CN108593018A - A kind of vacuum pump pumping system for measuring quantity, vacuum pump and vacuum system - Google Patents
A kind of vacuum pump pumping system for measuring quantity, vacuum pump and vacuum system Download PDFInfo
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- CN108593018A CN108593018A CN201810570346.3A CN201810570346A CN108593018A CN 108593018 A CN108593018 A CN 108593018A CN 201810570346 A CN201810570346 A CN 201810570346A CN 108593018 A CN108593018 A CN 108593018A
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- 238000005086 pumping Methods 0.000 title claims abstract description 19
- 238000005259 measurement Methods 0.000 claims abstract description 27
- 238000003780 insertion Methods 0.000 claims description 3
- 230000037431 insertion Effects 0.000 claims description 3
- 230000000903 blocking effect Effects 0.000 abstract description 6
- 238000010586 diagram Methods 0.000 description 11
- 238000000034 method Methods 0.000 description 11
- 238000009434 installation Methods 0.000 description 6
- 238000012423 maintenance Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000012545 processing Methods 0.000 description 5
- 238000000691 measurement method Methods 0.000 description 3
- 230000001737 promoting effect Effects 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000005553 drilling Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- FWQHNLCNFPYBCA-UHFFFAOYSA-N fluoran Chemical compound C12=CC=CC=C2OC2=CC=CC=C2C11OC(=O)C2=CC=CC=C21 FWQHNLCNFPYBCA-UHFFFAOYSA-N 0.000 description 1
- 238000011545 laboratory measurement Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000003584 silencer Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
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- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
Abstract
This application provides a kind of vacuum pump pumping system for measuring quantity, vacuum pump and vacuum system, being used for can live conveniently and accurately Measuring Vacuum rate of air sucked in required.Vacuum pump provided by the present application is evacuated system for measuring quantity, including the discharge duct of vacuum pump, measurement pipeline and gas flowmeter；Pipeline is measured to draw from discharge duct, discharge duct is equipped with the first valve after the interface position for measuring pipeline, it measures pipeline and is equipped with the second valve, it measures pipeline and is equipped with gas flowmeter after the second valve, pipeline is measured by being drawn on the discharge duct of vacuum pump, and adjustment discharge duct on the first valve and measure pipeline on the second valve on off operating mode, measuring measurement of the pipeline by gas flowmeter progress vacuum pump rate of air sucked in required, the setting not only can guarantee the normal exhaust of vacuum pump, avoid risk of the discharge duct resistance greatly with blocking in the prior art, bring high certainty of measurement, manual operation is convenient, the low advantage of economic cost.
Description
Technical field
This application involves a kind of Vacuum Field more particularly to vacuum pump pumping system for measuring quantity, vacuum pump and vacuum systems
System.
Background technology
Steam turbine is one of the capital equipment in power production process, must assure that certain vacuum degree when running.Vapour
The vacuum degree decline of turbine can cause：(1) exhaust temperature increases, and low pressure (LP) cylinder expansion is uneven to be easy to happen vibration, is moved when serious
Static friction；(2) delivery temperature increases, and the heat that cooled water is taken away increases, and cold source energy increase operation is uneconomical；(3) it is vented
Temperature increases, and condenser cooling water pipe is swollen, and mouth is easy relaxation leak, and tightness is destroyed；(4) it is to maintain the constant need of unit load
Increase air inflow, the possible overload of exhaust stage blade, impulse turbine axial displacement increases；(5) the ratio volume of steam reduces, stream
Speed reduce, end what be easy to happen blade flutter to blade endanger it is very big.Therefore, steam turbine vacuum degree decline seriously affects its peace
Entirely, economical operation.
Vacuum pump and complete unit are by the incondensable gas that constantly leaks into different approaches out of steam turbine and condenser
Steam turbine vacuum is established and is maintained in extraction.Vacuum pump rate of air sucked in required can directly react the vacuum degree of unit, therefore scene need to measure vacuum
Pumping tolerance.At present both at home and abroad only to made in laboratory measurement vacuum pump rate of air sucked in required clearly stipulate that using fixed orifice plate or
Measuring jet, but such measuring device can not use at the scene.
And live vacuum pump pumping measuring method measures on air-extractor export pipeline mostly, can be divided into direct measurement
Method and the indirect method of measurement.For the direct method of measurement because vacuum pump air velocity is small, measurement accuracy is very low.Indirect measurement method fills measurement
It sets on the pipe with small pipe diameter discharge duct of vacuum pump, caliber, which becomes smaller, certainly will increase the resistance of ducting, be easy to make in moisture trap
Air cannot normally be discharged, air-extractor performance and condenser pressure are directly affected when serious.In addition, existing flowmeter is because setting
Defect on meter is easy to happen blocking.
Therefore, existing vacuum pump rate of air sucked in required measurement method defect as the above-mentioned, it would be highly desirable to solve.
Invention content
This application provides a kind of vacuum pump pumping system for measuring quantity, vacuum pump and vacuum systems, and being used for can scene side
Just and vacuum pump rate of air sucked in required is accurately measured.
For the application in a first aspect, providing a kind of vacuum pump pumping system for measuring quantity, vacuum pump is evacuated system for measuring quantity packet
It includes the discharge duct of vacuum pump, measure pipeline and gas flowmeter；
Pipeline is measured to draw from discharge duct, discharge duct is equipped with the first valve after the interface position for measuring pipeline,
It measures pipeline and is equipped with the second valve, measure pipeline and be equipped with gas flowmeter after the second valve.
In conjunction with the application in a first aspect, in the application first aspect the first possible realization method, gas flowmeter
For Verabar.
In conjunction with the first possible realization method of the application first aspect, in second of possible reality of the application first aspect
In existing mode, if measuring, pipeline is horizontally disposed, and the first direction of Verabar tilts down 10 degree to 90 degree, first direction
For the lead direction of the sensor of Verabar；Or,
If measuring pipeline to be vertically arranged, first direction tilts down 0 degree to 5 degree.
In conjunction with the first possible realization method of the application first aspect, in the third possible reality of the application first aspect
In existing mode, 2/3 of insertion depth not less than the caliber for measuring pipeline of the sensor of Verabar.
In conjunction with the first possible realization method of the application first aspect, in the 4th kind of possible reality of the application first aspect
In existing mode, Verabar includes pressure difference transmitter, and the setting height of pressure difference transmitter is higher than the biography of Verabar
Sensor.
In conjunction with the application in a first aspect, in the 5th kind of possible realization method of the application first aspect, the second valve with
The distance of interface position is 0.5m, and the second valve is 1m at a distance from gas flowmeter.
In conjunction with the application in a first aspect, in the 6th kind of possible realization method of the application first aspect, discharge duct is set
There is tee pipe fitting, measures pipeline and drawn from discharge duct by tee pipe fitting.
In conjunction with the application in a first aspect, in the 7th kind of possible realization method of the application first aspect, the first valve with
And second valve be all shut-off valve.
The application provides a kind of vacuum pump in second aspect, the vacuum pump include above-mentioned the application first aspect or
Vacuum pump described in any possible realization method of first aspect is evacuated system for measuring quantity.
The application provides a kind of vacuum system in the third aspect, and the vacuum system includes above-mentioned the application second aspect
The vacuum pump.
As can be seen from the above technical solutions, the embodiment of the present application has the following advantages：
Vacuum pump provided by the present application is evacuated system for measuring quantity, by drawing measurement pipe on the discharge duct of vacuum pump
Road, and adjustment discharge duct on the first valve and measure pipeline on the second valve on off operating mode, measure pipeline by gas
Flowmeter body carries out the measurement of vacuum pump rate of air sucked in required, which not only can guarantee the normal exhaust of vacuum pump, avoid the prior art
Risk of the middle discharge duct resistance greatly with blocking brings the advantage that high certainty of measurement, manual operation are convenient, economic cost is low, also
It can bring that crushing is low, maintenance cost goes to zero, facilitates the advantages of online installation and maintenance, in production practices at the scene,
Vacuum pump pumping system for measuring quantity provided by the present application has higher application value and promotional value.
Description of the drawings
Fig. 1 is a kind of embodiment schematic diagram that the application intermediate pump is evacuated system for measuring quantity；
Fig. 2 is a kind of embodiment schematic diagram of Verabar in the application；
Fig. 3 is a kind of assembling schematic diagram of Verabar in the application；
Fig. 4 is another assembling schematic diagram of Verabar in the application；
Fig. 5 is another assembling schematic diagram of Verabar in the application；
Fig. 6 is another assembling schematic diagram of Verabar in the application.
Specific implementation mode
This application provides a kind of vacuum pump pumping system for measuring quantity, vacuum pump and vacuum systems, and being used for can scene side
Just and vacuum pump rate of air sucked in required is accurately measured.
First, a kind of embodiment schematic diagram of the vacuum pump pumping system for measuring quantity shown refering to fig. 1, within the system,
Discharge duct 110, measurement pipeline 120 including vacuum pump 100 and gas flowmeter 130.
It is appreciated that discharge duct 110 is for being discharged the air being discharged when vacuum pump 100 vacuumizes, discharge duct 110 can
To be that vacuum pump 100 shell itself extends the pipeline to be formed, or can also be in addition pipeline that vacuum pump 100 configures, to match
Vacuum pump 100 is closed under different application scene, staff can configure different discharge ducts 110, and easy to exhaust pipeline 100 exists
The laying at scene.
It measures pipeline 120 to draw from discharge duct 100, discharge duct 110 is after the interface position S for measuring pipeline 120
Equipped with the first valve 111, the first valve 111 is used to control discharge duct 100 after the interface position S for measuring pipeline 120
On off operating mode measures pipeline 120 and is equipped with the second valve 121, and the second valve 121 measures pipeline 120 in the second valve for controlling
On off operating mode after 121 measures pipeline 120 and is additionally provided with gas flowmeter 130 after the second valve 121.
In this application, the normal operating conditions of vacuum pump pumping system for measuring quantity can be divided into following two stages：
(1), measuring phases
In this stage, the first valve 111 is off state, and the second valve 121 is in the conduction state, at this time vacuum pump
The gas of 100 discharges is discharged through measuring pipeline 120, and during this, gas flowmeter 130 can measure gas flow, really
Determine the design parameter of vacuum pump rate of air sucked in required, and the vacuum pump rate of air sucked in required is exported to relevant processing equipment；
(2), the normal exhaust stage
In this stage, the first valve 111 is in the conduction state, and the second valve 121 is off state, at this time vacuum pump
The gas of 100 discharges is normally discharged through discharge duct 110.Discharge duct 110 can also the equipment such as external silencer, by discharge duct
The gas of 110 discharges carries out the processing such as further noise reduction.
From the foregoing, it will be observed that vacuum pump provided by the present application is evacuated system for measuring quantity, pass through the exhaust pipe in vacuum pump 100
It is drawn on road 110 and measures pipeline 120, and adjusted the first valve 111 on discharge duct 110 and measure second on pipeline 120
The on off operating mode of valve 121 is measuring measurement of the pipeline 120 by the progress vacuum pump rate of air sucked in required of gas flowmeter 130, and the setting is not
The normal exhaust that only can guarantee vacuum pump 100 avoids risk of 110 resistance of discharge duct greatly with blocking in the prior art, brings
The advantage that high certainty of measurement, manual operation are convenient, economic cost is low, can also bring that crushing is low, maintenance cost goes to zero, conveniently exists
The advantages of line installation and maintenance, to which in production practices at the scene, vacuum pump pumping system for measuring quantity provided by the present application has
There are higher application value and promotional value.
To be even further appreciated that the application, will continue to introduce a variety of optimization sides of the application in practical applications further below
Formula.
For example, in practical applications, target type meter, V cone flow meters, vortex street specifically may be used in gas flowmeter 130
The different types of gas flowmeter such as flowmeter, orifice flowmeter or Verabar.
Wherein, the following the description of the application is by taking Verabar as an example, and Verabar is a kind of differential pressure type, rate
The gas flowmeter of average formula, by sensor, generated differential pressure carries out flow measurement in the gas for measuring pipeline 120, can
Highly stable, pulse free differential pressure signal is exported, vacuum pump rate of air sucked in required is determined according to differential pressure signal, is had relatively stable and accurate
Spend higher advantage.
It is specific see Fig. 2 shows Verabar a kind of embodiment schematic diagram, sensor can generate accurately
Pressure distribution, fixed gas burble point；Low pressure pressure port before both sides, gas burble point after sensor side can give birth to
At stable differential pressure signal, and it is effectively anti-blocking and long-term high-precision can be kept.
The gas that vacuum pump 100 is discharged by measuring pipeline 120 generates one in the sensor front of Verabar
High pressure distributed area, the pressure in high pressure distributed area are slightly above the static pressure for measuring pipeline 120.According to Bernoulli equation, gas flows through biography
Speed is accelerated when sensor, generates a low pressure distributed area at sensor rear portion, the pressure in low pressure distributed area is slightly below the quiet of pipeline
Pressure.Sensor has in high and low pressure distributed area by certain regularly arranged multipair (generally three pairs) pressure port, measures gas respectively
Total pressure, P1 and P2 introduce differential pressure transmitter, measure differential pressure △ by including average speed pressure P1 and static pressure P2 respectively
P=P1-P2, △ P are used to indicate the size of the average speed of gas, and the flow of gas can be extrapolated with this, so that it is determined that vacuum
Pumping tolerance.Wherein, covers disposed on sensor sets multipair pressure port, its high-precision stablized of Verabar can effectively be kept to survey
Dose-effect fruit.
Further, in conjunction with a kind of assembling schematic diagram of Fig. 3 and Fig. 4 Verabar being shown respectively, Verabar stream
The mounting means of gauge can be as following：
(1), installation site and direction are determined according to the installation requirement of Verabar and measurement medium type first；
(2), by tube chamber welds with base to the designated position for measuring pipeline 120；
(3), by rotating the handle of online drilling tool, trepanning head is made to pierce the tube wall for measuring pipeline 120, and opened
Hole makes trepanning head drill through the tube wall for measuring pipeline 120 completely；
(5), it reversely rotates handle and withdraws trepanning head, remove online drilling tool；
(6), Verabar is connected, the sensor fluoran stream surface of Verabar is corrected, rotation drive rod makes prestige
The sensor of not adept flowmeter is inserted into the requirement depth for measuring pipeline 120, locks each screw, nut.
Further, Verabar can connect display, and directly vacuum pump pumping is shown to user by display
The measurement result of amount so that user can intuitively be known, and the vacuum of steam turbine is judged in combination with operating experience and historical data
State manually adjusts the operation power of vacuum pump 100, or carries out relevant processing；
Alternatively, Verabar can also connect relevant processing equipment, and send the measurement result of vacuum pump rate of air sucked in required,
Such as can be transmitted to can be in vacuum system programmable logic controller (PLC) (programmable logic controller, PLC)
Program control system, PLC program control system can be according to the measurement result of vacuum pump rate of air sucked in required, adjust automatically vacuum pumps 100
Operation power.
Further, with the laying of vacuum pump 100 and/or discharge duct 110 environment at the scene, pipeline 120 is measured also
Two kinds of facilities can be divided into：
(1), it is horizontally disposed with
If it is horizontally disposed to measure pipeline 120, another assembling schematic diagram of Verabar as shown in Figure 5, power
The first direction of bar flowmeter tilts down 10 degree to 90 degree, wherein first direction is drawing for the sensor of Verabar
Outgoing direction.
(2), it is vertically arranged
If measuring pipeline 120 to be vertically arranged, another assembling schematic diagram of Verabar as shown in Figure 6, power
The first direction of bar flowmeter tilts down 0 degree to 5 degree.
Pass through above-mentioned setting so that if the moisture slightly that the gas that vacuum pump 100 is discharged contains is in sensor surface
It after upper accumulation, can slide downwards, be detached from sensor, thus prevent the moisture in gas to influence the work of sensor, further
Ensure the accuracy that Verabar measures.
Further, 2/3 of the insertion depth of the sensor of Verabar not less than the caliber for measuring pipeline 120,
To ensure the sensor contact surface larger with the gas measured in pipeline 120, the total pressure to measure gas can effecting reaction
The feature of gas ensures the accuracy that Verabar measures.
Further, Verabar includes pressure difference transmitter, and the setting height of pressure difference transmitter is higher than Verabar stream
The sensor of gauge, to ensure the accuracy of pressure difference signal, to be further ensured that the accuracy of Verabar measurement.
Further, the second valve 121 is 0.5m, the second valve 121 and gas flowmeter at a distance from interface position S
130 distance is 1m, under distance setting, may make the gas that vacuum pump 100 is discharged in the first valve 111 and the second valve
When door 121 switches on off operating mode, the case where can gently flowing, be less prone to blocking, ensure the normal of 100 exhaust work of vacuum pump
Operation.
Further, measure pipeline 120 not only can directly lead out discharge duct 110, discharge duct by modes such as welding
110 can also be equipped with the connecting components such as tee pipe fitting, measure pipeline 120 by connecting components such as tee pipe fittings from discharge duct 110
It draws, by the setting of connecting component, is not only easy to measure the installation of pipeline 120, there is higher stability, and be also convenient for tearing open
Unload measure pipeline 120, easy to exhaust pipeline 110 and/or measure pipeline 120 replacement or unpick and wash.
Further, the first valve 111 and the second valve 121 can be the types such as gate valve, shut-off valve, ball valve, butterfly valve
Valve, it is preferred that use shut-off valve, shut-off valve have frictional force is small, durable, Lift less, easily manufacture, easy to maintenance
The advantages that, and it is applicable not only to mesolow, it is also applied for high pressure.
It is appreciated that the application also provides a kind of vacuum pump 100, vacuum pump 100 includes that the vacuum pump of above-mentioned introduction is evacuated
System for measuring quantity.Vacuum pump 100 can be divided into gas transfer pump, gas trapping pump, specifically, may be used also according to the difference of type
Continued to segment different type according to different application environment and principle, not limited herein specifically.
In addition, the application also provides a kind of vacuum system, vacuum system includes the vacuum pump of above-mentioned introduction, and vacuum system is also
Including the period such as PLC program control system, air accumulator, vacuum pipe, vacuum valve and/or equipment, in PLC program control system
Control under, stable vacuum source is provided, meets the needs of production, can be widely used in electronic semi-conductor's industry, photoelectricity backlight
The industries such as module or mechanical processing.
In conclusion vacuum pump pumping system for measuring quantity, vacuum pump and vacuum system provided by the present application, by true
It is drawn on the discharge duct 110 of sky pump 100 and measures pipeline 120, and adjusted the first valve 111 on discharge duct 110 and survey
The on off operating mode of second valve 121 on buret road 120 carries out vacuum pump rate of air sucked in required measuring pipeline 120 by gas flowmeter 130
Measurement, which not only can guarantee the normal exhaust of vacuum pump 100, avoid in the prior art 110 resistance of discharge duct greatly and
The risk of blocking brings the advantage that high certainty of measurement, manual operation are convenient, economic cost is low, can also bring crushing is low, safeguard at
Originally it goes to zero, facilitate the advantages of online installation and maintenance, in production practices at the scene, vacuum pumping provided by the present application
Tolerance measuring system has higher application value and promotional value.
The above, above example are only to illustrate the technical solution of the application, rather than its limitations；Although with reference to before
Embodiment is stated the application is described in detail, it will be understood by those of ordinary skill in the art that：It still can be to preceding
The technical solution recorded in each embodiment is stated to modify or equivalent replacement of some of the technical features；And these
Modification or replacement, the spirit and scope of each embodiment technical solution of the application that it does not separate the essence of the corresponding technical solution.
Claims (10)
1. a kind of vacuum pump is evacuated system for measuring quantity, which is characterized in that the vacuum pump pumping system for measuring quantity includes vacuum pump
Discharge duct, measure pipeline and gas flowmeter；
The measurement pipeline is drawn from the discharge duct, and the discharge duct is set after the interface position for measuring pipeline
There are the first valve, the measurement pipeline to be equipped with the second valve, the measurement pipeline is equipped with the gas after second valve
Flowmeter body.
2. vacuum pump according to claim 1 is evacuated system for measuring quantity, which is characterized in that the gas flow is calculated as power
Bar flowmeter.
3. vacuum pump according to claim 2 is evacuated system for measuring quantity, which is characterized in that if the measurement pipe level is set
It sets, the first direction of the Verabar tilts down 10 degree to 90 degree, and the first direction is the Verabar flow
The lead direction of the sensor of meter；Or,
If the measurement pipeline is vertically arranged, the first direction tilts down 0 degree to 5 degree.
4. vacuum pump according to claim 2 is evacuated system for measuring quantity, which is characterized in that the biography of the Verabar
2/3 of the insertion depth of sensor not less than the caliber for measuring pipeline.
5. vacuum pump according to claim 2 is evacuated system for measuring quantity, which is characterized in that the Verabar includes
Pressure difference transmitter, the setting height of the pressure difference transmitter are higher than the sensor of the Verabar.
6. vacuum pump according to claim 1 is evacuated system for measuring quantity, which is characterized in that second valve connects with described
The distance of mouth position is 0.5m, and second valve is 1m at a distance from the gas flowmeter.
7. vacuum pump according to claim 1 is evacuated system for measuring quantity, which is characterized in that the discharge duct is equipped with threeway
Pipe fitting, the measurement pipeline are drawn by the tee pipe fitting from the discharge duct.
8. vacuum pump according to claim 1 is evacuated system for measuring quantity, which is characterized in that first valve and described
Second valve is all shut-off valve.
9. a kind of vacuum pump, which is characterized in that the vacuum pump includes vacuum pumping described in any item of the claim 1 to 8
Tolerance measuring system.
10. a kind of vacuum system, which is characterized in that the vacuum system includes the vacuum pump described in claim 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810570346.3A CN108593018A (en) | 2018-06-05 | 2018-06-05 | A kind of vacuum pump pumping system for measuring quantity, vacuum pump and vacuum system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810570346.3A CN108593018A (en) | 2018-06-05 | 2018-06-05 | A kind of vacuum pump pumping system for measuring quantity, vacuum pump and vacuum system |
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| CN108593018A true CN108593018A (en) | 2018-09-28 |
Family
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115382856A (en) * | 2022-10-25 | 2022-11-25 | 江苏容正医药科技有限公司 | Plasma ultra-clean processing method, system, device and medium |
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