CN108709639A - Imaging spectrometer based on reflective prism-grating beam splitting module - Google Patents
Imaging spectrometer based on reflective prism-grating beam splitting module Download PDFInfo
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- CN108709639A CN108709639A CN201810095371.0A CN201810095371A CN108709639A CN 108709639 A CN108709639 A CN 108709639A CN 201810095371 A CN201810095371 A CN 201810095371A CN 108709639 A CN108709639 A CN 108709639A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2823—Imaging spectrometer
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0297—Constructional arrangements for removing other types of optical noise or for performing calibration
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Abstract
The present invention proposes a kind of imaging spectrometer based on reflective prism-grating beam splitting module, including at least entrance slit, collimation group, reflective prism-grating module, imaging group and focus planar detector, wherein reflective prism-grating module includes a transmission-type prism and a reflective planar diffraction grating；The application scenarios to specific reflection type optical path of the imaging spectrometer, are calculated by ray tracing, it may be determined that the combination of the apex angle of prism and the incisure density of plane diffraction grating can eliminate Spectral line bend under the parameter combination to specific wavelength；Reflective prism-grating module great advantage is to can be applied to reflecting light line structure, for space flight spectroscopy equipment, the temperature and air pressure change undergone in space is larger, therefore Cheney-Tener Czerny-Turner reflecting light line structures are used, the stabilization for keeping system performance when temperature and air pressure conditions change is conducive to.
Description
Technical field
It is the present invention relates to technical field of optical instrument, more particularly to a kind of based on reflective prism-grating beam splitting module
Imaging spectrometer.
Background technology
The Spectral line bend of spectrum line has a great influence for instrument performance in imaging spectral instrument, and with single prism or
Grating is the light path of dispersion element, and Spectral line bend is difficult to correct, and since prismatic decomposition is different from the characteristic of grating beam splitting, cause
Prism Spectral line bend is different from the direction of grating Spectral line bend, therefore can be corrected using the form of prism-grating module light splitting
Spectral line bend.Conventional prism-grating combination is all made of Transmissive versions, for space flight spectroscopy equipment, is undergone in space
Temperature and air pressure change it is larger, transmission-type light path performance can be severely impacted, and reflection type optical path is to the gentle buckling of temperature
The susceptibility of change is very low, and optical system is more stablized.
To overcome the above disadvantages, a kind of new imaging spectrometer based on reflective prism-grating beam splitting module is designed.
Invention content
In view of this, an embodiment of the present invention provides a kind of imaging spectrals based on reflective prism-grating beam splitting module
Instrument eliminates Spectral line bend using the combination of prism and reflective gratings, while using reflecting light line structure, reduce in temperature and
Influence when air pressure conditions change to system performance.
A kind of imaging spectrometer based on reflective prism-grating beam splitting module is provided in the embodiment of the present invention, at least
Including entrance slit, collimation group, reflective prism-grating module, imaging group and focus planar detector, the reflective prism-
Grating module includes a transmission-type prism and a reflective planar diffraction grating；Wherein, incident ray first is by described
Entrance slit is incident to the collimation group, is reflected as directional light by the collimation group, directional light is incident to the reflective rib
Mirror-grating module, successively by the light splitting of the first time of the transmission-type prism, the light splitting of the reflective planar diffraction grating
And second of light splitting of reflection and the transmission-type prism, it is then again incident on the imaging group, is reflected through the imaging group
It images on the focus planar detector.
Optionally, the imaging spectrometer uses Cheney-Tener light channel structure, the collimation group to use concave mirror,
The imaging group uses concave mirror.
Optionally, the transmission-type prism is equipped with first side, second side and bottom surface, the first side and institute
Plane perpendicular is stated, the distance between the first side and the reflective planar diffraction grating D1 are more than zero, and described first
The distance between side and the reflective planar diffraction grating D1 are less than the second side and the reflective planar diffraction
The distance between grating D2.
Optionally, the first side and the plane of the reflective planar diffraction grating are placed in parallel.
Optionally, the transmission-type prism apex angle is 12.5 °.
Optionally, the reflective planar diffraction grating incisure density is 180l/mm.
The imaging spectrometer based on reflective prism-grating beam splitting module of the present invention, passes through prism and reflective gratings
Combination, the first side of the transmission-type prism and the plane of the reflective planar diffraction grating be placed in parallel,
The combination that can determine the apex angle of transmission-type prism and the incisure density of reflective planar diffraction grating by ray tracing, for
Specific wavelength calibration Spectral line bend, and use Cheney-Tener light channel structure, reflection type optical path is conducive to gentle in temperature
The stabilization of system performance is kept when press strip part changes.
Description of the drawings
Fig. 1 is the light channel structure schematic diagram of the imaging spectrometer of one embodiment of the invention；
Fig. 2 is reflective prism-grating module ray tracing schematic diagram of one embodiment of the invention.
Reference numeral：Entrance slit 1；Collimation group 2；Reflective prism-grating module 3；Imaging group 4；Focus planar detector
5；Transmission-type prism 31；Reflective planar diffraction grating 32；First plane of refraction 311；Second plane of refraction 312；Grating face
321。
Specific implementation mode
In order to enable those skilled in the art to better understand the solution of the present invention, below in conjunction in the embodiment of the present invention
Attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is only
The embodiment of a part of the invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill people
The every other embodiment that member is obtained without making creative work should all belong to the model that the present invention protects
It encloses.
Fig. 1 is please referred to, for the present invention is based on the light channel structure of the imaging spectrometer of reflective prism-grating beam splitting module,
Imaging spectrometer uses Cheney-Tener (Czerny-Turner) light channel structure, Cheney-Tener light channel structure to be conducive in temperature
The stabilization of system performance is kept when changing with air pressure conditions.
The imaging spectrometer based on reflective prism-grating beam splitting module includes entrance slit 1, collimation group 2, reflective
Prism-grating module 3, imaging group 4 and focus planar detector 5, the reflective prism-grating module 3 include a transmission-type
Prism 31 and a reflective planar diffraction grating 32.Wherein, first incident ray be incident to by the entrance slit 1 it is described
Collimation group 2 is reflected as directional light by the collimation group 2, and directional light is incident to the reflective prism-grating module 3, successively
By the first time light splitting of the transmission-type prism 31, the light splitting of the reflective planar diffraction grating 32 and reflection and described
Second of light splitting of transmission-type prism 31, is then again incident on the imaging group 4, reflects last imaging through the imaging group 4
In on the focus planar detector 5.It in the light path optimization process of imaging spectrometer, is required according to actual aberration correction, selection
The face type of the collimation group 2 and the imaging group 4, and the eccentric angle of the collimation group 2 and the imaging group 4 is reasonably set
Degree, to correct system aberration.The collimation group 2 uses concave mirror, the imaging group 4 to use concave mirror.Other
In embodiment, the specific face type of the collimation group 2 and the imaging group 4 according to actual aberration alignment requirements can be selected spherical surface or
Person's paraboloid or other are aspherical.
The transmission-type prism 31 is equipped with first side, second side and bottom surface, institute in one of the embodiments,
First side and the plane perpendicular are stated, the distance between the first side and the reflective planar diffraction grating 32 D1 are big
In zero, and the distance between the first side and the reflective planar diffraction grating 32 D1 are less than the second side and institute
State the distance between reflective planar diffraction grating 32 D2.The first side is flat with the reflective planar diffraction grating 32
Face is placed in parallel.
The apex angle of the transmission-type prism 31 is 12.5 ° in one of the embodiments,.The reflective planar diffraction
The incisure density of grating 32 is 180l/mm.
Fig. 2 is please referred to, is the 3 ray tracing schematic diagram of reflective prism-grating module of one embodiment of the invention.Fig. 2
Show the main cross section of prism-grating, shown in ray tracing light path be projected light of the non-main cross section light in main cross section
Road, it is θ that light, which is incident on the incidence angle on first plane of refraction 311 of the transmission-type prism prism 31,1, refraction angle is
θ1', had by the law of refraction of the non-main cross section light in main cross section：
sinθ1=Nsin θ1' (1)
Wherein N is known as assuming refractive index, is determined by the refractive index n of non-main cross section incident angle β and prism material, specifically
Expression formula be：
Then light is incident on second plane of refraction 312 of the prism 31, incidence angle θ2, refraction angle θ2', by
Geometrical relationship can be seen that in figure：
θ1'+θ2=γ (3)
Wherein γ is the apex angle of the transmission-type prism 31, and non-master section is similarly applied on second plane of refraction 312
The law of refraction of the face light in main cross section has：
Nsinθ5=sin θ5' (4)
Then light is incident on the first face 321 of the reflective planar diffraction grating 32, incidence angle θ3, the angle of diffraction is
θ3'.Due to the first face of the second plane of refraction 312 and the reflective planar diffraction grating 32 of the transmission-type prism 31
321 is parallel, therefore：
θ2'=θ3 (5)
Grating equation using non-main cross section light has：
Wherein d is screen periods, and k is grating level used, and λ is Spectral line bend tuning wavelength.Then light enters for the second time
It is mapped to the second plane of refraction 312 of the transmission-type prism 31, incidence angle θ4, angle of diffraction θ4', can equally apply non-master section
Face formula has：
sinθ4=Nsin θ4' (7)
Last light is incident on the first refractive face 311 of the transmission-type prism 31, incidence angle θ for the second time5, diffraction
Angle is θ5', had by geometrical relationship in figure：
θ4'+ β=θ5 (8)
Had by non-main cross section formula：
Nsinθ5=sin θ5' (9)
So far, complete ray tracing of the light in the reflective prism-grating beam splitting module 3, light finally by
The first refractive face 311 of the transmission-type prism 31 is with angle, θ5'Outgoing, leaves the reflective prism-grating beam splitting mould
Block 3.Thus according to Spectral line bend formula, calculate three times pass through beam splitter three Spectral line bend components be respectively：
Wherein Δ y'p1, Δ y'gWith Δ y'p2Respectively for the first time by the Spectral line bend point of the transmission-type prism 31
Amount passes through the transmission-type prism 31 by the Spectral line bend component of the reflective planar diffraction grating 32 and second
Spectral line bend component, f ' are the focal length of the collimation group 2 and the imaging group 4, so the reflective prism-grating beam splitting mould
Total spectral line of block 3 is bent into：
Δ y=Δs y'P1+Δy'g+Δy'P2 (13)
Specific light channel structure parameter is combined according to formula (1)~(13), counter can be released for specific wavelength Spectral line bend
The parameter combination of the apex angle for the transmission-type prism 31 for being zero and the incisure density of the reflective planar diffraction grating 32.
Prism vertex angle in the present embodiment is 12.5 °, and grating line density is 180l/mm.
The imaging spectrometer based on reflective prism-grating beam splitting module of the present invention, passes through prism and reflective gratings
Combination, the first side of the transmission-type prism 31 is parallel with the plane of the reflective planar diffraction grating 32 to put
It sets, the group of the apex angle of transmission-type prism 31 and the incisure density of reflective planar diffraction grating 32 is can determine by ray tracing
It closes, for specific wavelength calibration Spectral line bend, and uses Cheney-Tener light channel structure, reflection type optical path is conducive to
Temperature and air pressure conditions keep the stabilization of system performance when changing.
The specific implementation mode of present invention described above, is not intended to limit the scope of the present invention..Any basis
Various other corresponding changes made by the technical concept of the present invention and deformation, should be included in the guarantor of the claims in the present invention
It protects in range.
Claims (6)
1. a kind of imaging spectrometer based on reflective prism-grating beam splitting module, it is characterised in that：Including at least incident narrow
Seam, collimation group, reflective prism-grating module, imaging group and focus planar detector, the reflective prism-grating module packet
Include a transmission-type prism and a reflective planar diffraction grating；
Wherein, incident ray is incident to the collimation group by the entrance slit, and directional light is reflected as by the collimation group, puts down
Row light is incident to the reflective prism-grating module, is divided successively by the first time of the transmission-type prism, is described anti-
It penetrates the light splitting of formula plane diffraction grating and reflects second of light splitting with the transmission-type prism, be again incident on the imaging
Group, through the imaging group catoptric imaging on the focus planar detector.
2. the imaging spectrometer as described in claim 1 based on reflective prism-grating beam splitting module, it is characterised in that：Institute
Stating imaging spectrometer uses Cheney-Tener light channel structure, the collimation group that concave mirror, the imaging group is used to use concave surface
Speculum.
3. the imaging spectrometer as described in claim 1 based on reflective prism-grating beam splitting module, it is characterised in that：Institute
It states transmission-type prism and is equipped with first side, second side and bottom surface, the first side and the plane perpendicular, described the
The distance between one side and the reflective planar diffraction grating D1 are more than zero, and the first side with it is described reflective flat
The distance between face diffraction grating D1 is less than the distance between the second side and the reflective planar diffraction grating D2.
4. the imaging spectrometer as claimed in claim 3 based on reflective prism-grating beam splitting module, it is characterised in that：Institute
It states first side and the plane of the reflective planar diffraction grating is placed in parallel.
5. the imaging spectrometer as claimed in claim 4 based on reflective prism-grating beam splitting module, it is characterised in that：Institute
It is 12.5 ° to state transmission-type prism apex angle.
6. the imaging spectrometer as claimed in claim 4 based on reflective prism-grating beam splitting module, it is characterised in that：Institute
It is 180l/mm to state reflective planar diffraction grating incisure density.
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| CN201810095371.0A CN108709639A (en) | 2018-01-31 | 2018-01-31 | Imaging spectrometer based on reflective prism-grating beam splitting module |
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| CN201810095371.0A CN108709639A (en) | 2018-01-31 | 2018-01-31 | Imaging spectrometer based on reflective prism-grating beam splitting module |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110631702A (en) * | 2019-09-17 | 2019-12-31 | 华中科技大学 | Spectral resolution enhancing device |
| CN113280742A (en) * | 2021-06-03 | 2021-08-20 | 华北水利水电大学 | Height test sensing system based on plane diffraction grating |
| CN113485020A (en) * | 2021-05-31 | 2021-10-08 | 上海悠睿光学有限公司 | Light splitter based on transmission grating |
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| CN101498606A (en) * | 2009-01-15 | 2009-08-05 | 清华大学 | Cheney-turner spectrometer |
| CN104034419A (en) * | 2014-05-05 | 2014-09-10 | 中国科学院长春光学精密机械与物理研究所 | Imaging spectrometer system capable of correcting bending of spectral line and correction method thereof |
| CN104502286A (en) * | 2014-12-25 | 2015-04-08 | 中国科学院长春光学精密机械与物理研究所 | Tandem grating dispersion imaging spectrometer |
| CN106546330A (en) * | 2016-11-01 | 2017-03-29 | 清华大学 | A kind of spectroscopic analysis system and spectroscopic analysis methods |
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2018
- 2018-01-31 CN CN201810095371.0A patent/CN108709639A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101498606A (en) * | 2009-01-15 | 2009-08-05 | 清华大学 | Cheney-turner spectrometer |
| CN104034419A (en) * | 2014-05-05 | 2014-09-10 | 中国科学院长春光学精密机械与物理研究所 | Imaging spectrometer system capable of correcting bending of spectral line and correction method thereof |
| CN104502286A (en) * | 2014-12-25 | 2015-04-08 | 中国科学院长春光学精密机械与物理研究所 | Tandem grating dispersion imaging spectrometer |
| CN106546330A (en) * | 2016-11-01 | 2017-03-29 | 清华大学 | A kind of spectroscopic analysis system and spectroscopic analysis methods |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110631702A (en) * | 2019-09-17 | 2019-12-31 | 华中科技大学 | Spectral resolution enhancing device |
| CN110631702B (en) * | 2019-09-17 | 2021-03-26 | 华中科技大学 | Spectral resolution enhancing device |
| CN113485020A (en) * | 2021-05-31 | 2021-10-08 | 上海悠睿光学有限公司 | Light splitter based on transmission grating |
| CN113280742A (en) * | 2021-06-03 | 2021-08-20 | 华北水利水电大学 | Height test sensing system based on plane diffraction grating |
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Application publication date: 20181026 |