CN108662988A - A kind of inclination angular misalignment optical intensity modulation type fiber-optic sensor probe - Google Patents
A kind of inclination angular misalignment optical intensity modulation type fiber-optic sensor probe Download PDFInfo
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- CN108662988A CN108662988A CN201810589495.4A CN201810589495A CN108662988A CN 108662988 A CN108662988 A CN 108662988A CN 201810589495 A CN201810589495 A CN 201810589495A CN 108662988 A CN108662988 A CN 108662988A
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- Prior art keywords
- optical fiber
- fiber
- reception
- optic sensor
- intensity modulation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The present invention relates to a kind of inclination angular misalignment optical intensity modulation type fiber-optic sensor probes, including send optical fiber, and reception optical fiber, and encapsulation send the sleeve of optical fiber and reception optical fiber；The one end for sending optical fiber is connect with the laser of transmitting light, and reception optical fiber and reference path are connect with photodetector respectively；Its main feature is that fiber-optic sensor probe is to send fiber optic hub as axis, fiber arrangement is sent at the center of probe, reception optical fiber and transmission optical fiber degree at an angle β, and inclined be evenly distributed on sends around optical fiber, the end of reception optical fiber and transmission optical fiber are all compact arranged, i.e., the fiber-optic sensor probe is coaxial configuration；Present invention probe can complete effective measurement that surface includes the larger point of curvature, be not only able to reduce dead zone, and the range in linear measurement section can also be expanded by improving sensitivity, greatly improve the performance of optical intensity modulation type fibre optical sensor.
Description
Technical field
The invention belongs to technical field of optical fiber sensing, and in particular to a kind of inclination angular misalignment optical intensity modulation type optical fiber
Sensor probe.
Background technology
Fibre optical sensor is a kind of novel sensor developed rapidly the 1970s.In recent decades, with
The continuous development of optical fiber technology, fiber optic sensor technology has evolved into ripe, reflection type strength in a variety of non-contact measurement systems
Modulation type (RIM) fibre optical sensor is widely used in because of the features such as its stability, reliability in measuring surface form.
The larger point of curvature will necessarily be encountered when measuring object surface appearance, the angle of reflected light can be very big at this time, if by
It is relatively a little bigger more to survey surface curvature change, the light for entering reception optical fiber corresponding will reduce.And RIM type Fibre Optical Sensors
Device is by light intensity variation come measurement surface pattern, therefore is particularly important to the compensation of light intensity.Thus, to improve measurement
The measurement scenic spot of system and measurement range need to be improved the structure of fibre-optical probe.
Currently, the end face of common reflection-type optical fibre sensor probe is based on plane, that is, the output optical fiber and incidence
In the same plane, the arrangement of internal optical fiber beam is in mainly stochastic pattern, parallel type, coaxial type and semi-circular row at the fine end of optical fiber
Row, a variety of different arrangement modes influence the height of the size and sensitivity of measurement range.For survey two articles surface topography or
The fibre-optical probe of person's roughness is mostly the structure of individual pen coaxial-type or double-round coaxial-type, and the end face of both structures is all
Plane sends optical fiber and receives optical fiber in approximately the same plane.Because transmission optical fiber and reception optical fiber are compact arranged,
Many data can be lost when the plane for the point that structure in the same plane cries out curvature larger measurement.
When being compensated to light intensity, common collocation structure is divided into two kinds, another one is three compensating optical fiber structures of use
Kind is to go out to introduce a reference path as compensation from laser.Three light collocation structures can utilize two group information correlations with
Difference carry out data processing reach compensation purpose, but have no idea eliminate light source fluctuation, drift the problems such as.
Invention content
The purpose of the present invention is intended to the shortcomings that overcoming the structure of fiber-optic sensor probe and deficiency, it is proposed that one kind can subtract
Small dead zone, the inclination angular misalignment optical intensity modulation type fibre optical sensor for increasing linear measurement section, improving measurement sensitivity
Probe.
To achieve the above object, the technical scheme is that：
A kind of inclination angular misalignment optical intensity modulation type fiber-optic sensor probe, including optical fiber 1 is sent, reception optical fiber 2,
And encapsulation sends the metal sleeve of optical fiber 1 and reception optical fiber 2；One end of the transmission optical fiber and the laser of transmitting light connect
It connects, reception optical fiber and reference path are connect with photodetector respectively；It is characterized in that：The fiber-optic sensor probe be with
Transmission fiber optic hub is axis, the transmissions fiber arrangement at the center of probe, reception optical fiber with send that optical fiber is at an angle β to spend 4, and
Inclined be evenly distributed on sends around optical fiber, the end of reception optical fiber and send optical fiber be all it is compact arranged, i.e., it is described
Fiber-optic sensor probe is coaxial configuration.
The reception optical fiber has the six roots of sensation, the oriented dislocation inside contracted between transmission fiber end face and the reception optical fiber end face
Amount 3.
It is all of coupled connections using FC connectors between the reception optical fiber and reference path and photodetector.
The launching fiber is the multimode fibre of 9 μm of core diameter, and reception optical fiber is the multimode fibre of 65 μm of core diameter.
The reception optical fiber is with transmission optical fiber at angle of inclination beta=2 °.
The magnitude of misalignment sent between fiber end face and reception optical fiber end face is 200um.
The present invention has substantive distinguishing features and conspicuousness effect compared with prior art：
The sonde configuration of the present invention uses the dislocation type light comprising inclination angle based on the improvement of individual pen coaxial-type sonde configuration
Fine sonde configuration can complete effective measurement that surface includes the larger point of curvature, be not only able to reduce dead zone, improve sensitive
Degree can also expand the range in linear measurement section, greatly improve the performance of optical intensity modulation type fibre optical sensor.
Description of the drawings
Fig. 1 is the structural schematic diagram that the present invention tilts angular misalignment optical intensity modulation type fiber-optic sensor probe.
Fig. 2 is that the axis of the present invention surveys schematic three dimensional views.
Fig. 3 is the structure chart that measuring system of the present invention includes reference path.
Fig. 4 is pair of dislocation type fibre-optical probe and coaxial-type fibre-optical probe modulation characteristics curve of the present invention comprising inclination angle
Than figure.
Specific implementation mode
As depicted in figs. 1 and 2, it is a kind of inclination angular misalignment optical intensity modulation type fiber-optic sensor probe of the present invention
Structural schematic diagram and axonometric drawing.This specific implementation is for having the structure of two layers of reception optical fiber, and encapsulation sends optical fiber 1 and connects
Receive the metal sleeve of optical fiber 2；Protection scope of the present invention is not limited to example.
By a transmission optical fiber, the six roots of sensation is inclined for a kind of inclination angular misalignment optical intensity modulation type fiber-optic sensor probe
Reception optical fiber forms.Send the center that optical fiber is located at fibre-optical probe, the tail of the six roots of sensation inclination reception optical fiber at an angle β with optical fiber is sent
End is due to sending light close-packed arrays.Magnitude of misalignment h is parallel to reception optical fiber direction toward the internal retraction h (μm) of probe.In figure, r1
It is respectively to send optical fiber and reception optical fiber radius with r2, θ is the maximum angle of emergence for sending optical fiber, and θ=arcsin (NA), NA are hair
Send the numerical aperture of optical fiber.D is the distance between fibre-optical probe and reflecting surface.
The gap between optical fiber and reception optical fiber is sent, relative position can be encapsulated as Fibre Optical Sensor after fixing by metal sleeve
The probe of device.
As shown in figure 3, a kind of measuring system tilting angular misalignment optical intensity modulation type fibre optical sensor of the present invention, it should
System includes host computer, light source (laser), photodetector, the fiber-optic sensor probe of the present invention and testee；
One end of transmission optical fiber of the fiber-optic sensor probe of the present invention and the pigtail coupling of laser connect, the other end point
At two-way, all the way as the transmission optical fiber in fibre-optical probe, another way, which is used as, refers to light path, herein using the minimum fusion of loss
Optical fiber.Six roots of sensation reception optical fiber and reference path are of coupled connections with two ports of photodetector using FC connectors respectively.It connects
It is 1550nm to receive optical fiber and carry wavelength, and light intensity is I (r)
Gauss light via testee surface reflection information；Wherein：P0For the power of laser, w (2d) is outgoing
Light sends the beam radius at fiber end face 2d in distance, and d is the distance between fibre-optical probe and reflecting surface.R is Radial Integrals
Variable.
Reference path then only carries light source information, by the two paths of signals that photodetector obtains make ratio can eliminate by
The error that light source fluctuation and drift are brought to measuring system.Data information after ratio is exactly between displacement and light intensity
Relationship, i.e. modulation characteristics curve.Testee surface can be scanned using this correspondence, restore measured surface shape
Looks.
Experimental measurement system, using the laser of LR-SFJ-1550/10Mw, the desk-top photodetectors of JW101.Send light
Fibre uses the single mode optical fiber that a diameter of 9 μm of cladding diameters are NA=0.12 for 125 μm of numerical apertures, and reception optical fiber is using a diameter of
The multimode fibre that 65 μm of cladding diameters are 125 μm.Why the end of single mode optical fiber and multimode fibre is in close-packed arrays, be because
Gap can cause the increase in dead zone and the reduction of sensitivity.Maximum output angle θ=arcsin (NA) of single mode optical fiber.It is adopted in experiment
The maximum angle of emergence with numerical aperture NA=0.17, therefore transmission optical fiber is 6 °.H=200 μm of magnitude of misalignment selection, angle of inclination beta=
2 ° of progress emulation experiments.
Modulation characteristics curve can be obtained by emulation experiment, as shown in Figure 4.Pass through the coaxial-type light with end face for plane
The comparison of the modulation characteristics curve of fibre probe is as can be seen that include the dislocation type fibre-optical probe structural modulation characteristic of angle of inclination beta=2
The dead zone of curve is reduced to 15.5 μm by original 92.4 μm, and the reduction in dead zone is conducive to measure the smaller surface of roughness.Peak
Value is by original 2.38 × 10-2Increase to 3.37 × 10-2.Scarp slope linear measurement section and adverse grade linear measurement section difference
Increase 60 μm and 37 μm of.Sensitivity has least square fitting that can obtain, and has been increased to 1.94 × 10-4In contrast to coaxial-type
Fibre-optical probe improves nearly 2 times.
Therefore the dislocation type fibre-optical probe structure comprising inclination angle improves optical intensity modulation type Fibre Optical Sensor really
The performance of device.
Claims (6)
1. a kind of inclination angular misalignment optical intensity modulation type fiber-optic sensor probe, including send optical fiber (1), reception optical fiber
(2), and encapsulation send optical fiber and reception optical fiber sleeve；One end of the transmission optical fiber and the laser of transmitting light connect
It connects, reception optical fiber and reference path are connect with photodetector respectively；It is characterized in that：The fiber-optic sensor probe be with
Transmission fiber optic hub is axis, and the transmissions fiber arrangement is at the center of probe, reception optical fiber and transmission optical fiber degree (4) at an angle β,
And inclined be evenly distributed on sends around optical fiber, the end of reception optical fiber and send optical fiber be all it is compact arranged, i.e., it is described
Fiber-optic sensor probe be coaxial configuration.
2. a kind of inclination angular misalignment optical intensity modulation type fiber-optic sensor probe according to claim 1, feature
It is：The reception optical fiber has the six roots of sensation, the oriented magnitude of misalignment inside contracted between transmission fiber end face and the reception optical fiber end face
(3)。
3. a kind of inclination angular misalignment optical intensity modulation type fiber-optic sensor probe according to claim 1, feature
It is：It is all of coupled connections using FC connectors between the reception optical fiber and reference path and photodetector.
4. a kind of inclination angular misalignment optical intensity modulation type fiber-optic sensor probe according to claim 1, feature
It is：The launching fiber is the multimode fibre of 9 μm of core diameter, and reception optical fiber is the multimode fibre of 65 μm of core diameter.
5. a kind of inclination angular misalignment optical intensity modulation type fiber-optic sensor probe according to claim 1, feature
It is：The reception optical fiber is with transmission optical fiber at angle of inclination beta=2 °.
6. a kind of inclination angular misalignment optical intensity modulation type fibre optical sensor according to claim 1, it is characterised in that：
The magnitude of misalignment sent between fiber end face and reception optical fiber end face is 200um.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810589495.4A CN108662988A (en) | 2018-06-08 | 2018-06-08 | A kind of inclination angular misalignment optical intensity modulation type fiber-optic sensor probe |
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| CN201810589495.4A CN108662988A (en) | 2018-06-08 | 2018-06-08 | A kind of inclination angular misalignment optical intensity modulation type fiber-optic sensor probe |
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| CN201810589495.4A Pending CN108662988A (en) | 2018-06-08 | 2018-06-08 | A kind of inclination angular misalignment optical intensity modulation type fiber-optic sensor probe |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109764813A (en) * | 2018-12-20 | 2019-05-17 | 西安交通大学 | A kind of adjustable reflective light intensity modulation system method using in optic fiber displacement sensor probe of range |
| CN109781155A (en) * | 2019-02-27 | 2019-05-21 | 中北大学 | A kind of reflective double-round coaxial type fiber-optic sensor probe containing inclination angle |
| CN112762861A (en) * | 2019-11-04 | 2021-05-07 | 聊城大学 | Multi-core optical fiber sensing assembly and multi-core optical fiber sensing system |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101799303A (en) * | 2010-04-12 | 2010-08-11 | 哈尔滨工程大学 | Reflection type inclined optical fiber sensor based on monomode optical fiber radiation |
| CN102680073A (en) * | 2012-05-21 | 2012-09-19 | 天津大学 | Novel optical fiber vibration measurement instrument |
| CN107255486A (en) * | 2017-07-18 | 2017-10-17 | 中北大学 | A kind of optical intensity modulation type fiber-optic sensor probe |
-
2018
- 2018-06-08 CN CN201810589495.4A patent/CN108662988A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101799303A (en) * | 2010-04-12 | 2010-08-11 | 哈尔滨工程大学 | Reflection type inclined optical fiber sensor based on monomode optical fiber radiation |
| CN102680073A (en) * | 2012-05-21 | 2012-09-19 | 天津大学 | Novel optical fiber vibration measurement instrument |
| CN107255486A (en) * | 2017-07-18 | 2017-10-17 | 中北大学 | A kind of optical intensity modulation type fiber-optic sensor probe |
Non-Patent Citations (1)
| Title |
|---|
| 方兰兰: "一种提高反射式光纤位移传感器灵敏度的方法", 《应用激光》 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109764813A (en) * | 2018-12-20 | 2019-05-17 | 西安交通大学 | A kind of adjustable reflective light intensity modulation system method using in optic fiber displacement sensor probe of range |
| CN109781155A (en) * | 2019-02-27 | 2019-05-21 | 中北大学 | A kind of reflective double-round coaxial type fiber-optic sensor probe containing inclination angle |
| CN112762861A (en) * | 2019-11-04 | 2021-05-07 | 聊城大学 | Multi-core optical fiber sensing assembly and multi-core optical fiber sensing system |
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Application publication date: 20181016 |