CN108593027A - A kind of new gas flow and concentration measuring apparatus - Google Patents

A kind of new gas flow and concentration measuring apparatus Download PDF

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Publication number
CN108593027A
CN108593027A CN201810836072.8A CN201810836072A CN108593027A CN 108593027 A CN108593027 A CN 108593027A CN 201810836072 A CN201810836072 A CN 201810836072A CN 108593027 A CN108593027 A CN 108593027A
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CN
China
Prior art keywords
reflecting prism
gas
condenser lens
laser
gas flow
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Pending
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CN201810836072.8A
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Chinese (zh)
Inventor
廖进昆
张大印
关元生
蔡淇智
王俊
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University of Electronic Science and Technology of China
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University of Electronic Science and Technology of China
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Priority to CN201810836072.8A priority Critical patent/CN108593027A/en
Publication of CN108593027A publication Critical patent/CN108593027A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/66Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by measuring frequency, phase shift or propagation time of electromagnetic or other waves, e.g. using ultrasonic flowmeters
    • G01F1/661Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by measuring frequency, phase shift or propagation time of electromagnetic or other waves, e.g. using ultrasonic flowmeters using light
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Electromagnetism (AREA)
  • Fluid Mechanics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

The invention discloses a kind of new gas flow and concentration measuring apparatus, including laser, laser collimator lens, spectroscope, the first reflecting prism, the second reflecting prism, third reflecting prism, the first condenser lens, gas pipeline, the second condenser lens, photon detector;The light path main line that laser is sent out is after laser collimator lens are transmitted to spectroscope, a part is transferred to third reflecting prism, another part is transferred to the first reflecting prism and the second reflecting prism successively, the light path come out from third reflecting prism and the second reflecting prism is mutually parallel, interference fringe area is formed in gas pipeline after the first condenser lens is turned back, the scattering light that gas molecule passes perpendicularly through the formation of interference fringe area is focused through the second condenser lens, and is detected by photon detector.The present invention can simultaneously measure the flow and concentration of gas, significantly improve detection efficiency, ensure the consistency of gas flow and Concentration Testing, and detection process is simple and convenient, can effectively reduce cost.

Description

A kind of new gas flow and concentration measuring apparatus
Technical field
The invention belongs to technical field of optical test, and in particular to a kind of new gas flow and concentration measuring apparatus.
Background technology
Gas flow is the important parameter in industrial detection, measures the industrial gas such as natural gas, steam, oil gas and coal gas The flow and concentration of fluid media (medium) have important Practical significance.Gas flow measurement instrument and concentration measuring apparatus chemical, The all trades and professions such as oil and gas transmission, the conveying of civilian aqueous vapor, which all have, to be extremely widely applied.
Common gas flow is in respect of ultrasonic flowmeter, differential pressure flowmeter, turbine flowmeter, spinner flowmeter and warm Formula flowmeter etc..Wherein differential pressure flowmeter is the widest gas dosing instrument of domestic application, but there are poor repeatability, essences The shortcomings of degree is not horizontal high, range is smaller, in-site installation requires height, the pressure loss is larger.Ultrasonic gas flowmeter is base In supersonic Doppler principle, non-cpntact measurement may be implemented, not will produce the pressure loss, measurement range is big, but anti-interference The shortcomings of energy force difference is easily interfered by fouling, pump and the mixed ultrasonic noise of other sound sources, and measurement accuracy is not high.Traditional measurement Method has been difficult to meet the new demand of modern pipeline gas detection development.
It is in the market independent to the detection of gas flow and concentration, detection mesh could be completed by generally requiring two instruments , it is a kind of to measure gas flow and the measuring instrument of concentration simultaneously, it can effectively improve detection efficiency, simplification measured Journey ensures the consistency of gas flow and concentration.
Invention content
It is an object of the invention to:For above-mentioned existing gas flow and concentration independent detection, that there are detection efficiencies is low, inspection The problem of survey process is complicated and can not ensure gas flow and concentration consistency, the present invention provide a kind of new gas flow And concentration measuring apparatus.
The technical solution adopted by the present invention is as follows:
A kind of new gas flow and concentration measuring apparatus, including laser, laser collimator lens, spectroscope, the first reflection Prism, the second reflecting prism, third reflecting prism, the first condenser lens, gas pipeline, the second condenser lens, photon detector; For the light path main line that the laser is sent out after laser collimator lens are transmitted to spectroscope, a part is transferred to third reflection rib Mirror, another part are transferred to the first reflecting prism and the second reflecting prism successively, from third reflecting prism and the second reflecting prism Light path out is mutually parallel, and gas pipeline is entered after the first condenser lens is turned back, and interference item is formed in gas pipeline Line area, the scattering light that gas molecule passes perpendicularly through the formation of interference fringe area are focused through the second condenser lens, and by photon detector Detection.
Further, the vertical range of the second reflecting prism and third reflecting prism to light path main line is equal.
Further, gas pipeline is saturating equipped with the first optical transmission window for light path entrance and second for light path outgoing Light window.
Further, the focus of the second condenser lens is located at interference fringe area.
Further, spectroscope is put together by two pieces of 45 ° of right angle prisms.
In conclusion by adopting the above-described technical solution, the beneficial effects of the invention are as follows:
1. the present invention is based on Laser Doppler speed principle and laser absorption spectroscopies simultaneously to the flow of gas and dense Degree measures, and significantly improves detection efficiency, ensures the consistency of gas flow and Concentration Testing, and detection process is simply square Just, the work for needing two instruments that can just finish in the past can be completed using an equipment, cost can be effectively reduced;
2. the present invention is based on Laser Doppler speed principle, good frequency response, rate accuracy are high, detection range is wide, highest It may be implemented the measurement of 100m/s, and the measurement of gas concentration is realized based on laser absorption spectroscopy, there is selectivity Non-cpntact measurement can be achieved in good and strong interference immunity advantage, the present invention, and stream field is noiseless.
Description of the drawings
Fig. 1 is schematic structural view of the invention;
Fig. 2 is the enlarged drawing in interference fringe area;
Fig. 3 is the light intensity curve that gas molecule passes through striate region to generate.
It is marked in figure:1- lasers, 2- laser collimator lens, 3- spectroscopes, the first reflecting prisms of 4-, 5- second reflect rib Mirror, 6- third reflecting prisms, the first condenser lenses of 7-, 8- gas pipelines, the first optical transmission windows of 9-, 10- gas molecules, 11- are dry Relate to striate region, the second optical transmission windows of 12-, the second condenser lenses of 13-, 14- photon detectors.
Specific implementation mode
All features disclosed in this specification can be with any other than mutually exclusive feature and/or step Mode combines.
It elaborates to the present invention with reference to Fig. 1-Fig. 3.
Embodiment 1
A kind of new gas flow and concentration measuring apparatus, including laser 1, laser collimator lens 2, spectroscope 3, first are anti- Penetrate prism 4, the second reflecting prism 5, third reflecting prism 6, the first condenser lens 7, gas pipeline 8, the second condenser lens 13, light Sub- detector 14;The light path main line that the laser 1 is sent out after laser collimator lens 2 are transmitted to spectroscope 3, transmit by a part To third reflecting prism 6, another part is transferred to the first reflecting prism 4 and the second reflecting prism 5 successively, from third reflecting prism 6 and second the light path that comes out of reflecting prism 5 be mutually parallel, gas pipeline 8 is entered after the first condenser lens 7 is turned back, and in gas Interference fringe area 11 is formed in body pipeline 8, the scattering light that gas molecule 10 passes perpendicularly through the formation of interference fringe area 11 is poly- through second Focus lens 13 focus, and are detected by photon detector 14.
The present invention carries out the measurement of gas velocity using Laser Doppler speed principle, position in the face in order to obtain molecule It moves, illuminates fluid with two-beam, it can be understood as another type of interferometer.As shown in Figure 1, the light sent out by laser 1 Shu Shouxian is collimated by laser collimator lens 2, can laser beam compression to target size be divided into two parts after reaching spectroscope 3, and one Part is reflected through third reflecting prism 6, and another part is reflected through the first reflecting prism 4 and the second reflecting prism 5 successively, after reflection Two parts light beam be mutually parallel, two parts light beam being mutually parallel after the first condenser lens 7 is turned back enter gas pipeline 8, And interference fringe area 11 is formed in gas pipeline 8, gas molecule 10 passes perpendicularly through the scattering light warp of the formation of interference fringe area 11 Second condenser lens 13 is collected, and is detected by photon detector 14.
The spacing of interfering beam is:D=λ/2sin θ
As shown in Fig. 2, when gas molecule 10 passes perpendicularly through interference fringe area 11 with speed V, it can be by the alternate striped of light and shade It illuminates, bright dark cycle T=D/V.The forward scattering light of gas molecule 10 can be collected by the second condenser lens 13, and focus on light The receiving plane of sub- detector 14 handles output electric signal by subsequent conditioning circuit, includes velocity information in electric signal, dry to pass through The frequency of oscillation of striate region generation is related to indicate:fD=V/D=2sin θ V/ λ, as shown in figure 3, measuring the oscillation of signal curve After frequency, the speed of gas molecule can be calculated.The measurement of frequency of oscillation directly influences the testing result of speed, using letter Number counting circuit, can complete the measurement of 1Hz-100MHz frequency ranges, can be in order to obtain more accurate velocity amplitude It is detected using the frequency meter with standard frequency.
The present invention carries out the measurement of gas concentration using laser absorption spectral technology, and gas has different absorption spectrums, For specific optical maser wavelength, the transmitance of the higher laser of concentration of gas will be lower, we detect according to this relationship The concentration information of gas.When laser passes through gas molecule, due to the radius r < < λ of gas molecule, it may occur that Rayleigh scattering, root According to scattering function it is found that forward scattering is with the luminous power of back scattering be as.Absorption spectroscopy techniques refer to gas molecule tool There is specific absorption line, there is stronger absorption, the luminous power of transmission will reduce special wavelength, in conjunction with The derivation formula of Lambert-Beer laws:
Wherein, t is transmitance, and I is output intensity, I0For incident intensity, α is the absorption coefficient of under test gas, and C is to be measured The concentration of gas, L are length of the light Jing Guo under test gas.
The external envelope of signal curve is the Gaussian Profile of light beam in Fig. 3, is the duplication of interfering beam space profiles, that is, transmits The output intensity of light beam, control transmitting light beam incident intensity it is constant, in conjunction with Lambert-Beer laws derivation formula (1) just The concentration of gas molecule can be calculated.
In order to ensure the measurement effect of gas flow and concentration, high-power, narrow linewidth laser may be used, to obtain More reliable signal curve is obtained, measurement accuracy and measurement range are further increased.
Embodiment 2
Based on embodiment 1, the second reflecting prism 5 and third reflecting prism 6 are equal to the vertical range of light path main line, i.e., and the The optical path length of one the 4 to the second reflecting prism of reflecting prism 5 is equal to the optical path that spectroscope 3 arrives third reflecting prism 6 Length, which can make two parts light beam identical from the optical path length of the 3 to the first condenser lens of spectroscope 7, to make The center for obtaining interference fringe area 11 is located on light path main line, improves the visibility of interference fringe, and photon detector 14 is facilitated to receive.
Embodiment 3
Based on embodiment 1, gas pipeline 8 is equipped with for the first optical transmission window 9 of light path entrance and for light path outgoing Second optical transmission window 12.
Embodiment 4
Based on embodiment 1, the focus of the second condenser lens 13 is located at interference fringe area 11.Second condenser lens 13 of the invention Effect be collect scattering light, when its be collected into generate interference two beam laser when, laser only be used as bias light, do not interfere with spy It surveys as a result, therefore on the one hand the light intensity curve that can still influence to scatter light if background light intensity is excessive makes the second condenser lens 13 Focus be located at interference fringe area 11, can receive the scattering light of gas molecule to the greatest extent, improve detection performance, another party Face ensures that the position of the second condenser lens 13 will not be too close to the second optical transmission window 12, you can avoid laser direct irradiation the Two condenser lenses 13, would not also be collected into laser.
Embodiment 5
Based on embodiment 1, spectroscope 3 is put together by two pieces of 45 ° of right angle prisms, can to the inclined-plane of right angle prism into Row processing, makes it have semi-transparent semi-reflecting characteristic.
It is the embodiment of the present invention as described above.The present invention is not limited to the above-described embodiments, anyone should learn that The structure change made under the inspiration of the present invention, the technical schemes that are same or similar to the present invention each fall within this Within the protection domain of invention.

Claims (5)

1. a kind of new gas flow and concentration measuring apparatus, which is characterized in that including laser (1), laser collimator lens (2), Spectroscope (3), the first reflecting prism (4), the second reflecting prism (5), third reflecting prism (6), the first condenser lens (7), gas Body pipeline (8), the second condenser lens (13), photon detector (14);
The light path main line that the laser (1) sends out after laser collimator lens (2) are transmitted to spectroscope (3), transmit by a part To third reflecting prism (6), another part is transferred to the first reflecting prism (4) and the second reflecting prism (5) successively, anti-from third It penetrates the light path that prism (6) and the second reflecting prism (5) come out to be mutually parallel, gas is entered after the first condenser lens (7) is turned back Pipeline (8), and interference fringe area (11) are formed in gas pipeline (8), gas molecule (10) passes perpendicularly through interference fringe area (11) the scattering light formed is focused through the second condenser lens (13), and is detected by photon detector (14).
2. a kind of new gas flow according to claim 1 and concentration measuring apparatus, which is characterized in that second reflection The vertical range of prism (5) and third reflecting prism (6) to light path main line is equal.
3. a kind of new gas flow according to claim 1 and concentration measuring apparatus, which is characterized in that the gas pipeline (8) the first optical transmission window (9) for light path entrance and the second optical transmission window (12) for light path outgoing are equipped with.
4. a kind of new gas flow according to claim 1 and concentration measuring apparatus, which is characterized in that described second focuses The focus of lens (13) is located at interference fringe area (11).
5. a kind of new gas flow according to claim 1 and concentration measuring apparatus, which is characterized in that the spectroscope (3) it is put together by two pieces of 45 ° of right angle prisms.
CN201810836072.8A 2018-07-26 2018-07-26 A kind of new gas flow and concentration measuring apparatus Pending CN108593027A (en)

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CN201810836072.8A CN108593027A (en) 2018-07-26 2018-07-26 A kind of new gas flow and concentration measuring apparatus

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Application Number Priority Date Filing Date Title
CN201810836072.8A CN108593027A (en) 2018-07-26 2018-07-26 A kind of new gas flow and concentration measuring apparatus

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109580500A (en) * 2018-11-05 2019-04-05 扬州市管件厂有限公司 High frequency wide cut laser scanning intelligent detection device and method
JPWO2021060364A1 (en) * 2019-09-27 2021-04-01

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CN1595170A (en) * 2004-06-25 2005-03-16 清华大学 Self-mixed intervention Doppler velometer based on two-frequency laser
CN1844847A (en) * 2006-05-18 2006-10-11 清华大学 System for measuring hard disk magnetic head flight height and common-path dual-frequency laser interference measuring method
CN103852446A (en) * 2014-03-31 2014-06-11 中国医学科学院生物医学工程研究所 Cavity ring down spectroscopy (CRDS) technique based blood component recognizing and analyzing instrument

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CN1163403A (en) * 1996-04-22 1997-10-29 华北工学院 Impact correction technology for high magnitude accelerometer and its device
CN1279394A (en) * 2000-08-11 2001-01-10 清华大学 In-line monitor of particles discharge speed and its signal processing method
CN1595170A (en) * 2004-06-25 2005-03-16 清华大学 Self-mixed intervention Doppler velometer based on two-frequency laser
CN1844847A (en) * 2006-05-18 2006-10-11 清华大学 System for measuring hard disk magnetic head flight height and common-path dual-frequency laser interference measuring method
CN103852446A (en) * 2014-03-31 2014-06-11 中国医学科学院生物医学工程研究所 Cavity ring down spectroscopy (CRDS) technique based blood component recognizing and analyzing instrument

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109580500A (en) * 2018-11-05 2019-04-05 扬州市管件厂有限公司 High frequency wide cut laser scanning intelligent detection device and method
JPWO2021060364A1 (en) * 2019-09-27 2021-04-01
WO2021060364A1 (en) * 2019-09-27 2021-04-01 富士フイルム株式会社 Flow rate measurement device
JP7355836B2 (en) 2019-09-27 2023-10-03 富士フイルム株式会社 flow measuring device

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Application publication date: 20180928