~80wt% of accounting, fine powder accounting 40~ 20wt%.
Step (3) is on the workpiece for having prepared bond coating, using the powder obtained in step 2 as raw material, passes through three sun Pole or three cathode high energy plasma spraying process prepare ceramic porous seal coating in air, low pressure or noble gas protective atmosphere, Coating layer thickness 0.5mm~5mm, porosity are 15~45%, and 5~40 μm of typical pore size is controllable.
The specific implementation mode of the present invention is described in further detail below in conjunction with attached drawing.
Embodiment 1
Step (1)：Using the high-purity yttrium oxide stabilized zirconia powders without any pore creating material as the abradable envelope of ceramics The raw material powder of tight coating.Wherein, ceramic powders purity >=99.93%, ceramic powders primary particle degree are 30~80nm.
Step (2)：Ceramic powders without pore creating material are subjected to grading according to specific granularity ratio, and full and uniform mixed It closes, obtains the ceramic seal coating powder raw material with bimodal grain size grading characteristic.Wherein coarse powder grain size peak value is 75~100 μm Ceramic powders accounting 80wt%, fine powder grain size peak value is 15~37 μm of ceramic powders accounting 20%, as shown in Fig. 1.
Step (3), using the powder obtained in step (2) as raw material, passes through three on the workpiece for having prepared bond coating Anode high energy plasma spraying process prepares ceramic porous seal coating, prepares coating thickness 1.5mm, hole in air atmosphere Rate is 31%, 5~40 μm of pore-size, as shown in 2~attached drawing of attached drawing 3, anchoring strength of coating 9.0MPa.
Embodiment 2
Step (1)：Using the Rare earth element stabilized zirconia powders without any pore creating material as the abradable envelope of ceramics The raw material powder of tight coating.Wherein, ceramic powders purity >=99.92%, ceramic powders primary particle degree are 40~90nm.
Step (2)：Ceramic powders without pore creating material are subjected to grading according to specific granularity ratio, and full and uniform mixed It closes, obtains the ceramic seal coating powder raw material with bimodal grain size grading characteristic.Wherein coarse powder grain size peak value is 75~150 μm Ceramic powders accounting 70wt%, fine powder grain size peak value is 15~45 μm of ceramic powders accounting 30%.
Step (3), using the powder obtained in step (2) as raw material, passes through three on the workpiece for having prepared bond coating Anode high energy plasma spraying process prepares ceramic porous seal coating, prepares coating thickness 2.5mm, hole in air atmosphere Rate is 35%, 5~40 μm of pore-size, anchoring strength of coating 8.6MPa.
Embodiment 3
Step (1)：Using high-purity ytterbium oxide stabilized zirconia powders without any pore creating material as the abradable envelope of ceramics The raw material powder of tight coating.Wherein, ceramic powders purity >=99.95%, ceramic powders primary particle degree are 10~300nm.
Step (2)：Ceramic powders without pore creating material are subjected to grading according to specific granularity ratio, and full and uniform mixed It closes, obtains the ceramic seal coating powder raw material with bimodal grain size grading characteristic.Wherein coarse powder grain size peak value is 75~150 μm Ceramic powders accounting 60wt%, fine powder grain size peak value is 10~45 μm of ceramic powders accounting 40%.
Step (3), using the powder obtained in step (2) as raw material, passes through three on the workpiece for having prepared bond coating Cathode high energy plasma spraying process prepares ceramic porous seal coating, prepares coating thickness 2.3mm, hole in air atmosphere Rate is 28%, 5~40 μm of pore-size, anchoring strength of coating 9.4MPa.
Embodiment 4
Step (1)：Using high-purity ytterbium, gadolinium, yttrium without any pore creating material, steady Zirconium oxide powder is abradable as ceramics altogether The raw material powder of seal coating.Wherein, ceramic powders purity >=99.94%, ceramic powders primary particle degree are 10~50nm.
Step (2)：Ceramic powders without pore creating material are subjected to grading according to specific granularity ratio, and full and uniform mixed It closes, obtains the ceramic seal coating powder raw material with bimodal grain size grading characteristic.Wherein coarse powder grain size peak value is 100~450 μ The ceramic powders accounting 75wt% of m, the ceramic powders accounting 25% that fine powder grain size peak value is 20~53 μm
Step (3), using the powder obtained in step (2) as raw material, passes through three on the workpiece for having prepared bond coating Anode high energy plasma spraying process prepares ceramic porous seal coating, prepares coating thickness 1.6mm, hole in air atmosphere Rate is 28%, 5~40 μm of pore-size, anchoring strength of coating 9.8MPa.
Embodiment 5
Step (1)：Original using high-purity zirconic acid lanthanum powder without any pore creating material as ceramic abradable seal coating Feed powder end.Wherein, ceramic powders purity >=99.95%, ceramic powders primary particle degree are 50~700nm.
Step (2)：Ceramic powders without pore creating material are subjected to grading according to specific granularity ratio, and full and uniform mixed It closes, obtains the ceramic seal coating powder raw material with bimodal grain size grading characteristic.Wherein coarse powder grain size peak value is 75~350 μm Ceramic powders accounting 65wt%, fine powder grain size peak value is 25~53 μm of ceramic powders accounting 20%.
Step (3), using the powder obtained in step (2) as raw material, passes through three on the workpiece for having prepared bond coating Anode high energy plasma spraying process prepares ceramic porous seal coating, prepares coating thickness 2.0mm, hole in air atmosphere Rate is 25%, 5~40 μm of pore-size, anchoring strength of coating 8.9MPa.
The foregoing is only a preferred embodiment of the present invention, but scope of protection of the present invention is not limited thereto, Any one skilled in the art in the technical scope disclosed by the present invention, the change or replacement that can be readily occurred in, It should be covered by the protection scope of the present invention.

Claims (10)

1. the preparation method of high-purity porous ceramics abradable seal coating, which is characterized in that include the following steps：
(1) use the high-purity ceramic powder without pore creating material for raw material；
(2) bimodal grain size grading is carried out to powder, realizes the thickness blending powder of powder；
(3) on the workpiece for having prepared bond coating, high-purity ceramic porous coating is prepared by high energy plasma spraying process, Coating layer thickness 0.5mm~5mm.
2. preparation method according to claim 1, which is characterized in that in step (1), the high-purity ceramic powder purity >=99.5%, impurity content≤0.5%.
3. preparation method according to claim 2, which is characterized in that high-purity ceramic powder purity >=99.9%, it is miscellaneous Matter content≤0.1%.
4. preparation method according to claim 1, which is characterized in that in step (1), the high-purity ceramic powder particle Grain size is 5~1000nm.
5. preparation method according to claim 4, which is characterized in that the high-purity ceramic powder particle grain size be 10~ 200nm。
6. preparation method according to claim 1, which is characterized in that in step (1), the high-purity ceramic powder is oxygen Change one or more of zirconium, yttrium oxide, dysprosia, ytterbium oxide, gadolinium oxide, lanthana, cerium oxide, magnesia.
7. preparation method according to claim 1, which is characterized in that described to carry out bimodal grain to powder in step (2) Grading is spent, is by coarse powder and fine powder mixture by a certain percentage, wherein coarse powder grain size peak value is 75~400 μm, fine powder grain size peak value It is 10~75 μm.
8. preparation method according to claim 7, which is characterized in that coarse powder 60~80wt% of accounting, fine powder accounting 40~ 20wt%.
9. preparation method according to claim 1, which is characterized in that in step (3), the high energy plasma sprays work Skill is to be sprayed in air, low pressure or noble gas environmental protection using high power or tandem type plasma gun.
10. preparation method according to claim 1, which is characterized in that described ceramic porous to obturage painting in step (3) The porosity of layer is 15~45%, 5~40 μm of pore-size.
CN201810631830.2A 2018-06-19 2018-06-19 Preparation method of high-purity porous ceramic abradable seal coating Active CN108754398B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810631830.2A CN108754398B (en) 2018-06-19 2018-06-19 Preparation method of high-purity porous ceramic abradable seal coating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810631830.2A CN108754398B (en) 2018-06-19 2018-06-19 Preparation method of high-purity porous ceramic abradable seal coating

Publications (2)

Publication Number Publication Date
CN108754398A true CN108754398A (en) 2018-11-06
CN108754398B CN108754398B (en) 2020-11-06

Family

ID=63978873

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810631830.2A Active CN108754398B (en) 2018-06-19 2018-06-19 Preparation method of high-purity porous ceramic abradable seal coating

Country Status (1)

Country Link
CN (1) CN108754398B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114411085A (en) * 2021-11-25 2022-04-29 矿冶科技集团有限公司 Preparation method of dense thick thermal barrier coating
CN117568737A (en) * 2024-01-12 2024-02-20 北矿新材科技有限公司 Coating with high thermal shock resistance and high abrasion resistance, preparation method thereof, engine and aircraft

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102482168A (en) * 2009-10-14 2012-05-30 赢创德固赛有限公司 Process for the infiltration of porous ceramic components
WO2017211920A1 (en) * 2016-06-10 2017-12-14 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Zirconium oxide ceramic, cellular material made of same and method for producing the zirconium oxide ceramic
CN107653432A (en) * 2017-09-28 2018-02-02 中国航发动力股份有限公司 A kind of high energy plasma spraying prepares the process of thermal barrier coating
CN107805775A (en) * 2017-09-28 2018-03-16 中国航发动力股份有限公司 A kind of high-temperature abradable seal coating and preparation method thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102482168A (en) * 2009-10-14 2012-05-30 赢创德固赛有限公司 Process for the infiltration of porous ceramic components
WO2017211920A1 (en) * 2016-06-10 2017-12-14 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Zirconium oxide ceramic, cellular material made of same and method for producing the zirconium oxide ceramic
CN107653432A (en) * 2017-09-28 2018-02-02 中国航发动力股份有限公司 A kind of high energy plasma spraying prepares the process of thermal barrier coating
CN107805775A (en) * 2017-09-28 2018-03-16 中国航发动力股份有限公司 A kind of high-temperature abradable seal coating and preparation method thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114411085A (en) * 2021-11-25 2022-04-29 矿冶科技集团有限公司 Preparation method of dense thick thermal barrier coating
CN114411085B (en) * 2021-11-25 2024-09-06 矿冶科技集团有限公司 Preparation method of dense thick thermal barrier coating
CN117568737A (en) * 2024-01-12 2024-02-20 北矿新材科技有限公司 Coating with high thermal shock resistance and high abrasion resistance, preparation method thereof, engine and aircraft
CN117568737B (en) * 2024-01-12 2024-05-28 北矿新材科技有限公司 Coating with high thermal shock resistance and high abrasion resistance, preparation method thereof, engine and aircraft

Also Published As

Publication number Publication date
CN108754398B (en) 2020-11-06

Similar Documents

Publication Publication Date Title
CN105755418B (en) A kind of ceramic fibre/whisker strengthens composite thermal barrier coating and preparation method thereof
EP2794956B1 (en) Aqueous slurry for the production of thermal and environmental barrier coatings
CN102094164B (en) Nanometer zirconium oxide thermal barrier coating and preparation method thereof
EP2799588B1 (en) Method of making high temperature TBCs with ultra low thermal conductivity and abradability
CN102041499B (en) Molybdenum disilicide composite coating and preparation method thereof
US11697871B2 (en) Thermal barrier coatings and processes
CN106435446A (en) CYSZ thermal barrier coating prepared through plasma thermal spraying method and preparing method
EP2578804B1 (en) Method of manufacturing an abradable air seal
CN108754398A (en) The preparation method of high-purity porous ceramics abradable seal coating
US20210087695A1 (en) Erosion and cmas resistant coating for protecting ebc and cmc layers and thermal spray coating method
CN108424174B (en) Multi-element complex phase nano boride, corresponding ultrahigh temperature oxidation resistant coating and preparation method
JP2021191899A (en) Adhesion promoter layer for joining high-temperature protection layer to substrate, and method for producing the same
JP5247049B2 (en) Partially alloyed zirconia powder
CN103769581A (en) Multielement composite rare earth electron emission material and preparation method thereof
EP1463845A1 (en) Production of a ceramic material for a heat-insulating layer and heat-insulating layer containing said material
JP6746441B2 (en) Coating method and coating film and turbine shroud
CN104451520A (en) Preparation method of zirconium oxide polycrystalline ceramic coating
CN114774834A (en) Preparation method of high-entropy rare earth aluminate thermal protection coating
CA3208299A1 (en) Composite thermal spray powder of oxides and non-oxides
KR101598858B1 (en) Ni-YSZ COMPOSITE MATERIAL POWDER, MANUFACTURING METHOD THEREOF AND COATING METHOD USING THE POWDER
CN104694868B (en) The preparation method of oxide nitride composite porous ceramic coating
CN110357666A (en) A kind of ceramic composite coating and preparation method thereof
CN114015963B (en) Low-thermal-conductivity thermal barrier coating with vertical crack structure and preparation method thereof
EP4385967A1 (en) Spray powder for high porosity coatings
CN118028730A (en) Environment barrier coating for resisting high-temperature oxygen corrosion of SiC-based ceramic or composite material thereof and preparation method thereof

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant