CN108562760A - Disjunctor Two Dimensional Rotating sample driver - Google Patents
Disjunctor Two Dimensional Rotating sample driver Download PDFInfo
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- CN108562760A CN108562760A CN201810148439.7A CN201810148439A CN108562760A CN 108562760 A CN108562760 A CN 108562760A CN 201810148439 A CN201810148439 A CN 201810148439A CN 108562760 A CN108562760 A CN 108562760A
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- connection
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- straight line
- shell
- steel ball
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
- G01N35/10—Devices for transferring samples or any liquids to, in, or from, the analysis apparatus, e.g. suction devices, injection devices
- G01N35/1081—Devices for transferring samples or any liquids to, in, or from, the analysis apparatus, e.g. suction devices, injection devices characterised by the means for relatively moving the transfer device and the containers in an horizontal plane
- G01N35/109—Devices for transferring samples or any liquids to, in, or from, the analysis apparatus, e.g. suction devices, injection devices characterised by the means for relatively moving the transfer device and the containers in an horizontal plane with two horizontal degrees of freedom
Abstract
A kind of disjunctor Two Dimensional Rotating sample driver, belongs to the multidimensional drive area of ultrahigh vacuum equipment.It is connected with each other with axial moving mechanism including circumferentially rotating mechanism；Rotation dial plate is connect with roll-shell, fixed ring, and fixed ring is connect with shell bearing block, and shell bearing block is connect with support tube, and support tube is connect with collimation cylinder, vacuum flange, and guide holder rotation in rear end drives intermediate mandrel rotation；Straight line handle is connected with linear screw, and linear screw is connect with straight line shell, driving axis connection, drive shaft with steel ball, and steel ball rolls in rotary core shaft, and mandrel is connect with axis connection, extending shaft and guide-localization axis connection, steel ball is extended with straight line mandril.The present invention uses steel ball, the flexible connections such as bellows, and eliminates backlass, it can be achieved that the axially driving and rotation of driven member drives using spring, and driving precision is high, and inside can be used for strong magnetic environment or non-magnetic environment, maneuverability is good without magnetite.
Description
Technical field
The invention belongs to the multidimensional drive area of ultrahigh vacuum equipment, more particularly to a kind of disjunctor Two Dimensional Rotating sample driving
Device.
Background technology
Ultra high vacuum technique has been Surface Science, semiconductor application, high-energy particle accelerator, fusion research dress at present
Set the technology indispensable with space development field.Using ultra high vacuum technique, need to carry out in ultra-high vacuum system.
Ultra-high vacuum system is mainly by vacuum cavity, vacuum pump, vacuum meter, vacuum valve, various movement inducting devices, connection
Conduit and electric control system are constituted.The use of various ultrahigh vacuum motion drives, realizes to the sample in vacuum environment
Product are manipulated, while reflective mirror or light sensitive diode for making the specimen holder leading portion installation of sample and fixed sample etc. is according to experiment
The intention of person is transmitted, is swung.
Currently, the type of relatively common driving device has one-dimensional linear drives, one-dimensional rotation driving and two dimension in the market
Driving.In one-dimensional linear drives, more commonly used basic driving device has linear pushing driver, spiral linear drives
Device, differential head linear actuator, hollow linear driver；In one-dimensional rotation driving, more commonly used basic driving device has
Bellows rotates inducting device, magnetic coupling rotation inducting device, difference and takes out rotation inducting device；In two-dimentional driving device, there are commonly
Horizontal position moving stage（XY drivers）, magnetic coupling straight line rotating driver.Many ultrahigh vacuum experimental provisions, needing both can straight line drive
The forms of motion of dynamic and rotatable driving, so how dexterously to combine linear drives and rotation is to realize the pass of multidimensional driving
Key.
Invention content
Present invention aim to address the single technical problems of driver functions in the prior art, provide a kind of disjunctor two dimension
Rotate sample driver.
Present invention technical solution used for the above purpose is：Disjunctor Two Dimensional Rotating sample driver, feature
It is：Including circumferentially rotating mechanism, axial moving mechanism, two above mechanism is connected with each other；
It is described to circumferentially rotate in mechanism, rotation dial plate connect with roll-shell, rotation dial plate connect with fixed ring, fixed ring and outside
Columella bearing connects, and shell bearing block is connect with support tube, and support tube is connect with collimation cylinder, and support tube is connect with vacuum flange,
Rotation shell is connected with rear cover, and rear cover is connected with rear end guide holder, and guide holder rotation in rear end drives intermediate mandrel rotation；
In the axial moving mechanism, straight line handle is connected with linear screw, and linear screw is connect with straight line shell, linear screw
With driving axis connection, drive shaft connect with steel ball, and steel ball rolls in rotary core shaft, mandrel and extension axis connection, extending shaft and
Guide-localization axis connection, steel ball are connect with straight line mandril, and straight line mandril is connect with front end mandril, and front end mandril is connect with spring,
Spring is connect with Spring retention cap.
The fixed ring is connect with the locking jackscrew for preventing driver from rotating.
The support tube is with collimation cylinder by can guarantee that the bellows of vacuum is flexibly connected.
The present invention is different from previous single one dimensional driving device, using steel ball, the flexible connections such as bellows, and utilizes spring
Eliminate backlass, it can be achieved that driven member it is axially driving, driven with rotation, driving precision is high, axial in ± 12mm ranges
Interior to can be achieved precisely to adjust, inside can be used for strong magnetic environment or non-magnetic environment, maneuverability is good without magnetite.The specific of the present invention has
Beneficial effect is as follows：
（1）The device as possible makees the part for stretching into evacuated interior small, and to save the space of evacuated interior, reduction vacuumizes institute
The energy of consumption；
（2）The flange being connect with vacuum cavity is the flange of spiral linear actuator front end, because of vacuum inner assembly small volume, therefore
It can replace flange size according to requirement of experiment；
（3）Intermediate mandrel acts as the guide device of front end mandril, concentricity when improving flat-pushing, while but also driving away from
It is more accurate from functional relation between rotation angle, effectively reduce interference of the driving error to experiment；
（4）Using steel ball as flexible connection, and flexible connection component is constituted with bellows, the angle that can be eliminated in processing is missed
Difference, and not will produce backhaul gap, stable drive, no catching phenomenon, noiseless；
（5）Spring is located at the front end of whole device, can further eliminate the amount of altering entirely moved axially, and improve
Control accuracy；
（6）Do not use the driver of magnetic coupling type that can cope with external electrical so not being strict with to magnetic environment inside and outside vacuum
The experimental situation in magnetic field；
（7）Component is small and exquisite, of low cost, and it is convenient to replace.
Description of the drawings
Fig. 1 is the overall structure diagram of the present invention.
Fig. 2 is the structure sectional view of the present invention.
In figure：1, front end mandril；2, cylinder is collimated；3, vacuum flange；4, fixed ring；5, jackscrew is locked；6, roll-shell；7、
Straight line handle；8, straight line shell；9, retaining ring；10, shell bearing block；11, dial plate is rotated；12, rear end guide holder；13, rear cover；
14, linear screw 15, drive shaft；16, steel ball；17, bellows；18, support tube；19, mandrel；20, straight line mandril；21, extend
Axis；22, guide-localization axis；23, spring；24, Spring retention cap.
Specific implementation mode
The present invention is described in detail with reference to the accompanying drawings and examples, but the invention is not limited in specific implementations
Example.
Embodiment
Disjunctor Two Dimensional Rotating sample driver as Figure 1-Figure 2, including mechanism, axial moving mechanism are circumferentially rotated,
Two above mechanism is connected with each other；
Described to circumferentially rotate in mechanism, rotation dial plate 11 is connect with roll-shell 6, and rotation dial plate 11 is connect with fixed ring 4, fixed
Ring 4 is connect with locking jackscrew 5, and fastening locking jackscrew 5 can prevent driver from rotating, and fixed ring 4 is connect with shell bearing block 10,
Shell bearing block 10 is connect with retaining ring 9, and shell bearing block 10 is connect with support tube 18, and support tube 18 is connect with collimation cylinder 2, is propped up
Support cylinder 18 is connect with vacuum flange 3, and roll-shell 6 is connected with rear cover 13, and 13 rear covers are connected with rear end guide holder 12, and 12 rear ends are led
It is rotated to seat and intermediate mandrel 19 is driven to rotate, be flexibly connected with bellows 17, ensure vacuum；
In the axial moving mechanism, straight line handle 7 is connected with linear screw 14, and linear screw 14 is connect with straight line shell 8, directly
Line screw rod 14 is connect with drive shaft 15, and drive shaft 15 is connect with steel ball 16, and steel ball 16 rolls in rotary core shaft 19, mandrel 19 with
Extending shaft 21 connects, and extending shaft 21 is connect with guide-localization axis 22, and steel ball 16 is connect with straight line mandril 20, and straight line mandril 20 is with before
Mandril 1 is held to connect, front end mandril 1 is connect with spring 23, and spring 23 is connect with Spring retention cap 24, passes through rotational alignment handle 7
Front end mandril 1 is driven to be moved forward and backward.
When experiment, roll-shell 6 drives the circumferential direction of rear end guide holder 12, mandrel 19, extending shaft 21 and guide-localization axis 22
Rotation is locked by locking jackscrew 5, prevents from rotating；Handle 7 is elected directly by rotating right end, drives linear screw 14 to rotate, straight line
It is screw thread pair between screw rod 14 and straight line shell 8, linear screw 14 is made to move forward or back, linear screw 14 pushes in mandrel 19
16 rolls forward of steel ball, steel ball 16 drive straight line mandril 20 to move, and straight line mandril 20 drives front end mandril 1 to move, when front end is pushed up
When bar 1 moves forward, spring 23 is in compressive state, when rotational alignment handle 7 makes linear screw 14 move backward, spring 23
Deformation is replied, drives front end mandril 1 to move backward, and eliminate the gap generated in processing, installation；Above-mentioned each action mutually knot
It closes, finally realizes driver in two-dimensional change.
The above content is combine optimal technical scheme to the present invention done further description, and it cannot be said that invention
Specific implementation is only limitted to these explanations.For general technical staff of the technical field of the invention, the present invention is not being departed from
Design under the premise of, can also make it is simple deduce and replace, all should be considered as protection scope of the present invention.
Claims (3)
1. disjunctor Two Dimensional Rotating sample driver, it is characterised in that：Including circumferentially rotating mechanism, axial moving mechanism, above two
A mechanism is connected with each other；
It is described to circumferentially rotate in mechanism, rotate dial plate（11）Respectively with roll-shell（6）, fixed ring（4）Connection, fixed ring（4）
With shell bearing block（10）Connection, shell bearing block（10）Respectively with retaining ring（9）, support tube（18）Connection, support tube（18）
Respectively with collimation cylinder（2）, vacuum flange（3）Connection, roll-shell（6）With rear cover（13）It is connected, rear cover（13）It is oriented to rear end
Seat（12）It is connected, rear end guide holder（12）Rotation drives intermediate mandrel（19）Rotation；
In the axial moving mechanism, straight line handle（7）With linear screw（14）It is connected, linear screw（14）Respectively with straight line shell
Body（8）, drive shaft（15）Connection, drive shaft（15）With steel ball（16）Connection, steel ball（16）In mandrel（19）Middle rolling, mandrel
（19）With extending shaft（21）Connection, extending shaft（21）With guide-localization axis（22）Connection, steel ball（16）With straight line mandril（20）Even
It connects, straight line mandril（20）With front end mandril（1）Connection, front end mandril（1）With spring（23）Connection, spring（23）It is fixed with spring
Cap（24）Connection, passes through rotational alignment handle（7）Drive front end mandril（1）It is moved forward and backward.
2. disjunctor Two Dimensional Rotating sample driver according to claim 1, it is characterised in that：The fixed ring（4）With it is anti-
The only locking jackscrew of driver rotation（5）Connection.
3. disjunctor Two Dimensional Rotating sample driver according to claim 1, it is characterised in that：The support tube（18）With standard
Straight tube（2）By the bellows that can guarantee vacuum（17）Flexible connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810148439.7A CN108562760A (en) | 2018-02-13 | 2018-02-13 | Disjunctor Two Dimensional Rotating sample driver |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810148439.7A CN108562760A (en) | 2018-02-13 | 2018-02-13 | Disjunctor Two Dimensional Rotating sample driver |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108562760A true CN108562760A (en) | 2018-09-21 |
Family
ID=63531284
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810148439.7A Pending CN108562760A (en) | 2018-02-13 | 2018-02-13 | Disjunctor Two Dimensional Rotating sample driver |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108562760A (en) |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4817449A (en) * | 1986-08-05 | 1989-04-04 | Claude Le Tyrant | Device for moving samples in a controlled atmosphere enclosure |
| KR19980044527A (en) * | 1996-12-06 | 1998-09-05 | 양승택 | Ultra High Vacuum Linear Shifter |
| CN2403016Y (en) * | 1999-12-24 | 2000-10-25 | 中国科学院沈阳科学仪器研制中心 | High precision five-D trimming sample holder |
| US20050035302A1 (en) * | 2003-08-01 | 2005-02-17 | Robert Morrison | Specimen tip and tip holder assembly |
| CN201409102Y (en) * | 2009-02-27 | 2010-02-17 | 大连齐维科技发展有限公司 | Ultrahigh vacuum two-dimensional magnetic combination drive |
| CN204828524U (en) * | 2015-08-05 | 2015-12-02 | 大连齐维科技发展有限公司 | Two dimension angle swing driver |
| CN206544157U (en) * | 2017-02-21 | 2017-10-10 | 大连齐维科技发展有限公司 | Disjunctor five ties up rotary sample driver |
| CN206546376U (en) * | 2017-02-21 | 2017-10-10 | 大连齐维科技发展有限公司 | A kind of radial many mouthfuls of sample transmission mechanisms |
| CN207798866U (en) * | 2018-02-13 | 2018-08-31 | 大连齐维科技发展有限公司 | Disjunctor Two Dimensional Rotating sample driver |
-
2018
- 2018-02-13 CN CN201810148439.7A patent/CN108562760A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4817449A (en) * | 1986-08-05 | 1989-04-04 | Claude Le Tyrant | Device for moving samples in a controlled atmosphere enclosure |
| KR19980044527A (en) * | 1996-12-06 | 1998-09-05 | 양승택 | Ultra High Vacuum Linear Shifter |
| CN2403016Y (en) * | 1999-12-24 | 2000-10-25 | 中国科学院沈阳科学仪器研制中心 | High precision five-D trimming sample holder |
| US20050035302A1 (en) * | 2003-08-01 | 2005-02-17 | Robert Morrison | Specimen tip and tip holder assembly |
| CN201409102Y (en) * | 2009-02-27 | 2010-02-17 | 大连齐维科技发展有限公司 | Ultrahigh vacuum two-dimensional magnetic combination drive |
| CN204828524U (en) * | 2015-08-05 | 2015-12-02 | 大连齐维科技发展有限公司 | Two dimension angle swing driver |
| CN206544157U (en) * | 2017-02-21 | 2017-10-10 | 大连齐维科技发展有限公司 | Disjunctor five ties up rotary sample driver |
| CN206546376U (en) * | 2017-02-21 | 2017-10-10 | 大连齐维科技发展有限公司 | A kind of radial many mouthfuls of sample transmission mechanisms |
| CN207798866U (en) * | 2018-02-13 | 2018-08-31 | 大连齐维科技发展有限公司 | Disjunctor Two Dimensional Rotating sample driver |
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