CN108712997A - Ozone generation element and Ozone generator - Google Patents
Ozone generation element and Ozone generator Download PDFInfo
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- CN108712997A CN108712997A CN201780015391.6A CN201780015391A CN108712997A CN 108712997 A CN108712997 A CN 108712997A CN 201780015391 A CN201780015391 A CN 201780015391A CN 108712997 A CN108712997 A CN 108712997A
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/10—Preparation of ozone
- C01B13/11—Preparation of ozone by electric discharge
- C01B13/115—Preparation of ozone by electric discharge characterised by the electrical circuits producing the electrical discharge
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/10—Preparation of ozone
- C01B13/11—Preparation of ozone by electric discharge
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/20—Electrodes used for obtaining electrical discharge
- C01B2201/22—Constructional details of the electrodes
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/30—Dielectrics used in the electrical dischargers
- C01B2201/32—Constructional details of the dielectrics
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- Oxygen, Ozone, And Oxides In General (AREA)
Abstract
Ozone generation element (10) has dielectric base plate (13), electrode (the first comb poles) (21A) and electrode (the second comb poles) (21B).The multiple electrodes sub-portion (22A) that electrode (21A) has terminal electrode portion (23A) and intersects with terminal electrode portion (23A).The multiple electrodes sub-portion (22B) that electrode (21B) has terminal electrode portion (23B) and intersects with terminal electrode portion (23B).Electrode sub-portion (22A) and electrode sub-portion (22B) are configured to be alternately arranged in the+x direction.The first distance (W11) as electrode sub-portion (22A) and with electrode sub-portion (22A) at the interval of the adjacent electrode sub-portion (22B) in -X direction side is different from as electrode sub-portion (22A) and the second distance (W12) with electrode sub-portion (22A) at the interval of the adjacent electrode sub-portion (22B) in +X direction side.Moreover, second distance (W12) is 1.1 or more and 4.0 or less relative to the ratio between first distance (W11).
Description
Technical field
The present invention relates to ozone generation element and Ozone generators.
Background technology
Propose a kind of ozone generation element, wherein have dielectric base plate, a pair of setting on the dielectric substrate
Electrode, the dielectric layer for covering a pair of electrodes, creeping discharge is generated by making between a pair of electrodes, to generate ozone (for example, ginseng
According to patent document 1).It is described in patent document 1：Each electrode of ozone generation element is with linear wiring and multiple
The comb teeth-shaped of wire-like members, multiple wire-like members extend to a direction orthogonal with the extending direction of wiring, electrode
Wire-like members and the wire-like members of another electrode are alternately configured with fixed intervals.
Citation
Patent document
Patent document 1：Japanese Unexamined Patent Publication 2000-72410 bulletins
Invention content
The subject that the invention solves
But in ozone generation element, typically, since the heat generated when its action, the ozone of generation can quilt
It decomposes, the effective yield of ozone can decline.Therefore, ozone generation element described in Patent Document 1 is by dielectric base plate
Thickness thicken and increase the thermal capacity of dielectric base plate, or be used together with cooler, fever when thus inhibition acts,
Inhibit the decline of ozone yield.
However, ozone generation described in Patent Document 1 causes member with element due to thickening the thickness of dielectric base plate
Part itself enlargement, or need be used together with cooler, therefore include ozone generation element module integrally can large size
Change.
The present invention is completed in view of above-mentioned cause, it is intended that providing a kind of small-sized and ozone formation efficiency
High ozone generation element and Ozone generator.
A technical solution to solve project
In order to achieve the above objectives, ozone generation of the present invention has with element：
Dielectric base plate；And
An interarea in the dielectric base plate is arranged in first comb poles and the second comb poles,
First comb poles has：
First terminal electrode portion；And
Multiple first electrode sub-portions are intersected with the first terminal electrode portion,
Second comb poles has：
Second terminal electrode portion；And
Multiple second electrode sub-portions are intersected with the second terminal electrode portion,
The first electrode sub-portion and the second electrode sub-portion are configured to be alternately arranged in one direction,
First distance is different from second distance, first distance be the first electrode sub-portion and with the first electrode
The interval of the sub-portion adjacent second electrode sub-portion in side in one direction, the second distance be the first electrode sub-portion and with institute
First electrode sub-portion is stated at the interval of the adjacent second electrode sub-portion of another direction side,
The second distance is 1.1 or more and 4.0 or less relative to first ratio of distances constant.
In addition, in ozone generation element of the present invention,
The second distance can be 1.5 or more and 2.5 or less relative to first ratio of distances constant.
In addition, in ozone generation element of the present invention,
It can be also equipped with：Dielectric layer covers one interarea of the dielectric base plate.
In addition, in ozone generation element of the present invention,
The first electrode sub-portion and the second electrode sub-portion can respectively with the first terminal electrode portion, described
Two-terminal electrode portion is connected.
In addition, Ozone generator of the present invention has：
The ozone generation element；And
AC power applies alternating voltage between first comb poles and second comb poles.
Invention effect
In ozone generation element of the present invention, the first distance is different from second distance, and the first distance is first
Electrode sub-portion and with the interval of the first electrode sub-portion adjacent second electrode sub-portion in side in one direction, second distance is the first electricity
Pole sub-portion and with first electrode sub-portion at the interval of the adjacent second electrode sub-portion of another direction side.As a result, with the first distance
The ozone generation equal with second distance is compared with element, is supplied to from the electric field generated between a pair of electrodes and is passed through a pair of electrodes
Between electric discharge and the energy of electronics that generates improves, therefore the generation of ozone is more actively changed.Therefore, ozone of the present invention
Generation is compared with the ozone generation element that element is equal with the first distance and second distance, and the formation efficiency of ozone is high, and energy
The ozone of following amount is enough generated, the reduction of ozone caused by the decomposition for the thermally-induced ozone which generates when offsetting as acting
Amount, therefore can ensure the same above ozone yield of the ozone generation element equal with the first distance and second distance.
So without thickening the thickness of dielectric base plate or being used together with cooler, therefore ozone generation element can be made
Or include the module integral miniaturization of ozone generation element.
Description of the drawings
Fig. 1 is the stereogram for the ozone generation element that embodiments of the present invention are related to.
Fig. 2 is the vertical view that dielectric layer is omitted for the ozone generation element that embodiment is related to.
Fig. 3 is the bottom view for the ozone generation element that embodiment is related to.
Fig. 4 is the vertical view that dielectric layer is omitted for the ozone generation element that comparative example is related to.
Fig. 5 is the distance and life between the electrode sub-portion for the ozone generation element for showing that embodiment and comparative example are related to
At ozone concentration relationship figure.
Fig. 6 A are the section direction views at the line C-C of the Fig. 4 for the ozone generation element that comparative example is related to.
Fig. 6 B are the section direction views at the line A-A of the Fig. 2 for the ozone generation element that embodiment is related to.
Fig. 7 A are the sectional views of the manufacturing method for illustrating ozone generation element that embodiment is related to.
Fig. 7 B are the sectional views of the manufacturing method for illustrating ozone generation element that embodiment is related to.
Fig. 7 C are the sectional views of the manufacturing method for illustrating ozone generation element that embodiment is related to.
Fig. 7 D are the sectional views of the manufacturing method for illustrating ozone generation element that embodiment is related to.
Fig. 8 A are the sectional views of the manufacturing method for illustrating ozone generation element that embodiment is related to.
Fig. 8 B are the sectional views of the manufacturing method for illustrating ozone generation element that embodiment is related to.
Fig. 9 is the vertical view that dielectric layer is omitted for the ozone generation element that variation 1 is related to.
Figure 10 is the vertical view that dielectric layer is omitted for the ozone generation element that variation 2 is related to.
Specific implementation mode
Hereinafter, with reference to attached drawing to embodiment of the present invention relate to ozone generation element and Ozone generator
It is described in detail.In addition, size ratio shown in attached drawing may not verily illustrate the size of reality, for convenience of description,
The case where in the presence of size ratio has been greatly exaggerated to show.In the following description, it in the concept for referring to up or down, is not meant as absolutely
To up or down, but mean diagram posture in opposite up or down.
As shown in Figure 1, Ozone generator of the present embodiment has ozone generation element 10 and is given birth to ozone
At the AC power 31 for applying alternating voltage with element 10.Ozone generation element 10 is to have long side direction and short side direction
Plate, have dielectric base plate 13, a pair of electrodes 21A, 21B, dielectric layer 12, backplate 25A, 25B and plug 26A,
26B.Hereinafter, the ozone generation in Fig. 1 is suitably set as Z-direction with the thickness direction of element 10, will be situated between in z-direction from electricity
The direction of matter substrate 13 towards dielectric layer 12 is set as +Z direction or top, by with the thickness direction of ozone generation element 10 just
The ozone generation of friendship is set as X-direction with the long side direction of element 10, and the ozone orthogonal with Z-direction and X-direction is given birth to
It is set as Y direction at the short side direction of element 10, to illustrate.
Dielectric base plate 13 has the shape of rectangular plate-like.Both ends in the Y direction of Fig. 1 of dielectric base plate 13
It is respectively formed with contact hole 131A, the 131B for penetrating through dielectric base plate 13 in a thickness direction.Divide in contact hole 131A, 131B
It Pei Zhiyou not plug 26A, 26B.Dielectric base plate 13 is by including CaO-B2O3-Al2O3-SiO2、Al2O3、SiO2、ZrO2、BaTiO3
The ceramic material of equal oxides is formed.In addition, dielectric base plate 13 can also be by LTCC (Low Temperature Co-fired
Ceramics：Low-temperature co-fired ceramics) substrate formed.In addition, about dielectric base plate 13, as long as there is electrical insulating property, then not
It is defined in ceramic material, can also be formed by resin materials such as epoxy resin, polyimide resins.
Electrode 21A, 21B are arranged in the upper surface of dielectric base plate 13.As shown in Fig. 2, a pair of electrodes 21A, 21B is with more
A (being in fig. 2 seven) electrode sub-portion 22A, 22B, terminal electrode portion 23A, 23B and tongue piece portion 24A, 24B.Electrode 21A,
21B by metals such as Cu, Ag, Pd, Pt, W, as RuO2Such electroconductive oxide is formed.But in ozone generation element 10
Manufacturing process in carry out firing processing in the case of, if electrode 21A, 21B be metal, at the firing of electrode 21A, 21B
When reason, it is possible to be spread to dielectric base plate 13, dielectric layer 12.In this case, in firing processing, become dielectric base
The sintering of the dielectric substance on the basis of plate 13 and dielectric layer 12 may become inadequate and make dielectric base plate 13 and
The proof voltage of dielectric layer 12 declines.Therefore, electrode 21A, 21B is preferably by as RuO2Such electroconductive oxide is formed.
In addition, the thickness of electrode 21A, 21B are set as 10 μm or so.In addition, electrode 21A, 21B are equivalent to first comb of the present application
Shape electrode, the second comb poles.In addition, terminal electrode portion 23A is equivalent to the first terminal electrode portion of the present application, terminal electricity
Pole portion 23b is equivalent to the second terminal electrode portion of the present application.Electrode sub-portion 22A is equivalent to the first electrode of the present application
Sub-portion, electrode sub-portion 22b are equivalent to the second electrode sub-portion of the present application.
Multiple electrodes sub-portion 22A, 22B is respectively configured as arranging in the X-axis direction.Each electrode sub-portion 22A, 22B is that have
The elongated shape of long side direction and short side direction intersects with terminal electrode portion 23A, 23B and extends in the Y-axis direction.Terminal electricity
Pole portion 23A (23B) is elongated shape, and is extended in the X-axis direction.In addition, multiple electrodes sub-portion 22A (22B) and terminal electrode
Portion 23A (23B) constitutes the shape of comb shape together.Moreover, in two adjacent in the X-axis direction electrode sub-portion 22A of electrode 21A
Between, it is configured with the electrode sub-portion 22B of electrode 21B.In addition, in two adjacent in the X-axis direction electrode sub-portions of electrode 21B
Between 22B, it is configured with the electrode sub-portion 22A of electrode 21A.That is, a pair of electrodes 21A, 21B has electrode sub-portion 22A and electrode
Portion 22B is configured to the construction for the so-called interdigital being alternately arranged in the X-axis direction.
Each electrode sub-portion 22B in the +X direction side of the side as its short side direction be adjacent to the electrode sub-portion of configuration
The distance between 22A (the first distance) W11 is different from above-mentioned electrode sub-portion 22B and the-X in the other side as its short side direction
Direction side is adjacent to the distance between electrode sub-portion 22A of configuration (second distance) W12.Specifically, distance W11 ratio distances W12
It is short.Distance W11 is equivalent to the electrode sub-portion 22A of the +X direction side in two adjacent electrode sub-portion 22A and configures at the two
The distance between electrode sub-portion 22B between electrode sub-portion 22A.In addition, distance W12 is equivalent in two adjacent electrode sub-portions
-X direction side electrode sub-portion 22A between electrode sub-portion 22B of the configuration between the two electrode sub-portions 22A at a distance from.
In addition, the line width of electrode sub-portion 22A, 22B is W13.
Tongue piece portion 24A extends from the central portion in the X-direction of terminal electrode portion 23A to -Y direction.Tongue piece portion 24A with match
Set the plug 26A electrical connections in contact hole 131A.Tongue piece portion 24B from the central portion in the X-direction of terminal electrode portion 23B to
+Y direction extends.Tongue piece portion 24B is electrically connected with plug 26B of the configuration in contact hole 131B.
As shown in Figure 1, dielectric layer 12 covers electrode 21A, the 21B being arranged in the upper surface of dielectric base plate 13.Electricity is situated between
Matter layer 12 is by including CaO-B2O3-Al2O3-SiO2、Al2O3、SiO2、ZrO2、BaTiO3The ceramic material of equal oxides is formed.This
Outside, dielectric layer 12 can also be formed by LTCC materials.In addition, about dielectric base plate 13, as long as there is electrical insulating property, then simultaneously
It is not limited to ceramic material, can also be formed by resin materials such as epoxy resin, polyimide resins.But it is generated in ozone
When being acted with element 10, dielectric layer 12 becomes high temperature by exposure to plasma.In addition, dielectric layer 12 is due to exposure
In the ozone generated near its surface, so also requiring the erosion resisting to ozone.For these reasons, dielectric layer 12 is excellent
Choosing is formed by ceramic material.In addition, dielectric layer 12 preferably by its coefficient of thermal expansion and dielectric base plate 13 coefficient of thermal expansion substantially
Equal material is formed.In this case, even if in dielectric base plate 13 and dielectric layer 12 due in ozone generation element
The heat that generate when 10 action and in the case of expanding and shrinking, be not easy to the engagement in dielectric base plate 13 and dielectric layer 12
Part generates deformation.Therefore, it has the following advantages that, that is, can inhibit due to generating when ozone generation is acted with element 10
The deterioration of the dielectric base plate 13 of heat and the bonding part of dielectric layer 12.In turn, dielectric layer 12 more preferably by with dielectric
13 identical material of substrate is formed.
As shown in figure 3, backplate 25A, 25B being set with the face of 12 side opposite side of dielectric layer in dielectric base plate 13
It is set to, at least contact hole 131A, 131B of covering dielectric substrate 13.Contact hole of the plug 26A configurations in dielectric base plate 13
In 131A, by electrode 21A and backplate 25A electrical connections.Plug 26B is configured in the contact hole 131B of dielectric base plate 13,
By electrode 21B and backplate 25B electrical connections.Backplate 25A, 25B and plug 26A, 26B are same as electrode 21A, 21B
Ground, by metals such as Cu, Ag, Pd, Pt, W, as RuO2Such conductive material is formed.
AC power 31 is electrically connected with backplate 25A, 25B, is applying alternating voltage (just between a pair of electrodes 21A, 21B
String wave voltage).In addition, AC power 31 has the function of frequency scanning or resonant frequency tracking function, frequency is adjusted, is made
The frequency for obtaining the alternating voltage exported to ozone generation element 10 is in by 10 structure of AC power 31 and ozone generation element
At circuit resonant frequency near.The power consumption in foregoing circuit can be reduced as a result,.In addition, AC power 31 can also
Apply the alternating voltage of rectangular pulse string-like between electrode 21A, 21B.
If (sinusoidal with alternating voltage is applied between a pair of electrodes 21A, 21B of element 10 from AC power 31 to ozone generation
Wave voltage), then it generates in the region between each electrode sub-portion 22A, 22B of the proximity of dielectric layer 12 and is put along face
Electricity.Electric discharge phenomena are the insulation breakdowns in air, by the electronics that is generated between each electrode sub-portion group 22A, 22B by each electricity
The component in the outside for escaping to dielectric layer 12 in the electric field formed between sub-portion group 22A, 22B of pole accelerates and generates.Meanwhile
The oxygen being present between each electrode sub-portion group 22A, 22B that accelerated electronics passes through the proximity of dielectric layer 12
Son collision, to generate ozone.
Then, about ozone generation element 10 of the present embodiment, to having rated discharge ionization voltage and smelly
The result of oxygen production quantity illustrates.Inventors are to ozone generation of the present embodiment element 10 above-mentioned and aftermentioned
The ozone generation that is related to of comparative example implement each evaluation with element.First, the ozone of the evaluation prepared inventors is given birth to
It is illustrated at element.
As ozone generation element 10 of the present embodiment, distance W12 shown in Fig. 2 is prepared and has been set to 55
μm, 65 μm, 75 μm, 100 μm, 125 μm, 150 μm, 200 μm of seven kinds of ozone generation elements.In addition, in this seven kinds of ozone lifes
At in element 10, the width of the X-direction of whole electrode sub-portions 22A, 22B is 50 μm, and the distance W11 of Fig. 2 is 50 μm.This
Outside, dielectric base plate 13 is the square of 10mm × 10mm under vertical view, and the thickness of dielectric layer 12 is set as 15 μm.Moreover, will
The thickness that dielectric base plate 13 is added with dielectric layer 12 is set as about 600 μm.In turn, by being provided on dielectric base plate 13
The length L1 of the X-direction in the region of the part in addition to tongue piece portion 24A, 24B in electrode 21A, 21B is set as 8mm, Y-axis side
To length L2 be set as 7mm.
As shown in figure 4, in the ozone generation element 910 that comparative example is related to, the electrode sub-portion 922A of electrode 921A and
W91 is alternately configured the electrode sub-portion 922B of electrode 921B at regular intervals.As the ozone generation element 910, prepare
Distance W91 shown in Fig. 4 is set to 50 μm of ozone generation element.In addition, whole electrode sub-portions 922A, 922B
The width of X-direction is 50 μm.In addition, the thickness of the shape of dielectric base plate 13, dielectric layer 12, by 13 and of dielectric base plate
Dielectric layer 12 be added thickness, the multiple electrodes sub-portion 922A for being provided with electrode 921A, 921B in dielectric base plate 13,
The size in the region of 922B and terminal electrode portion 23A, 23B is set as identical as ozone generation element 10.
Then, to inventors in order to which the discharge ionization voltage and ozone of evaluating ozone generation element 10,910 generate
Amount and the measurement of discharge ionization voltage and the content of measurement of ozone production quantity implemented illustrate.In discharge ionization voltage
Measurement in, make to be applied on one side between a pair of electrodes 21A, 21B of ozone generation element 10 or ozone generation element 910
The voltage amplitude amplitude of alternating voltage (sine voltage) between a pair of electrodes 921A, 921B gradually increases, observe on one side whether there is or not
Pass through the luminescence of plasma generated that discharges.It will be observed that the voltage amplitude amplitude at the time point of luminescence of plasma is opened as electric discharge
Beginning voltage.
In the measurement of ozone yield, ozone generation element 10,910 is put into the acrylic acid shell that volume is seven liters
Among body, determined with ozone concentration meter in acrylic acid shell when driving ozone generation element 10,910 three minutes
Ozone concentration.Here, in ozone generation between a pair of electrodes 21A, 21B of element 10 or a pair of ozone generation element 910
The alternating voltage (sine voltage) that voltage amplitude amplitude is 2.3kV is applied between electrode 921A, 921B.In addition, in acrylic acid shell
Setting fan in vivo so that the gas in acrylic acid shell is stirred.Ozone concentration meter uses weak former industry Co. Ltd. system
The ozone concentration meter of the model EG-3000 made.In the measurement of the ozone yield, seven kinds of ozone that embodiment is related to
The ozone generation element 910 that generation is related to element 10 and comparative example distinguishes each preparation five, and as previously described to each
Ground determines ozone concentration.
Then, about ozone generation element 10,910, to implementing the measurement and ozone production quantity of discharge ionization voltage
The result of measurement illustrate.
In the measurement of discharge ionization voltage, the seven kinds of ozone generation elements 10 and comparative example that are related to about embodiment
The average value of any of ozone generation element 910 being related to, discharge ionization voltage is 2.3kV.That is, in embodiment
In the ozone generation element 910 that the ozone generation being related to is related to element 10 and comparative example, do not confirm in discharge ionization voltage
To difference.
Then, for ozone generation element 10,910, the measurement result of the production quantity of ozone is shown in Fig. 5.In Fig. 5
In, distance W12 of the horizontal axis between electrode sub-portion 22A, 22B shown in Fig. 2, the longitudinal axis is ozone concentration.Black square label is shown
The ozone generation element 910 being related to about comparative example as a result, white square label show to be related to about embodiment it is smelly
Oxygen generates the result with element 10.In the case of ozone generation element 910, ozone concentration 39.50ppm.It is given birth in ozone
About distance W12 it is 55 μm, 65 μm, 75 μm, 100 μm, 125 μm, 150 μm, 200 μm of ozone in the case of with element 10
Generation element, ozone concentration be respectively 41.36ppm, 40.65ppm, 51.75ppm, 55.19ppm, 51.28ppm,
49.53ppm,51.03ppm.According to this as a result, following result can be obtained, that is, the ozone generation element 10 that embodiment is related to
The ozone concentration of ozone generation element 910 that is all related to than comparative example of ozone concentration it is big.That is, having obtained following result：
Electrode sub-portion 22B with the adjacent electrode sub-portion 22A in the both sides of electrode sub-portion 22B respectively between distance W11, W12 or
Electrode sub-portion 22A with the adjacent electrode sub-portion 22B in the both sides of electrode sub-portion 22A respectively between distance W11, W12 it is mutual
In the case of difference, the production quantity bigger of ozone.In particular, following result is also obtained, that is, distance W12 be 75 μm or more
Ozone generation with the concentration ratio of the ozone generated in element 10 in ozone generation that comparative example is related to being generated in element 910
The concentration height about 20% or more of ozone.
As long as according to figure 5 result it is found that the distance W12 of ozone generation element 10 relative to the ratio between distance W11
It is at least 1.1 or more and 4.0 hereinafter, then compared with the ozone generation element 910 that comparative example is related to, the production quantity of ozone is reliable
Ground increases.As long as moreover, it is found that the distance W12 of ozone generation element 10 relative to the ratio between distance W11 be 1.5 or more and 2.5
Hereinafter, then compared with the ozone generation element 910 that comparative example is related to, the production quantity increase about 20% or more of ozone.Therefore,
The distance W12 of ozone generation element 10 is preferably 1.5 or more and 2.5 or less relative to the ratio between distance W11.
Then, the ozone generation shown in fig. 5 being related in embodiment is given birth to the ozone that element 10 and comparative example are related to
It is illustrated at the reasons why generating difference with the production quantity of ozone in element 910.As shown in Figure 6A, the ozone being related in comparative example
Generate in element 910, generating electric field E91, E92 in region A91 and region A92, region A91 be electrode sub-portion 922A with
Region in -X direction as the other side of its short side direction between adjacent electrode sub-portion 922B, region A92 are electrode
Region between portion 922A and adjacent electrode sub-portion 922B on the +X direction as the side of its short side direction.In addition,
In Fig. 6 A, show a case that the current potential of electrode sub-portion 922A is higher than the current potential of electrode sub-portion 922B.The intensity of electric field E91, E92
It is identical in region A91, A92.Pass through the electronics point that the electric discharge between electrode sub-portion 922A, 922B is generated in region A91, A92
Do not accelerated by electric field E91, E92 and collided with the oxygen molecule being present near dielectric layer 12, thus generates ozone.In addition,
In Fig. 6 A, V91 shows to indicate acceleration and the acceleration of acceleration direction by the electric field E91 electronics accelerated in the A91 of region
The X-axis component of vector, V92 show to indicate acceleration and acceleration direction by the electric field E92 electronics accelerated in the A92 of region
The X-axis component of acceleration.
The acceleration of electronics in the X-axis component V91 and region A92 of the acceleration of electronics in the A91 of region
X-axis component V92 direction it is mutually opposite.In addition, the distance between adjacent electrode sub-portion 922A, 922B is all equal.Cause
This, the size of acceleration direction V91, V92 of the electronics in region A91, A92 is roughly the same.In this way, for example in the A91 of region to+
If the accelerated electronics of X-direction is substantially decelerated into region A92 to -X direction.In particular, on the side of region A91, A92
The component of boundary part, the X-direction of electric field essentially becomes zero, becomes the region that electronics is not accelerated.Therefore, it is related in comparative example
Ozone generate in element 910, big energy cannot be given to electronics, corresponding to which, the formation efficiency of ozone is low.
In contrast, in ozone generation of the present embodiment in element 10, as shown in Figure 6B, electrode sub-portion 22A
The electric field E1 of region A1 between the electrode sub-portion 22B adjacent in the -X direction of the other side as its short side direction becomes
Region A2 between the electrode sub-portion 22B adjacent than electrode sub-portion 22A and on the +X direction as the side of its short side direction
Electric field E2 it is strong.In addition, in fig. 6b, V1 shows in the A1 of region by the expression acceleration of the electric field E1 electronics accelerated and adds
The X-axis component of the acceleration in fast direction, V2 show in the A2 of region by the expression acceleration of the electric field E2 electronics accelerated with
And the X-axis component of the acceleration of acceleration direction.As shown in Figure 6B, the X-axis of the acceleration of the electronics in the A1 of region point
The size of amount V1 becomes bigger than the size of the X-axis component V2 of the acceleration of the electronics in the A2 of region.In this way, for example in region
The electronics being accelerated to +X direction in A1, is hardly decelerated, in the region, A2's is adjacent in the+x direction in the A2 of region
It is further accelerated to +X direction in the A1 of another region.As a result, electronics has big energy.Like this, in embodiment party
In the ozone generation element 10 that formula is related to, bigger energy can be given to electronics, therefore corresponding to which, the life of ozone
At efficient.
In ozone generation in element 10,910, due to the heat generated in their action, one of the ozone of generation
Divide and be decomposed, effective ozone yield is reduced.In the case of ozone generation element 910, need by being generated to ozone
Reduction that is cooling and inhibiting the ozone as caused by the decomposition of ozone is carried out with element 910.In contrast, as previously mentioned, ozone is given birth to
At with element 10, compared with ozone generation element 910, the formation efficiency of ozone is high, can generate the ozone of following amount, should
The decrement of ozone caused by amount offsets the decomposition for the thermally-induced ozone that the when of being acted as it generates.
On the other hand, if the distance W12 between electrode sub-portion 22A, 22B of ozone generation element 10 is extremely grown (for example, distance
W12 relative to the ratio between distance W11 more than 4.0 the case where), then the density of electrode sub-portion 22A, 22B is also reduced therewith.In this way, by
It is reduced in the density of electrode sub-portion 22A, 22B in the generation source as ozone, the ozone amount of generation can be reduced.Accordingly, with respect to smelly
Oxygen generate use element 10, it is believed that distance W12 relative to the ratio between distance W11 there are foregoing optimum range (1.5 or more and
2.5 or less).
In turn, the number of electrode sub-portion 22A, 22B for the ozone generation element 10 that embodiment is related to is less than comparative example
The number of electrode sub-portion 922A, 922B for the ozone generation element 910 being related to.Ozone generates the electrode with element 10 as a result,
Electrostatic capacitance between 21A, 21B becomes smaller than the electrostatic capacitance between electrode 921A, 921B of ozone generation element 910.In this way,
Since the load of AC power 31 becomes smaller, so AC power 31 can be made to minimize.
Then, with reference to Fig. 7 A to Fig. 7 D, Fig. 8 A and Fig. 8 B to ozone generation element 10 of the present embodiment
One example of manufacturing method illustrates.In addition, Fig. 7 A to Fig. 7 D, Fig. 8 A and Fig. 8 B are the ozone at line B-B with Fig. 2
Generate the sectional view in the corresponding each process of section direction view with element 10.In this manufacturing method, first, it is formed into electricity
The dielectric piece on the basis of medium substrate 13 and dielectric layer 12 is then formed into electrode 21A, 21B etc. in dielectric piece
Basis metal paste pattern.Then, after dielectric piece is laminated, the laminated body of dielectric piece is burnt into and is made
Ozone, which generates, uses element 10.
First, it is formed into dielectric piece (the so-called ceramic green on the basis of dielectric base plate 13 and dielectric layer 12
Piece).In detail, first, by using ball mill by CaO-B2O3-Al2O3-SiO2Glass, Al2O3, toluene and ethyl alcohol mixing
Solvent, dispersant and adhesive are crushed and are mixed, to make slurry.Then, obtained slurry system is utilized by scraper method
Make dielectric piece.In addition, the material used in sheet material formation process, is not limited to include material above-mentioned, can also wrap
Containing CaO-B2O3-Al2O3-SiO2Glass, the SiO of other types other than glass2、ZrO2、BaTiO3Equal oxides.Alternatively, in electricity
It, can also in the case that medium substrate 13 and dielectric layer 12 are formed by resin materials such as epoxy resin, polyimide resins
The resin materials such as epoxy resin, polyimide resin are used in sheet material formation process.
Then, the gold on the basis of plug 26A, 26B is formed into the multiple dielectric pieces for being used in dielectric base plate 13
Belong to cream filling part.In detail, as shown in Figure 7 A, using punching machines such as machine drilling machines, thickness is formed in dielectric piece 131
The through hole 132A penetrated through on direction.Through hole 132A is formed as, and becomes relatively same position when dielectric piece 131 has been laminated
It sets.Then, as shown in Figure 7 B, Ag cream is filled in each through hole 132A of dielectric piece 131.As a result, in the formation of dielectric piece 131
Metal paste filling part 261A.
Next, using screen printing technique, as seen in figure 7 c in the electricity for the top layer for being configured at dielectric base plate 13
Dieelctric sheet is formed into first metal paste pattern 211A, the 211B on the basis of electrode 21A, 21B.In addition, utilizing silk-screen printing skill
Art is configured at the most lower of dielectric base plate 13 in the multiple dielectric pieces for being used in dielectric base plate 13 as illustrated in fig. 7d
The dielectric piece of layer is formed into the second metal paste pattern 251A on the basis of backplate 25A, 25B.First metal paste pattern
211A, 211B and the second metal paste pattern 251A are by RuO2Cream is constituted.
Then, first, as shown in Figure 8 A, the multiple dielectric pieces 131 that would be used for dielectric base plate 13 are laminated, and
It is configured at a piece of dielectric that the basis for dielectric layer 12 is laminated on the dielectric piece 131 of the topmost of dielectric base plate 13
Piece 121.Then, dielectric piece 121,131 is crimped by press-connection machine, obtains laminated body.
Next, being burnt into obtained laminated body with 900 DEG C of firing temperature.As shown in Figure 8 B, dielectric piece
121, it 131 is sintered and forms dielectric layer 12,132.In addition, metal paste filling part 261A, first metal paste pattern 211A, 211B
And second metal paste pattern 251A sintering and form conductive part 262A, electrode 21A, 21B and backplate 25A.
As previously mentioned, in the manufacturing method of the ozone generation with element 10, take time and energy compared with compared to other process
The number of firing process is only primary.Therefore, it has the following advantages, that is, the system for being engaged in ozone generation element 10 can be mitigated
The burden of the operating personnel made.
As described above, the distance W11 of ozone generation of the present embodiment element 10 is different from distance
W12.As a result, ozone generation with element 10 compared with the ozone generation element 910 that comparative example is related to, from electrode 21A, 21B
Electrode sub-portion 22A, 22B between the electric field that generates energy that the electronics generated by the electric discharge electrode sub-portion 22A, 22B is given
Amount improves, therefore the generation of ozone is more actively changed.Therefore, ozone of the present embodiment, which generates, uses element 10 and comparative example
The ozone generation element 910 being related to is compared, and the formation efficiency of ozone is high, can generate the ozone of following amount, which offsets
The decrement of ozone caused by the decomposition of the thermally-induced ozone generated when as acting.Moreover, ozone generation element 10 can
Ensure and the same above ozone yield of ozone generation element 910.So ozone generation is not necessarily to element 10 by dielectric
The thickness of substrate 13, which thickens, to be either used together with cooler therefore can make ozone generation element 10 or given birth to comprising ozone
At the module integral miniaturization with element 10.
In addition, in ozone generation of the present embodiment in element 10, distance W12 is relative to the ratio between distance W11
1.5 or more and 2.5 ozone generations below compared with the ozone generation element 910 that comparative example is related to, have smelly with element 10
About 20% or more such advantage of formation efficiency height of oxygen.
In turn, in ozone generation of the present embodiment in element 10,12 covering dielectric substrate 13 of dielectric layer
The one side for foring electrode 21A, 21B.Electrode 21A, 21B is not exposed to the ozone generated as a result, therefore has and can inhibit
Electrode 21A, 21B's deteriorates such advantage.
[Bian Xingli ]
More than, embodiments of the present invention are illustrated, but the present invention is not limited to embodiments above-mentioned
Structure.It is electrode sub-portion for example, it is also possible to as the ozone generation element 210 that variation 1 shown in Fig. 9 is related to
222A, 222B are electrically connected via plug 227A, 227B with backplate 228A, 228B for being arranged at the back side of dielectric base plate 213
The structure connect.Here, constituting the electrode being electrically connected with backplate 228A by multiple electrodes sub-portion 222A and multiple plug 227A
221A constitutes the electrode 221B being electrically connected with backplate 228B by multiple electrodes sub-portion 222B and multiple plug 227B.
According to this structure, electrode sub-portion is omitted with the upper surface of element 210 in ozone generation, corresponding to which, can seek
Ask the diminution of the area of the upper surface of ozone generation element 210.Therefore, it is possible to seek the small-sized of ozone generation element 210
Change.
In embodiment above-mentioned, following example is illustrated, that is, each electrode sub-portion 22B with as it
It is mutually equal to be adjacent to the distance between the electrode sub-portion 22A of configuration W12 in the -X direction of the other side of short side direction.But
It is not limited to this, such as can also be as the ozone generation element 310 that variation 2 shown in Fig. 10 is related to, electrode sub-portion
22B and be adjacent in the -X direction of the other side of the short side direction as the electrode sub-portion 22B configuration electrode sub-portion 22A it
Between distance W321, W322, W323 it is mutually different.In ozone generation in element 310, exist about electrode sub-portion 22B and configuration
The distance between electrode sub-portion 22A in the -X direction of the electrode sub-portion 22B W321, W322, W323, more lean on +X direction side more
Greatly.
According to this structure, ozone generates the low density part (-X direction with electrode sub-portion 22A, 22B in element 310
Side) temperature become the part (+X direction side) higher than the density of electrode sub-portion 22A, 22B temperature it is low.Therefore, ozone generates
Even if being used in the state of so that its +X direction side is contacted with radiator with element 310, ozone generates whole with element 310
The temperature of body also declines.It can inhibit the ozone decomposed near the dielectric layer 12 of ozone generation element 310 as a result,.Therefore, energy
Enough while so that radiator is minimized, the production quantity of ozone of the ozone generation in element 310 is maintained with relatively high level.
Although in embodiments, illustrating dielectric base plate 13 and dielectric layer 12 by the roughly equal material of coefficient of thermal expansion
Expect the example formed, however, it is not limited to this, and dielectric base plate 13 can also be by the different material of coefficient of thermal expansion with dielectric layer 12
Material is formed.
Although in embodiments, the structure for having dielectric layer 12 is illustrated, however, it is not limited to this also may be used
To be the structure for not having dielectric layer 12.
Although the structure in various embodiments, being electrically connected with backplate 25A, 25B to AC power 31 is said
Bright, it can also be such as lower structure that however, it is not limited to this, that is, and AC power 31 is not electrically connected with backplate 25A, 25B, and
It is electrically connected with the part (for example, tongue piece portion 24A, 24B) for being arranged in electrode 21A, the 21B on the surface of dielectric base plate 13.
Although in various embodiments, being connected via plug 26A, 26B and backplate 25A, 25B to electrode 21A, 21B
Structure be illustrated, it for example can also be such as lower structure that however, it is not limited to this, that is, electrode 21A, 21B via plug with
Extraction electrode connection (not shown) in the end face of dielectric base plate 13 is set.
The ozone generation that embodiment is related to is not limited to the manufacturing method of element 10 in embodiment above-mentioned
The manufacturing method of explanation.For example, it can be following methods, that is, by be laminated in advance the laminated body of dielectric piece 131 into
Row firing, to prepare dielectric base plate 13.In this case, it can also be formed in the upper surface of the dielectric base plate 13 of preparation
Then in the upper surface printed glass cream of dielectric base plate 13, dielectric layer 12 is consequently formed in electrode 21A, 21B.Alternatively,
Can be following method, that is, by will form the dielectric piece 131 of first metal paste pattern 211A, 211B etc. and form
The dielectric piece 131 of metal paste charging part 261A is laminated and is burnt into, to prepare the dielectric base plate provided with electrode 21A, 21B
13.In this case, it is additionally formed dielectric in the upper surface of the dielectric base plate 13 provided with electrode 21A, 21B prepared
Layer 12.
More than, to embodiments of the present invention and the variation (content recorded comprising postscript.It is same as below.) carry out
Illustrate, but the present invention is not limited to these embodiments and variations.The present invention includes to be appropriately combined embodiment party
The mode of formula and variation is suitably applied with the mode of change to it.
The application is based on Japanese Patent Application Patent 2016-045478 filed in 9 days March in 2016.By Japan
Specification, claims and the attached drawing that patent application Patent 2016-045478 are integrally introduced into this theory as reference
In bright book.
Reference sign
10,210,310：Ozone generation element, 12,132：Dielectric layer, 13,213：Dielectric base plate, 21A, 21B,
221A,221B,321A,321B：Electrode, 22A, 22B, 222A, 222B：Electrode sub-portion, 23A, 23B：Electrode sub-portion, 24A, 24B：
Tongue piece portion, 25A, 25B, 228A, 228B：Backplate, 26A, 26B, 227A, 227B：Plug, 31：AC power, 121,131：
Dielectric piece, 131A, 131B：Contact hole, 132A：Through hole, 211A, 211B：First metal paste pattern, 251A：Second metal
Cream pattern, 261A：Metal paste charging part, 262A：Conductive part, A1, A2：Region, E1, E2：Electric field.
Claims (5)
1. a kind of ozone generation element, has：
Dielectric base plate；And
An interarea in the dielectric base plate is arranged in first comb poles and the second comb poles,
First comb poles has：
First terminal electrode portion；And
Multiple first electrode sub-portions are intersected with the first terminal electrode portion,
Second comb poles has：
Second terminal electrode portion；And
Multiple second electrode sub-portions are intersected with the second terminal electrode portion,
The first electrode sub-portion and the second electrode sub-portion are configured to be alternately arranged in one direction,
First distance is different from second distance, first distance be the first electrode sub-portion and with the first electrode sub-portion
The interval of the adjacent second electrode sub-portion in side in one direction, the second distance are the first electrode sub-portions and with described
One electrode sub-portion at the interval of the adjacent second electrode sub-portion of another direction side,
The second distance is 1.1 or more and 4.0 or less relative to first ratio of distances constant.
2. ozone generation element according to claim 1, wherein
The second distance is 1.5 or more and 2.5 or less relative to first ratio of distances constant.
3. ozone generation element according to claim 1 or 2, wherein
It is also equipped with：Dielectric layer covers one interarea of the dielectric base plate.
4. ozone generation element according to any one of claims 1 to 3, wherein
The first electrode sub-portion and the second electrode sub-portion are electric with the first terminal electrode portion, the Second terminal respectively
Pole portion is connected.
5. a kind of Ozone generator, has：
Ozone generation element described in any one of Claims 1-4；And
AC power applies alternating voltage between first comb poles and second comb poles.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016045478 | 2016-03-09 | ||
| JP2016-045478 | 2016-03-09 | ||
| PCT/JP2017/000752 WO2017154337A1 (en) | 2016-03-09 | 2017-01-12 | Ozone-generating element and ozone-generating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108712997A true CN108712997A (en) | 2018-10-26 |
| CN108712997B CN108712997B (en) | 2021-11-30 |
Family
ID=59790173
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201780015391.6A Active CN108712997B (en) | 2016-03-09 | 2017-01-12 | Ozone generating element and ozone generating device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6610771B2 (en) |
| CN (1) | CN108712997B (en) |
| DE (1) | DE112017001230T5 (en) |
| WO (1) | WO2017154337A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115594152A (en) * | 2021-07-09 | 2023-01-13 | 财团法人工业技术研究院（Tw） | Ozone generating device and ozone generating method |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1995014637A1 (en) * | 1993-11-26 | 1995-06-01 | Sergey Ventures Co., Llc | Ozone process using piezoelectric energy |
| CN2255425Y (en) * | 1996-06-14 | 1997-06-04 | 清华大学 | High-efficient high-concentration ozone generater |
| JP2000072410A (en) * | 1998-08-25 | 2000-03-07 | Toshiba Fa Syst Eng Corp | Ozone generation device |
| CN2609911Y (en) * | 2003-04-16 | 2004-04-07 | 薛荃 | Ozone generator |
| JP2008050200A (en) * | 2006-08-24 | 2008-03-06 | Toshiba Corp | Ozonizer |
| CN202322375U (en) * | 2011-11-10 | 2012-07-11 | 上海康特环保科技发展有限公司 | Ozone generator cell |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09286604A (en) * | 1996-04-19 | 1997-11-04 | Toshiba Fa Syst Eng Kk | Electric discharge treatment device |
| JPH10245204A (en) * | 1997-03-03 | 1998-09-14 | Toshiba Fa Syst Eng Kk | Apparatus for discharge in gas |
| JP3868709B2 (en) * | 2000-04-21 | 2007-01-17 | 東芝エフエーシステムエンジニアリング株式会社 | Ozone generator |
| JP4246937B2 (en) * | 2001-09-14 | 2009-04-02 | 株式会社東芝 | Ozone generator |
| JP6354456B2 (en) | 2014-08-27 | 2018-07-11 | 京セラドキュメントソリューションズ株式会社 | Electronic device and display program |
-
2017
- 2017-01-12 DE DE112017001230.9T patent/DE112017001230T5/en active Pending
- 2017-01-12 WO PCT/JP2017/000752 patent/WO2017154337A1/en active Application Filing
- 2017-01-12 JP JP2018504022A patent/JP6610771B2/en active Active
- 2017-01-12 CN CN201780015391.6A patent/CN108712997B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1995014637A1 (en) * | 1993-11-26 | 1995-06-01 | Sergey Ventures Co., Llc | Ozone process using piezoelectric energy |
| CN2255425Y (en) * | 1996-06-14 | 1997-06-04 | 清华大学 | High-efficient high-concentration ozone generater |
| JP2000072410A (en) * | 1998-08-25 | 2000-03-07 | Toshiba Fa Syst Eng Corp | Ozone generation device |
| CN2609911Y (en) * | 2003-04-16 | 2004-04-07 | 薛荃 | Ozone generator |
| JP2008050200A (en) * | 2006-08-24 | 2008-03-06 | Toshiba Corp | Ozonizer |
| CN202322375U (en) * | 2011-11-10 | 2012-07-11 | 上海康特环保科技发展有限公司 | Ozone generator cell |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115594152A (en) * | 2021-07-09 | 2023-01-13 | 财团法人工业技术研究院（Tw） | Ozone generating device and ozone generating method |
Also Published As
| Publication number | Publication date |
|---|---|
| DE112017001230T5 (en) | 2018-12-13 |
| WO2017154337A1 (en) | 2017-09-14 |
| CN108712997B (en) | 2021-11-30 |
| JP6610771B2 (en) | 2019-11-27 |
| JPWO2017154337A1 (en) | 2018-09-20 |
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