CN108732431A - Electrostatic monitoring system - Google Patents
Electrostatic monitoring system Download PDFInfo
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- CN108732431A CN108732431A CN201710271568.0A CN201710271568A CN108732431A CN 108732431 A CN108732431 A CN 108732431A CN 201710271568 A CN201710271568 A CN 201710271568A CN 108732431 A CN108732431 A CN 108732431A
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- electrostatic
- impedance
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- control circuit
- shell
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
- G01R29/24—Arrangements for measuring quantities of charge
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- General Physics & Mathematics (AREA)
- Measurement Of Resistance Or Impedance (AREA)
Abstract
A kind of electrostatic monitoring system is suitable for being arranged on a test platform, including a coulostatic analysis device, an electrostatic testing apparatus and a ground detection device；The coulostatic analysis device is set to the control circuit in the shell comprising a shell and one；The electrostatic testing apparatus includes an electrostatic detection group, and the control circuit to be electrically connected with a personnel, with real-time judge, whether the personnel carry electrostatic；The ground detection device includes an earthing detection group, and the control circuit to be electrically connected with test platform, with real-time judge, whether the determinand is grounded；By the technical program, when the test platform is grounded really, and the personnel are without electrostatic, the control circuit control of the coulostatic analysis device externally provides power supply, to provide personnel operating environment appropriate.
Description
Technical field
The invention relates to a kind of electrostatic monitoring system, especially a kind of electrostatic prison being monitored using electrostatic hand ring
Control system.
Background technology
Integrated circuit is that a variety of electronic building brick microminiaturizations such as circuit, semiconductor, transistor are made on silicon chip.And
The integrated circuit of microminiaturization can easily design electrostatic isolation and the structure of protection, prevent electrostatic bombardment integrated circuit and cause
Small electronic building brick damage.
But the integrated circuit made is not completed, the structure not with any electrostatic isolation and protection, therefore in integrated electricity
The production environment on road, it is necessary to must all be grounded the equipment (including the objects such as tables and chairs) in environment, operator must also be worn
The dust-free clothes for low resistance, avoid integrated circuit from being destroyed by electrostatic.
At present in the manufacturing process of integrated circuit, still it can not be automated there are many manufacturing process, it is necessary to rely on operation
The operation of member, the equipment in the operating environment of operator must be grounded, and the body of operator must be also grounded, to avoid production
Raw static buildup.
Current operator and equipment used in can not learning whether proper grounding, factory service should be by all equipment
Under the conditions of proper grounding obtains, when operation, only needs standard operating procedure (SOP, the Standard Operating according to operator
Procedures regulation), integrated circuit normal operation under conditions of no electrostatic can be allowed by wearing electrostatic hand ring.
Therefore when problem occurs for the ground connection of environmental facility, it is possible to equipment or personnel be made to generate electrostatic.For example,
Lock at ground connection sets screw and falls off, or ground wire is pullled by external force and breaks unexpected when occurring, and operator can not
It learns any warning information, the manufacturing operation of integrated circuit will not be stopped, integrated circuit will be made to be destroyed by electrostatic, and meet with
By heavy losses.
Therefore, how to confirm and do not have electrostatic generation in the manufacturing environment of integrated circuit, and finding that there is electrostatic to generate
Risk when, immediately notify operator stop operation, be the relevant technologies to avoid integrated circuit in manufacturing process by electrostatic breakdown
There is an urgent need for the targets of effort by personnel.
Invention content
In view of this, the purpose of the invention is to provide a kind of electrostatic monitoring system, it is flat in a test to be suitable for setting
On platform, it includes a coulostatic analysis device, electrostatic detection dress which, which has a static ground wire, the electrostatic monitoring system,
It sets and a ground detection device.
The coulostatic analysis device include a shell, one be set in the shell control circuit, one be set to the shell
Power input port, one are set to the information display section of the shell, one are set to the electrostatic detection port of the shell and one are set to
The earthing detection port of the shell, the control circuit and the power input port, the information display section, the electrostatic detection port, and
The earthing detection port is electrically connected.
The electrostatic testing apparatus is set to the shell, and includes an electrostatic detection group, and one end of the electrostatic detection group can be divided
Liftoff to be set to electrostatic detection port, the other end is connect with the skin of a personnel, which is obtained by the electrostatic detection group
The human body impedance of the personnel, to judge whether the personnel carry electrostatic.
The ground detection device is set to the shell, and includes an earthing detection group, one end of the earthing detection group with should
Earthing detection port connects, and the other end is connect with the test platform, which obtains the electrostatic by the earthing detection group and connect
The impedance value of ground wire, to judge whether the test platform is grounded.
The another technological means of the present invention is to be that above-mentioned electrostatic detection group has one to be inserted in the electrostatic detection
Port plug end, one with this plug end connection current potential transmission line, an electrostatic hand ring and two being connect with the current potential transmission line
A sheet metal being set on the electrostatic hand ring.
Another technological means of the present invention is to be that above-mentioned earthing detection port has a measuring point and an earth point,
The earthing detection group has the ground connection that the earth point is grounded by the connection measuring point with the measurement line of the test platform and one
Line.
Another technological means of the present invention, is to be that above-mentioned electrostatic detection group is electrically connected with the control circuit, the control
Circuit is electrically connected with the earth point, so that the electrostatic testing apparatus guides the electrostatic with the personnel.
The another technological means of the present invention, is to be that above-mentioned coulostatic analysis device is also set in the shell simultaneously comprising one
The power supply output port being electrically connected with the power input port, which has one to be set to the power input port and the power supply is defeated
Control switch between going out of the port, when the control circuit judges that impedance is higher than personnel's impedance upper limit value or the test with the personnel
When the impedance of platform is higher than an impedance ground upper limit value, can control control switch open circuit keeps the power supply output port externally defeated
Go out power supply, when the control circuit judges that impedance is less than the resistance of personnel's impedance upper limit value and the test platform with the personnel
When resisting less than the impedance ground upper limit value, can control the control Switching Power Supply short circuit keeps the external output of power supply output port continuation electric
Source.
Another technological means of the present invention is to be that above-mentioned coulostatic analysis device also divides comprising one to provide the electrostatic
The correction component of analysis apparatus benchmark resistance value and one be set to the shell and be electrically connected with the control circuit externally sending out police
The alert component of report.
The present invention another technological means, be to be above-mentioned electrostatic monitoring system, also include another coulostatic analysis device,
Another electrostatic testing apparatus, another ground detection device and a monitoring device, each coulostatic analysis device are also set to comprising one
The network port of the shell, the monitoring device include a monitoring server being connect with several network ports, with several electrostatic
Analytical equipment is transmitted into row information, when coulostatic analysis device therein judges that impedance is higher than in personnel's impedance with the personnel
The impedance of limit value or the test platform be higher than the impedance ground upper limit value when, can send out a warning information give the monitoring server,
And several coulostatic analysis devices can continue impedance measurement information being stored in the monitoring server.
The another technological means of the present invention is to be that above-mentioned monitoring server has an alarm modules, a timing module,
And a data outputting module, the alarm modules are externally to send out a warning message, and the timing module is calculating therein one
Coulostatic analysis device sends out the time of the warning information, and the data outputting module is to by stored any coulostatic analysis device
Impedance measurement information externally transmits.
Another technological means of the present invention is to be that above-mentioned monitoring server also has an alarm setting value module,
To carry out personnel's impedance upper limit value and the setting of the impedance ground upper limit value to several coulostatic analysis devices respectively.
Another technological means of the present invention is to be that above-mentioned monitoring server also has a real-time display module and one
History has access to module, and the measurement information of the real-time display module real-time display several coulostatic analysis devices, the history has access to mould
Block externally shows the information of storage.
The beneficial functional of the present invention is that the coulostatic analysis device is by the ground detection device real-time confirmation test platform
Whether proper grounding, then whether carry electrostatic by the electrostatic testing apparatus real-time measurement personnel.When the test platform connects really
Ground, and when the personnel are without electrostatic, the control circuit of the coulostatic analysis device controls the output port of power source and externally provides electricity
Source, to provide personnel operating environment appropriate.
Description of the drawings
Fig. 1 is the schematic elevation view of the first preferred embodiment of electrostatic monitoring system of the present invention；
Fig. 2 is the schematic rear view of the first preferred embodiment of electrostatic monitoring system of the present invention；
Fig. 3 is that the first preferred embodiment of electrostatic monitoring system of the present invention is applied to the schematic diagram of personnel；
Fig. 4 is the schematic diagram of the control switch of the first preferred embodiment of electrostatic monitoring system of the present invention；
Fig. 5 is the schematic diagram of the ground connection of the electrostatic testing apparatus of the first preferred embodiment of electrostatic monitoring system of the present invention；
Fig. 6 is that the first preferred embodiment of electrostatic monitoring system of the present invention is applied to the schematic diagram of a test platform；
Fig. 7 is the schematic diagram of the second preferred embodiment of electrostatic monitoring system of the present invention；
Fig. 8 is the schematic rear view of the coulostatic analysis device of the second preferred embodiment of electrostatic monitoring system of the present invention；
Fig. 9 is the schematic diagram of the third preferred embodiment of electrostatic monitoring system of the present invention.
Symbolic indication in figure：
21 test platforms；22 static ground wires；23 personnel；24 electrostatic groundings connect main line；3 coulostatic analysis devices；30
Alert component；31 shells；32 control circuits；321 power switches；322 control switches；33 power input ports；34 power supplys
Output port；35 information display sections；36 electrostatic detection ports；37 earthing detection ports；371 measuring points；372 earth points；38
Correct component；39 network ports；4 electrostatic testing apparatus；41 electrostatic detection groups；411 plug end；412 current potential transmission lines；
413 electrostatic hand rings；414 sheet metals；5 ground detection devices；51 earthing detection groups；511 measure line；512 ground wires；6
Monitoring device；61 monitoring servers；611 alarm modules；612 timing modules；613 data outputting modules；614 alarm numbers
It is worth setting module；615 real-time display modules；616 history have access to module.
Specific implementation mode
Related Applications Patent characteristic for the present invention and technology contents, in following cooperation with reference to three preferable realities of schema
In the detailed description for applying example, can clearly it present.It should be noted that similar component is with identical before being described in detail
Number indicate.
Refering to fig. 1, it is a kind of first preferred embodiment of electrostatic monitoring system of the present invention, including an electrostatic point shown in 2,3
Analysis apparatus 3, an electrostatic testing apparatus 4 and a ground detection device 5.
First preferred embodiment is suitable for being arranged on a test platform 21, to judge whether the test platform 21 is correct
Ground connection, the test platform 21 are equipment or object in semiconductor operating environment, for example, are made in semiconductor manufacture flow path
The objects such as desk, chair, shelf, cart used in instrument and equipment or semiconductor operation are all the test platform
21 one kind.
It is an electric wire, the static ground wire that the test platform 21, which has a static ground wire 22, the static ground wire 22,
22 one end is locked on the test platform 21, and the other end of the static ground wire 22 connect main line 24 with an electrostatic grounding and is electrically connected
It connects, the test platform 21 is allow to be grounded.Electrostatic grounding connection main line 24 is set in plant area and is grounded really,
To provide equipment or the object electrical connection of plant area, electrostatic is further imported into the earth.
In general the type being grounded is divided into four kinds, and be respectively struck by lightning ground connection, system earth, equipment ground and electrostatic connect
Ground.The static ground wire connection main line 24 of the present invention is electrostatic grounding, is responsible for the electrostatic charge of the equipment or object that will connect
Import the earth.
The coulostatic analysis device 3 is set to this comprising the control circuit 32, one that a shell 31, one is set in the shell 31
The power input port 33, one of shell 31 be set to the shell 31 power supply output port 34, one be set to the shell 31 information it is aobvious
Show that portion 35, one is set to the electrostatic detection port 36 and one of the shell 31 and is set to the earthing detection port 37 of the shell 31, it should
Control circuit 32 and the power input port 33, the power supply output port 34, the information display section 35, the electrostatic detection port 36, and
The earthing detection port 37 is electrically connected.
The control circuit 32 is a kind of electronic circuit controller, can obtain the electronic signal of extraneous number or simulation into
Row operation, to be used as automatically controlling.The power input port 33 connects alternating current, so that the control circuit 32 obtains the electricity of operation
Power.The control circuit 32 has a power switch 321 for being set to the shell 31, whether to control the control circuit 32 operation.
Cooperation is as shown in fig.4, the control circuit 32 also has one to be set to the power input port 33 and power supply output
Control switch 322 between port 34 enables the control circuit 32 that can control the whether external output power of the power supply output port 34.Preferably
Ground, the control switch 322 are the electronic building bricks that a kind of big electric power of small Electric control opens and closes, such as relay is exactly a kind of with small electricity
Power controls the control switch 322 of big electric power.Technological means due to controlling the output of big electric power has been known to industry, and transports extensively
For in a variety of electronic products, no longer repeating in detail herein.
The information display section 35 is a kind of display module, can show that the control circuit 32 needs the information exported.Preferably
Ground, which shows the impedance value that the electrostatic testing apparatus 4 and the ground detection device 5 are measured, when the control
When circuit 32 is pinpointed the problems, can also externally it be shown by the information display section 35.
Cooperation includes an electrostatic detection group 41 as shown in fig.5, the electrostatic testing apparatus 4 is set on the shell 31,
One end of the electrostatic detection group 41 is separably set to electrostatic detection port 36, the other end of the electrostatic detection group 41 and a people
The skin connection of member 23, the control circuit 32 are obtained the human body impedance of the personnel 23 by the electrostatic detection group 41, judge the personnel
Whether 23 carry electrostatic.
The electrostatic detection group 41 has one to be plugged with this to be inserted in the end 411, one that plugs of the electrostatic detection port 36
The electrostatic hand ring 413 that is connect with the current potential transmission line 412 of current potential transmission lines 412, one of 411 connection of end and two are set to this
Sheet metal 414 on electrostatic hand ring 413, two sheet metals 414 are separated from each other a distance.Preferably, two sheet metals
414 are disposed on 413 inner surface of electrostatic hand ring, are touched together with that can be pasted with the wrist skin of the personnel 23.
In first preferred embodiment, there are two electrode surfaces, the current potential to pass at the end 411 that plugs of the electrostatic detection group 41
There are defeated line 412 two electric wires, one end of two electric wires of the current potential transmission line 412 to plug two electricity at end 411 with this respectively
Pole-face is electrically connected, and the other end of two electric wires of the current potential transmission line 412 is electrically connected with two sheet metals 414 respectively, this is quiet
There are two contact chips being electrically connected respectively with the control circuit 32 in electro-detection port 36.When actual implementation, the electrostatic detection
Group 41 can use the technology of other electric connections to be attached with the electrostatic detection port 36, should not be as limit.
When the electrostatic detection group 41 is when plugging 411 insertion electrostatic detection port 36 of end, this plugs two electricity at end 411
Pole-face respectively with two contact chips of the electrostatic detection port 36 be electrically connected so that the control circuit 32 can measure this two
Impedance between a sheet metal 414 can measure especially when two sheet metals 414 are attached at the wrist skin of the personnel 23
Measure the human body impedance of the personnel 23.
The ground detection device 5 is set to the shell 31, and includes an earthing detection group 51, and the one of the earthing detection group 51
End is connect with the earthing detection port 37, and the other end is connect with the test platform 21, and the control circuit 32 is by the earthing detection group
51 obtain the impedance value of the static ground wire 22 of the test platform 21, so that whether the control circuit 32 judges the test platform 21
Ground connection, to confirm whether the test platform 21 has the risk of accumulation electrostatic.
As shown in fig.6, the earthing detection port 37 has a measuring point 371 and an earth point 372, the earthing detection group
51 there is a measurement line 511 and one being connected between the measuring point 371 and the test platform 21 to be grounded the earth point 372
Ground wire 512.Wherein, the ground wire 512 with the static ground wire of the earthing detection group 51 connect the electric connection of main line 24, with
The coulostatic analysis device 3 is set to be grounded.
The measuring point 371 and earth point 372 of earthing detection port 37 are electrically connected with the control circuit 32 respectively, so that should
Control circuit 32 can obtain the impedance value between the measurement line 511 and the ground wire 512, especially when the measurement line 511 with
The test platform 21 is electrically connected, which connect the electric connection of main line 24, the control circuit 32 with the static ground wire
It will can obtain the impedance value of the test platform 21 and the static ground wire 22.
In first preferred embodiment, the personnel's impedance upper limit value that can prestore in the control circuit 32, bracelet open circuit
Warning value, a bracelet short circuit warning value, an impedance ground upper limit value and a ground connection open circuit warning value.
Whether the human body impedance that personnel's impedance upper limit value is to provide the control circuit 32 to judge the personnel 23 is too high, because
Electrostatic charge can be allowed to be piled up in the personnel 23 for excessively high human body impedance, even if by 23 proper grounding of personnel (for example, matching
Wear ground connection bracelet), as human body impedance is too high to exclude electrostatic totally.
The bracelet opens a way warning value higher than personnel's impedance upper limit value, is mainly to provide the control circuit 32 to judge that this is quiet
Whether two sheet metals 414 of electro-detection group 41 have fallen off (OVERLOAD) in the wrist of the personnel 23, because of the resistance value of air
Higher than human body resistance value, it is possible to provide the control circuit 32 confirms whether the electrostatic testing apparatus 4 is worn in the wrist of the personnel 23.
The bracelet short circuit warning value is to provide the control circuit 32 to judge whether the electrostatic detection port 36 is correctly inserted into
The electrostatic testing apparatus 4 has certain impedance, therefore ought be correctly by the electrostatic detection because human body is not good conductor
Device 4 is worn when the wrist skin of the personnel 23, the resistance value acquired by the control circuit 32, it is impossible to level off to zero.When this
Electrostatic detection dress system 4 acquired by impedance level off to zero when, indicate that incorrect component is inserted into the electrostatic detection port 36, or
Two sheet metals 414 have the situation of short circuit.
The impedance ground upper limit value is to provide the control circuit 32 to judge that the static ground wire 22 of the test platform 21 is
It is no correctly connect the static ground wire connection main line 24, with confirm the test platform 21 whether proper grounding, the test platform 21
Static ground wire 22 be general electric wire, if the static ground wire 22 is connect with the test platform 21 and the static ground wire
The connection of main line 24 is appropriate, and the resistance value acquired by the control circuit 32 should level off to zero.
The ground connection opens a way warning value more than the impedance ground upper limit value, is mainly to provide the control circuit 32 to judge that this is quiet
Whether electrical grounding wire 22 has the situation to fall off with the connecting pin that the test platform 21 and the static ground wire connect main line 24
(OVERLOAD)。
In first preferred embodiment, which is set as 10M Ω, bracelet open circuit warning value setting
For 50M Ω, which is set as 800k Ω, which is set as 10 Ω, ground connection open circuit police
Announcement value is set as 30 Ω.
Wherein, when the impedance value acquired by the electrostatic testing apparatus 4 is more than 10M Ω (personnel's impedance upper limit value), or
When being that impedance value acquired by the ground detection device 5 is more than 10 Ω (the impedance ground upper limit value), the coulostatic analysis device 3
Alarm can be sent out, it is necessary to wait until that the impedance value acquired by the electrostatic testing apparatus 4 is less than 8M Ω and the earthing detection fills respectively
It sets the impedance value acquired by 5 and is less than 9 Ω, which could cancel sent out alarm, and the coulostatic analysis is avoided to fill
Set 3 alarms for sending out repetition.When actual implementation, the setting of above-mentioned setting value should be adjusted with actual state, should not be as
Limit.
When the control circuit 32 analysis is higher than personnel's impedance upper limit value by the impedance acquired by the electrostatic testing apparatus 4
When, it indicates that the human body impedance of the personnel 23 is excessively high, there is the risk of accumulation electrostatic；Or work as acquired by the ground detection device 5
Impedance be higher than the impedance ground upper limit value when, indicate the 22 generation problem of static ground wire of the test platform 21, have accumulation
The risk of electrostatic.The control circuit 32 of the coulostatic analysis device 3 will externally issue alarm, while it is disconnected to control the control switch 322
Road so that the power supply output port 34 can not external out-put supply, the resistance value mistake of the personnel 23 is shown in the information display section 35
Height or the excessively high warning information of 21 resistance value of test platform.
In addition to this, when the impedance value that the electrostatic testing apparatus 4 is measured is more than bracelet open circuit warning value, or work as
When the impedance value that the electrostatic testing apparatus 4 is measured is less than the bracelet short circuit warning value, or when the ground detection device 5 is taken
Impedance value when being more than ground connection open circuit warning value, all indicate that the monitoring of coulostatic analysis device 3 is pinpointed the problems, the personnel 23 or
The test platform 21 can not be into the manufacturing process operation of line integrated circuit.
The coulostatic analysis device 3 will externally issue alarm, while the out-put supply of the power supply output port 34 being cut off, and in
The information display section 35 shows relevant warning information.
Bracelet open circuit warning value, bracelet short circuit warning value disclosed in above-mentioned, and not judgement should for ground connection open circuit warning value
Whether personnel 23 and the test platform 21 have a risk for generating electrostatic, when actual implementation, the monitoring function of the control circuit 32,
It should be designed with actual state, it should not be as limit.
When the control circuit 32 of the coulostatic analysis device 3 judges that impedance is less than personnel's impedance upper limit with the personnel 23
Value indicates that the personnel 23 will not accumulate electrostatic with it, and when the impedance of the test platform 21 is less than the impedance ground upper limit value
When, indicate that the test platform 21 will not accumulate electrostatic.Wherein, the impedance value which is measured must be higher than bracelet
Short-circuit warning value is inserted into the article other than the electrostatic testing apparatus 4 to avoid the electrostatic detection port 36.
The control circuit 32 can control 322 power supply short circuit of control switch so that the power supply output port 34 continues externally to export
Power supply, so that the personnel 23 can be integrated the production operation of circuit, which externally shows the electrostatic detection
The measurement resistance value of device 4 and the ground detection device 5.
It is emphasized that the power supply output port 34 of the coulostatic analysis device 3 can provide IC manufacturing flow sheet equipment
Electric power, or be to provide illuminating power when 23 operation of the people person, when the coulostatic analysis device 3 or the ground detection device 5
When acquired impedance value does not meet setting value, warning information, the coulostatic analysis are externally not only issued by the information display section 35
Device 3 is forced the power cut of the power supply output port 34, also by the control switch 322 of the control circuit 32 to force to make this
IC manufacturing flow sheet equipment or the personnel 23 stop operation, and avoid causing damages.
It is noted that the electrostatic testing apparatus 4 is electrically connected with the control circuit 32, the control circuit 32 and the ground connection
372 electrical connection of point, so that the electrostatic testing apparatus 4 can guide the electrostatic with the personnel 23.Wherein, it is by the electrostatic detection
A sheet metal 414 therein for group 41 is electrically connected with the earth point 372 of the earthing detection port 37, with the diversion sheet metal 414
The electrostatic with personnel 23 attached, and another sheet metal 414 of the electrostatic detection group 41 provides the measurement electricity of human body impedance
Power.
Shown in Fig. 7,8, for a kind of second preferred embodiment of electrostatic monitoring system of the present invention, the second preferably implementation
Example is roughly the same with first preferred embodiment, and details are not described herein for something in common, the difference is that the electrostatic monitoring system
Also comprising a monitoring device 6, the in addition at least one coulostatic analysis device 3, in addition an at least electrostatic testing apparatus 4, and in addition extremely
A few ground detection device 5.
Each coulostatic analysis device 3 also includes a network-side for being set to the shell 31 and being electrically connected with the control circuit 32
For mouth 39 and one to provide the correction component 38 of the 3 benchmark resistance value of coulostatic analysis device, which includes one and the number
The monitoring server 61 that a network port 39 connects, to be transmitted into row information with several coulostatic analysis devices 3.
Several coulostatic analysis devices 3 can upload the personnel 23 and the 21 impedance measurement information of test platform, with storage
In the monitoring server 61, when the control circuit 32 of coulostatic analysis device 3 therein judges that impedance is high with the personnel 23
When the impedance of personnel's impedance upper limit value or the test platform 21 is higher than the impedance ground upper limit value, an alarm signal can be sent out
It ceases and gives the monitoring server 61.
Preferably, several coulostatic analysis devices 3 are with one minute interval time, by the impedance information of measurement store to
In the monitoring server 61, when the monitoring of the control circuit 32 is pinpointed the problems, the warning information is uploaded to the monitoring in real time
Server 61 interval time that the impedance information that is measured uploads, should be based on actual state when actual implementation, should not be with this
It is limited.
When the control circuit 32 of the coulostatic analysis device 3 judges that impedance is higher than personnel's impedance upper limit value with the personnel 23
When, or when the impedance of the test platform 21 is higher than the impedance ground upper limit value, or work as acquired by the electrostatic testing apparatus 4
Impedance higher than the bracelet open circuit warning value when, or impedance acquired by the electrostatic testing apparatus 4 is less than bracelet short circuit
Impedance when warning value, or acquired by the ground detection device 5 higher than the ground connection open a way warning value when, coulostatic analysis dress
The warning information can be sent out to the monitoring server 61, so that the monitoring server 61 understands the coulostatic analysis device 3 and sent out by setting 3
Raw problem.
When actual implementation, which can also analyze whether acquired impedance information occurs problem, still
The function of analysis data can occupy the running efficiency of the monitoring server 61, and designer can utilize the operating efficiency of equipment to be set
Meter, should not be as limit.
The monitoring server 61 has an alarm modules 611, a timing module 612, a data outputting module 613, one police
Count off value setting module 614, a real-time display module 615 and a history have access to module 616.The monitoring server 61 is general
It is set to the server of network, receivable instruction is subject to externally to send out instruction after operation again, to provide other computer installations company
Connect to provide network servo service, due to the technological means of server be it is known in the art know, and be widely used in network,
This is no longer repeated in detail.
The alarm modules 611 are externally to send out a warning message, preferably, the alarm modules 611 can not only utilize
The warning message is transferred to other computer installations by network, the technology of telecommunications letter letter can be more utilized, in real time by the warning
Information pushes away the mobile communications device cast to entrained by related personnel.
The timing module 612 is to calculate the time that coulostatic analysis device 3 therein sends out the warning information, when wherein
A coulostatic analysis device 3 find the impedance of connected electrostatic testing apparatus 4 or ground detection device 5 when not being inconsistent setting value,
Warning information can be transferred to the monitoring server 61 using the network port 39, the timing module 612 is respectively to each alarm
Information timing, and terminate timing after warning information releasing, to learn time that the coulostatic analysis device 3 solves the problems, such as.
It is noted that when the control circuit 32 of the coulostatic analysis device 3 finds what the electrostatic testing apparatus 4 was measured
When resistance value is beyond bracelet open circuit warning value, the personnel 23 are indicated by 4 removal of electrostatic testing apparatus, which has can
Can eat or go to the toilet, the timing module 612 of the monitoring server 61 is subject to timing for the time that the personnel 23 leave, with
Judge time that the personnel 23 leave whether too long.
In addition to this, when the human body impedance of the personnel 23 exceed personnel's impedance upper limit value when or the test platform 21
Static ground wire 22 impedance exceed the impedance ground upper limit value when, it is necessary to quickly solve the problems, such as, which is to take
Obtain the time of Resolving probiems.
Preferably, when the timing time of the timing module 612 exceeds a setting time, it can be right by the alarm modules 611
The supervisor of the personnel 23 sends a warning, so that supervisor comes to understand the personnel 23 or what the test platform 21 was occurred asks
Topic, and assist impedance problems solve the problem of or personal management.
The data outputting module 613 is externally transmitting the impedance measurement information of stored any coulostatic analysis device 3.
Preferably, data outputting module 613 be use it is with the format of CSV that the impedance information for being stored in the monitoring server 61 is externally defeated
Go out, CSV (Comma-Separated Values) is a kind of general file format, by many program extensive uses, wherein
Excel programs can read the file format of CSV, further be fabricated to table or analysis chart.
Used in each coulostatic analysis device 3 electronic building brick can there is a narrow difference, different electrostatic detections
Two sheet metals 414 of device 4 can also have different oxidation states, therefore the resistance that different coulostatic analysis devices 3 is measured
It is anti-to will be different.The alarm setting value module 614 of the monitoring server 61 can be respectively to different coulostatic analysis devices 3
Personnel's impedance upper limit value, bracelet open circuit warning value, bracelet short circuit warning value, the impedance ground upper limit value are carried out, and should
The setting of ground connection open circuit warning value further protects integrated circuit not so that different coulostatic analysis devices 3 can correctly judge
It is destroyed by electrostatic.
In addition to this, which is the resistor assembly of fixed resistance value, is separably locked on the earthing detection end
On mouth 37.When needing to correct the coulostatic analysis device 3, first by the measurement line 511 and the ground wire 512 by the earthing detection end
Removal on mouth 37, then one end of the correction component 38 is locked in into the measuring point 371, the other end locks in the earth point 372, the monitoring
Server 61 can remote operation correction operation so that several coulostatic analysis devices 3 carry out measure resistance value quasi-position correction operation.
The real-time display module 615 is to the measurement information of the real-time display coulostatic analysis device 3, the real-time display module
615 can be on the display screen of computer installation for connecting the monitoring server 61, and real-time display goes out several coulostatic analysis dresses
Set 3 resistance value measurement information.Preferably, the real-time display module 615 can externally provide the network of several coulostatic analysis devices 3
IP address, device number, device installation position, the resistance value of the electrostatic testing apparatus 4 measurement, the ground detection device 5 measure
The information such as resistance value and different warning information.
The history has access to the information that externally display stores of module 616, preferably, quiet first with computer installation selection one
Electroanalysis device 3, reselection want the initial time checked and terminate the time, and the history of the monitoring server 61 has access to module
616 will show the historical information that the coulostatic analysis device 3 is stored in the monitoring server 61 in the computer installation.
As shown in fig.9, for a kind of third preferred embodiment of electrostatic monitoring system of the present invention, the third preferred embodiment
Roughly the same with first preferred embodiment, details are not described herein for something in common, the difference is that the coulostatic analysis device 3 is also
Including one be set to the shell 31 and be electrically connected with the control circuit 32 externally sending out the alert component 30 of alarm.
Preferably, the alert component 30 is to be set to the red LED warning lamp of the shell 31, when the coulostatic analysis device 3
Control circuit 32 when finding that the impedance that the electrostatic testing apparatus 4 or the ground detection device 5 are measured does not meet setting value, no
Only the warning information is shown in the information display section 35, the feux rouges of flicker is also externally sent out using the alert component 30, can be made
The administrative staff in a distant place have found the feux rouges of flicker in real time, to go to the coulostatic analysis device 3 to assist the solution of problem.
As shown in the above description, electrostatic monitoring system of the present invention has effects that following：
One, electronic building brick is avoided to be destroyed by electrostatic
The electrostatic testing apparatus 4 can be with the impedance of the accurate measurement personnel 23, which can be with the accurate measurement survey
The impedance for trying the static ground wire 22 of platform 21, with judge the personnel 23 and the test platform 21 whether proper grounding, avoid producing
It gives birth to electrostatic and destroys integrated circuit.
Two, it monitors in real time
The real-time display module 615 of the monitoring server 61 can be in the display screen real-time display of computer installation several electrostatic
The resistance measurement information of analytical equipment 3, when the coulostatic analysis device 3 finds that problem occurs for the impedance measured, in real time to outgoing
Go out warning information.
Three, avoid integrated circuit by electrostatic breakdown
When impedance value acquired by the electrostatic testing apparatus 4 or the ground detection device 5 does not meet setting value, the coulostatic analysis
Device 3 not only by the information display section 35, externally also by the control switch 322 of the control circuit 32 force by publication warning information
The power cut of the power supply output port 34 is avoided into integrated electricity to force that manufacturing process equipment or the personnel 23 is made to stop operation
Road is destroyed by electrostatic.
In conclusion the coulostatic analysis device 3 of the present invention can monitor the personnel 23 and the resistance value of the test platform 21 in real time,
And while 23 operation of personnel, confirm whether the personnel 23 or the test platform 21 have the risk of buildup of static electricity, effectively keeps away
The manufacturing environment for exempting from integrated circuit generates electrostatic.The monitoring server 61 can not only obtain several coulostatic analysis devices 3 in real time
Electrostatic measurement information, that is, the warning information sent out can also be subject to timing using the timing module 612 to the warning information,
Confirm whether the coulostatic analysis device 3 of generation problem corrects problem immediately.
In addition to this, the impedance value measured in the electrostatic testing apparatus 4 or the ground detection device 5 exceeds default value
When, not only externally publication warning information, the coulostatic analysis device 3 also by the control switch 322 of the control circuit 32, control the electricity
Source output port 34 stops external output power, forces that the personnel 23 is prevented to continue operation, avoids integrated circuit by electrostatic breakdown
And cause damages, therefore the purpose of the present invention can be reached.
The above, only three preferred embodiments of the invention, cannot be limited the scope of implementation of the present invention with this,
It is all according to simple equivalent changes and modifications made by scope of the present invention patent and invention description content, all belong to patent of the present invention
In the range of covering.
Claims (10)
1. a kind of electrostatic monitoring system is suitable for being arranged on a test platform, the test platform has a static ground wire,
It is characterized in that, the electrostatic monitoring system includes：
One coulostatic analysis device, including a shell, one be set in the shell control circuit, one be set to the shell
Power input port, one are set to the information display section of the shell, one are set to the electrostatic detection port of the shell and one set
It is placed in the earthing detection port of the shell, it is the control circuit and the power input port, described information display unit, described quiet
Electro-detection port and the earthing detection port are electrically connected；
One electrostatic testing apparatus is set to the shell, including an electrostatic detection group, one end of the electrostatic detection group is discretely
It is set to electrostatic detection port, the other end is connect with the skin of a personnel, and the control circuit is obtained by the electrostatic detection group
The human body impedance of the personnel, to judge whether the personnel carry electrostatic；And
One ground detection device is set to the shell, and includes an earthing detection group, one end of the earthing detection group and institute
The connection of earthing detection port is stated, the other end is connect with the test platform, and the control circuit is obtained by the earthing detection group
The impedance value of the static ground wire, to judge whether the test platform is grounded.
2. electrostatic monitoring system according to claim 1, which is characterized in that the electrostatic detection group has one to plug
End, one and the current potential transmission line for plugging end connection, one and the current potential transmission line are plugged in the electrostatic detection port
The electrostatic hand ring of connection and two sheet metals being set on the electrostatic hand ring.
3. electrostatic monitoring system according to claim 2, which is characterized in that the earthing detection port has a measuring point
And an earth point, the earthing detection group have the measurement line and one of a connection measuring point and the test platform by institute
State the ground wire of earth point ground connection.
4. electrostatic monitoring system according to claim 3, which is characterized in that the electrostatic detection group and the control circuit
Electrical connection, the control circuit is electrically connected with the earth point, so that the electrostatic testing apparatus guides with the personnel
Electrostatic.
5. electrostatic monitoring system according to claim 4, which is characterized in that the coulostatic analysis device also includes a setting
The power supply output port being electrically connected in the shell and with the power input port, the control circuit are set to described with one
Control switch between power input port and the power supply output port, when the control circuit judges that impedance is higher than with the personnel
When the impedance of one personnel's impedance upper limit value or the test platform is higher than an impedance ground upper limit value, the control can be controlled and held
Turn off road so that the power supply output port can not external out-put supply, when the control circuit judges that impedance is low with the personnel
When the impedance of personnel's impedance upper limit value and the test platform is less than the impedance ground upper limit value, institute can be controlled
The short circuit of control Switching Power Supply is stated so that the power supply output port continues external out-put supply.
6. electrostatic monitoring system according to claim 5, which is characterized in that the coulostatic analysis device also include one to
The correction component of the coulostatic analysis device benchmark resistance value is provided and one is set to the shell and is electrically connected with the control circuit
Connect externally sending out the alert component of alarm.
7. electrostatic monitoring system according to claim 6, which is characterized in that also include another coulostatic analysis device, another
Electrostatic testing apparatus, another ground detection device and a monitoring device, each coulostatic analysis device are also set to comprising one described
The network port of shell, the monitoring device include a monitoring server being connect with several network ports, with several electrostatic
Analytical equipment is transmitted into row information, when coulostatic analysis device therein judges that impedance is hindered higher than the personnel with the personnel
When the impedance of anti-upper limit value or the test platform is higher than the impedance ground upper limit value, a warning information can be sent out to described
Monitoring server, and several coulostatic analysis devices can continue impedance measurement information being stored in the monitoring server.
8. electrostatic monitoring system according to claim 7, which is characterized in that the monitoring server has an alarm mould
Block, a timing module and a data outputting module, the alarm modules are externally sending out a warning message, the timing mould
Block is to calculate the time that coulostatic analysis device therein sends out the warning information, and the data outputting module is to by institute
The impedance measurement information for storing any coulostatic analysis device externally transmits.
9. electrostatic monitoring system according to claim 8, which is characterized in that the monitoring server also has an alarm number
It is worth setting module, to carry out personnel's impedance upper limit value and the impedance ground to several coulostatic analysis devices respectively
The setting of upper limit value.
10. electrostatic monitoring system according to claim 9, which is characterized in that the monitoring server is also real-time with one
Display module and a history have access to module, the measurement of several coulostatic analysis devices described in the real-time display module real-time display
Information, the history have access to the information that module externally shows storage.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710271568.0A CN108732431A (en) | 2017-04-24 | 2017-04-24 | Electrostatic monitoring system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710271568.0A CN108732431A (en) | 2017-04-24 | 2017-04-24 | Electrostatic monitoring system |
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| CN108732431A true CN108732431A (en) | 2018-11-02 |
Family
ID=63934099
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| Application Number | Title | Priority Date | Filing Date |
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| CN201710271568.0A Pending CN108732431A (en) | 2017-04-24 | 2017-04-24 | Electrostatic monitoring system |
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| CN109799412A (en) * | 2019-03-27 | 2019-05-24 | 成都昊瀚科技有限公司 | A kind of ESD power supply linkage controller |
| CN111458575A (en) * | 2020-04-17 | 2020-07-28 | 中国兵器工业火炸药工程与安全技术研究院 | Automatic detection device for spiral conveying saturated electrostatic charge quantity of energetic material |
| CN112578460A (en) * | 2019-09-27 | 2021-03-30 | 比亚迪股份有限公司 | Method, device and system for detecting wearing state of shoes |
| CN112748703A (en) * | 2019-10-29 | 2021-05-04 | 广东毅达医疗科技股份有限公司 | Novel intelligent manufacturing anti-static monitoring control system and method thereof |
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Application publication date: 20181102 |