CN108646396B - Automatic focusing microscope system - Google Patents
Automatic focusing microscope system Download PDFInfo
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- CN108646396B CN108646396B CN201810395360.4A CN201810395360A CN108646396B CN 108646396 B CN108646396 B CN 108646396B CN 201810395360 A CN201810395360 A CN 201810395360A CN 108646396 B CN108646396 B CN 108646396B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
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- G02B21/241—Devices for focusing
- G02B21/244—Devices for focusing using image analysis techniques
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- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/28—Systems for automatic generation of focusing signals
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Abstract
The embodiment of the invention provides an automatic focusing microscope system which comprises a tube lens, an objective lens, a mask and a processor. The embodiment of the invention projects the pattern of the mask plate on the measured object, and then utilizes the pattern of the mask plate to carry out automatic focusing, so that the transparent measured object can be accurately focused, and the defect of low focusing accuracy caused by holes or defects can be overcome by utilizing the pattern of the mask plate to carry out focusing. According to the embodiment of the invention, the processor is utilized to determine the contrast of the collected pattern of the mask, and then the distance between the objective lens and the measured object is determined by utilizing the contrast, so that the automatic focusing of the automatic focusing microscope system on the measured object is realized, and the focusing efficiency is improved.
Description
Technical Field
The invention relates to the field of optics, in particular to an automatic focusing microscope system.
Background
When the microscope is used for observing the measured object, the microscopic part of the measured object can be clearly observed, and reliable data is provided for observation, so that the microscope plays a significant role in the field needing to carry out microscopic observation. Before observing the measured object by using the microscope, the microscope and the measured object need to be focused, and the focused microscope can be used for observing the measured object more clearly and accurately.
In the prior art, focusing is generally performed manually or automatically, the manual focusing mode has the defects of low efficiency and low accuracy, the automatic focusing mode performed by using a microscope can improve the focusing efficiency, but when a measured object is a transparent object, the surface of the measured object has defects or holes exist on the surface of the measured object, the focusing accuracy cannot be ensured. For example, in the prior art, a microscope performs auto-focusing by using a laser triangulation method, specifically, a laser beam of 808nm is added into a visible light path of the microscope, and the laser beam passes through a system optical device to obtain a semicircular light spot on a charge coupled device ccd, and when the radius of the light spot is minimum, focusing is completed. According to the automatic focusing method using the laser triangulation method, after the light spot is projected to the surface of the measured object, if the light spot is projected to the defect or the hole of the measured object, the light spot is trapped into the defect or the hole, so that the observed light spot size is smaller than the actual light spot size, and therefore a false peak value occurs when the size of the light spot is judged, and thus wrong automatic focusing is caused.
In summary, how to improve the microscope focusing efficiency and improve the microscope focusing accuracy is a technical problem that needs to be solved urgently.
Disclosure of Invention
Technical problem to be solved
Aiming at the defects of the prior art, the invention provides an automatic focusing microscope system which can realize automatic focusing, improve the focusing efficiency of the automatic focusing microscope system and realize accurate focusing on a detected object with defects, holes or transparency.
(II) technical scheme
In order to achieve the purpose, the invention is realized by the following technical scheme:
in a first aspect, an autofocus microscope system is provided for observing a measured object, the autofocus microscope system including a tube lens and an objective lens, the autofocus microscope system further including: the device comprises a mask, a first light source, a first light splitting element, a second light splitting element, a first reflector, a first charge coupled device and a processor;
the first light source emits a first light beam, the mask is irradiated by the first light beam, a light beam containing the pattern of the mask is obtained, and the light beam containing the pattern of the mask is emitted into the first light splitting element;
the first light splitting element performs light splitting processing on the light beam containing the pattern of the mask plate to obtain a first emission sub-beam, the first light splitting element emits one of the first emission sub-beams into the tube lens, and the one of the first emission sub-beams is emitted onto the object to be measured through the tube lens and the objective lens;
one of the first emission sub-beams is reflected on the object to be measured to obtain a first reflection beam, and the first reflection beam sequentially passes through the objective lens and the tube lens to be emitted into the first light splitting element;
the first light splitting element performs light splitting processing on the first reflected light beam to obtain first reflected sub-beams, and one of the first reflected sub-beams is incident to the second light splitting element;
the second light splitting element performs light splitting processing on the received light beam to obtain a first target sub-light beam and a second target sub-light beam, the second light splitting element emits the first target sub-light beam to a first preset area of the first charge coupled device, the second light splitting element emits the second target sub-light beam to the first reflector, and the first reflector emits the second target sub-light beam to a second preset area of the first charge coupled device;
the processor calculates the contrast of the image in the first preset area to obtain a first contrast, calculates the contrast of the image in the second preset area to obtain a second contrast, determines the defocusing direction and the defocusing amount of the automatic focusing microscope system according to the first contrast and the second contrast, and determines the adjustment amount of the objective lens position according to the defocusing direction and the defocusing amount.
With reference to the first aspect, in a first possible implementation manner, the autofocus microscope system further includes an adjuster;
the processor generates an adjusting command according to the adjusting quantity and sends the adjusting command to the adjuster;
the adjuster adjusts the position of the objective lens according to the adjustment command.
With reference to the first aspect, in a second possible implementation manner, the mask is a variable-period grating mask.
With reference to the first aspect, in a third possible implementation manner, the autofocus microscope system further includes a second light source, a second mirror, a third light splitting element, a first filter element, a second filter element, and a second charge-coupled device;
the second light source emits a second light beam, and the second light beam is incident to the second reflecting mirror; the second reflector injects the second light beam into the first light splitting element;
the first light splitting element performs light splitting processing on the second light beam to obtain a second emission sub-light beam, the first light splitting element emits one of the second emission sub-light beams into the tube lens, and the one of the second emission sub-light beams is emitted onto the object to be measured through the tube lens and the objective lens;
one of the second emission sub-beams is reflected on the object to be measured to obtain a second reflected beam, and the second reflected beam sequentially passes through the objective lens and the tube lens to be emitted into the first light splitting element;
the first light splitting element performs light splitting processing on the second reflected light beam to obtain second reflected sub-beams, and one of the second reflected sub-beams is emitted into the third light splitting element; the third light splitting element performs light splitting processing on one of the second reflected sub-beams, and emits one obtained sub-beam into the first filter element and emits the other sub-beam into the second filter element;
the first light splitting element emits one of the first reflected sub-beams into the third light splitting element, the third light splitting element performs light splitting processing on one of the first reflected sub-beams, one obtained sub-beam is emitted into the first filter element, and the other sub-beam is emitted into the second filter element;
the first light filter element filters a first preset light beam in the light beams received by the first light filter element, and the filtered light beam is emitted into the second light splitting element; the first predetermined light beam is a light beam obtained by performing light splitting processing on one of the second reflected sub-light beams by the third light splitting element;
the second filter element filters a second preset light beam in the light beams received by the second filter element and emits the filtered light beam into the second charge coupled device; the second predetermined light beam is a light beam obtained by the third light splitting element performing light splitting processing on one of the first reflected sub-light beams;
the second charge coupled device receives the light beam and forms an image using the received light beam.
With reference to the third possible implementation manner of the first aspect, in a fourth possible implementation manner, the first filter element is a white light filter, and the second filter element is an infrared light filter.
With reference to the third possible implementation manner of the first aspect, in a fifth possible implementation manner, the first light source is an infrared light source, and the second light source is a white light source.
With reference to the fourth possible implementation manner of the first aspect, in a sixth possible implementation manner, the first light splitting element, the second optical element, or the third light splitting element is a light splitting prism.
With reference to the fourth possible implementation manner of the first aspect, in a seventh possible implementation manner, the second charge coupled device is an area array charge coupled device.
With reference to the first aspect, the first possible implementation manner of the first aspect, the second possible implementation manner of the first aspect, the third possible implementation manner of the first aspect, the fourth possible implementation manner of the first aspect, the fifth possible implementation manner of the first aspect, the sixth possible implementation manner of the first aspect, or the seventh possible implementation manner of the first aspect, in an eighth possible implementation manner, the first charge coupled device is a linear array charge coupled device.
With reference to the first aspect, the first possible implementation manner of the first aspect, the second possible implementation manner of the first aspect, the third possible implementation manner of the first aspect, the fourth possible implementation manner of the first aspect, the fifth possible implementation manner of the first aspect, the sixth possible implementation manner of the first aspect, or the seventh possible implementation manner of the first aspect, in a ninth possible implementation manner, the autofocus microscope system further includes a third mirror;
the first light source emits the light beam containing the pattern of the mask plate into the third reflector; the third reflector emits the light beam containing the pattern of the mask plate into the first light splitting element.
(III) advantageous effects
The embodiment of the invention provides an automatic focusing microscope system. The method has the following beneficial effects:
the pattern of the mask is projected onto a measured object, automatic focusing is performed by using the pattern of the mask, the transparent measured object can be focused accurately, and the defect of low focusing accuracy caused by holes or defects can be overcome by using the pattern of the mask for focusing.
The processor is used for determining the contrast of the collected pattern of the mask plate, and then the distance between the objective lens and the measured object is determined by using the contrast, so that the automatic focusing of the automatic focusing microscope system on the measured object is realized, and the focusing efficiency is improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic diagram of an autofocus microscope system according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of an autofocus microscope system according to still another embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
An autofocus microscope system, as shown in fig. 1, is used for observing an object 106, and includes a tube lens 104, an objective lens 105, a mask 102, a first light source 101, a first beam splitting element 103, a second beam splitting element 107, a first mirror 109, a first charge coupled device 108, and a processor (not shown).
The first light source 101 emits a first light beam, and the mask 102 is irradiated with the first light beam, so as to obtain a light beam including a pattern of the mask. The light beam including the pattern of the mask is incident on the first light splitting element 103.
The first light splitting element 103 performs light splitting processing on the light beam including the pattern of the mask to obtain a first emission sub-beam, and the first light splitting element emits one of the first emission sub-beams into the tube lens 104, and the one of the first emission sub-beams is emitted onto the object to be measured 106 through the tube lens 104 and the objective lens 105.
One of the first emitted sub-beams is reflected on the object 106 to obtain a first reflected beam, and the first reflected beam sequentially passes through the objective lens 105 and the tube lens 104 to enter the first light splitting element 103.
The first light splitting element 103 performs light splitting processing on the first reflected light beam to obtain first reflected sub-beams, and one of the first reflected sub-beams is incident on the second light splitting element 107.
The second light splitting element 107 performs light splitting processing on the received light beam to obtain a first target sub-beam and a second target sub-beam, the second light splitting element 107 directs the first target sub-beam to the first predetermined area B of the first ccd, the second light splitting element 107 directs the second target sub-beam to the first reflecting mirror 109, and the first reflecting mirror 109 directs the second target sub-beam to the second predetermined area a of the first ccd 108.
The processor calculates the contrast of the image in the first preset area to obtain a first contrast, calculates the contrast of the image in the second preset area to obtain a second contrast, determines the defocusing direction and the defocusing amount of the automatic focusing microscope system according to the first contrast and the second contrast, and determines the adjustment amount of the objective lens position according to the defocusing direction and the defocusing amount. And after the objective lens adjusts the position according to the adjustment quantity, the object to be measured is positioned on the focal plane of the object. . The defocusing amount is the distance between the focal plane of the objective lens and the measured object, and the defocusing amount is larger when the measured object is farther away from the focal point of the objective lens.
When the difference of the contrast of the image received by the two areas A, B on the first CCD is 0, the object to be measured is determined to be in the focal plane of the objective lens. The contrast is the definition of the image, the clear image has clear outline, rich detail information and high contrast. The contrast of the image in both regions may be calculated A, B using a sharpness evaluation function, the greater the value of the sharpness evaluation function, the higher the contrast of the image.
Preferably, the processor may use a gray gradient evaluation function, an informatics function or a frequency domain function as the sharpness evaluation function to calculate A, B the contrast of the image in both regions. The gray scale gradient evaluation and function includes an absolute Variance function, a gradient vector module function, a Brenner function (also called a gradient filter method), Roberts gradient sum function, a gray scale fluctuation change function (Variance function), a gray scale change rate sum function, a laplacian function, a Sobel operator evaluation function, and the like.
This embodiment uses the Brenner function to separately calculate A, B the contrast of the image in two regions:
where F4 is the contrast of the image, M is the total number of rows of pixels in the image, N is the total number of columns of pixels in the image, x is the row of pixels, y is the column of pixels, and d is the predetermined number of pixels.
The Brenner function selects the square sum of the gradient change sizes of d pixels away from each other in the x direction as the judgment basis of the image definition or contrast, and actually can also be understood as calculating the d-order gradient of the image.
In this embodiment, the mask may be an equal period grating mask or a variable period grating mask. When the equal-period grating mask is used, the automatic focusing of most measured objects can be realized, but when the measured objects are gratings with the same period as the mask, the focusing of the measured objects cannot be realized. Because the probability that the object to be measured and the mask are the same variable-period grating is very small, the variable-period grating mask can be used for focusing any object to be measured.
The equal period grating mask or the variable period grating mask can be used for realizing the accurate focusing of the transparent measured object. In addition, because the mask has a certain projection area, accurate focusing on a detected object with defects or holes can be realized by using the equal-period grating mask or the variable-period grating mask.
In this embodiment, the first charge coupled device is preferably a linear array CCD, which has a higher number of image acquisition bits, and is less in calculation amount and fast in focusing speed.
Further, in this embodiment, the autofocus microscope system further includes an adjuster. The processor generates an adjusting command according to the adjusting quantity and sends the adjusting command to the adjuster; the adjuster adjusts the position of the objective lens according to the adjustment command.
The embodiment projects the pattern of the mask plate on the measured object, and then the pattern of the mask plate is used for focusing, so that the transparent measured object can be focused accurately, and the defect of low focusing accuracy caused by holes or defects can be overcome by focusing the pattern of the mask plate. In the embodiment, the processor is used for determining the contrast of the collected pattern of the mask, and then the distance between the objective lens and the measured object is determined by using the contrast, so that the automatic focusing of the automatic focusing microscope system on the measured object is realized, and the focusing efficiency is improved.
In one embodiment, as shown in fig. 2, an autofocus microscope system is used to observe a measured object 206, and the autofocus microscope system includes a tube lens 204, an objective lens 205, a reticle 202, a first light source 201, a first beam splitting element 203, a second beam splitting element 207, a first mirror 209, a first ccd 208, and a processor (not shown). The functions and optical paths of the above devices are the same as those in the previous embodiment, and therefore, repeated descriptions of the repeated parts are omitted in this embodiment.
In this embodiment, the autofocus microscope system further includes a second light source 210, a second mirror 211, a third light splitting element 212, a first filter element 216, a second filter element 213, a second charge-coupled device 214, and a third mirror 215.
The second light source 210 emits a second light beam, and the second light beam is incident on the second mirror 211; the second mirror 211 injects the second light beam into the first beam splitting element 203.
The first light splitting element 203 performs light splitting processing on the second light beam to obtain a second emission sub-beam, the first light splitting element 203 emits one of the second emission sub-beams into the tube lens 204, and the one of the second emission sub-beams is emitted onto the object to be measured 206 through the tube lens 204 and the objective lens 205.
One of the second emitted sub-beams is reflected on the object 206 to be measured to obtain a second reflected beam, and the second reflected beam sequentially passes through the objective lens 205 and the tube lens 204 and enters the first light splitting element 203.
The first light splitting element 203 performs light splitting processing on the second reflected light beam to obtain second reflected sub-beams, and one of the second reflected sub-beams is incident on the third light splitting element 212; the third light splitting element 212 splits one of the second reflected sub-beams, and emits one sub-beam into the first filter element 216, and emits the other sub-beam into the second filter element 213.
The first light splitting element 203 emits one of the first reflected sub-beams into the third light splitting element 212, and the third light splitting element 212 performs light splitting processing on the one of the first reflected sub-beams, and emits the obtained one sub-beam into the first filter element 216, and emits the other sub-beam into the second filter element 213.
The first filter element 26 filters out a first predetermined light beam of the light beams received by the first filter element, and emits the filtered light beam into the second light splitting element 207; the first predetermined light beam is a light beam obtained by the third light splitting element 212 performing light splitting processing on one of the second reflected sub-light beams.
The second filter element 213 filters out a second predetermined light beam of the light beams received by the second filter element, and emits the filtered light beam to the second charge coupled device 214; the second predetermined light beam is a light beam obtained by the third light splitting element 212 performing light splitting processing on one of the first reflected sub-light beams.
The second charge coupled device 214 receives the light beam and forms an image using the received light beam.
The first light source 201 emits the light beam containing the pattern of the reticle into the third reflector 215; the third mirror 215 emits the light beam including the mask pattern into the first light splitting element 203.
In this embodiment, the first light source is an infrared light source, and the second light source is a white light source. The infrared light source is used to project the pattern of the reticle onto the object to be measured, and the white light source is used to form an image of the object to be measured on the second ccd, and to increase the brightness of the image formed by the second ccd 214.
In this embodiment, the second filter element 213 is an infrared filter, so that only the light beam including the pattern of the object to be measured enters the second ccd, and the light beam including the pattern of the mask does not enter the second ccd, so that the second ccd only forms the image of the object to be measured. In this embodiment, the first filter element 26 is a white filter, so that only the light beam including the pattern of the mask enters the second light splitting element, and only the pattern of the mask is formed on the first ccd, and the pattern of the object to be measured is not included, which does not interfere with the focusing by the pattern of the mask in this embodiment.
In this embodiment, the first light splitting element, the second optical element, or the third light splitting element is a light splitting prism. The second charge coupled device is an area array charge coupled device.
In this embodiment, the mask plate is projected to the surface of the measured object through the infrared light source (i.e., the first light source), and the light reaching the surface of the measured object is reflected and then passes through the objective lens, the imaging lens, and the beam splitter prism, and is divided into two beams of light by the beam splitter prism, wherein one beam of light is directly projected to the area array CCD target surface (i.e., the second charge coupled device) of imaging through the infrared light filter (i.e., the filter element), and is used for observing the image of the measured object in real time. The other beam is projected to A, B areas of the linear CCD (i.e. the first CCD) through a beam splitter prism and a mirror, respectively. The A, B area of the linear array CCD is symmetrical to the image plane conjugated with the area array CCD. By comparing the contrast of the images received by A, B on the linear CCD, the direction and amount of defocus can be detected. An infrared light filter is placed in front of the area array CCD, so that images formed on the area array CCD and the linear array CCD are not influenced by each other.
The embodiment projects the pattern of the mask plate on the measured object, and then the pattern of the mask plate is used for focusing, so that the transparent measured object can be focused accurately, and the defect of low focusing accuracy caused by holes or defects can be overcome by focusing the pattern of the mask plate. In the embodiment, the processor is used for determining the contrast of the collected pattern of the mask, and then the distance between the objective lens and the measured object is determined by using the contrast, so that the automatic focusing of the automatic focusing microscope system on the measured object is realized, and the focusing efficiency is improved.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
The above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (9)
1. The utility model provides an automatic focusing microscope system, automatic focusing microscope system is used for observing the measured object, automatic focusing microscope system includes tube lens and objective, its characterized in that, automatic focusing microscope system still includes: the device comprises a mask, a first light source, a first light splitting element, a second light splitting element, a first reflector, a first charge coupled device and a processor;
the mask is a variable-period grating mask; the first light source emits a first light beam, the mask is irradiated by the first light beam, a light beam containing the pattern of the mask is obtained, and the light beam containing the pattern of the mask is emitted into the first light splitting element;
the first light splitting element performs light splitting processing on the light beam containing the pattern of the mask plate to obtain a first emission sub-beam, the first light splitting element emits one of the first emission sub-beams into the tube lens, and the one of the first emission sub-beams is emitted onto the object to be measured through the tube lens and the objective lens;
one of the first emission sub-beams is reflected on the object to be measured to obtain a first reflection beam, and the first reflection beam sequentially passes through the objective lens and the tube lens to be emitted into the first light splitting element;
the first light splitting element performs light splitting processing on the first reflected light beam to obtain first reflected sub-beams, and one of the first reflected sub-beams is incident to the second light splitting element;
the second light splitting element performs light splitting processing on the received light beam to obtain a first target sub-light beam and a second target sub-light beam, the second light splitting element emits the first target sub-light beam to a first preset area of the first charge coupled device, the second light splitting element emits the second target sub-light beam to the first reflector, and the first reflector emits the second target sub-light beam to a second preset area of the first charge coupled device;
the processor calculates the contrast of the image in the first preset area to obtain a first contrast, calculates the contrast of the image in the second preset area to obtain a second contrast, determines the defocusing direction and the defocusing amount of the automatic focusing microscope system according to the first contrast and the second contrast, and determines the adjustment amount of the objective lens position according to the defocusing direction and the defocusing amount.
2. The autofocus microscope system of claim 1, further comprising an adjuster;
the processor generates an adjusting command according to the adjusting quantity and sends the adjusting command to the adjuster;
the adjuster adjusts the position of the objective lens according to the adjustment command.
3. The autofocus microscope system of claim 1, further comprising a second light source, a second mirror, a third beam splitting element, a first filter element, a second filter element, and a second charge-coupled device;
the second light source emits a second light beam, and the second light beam is incident to the second reflecting mirror; the second reflector injects the second light beam into the first light splitting element;
the first light splitting element performs light splitting processing on the second light beam to obtain a second emission sub-light beam, the first light splitting element emits one of the second emission sub-light beams into the tube lens, and the one of the second emission sub-light beams is emitted onto the object to be measured through the tube lens and the objective lens;
one of the second emission sub-beams is reflected on the object to be measured to obtain a second reflected beam, and the second reflected beam sequentially passes through the objective lens and the tube lens to be emitted into the first light splitting element;
the first light splitting element performs light splitting processing on the second reflected light beam to obtain second reflected sub-beams, and one of the second reflected sub-beams is emitted into the third light splitting element; the third light splitting element performs light splitting processing on one of the second reflected sub-beams, and emits one obtained sub-beam into the first filter element and emits the other sub-beam into the second filter element;
the first light splitting element emits one of the first reflected sub-beams into the third light splitting element, the third light splitting element performs light splitting processing on one of the first reflected sub-beams, one obtained sub-beam is emitted into the first filter element, and the other sub-beam is emitted into the second filter element;
the first light filter element filters a first preset light beam in the light beams received by the first light filter element, and the filtered light beam is emitted into the second light splitting element; the first predetermined light beam is a light beam obtained by performing light splitting processing on one of the second reflected sub-light beams by the third light splitting element;
the second filter element filters a second preset light beam in the light beams received by the second filter element and emits the filtered light beam into the second charge coupled device; the second predetermined light beam is a light beam obtained by the third light splitting element performing light splitting processing on one of the first reflected sub-light beams;
the second charge coupled device receives the light beam and forms an image using the received light beam.
4. The autofocus microscope system of claim 3, wherein the first filter element is a white light filter and the second filter element is an infrared light filter.
5. The autofocus microscope system of claim 3, wherein the first light source is an infrared light source and the second light source is a white light source.
6. The autofocus microscope system of claim 4, wherein the first, second, or third light splitting element is a beam splitter prism.
7. The autofocus microscope system of claim 4, wherein the second charge-coupled device is an area array charge-coupled device.
8. The autofocus microscope system of any of claims 1 to 7, wherein the first charge-coupled device is a linear array charge-coupled device.
9. The autofocus microscope system of any of claims 1 to 7, further comprising a third mirror;
the first light source emits the light beam containing the pattern of the mask plate into the third reflector; the third reflector emits the light beam containing the pattern of the mask plate into the first light splitting element.
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| WO2021184169A1 (en) * | 2020-03-16 | 2021-09-23 | 中国科学院深圳先进技术研究院 | Real-time automatic focusing system for microscope |
| CN111443477B (en) * | 2020-04-13 | 2022-12-20 | 腾讯科技（深圳）有限公司 | Microscope auto-focusing method, microscope system, medical device, and storage medium |
| CN116430568A (en) * | 2020-04-13 | 2023-07-14 | 腾讯科技（深圳）有限公司 | Microscope system, microscope auto-focusing method, and medical apparatus |
| TWI786991B (en) | 2021-12-13 | 2022-12-11 | 國立成功大學 | Autofocus system and autofocus method |
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| CN116540393B (en) * | 2023-07-07 | 2024-01-30 | 睿励科学仪器（上海）有限公司 | Automatic focusing system and method, semiconductor defect detection system and method |
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