CN108726520B - Waste heat recovery system of reducing furnace - Google Patents

Waste heat recovery system of reducing furnace Download PDF

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Publication number
CN108726520B
CN108726520B CN201811013081.3A CN201811013081A CN108726520B CN 108726520 B CN108726520 B CN 108726520B CN 201811013081 A CN201811013081 A CN 201811013081A CN 108726520 B CN108726520 B CN 108726520B
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China
Prior art keywords
tail gas
cooling water
pipe
cooling
reducing furnace
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CN201811013081.3A
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CN108726520A (en
Inventor
彭中
甘居富
游书华
王亚萍
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Inner Mongolia Tongwei Gaochun Crystal Silicon Co ltd
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Inner Mongolia Tongwei Gaochun Crystal Silicon Co ltd
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    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/02Silicon
    • C01B33/021Preparation
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D17/00Arrangements for using waste heat; Arrangements for using, or disposing of, waste gases
    • F27D17/004Systems for reclaiming waste heat
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28DHEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D7/00Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
    • F28D7/08Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being otherwise bent, e.g. in a serpentine or zig-zag
    • F28D7/082Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being otherwise bent, e.g. in a serpentine or zig-zag with serpentine or zig-zag configuration
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00Technologies related to metal processing
    • Y02P10/25Process efficiency
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00Technologies relating to chemical industry
    • Y02P20/10Process efficiency
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00Technologies relating to chemical industry
    • Y02P20/10Process efficiency
    • Y02P20/129Energy recovery, e.g. by cogeneration, H2recovery or pressure recovery turbines

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Environmental & Geological Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)

Abstract

The invention discloses a reducing furnace waste heat recovery system, which comprises a reducing furnace chassis, wherein a cooling cavity is arranged on the reducing furnace chassis, a cooling water inlet pipe and a cooling water outlet pipe are connected to the cooling cavity, and a tail gas heat exchange device is further arranged on a cooling water outlet pipe pipeline; and a tail gas pipe is further arranged on the chassis of the reduction furnace and is communicated with the tail gas heat exchange device. And (3) guiding the cooling water passing through the chassis cooling cavity into the tail gas heat exchange device, heating the cooling water by virtue of the reducing furnace chassis, and then guiding the cooling water into the jacket pipe to exchange heat with the tail gas with higher temperature. The cooling and heat absorption are carried out step by adopting a set of water circulation system, so that the cooling requirements of the chassis and tail gas of the reduction furnace can be met simultaneously, and the number of equipment is reduced; the single cooling water source is convenient for the waste heat recovery equipment to more efficiently recycle heat.

Description

Waste heat recovery system of reducing furnace
Technical Field
The invention relates to the field of polysilicon production, in particular to a waste heat recovery system of a reducing furnace.
Background
The polysilicon reducing furnace is core equipment for producing final products in polysilicon production, and is also a key link for determining the productivity and energy consumption of the system. The energy consumption and the production cost of the polysilicon are reduced, the product quality and the production efficiency are improved, and the method is an effective measure for improving the competitiveness of the product for polysilicon production enterprises.
At present, the reduction process of each polysilicon manufacturer uses medium-temperature water (the temperature is between 50 and 90 ℃) to cool the chassis of the reduction furnace, and the chassis effluent is cooled by circulating water through a plate heat exchanger or is recycled after being cooled by a lithium bromide hot water refrigerating unit. And cooling the reduced tail gas by singly using high-temperature hot water (the temperature is higher than 120 ℃), then flashing saturated steam with certain pressure in a flash tank by using the warmed high-temperature hot water, and continuously recycling the tail gas cooling water after flashing.
The problem lies in that chassis cooling system and tail gas cooling system adopt a set of cooling water circulation system to cool down respectively, and the equipment quantity that needs is many, and construction cost is high. Meanwhile, a large amount of circulating water can be consumed through cooling of the plate heat exchanger, a large amount of energy can be lost, heat is wasted, and energy consumption is increased.
Disclosure of Invention
In view of this, this application provides a reducing furnace waste heat recovery system, will flow through the cooling water of chassis cooling chamber to tail gas heat transfer device in, relies on the reducing furnace chassis to heat up the back to cooling water, then will cool off water again and guide into the clamp sleeve pipe in with the higher tail gas of temperature carry out heat exchange. The cooling and heat absorption are carried out step by adopting a set of water circulation system, so that the cooling requirements of the chassis and tail gas of the reduction furnace can be met simultaneously, and the number of equipment is reduced; the single cooling water source is convenient for the waste heat recovery equipment to more efficiently recycle heat.
In order to solve the technical problems, the technical scheme provided by the invention is that the waste heat recovery system of the reducing furnace comprises a reducing furnace chassis, wherein a cooling cavity is arranged on the reducing furnace chassis, a cooling water inlet pipe and a cooling water outlet pipe are connected to the cooling cavity, and a tail gas heat exchange device is further arranged on a cooling water outlet pipe pipeline; and a tail gas pipe is further arranged on the chassis of the reduction furnace and is communicated with the tail gas heat exchange device.
Preferably, the tail gas heat exchange device comprises a tail gas jacket pipe and a tail gas cooler, and the gas in the tail gas pipe firstly passes through the tail gas jacket pipe and then passes through the tail gas cooler when flowing; the water in the cooling water outlet pipe flows through the tail gas cooler and then through the tail gas jacket pipe.
Preferably, the cooling water outlet pipe is provided with at least two water outlets on the tail gas cooler, and the distance between the water outlets and the water inlet of the cooling water outlet pipe on the tail gas cooler is sequentially increased.
Preferably, the cooling water outlet pipe is provided with a temperature monitoring device on a pipeline between the tail gas jacket pipe and the tail gas cooler, and the temperature monitoring device is used for monitoring the temperature of the cooling water entering the tail gas jacket pipe; the water outlets are respectively provided with an electronic valve for controlling cooling water in the tail gas cooler to flow out from different water outlets; the temperature monitoring device and the electronic valve are electrically connected with the main control module, and the main control module is used for receiving the water temperature sent by the temperature monitoring device and adjusting the opening and closing of the electronic valve.
Preferably, a cooling water pump is arranged on a pipeline of the cooling water inlet pipe, and the cooling water pump is electrically connected with the main control module.
Preferably, the cooling water outlet pipe after passing through the tail gas heat exchange device is communicated with the flash tank, and a pressure regulating valve is arranged on a pipeline between the tail gas heat exchange device and the flash tank.
Preferably, the flash tank is communicated with a cooling water inlet pipe, and a cooling water pump is arranged on a pipeline of the cooling water inlet pipe.
Preferably, the flash tank is provided with a steam pipeline for conveying high-temperature steam out and a condensate pipeline for refluxing water generated by condensing the steam.
Preferably, a flash tank pressure regulating valve is arranged on the steam pipeline.
Preferably, a flash tank liquid level regulating valve is arranged on the condensed water pipeline.
Compared with the prior art, the application has the beneficial effects that:
and cooling water passing through the cooling cavity is led into the tail gas heat exchange device, and after the temperature of the cooling water is raised by virtue of the chassis of the reduction furnace, the cooling water is led into the jacket pipe to exchange heat with the tail gas with higher temperature. The waste heat of the chassis of the reduction furnace and the tail gas pipe is absorbed simultaneously through the grading heat exchange of a set of water circulation system, and the heat recovery efficiency is improved.
The cooling water flowing out of the cooling cavity absorbs heat from the chassis, but the temperature is still lower, and the cooling water is directly led into the tail gas jacket pipe to be subjected to heat exchange with high-temperature tail gas, so that the heat expansion is not uniform due to the overlarge temperature difference between the water and the gas, and equipment damage is caused or the heat cannot be absorbed maximally. The tail gas cooler is arranged, so that the medium-temperature tail gas passing through the tail gas jacket pipe exchanges heat with water just flowing out of the cooling cavity for one time, and the heat in the tail gas is further recovered; meanwhile, the cooling water is heated by the medium-temperature tail gas, the temperature is increased, and the cooling water can enter the tail gas jacket pipe to exchange heat at a more proper temperature, so that the condition of overlarge temperature difference can not occur.
The distance between the water outlet and the water inlet of the cooling water outlet pipe on the tail gas cooler refers to the flowing path length of the cooling water pipe in the tail gas cooler. The longer the cooling water pipe flows in the exhaust gas cooler, the more fully the cooling water exchanges heat with the exhaust gas, and the higher the temperature of the cooling water flowing out. The tail gas cooler is provided with a plurality of water outlets, and different water outlets are selectively communicated according to the current required water inlet temperature requirement, so that the temperature of cooling water entering the tail gas jacket pipe can be regulated, and the stable operation of equipment and the full recovery of heat are effectively ensured.
A temperature threshold value is preset in the main control module; the temperature monitoring device monitors the water temperature of cooling water entering the tail gas jacket pipe and sends the water temperature to the main control module. When the water temperature value received by the main control module exceeds a threshold value, the electronic valve is controlled to be opened or closed, so that cooling water flows out from a proper water outlet and flows into the tail gas jacket pipe at a proper water temperature.
Because the cooling water passes through the cooling cavity and the tail gas heat exchange device in sequence, if the flow of the cooling water is changed, the heat exchange efficiency of the cooling cavity and the tail gas heat exchange device is changed, and the adjustment is not easy. After the tail gas cooler with a plurality of water outlets is arranged, after the cooling water pump adjusts the water flow under the control of the main control module, the electronic valve on the tail gas cooler can be correspondingly adjusted, so that the heat exchange efficiency in the cooling cavity and the heat exchange efficiency in the tail gas heat exchange device can be relatively and independently set and adjusted, and the whole system can maintain a better running state.
After the cooling water absorbs heat from the cooling cavity and the tail gas heat exchange device, the cooling water enters the flash tank through the pressure regulating valve, and a large amount of high-temperature steam is flashed out of the flash tank and led out, so that the heat is recycled.
The high-temperature steam becomes condensed water after the internal energy is dissipated by acting outwards. The condensed water is reintroduced into the flash tank and is connected into a cooling water pipeline, so that the cyclic utilization of water resources is realized.
The output steam quantity is controlled by the flash tank pressure regulating valve, so that the pressure in the flash tank is stabilized in a proper interval.
The liquid level in the flash tank is sufficient, but the volume space in the flash tank is not excessively occupied by the liquid level in the flash tank is ensured by controlling the reflux cooling water quantity through the liquid level regulating valve of the flash tank, and enough space is reserved for flash evaporation of water flowing in from the tail gas jacket pipe.
Drawings
FIG. 1 is a schematic diagram of a waste heat recovery system of a reduction furnace according to the present invention;
FIG. 2 is a schematic diagram of the electrical connection relationship of the waste heat recovery system of the reduction furnace according to the present invention;
fig. 3 is a schematic diagram of the structure of the tail gas cooler of the waste heat recovery system of the reduction furnace.
Reference numerals: the reduction furnace chassis 11, the cooling cavity 111, the tail gas pipe 12, the cooling water inlet pipe 21, the cooling water pump 22, the cooling water outlet pipe 3, the water outlet 31, the water inlet 32, the temperature monitoring device 33, the tail gas jacket pipe 41, the tail gas cooler 42, the flash tank 5, the pressure regulating valve 51, the steam pipeline 52, the flash tank pressure regulating valve 521, the condensed water pipeline 53, the flash tank liquid level regulating valve 531 and the main control module 6.
Detailed Description
In order to make the technical solution of the present invention better understood by those skilled in the art, the present invention will be further described in detail with reference to the accompanying drawings and specific embodiments.
Referring to the drawings, an embodiment of the invention provides a reducing furnace waste heat recovery system, which comprises a reducing furnace chassis 11, wherein a cooling cavity 111 is arranged on the reducing furnace chassis 11, a cooling water inlet pipe 21 and a cooling water outlet pipe 3 are connected to the cooling cavity 111, and a tail gas heat exchange device is further arranged on a pipeline of the cooling water outlet pipe 3; the reducing furnace chassis 11 is also provided with a tail gas pipe 12, and the tail gas pipe 12 is communicated with a tail gas heat exchange device. The exhaust heat exchange device comprises an exhaust clamping sleeve 41 and an exhaust cooler 42, and when the gas in the exhaust pipe 12 flows, the gas passes through the exhaust clamping sleeve 41 and then passes through the exhaust cooler 42; the water in the cooling water outlet pipe 3 flows through the tail gas cooler 42 and then through the tail gas jacket pipe 41.
The cooling water outlet pipe 3 is provided with three water outlets 31 on the tail gas cooler 42, and the distance between the water outlets 31 and the water inlet 32 of the cooling water outlet pipe 3 on the tail gas cooler 42 is sequentially increased. The cooling water outlet pipe 3 is provided with a temperature monitoring device 33 on a pipeline between the tail gas jacket pipe 41 and the tail gas cooler 42, and is used for monitoring the temperature of cooling water entering the tail gas jacket pipe 41; the water outlets 31 are provided with electronic valves for controlling the cooling water in the tail gas cooler 42 to flow out from the different water outlets 31; the temperature monitoring device 33 and the electronic valve are electrically connected with the main control module 6, and the main control module 6 is used for receiving the water temperature sent by the temperature monitoring device 33 and adjusting the opening and closing of the electronic valve. A cooling water pump 22 is arranged on a pipeline of the cooling water inlet pipe 21, and the cooling water pump 22 is electrically connected with the main control module 6.
The cooling water outlet pipe 3 passing through the tail gas jacket pipe 41 is communicated with the flash tank 5, the flash tank 5 is communicated with the cooling water inlet pipe 21, and the pressure regulating valve 51 is arranged on a pipeline between the tail gas jacket pipe 41 and the flash tank 5 on the cooling water outlet pipe 3. The flash tank 4 is provided with a steam pipe 52 for transporting out high-temperature steam and a condensate pipe 53 for refluxing water generated by condensing the steam. The steam pipe 52 is provided with a flash tank pressure regulating valve 521, and the condensate pipe 53 is provided with a flash tank liquid level regulating valve 531.
The cooling water pump 22 drives the cooling water to flow in the cooling water pipe when the system is in operation. The cooling water flows into the cooling chamber 111 of the reducing furnace chassis 11 from the cooling water inlet pipe 21, exchanges heat with the reducing furnace chassis 11, and takes away heat accumulated in the reducing furnace chassis 11 due to heat radiation in the reducing furnace. The cooling water which absorbs the heat in the reducing furnace chassis 11 flows out from the cooling water outlet pipe 3, and the temperature of the cooling water is less than 90 ℃. The flowing cooling water enters the tail gas cooler 42 to exchange heat with the medium-temperature tail gas, the water temperature is increased, and the cooling water flows out from the set water outlet 31 according to the opening and closing condition of the electronic valve and is led into the tail gas jacket pipe 41 to exchange heat with the high-temperature tail gas, and at the moment, the temperature of the cooling water entering the tail gas jacket pipe 41 is about 120 ℃ because the cooling water is heated by the pressure boiling point of the container. The exhaust gas is high temperature exhaust gas when it comes out of the reduction furnace, is changed into medium temperature exhaust gas after heat exchange by the exhaust gas jacket pipe 41, is changed into low temperature exhaust gas after further heat exchange in the exhaust gas cooler 42, and is discharged along the exhaust gas pipe 12; wherein the high temperature, the medium temperature and the low temperature are the relative temperatures of the tail gas in different stages. The cooling water absorbs heat from the tail gas jacket pipe 41, then enters the flash tank 5 through the pressure regulating valve 51, the temperature of the cooling water at the moment is more than 150 ℃, and the cooling water in a high-temperature and high-pressure state is subjected to flash evaporation in the flash tank due to pressure suddenly drop, so that high-temperature steam is generated, and the high-temperature steam is sent out through the steam pipeline 52 for use. Condensed water condensed after the steam does work is led back to the flash tank 5 through the condensed water pipeline 53 and enters the cooling water circulation system again through the cooling water inlet pipe 21, and the cooling is continuously carried out on the reduction furnace bottom disc.
When the temperature monitoring device 33 detects that the temperature of the water flowing into the tail gas clamping sleeve 41 does not meet the requirement, the main control module 6 controls the electronic valve of the water outlet 31 to be opened or closed, so that the heat exchange degree of cooling water in the tail gas cooler 42 is changed, the regulation and control of the temperature of the cooling water flowing into the tail gas clamping sleeve 41 are realized, and the stable and efficient operation of the waste heat recovery system is ensured.
Referring to fig. 3, the water outlet 31 is set as the water outlets 31a, 31b, 31c according to the pipeline distance between the water outlet 31 and the water inlet 32 from near to far, and the electronic valves of the water outlet 31b are opened in general, and the electronic valves of the water outlet 31a and the water outlet 31c are closed. When the temperature of the cooling water received by the main control module 6 from the temperature monitoring device 33 is too low, the electronic valve of the water outlet 31b is controlled to be closed, and the electronic valve of the water outlet 31c is controlled to be opened. Since the cooling water flows longer in the exhaust gas cooler 42 before flowing out of the water outlet 31c, heat exchange with the exhaust gas is more sufficient, and the temperature of the cooling water flowing out of the water outlet 31c is higher than that of the cooling water flowing out of the water outlet 31 b. When the temperature of the cooling water received by the main control module 6 from the temperature monitoring device 33 is too high, the electronic valve of the water outlet 31b is controlled to be closed, and the electronic valve of the water outlet 31a is controlled to be opened. Since the cooling water flows in the exhaust gas cooler 42 at a shorter distance before flowing out of the water outlet 31a, the degree of heat exchange with the exhaust gas is lower, and the temperature of the cooling water flowing out of the water outlet 31a is lower than that of the cooling water flowing out of the water outlet 31 b. The system is adopted to control the heat exchange degree between the cooling water and the tail gas, so that the temperature of the cooling water entering the tail gas clamping sleeve 41 is adjusted.
The foregoing is merely a preferred embodiment of the present invention, and it should be noted that the above-mentioned preferred embodiment should not be construed as limiting the invention, and the scope of the invention should be defined by the appended claims. It will be apparent to those skilled in the art that various modifications and adaptations can be made without departing from the spirit and scope of the invention, and such modifications and adaptations are intended to be comprehended within the scope of the invention.

Claims (5)

1. The reducing furnace waste heat recovery system comprises a reducing furnace chassis, and is characterized in that a cooling cavity is arranged on the reducing furnace chassis, a cooling water inlet pipe and a cooling water outlet pipe are connected to the cooling cavity, and a tail gas heat exchange device is further arranged on the cooling water outlet pipe; a tail gas pipe is further arranged on the reducing furnace chassis and is communicated with a tail gas heat exchange device;
the tail gas heat exchange device comprises a tail gas jacket pipe and a tail gas cooler, and gas in the tail gas pipe firstly passes through the tail gas jacket pipe and then passes through the tail gas cooler when flowing; the water in the cooling water outlet pipe flows through the tail gas cooler and then through the tail gas jacket pipe;
the cooling water outlet pipe is provided with at least two water outlets on the tail gas cooler, and the distance between the water outlets and the water inlet of the cooling water outlet pipe on the tail gas cooler is sequentially increased;
the cooling water outlet pipe is provided with a temperature monitoring device on a pipeline between the tail gas jacket pipe and the tail gas cooler and is used for monitoring the temperature of cooling water entering the tail gas jacket pipe; the water outlets are respectively provided with an electronic valve for controlling cooling water in the tail gas cooler to flow out from different water outlets; the temperature monitoring device and the electronic valve are electrically connected with the main control module, and the main control module is used for receiving the water temperature sent by the temperature monitoring device and adjusting the opening and closing of the electronic valve;
the cooling water outlet pipe after passing through the tail gas heat exchange device is communicated with the flash tank, and a pressure regulating valve is arranged on a pipeline between the tail gas heat exchange device and the flash tank.
2. The reducing furnace waste heat recovery system according to claim 1, wherein a cooling water pump is arranged on a pipeline of the cooling water inlet pipe, and the cooling water pump is electrically connected with the main control module.
3. The reduction furnace waste heat recovery system according to claim 1, wherein the flash tank is communicated with a cooling water inlet pipe, and a cooling water pump is arranged on a pipeline of the cooling water inlet pipe.
4. A reducing furnace waste heat recovery system according to claim 3, wherein a steam pipe for transporting high-temperature steam out and a condensate pipe for refluxing water generated by condensing the steam are provided on the flash tank.
5. The reducing furnace waste heat recovery system according to claim 4, wherein a flash tank pressure regulating valve is arranged on the steam pipeline, and a flash tank liquid level regulating valve is arranged on the condensed water pipeline.
CN201811013081.3A 2018-08-31 2018-08-31 Waste heat recovery system of reducing furnace Active CN108726520B (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109203421B (en) * 2018-11-05 2024-07-09 开封龙宇化工有限公司 Extruder barrel cooling system
WO2021013177A1 (en) * 2019-07-24 2021-01-28 中国恩菲工程技术有限公司 System and method for cooling polycrystalline silicon reduction furnace

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CN202226669U (en) * 2011-08-31 2012-05-23 湖北晶星科技股份有限公司 Tail gas cooling system for polycrystalline silicon hydrogenation furnace
CN103449443A (en) * 2013-09-06 2013-12-18 上海森松环境技术工程有限公司 Heat energy recovery system and technology of water system of polycrystalline silicon reducing furnace
CN104016350A (en) * 2014-06-18 2014-09-03 四川永祥多晶硅有限公司 Polycrystalline silicon reduction furnace chassis and tail gas cooling system and method thereof
CN203998973U (en) * 2014-08-12 2014-12-10 黄河水电光伏产业技术有限公司 Polycrystalline silicon reducing furnace heat energy utilization system
CN107512719A (en) * 2016-06-15 2017-12-26 新特能源股份有限公司 Polycrystalline silicon reduction exhaust residual-heat utilization method and system
CN208776322U (en) * 2018-08-31 2019-04-23 内蒙古通威高纯晶硅有限公司 A kind of afterheat of reducing furnace recovery system

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN202226669U (en) * 2011-08-31 2012-05-23 湖北晶星科技股份有限公司 Tail gas cooling system for polycrystalline silicon hydrogenation furnace
CN103449443A (en) * 2013-09-06 2013-12-18 上海森松环境技术工程有限公司 Heat energy recovery system and technology of water system of polycrystalline silicon reducing furnace
CN104016350A (en) * 2014-06-18 2014-09-03 四川永祥多晶硅有限公司 Polycrystalline silicon reduction furnace chassis and tail gas cooling system and method thereof
CN203998973U (en) * 2014-08-12 2014-12-10 黄河水电光伏产业技术有限公司 Polycrystalline silicon reducing furnace heat energy utilization system
CN107512719A (en) * 2016-06-15 2017-12-26 新特能源股份有限公司 Polycrystalline silicon reduction exhaust residual-heat utilization method and system
CN208776322U (en) * 2018-08-31 2019-04-23 内蒙古通威高纯晶硅有限公司 A kind of afterheat of reducing furnace recovery system

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