CN108645449B - Sensor integrating oxygen concentration and ultraviolet intensity detection functions and detection method thereof - Google Patents
Sensor integrating oxygen concentration and ultraviolet intensity detection functions and detection method thereof Download PDFInfo
- Publication number
- CN108645449B CN108645449B CN201810605030.3A CN201810605030A CN108645449B CN 108645449 B CN108645449 B CN 108645449B CN 201810605030 A CN201810605030 A CN 201810605030A CN 108645449 B CN108645449 B CN 108645449B
- Authority
- CN
- China
- Prior art keywords
- ultraviolet
- detection unit
- sensor
- sensitive element
- ultraviolet intensity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 title claims abstract description 59
- 239000001301 oxygen Substances 0.000 title claims abstract description 59
- 229910052760 oxygen Inorganic materials 0.000 title claims abstract description 59
- 238000001514 detection method Methods 0.000 title claims abstract description 53
- 230000005284 excitation Effects 0.000 claims abstract description 17
- 239000000463 material Substances 0.000 claims abstract description 14
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 114
- 239000011787 zinc oxide Substances 0.000 claims description 54
- 239000000758 substrate Substances 0.000 claims description 24
- 230000005540 biological transmission Effects 0.000 claims description 11
- 230000004044 response Effects 0.000 claims description 10
- 238000012545 processing Methods 0.000 claims description 6
- 238000002360 preparation method Methods 0.000 abstract description 9
- 239000007789 gas Substances 0.000 abstract description 7
- 230000009286 beneficial effect Effects 0.000 abstract description 4
- 230000002411 adverse Effects 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 description 44
- 239000002105 nanoparticle Substances 0.000 description 28
- 239000002073 nanorod Substances 0.000 description 21
- 238000004528 spin coating Methods 0.000 description 10
- 238000005286 illumination Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- VKYKSIONXSXAKP-UHFFFAOYSA-N hexamethylenetetramine Chemical compound C1N(C2)CN3CN1CN2C3 VKYKSIONXSXAKP-UHFFFAOYSA-N 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- ONDPHDOFVYQSGI-UHFFFAOYSA-N zinc nitrate Chemical compound [Zn+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O ONDPHDOFVYQSGI-UHFFFAOYSA-N 0.000 description 8
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 7
- 238000001035 drying Methods 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 238000012360 testing method Methods 0.000 description 6
- 239000011259 mixed solution Substances 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- 239000004642 Polyimide Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000006185 dispersion Substances 0.000 description 4
- 235000010299 hexamethylene tetramine Nutrition 0.000 description 4
- 239000004312 hexamethylene tetramine Substances 0.000 description 4
- 239000010410 layer Substances 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 description 4
- 239000005020 polyethylene terephthalate Substances 0.000 description 4
- 229920001721 polyimide Polymers 0.000 description 4
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 238000012512 characterization method Methods 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 238000007605 air drying Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 239000011247 coating layer Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000008367 deionised water Substances 0.000 description 2
- 229910021641 deionized water Inorganic materials 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 238000001027 hydrothermal synthesis Methods 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 239000011112 polyethylene naphthalate Substances 0.000 description 2
- -1 polyethylene terephthalate Polymers 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 230000035484 reaction time Effects 0.000 description 2
- 238000001878 scanning electron micrograph Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 238000003980 solgel method Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000001132 ultrasonic dispersion Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 206010028980 Neoplasm Diseases 0.000 description 1
- 230000006750 UV protection Effects 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- ZOIORXHNWRGPMV-UHFFFAOYSA-N acetic acid;zinc Chemical compound [Zn].CC(O)=O.CC(O)=O ZOIORXHNWRGPMV-UHFFFAOYSA-N 0.000 description 1
- 238000003915 air pollution Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000012938 design process Methods 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 235000019441 ethanol Nutrition 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 208000030533 eye disease Diseases 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002120 nanofilm Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000004224 protection Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 208000017520 skin disease Diseases 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 239000004246 zinc acetate Substances 0.000 description 1
- XKKVXDJVQGBBFQ-UHFFFAOYSA-L zinc ethanol diacetate Chemical compound C(C)O.C(C)(=O)[O-].[Zn+2].C(C)(=O)[O-] XKKVXDJVQGBBFQ-UHFFFAOYSA-L 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/429—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to measurement of ultraviolet light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
- G01N27/127—Composition of the body, e.g. the composition of its sensitive layer comprising nanoparticles
Abstract
A sensor integrating oxygen concentration and ultraviolet intensity detection functions and a detection method thereof belong to the technical field of sensors. According to the invention, two identical sensitive elements are respectively arranged in a closed chamber to serve as an ultraviolet intensity detection unit, and a chamber communicated with the outside serves as an oxygen concentration detection unit, the ultraviolet intensity detection unit serves as a reference end of the oxygen concentration detection unit, and the detection unit is controlled to be connected into an external end circuit, so that the sensor can synchronously, rapidly and real-timely monitor the ultraviolet intensity and the oxygen concentration of the external environment. The sensor of the invention adopts ultraviolet excitation to replace thermal excitation, realizes that the device works at room temperature, and avoids adverse factors caused by thermal excitation. Compared with the traditional oxygen sensor, the invention is beneficial to the effective utilization of solar energy by the sensor, the used sensitive material has excellent photoelectric and gas sensitive performances, the preparation method is simple and cheap, can be used in large scale, has environment-friendly property, and is beneficial to the industrialized production of the sensor.
Description
Technical Field
The invention belongs to the technical field of sensors, and particularly relates to a sensor integrating oxygen concentration and ultraviolet intensity detection functions and a detection method thereof.
Background
With the change of times and the progress of science and technology, more and more vehicles such as automobiles, ships, fast trains, airplanes and the like frequently appear in human lives. However, people are aware of serious safety hazards around the body while bringing convenience, and especially air pollution in the closed space directly endangers life.
Oxygen is the most basic element for human life maintenance, and is not available every moment in life. In clean air, oxygen content is about 21%, and when the concentration is too low, people can breathe difficultly and even die. Due to a large amount of CO exhaled from the human body2The gas causes a reduction in the oxygen concentration in the sealed compartment of the public transport vehicle, which necessitates ventilation, during which the detection of the oxygen concentration is crucial. At present, a metal oxide semiconductor oxygen sensor based on a planar micro-interdigital electrode is an important development direction in the field of oxygen concentration detection in air. However, the high operating temperature makes this type of sensor have the following disadvantages: large power consumption, no integration benefit, and hidden danger of combustion or explosion.
In addition, ultraviolet rays in solar radiation have a great influence on human health. Although a proper amount of sunlight bath can sterilize and regulate body functions, excessive and strong ultraviolet rays can cause various skin or eye diseases of human bodies and can cause serious cancers. In view of the above, ultraviolet protection is also a factor to be considered when people go out. Therefore, it is important to monitor the oxygen concentration in the sealed room and the ultraviolet intensity of the external environment synchronously, rapidly and in real time. Commercially available sensors do not involve the integration of oxygen concentration and ultraviolet intensity detection functions, and existing multifunctional sensors are single in structure, and only employ circuitry to connect multiple single-function sensors together, adding complexity and instability.
Disclosure of Invention
The invention provides a gas sensor capable of working at room temperature and a detection method thereof, aiming at the problem of high working temperature of the oxygen sensor in the prior art.
In order to achieve the above purpose, the invention provides the following technical scheme:
a sensor integrating oxygen concentration and ultraviolet intensity detection functions is characterized by comprising a closed first chamber and a second chamber communicated with the outside, wherein the first chamber is used as an ultraviolet intensity detection unit and contains a first sensitive element and a first ultraviolet excitation light source; the second chamber is used as an oxygen detection unit and contains a second sensitive element and a second ultraviolet excitation light source; ultraviolet transmission filter elements are respectively arranged at the tops of the first chamber and the second chamber, so that ultraviolet light in natural light is irradiated on the first sensitive element and the second sensitive element through the ultraviolet transmission filter elements; the sensitive materials of the first sensitive element and the second sensitive element are the same, and the sensitive materials have ultraviolet response and are sensitive to oxygen under ultraviolet irradiation; the first ultraviolet excitation light source and the second ultraviolet excitation light source are connected with a power supply; the first sensitive element and the second sensitive element are respectively connected to an external end circuit for signal processing, so that the first sensitive element detects the external ultraviolet intensity, and the second sensitive element detects the external oxygen concentration by taking the ultraviolet intensity detection unit as a reference.
Furthermore, pins of the first sensitive element and the second sensitive element are respectively used as a first signal input end and a second signal input end, and a differential proportional circuit is adopted between the first signal input end and the signal output end, and between the second signal input end and the signal output end, a differential proportional circuit is adopted.
Further, the sensitive element comprises a substrate, an interdigital electrode arranged on the surface of the substrate and a sensitive film arranged on the surface of the interdigital electrode.
Preferably, the substrate is a flexible substrate or a rigid substrate, the flexible substrate is made of Polyimide (PI), polyethylene terephthalate (PET) or polyethylene naphthalate (PEN), and the rigid substrate is made of silicon oxide (SiO)2) Silicon (Si), silicon oxide/Silicon (SiO)2Silicon (Si) or aluminum oxide (Al)2O3)。
Preferably, the interdigital electrode is a gold interdigital electrode.
As a preferred mode, materials such as ZnO and TiO are generally used as the sensitive film2The sensitive material has high ultraviolet response and excellent sensitivity to oxygen under ultraviolet irradiation, and is preferably a nano zinc oxide material, specifically, the nano zinc oxide material comprises a zinc oxide (ZnO) nanoparticle film with the thickness of 5-25 mu m or a zinc oxide (ZnO) nanorod array film with the thickness of 1-3 mu m.
According to the embodiment of the invention, the preparation of the zinc oxide (ZnO) nanoparticle film is preferably a spin coating process, and the preparation method specifically comprises the following steps:
step A: preparing nano-grade ZnO particles by a chemical method;
and B: dispersing the nano-scale ZnO particles in absolute ethyl alcohol to form ZnO nano-particle dispersion liquid, wherein the concentration of the ZnO nano-particles is 1-6 mg/ml;
and C: coating the ZnO nanoparticle dispersion liquid on the surface of an interdigital electrode on a substrate by adopting a spin coating process to form a ZnO nanoparticle wet film;
step D: and drying the sensitive element forming the ZnO nanoparticle wet film to obtain the ZnO nanoparticle film.
As an embodiment, the parameters of the spin coating process: firstly, processing for 5 seconds under the condition of low speed of 500 r/min; then processing for 20 seconds under the condition of high speed 3000 r/min; repeating the above operation to finish the spin coating for 20-100 times.
As an embodiment, dispersing the nano-sized ZnO particles may be dispersed using ultrasonic; specifically, the ultrasonic power of the ultrasonic dispersion operation was 90Hz, and the ultrasonic time was 2 hours.
As an embodiment, the drying process may place the sensing element to be formed into a wet film of ZnO nanoparticles in a forced air drying oven; specifically, the mixture is placed into a blast drying oven to be dried for 8-10 hours at the temperature of 60-80 ℃.
According to the embodiment of the invention, the preparation of the zinc oxide nanorod array film is preferably carried out by a hydrothermal method. The method specifically comprises the following steps:
step A: forming a ZnO seed layer on the surface of the interdigital electrode on the substrate by adopting a sol-gel method;
and B: putting the sensitive element forming the ZnO seed layer into a reaction kettle filled with a mixed solution formed by zinc nitrate and hexamethylenetetramine;
and C: and cleaning and drying the sensitive element on which the ZnO nano-rod grows to obtain the ZnO nano-rod array film.
In one embodiment, a 10mM ethanol solution of zinc acetate is used as the precursor solution in step A.
In one embodiment, the concentration of zinc nitrate in the mixed solution in step B is 20 to 50mM, the concentration of hexamethylenetetramine is 20 to 50mM, the reaction temperature is 93 ℃, and the reaction time is 4.5 hours.
As an embodiment, the specific operations of washing and drying in step C are: the sensitive element with the ZnO nano-rod is sequentially placed in deionized water and absolute ethyl alcohol for cleaning for 3-5 times, and is dried for 8-10 hours at the temperature of 60-80 ℃,
further, the peak wavelength of the ultraviolet light source corresponds to the peak wavelength of the ultraviolet transmission filter element, and the peak wavelength ranges of the ultraviolet light source and the ultraviolet transmission filter element are both 340-380 nm, preferably 365 nm.
According to the embodiment of the invention, the ultraviolet excitation light source adopts an ultraviolet LED lamp.
Further, the interior of the first chamber is sealed with high-purity nitrogen gas.
Further, the second chamber is provided with an air inlet and an air outlet which are communicated with the outside, and the outside air enters the chamber to realize the oxygen concentration in the air; preferably, the second chamber is formed by a housing provided with a micro-mesh to ensure the introduction of air and the separation of dust.
On the other hand, the invention provides a detection method based on the sensor, when the ultraviolet intensity test unit works alone, the output end signal is the intensity of external ultraviolet; when the ultraviolet intensity testing unit and the oxygen detecting unit work together, the output end signal is the concentration of the external oxygen.
Specifically, when the ultraviolet intensity testing unit works alone, the oxygen detecting unit is grounded, and the ultraviolet intensity testing unit is connected to the external circuit; when the ultraviolet intensity testing unit and the oxygen detecting unit work together, the oxygen detecting unit and the ultraviolet intensity testing unit are both connected into the external circuit. According to the embodiment of the invention, the external end circuit comprises a first signal input end, a second signal input end and a signal output end, the first signal input end and the second signal input end are respectively connected with pins of the first sensitive element and the second sensitive element, and a differential proportion circuit is adopted between the first signal input end and the signal output end, and between the second signal input end and the signal output end, the differential proportion circuit is adopted.
The invention respectively arranges two same sensitive elements in a closed chamber as an ultraviolet intensity detection unit and a chamber communicated with the outside as an oxygen concentration detection unit, under the condition that natural light is irradiated by an ultraviolet transmission filter element or an ultraviolet light source, when the ultraviolet intensity detection unit works independently, the signal of the output end is the intensity of the outside ultraviolet, and when the ultraviolet intensity detection unit and the gas detection unit work together, the signal of the output end is the concentration of the outside oxygen. According to the invention, the ultraviolet intensity detection unit is used as the reference end of the oxygen concentration detection unit, so that the constructed sensor can synchronously monitor the ultraviolet intensity and the oxygen concentration of the external environment in real time. Compared with the traditional oxygen sensor, the sensor adopts ultraviolet excitation, realizes that the device works at room temperature, avoids adverse factors caused by thermal excitation, and effectively eliminates temperature interference. The sensor takes the solar light source and the artificial ultraviolet light source as the ultraviolet excitation source in the design process, and is beneficial to the effective utilization of solar energy by the sensor. In addition, the sensitive material adopted by the invention has excellent photoelectric and gas sensitive performances, and the preparation method is simple, low in cost, capable of being used in large scale, environment-friendly and beneficial to industrial production of the sensor.
Drawings
FIG. 1 is a schematic cross-sectional view of a sensor configuration for detecting ultraviolet intensity and oxygen concentration provided by the present invention.
Fig. 2 is a schematic structural diagram of a sensing element provided by the present invention.
Fig. 3 is an external terminal circuit diagram of the sensor provided by the present invention.
FIG. 4 is an SEM image of a ZnO nanoparticle thin film deposited on a sensitive element provided by the invention; fig. 4a is a plan view and fig. 4b is a sectional view.
FIG. 5 is a plan SEM image at different magnifications of a ZnO nanorod array film hydrothermally grown on a sensing element provided by the invention;
FIG. 6 is an I-V characteristic curve of the sensing element provided by the invention at room temperature; wherein, fig. 6a is the I-V characteristic curve of the sensitive element deposited with the ZnO nano-particle film under the conditions of room temperature and 365nm illumination, fig. 6b is the I-V characteristic curve of the sensitive element hydrothermally grown with the ZnO nano-rod array film under the conditions of room temperature and 365nm illumination, and the insets in fig. 6a and 6b are the I-V characteristic curves of the corresponding sensitive element under the conditions of room temperature and no 365nm illumination.
FIG. 7 is a real-time response curve of the sensor provided by the present invention under the conditions of room temperature and 365nm illumination for different oxygen concentrations; wherein, fig. 7a is a real-time response curve of the sensitive device deposited with the ZnO nanoparticle film to different oxygen concentrations under the conditions of room temperature and 365nm illumination, and fig. 7b is a real-time response curve of the sensitive device hydrothermally grown with the ZnO nanorod array film to different oxygen concentrations under the conditions of room temperature and 365nm illumination.
In the figure: the LED lamp comprises a sensing element 1, an ultraviolet LED lamp 2, an insulating base 3, a first metal shell 4, a second metal shell 5, an ultraviolet transmission optical filter 6, a sensing element pin 7, an ultraviolet LED lamp pin 8, a first signal input end 91, a second signal input end 92, a signal output end 93, a substrate 11, an interdigital electrode 12 and a sensing film 13.
Detailed Description
The invention will now be described more fully hereinafter with reference to the accompanying drawings and specific examples, in which:
example 1:
the present embodiment provides a sensor integrating oxygen concentration and ultraviolet intensity detection functions, and as shown in fig. 1, the sensor provided in the present embodiment is a schematic structural diagram, and includes an insulating base 3, and a first metal housing 4 and a second metal housing 5 mounted on the insulating base 3; the first metal shell 4 and the second metal shell 5 form a first cavity and a second cavity which are independent of each other with the insulating base 3 respectively; a sensing element 1 and an ultraviolet LED lamp 2 are arranged in the first chamber, the first chamber adopts a closed chamber to form an ultraviolet intensity detection unit S1, and the first chamber is sealed by high-purity nitrogen; the second chamber is also internally provided with a sensing element 1 and an ultraviolet LED lamp 2, the second chamber adopts a chamber communicated with the outside to form an oxygen concentration detection unit S2, and the second metal shell 5 provided with a micro-mesh hole is adopted in the embodiment, so that the introduction of air and the separation of dust are ensured; the top parts of the metal shells 4 and 5 of the first chamber and the second chamber are provided with an ultraviolet transmission filter 6 in half, so that ultraviolet rays in a natural light source (namely sunlight) are allowed to irradiate on the sensitive element 1 through the ultraviolet transmission filter 6; the sensitive element 1 is sensitive to the change of ultraviolet intensity and the change of oxygen concentration under the irradiation of ultraviolet light; and a pin 7 of the sensitive device 1 and a pin 8 of the ultraviolet LED lamp 2 are connected with an external end circuit, and an ultraviolet intensity detection unit is used as a reference end of the oxygen concentration detection unit to obtain the oxygen concentration and the ultraviolet intensity.
In one embodiment, the ultraviolet LED lamp 2 has a peak wavelength of 365nm, and the ultraviolet transmission filter 6 is a projection filter having a peak wavelength of 365 nm.
As shown in fig. 2, the sensing element 1 in this embodiment is a schematic structural diagram, and specifically includes a substrate 11, an interdigital electrode 12, and a sensing thin film 13, where the interdigital electrode 12 is disposed on the substrate 11, and the sensing thin film 13 is disposed on a surface of the interdigital electrode 12.
As an embodiment, as shown in fig. 3, the external end circuit includes a first signal input terminal 91, a second signal input terminal 92 and a signal output terminal 93; a pin 7 of the sensitive device 1 and a pin 8 of the ultraviolet LED lamp 2 are respectively connected with a first signal input end 91 and a second signal input end 92; defining the first input signal as U1The second input signal is U2The output signal is Vout(ii) a The output 93 and the first and second signal input terminals 91 and 92 are preceded by a differential proportional circuit, and as is known in the art, the expression of the output signal is as follows:
the working principle of the sensor is as follows:
when the ultraviolet LED lamp 2 is not switched on and only the ultraviolet intensity detection unit S1 works, the output end signal reflects the intensity of external ultraviolet rays; when the ultraviolet LED lamp 2 is not turned on or the ultraviolet LED lamp 2 is turned on without irradiation of a natural light source and the ultraviolet intensity detecting unit S1 and the oxygen concentration detecting unit S2 work together, the output end signal reflects the oxygen concentration in the outside air.
The substrate is a flexible substrate or a rigid substrate, the material of the flexible substrate includes but is not limited to Polyimide (PI), polyethylene terephthalate (PET) or polyethylene naphthalate (PEN), and the rigid substrate includes but is not limited to silicon oxide (SiO)2) Silicon (Si), silicon oxide/Silicon (SiO)2Silicon (Si) or aluminum oxide (Al)2O3). The interdigital electrodes in this embodiment are preferably gold interdigital electrodes. Sensitivity in this exampleThe film is preferably a nano zinc oxide material; specifically, the sensitive film is a zinc oxide (ZnO) nanoparticle film with the thickness of 5-25 μm, or a zinc oxide (ZnO) nanorod array film with the thickness of 1-3 μm.
As a specific embodiment, the preparation of the zinc oxide (ZnO) nanoparticle film is preferably a spin coating process, and includes the following steps:
step A: preparing nano-grade ZnO particles by a chemical method;
and B: dispersing the nano-scale ZnO particles in absolute ethyl alcohol to form ZnO nano-particle dispersion liquid, wherein the concentration of the ZnO nano-particles is 1-6 mg/ml; the ultrasonic power of the ultrasonic dispersion operation is 90Hz, and the ultrasonic time is 2 hours;
and C: coating the ZnO nanoparticle dispersion liquid on the surface of an interdigital electrode on a substrate by adopting a spin coating process to form a ZnO nanoparticle wet film; the operation of the spin coating process is specifically as follows: firstly, processing for 5 seconds under the condition of low speed of 500 r/min; then processing for 20 seconds under the condition of high speed 3000 r/min; repeating the above operations to finish spin coating for 20-100 times;
step D: and (3) drying the sensitive element with the formed ZnO nano-particle wet film in a forced air drying oven for 8-10 hours at the temperature of 60-80 ℃ to obtain the ZnO nano-particle film.
SEM characterization of ZnO nanoparticle films:
the morphology of the ZnO nanoparticle film was observed using a JSM-7500F cold field emission scanning electron microscope of JEOL corporation, japan, with an acceleration voltage of 15kV, and the results are shown in fig. 4.
As can be seen from fig. 4a, the ZnO nanoparticle film is fluffy and porous, and this structure not only enhances the absorption of ultraviolet light, but also facilitates the adsorption and desorption of gas molecules. The thickness of the film prepared by the preparation method of the ZnO nanoparticle film provided by the invention is in linear relation with the number of spin-coating layers, and when the number of spin-coating layers is 80, the film thickness is 20 μm, which is shown in fig. 4 b.
As a specific embodiment, the preparation of the zinc oxide nanorod array film is preferably a hydrothermal method, and comprises the following steps:
step A: forming a ZnO seed layer on the surface of the interdigital electrode on the substrate by using a sol-gel method by taking a 10mM zinc acetate ethanol solution as a precursor solution;
and B: putting the sensitive element forming the ZnO seed layer into a reaction kettle filled with a mixed solution formed by zinc nitrate and hexamethylenetetramine, wherein the concentration of the zinc nitrate in the mixed solution is 20-50 mM, the concentration of the hexamethylenetetramine in the mixed solution is 20-50 mM, the reaction temperature is 93 ℃, the reaction time is 4.5 hours,
and C: and (3) sequentially placing the sensitive element with the ZnO nanorod in deionized water and absolute ethyl alcohol, cleaning for 3-5 times, and drying for 8-10 hours at the temperature of 60-80 ℃ to obtain the ZnO nanorod array film.
SEM characterization of ZnO nanorod array film:
the morphology of the ZnO nanorod array film was observed using an S-4800 cold field emission scanning electron microscope of Hitachi, Japan at an accelerating voltage of 20kV, and the results are shown in FIG. 5.
As can be seen from FIG. 5, ZnO nanorods show very high preferred orientation growth, and a large number of nanorods perpendicular to the surface of the device are regularly and orderly arranged to form a 3D nano-film, so that the structure increases the specific surface area of the film, allows more photons or gas molecules to act on the surface of the material, and thus improves the dependence of the physical properties of the material on the change of the external environment. In the preparation method of the ZnO nanorod array film, the diameter of the nanorod can be adjusted by changing the concentration of the growth solution.
Example 2:
evaluation of the photoelectric properties of the sensor 1:
using a semiconductor characterization system model 4200-SCS Gishly, USA, with a voltage scan range of-5-5V, the sensing element 1 coated with the ZnO nanoparticle film and grown with the ZnO nanorod array film was recorded in the presence of 365nm ultraviolet light (radiation power of 5.7 mW/cm)2) The I-V curve under irradiation and without 365nm UV light was plotted, and the results are shown in FIG. 6.
As can be seen from fig. 6, the two sensitive films 13 are in ohmic contact with the gold interdigital electrode, and the corresponding sensitive elements show obvious ultraviolet response. WhileIn the absence of illumination, the currents of the sensitive elements coated with the ZnO nanoparticle film and grown with the ZnO nanorod array film under the bias of 5V are respectively 1.91 multiplied by 10-8A and 1.11X 10-4A; under illumination, the photocurrent at 5V bias is 2.63 × 10-4A and 7.76X 10-2A; obviously, the current is increased by 2 to 4 orders of magnitude, which shows that the sensitive device provided by the invention has very high response to ultraviolet light and has a large response range.
Example 3:
evaluation of oxygen sensitivity of the sensitive element 1 under ultraviolet irradiation:
respectively recording the ultraviolet light (radiation power of 5.7 mW/cm) at 365nm of a sensitive device coated with a ZnO nanoparticle film and grown with a ZnO nanorod array film by adopting an American Gishili 2700 type data acquisition system2) The resistance under irradiation varied with oxygen concentration, and the results are shown in FIG. 7.
As can be seen from fig. 7, the two types of sensor 1 described above have a very high response to 0-20% oxygen under illumination. Furthermore, the resistance of the sensing element increases linearly with increasing oxygen concentration.
It can be seen from the combination of examples 2 and 3 that the sensor 1 is very suitable for use in the sensor of the present invention for detecting ultraviolet intensity and oxygen concentration.
The above-described embodiments are merely illustrative of several aspects of the present invention, which are described in detail and detailed, and therefore should not be construed as limiting the scope of the invention. It should be noted that those skilled in the art can make various changes and modifications without departing from the spirit of the present invention, and all such changes and modifications are intended to be covered by the appended claims. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (9)
1. A sensor integrating oxygen concentration and ultraviolet intensity detection functions is characterized by comprising a closed first chamber and a second chamber communicated with the outside, wherein the first chamber is used as an ultraviolet intensity detection unit and contains a first sensitive element and a first ultraviolet excitation light source; the second chamber is used as an oxygen detection unit and contains a second sensitive element and a second ultraviolet excitation light source; ultraviolet transmission filter elements are respectively arranged at the tops of the first chamber and the second chamber, so that ultraviolet light in natural light is irradiated on the first sensitive element and the second sensitive element through the ultraviolet transmission filter elements; the sensitive materials of the first sensitive element and the second sensitive element are the same, and the sensitive materials have ultraviolet response and are sensitive to oxygen under ultraviolet irradiation; the first ultraviolet excitation light source and the second ultraviolet excitation light source are connected with a power supply; the first sensitive element and the second sensitive element are respectively connected to an external end circuit for signal processing, so that the first sensitive element detects the external ultraviolet intensity, and the second sensitive element detects the external oxygen concentration by taking the ultraviolet intensity detection unit as a reference.
2. The sensor of claim 1, wherein the first and second sensing elements have pins as first and second signal inputs, respectively, and a differential ratio circuit is used between the first and second signal inputs and the signal output.
3. The sensor integrating oxygen concentration and ultraviolet intensity detection functions as claimed in claim 1, wherein the sensing element comprises a substrate, an interdigital electrode disposed on the surface of the substrate, and a sensing film disposed on the surface of the interdigital electrode.
4. The sensor of claim 3, wherein the substrate is a flexible substrate or a rigid substrate.
5. The sensor of claim 3, wherein the sensitive film is made of nano zinc oxide.
6. The sensor of claim 1, wherein the peak wavelength of the UV excitation light source corresponds to the peak wavelength of the UV transmissive filter, and the peak wavelengths of the UV excitation light source and the UV transmissive filter are both 340-380 nm.
7. A detection method based on the sensor of any one of claims 1 or 3 to 6, wherein when the ultraviolet intensity detection unit works alone, the output end signal is the intensity of external ultraviolet; when the ultraviolet intensity detection unit and the oxygen detection unit work together, the output end signal is the concentration of the external oxygen.
8. A detection method based on the sensor of claim 7, characterized in that when the ultraviolet intensity detection unit works alone, the oxygen detection unit is grounded, and the ultraviolet intensity detection unit is connected into an external circuit; when the ultraviolet intensity detection unit and the oxygen detection unit work together, the oxygen detection unit and the ultraviolet intensity detection unit are both connected into the external circuit.
9. A detection method based on the sensor of claim 8, wherein the external end circuit comprises a first signal input end, a second signal input end and a signal output end, the first signal input end and the second signal input end are respectively connected with pins of the first sensitive element and the second sensitive element, and a differential ratio circuit is adopted between the first signal input end and the signal output end, and between the second signal input end and the signal output end, the differential ratio circuit is adopted.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810605030.3A CN108645449B (en) | 2018-06-13 | 2018-06-13 | Sensor integrating oxygen concentration and ultraviolet intensity detection functions and detection method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810605030.3A CN108645449B (en) | 2018-06-13 | 2018-06-13 | Sensor integrating oxygen concentration and ultraviolet intensity detection functions and detection method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108645449A CN108645449A (en) | 2018-10-12 |
| CN108645449B true CN108645449B (en) | 2020-05-01 |
Family
ID=63752223
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810605030.3A Expired - Fee Related CN108645449B (en) | 2018-06-13 | 2018-06-13 | Sensor integrating oxygen concentration and ultraviolet intensity detection functions and detection method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108645449B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111750985A (en) * | 2020-06-15 | 2020-10-09 | 江苏鑫氟特能源装备有限公司 | Ultraviolet detection method for material inspection |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100357620B1 (en) * | 1999-08-13 | 2002-10-25 | 삼성전자 주식회사 | Monitoring system for ultra violet lamp |
| CN101131436A (en) * | 2006-08-25 | 2008-02-27 | 富士胶片株式会社 | Method of producing optical film, optical film, polarizer plate, transfer material, liquid crystal display device, and polarized ultraviolet exposure apparatus |
| CN101363809A (en) * | 2007-08-08 | 2009-02-11 | 雅马哈发动机株式会社 | Gas sensor, air-fuel ratio controller, and transportation apparatus |
| CN101656187A (en) * | 2004-05-31 | 2010-02-24 | 三菱重工业株式会社 | Optical performance recovery device, recovery method and optical system used for the device |
| CN203011528U (en) * | 2013-01-10 | 2013-06-19 | 京东方科技集团股份有限公司 | Novel high-sensitivity ultraviolet light intensity detector and ultraviolet light intensity measurement and control system |
| CN203615972U (en) * | 2013-12-16 | 2014-05-28 | 天津市鑫丰仪表成套有限公司 | Novel methane metering instrument |
| CN207147525U (en) * | 2017-03-30 | 2018-03-27 | 江苏建筑职业技术学院 | A kind of intelligent construction Indoor Environment Detection system |
| CN107966179A (en) * | 2017-11-20 | 2018-04-27 | 李正梅 | Environment measuring equipment |
-
2018
- 2018-06-13 CN CN201810605030.3A patent/CN108645449B/en not_active Expired - Fee Related
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100357620B1 (en) * | 1999-08-13 | 2002-10-25 | 삼성전자 주식회사 | Monitoring system for ultra violet lamp |
| CN101656187A (en) * | 2004-05-31 | 2010-02-24 | 三菱重工业株式会社 | Optical performance recovery device, recovery method and optical system used for the device |
| CN101131436A (en) * | 2006-08-25 | 2008-02-27 | 富士胶片株式会社 | Method of producing optical film, optical film, polarizer plate, transfer material, liquid crystal display device, and polarized ultraviolet exposure apparatus |
| CN101363809A (en) * | 2007-08-08 | 2009-02-11 | 雅马哈发动机株式会社 | Gas sensor, air-fuel ratio controller, and transportation apparatus |
| CN203011528U (en) * | 2013-01-10 | 2013-06-19 | 京东方科技集团股份有限公司 | Novel high-sensitivity ultraviolet light intensity detector and ultraviolet light intensity measurement and control system |
| CN203615972U (en) * | 2013-12-16 | 2014-05-28 | 天津市鑫丰仪表成套有限公司 | Novel methane metering instrument |
| CN207147525U (en) * | 2017-03-30 | 2018-03-27 | 江苏建筑职业技术学院 | A kind of intelligent construction Indoor Environment Detection system |
| CN107966179A (en) * | 2017-11-20 | 2018-04-27 | 李正梅 | Environment measuring equipment |
Non-Patent Citations (3)
| Title |
|---|
| Flexible organic thin-film transistors based on;YANG Jing etal;《SCIENCE CHINA》;20180504;第61卷(第11期);第1696-1704页 * |
| Gas sensors based on polyaniline/zinc oxide hybrid film for ammonia;Guotao Zhu etal;《Chemical Physics Letters》;20161026;第147-152页 * |
| UV-Enhanced Oxygen Sensing with Tunable ZnO;Qiuping Zhang etal;《2017 IEEE sensors》;20171225;第1-3页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108645449A (en) | 2018-10-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Li et al. | Hydrogen gas sensor based on mesoporous In2O3 with fast response/recovery and ppb level detection limit | |
| Wang et al. | Visible light activated excellent NO2 sensing based on 2D/2D ZnO/g-C3N4 heterojunction composites | |
| Ren et al. | Conductometric NO2 gas sensors based on MOF-derived porous ZnO nanoparticles | |
| Shaban et al. | Design and application of nanoporous graphene oxide film for CO2, H2, and C2H2 gases sensing | |
| Cui et al. | UV-light illumination room temperature HCHO gas-sensing mechanism of ZnO with different nanostructures | |
| Yao et al. | Sn doped ZnO layered porous nanocrystals with hierarchical structures and modified surfaces for gas sensors | |
| Li et al. | NiO-wrapped mesoporous TiO2 microspheres based selective ammonia sensor at room temperature | |
| Zheng et al. | Size-controlled synthesis of porous ZnSnO 3 nanocubes for improving formaldehyde gas sensitivity | |
| CN108663417A (en) | One kind being directed to low concentration of NO2The novel I n of gas2O3/Sb2O3Composite hollow nanotube gas sensitive | |
| CN111060560B (en) | Ru-WO3 nano material and preparation method and application thereof | |
| CN110865099B (en) | Preparation method and application of ZnO-SnO2-Zn2SnO4 porous nanofiber gas-sensitive material | |
| Babar et al. | Concentration modulated vanadium oxide nanostructures for NO2 gas sensing | |
| Liao et al. | An effective oxide shell-protected surface-enhanced Raman scattering (SERS) substrate: the easy route to Ag@ Ag x O-silicon nanowire films via surface doping | |
| Jamshidi Bandari et al. | Carbon monoxide gas sensing features of zinc oxide nanoneedles: Practical selectivity and long-term stability | |
| CN108645449B (en) | Sensor integrating oxygen concentration and ultraviolet intensity detection functions and detection method thereof | |
| Xiao et al. | Hollow-structured Fe2O3/Au/SiO2 nanorods with enhanced and recyclable photo-Fenton oxidation for the remediation of organic pollutants | |
| CN113189153A (en) | Ethanol sensor based on ZnO porous nanosheet microsphere sensitive material, preparation method and application thereof | |
| Wu et al. | Rapid detection of trace ozone in TiO2–In2O3 materials by using the differential method | |
| Seo et al. | Detection of organic gases using TiO2 nanotube-based gas sensors | |
| Yu et al. | Improving hydrogen sensing performance of TiO2 nanotube arrays by ZnO modification | |
| Wang et al. | Light-excited chemiresistive sensors integrated on LED microchips | |
| CN113125385B (en) | Based on Au @ MoS 2 Localized surface plasmon enhanced NO 2 Gas sensor and preparation method | |
| Joshi et al. | Hierarchical CaTiO3 microspheres for acetone sensing | |
| Li et al. | SnO2 nanosheets for NIR-enhanced NO2 sensing and adsorption/desorption | |
| Park et al. | Room temperature hydrogen sensing properties of multiple-networked Nb 2 O 5-nanorod sensors decorated with Pd nanoparticles |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200501 |