CN108749329A - A kind of piezoelectric ink jet printing head structure for preventing ink from flowing back - Google Patents
A kind of piezoelectric ink jet printing head structure for preventing ink from flowing back Download PDFInfo
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- CN108749329A CN108749329A CN201810623623.2A CN201810623623A CN108749329A CN 108749329 A CN108749329 A CN 108749329A CN 201810623623 A CN201810623623 A CN 201810623623A CN 108749329 A CN108749329 A CN 108749329A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
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- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
The present invention provides a kind of piezoelectric ink jet printing head structure for preventing ink from flowing back, and ink-feed channel is connected with print cartridge, and ink reaches nozzle because capillary force effect is full of ink-feed channel, restriction, pressure generation chamber, conduction part successively；Driving element is formed by top electrode, piezoelectric ceramics, lower electrode, oscillating plate, when top electrode and lower electrode are powered simultaneously, piezoelectric ceramics is because inverse piezoelectric effect is deformed, and then drive oscillating plate deformation, oscillating plate deformation meeting squeeze pressure generates the ink of intracavitary, restriction and conduction part prevent ink to be back to ink-feed channel, and ink is made to be sprayed from the nozzle.The structure of the present invention uses piezoelectric ceramics, driving element to generate driving force, and the corresponding base part of pressure generation chamber is removed processing, and driving element is in vacant state, and driving element is located at pressure generation chamber chamber interior.The piezoelectric ink jet printing head structure of the present invention, manufacture craft is simple, at low cost, good process repeatability, and has the effect of that anti-ink flows back.
Description
Technical field
The present invention relates to include print cartridge, ink-feed channel, restriction, pressure generation chamber, conduction part, nozzle, top electrode, pressure
Electroceramics, lower electrode, oscillating plate, in particular it relates to which the piezoelectric ink jet for spraying liquid from nozzle prints injector head.
Background technology
Ink-jet printer is that colour liquid ink is become fine particles through nozzle to be sprayed onto in printing paper, some ink-jet printers
There are three or four printing heads, to print yellow, pinkish red green black four color；Has plenty of a shared nozzle, point four color spray printings.Spray
Black printer uses there are mainly two types of technologies：Continuous ink jet technology and random mode ink-jet technology.
The ink-jet printer of the ink-jet printer of early stage and current large format is all to use continuous ink jet technology, and work as
The ink-jet printer of preceding market prevalence all generally uses random ink-jet technology.Continuous inkjet technology using charge modulation type as representative,
Ink is only just sprayed when printing needs in random mode ink-jet system, so also known as on-demand.It is compared with continous way, structure
Simply, at low cost, reliability is also high, still, low because being influenced ink ejection velocity by jet stream inertia.In this random ink-jet system
In system, in order to make up this disadvantage, many random mode ink-jet printers use multi-jet method to improve print speed.With
Machine formula ink-jet technology mainly has minute-pressure electric-type and hot bubble type two major classes.
1. hot-bubble ink-jetting technology
Ink-jet printer generally mostly uses hot-bubble ink-jetting technology, passes through ink heating in a short time, expansion, pressure
Contracting will form ink dot in ink injection to printing paper, increase the stability of ink droplet color, realize high speed, high quality printing.By
Other than the size in addition to ink droplet, the shape of ink droplet, the consistency of concentration all can generate significant impact, and ink to picture quality
The ink dot direction generated at high temperature and shape are not easily controlled, so the control of high-precision ink droplet is particularly significant.Thermal bubble type
The principle of inkjet printing is that ink is encased in a very small capillary, rapidly will by a miniature heating cushion
Heating ink is to boiling point.As soon as thus generating a very small steam bubble, a melted ink is ejected by steam bubble expansion
The top of capillary.Stop heating, ink cooling causes steam condensation to shrink, to stop ink flow, until next time again
It generates steam and generates an ink droplet.
2. Micro Piezo technology
Ink droplet control in ink jet process is divided into 3 stages by Micro Piezo technology：Before ink ejection operation, piezoelectric element is first
It is shunk slightly under the control of signal；Then, element generates primary larger extension, and ink droplet is released nozzle；In ink droplet horse back
It will fly away from the moment of nozzle, element can be shunk again, cleanly ink level from nozzle contraction.In this way, ink droplet
Liquid level is accurately controlled, and the ink droplet sprayed every time has perfect shape and correct heading.
Energy converter is arranged in minute-pressure electric-type ink-jet system on the nozzle equipped with ink, and energy converter is controlled by print signal,
To control the injection of ink.It can be divided into according to the operation principle of minute-pressure electric-type ink-jet system energy converter and arrangement architecture：Piezoelectricity
The several types such as cast, piezoelectric film type, piezoelectric sheet type.
Using the variation of micro voltage come the shortcomings that controlling the injection of ink dot, not only avoid hot-bubble ink-jetting technology, and
The injection direction and shape of ink dot can be accurately controlled.Piezoelectric ink jet printing head uses at the rear portion of miniature ink reservoir
One block of piezo-electric crystal.Electric current is applied to crystal, it will be made inwardly to suppress.When current interruptions, crystal rebounds back original
Position, while the micro ink of a drop being shot out by nozzle.When electric current restores, crystal again draw backward by extension, into spray
Penetrate the preparation state of next melted ink.
Both methods is compared, and thermal bubble type printing head is unstable since chemical change easily occurs at high temperature for ink, ink
The directionality of water particle and the bad grasp of volume size, printing line edge are easy irregular, affect to a certain extent
Print quality is all its shortcoming.Electric printing head technology is the characteristic discharged when being pressurizeed using crystal, in normal temperature state
Lower stabilization sprays ink.It is stronger to ink droplet control ability, also color dot is reduced it is many, the ink dot of generation also without comets tail,
To keep the image of printing apparent.The up to high-precision printing quality of 1440dip easy to implement.Without adding when micro- piezoelectric ink jet
Heat, because heated chemical change would not occur for ink, therefore greatly reduce the requirement to ink.In addition, piezoelectric type printing spray
Head is fixed in printer, therefore only needing replacing print cartridge can.Thermal Bubble Ink-jet Printer printer is needed in each print cartridge
Middle installation ink nozzle：The cost of print cartridge can be increased in this way.
The present invention is exactly that the piezoelectric ink jet printing head for capableing of drop on demand ink jet is prepared using Micro Piezo technology, overcomes ink droplet
Inertia is sprayed, prevents ink to flow back, increases ink ejection velocity, and preparation process is simple, the period is short and manufacturing cost
It is low.
Invention content
The present invention devises a kind of piezoelectric ink jet driving element positioned at pressure generation chamber chamber interior, improves oscillating plate and shakes
Width, ink-jet is efficient, and enormously simplifies manufacture craft and reduce manufacturing cost.Lead in order to which limit ink is back to ink supply
Road devises a kind of symmetrical restriction and conduction part, to effectively increase the ink-jet efficiency of piezoelectric ink jet printing head.
Technical scheme of the present invention：
A kind of piezoelectric ink jet printing head structure for preventing ink from flowing back, the piezoelectric ink jet printing head structure is by multiple only
Vertical chamber composition；
Each chamber includes nozzle 2, conduction part 8, pressure generation chamber 9, restriction 10 and ink-feed channel 11；Ink-feed channel 11
Arrival end be connected with print cartridge, ink-feed channel 11 is connected with restriction 10；Restriction 10 is connected with pressure generation chamber 9, pressure
Power generates chamber 9 and is connected with conduction part 8, and conduction part 8 is connected with nozzle 2.
The pressure generation chamber 9 is made of chamber wall 1 and driving element, and chamber wall 1 is enclosed in the outside of driving element；
Driving element is made of top electrode 6, piezoelectric ceramics 5, lower electrode 7 and oscillating plate 4；Piezoelectric ceramics 5 is located at top electrode 6 and lower electrode
7, oscillating plate 4 is located in top electrode 6；When top electrode 6 and lower electrode 7 are powered simultaneously, piezoelectric ceramics 5 is because inverse piezoelectric effect is sent out
Change shape, and then oscillating plate 4 is caused to deform, and the deformation of oscillating plate 4 can cause pressure generation chamber 9 to generate volume change, squeeze pressure
Generate the ink in chamber 9；
The conduction part 8 is class " L " type channel, and cross sectional area is greater than or equal to the channel cross-section of restriction 10
Area makes ink be more likely to flow to conduction part 8；After ink is pressed against Vertical Channel by the horizontal channel of conduction part 8, ink
Flow direction be changed, due to when capillary force forces ink to flow back at nozzle 2,90 degree of conduction part 8 or turn close to 90 degree
The resistance for rolling over channel is big, has anti-return effect；
The restriction 10 is class " Z " type channel design, is divided into upper, middle and lower；Top is horizontal channel；In
Portion is Vertical Channel；Lower part is two horizontal channels composition, one jiao of two horizontal channels overlapping, outermost horizontal channel be higher than with
The horizontal channel that middle part Vertical Channel is connected, prevents ink from flowing back；
The length and width of the pressure generation chamber 9 is identical as the length and width of oscillating plate 4, the thickness of oscillating plate 4
For 2um.
The thickness of the top electrode 6 is 180nm；The thickness of lower electrode 7 is 230nm, and the thickness of piezoelectric ceramics 5 is 3um.
The nozzle is conical bore or straight hole or projecting apertures.
The 7 corresponding substrate 3 of lower electrode is removed, and driving element is made to be in vacant state, and piezoelectric ink jet drives
Dynamic element is located inside pressure generation chamber 9；Constraint is removed around driving element, and 4 amplitude of oscillating plate is big, and ink-jet is efficient, and
And it greatly simplifies manufacture craft and reduces manufacturing cost.
Beneficial effects of the present invention：
1. piezoelectric ink jet printing head structure can be prepared by a photoetching process, preparation process is simple, reproducible；
2. the printing head symmetrical expression restriction and conduction part structure have good anti-ink reflowing result；
3. the printing head structure can be made of silicon and polymer, manufacturing cost is low.
4. piezoelectric ceramics used in design structure is relatively thin, the corresponding base part of pressure generation chamber can be removed behaviour
Make, the driving element is in vacant state, and piezoelectric ink jet driving element is located at pressure generation chamber chamber interior, around driving element
Constraint is removed, and oscillating plate amplitude is big, and ink-jet is efficient, and is enormously simplified manufacture craft and reduced manufacturing cost.
Description of the drawings
Fig. 1 is the vertical view of piezoelectric ink jet printing head of the present invention；
Fig. 2 a, Fig. 2 b and the cross-sectional view of the structure that Fig. 2 c are one chamber of piezoelectric ink jet printing head of the present invention, i.e. Fig. 1 H-H
To sectional view；
Fig. 3 is the restriction structure chart of one chamber of piezoelectric ink jet printing head of the present invention；
Fig. 4 is the conduction part structure chart of one chamber of piezoelectric ink jet printing head of the present invention；
Fig. 5 is the vibration board structure figure of one chamber of piezoelectric ink jet printing head of the present invention；
Fig. 6 is the ink-feed channel structure chart of one chamber of piezoelectric ink jet printing head of the present invention；
Fig. 7 is the left view pressure generation chamber and driving element sectional view of one chamber of piezoelectric ink jet printing head of the present invention；
Fig. 8 is the nozzle arrangements figure of one chamber of piezoelectric ink jet printing head of the present invention；
In figure：1 chamber wall；2 nozzles；3 substrates；4 oscillating plates；5 piezoelectric ceramics；6 top electrodes；7 times electrodes；8 conduction parts；9
Pressure generation chamber；10 restrictions；11 ink-feed channels.
Specific implementation mode
To make the object, technical solutions and advantages of the present invention clearer, the attached drawing below in conjunction with the present invention and implementation
Example, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is the present invention
A part of the embodiment, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art are not having
The every other embodiment obtained under the premise of creative work is made, shall fall within the protection scope of the present invention.
A kind of piezoelectric ink jet printing head structure for preventing ink from flowing back, the piezoelectric ink jet printing head structure is by multiple only
Vertical chamber composition；
Each chamber includes nozzle 2, conduction part 8, pressure generation chamber 9, restriction 10 and ink-feed channel 11；Ink-feed channel 11
Arrival end be connected with print cartridge, ink-feed channel 11 is connected with restriction 10；Restriction 10 is connected with pressure generation chamber 9, pressure
Power generates chamber 9 and is connected with conduction part 8, and conduction part 8 is connected with nozzle 2.
The pressure generation chamber 9 is made of chamber wall 1 and driving element, and chamber wall 1 is enclosed in the outside of driving element；
Driving element is made of top electrode 6, piezoelectric ceramics 5, lower electrode 7 and oscillating plate 4；Piezoelectric ceramics 5 is located at top electrode 6 and lower electrode
7, oscillating plate 4 is located in top electrode 6；When top electrode 6 and lower electrode 7 are powered simultaneously, piezoelectric ceramics 5 is because inverse piezoelectric effect is sent out
Change shape, and then oscillating plate 4 is caused to deform, and the deformation of oscillating plate 4 can cause pressure generation chamber 9 to generate volume change, squeeze pressure
Generate the ink in chamber 9；
The cross sectional area of the conduction part 8 is greater than or equal to the cross sectional area of restriction 10, makes ink more
Tend to flow to conduction part 8；After ink is pressed against Vertical Channel by the horizontal channel of conduction part 8, the flow direction quilt of ink
Change, due to when capillary force forces ink to flow back at nozzle 2,90 degree of conduction part 8 or the resistance close to 90 degree of channels of transferring it is big,
With anti-return effect；
The restriction 10 is class " Z " type channel design, is divided into upper, middle and lower；Top is horizontal channel；In
Portion is Vertical Channel；Lower part is two horizontal channels composition, one jiao of two horizontal channels overlapping, outermost horizontal channel be higher than with
The horizontal channel that middle part Vertical Channel is connected, prevents ink from flowing back；
The length sides of the oscillating plate 4 are s, width edge t；
The conduction part 8 is class " L " type channel, and the side docked with pressure generation chamber 9 is m, the area docked with nozzle (2)
Domain be while (p) with while (q) where plane, the long side being vertically connected with side m is n, is r with the side m short sides being vertically connected, with side
The long side that p is vertically connected is o, and the short side being vertically connected with side p is q, while q with while r be vertically connected, while p with while o be connected, side (n)
Be connected with side (o), angle include be not limited to 90 degree, while (r) with while (q) be connected, angle includes but not limited to 90 degree, jointly
Surround class " L " type channel；
The restriction 10 is class " Z " type channel design, and the side docked with pressure generation chamber 9 is g, phase vertical with side g
Long side even is f, is h with the short side that side g is vertically connected, constitutes top；Be i when h is vertically connected, phase vertical with side f
Side even is e, constitutes middle part；Be j when i is vertically connected, and be d when e is vertically connected, be vertically connected with side d
While be c, and it is (l) when (a) is vertically connected and when (b) is vertically connected (a), is connected with ink-feed channel (11)
Region while (a) with while (l) where plane on, and be k when l is vertically connected, and be j when k is vertically connected, composition
Lower part；
The ink-feed channel (11) is pipe passageway, and a diameter of (w), the region being connected with print cartridge is the circle where (w)
On face, the short side being connected with busbar (v) is (u).
The length range of the side m of the conduction part 8 is 1um-10mm, and the length range of the side n of conduction part 8 is 1um-
The length range of 10mm, the side o of conduction part 8 are 1um-10mm, and the length range of the side p of conduction part 8 is 0-10mm, conduction part 8
The length range of side q be 0-10mm, the length range of the side r of conduction part 8 is 1um-10mm；
The length range of the side a of the restriction 10 is 1um-10mm, and the length range of the side b of restriction 10 is 0-
The length range of 10mm, the side c of restriction 10 are 0-10mm, and the length range of the side d of restriction 10 is 1um-10mm, restriction
The length range of 10 side e is 1um-10mm, and the length range of the side f of restriction 10 is 1um-10mm, the side g's of restriction 10
Length range is 1um-10mm, and the length range of the side h of restriction 10 is 1um-10mm, the length range of the side i of restriction 10
Length range for 1um-10mm, the side j of restriction 10 is 1um-10mm, and the length range of the side k of restriction 10 is 0-10mm,
The length range of the side l of restriction 10 is 1um-10mm；
The side v length ranges of the ink-feed channel 11 are 1um-10mm, and the length range of the diameter w of ink-feed channel 11 is
1um-10mm；
The altitude range of the restriction 10, the i.e. length range on the sides u of restriction 10 are 1um-10mm, and pressure generates
The altitude range of chamber 9, the i.e. length range on the sides u of pressure generation chamber 9 are 1um-10mm, the altitude range of conduction part 8 drains
The length range on the sides u in portion 8 is 1um-10mm；
The nozzle 2 is conical bore or straight hole or projecting apertures, the diameter dimension ranging from 10um-70um of nozzle 2, nozzle 2
Altitude range be 20um-8mm.
The thickness that the thickness of the oscillating plate 4 is 10nm-20um, the thickness of top electrode 6 is 100nm-300nm, lower electrode 7
Degree is 100nm-300nm, the thickness of piezoelectric ceramics 5 is 10nm-20um.
The while g length for being greater than or equal to restriction 10 in m length of the conduction part 8, the length of the side n of conduction part 8
More than or equal to the side f length of restriction 10, the length of side o is greater than or equal to the diameter of nozzle 2, the length of the side i of restriction 10
The length of the length of degree and the o when the sum of length of g is less than or equal to conduction part 8, the side o of conduction part 8 is greater than or equal to limit
The length of 10 side e of stream portion, the length of i when the length in o of conduction part 8 is greater than or equal to restriction 10, the side n's of conduction part 10
Length is greater than or equal to the sum of the length of the p in the length and conduction part 10 of r of conduction part 8, and the length of the side o of conduction part 10 is more than
Or the sum of the length equal to the q in the length and conduction part 10 of m of conduction part 10.
The height of the restriction 10 is equal to the height of conduction part 8, and the height of pressure generation chamber 9 is greater than or equal to drainage
The height in portion 8；
The length of the side j of the restriction 10 is more than or equal to the height of nozzle 2；
The difference of the length of the side m of the length and conduction part 8 of o when the length in q of the conduction part 8 is equal to conduction part 8,
The difference of the length of the side p of the length and conduction part 8 of n when the length in r of conduction part 8 is equal to conduction part 8.
The length and width of the pressure generation chamber 9 is identical as the length and width of oscillating plate 4.
The 9 corresponding substrate 3 of pressure generation chamber is removed, and driving element is made to be in vacant state, piezo jet
Black driving element is located inside pressure generation chamber 9.
1 material of chamber wall of the pressure generation chamber 9 is silicon, alloy or polymer；4 material of oscillating plate is oxygen
SiClx, silicon nitride or polymer.
5 shape of piezoelectric ceramics includes but not limited to truncated rectangular pyramids.
Embodiment 1
As shown in Figure 1, a kind of piezoelectric ink jet printing head for preventing ink from flowing back of the present embodiment, including multiple chambers,
As shown in figs. 2 a-c, each chamber includes：Ink-feed channel 11, pressure generation chamber 9, conduction part 8, nozzle 2, powers on restriction 10
Pole 6, piezoelectric ceramics 5, lower electrode 7, oscillating plate 4.
As shown in figure 3, the restriction structure size of the design is：The length on the sides a is 50um, and the length on the sides b is 150um, c
The length on side is 25um, and the length on the sides d is 50um, and the length on the sides e is 150um, and the length on the sides length 150um, g on the sides f is
The length on the side 50um, h is 100um, and the length on the sides i is 150um, and the length on the sides j is 150um, and k edge lengths are 25um, and the sides l are
100um, as shown in fig. 6, the height of pressure generation chamber, the height of restriction, the height of conduction part are equal to the length on the sides u, i.e.,
Three's height is all 50um, and the length on the sides v of ink-feed channel is 300um, a diameter of 100um of ink-feed channel.
As shown in figure 4, the conduction part structure size of the design is：The length on the sides m is 100um, and the length on the sides n is 200um,
The length on the sides o is 200um, and the length on the sides p is 100um, and the length on the sides q is 100um, and the length on the sides r is 100um.
As shown in figure 5, the length on the sides s of the oscillating plate of the design is 1500um, the length on the sides t is 300um.Such as Fig. 7 institutes
To show, the length and width of pressure generation chamber is identical with the length and width of oscillating plate, and the thickness x of oscillating plate is 2um, top electrode,
Piezoelectric ceramics, lower electrode length be all 1500um, width is all 280um, and top electrode thickness is 180nm, and lower thickness of electrode is
The thickness y of 230nm, piezoelectric ceramics are 3um.As shown in figure 8, nozzle is conical bore, hole diameter 20um, diameter macropores are
40um, height 50um.
A kind of piezoelectric ink jet printing head for preventing ink from flowing back of the present embodiment, manufacture craft is simple, at low cost, work
Skill is reproducible and easy to implement.
Finally it should be noted that：The above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations；Although
Present invention has been described in detail with reference to the aforementioned embodiments, it will be understood by those of ordinary skill in the art that：It still may be used
To modify to the technical solution recorded in previous embodiment, either which part or all technical features are equal
It replaces；And these modifications or replacements, the model for technical solution of the embodiment of the present invention that it does not separate the essence of the corresponding technical solution
It encloses.
Claims (10)
1. a kind of piezoelectric ink jet printing head structure for preventing ink from flowing back, which is characterized in that the piezoelectric ink jet printing spray
Header structure is made of multiple independent chambers；
Each chamber includes nozzle (2), conduction part (8), pressure generation chamber (9), restriction (10) and ink-feed channel (11)；Ink supply
The arrival end in channel (11) is connected with print cartridge, and ink-feed channel (11) is connected with restriction (10)；Restriction (10) is produced with pressure
Raw chamber (9) is connected, and pressure generation chamber (9) is connected with conduction part (8), and conduction part (8) is connected with nozzle (2)；
The pressure generation chamber (9) is made of chamber wall (1) and driving element, and chamber wall (1) is enclosed in the outer of driving element
Portion；Driving element is made of top electrode (6), piezoelectric ceramics (5), lower electrode (7) and oscillating plate (4)；Piezoelectric ceramics (5) is located at upper
Electrode (6) and lower electrode (7), oscillating plate (4) are located in top electrode (6)；When top electrode (6) and lower electrode (7) while when being powered,
Because inverse piezoelectric effect deforms, and then oscillating plate (4) is caused to deform, oscillating plate (4) deformation can cause to press piezoelectric ceramics (5)
Power generates chamber (9) and generates volume change, and squeeze pressure generates the ink in chamber (9)；
The cross sectional area of the conduction part (8) is greater than or equal to the cross sectional area of restriction (10), makes ink more
Tend to flow to conduction part (8)；After ink is pressed against Vertical Channel by the horizontal channel of conduction part (8), the flowing side of ink
To being changed, due to when capillary force forces ink to flow back at nozzle (2), 90 degree of conduction part (8) or close to 90 degree of turnover channels
Resistance it is big, have anti-return effect；
The restriction (10) is class " Z " type channel design, is divided into upper, middle and lower；Top is horizontal channel；Middle part
For Vertical Channel；Lower part forms for two horizontal channels, and one jiao of overlapping of two horizontal channels, outermost horizontal channel is higher than in
The horizontal channel that portion's Vertical Channel is connected, prevents ink from flowing back.
2. piezoelectric ink jet printing head structure according to claim 1, which is characterized in that be defined as follows：
The length sides of the oscillating plate (4) are (s), and width edge is (t)；
The conduction part (8) is class " L " type channel, and the side docked with pressure generation chamber (9) is (m), is docked with nozzle (2)
Region be while (p) with while (q) where plane, the long side being vertically connected with side (m) is (n), the short side being vertically connected with side (m)
Be (o) with the long side that side (p) is vertically connected for (r), be (q) with the short side that side (p) is vertically connected, while (q) with while (r) it is vertical
Be connected, while (p) with while (o) be connected, while (n) with while (o) be connected, angle including being not limited to 90 degree, while (r) with while (q) be connected,
Its angle includes but not limited to 90 degree, surrounds class " L " type channel jointly；
The restriction (10) is class " Z " type channel design, and the side docked with pressure generation chamber (9) is (g), is hung down with side (g)
Directly connected long side is (f), is (h) with the short side that side (g) is vertically connected, constitutes top；It is with when (h) is vertically connected
(i), be (e) when (f) is vertically connected, constitute middle part；Be (j) when (i) is vertically connected, phase vertical with side (e)
Side even is (d), and is (c) when (d) is vertically connected, and is (b) when (c) is vertically connected, and is vertically connected with side (b)
Side (a), and be (l) when (a) is vertically connected, the region being connected with ink-feed channel (11) while (a) with while (l) where
Plane on, and be (k) when (l) is vertically connected, and be (j) when (k) is vertically connected, constitute lower part；
The ink-feed channel (11) is pipe passageway, a diameter of (w), the region being connected with print cartridge on the disc where (w),
The short side being connected with busbar (v) is (u).
3. piezoelectric ink jet printing head structure according to claim 2, which is characterized in that
The length range on the side (m) of the conduction part (8) is 1um-10mm, and the length range on the side (n) of conduction part (8) is
The length range of 1um-10mm, the side (o) of conduction part (8) are 1um-10mm, and the length range on the side (p) of conduction part (8) is 0-
The length range of 10mm, the side (q) of conduction part (8) are 0-10mm, and the length range on the side (r) of conduction part (8) is 1um-10mm；
The length range on the side (a) of the restriction (10) is 1um-10mm, and the length range on the side (b) of restriction (10) is
The length range of 0-10mm, the side (c) of restriction (10) are 0-10mm, and the length range on the side (d) of restriction (10) is 1um-
The length range of 10mm, the side (e) of restriction (10) are 1um-10mm, and the length range on the side (f) of restriction (10) is 1um-
The length range of 10mm, the side (g) of restriction (10) are 1um-10mm, and the length range on the side (h) of restriction (10) is 1um-
The length range of 10mm, the side (i) of restriction (10) are 1um-10mm, and the length range on the side (j) of restriction (10) is 1um-
The length range of 10mm, the side (k) of restriction (10) are 0-10mm, and the length range on the side (l) of restriction (10) is 1um-
10mm；
Side (v) length range of the ink-feed channel (11) is 1um-10mm, the length model of the diameter (w) of ink-feed channel (11)
It encloses for 1um-10mm；
The altitude range of the restriction (10), the i.e. length range on side (u) of restriction (10) are 1um-10mm, pressure production
The altitude range of raw chamber (9), the i.e. length range on side (u) of pressure generation chamber (9) are 1um-10mm, the height of conduction part (8)
The length range on side (u) of range, i.e. conduction part (8) is 1um-10mm；
The nozzle (2) is conical bore or straight hole or projecting apertures, the diameter dimension ranging from 10um-70um of nozzle (2), nozzle
(2) altitude range is 20um-8mm.
4. piezoelectric ink jet printing head structure according to claim 3, which is characterized in that the thickness of the oscillating plate (4)
Degree is 10nm-20um, and the thickness of top electrode (6) is 100nm-300nm, and the thickness of lower electrode (7) is 100nm-300nm；Piezoelectricity
The thickness of ceramic (5) is 10nm-20um, and the piezoelectric ceramics (5) shape includes but not limited to truncated rectangular pyramids.
5. piezoelectric ink jet printing head structure according to claim 4, which is characterized in that
While (g) length for being greater than or equal to restriction (10) in (m) length of the conduction part (8), the side of conduction part (8)
(n) length is greater than or equal to side (f) length of restriction (10), and the length on side (o) is greater than or equal to the diameter of nozzle (2),
The length at (i) of restriction (10) with while (g) the sum of length be less than or equal to conduction part (8) side (o) length, drainage
The length of (e), the length on the side (o) of conduction part (8) are more than when the length at (o) in portion (8) is greater than or equal to restriction (10)
Or the length equal to restriction (10) side (i), when the length at (n) of conduction part (10) is greater than or equal to conduction part (8) (r)
The sum of the length of length and conduction part (10) side (p), when the length at (o) of conduction part (10) is greater than or equal to conduction part (10)
(m) the sum of the length of length and conduction part (10) side (q).
6. piezoelectric ink jet printing head structure according to claim 5, which is characterized in that
The height of the restriction (10) is equal to the height of conduction part (8), and the height of pressure generation chamber (9), which is greater than or equal to, draws
The height in stream portion (8)；
The length on the side (j) of the restriction (10) is more than or equal to the height of nozzle (2)；
The side (m) of the length and conduction part (8) of (o) when the length at (q) of the conduction part (8) is equal to conduction part (8)
The difference of length, the length on the side (p) of the length and conduction part (8) of (n) when the length at (r) of conduction part (8) is equal to conduction part (8)
The difference of degree.
7. piezoelectric ink jet printing head structure according to claim 6, which is characterized in that the pressure generation chamber (9)
Length and width it is identical as the length and width of oscillating plate (4).
8. piezoelectric ink jet printing head structure according to claim 7, which is characterized in that the pressure generation chamber (9)
Corresponding substrate (3) is removed, and driving element is made to be in vacant state, and piezoelectric ink jet driving element is located at pressure generation chamber
(9) internal.
9. piezoelectric ink jet printing head structure according to claim 8, which is characterized in that the pressure generation chamber (9)
Chamber wall (1) material be silicon, alloy or polymer；Described oscillating plate (4) material is silica, silicon nitride or polymer.
10. printing head structure according to claim 1, which is characterized in that the restriction, pressure generation chamber, drainage
The integrated structure in portion is by X-Y scheme structure by photoetching or dry etching or the techniques such as wet etching or sacrificial layer technology
Manufactured three-dimensional structure.
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