CN108637506A - A kind of rotary target material welding equipment - Google Patents
A kind of rotary target material welding equipment Download PDFInfo
- Publication number
- CN108637506A CN108637506A CN201810504501.1A CN201810504501A CN108637506A CN 108637506 A CN108637506 A CN 108637506A CN 201810504501 A CN201810504501 A CN 201810504501A CN 108637506 A CN108637506 A CN 108637506A
- Authority
- CN
- China
- Prior art keywords
- bushing pipe
- target
- welding equipment
- material welding
- hydraulic support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K31/00—Processes relevant to this subclass, specially adapted for particular articles or purposes, but not covered by only one of the preceding main groups
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a kind of rotary target material welding equipments, including bushing pipe, hydraulic support, single-unit target set, target clamping, calandria, the bushing pipe is located on hydraulic support, the friendly single-unit target set of house on the outside of the bushing pipe, the bushing pipe is internally provided with calandria, and the bushing pipe is fixed by target clamping, the configuration of the present invention is simple, it is quick detachable, and staff is facilitated to use and understand.
Description
Technical field
The present invention relates to the technical field of target welding more particularly to a kind of rotary target material welding equipments.
Background technology
With the rapid development of electronics and information industry, for membrane science using increasingly extensive, sputtering method is to prepare thin-film material
One of major technique, the source material of sputter-deposited thin films is target, and the film consistency deposited with target as sputter is high, attachment
Property is good, and since the 1990s, the new device of microelectronic industry and new material development are rapid, electronics, magnetism, optics, photoelectricity and
Superconducting thin film etc. has been widely used for new and high technology and industrial circle, and sputtering target material market scale is promoted to be growing.Nowadays,
Target has flourished as a specialized industry, the directly fixed welding of traditional use, if pad is not in one place
If, it must just unload again, then weld again, process is more complicated, takes long.
Invention content
Goal of the invention：The present invention to be solved to weld, and process is more complicated, takes long technical problem, the present invention
A kind of rotary target material welding equipment is provided.
In order to solve the above-mentioned technical problem, the technical solution adopted by the present invention is：A kind of rotary target material welding equipment, including
Bushing pipe, hydraulic support, single-unit target set, target clamping, calandria, the bushing pipe is located on hydraulic support, outside the bushing pipe
The friendly single-unit target set of side house, the bushing pipe are internally provided with calandria, and the bushing pipe is fixed by target clamping.
Rotary target material welding equipment operating procedure is as follows：
The first step is placed on the bushing pipe being surface-treated on hydraulic support, holds up；
Second step is sleeved on inner surface treatment good single-unit target on bushing pipe, calandria is put into bushing pipe from liner top, is put into
Need the position heated；
Third walks, and after target clamping is fixed, heating pours into solder to after temperature, cools down, and calandria proposes bushing pipe；
4th step is inserted in the second section target, the process for repeating 2 ~ 3.
5th step removes target, finally binding is completed until whole target binding completion by hydraulic support.
Further, the heating rear surface temperature difference is no more than 5 ° inside the bushing pipe.
The invention has the advantages that：
1, to surround on hydraulic support, hydraulic support can be rotated this lining pipe with 360 °, avoid waste of time；
2, single-unit target set can protect staff not to be burned when bushing pipe heats.
Description of the drawings
Fig. 1 is a kind of structural schematic diagram of rotary target material welding equipment of the present embodiment.
Specific implementation mode
It is further elaborated below in conjunction with attached drawing and by specific embodiment to the present invention, it should be pointed out that：For this technique
For the common process personnel in field, without departing from the principle of the present invention, to repairing for various equivalent forms of the invention
Change and falls within the application range as defined in the appended claims.
Embodiment 1：
As shown in Figure 1, a kind of rotary target material welding equipment, including bushing pipe, hydraulic support, single-unit target set, target clamping, heating
Body, the bushing pipe are located on hydraulic support, and the friendly single-unit target set of house, the bushing pipe are internally provided with heating on the outside of the bushing pipe
Body, the bushing pipe are fixed by target clamping, and the configuration of the present invention is simple is quick detachable, and staff is facilitated to use and understand.
Rotary target material welding equipment operating procedure is as follows：
The first step is placed on the bushing pipe being surface-treated on hydraulic support, holds up；
Second step is sleeved on inner surface treatment good single-unit target on bushing pipe, calandria is put into bushing pipe from liner top, is put into
Need the position heated；
Third walks, and after target clamping is fixed, heating pours into solder to after temperature, cools down, and calandria proposes bushing pipe；
4th step is inserted in the second section target, the process for repeating 2 ~ 3.
5th step removes target, finally binding is completed until whole target binding completion by hydraulic support.
Further, the heating rear surface temperature difference is no more than 5 ° inside the bushing pipe.
The present invention has the following advantages：
1, to surround on hydraulic support, hydraulic support can be rotated this lining pipe with 360 °, avoid waste of time；
2, single-unit target set can protect staff not to be burned when bushing pipe heats
3, operating procedure of the invention is easily understood, and suitable for the making of a variety of targets, meets the demand in market.
Claims (4)
1. a kind of rotary target material welding equipment, which is characterized in that including bushing pipe, hydraulic support, single-unit target set, target clamping,
Calandria, the bushing pipe are located on hydraulic support, and the friendly single-unit target set of house on the outside of the bushing pipe, the bushing pipe, which is internally provided with, to be added
Hot body, the bushing pipe are fixed by target clamping.
2. a kind of rotary target material welding equipment according to claim 1, which is characterized in that the rotary target material welding equipment behaviour
Steps are as follows for work：
The first step is placed on the bushing pipe being surface-treated on hydraulic support, holds up；
Second step is sleeved on inner surface treatment good single-unit target on bushing pipe, calandria is put into bushing pipe from liner top, is put into
Need the position heated；
Third walks, and after target clamping is fixed, heating pours into solder to after temperature, cools down, and calandria proposes bushing pipe；
4th step is inserted in the second section target, the process for repeating 2 ~ 3；
5th step removes target, finally binding is completed until whole target binding completion by hydraulic support.
3. a kind of rotary target material welding equipment according to claim 1, which is characterized in that the liner conduit length is 4m.
4. a kind of rotary target material welding equipment according to claim 1, which is characterized in that heat rear surface inside the bushing pipe
The temperature difference is no more than 5 °.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810504501.1A CN108637506A (en) | 2018-05-24 | 2018-05-24 | A kind of rotary target material welding equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810504501.1A CN108637506A (en) | 2018-05-24 | 2018-05-24 | A kind of rotary target material welding equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108637506A true CN108637506A (en) | 2018-10-12 |
Family
ID=63758042
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810504501.1A Pending CN108637506A (en) | 2018-05-24 | 2018-05-24 | A kind of rotary target material welding equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108637506A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109807452A (en) * | 2019-03-18 | 2019-05-28 | 东莞市欧莱溅射靶材有限公司 | A kind of end welding method of rafifinal rotary target |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104249203A (en) * | 2013-06-26 | 2014-12-31 | 上海电气集团上海电机厂有限公司 | Motor rotor end ring and guide bar brazing method |
| CN204224696U (en) * | 2014-11-13 | 2015-03-25 | 深圳市众诚达应用材料科技有限公司 | Magnetron sputtering rotary target material |
| CN106270866A (en) * | 2016-08-30 | 2017-01-04 | 常州苏晶电子材料有限公司 | A kind of welding method rotating molybdenum target material |
| CN107663630A (en) * | 2016-07-29 | 2018-02-06 | 欧美达应用材料科技股份有限公司 | Rotary target material |
-
2018
- 2018-05-24 CN CN201810504501.1A patent/CN108637506A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104249203A (en) * | 2013-06-26 | 2014-12-31 | 上海电气集团上海电机厂有限公司 | Motor rotor end ring and guide bar brazing method |
| CN204224696U (en) * | 2014-11-13 | 2015-03-25 | 深圳市众诚达应用材料科技有限公司 | Magnetron sputtering rotary target material |
| CN107663630A (en) * | 2016-07-29 | 2018-02-06 | 欧美达应用材料科技股份有限公司 | Rotary target material |
| CN106270866A (en) * | 2016-08-30 | 2017-01-04 | 常州苏晶电子材料有限公司 | A kind of welding method rotating molybdenum target material |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109807452A (en) * | 2019-03-18 | 2019-05-28 | 东莞市欧莱溅射靶材有限公司 | A kind of end welding method of rafifinal rotary target |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20181012 |