CN108626102B

CN108626102B - Microfluidic device

Info

Publication number: CN108626102B
Application number: CN201710166395.6A
Authority: CN
Inventors: 李保庆; 禇家如; 马托
Original assignee: University of Science and Technology of China USTC
Current assignee: University of Science and Technology of China USTC
Priority date: 2017-03-20
Filing date: 2017-03-20
Publication date: 2020-01-31
Anticipated expiration: 2037-03-20
Also published as: CN108626102A

Abstract

The invention discloses microfluidic devices, which comprise a displacement actuator (2) and a microfluidic chip (1), wherein the displacement actuator (2) and the microfluidic chip (1) are mutually independent, the microfluidic chip (1) is provided with a micro pipeline, the micro pipeline is provided with an input end (11) and an output end (12), an extrusion part (13) is arranged between the input end (11) and the output end (12) of the micro pipeline, and the displacement actuator (2) is provided with an actuating part for extruding the micro pipeline of the extrusion part (13).

Description

Microfluidic device

Technical Field

The invention relates to the technical field of microfluidic equipment, in particular to microfluidic devices.

Background

Microfluidic devices refer to devices that process or manipulate tiny fluids using microchannels or microstructures. Take a micro peristaltic pump in a micro-fluidic device as an example, which is a pump body for driving fluid in a micro-channel to flow. There are many structures for driving the flow of fluid.

Among the micro peristaltic pumps, there are piezoelectric pump drives integrated on a Chip, such as Journal of Physics D, Applied Physics, 2016, 49, 175402, introducing Time-phase-shift peristaltic micropump systems, there are also electrostatically driven peristaltic micropumps integrated on a Chip, such as Lab on a Chip, 2004,4,495, 501, introducing electrostatically driven pico peristaltic pumps on a Chip, and also, on an integrated Chip, such as Sensors and Actuators a, Physics, 2011, 165, 86-93, introducing slightly peristaltic pumps driven by expanding heated gas on a Chip, and integrated piezoelectric micropumps disclosed in china patent 205078430U, including a substrate and a piezoelectric actuator, where the piezoelectric actuator is locally bent and deformed, so that fluids are sequentially conveyed through the formation of cavities CN.

However, the structure of the microfluidic device is complex, for example, a peristaltic micropump integrating a piezoelectric actuator and a substrate in an integrated structure in the piezoelectric peristaltic micropump is complex in structure and manufacturing process, and increases processing difficulty, and the unit area formed by the piezoelectric actuator and the substrate is too large, so that the volume of the cavity is large, the transportation of trace liquid cannot be accurately controlled, and control accuracy is affected.

Therefore, how to reduce the processing difficulty and improve the control precision is a problem to be solved urgently by those skilled in the art.

Disclosure of Invention

In view of this, the present invention provides kinds of microfluidic devices to reduce the processing difficulty and improve the control precision.

In order to achieve the purpose, the invention provides the following technical scheme:

A microfluidic device comprising a displacement actuator and a microfluidic chip, wherein the displacement actuator and the microfluidic chip are independent from each other;

the micro-fluidic chip is provided with a micro-pipeline, the micro-pipeline is provided with an input end and an output end, and an extrusion part is arranged between the input end and the output end of the micro-pipeline;

the displacement actuator has an actuating member that presses the pressing portion.

Preferably, in the above microfluidic device, the microfluidic chip is detachably disposed on a chip mounting site of the microfluidic device.

Preferably, in the above microfluidic device, the displacement actuator is a piezoelectric actuator, an electromagnetic actuator, or an electromechanical actuator.

Preferably, in the above microfluidic device, the actuating component includes a cantilever actuating element and an actuating portion disposed corresponding to the pressing portion, and the actuating portion is located at an end where the cantilever actuating element is suspended.

Preferably, in the above microfluidic device, the microchannel is a polymer flexible channel.

Preferably, in the above microfluidic device, the pressing portion is a cavity structure.

Preferably, in the above microfluidic device, a projected area of the cavity structure covers a projected area of the pressing end of the actuating component;

the projection direction of the projection area is the arrangement direction of the actuating component and the cavity structure.

Preferably, in the above microfluidic device, the number of the displacement actuators is plural, and the pressing portion is plural and corresponds to the displacement actuator .

Preferably, in the above microfluidic device, the plurality of displacement actuators are located on two horizontal planes, respectively;

two adjacent displacement actuators are located on different horizontal planes.

Preferably, in the above microfluidic device, a plurality of the displacement actuators are located on the same horizontal plane.

Preferably, in the above microfluidic device, the microfluidic device has a micro peristaltic pump function.

According to the above technical solution, the micro-fluidic device provided by the present invention realizes the flow of the fluid in the micro-channel by disposing the displacement actuator and the micro-fluidic chip independently from each other and transferring the actuating component thereof to the micro-channel through the actuating operation of the displacement actuator. According to the micro-fluidic device provided by the invention, the displacement actuator and the micro-fluidic chip are mutually independent, so that the displacement actuator and the micro-fluidic chip can be conveniently and respectively processed, and the processing difficulty of the integral manufacturing process is reduced; the condition that fluid and displacement actuator direct contact has effectively been avoided for fluid only flows through little pipeline, so that control fluid flow area has improved control accuracy.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.

Fig. 1 is a schematic -th structural diagram of a microfluidic device according to an embodiment of the present invention;

fig. 2 is a schematic diagram of a second structure of a microfluidic device according to an embodiment of the present invention;

fig. 3 is a schematic structural diagram of a microfluidic chip according to an embodiment of the present invention;

fig. 4 is an overall schematic view of a microfluidic device provided in an embodiment of the present invention;

fig. 5 is a partial schematic view of a microfluidic device provided in an embodiment of the present invention;

fig. 6 is a voltage flow diagram of a microfluidic device provided in an embodiment of the present invention;

fig. 7 is a flow chart illustrating the operation of a microfluidic device according to an embodiment of the present invention;

FIG. 8 is a plot of flow rate versus frequency for an th configuration of a microfluidic device according to an embodiment of the present invention;

FIG. 9 is a plot of flow rate versus frequency for a second configuration of a microfluidic device according to an embodiment of the present invention;

fig. 10 is a graph showing the relationship between the flow rate and the voltage in the th configuration of the microfluidic device according to the embodiment of the present invention.

Detailed Description

The invention discloses microfluidic devices, which are used for reducing processing difficulty and improving control precision.

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only partial embodiments of of the present invention, rather than all embodiments.

Referring to fig. 1 and fig. 2, fig. 1 is a schematic structural view of types of microfluidic devices according to an embodiment of the present invention, and fig. 2 is a schematic structural view of a second type of microfluidic device according to an embodiment of the present invention.

The embodiment of the invention provides microfluidic devices, which comprise a displacement actuator 2 and a microfluidic chip 1, wherein the displacement actuator 2 and the microfluidic chip 1 are mutually independent, the microfluidic chip 1 is provided with a microchannel, the microchannel is provided with an input end 11 and an output end 12, a squeezing part 13 is arranged between the input end 11 and the output end 12 of the microchannel, and the displacement actuator 2 is provided with an actuating part squeezing towards the squeezing part 13.

According to the microfluidic device provided by the embodiment of the invention, the displacement actuator 2 and the microfluidic chip 1 are arranged independently, and the actuating part of the displacement actuator 2 is transmitted to the microchannel through the actuating operation of the displacement actuator, so that the fluid flows in the microchannel. According to the micro-fluidic device provided by the embodiment of the invention, the displacement actuator 2 and the micro-fluidic chip 1 are mutually independent, so that the displacement actuator 2 and the micro-fluidic chip 1 can be conveniently and respectively processed, and the processing difficulty of the integral manufacturing process is reduced; the condition that fluid and displacement actuator 2 direct contact has effectively been avoided for fluid only flows through the little pipeline, so that control fluid flow area has improved control accuracy.

It can be understood that the displacement actuator 2 adopts an impact actuation mode, and the operation of the microfluidic device is completed by the extrusion of the extrusion part 13 by the actuating part, and the microfluidic chip has the capability of shrinking the reaction processes of biology, chemistry and the like to micro-planarization chips, so that the reaction of biochemical analysis is faster, the efficiency is higher and the controllability is stronger.

, the micro-fluidic chip 1 can be detachably arranged on the chip mounting position of the micro-fluidic device, through the arrangement, the displacement actuator 2 can be repeatedly used, so that the cost is reduced, the micro-fluidic chip 1 can be replaced relative to the micro-fluidic device, the replacement of the micro-fluidic chip 1 is convenient, and the cross contamination when different types of fluids are applied is effectively avoided, the micro-fluidic chip 1 can reduce the requirements of samples and reagents, the reaction is rapid, the manual intervention is reduced, and a cheap and disposable substrate is used, so that the reaction precision is improved and the cost is reduced.

In the microfluidic device provided by the embodiment of the present invention, the displacement actuator 2 is a piezoelectric actuator, an electromagnetic actuator or an electromechanical actuator, however, other types of displacement actuators are also possible, which are not described in again and are all within the protection scope.

The actuating component comprises a cantilever actuating element 21 and an actuating part 22 arranged corresponding to the squeezing part 13, wherein the actuating part 22 is positioned at the suspended end of the cantilever actuating element 21, through the arrangement, the distance between the main body of the displacement actuator 2 and the microfluidic chip 1 can be enlarged, and is determined by the cantilever length of the cantilever actuating element 21.

As shown in fig. 1 and fig. 2, in the present embodiment, the actuating part 22 is located at the side of the cantilever actuating part 21 facing the microfluidic chip 1. preferably, the actuating part 22 is disposed perpendicular to the cantilever actuating part 21.

Preferably, the displacement actuator 2 is a piezoelectric actuator having a piezoelectric cantilever beam, which is the cantilever actuating member 21. since the piezoelectric cantilever beam of the piezoelectric actuator can provide displacement actuation at high frequency and with high precision, step improves the control precision of the microfluidic device.

In this example, the piezoelectric cantilever is a square piezoelectric beam with a length of 52mm, a width of 7mm and a thickness of 0.82mm, and is not limited to the dimensions of the embodiment, and other types may be selected. Each displacement actuator is made up of two parts, including 11 a piezoelectric beam and a needle 21.

Wherein the actuation portion 22 is preferably an actuation needle. May be Micro Pin needle 1356-3 or 1356-1 from Keystone electronic Corp.

The microfluidic chip 1 is provided with a microchannel and a flexible deformable structure positioned on the side of the microchannel , the other side structure of the microchannel is mainly used for sealing fluid and does not need to have deformability, and the microfluidic chip 1 can be of a two-layer or three-layer structure.

In this embodiment, the microchannels are fabricated by soft lithography, and the microchannels and the flexible deformable structures are processed times to form a two-layer structure with another side sealing layer.

Preferably, the microchannel is a polymer flexible channel. The polymer flexible material applied to the micro-pipe may be PDMS (polydimethylsiloxane), PI (Polyimide), or PET (Polyethylene terephthalate). Of course, other polymer flexible materials can be applied to manufacture the micro-pipeline, and the requirement of the micro-pipeline for transferring fluid is only required to be met.

In the micro-pipe manufacturing process of the present embodiment: first, spin coating was performed with SU8 photoresist (negative resist), and the spin was raised to 600 revolutions for 5 seconds and rotated for 20 seconds at 600 revolutions. Then, pre-baking at 65 ℃ for 3 minutes and at 95 ℃ for 6 minutes; carrying out ultraviolet exposure for 10 seconds; after exposure, baking at 65 ℃ for 1 minute and at 95 ℃ for 6 minutes; cooling to room temperature, developing for about 4 minutes. And then, washing with deionized water, and blow-drying with an air gun to obtain the pipeline pattern with the height of 44-51 μm. And then, transferring the photoetching patterned pipeline by using PDMS, and vacuumizing the PDMS before transfer printing and pouring. PDMS was spin-coated on the master and spun for 60 seconds at 200 rpm, the thickness of PDMS was about 200 μm to 300 μm, and then left to stand on a heating plate at 65 ℃ for 30 minutes, and the transferred PDMS was taken off the heating plate and cooled to room temperature. The transferred PDMS was removed with a tool (scalpel, etc.) and placed in a clean container.

By the method, the PDMS pipeline is manufactured. It is understood that the specific values in the above steps can be adjusted within a reasonable range, and only the PDMS pipe is successfully manufactured, which is not limited to the above actual values.

By the micro-fluidic chip 1 arranged above, the resolution of single-period conveying can range from pico-liter to nano-liter, and the volume of residual liquid (dead zone) in the cavity of the micro-pipeline is less than 0.3 microliter.

As shown in fig. 3, in this embodiment, the microfluidic chip 1 of the microfluidic chip is two layers, which are respectively a cover and a carrier, the cover is made of a flexible material and can be elastically deformed, and the cover is provided with a micro-channel, and the carrier is an planar block, which can be a rigid material or a flexible material sealed with the cover.

In this embodiment, the carrier and the lid are sealed by bonding. Wherein, the cover body is provided with two fluid channels which are respectively communicated with the input end 11 and the output end 12 of the micro-pipeline.

Preferably, the pressing part 13 is a cavity structure. By the above arrangement, so that it is arranged in correspondence with the actuating member of the displacement actuator 2. By pressing the lid body, the lid body is elastically deformed and the pressing force is transmitted to the pressing portion 13.

In this embodiment, the cavity structure is a circular cavity for easy processing, and can also be processed into a square, oval or triangular shape, etc., which is not described herein by and is within the protection scope.

In this embodiment, the carrier is a glass slide, the cover is a polymer flexible block, and the cover may be a PDMS block, a PET block, or a block structure made of other polymer flexible materials, which is not described in again and is within the protection range.

Preferably, the carrier is plasma-bonded to the microchannel and the cover.

In the actual operation process, the PDMS pipeline and the carrier manufactured by the micro-pipeline manufacturing process are adhered to through a plasma bonding mode, then the cover body is covered on the carrier, the cover body is adhered to through the plasma bonding mode, after the bonding is firm, punching, intubation and sealing measures are taken to complete the processing of two fluid channels, and the two fluid channels are mutually matched with the input end 11 and the output end 12 of the micro-pipeline on the micro-fluidic chip 1 so as to facilitate the fluid to enter and exit the micro-pipeline.

The projection area of the cavity structure covers the projection area of the extrusion end of the actuating component; the projection direction of the projection area is the arrangement direction of the actuating component and the cavity structure. Through the arrangement, the projection area of the cavity structure is larger than that of the extrusion end of the actuating component, the extrusion end (the needle end of the actuating part 22) of the actuating component is in contact with the cavity structure, the situation that the extrusion end of the actuating component is staggered relative to the cavity structure is avoided, and the transmission precision is improved.

Preferably, the number of the displacement actuators 2 is plural, and the pressing portion 13 on the micro duct is plural and corresponds to the displacement actuator 2 .

As shown in fig. 4, the controller 3 of the microfluidic device includes a single chip microprocessor, a circuit portion and a switch selection circuit for selecting on/off, and the displacement actuator 2 is controlled by the controller 3, so that the on/off operation of the displacement actuator 2 on the micro-channel in the microfluidic chip 1 is completed, and the microfluidic device operates.

As shown in fig. 5, in the present embodiment, the number of the pressing portions 13 is three, and the number of the displacement actuators 2 is three, namely, the th pressing portion 13a, the second pressing portion 13b, and the third pressing portion 13c, and therefore, the number of the cantilever actuators 21 and the actuator portions 22 is also three, and the numbers are respectively the th cantilever actuator 21a and the st actuator 22a corresponding to the th pressing portion 13a, the second cantilever actuator 21b and the second actuator 22b corresponding to the second pressing portion 13b, and the third cantilever actuator 21c and the third actuator 22c corresponding to the third pressing portion 13 c.

Preferably, the microfluidic device is a micro peristaltic pump. The following description will be made by taking a micro peristaltic pump as an example.

Referring to fig. 5, fig. 6 and fig. 7, fig. 6 is a voltage flow chart of a micro peristaltic pump according to an embodiment of the present invention; fig. 7 is a flowchart illustrating the operation of the micro peristaltic pump according to an embodiment of the present invention. In this embodiment, the displacement actuator 2 is a piezoelectric actuator. In fig. 7, the dashed lines represent the position of the carrier, the solid lines represent the displacement of the actuator, and the arrows represent the flow direction of the fluid in the microchannel.

In the present embodiment, the number of the pressing portions 13 is three, and the number of the displacement actuators 2 is three.

The whole work flow is divided into 6 steps.

Step 1, applying voltage to a th cantilever actuating element 21a, a second cantilever actuating element 21b and a third cantilever actuating element 21c, wherein the th cantilever actuating element 21a, the second cantilever actuating element 21b and the third cantilever actuating element 21c are all piezoelectric cantilevers, as shown in fig. 7, in this state, the th cantilever actuating element 21a, the second cantilever actuating element 21b and the third cantilever actuating element 21c bend towards the microfluidic chip 1, and the th actuating part 22a, the second actuating part 22b and the third actuating part 22c respectively press the th pressing part 13a, the second pressing part 13b and the third pressing part 13c of the microchannel on the microfluidic chip 1, at this time, the whole chip is in a liquid non-flowing state.

Step 2, the voltage of th cantilever actuator 21a is 0, th cantilever actuator 21a is recovered (unbent), th cantilever actuator 21a no longer drives th actuator 22a to press th pressing part 13a, the liquid flow direction is the direction indicated by the arrow, in this state, the voltage applied to the second cantilever actuator 21b and the third cantilever actuator 21c is still unchanged.

Step 3, the voltage of the th cantilever actuator 21a and the second cantilever actuator 21b is 0, the th cantilever actuator 21a and the second cantilever actuator 21b are restored (unbent and unbent), the th cantilever actuator 21a no longer drives the th actuator 22a to press the th pressing part 13a, the second cantilever actuator 21b no longer drives the second actuator 22b to press the second pressing part 13b, and the fluid flow direction is the direction indicated by the arrow.

Step 4, applying voltage to the first cantilever actuator 21a and the third cantilever actuator 21c, bending the first cantilever actuator 21a and the third cantilever actuator 21c, the second cantilever actuator 21a driving the first actuator 22a to press the second pressing part 13a, and the third cantilever actuator 21c driving the third actuator 22c to press the third pressing part 13c, wherein the voltage of the second cantilever actuator 21b is 0, the second cantilever actuator 21b is restored (unbent), and the liquid flow direction is the direction indicated by the arrow.

Step 5, th cantilever actuator 21a is applied with voltage, th actuator 22a presses th pressing part 13a, in this state, the voltage of the second cantilever actuator 21b and the third cantilever actuator 21c is 0, the second cantilever actuator 21b and the third cantilever actuator 21c are restored to their original state (unbent), and the fluid flow direction is the direction indicated by the arrow.

Step 6, the th cantilever actuator 21a and the second cantilever actuator 21b are applied with voltage, the th cantilever actuator 21a and the second cantilever actuator 21b are bent, the th cantilever actuator 21a drives the th actuator 22a to press the th pressing part 13a, and the second cantilever actuator 21b drives the second actuator 22b to press the second pressing part 13b, in this state, the voltage of the third cantilever actuator 21c is 0, and the liquid flow direction is the direction indicated by the arrow.

By repeating the operations of step 1 to step 6, the fluid will be continuously transported from the input end 11 to the output end 12. Because both the two fluid channels of the microfluidic chip 1 can be used as the input end 11 and the output end 12 for fluid transportation, the fluid can be transported from the output end 12 to the input end 11 only by reversing the sequence of the steps, namely changing the sequence into the

steps

1, 6, 5, 4, 3 and 2. The fluid velocity in the microchannel can be determined by the applied voltage, the operating frequency of the displacement actuator 2, the width of the microchannel, and the height of the microchannel.

1 and 0 respectively indicate that the displacement actuator 2 is in an operating state (i.e. pressed down) and not in an operating state (i.e. not pressed down), and as can be seen in connection with fig. 7, the action in forward fluid transport is as follows:

initial state

1, 1, 1,

th

0, 1, 1, second 0, 0, 1, third 1, 0, 1, fourth 1, 0, 0, fifth 1, 1, 0,

initial state

1, 1, 1, 1.

The action in reverse fluid transport is as follows:

initial state

1, 1, 1,

th

1, 1, 0, second 1, 0, 0, third 1, 0, 1, fourth 0, 0, 1, fifth 0, 1,

initial state

1, 1, 1.

It will be appreciated that of the plurality of displacement actuators 2 are always in operation, i.e. the actuating member of the displacement actuator 2 presses against the squeezing portion 13 of the microchannel, so that the fluid is flow-restricted there, the size of the restriction determining the ability of the microchannel to avoid back flow of fluid.

As shown in fig. 4, the micro peristaltic pump is assembled, the micro peristaltic pump can transport liquid by operating the single chip, the liquid level change of the micro tube is observed by using a USB (Universal Serial Bus) CCD (Charge Coupled device), and data is recorded.

As shown in FIG. 8, in the th embodiment, the voltage across the cantilever actuator (i.e., the piezoelectric cantilever) is 157V, and the distance between two adjacent squeeze parts 13 on the micro-tube (the distance between the centers of two adjacent circular cavities) is 3mm, the voltage-flow dependence curves in the forward fluid transport and reverse fluid transport protocols are obtained at voltages of 1Hz, 10Hz, 30Hz, 80Hz and 100Hz, respectively, the flow rate in the forward fluid transport ranges from 0.489nL/s to 67.32nL/s, the flow rate in the reverse fluid transport ranges from 0.506nL/s to 70.686nL/s, and the error in the bi-directional transport is about 9%.

In a second embodiment, as shown in fig. 9, when the voltage across the cantilever actuator (i.e. the piezoelectric cantilever) is 157V and the distance between two adjacent squeeze parts 13 on the micro-pipe (the distance between the centers of two adjacent circular cavities) is 9mm, the voltage-flow rate relationship curve in the forward fluid transportation is shown at 1Hz, 10Hz, 20Hz, 30Hz and 40Hz respectively. The flow rates ranged from 0.08264nL/s to 5.20593nL/s, with the flow rates increasing linearly with increasing frequency in the range of 0-40 Hz.

Compared with the embodiments, the embodiment has a distance of 3mm between two adjacent squeezing portions 13, and a range of flow speed and flow rate is relatively large, and the second embodiment has a distance of 9mm between two adjacent squeezing portions 13, and a resolution of flow speed and flow rate is relatively high.

Referring to fig. 10, in the third embodiment, fig. 10 shows the relationship between the unidirectional flow rates of the cantilever actuator (i.e., the piezoelectric cantilever) at the operating frequencies of 80Hz and 100Hz, respectively, and the voltages at the two ends of the cantilever actuator (i.e., the piezoelectric cantilever) at the intervals between two adjacent squeeze parts 13 (the distance between the centers of two adjacent circular cavities) of 3mm, respectively, at the voltage of 60V, 90V, 120V, 150V, and 180V, respectively, as can be seen from the graph, the flow rates increase linearly with the increase of the voltage at the frequency of .

According to the micro-fluidic device provided by the embodiment of the invention, different parameters are selected, so that the frequency of the transported fluid can reach 1000Hz or above, and the micro-fluidic device is similar to a continuous pump.

It is possible to have several displacement actuators 2 located on two levels, respectively, and two adjacent displacement actuators 2 located on different levels, wherein several displacement actuators 2 may be arranged on the same displacement actuator fixtures 4, although several fixtures may be provided.

As shown in FIG. 1, in the present embodiment, the number of the displacement actuators 2 is three, and the middle displacement actuator 2 is separately disposed on horizontal planes, and the other two displacement actuators 2 are disposed on the same horizontal plane, which makes the three displacement actuators 2 respectively disposed on two horizontal planes, and the two adjacent displacement actuators 2 disposed on different horizontal planes.

It is also possible to have several displacement actuators 2 on the same level, wherein several displacement actuators 2 can be attached to the same displacement actuator attachment means 4, although several attachment means may be provided.

As shown in fig. 2, in the present embodiment, the number of the displacement actuators 2 is three, and the three displacement actuators 2 are all located on the same horizontal plane, by the above-mentioned parallel arrangement, the overall height requirement of the displacement actuator fixing device 4 is effectively reduced, so as to be adapted to the installation structure.

The micro-fluidic chip can also be added with other micro-fluidic chips which are not in direct contact with the displacement actuator 2 on the basis of the displacement actuator 2 and the micro-fluidic chip 1, so that the micro-fluidic chip can be integrated with the micro-fluidic chip 1 at , and the fluid flow in other micro-fluidic chips can be indirectly provided by the micro-fluidic chip 1, and the like, so that the micro-fluidic device can be accumulated in and is not in a protection range.

The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.

Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention.

Claims

The microfluidic device is characterized by comprising a displacement actuator (2) and a microfluidic chip (1), wherein the displacement actuator (2) and the microfluidic chip (1) are independent;

the micro-fluidic chip (1) is provided with a micro-pipeline, the micro-pipeline is provided with an input end (11) and an output end (12), and a squeezing part (13) is arranged between the input end (11) and the output end (12) of the micro-pipeline;

the displacement actuator (2) has an actuating member that presses the pressing portion (13);

the actuating component comprises a cantilever actuating piece (21) and an actuating part (22) arranged corresponding to the pressing part (13), and the actuating part (22) is positioned at the suspended end of the cantilever actuating piece (21).
2. The microfluidic device according to claim 1, wherein the microfluidic chip (1) is detachably arranged on a chip mounting site of the microfluidic device.
3. The microfluidic device according to claim 1, wherein the displacement actuator (2) is a piezoelectric actuator, an electromagnetic actuator or an electromechanical actuator.
4. The microfluidic device according to claim 1, wherein the microchannel is a polymeric flexible channel.
5. The microfluidic device of any of claims 1 to 4 to ,

the extrusion part (13) is of a cavity structure.
6. The microfluidic device according to claim 5, wherein a projected area of the cavity structure covers a projected area of the pressing end of the actuating member;

the projection direction of the projection area is the arrangement direction of the actuating component and the cavity structure.
7. The microfluidic device according to claim 1, wherein the displacement actuator (2) is plural in number, and the pressing portion (13) is plural and corresponds to the displacement actuator (2) .
8. The microfluidic device according to claim 7, wherein a plurality of the displacement actuators (2) are located on two horizontal planes, respectively; two adjacent displacement actuators (2) are located on different horizontal planes;

or a plurality of displacement actuators (2) are positioned on the same horizontal plane.
9. The microfluidic device according to claim 1, wherein the microfluidic device has a micro peristaltic pump function.