CN108735635A - A kind of circulated sprinkling cleaning equipment - Google Patents

A kind of circulated sprinkling cleaning equipment Download PDF

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Publication number
CN108735635A
CN108735635A CN201810538529.7A CN201810538529A CN108735635A CN 108735635 A CN108735635 A CN 108735635A CN 201810538529 A CN201810538529 A CN 201810538529A CN 108735635 A CN108735635 A CN 108735635A
Authority
CN
China
Prior art keywords
door
hanging bracket
shaped hanging
liquid storage
storage babinet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
CN201810538529.7A
Other languages
Chinese (zh)
Inventor
曾皓
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhengzhou Heng Bo Amperex Technology Ltd
Original Assignee
Zhengzhou Heng Bo Amperex Technology Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhengzhou Heng Bo Amperex Technology Ltd filed Critical Zhengzhou Heng Bo Amperex Technology Ltd
Priority to CN201810538529.7A priority Critical patent/CN108735635A/en
Publication of CN108735635A publication Critical patent/CN108735635A/en
Withdrawn legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67017Apparatus for fluid treatment
    • H01L21/67028Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67051Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67017Apparatus for fluid treatment
    • H01L21/67028Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67057Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/547Monocrystalline silicon PV cells

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Cleaning By Liquid Or Steam (AREA)

Abstract

The invention discloses a kind of circulated sprinkling cleaning equipments, it is related to cleaning device technical field, the present invention includes the liquid storage babinet of bottom, the liquid storage top of the box is provided with door-shaped hanging bracket, one end is provided with soaking compartment on liquid storage babinet on door-shaped hanging bracket, the other end is provided with conveying mechanism, the door-shaped hanging bracket inner top is provided with spraying mechanism, spraying mechanism is connected to by circulating line with liquid storage babinet, the spiral hitch gear for driving workpiece lifting to be cleaned is provided on the door-shaped hanging bracket, the driving mechanism for driving spiral hitch gear to be moved along conveying direction is provided on the door-shaped hanging bracket, the present invention has simple in structure, cleaning is without dead angle, spray water circulation use, economical environment-protective, the high advantage of cleaning efficiency.

Description

A kind of circulated sprinkling cleaning equipment
Technical field
The present invention relates to solar silicon wafers cleaning device fields, more particularly to a kind of circulated sprinkling cleaning equipment.
Background technology
Solar energy is a kind of clean regenerative resource, and the solar cell based on photovoltaic effect has fine answer With foreground, solar cell is the device for directly luminous energy being converted to by photoelectric effect or photochemical effect electric energy.As long as It is arrived by illumination, moment can output voltage and electric current.Solar cell is a kind of green product, and environment will not be caused dirty Dye, is renewable resource, in the case of current energy shortage, has wide development prospect.Solar cell is used in The difference of material can be divided into:Silicon solar cell, multicomponent compound film solar cell, polymer multi-layer modified electrode type Solar cell, nano-crystalline solar battery, organic solar batteries, plastic solar cell, wherein silicon solar cell are Development is most ripe at present.
Silicon chip of solar cell surface in cutting process can remain a large amount of cutting liquid, silica flour, silica and other gold Belong to the impurity such as ion, therefore needs silicon chip of solar cell feeding cleaning device first carrying out water prewashing miscellaneous on its surface to remove Matter.
But silicon chip of solar cell is susceptible to the dead angle not cleaned to when being cleaned in existing precleaning unit, this It just needs silicon chip of solar cell carrying out the water that secondary cleaning either extends the time of spray or increasing sprays, it is above-mentioned Cleaning way is if you need to rinse silicon chip of solar cell well then not only time-consuming but also water wasting.
Invention content
In order to solve the problems, such as that existing precleaning unit is susceptible to that cleaning dead angle, waste water, efficiency are low, and the present invention provides one Kind circulated sprinkling cleaning equipment.
The present invention specifically uses following technical scheme to achieve the goals above:
A kind of circulated sprinkling cleaning equipment, includes the liquid storage babinet of bottom, and the liquid storage top of the box is provided with gate Hanger, one end is provided with soaking compartment on the liquid storage babinet on door-shaped hanging bracket, and the other end is provided with conveying mechanism, and the gate is hung Frame inner top is provided with spraying mechanism, and spraying mechanism is connected to liquid storage babinet by circulating line, is set on the door-shaped hanging bracket It is equipped with the spiral hitch gear for driving workpiece lifting to be cleaned, is provided on the door-shaped hanging bracket and drives spiral hitch gear edge The driving mechanism of conveying direction movement.
Further, spiral hitch gear includes the mobile mounting base that can be moved back and forth at the top of door-shaped hanging bracket, mobile peace It is provided with motor on dress seat, the output end of motor is provided with winding roll, and the rope made of hemp is wound on winding roll, and the connection of rope made of hemp bottom is useful In the hook of lanyard cleaning workpiece.
Further, the driving mechanism include traction rope, be arranged door-shaped hanging bracket upper left end driving motor and Steering fixed pulley in door-shaped hanging bracket upper right end, rotating disc and movement of described traction rope one end around driving motor are set Mounting base left end connects, and the traction rope other end connect around fixed pulley is turned to mobile mounting base right end.
Further, the spraying mechanism includes the main spray bar and branch spray tube for being fixed on door-shaped hanging bracket inner top.
Further, it is provided with filter plate in the liquid reserve tank body, liquid storage babinet is divided into sedimentation basin and clear by filter plate Pond, circulating line are connect with clear water reserviors, and circulating pump is provided on circulating line.
Beneficial effects of the present invention are as follows:
1, mechanism of the present invention is simple, and when work, the hollow out cleaning case for filling silicon chip to be cleaned is hung over spiral hitch gear On, spiral hitch gear is in door-shaped hanging bracket upper edge soaking compartment center movement, and when reaching center, spiral hitch gear is slowly Hollow out cleaning case is driven to move down, the hollow out cleaning case after immersion is slowly driving hollow out soaking compartment by spiral hitch gear Online movement, is then placed on conveying mechanism, and spraying mechanism carries out cleaning showers to hollow out cleaning case, repeated multiple times spray and Submergence keeps Wafer Cleaning to be cleaned clean, and there is no cleaning dead angles, improve cleaning efficiency and using water wisely.
Description of the drawings
Fig. 1 is the structural schematic diagram of the present invention;
Fig. 2 is the structural schematic diagram of spiral hitch gear;
Fig. 3 is the structural schematic diagram of driving mechanism;
Reference numeral:1- liquid storage babinets, 1-1- sedimentation basins, 1-2- clear water reserviors, 2- soaking compartments, 3- door-shaped hanging brackets, 4- drivings Mechanism, 5- spiral hitch gears, 5-1- movement mounting bases, 5-2- motors, 5-3- winding rolls, the 5-4- ropes made of hemp, 5-5- hooks, 6- are engraved Empty cleaning case, 7- spraying mechanisms, 7-1- branch spray tubes, the main spray bars of 7-2-, 8- circulating lines, 9- circulating pumps, 10- conveyers Structure, 11- filter plates.
Specific implementation mode
In order to which those skilled in the art are better understood from the present invention, below in conjunction with the accompanying drawings with following embodiment to the present invention It is described in further detail.
Embodiment 1
As shown in Fig. 1 to 3, the present embodiment provides the liquid storage babinet 1 of a kind of circulated sprinkling cleaning equipment, including bottom, institutes 1 top of liquid storage babinet stated is provided with door-shaped hanging bracket 3, and one end is provided with soaking compartment 2 on the liquid storage babinet 1 on door-shaped hanging bracket 3, separately One end is provided with conveying mechanism 10, and 3 inner top of door-shaped hanging bracket is provided with spraying mechanism 7, and spraying mechanism 7 passes through circulation pipe Road 8 is connected to liquid storage babinet 1, and the spiral hitch gear 5 for driving workpiece lifting to be cleaned is provided on the door-shaped hanging bracket 3, The driving mechanism 4 for driving spiral hitch gear 5 to be moved along conveying direction, the gate are provided on the door-shaped hanging bracket 3 3 top of hanger is provided with the guide groove coordinated with spiral hitch gear 5.
Embodiment 2
The present embodiment is further optimized on the basis of embodiment 1, specifically:
Spiral hitch gear 5 includes can be in the mobile mounting base 5-1 that 3 top of door-shaped hanging bracket moves back and forth, mobile mounting base Motor 5-2 is provided on 5-1, the output end of motor 5-2 is provided with winding roll 5-3, rope made of hemp 5-4 is wound on winding roll 5-3, fiber crops The bottoms rope 5-4 are connected with the hook 5-5 for being linked with cleaning workpiece.
The driving mechanism 4 include traction rope 4-2, be arranged 3 upper left end of door-shaped hanging bracket driving motor 4-1 and set The steering fixed pulley 4-3 in 3 upper right end of door-shaped hanging bracket is set, described one end traction rope 4-2 bypasses the rotation of driving motor 4-1 Disk is connect with mobile mounting base 5-1 left ends, and the traction rope 4-2 other ends are around steering fixed pulley 4-3 and mobile mounting base 5-1 right ends connect.
The spraying mechanism 7 includes the main spray bar 7-2 and branch spray tube 7-1 for being fixed on 3 inner top of door-shaped hanging bracket.
It is provided with filter plate 11 in the liquid storage babinet 1, liquid storage babinet 1 is divided into sedimentation basin 1-1 and clear by filter plate 11 Pond 1-2, circulating line 8 are connect with clear water reserviors 1-2, and circulating pump 9 is provided on circulating line 8.
The above, only presently preferred embodiments of the present invention, are not intended to limit the invention, patent protection model of the invention It encloses and is subject to claims, equivalent structure variation made by every specification and accompanying drawing content with the present invention, similarly It should be included within the scope of the present invention.

Claims (5)

1. a kind of circulated sprinkling cleaning equipment includes the liquid storage babinet (1) of bottom, which is characterized in that the liquid storage babinet (1) Top is provided with door-shaped hanging bracket (3), and one end is provided with soaking compartment (2), the other end on the liquid storage babinet (1) on door-shaped hanging bracket (3) It is provided with conveying mechanism (10), the door-shaped hanging bracket (3) inner top is provided with spraying mechanism (7), and spraying mechanism (7) is by following Endless tube road (8) is connected to liquid storage babinet (1), and the spiral for driving workpiece lifting to be cleaned is provided on the door-shaped hanging bracket (3) Hitch gear (5) is provided with the driving for driving spiral hitch gear (5) to be moved along conveying direction on the door-shaped hanging bracket (3) Mechanism (4).
2. circulated sprinkling cleaning equipment according to claim 1, which is characterized in that spiral hitch gear (5) includes can be The mobile mounting base (5-1) moved back and forth at the top of door-shaped hanging bracket (3) moves and is provided with motor (5-2) in mounting base (5-1), electricity The output end of machine (5-2) is provided with winding roll (5-3), and the rope made of hemp (5-4) is wound on winding roll (5-3), and the bottom the rope made of hemp (5-4) connects It is connected to the hook (5-5) for being linked with cleaning workpiece.
3. circulated sprinkling cleaning equipment according to claim 2, which is characterized in that the driving mechanism (4) includes leading Messenger (4-2), setting are in the driving motor (4-1) of door-shaped hanging bracket (3) upper left end and setting in door-shaped hanging bracket (3) upper right end Steering fixed pulley (4-3), rotating disc and mobile mounting base of the one end the traction rope (4-2) around driving motor (4-1) (5-1) left end connects, and the traction rope (4-2) other end is around steering fixed pulley (4-3) and mobile mounting base (5-1) right end Connection.
4. circulated sprinkling cleaning equipment according to claim 1, which is characterized in that the spraying mechanism (7) includes solid It is scheduled on the main spray bar (7-2) and branch spray tube (7-1) of door-shaped hanging bracket (3) inner top.
5. circulated sprinkling cleaning equipment according to claim 1 or 2, which is characterized in that set in the liquid storage babinet (1) It is equipped with filter plate (11), liquid storage babinet (1) is divided into sedimentation basin (1-1) and clear water reserviors (1-2), circulating line by filter plate (11) (8) it is connect with clear water reserviors (1-2), circulating pump (9) is provided on circulating line (8).
CN201810538529.7A 2018-05-30 2018-05-30 A kind of circulated sprinkling cleaning equipment Withdrawn CN108735635A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810538529.7A CN108735635A (en) 2018-05-30 2018-05-30 A kind of circulated sprinkling cleaning equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810538529.7A CN108735635A (en) 2018-05-30 2018-05-30 A kind of circulated sprinkling cleaning equipment

Publications (1)

Publication Number Publication Date
CN108735635A true CN108735635A (en) 2018-11-02

Family

ID=63936725

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810538529.7A Withdrawn CN108735635A (en) 2018-05-30 2018-05-30 A kind of circulated sprinkling cleaning equipment

Country Status (1)

Country Link
CN (1) CN108735635A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110142327A (en) * 2019-05-27 2019-08-20 唐威豪 A kind of stamping line of energy self-emptying
CN112275050A (en) * 2020-10-20 2021-01-29 湖南零零柒环保科技有限公司 Building site raise dust purifies adsorbs suppression equipment with dust

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110142327A (en) * 2019-05-27 2019-08-20 唐威豪 A kind of stamping line of energy self-emptying
CN112275050A (en) * 2020-10-20 2021-01-29 湖南零零柒环保科技有限公司 Building site raise dust purifies adsorbs suppression equipment with dust

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Application publication date: 20181102