CN108662985B - Surface profile scanning method and device - Google Patents
Surface profile scanning method and device Download PDFInfo
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- CN108662985B CN108662985B CN201710204110.3A CN201710204110A CN108662985B CN 108662985 B CN108662985 B CN 108662985B CN 201710204110 A CN201710204110 A CN 201710204110A CN 108662985 B CN108662985 B CN 108662985B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
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Abstract
The invention discloses a surface profile scanning method and a device thereof, wherein the method comprises the following steps: setting a scanning area, and setting a test piece into at least one scanning area and at least one moving area; executing scanning, moving an interference objective lens arranged on a scanning unit in the scanning area to enable the scanning unit to scan the test piece in the scanning area and obtain scanning information, and calculating the scanning information to form a scanning contour value corresponding to the scanning area; a moving module coupled to the scanning unit controls the scanning unit to move a predetermined distance in the moving area, and sets a predetermined profile value corresponding to the moving area when the scanning unit does not scan; and obtaining a surface profile, wherein the preset profile value is combined with the scanning profile value to obtain the surface profile of the test piece.
Description
Technical Field
The present invention relates to a method and an apparatus for scanning a surface profile, and more particularly, to a method and an apparatus for scanning a surface profile of a test piece.
Background
White light interference techniques are commonly used for the detection of three-dimensional stereo topography. The existing three-dimensional morphology detection method is to divide a test piece into a plurality of positions to be detected, and a white light is projected to a position to be detected of the test piece through an interference objective lens. The interference objective lens moves axially to project the white light to different axial positions of the position to be measured.
In order to obtain the surface profile of the test piece, the interference objective lens moves a plurality of preset distances in an axial direction at each position to be tested of the test piece, and a vision module obtains a plurality of images at each preset distance respectively, wherein the plurality of images can reach hundreds to thousands of images.
As mentioned above, the test piece has several positions to be measured, and if hundreds or thousands of images are taken at each position to be measured, the number of the total images is very considerable, and the interpretation is difficult. In addition, the interference objective lens axially moves in a larger distance relative to each position to be measured, so that the moving module of the interference objective lens is driven to be easily damaged when the interference objective lens is used for a long time.
In addition, when scanning the surface profile of the test piece, the operator usually pays attention to two ranges, namely the upper section and the lower section of the surface profile, and pays less attention to the middle section of the surface profile when inspecting the characteristics of the surface profile of the test piece based on requirements.
Disclosure of Invention
The present invention provides a surface profile scanning method and apparatus thereof, which can reduce the number of captured scanned images and scan only the set position of the test piece to improve the scanning rate and reduce the probability of the damage of the scanning device.
According to the above object, the present invention provides a surface profile scanning method, comprising the steps of:
setting a scanning area, and setting a test piece into at least one scanning area and at least one moving area;
executing scanning, moving an interference objective lens arranged on a scanning unit in the scanning area to enable the scanning unit to scan the test piece in the scanning area and obtain scanning information, and calculating the scanning information to form a scanning contour value corresponding to the scanning area; a moving module coupled to the scanning unit controls the scanning unit to move a predetermined distance in the moving area, and sets a predetermined profile value corresponding to the moving area when the scanning unit does not scan; and
and obtaining the surface profile, and combining the preset profile value and the scanning profile value to obtain the surface profile of the test piece.
The present invention also provides a surface profile scanning device, comprising:
a mobile module;
a scanning unit coupled to the moving module, the scanning unit having a vision module and an interference objective lens; and
an integration unit connected with the scanning unit;
the moving module controls the scanning unit to move axially relative to a test piece; the interference objective lens moves axially relative to the test piece; the test piece is set to be at least one scanning area and at least one moving area; the scanning unit provides a test light beam, the test light beam passes through the interference objective lens to be projected to the scanning area and form a reflected light beam, the reflected light beam passes through the interference objective lens and then is guided to the vision module and received by the vision module, so that scanning information is formed, and the integration unit calculates the scanning information to form a scanning contour value corresponding to the scanning area; the mobile module controls the scanning unit to move a preset distance in the mobile area, and when the scanning unit does not scan, a preset contour value corresponding to the mobile area is set; the integration unit is combined with the scanning contour value and the preset contour value to obtain the surface contour of the test piece.
In an embodiment of the invention, in the step of performing the scanning, the scanning unit scans the scanning area first, and the scanning unit moves in the moving area later; or the scanning unit moves before the moving area and scans the scanning area after the scanning unit.
In an embodiment of the invention, the scanning unit includes a first lens, a beam splitter, a second lens, a light source and a piezoelectric micro-actuator, the first lens is located below the vision module, the beam splitter is located below the first lens, the second lens is located at one side of the beam splitter, the light source is located at one side of the second lens, the piezoelectric micro-actuator is located below the beam splitter, the piezoelectric micro-actuator is coupled to the interference objective lens, the light source provides the test light beam, the test light beam passes through the second lens, the beam splitter and the interference objective lens and then is projected to the test piece to form the reflected light beam, and the reflected light beam passes through the interference objective lens, the beam splitter and the first lens and then is received by the vision module.
Based on the above, the surface profile scanning method and the device thereof provided by the present invention can reduce the overall scanning time because the scanning unit performs a large Z-axis movement relative to the moving area and does not perform scanning, and therefore the scanning unit only scans the scanning area. The piezoelectric micro-actuator performs a small Z-axis movement relative to the scanning area, so that the interference objective lens can axially move in a short distance relative to each position to be measured, and the damage rate of the piezoelectric micro-actuator can be reduced.
In order to make the aforementioned and other features and advantages of the invention more comprehensible, embodiments accompanied with figures are described in detail below.
Drawings
FIG. 1 is a schematic view of a surface profile scanning apparatus provided in the present invention;
FIG. 2 is a schematic view of a test position of a test piece;
FIG. 3A is a schematic diagram of at least one scan area, at least one overlap area, and at least one move area;
FIG. 3B is another schematic view of the height directions of the scan area, the overlap area and the shift area;
FIG. 3C is a partial schematic view of the scanning area, the overlapping area and the moving area in the height direction;
FIG. 3D is another partial schematic view of the scanning area, the overlapping area and the moving area in the height direction;
fig. 4 is a schematic diagram of a surface profile scanning method according to the present invention.
Description of reference numerals: 1-a scanning unit; 10-a vision module; 11-a first lens; 12-a spectroscope; 13-an interference objective; 14-a piezoelectric micro-actuator; 15-a second lens; 16-a light source; 160-a test beam; 17-a movement module; 18-an integration unit; 20-a test piece; 200-test position; 201-scanning area (first scanning area); 202-a moving area; 203-scanning area (second scanning area); 204-reflected light beam; 205-an overlap region; S1-S4-step.
Detailed Description
As shown in fig. 1, the present invention provides a surface profile scanning device, which comprises a scanning unit 1, a moving module 17 and an integrating unit 18.
The scanning unit 1 has a vision module 10, a first lens 11, a beam splitter 12, an interference objective 13, a piezoelectric micro-actuator 14, a second lens 15, and a light source 16.
The first lens 11 is located below the vision module 10. The beam splitter 12 is located below the first lens 11. The piezoelectric microactuator 14 is located below the beam splitter 12. The interference objective 13 is coupled to a piezoelectric micro-actuator 14. The second lens 15 is located at one side of the beam splitter 12. The light source 16 is located on the side of the second lens 15 remote from the beam splitter 12. The light source 16 is a white light, and the light source 16 can be selectively disposed inside the scanning unit 1 or outside the scanning unit 1 to guide the light beam to the scanning unit 1.
The moving module 17 is coupled to the scanning unit 1, and the moving module 17 controls the scanning unit 1 to move axially relative to a testing device 20.
The integration unit 18 is connected to the scanning unit 1 and the moving module 17.
As shown in fig. 1 to 4, the present invention further provides a surface profile scanning method, which comprises the following steps:
step S1, the test piece is scanned. A test piece 20 is moved to the lower side of the scanning unit 1 by transfer of a stage (not shown). The piezoelectric micro-actuator 14 drives the interference objective 13, so that the interference objective 13 moves axially relative to a test piece 20, and the surface profile of the test piece 20 is scanned.
In this step, as shown in FIG. 2, the test piece 20 is divided into a plurality of test positions 200. The scanning may correspond to a single test site 200 or a plurality of test sites 200, and the surface profile obtained by the scanning is used to set the at least one scanning area 201, 203 and the at least one moving area 202 in step S2.
If further stated, the moving module 17 drives the scanning unit 1 to move, so that the interference objective 13 moves along a large Z-axis (axial direction) relative to a testing position 200 of the testing part 20. The light source 16 provides a test beam 160, the test beam 160 passes through the second lens 15 and the beam splitter 12, and the test beam 160 passes through the interference objective 13 and is projected to the test position 200 of the test piece 20 to form a reflected beam 204. The reflected light beam 204 passes through the interference objective 13, the beam splitter 12 and the first lens 11 to be received by the vision module 10. The reception of the test beam 160, the reflected beam 204 and the vision module 10 is a scanning operation. The integration unit 10 receives the image information of the reflected light beam 204 from the vision module 10 to obtain the surface profile of the test piece 20.
In step S2, a scan area is set. As shown in fig. 2, the test piece 20 has a plurality of test positions 200.
As shown in fig. 3A, the surface profile of each test position 200 of the test piece 20 is set to at least one scanning area 201, 203 and at least one moving area 202. To be further described, as shown in fig. 2, the height direction (axial direction) of each test position 200 is set to at least one scanning area 201, 203 and at least one moving area 202. The scanning zones 201, 203 are adjacent to the moving zone 202. Or the moving area 202 overlaps the scanning areas 201 and 203, that is, there is an overlapping area 205 between the moving area 202 and the scanning areas 201 and 203, and the overlapping degree is a partial overlap. The adjacent scan regions 201 and 203 are defined as if the moving region 202 is located in the middle range of each test position 200 when the scan regions 201 and 203 are located in the upper and lower sections of each test position 200, i.e., the upper and lower sections of the moving region 202 are the scan regions 201 and 203, respectively, but the adjacent scan regions are not limited thereto.
As shown in fig. 3B, that is, the scan region 201 may be adjacent to the move region 202, and an overlap region 205 may be selected; alternatively, the scanning area 203 may be adjacent to the moving area 202 without the overlapping area 205. The degree of overlap is complete overlap, which depends on the actuation direction of the piezoelectric microactuator 14 to facilitate measurement of the test position of the test piece 20.
In another embodiment, the test piece 20 does not perform the step S1. As shown in fig. 2 and fig. 3A, the test device 20 is divided into a plurality of test locations 200, and each test location 200 is configured as at least one scan area 201, 203 and at least one moving area 202. As described above, the moving region 202 and the scanning regions 201 and 203 have an overlapping region 205 therebetween.
For convenience of discussion, the at least one scan area 201 can be referred to as a first scan area 201, and the at least one scan area 203 can be referred to as a second scan area 203. The reference symbols of the first scanning area 201 and the second scanning area 203 are the reference symbols of the at least one scanning area 201, 203, which are especially shown in advance. The first scan area 201 distinguishes the surface profile of each test site 200 by a first ratio. The second scan area 202 divides the surface profile of each test site 200 by a third ratio. The first ratio is equal to, greater than, or less than the third ratio, which is set according to actual conditions, and is not limited.
Similarly, the moving area 202 divides the surface profile of each test site 200 by a second ratio. The first scanning area 201 is adjacent to the moving area 202. The second scanning area 203 is adjacent to the moving area 202. The moving area 202 is located between the first scanning area 201 and the second scanning area 203.
In step S3, scanning is performed. As shown in fig. 1 and 2, the scanning unit 1 scans a test position 200 of the test piece 20.
As shown in fig. 3A and fig. 1, the piezoelectric micro-actuator 14 drives the interference objective 13, so that the interference objective 13 moves axially relative to the test piece 20. For ease of discussion, axial movement is defined herein as small Z-axis movement, but is not limited.
When the interference objective lens 13 performs a small Z-axis movement with respect to the first scanning area 201, the scanning unit 1 scans the first scanning area 201 and obtains scanning information, which can be regarded as first scanning information.
After the scanning of the first scanning area 201 is completed, the scanning unit 1 stops scanning. The piezoelectric actuator 14 stops operating. The moving module 17 drives the scanning unit 1, so that when the scanning unit 1 moves a predetermined distance relative to the moving area 202, the scanning unit 1 does not scan. And sets a predetermined profile value corresponding to the moving region 202. For convenience of illustration, the predetermined distance of movement may be defined as a large Z-axis movement, and is discussed in the following paragraphs, but is not limited to, large Z-axis movement.
If further discussed, the moving module 17 drives the scanning unit 1 to make the scanning unit 1 perform a large Z-axis movement relative to the moving area 202, and the predetermined profile value corresponding to the moving area 202 is already set, which is preset by the user for the predetermined profile value of the moving area 202.
After the scanning unit 1 has performed a large Z-axis movement, the piezoelectric microactuator 14 drives the interference objective 13 again, so that the interference objective 13 performs a small Z-axis movement with respect to the second scanning region 203. The scanning unit 1 scans the second scanning area 203 and obtains a scanning information, which can be regarded as the second scanning information.
As shown in fig. 1, the integration unit 18 receives the first scanning information and performs an operation on the first scanning information to form a first scanning profile corresponding to the first scanning area 201. The integration unit 18 receives the second scanning information and performs an operation on the second scanning information to form a second scanning profile value corresponding to the second scanning area 203.
As described above, in this step, the moving module 17 may move the scanning unit 1 along the large Z-axis first, and the scanning unit 1 does not perform scanning. When the piezoelectric micro-actuator 14 makes the interference objective 13 perform small Z-axis movement, the scanning unit 1 scans and captures an image of the test piece 20. The moving module 17 controls the scanning unit 1 to perform large Z-axis movement, and the scanning unit 1 does not perform scanning. The piezoelectric microactuator 14 further causes the interference objective lens 13 to perform small Z-axis movement, and the scanning unit 1 performs scanning.
Alternatively, the piezoelectric microactuator 14 first moves the interference objective lens 13 in the small Z-axis direction, and the scanning unit 1 scans. The moving module 17 controls the scanning unit 1 to move along the large Z-axis, and the scanning unit 1 does not scan. The piezoelectric microactuator 14 controls the interference objective 13 to perform small Z-axis movement, and the scanning unit 1 performs scanning.
In summary, the sequence of the large Z-axis movement of the scanning unit 1 and the small Z-axis movement of the interference objective 13 is not limited to the embodiment of the present invention, and the sequence of the large Z-axis movement and the small Z-axis movement is changed according to the actual situation.
The distance moved by the large Z-axis movement is greater than the distance moved by the small Z-axis movement. To be further described, as shown in fig. 3A, the length of the large Z-axis is the length of the moving area 202. The length of the small Z axis is the length of the scanning zones 201, 203. Or the length of the large Z-axis is the distance between the two overlapping areas 205. Or the length of the small Z is the length of the scanning areas 201 and 203 minus the length of the overlapping area 205.
As shown in fig. 3C, the piezoelectric microactuator 14 first causes the interference objective 13 to perform a small Z-axis movement, and the scanning unit 1 scans the first scanning region 201. The moving module 17 controls the scanning unit 1 to move along the large Z-axis, and the scanning unit 1 does not scan. As shown in fig. 3C, when the moving module 17 controls the scanning unit 1 to perform a large Z-axis movement, the movement may be started by the moving area 202. When the large Z-axis movement is performed, the piezoelectric microactuator 14 may selectively move the interference objective lens 13 in the small Z-axis direction or not.
As shown in fig. 3D, the moving module 17 controls the scanning unit 1 to perform large Z-axis movement, and the scanning unit 1 does not perform scanning. The piezoelectric microactuator 14 then causes the interference objective 13 to perform a small Z-axis movement, and the scanning unit 1 scans the second scanning region 203. As shown in fig. 3D, when the piezoelectric microactuator 14 causes the interference objective 13 to perform a small Z-axis movement, the movement may be started from the second scanning region 203. When the small Z-axis movement is in progress, the large Z-axis movement is not actuated.
As described above, as shown in fig. 3A to 3D, when the moving module 17 controls the scanning unit 1 to perform a large Z-axis movement, the piezoelectric microactuator 14 may selectively cause the interference objective lens 13 to perform a small Z-axis movement or not. If the piezoelectric microactuator 14 controls the interference objective 13 to perform small Z-axis movement to scan the scanning unit 1, the moving module 17 does not operate, that is, the moving module 17 does not control the scanning unit 1 to perform large Z-axis movement.
To be further discussed, as shown in fig. 3A and 3B, when the moving module 17 controls the scanning unit 1 to perform the large Z-axis movement, the interference objective 13 is still within the range of the overlapping region 205, so that the piezoelectric micro-actuator 14 can still perform the small Z-axis movement on the interference objective 13, so as to enable the scanning unit 1 to perform the scanning operation continuously or adjust the position of the interference objective 13 relative to the testing position 200 of the testing piece 20.
Step S4, a surface profile is derived. The integration unit 18 combines the first scanning profile value, the predetermined profile value and the second profile value to derive the surface profile of the scanned test position 200 of the test piece 1. If the rest of the test sites 200 are still to be scanned, the process returns to step S1. If the rest of the test sites 200 are not to be scanned, the process stops.
In summary, the present invention divides the axial height to be measured at each testing position 200 of the testing device 200 into at least one scanning area 201, 203 and at least one moving area 202. The interference objective 13 performs a small Z-axis movement relative to the scanning zones 201, 203 to cause the scanning unit 1 to scan to obtain a scan profile value. The scanning unit 1 performs a large Z-axis movement with respect to the moving field 202 without scanning, and a predetermined profile value is set first. The integration unit 18 combines the predetermined profile value with the scan profile value to derive the surface profile of the test piece 20.
Because the scanning unit 1 does not scan in the moving area 202 and the scanning unit 1 scans only in the scanning areas 201 and 203, the present invention can scan only the characteristic areas of the test piece 20, i.e., the scanning areas 201 and 203, so that the measuring and scanning stroke can be greatly reduced, and the height of the test piece 20 and the moving stroke limit of the piezoelectric actuator 14 are not limited.
Since the piezoelectric microactuator 14 performs small Z-axis movement with respect to the scanning regions 201, 203, the interference objective lens 13 can be moved axially by a short distance with respect to each position to be measured 200, so that the destruction rate of the piezoelectric microactuator 14 can be reduced.
Since the scanning unit 1 performs a large Z-axis movement with respect to the moving area 202 and does not perform scanning, the scanning unit 1 scans only the scanning areas 201 and 203, and thus the overall scanning time can be reduced. In addition, the number of images acquired by the vision module 10 of the scanning unit 1 can be reduced, so that the difficulty in interpretation can be reduced.
In summary, although the present invention has been described with reference to the above embodiments, it should be understood that the invention is not limited thereto, and those skilled in the art can make various changes and modifications without departing from the spirit and scope of the invention.
Claims (10)
1. A method of scanning a surface profile, comprising the steps of:
setting a scanning area, and setting a test piece into at least one scanning area and at least one moving area;
executing scanning, moving an interference objective lens arranged on a scanning unit in the scanning area to enable the scanning unit to scan the test piece in the scanning area and obtain scanning information, and calculating the scanning information to form a scanning contour value corresponding to the scanning area; a moving module coupled to the scanning unit controls the scanning unit to move a predetermined distance in the moving area, when the scanning unit is not scanning, a predetermined profile value corresponding to the moving area is set, a piezoelectric microactuator coupled to the interference objective lens drives the interference objective lens to make the interference objective lens move axially relative to the test piece, when the interference objective lens moves, the scanning unit scans the test piece to obtain a surface profile of the test piece; and
and obtaining the surface profile, and combining the preset profile value and the scanning profile value to obtain the surface profile of the test piece.
2. The surface profile scanning method as recited in claim 1, wherein:
in the step of setting the scanning area, the scanning area is obtained by distinguishing the surface contour according to a first proportion, and the moving area is obtained by distinguishing the surface contour according to a second proportion, so that the scanning area and the moving area are set in the step of setting the scanning area.
3. The method of claim 1, wherein the step of setting the scan area is to divide the surface profile of the test piece by a first ratio to obtain the scan area, and then to divide the surface profile by a second ratio to obtain the motion area.
4. The method according to claim 2 or 3, wherein in the step of setting the scan area, the test piece has a plurality of test positions, and the scan area and the moving area are set at each test position respectively.
5. The method of claim 4, wherein in the step of setting the scanning area, the surface profile is divided by a third ratio to obtain at least one other scanning area, the third ratio being greater than, equal to, or less than the first ratio; in the step of executing scanning, the interference objective lens moves in the other scanning area, the scanning unit scans the other scanning area to obtain other scanning information, and the other scanning information forms another scanning contour value corresponding to the other scanning area; in the step of obtaining the profile value, the predetermined profile value is combined with the scan profile value and the another scan profile value to obtain the surface profile.
6. The method of claim 1, wherein in the step of performing scanning, the scanning unit scans the scanning area first, and the scanning unit moves in the moving area later; or the scanning unit moves before the moving area and scans the scanning area after the scanning unit.
7. The method of claim 2, wherein in the step of scanning the test piece, the test piece is divided into a plurality of test locations, and the scanning unit scans a single test location or a plurality of test locations.
8. The method of claim 1, wherein the step of setting the scanning area comprises setting the scanning area to be adjacent to the moving area or setting the scanning area to be overlapped with the moving area.
9. A surface profile scanning device, comprising:
a mobile module;
a scanning unit coupled to the moving module, the scanning unit having a vision module and an interference objective lens, the scanning unit having a piezoelectric micro-actuator coupled to the interference objective lens; and
an integration unit connected with the scanning unit;
the moving module controls the scanning unit to move axially relative to a test piece; the piezoelectric micro actuator drives the interference objective lens to enable the interference objective lens to move axially relative to the test piece, and the scanning unit scans the test piece when the interference objective lens moves; the test piece is set to be at least one scanning area and at least one moving area; the scanning unit provides a test light beam, the test light beam passes through the interference objective lens to be projected to the scanning area and form a reflected light beam, the reflected light beam passes through the interference objective lens and then is guided to the vision module and received by the vision module, so that scanning information is formed, and the integration unit calculates the scanning information to form a scanning contour value corresponding to the scanning area; the mobile module controls the scanning unit to move a preset distance in the mobile area, and when the scanning unit does not scan, a preset contour value corresponding to the mobile area is set; the integration unit is combined with the scanning contour value and the preset contour value to obtain the surface contour of the test piece.
10. The apparatus of claim 9, wherein the scanning unit has a first lens, a beam splitter, a second lens and a light source, the first lens is located under the vision module, the beam splitter is located under the first lens, the second lens is located at one side of the beam splitter, the light source is located at one side of the second lens, the piezoelectric microactuator is located under the beam splitter, the light source provides the test beam, the test beam passes through the second lens, the beam splitter and the interference objective and then is projected onto the test piece to form the reflected beam, and the reflected beam passes through the interference objective, the beam splitter and the first lens and then is received by the vision module.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US5726754A (en) * | 1996-08-30 | 1998-03-10 | Wyko Corporation | Variable-speed scanning for interferometric measurements |
| TWI245926B (en) * | 2004-05-10 | 2005-12-21 | Chroma Ate Inc | Device and method of an interference scanner |
| TW200727678A (en) * | 2006-01-05 | 2007-07-16 | Benq Corp | Pre-scanning device and pre-scanning method using the same |
| CN201050978Y (en) * | 2007-06-15 | 2008-04-23 | 西安普瑞光学仪器有限公司 | Precise distribution device for surface shape of white light interferometry sample |
| KR100939537B1 (en) * | 2007-12-14 | 2010-02-03 | (주) 인텍플러스 | System for measuring surface shape and method for measuring the same |
| WO2012008031A1 (en) * | 2010-07-15 | 2012-01-19 | キヤノン株式会社 | Method and apparatus for measuring shape of surface to be inspected, and method for manufacturing optical element |
| CN103017677B (en) * | 2011-09-23 | 2015-07-15 | 通用电气公司 | Method for measuring profile of edge of cutting tool |
| CN103316769B (en) * | 2013-06-26 | 2016-01-27 | 佛山市科蓝环保科技股份有限公司 | A kind of electrostatic oil and smoke cleaner electric field cleaning method and device thereof |
| CN105491264B (en) * | 2014-09-19 | 2019-04-05 | 光宝电子(广州)有限公司 | Device of image scanning and its localization method and corrector strip |
| CN105631937B (en) * | 2015-12-28 | 2019-06-28 | 苏州佳世达光电有限公司 | Scan method and scanning means |
| CN205720969U (en) * | 2016-04-29 | 2016-11-23 | 均豪精密工业股份有限公司 | Detection or correction position system |
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