CN108559948B - Mask plate, organic light-emitting display panel and display device - Google Patents

Mask plate, organic light-emitting display panel and display device Download PDF

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Publication number
CN108559948B
CN108559948B CN201810689788.XA CN201810689788A CN108559948B CN 108559948 B CN108559948 B CN 108559948B CN 201810689788 A CN201810689788 A CN 201810689788A CN 108559948 B CN108559948 B CN 108559948B
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China
Prior art keywords
display panel
mask plate
light
organic light
emitting
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CN201810689788.XA
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Chinese (zh)
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CN108559948A (en
Inventor
董向丹
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BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
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BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
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Priority to CN201810689788.XA priority Critical patent/CN108559948B/en
Publication of CN108559948A publication Critical patent/CN108559948A/en
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04Coating on selected surface areas, e.g. using masks
    • C23C14/042Coating on selected surface areas, e.g. using masks using masks
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12Organic material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/10OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/11OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

The invention discloses a mask plate, an organic light-emitting display panel and a display device, which are used for solving the problem that when components such as a loudspeaker, a camera, a sensor and the like are arranged in an AA, the transmittance of the positions where the components are arranged is lower due to a light-emitting layer in the AA area. The mask plate comprises: the mask plate is used for shielding a preset area of a display area of the organic light-emitting display panel when the light-emitting layer of the organic light-emitting display panel is shielded by the mask plate.

Description

Mask plate, organic light-emitting display panel and display device
Technical Field
The present invention relates to the field of semiconductor technologies, and in particular, to a mask, an organic light emitting display panel, and a display device.
Background
At present, the upper frame of the whole mobile phone is mainly provided with a loudspeaker, a camera, a sensor and the like, and if the components can be arranged in a display area (AA), the upper frame of the whole mobile phone is greatly reduced.
However, when the components such as the speaker, the camera, the sensor and the like are arranged in the AA, the light-emitting layer in the AA area can cause lower transmittance at the positions where the components are arranged, so that the normal use effect of the components arranged in the AA area is affected.
Disclosure of Invention
The invention provides a mask plate, an organic light-emitting display panel and a display device, which are used for solving the problem that when components such as a loudspeaker, a camera, a sensor and the like are arranged in an AA, the transmittance of the positions where the components are arranged is lower due to a light-emitting layer in the AA area.
The embodiment of the invention provides a mask plate, which comprises the following components: the mask plate is used for shielding a preset area of a display area of the organic light-emitting display panel when the light-emitting layer of the organic light-emitting display panel is shielded by the mask plate.
Optionally, each first connection portion includes connection bars and connection blocks alternately arranged at intervals, wherein a width of the connection block is greater than a width of the connection bar in a direction perpendicular to the extension direction of the first connection portion; the first connecting parts are radially distributed with the shielding part as the center.
Optionally, the mask plate further includes a plurality of annular second connection portions surrounding the shielding portion in sequence, and the second connection portions and the first connection portions are arranged in a crossing manner to form a spider-like net structure.
Optionally, the shielding portion, the first connecting portion, and the second connecting portion are all made of the same material as the frame.
Optionally, the shielding part is located at the center of the mask plate.
Optionally, the shielding part is round, oval, square, rectangle, triangle or trapezoid.
Optionally, the distance between the two furthest points of the shielding part is less than or equal to 2 millimeters.
The embodiment of the invention also provides an organic light-emitting display panel manufactured by adopting the mask plate provided by the embodiment of the invention, wherein the organic light-emitting display panel comprises a light-emitting layer, and the light-emitting layer has a hollowed-out structure in a preset area of a display area.
Optionally, the light emitting layer includes one or more of the following film layers:
an electron injection layer, an electron transport layer, an organic electroluminescence, a hole transport layer, and a hole injection layer.
The embodiment of the invention also provides a display device, which comprises the organic light-emitting display panel provided by the embodiment of the invention.
The embodiment of the invention has the following beneficial effects: the mask plate provided by the embodiment of the invention comprises the following components: the mask plate is used for shielding a preset area of a display area of the organic light-emitting display panel when masking a light-emitting layer of the organic light-emitting display panel, namely, the mask plate is further arranged in the mask plate, the shielding part is arranged at the position corresponding to the preset area of the display panel, for example, the position corresponding to the middle part of the display area, and the preset area can be used for arranging components such as a loudspeaker, a camera and a sensor, and further, when masking evaporation is carried out on the light-emitting layer of the organic light-emitting display panel by using the mask plate, a light-emitting layer film can be prevented from being formed in the preset area of the display area of the organic light-emitting display panel, and further, when components such as a loudspeaker, a camera and a sensor are arranged at the position, the transmittance of the preset area is prevented from being influenced due to the existence of the light-emitting layer film at the position, and further, the use effect of the components arranged in the preset area is further influenced.
Drawings
Fig. 1 is a schematic diagram of a specific structure of a mask according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a specific mask according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of another specific mask according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present disclosure more apparent, the technical solutions of the embodiments of the present disclosure will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present disclosure. It will be apparent that the described embodiments are some, but not all, of the embodiments of the present disclosure. All other embodiments, which can be made by one of ordinary skill in the art without the need for inventive faculty, are within the scope of the present disclosure, based on the described embodiments of the present disclosure.
Unless defined otherwise, technical or scientific terms used in this disclosure should be given the ordinary meaning as understood by one of ordinary skill in the art to which this disclosure belongs. The terms "first," "second," and the like, as used in this disclosure, do not denote any order, quantity, or importance, but rather are used to distinguish one element from another. The word "comprising" or "comprises", and the like, means that elements or items preceding the word are included in the element or item listed after the word and equivalents thereof, but does not exclude other elements or items. The terms "connected" or "connected," and the like, are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "upper", "lower", "left", "right", etc. are used merely to indicate relative positional relationships, which may also be changed when the absolute position of the object to be described is changed.
In order to keep the following description of the embodiments of the present disclosure clear and concise, the present disclosure omits detailed description of known functions and known components.
Referring to fig. 1, an embodiment of the present invention provides a mask plate, including: the mask plate is used for shielding a preset area of a display area of the organic light-emitting display panel when the mask plate shields a light-emitting layer of the organic light-emitting display panel.
The mask plate provided by the embodiment of the invention comprises the following components: the mask plate is used for shielding a preset area of a display area of the organic light-emitting display panel when masking a light-emitting layer of the organic light-emitting display panel, namely, the mask plate is further provided with the shielding part, the shielding part is arranged in the mask plate, the arrangement position of the shielding part corresponds to the preset area of the display panel, for example, corresponds to the middle position of the display area, the preset area can be used for arranging components such as a loudspeaker, a camera and a sensor, and further, when masking the light-emitting layer of the organic light-emitting display panel by using the mask plate, a light-emitting layer film can be prevented from being formed in the preset area of the display area of the organic light-emitting display panel, and further, the influence on the transmittance of the preset area due to the existence of the light-emitting layer film in the position when components such as a loudspeaker, a camera and a sensor are arranged in the position can be avoided, and the use effect of the components arranged in the preset area can be further influenced.
In specific implementation, the Mask provided by the embodiment of the invention can be based on the Mask of the Open Mask, and the Open Mask is designed to be an AA area full-empty design, so that the light-emitting layer can be uniformly and effectively evaporated in the AA area to realize the light emission of the AA area. Open Mask is mainly used in the production of white light organic electroluminescent devices (WOLEDs) of Active-matrix organic light emitting diodes (AMOLED). The technology is mainly used for manufacturing and producing large-size panels, the size of an Open Mask is large, and common layers such as a hole injection layer, a hole transport layer and an organic electroluminescent layer are manufactured in WOLED technology.
In particular, as shown in fig. 2, each first connection portion 3 includes connection bars 32 and connection blocks 31 alternately arranged at intervals, wherein the width of the connection block 31 is larger than the width of the connection bar 32 in a direction perpendicular to the direction in which the first connection portion 3 extends (i.e., in a direction along AB as in fig. 2); the plurality of first connecting portions 3 are radially distributed around the shielding portion 2. Further, the connection bars 32 and the connection blocks 31 may be distributed symmetrically with respect to the shielding portion 2. In the embodiment of the present invention, each first connection portion 3 includes the connection bars 32 and the connection blocks 31 alternately arranged at intervals, that is, the first connection portion 3 includes the connection bars 32, so that the first connection portion 3 can be made as thin and narrow as possible, so as to avoid affecting the manufacture of the light emitting layer in the area other than the preset area of the display area, and the connection firmness of the first connection portion can be ensured by including the connection blocks 31 in the first connection portion 3.
In specific implementation, referring to fig. 3, the mask plate further includes a plurality of annular second connection portions 4 surrounding the shielding portion 2 in sequence, where the second connection portions 4 are disposed to intersect with the first connection portions 3, so as to form a spider-web structure. In the embodiment of the invention, each first connecting part 3 comprises connecting strips 32 and connecting blocks 31 which are alternately arranged at intervals, the mask plate further comprises a plurality of annular second connecting parts 4 which sequentially encircle the shielding parts 2, the second connecting parts 4 and the first connecting parts 3 are arranged in a crossing way to form a spider-like net structure, and the connecting strips 32 and the connecting blocks 31 are symmetrically distributed in the center with the shielding parts 2 as the center, so that the uniformity control of the net stretching force can be facilitated and the position precision of the shielding parts can be ensured when the mask plate is manufactured through net stretching.
In a specific implementation, the shielding portion 2, the first connecting portion 3, and the second connecting portion 4 are all made of the same material as the frame 1. In the embodiment of the invention, the shielding part, the first connecting part and the second connecting part are all made of the same material as the frame, and the mask plate can be manufactured by a one-time etching process, so that the mask plate is simpler to manufacture.
In the specific implementation, referring to fig. 1 to 3, the shielding part 2 is located at the center of the mask plate.
In a specific implementation, the shielding part 2 is circular, elliptical, square, rectangular, triangular or trapezoidal. Optionally, the shielding part is circular and is used for setting a camera.
In a specific implementation, the distance between the two points furthest from the shielding part 2 is less than or equal to 2 mm. For example, when the shielding portion is circular, the diameter of the circular shape is less than or equal to 2 mm. That is, since the shielding portion 2 of the mask plate in the embodiment of the present invention is mainly used for setting components such as a camera on the display panel, and since the components are smaller, the size of the shielding portion 2 should not be too large, so as to reduce the influence on the light-emitting layer of the organic light-emitting display panel.
Based on the same inventive concept, the embodiment of the invention also provides an organic light-emitting display panel manufactured by using the mask plate provided by the embodiment of the invention, wherein the organic light-emitting display panel comprises a light-emitting layer, and the light-emitting layer has a hollowed-out structure in a preset area of a display area.
Optionally, the light emitting layer comprises one or more of the following film layers: an electron injection layer, an electron transport layer, an organic electroluminescence, a hole transport layer, and a hole injection layer.
Based on the same inventive concept, the embodiment of the invention also provides a display device, including the organic light emitting display panel provided by the embodiment of the invention.
The embodiment of the invention has the following beneficial effects: the mask plate provided by the embodiment of the invention comprises the following components: the mask plate is used for shielding a preset area of a display area of the organic light-emitting display panel when masking a light-emitting layer of the organic light-emitting display panel, namely, the mask plate is further arranged in the mask plate, the shielding part is arranged at the position corresponding to the preset area of the display panel, for example, the position corresponding to the middle part of the display area, and the preset area can be used for arranging components such as a loudspeaker, a camera and a sensor, and further, when masking evaporation is carried out on the light-emitting layer of the organic light-emitting display panel by using the mask plate, a light-emitting layer film can be prevented from being formed in the preset area of the display area of the organic light-emitting display panel, and further, when components such as a loudspeaker, a camera and a sensor are arranged at the position, the transmittance of the preset area is prevented from being influenced due to the existence of the light-emitting layer film at the position, and further, the use effect of the components arranged in the preset area is further influenced.
It will be apparent to those skilled in the art that various modifications and variations can be made to the present invention without departing from the spirit or scope of the invention. Thus, it is intended that the present invention also include such modifications and alterations insofar as they come within the scope of the appended claims or the equivalents thereof.

Claims (8)

1. A mask plate, comprising: the light-emitting device comprises a shielding part, a frame surrounding the shielding part and a plurality of first connecting parts for connecting the shielding part and the frame, wherein the shielding part is used for shielding a preset area of a display area of the organic light-emitting display panel when the mask plate shields a light-emitting layer of the organic light-emitting display panel;
each first connecting part comprises connecting strips and connecting blocks which are alternately arranged at intervals, wherein the width of each connecting block is larger than that of each connecting strip in the direction perpendicular to the extending direction of the first connecting part; the connecting strips and the connecting blocks are distributed in a central symmetry way by taking the shielding part as a center; the first connecting parts are radially distributed by taking the shielding part as a center;
the mask plate further comprises a plurality of annular second connecting portions which sequentially encircle the shielding portions, and the second connecting portions and the first connecting portions are arranged in a crossing mode to form a spider-like net-shaped structure.
2. The mask plate of claim 1, wherein the shielding portion, the first connection portion, and the second connection portion are all made of the same material as the frame.
3. The mask of claim 1, wherein the shield is located at a central position of the mask.
4. The mask of claim 1, wherein the shielding portion is circular, oval, square, rectangular, triangular, or trapezoidal.
5. The mask of claim 1, wherein the distance of the two furthest points of the shield is less than or equal to 2 millimeters.
6. An organic light-emitting display panel manufactured by using the mask plate according to any one of claims 1 to 5, wherein the organic light-emitting display panel comprises a light-emitting layer, and the light-emitting layer has a hollowed-out structure in a preset area of a display area.
7. The organic light-emitting display panel of claim 6, wherein the light-emitting layer comprises one or more of the following film layers:
an electron injection layer, an electron transport layer, an organic electroluminescence, a hole transport layer, and a hole injection layer.
8. A display device comprising the organic light-emitting display panel according to claim 6 or 7.
CN201810689788.XA 2018-06-28 2018-06-28 Mask plate, organic light-emitting display panel and display device Active CN108559948B (en)

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Application Number Priority Date Filing Date Title
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CN108559948B true CN108559948B (en) 2023-10-24

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Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109306450B (en) * 2018-11-28 2020-04-28 武汉华星光电半导体显示技术有限公司 Mask plate set for vapor deposition
CN110018610A (en) * 2019-04-25 2019-07-16 武汉天马微电子有限公司 The production method and display device of mask plate, display panel, display panel
CN110257768A (en) 2019-06-14 2019-09-20 武汉华星光电半导体显示技术有限公司 Mask member
CN110265449A (en) * 2019-06-24 2019-09-20 武汉华星光电半导体显示技术有限公司 A kind of display panel and mask plate
CN110438446B (en) 2019-07-31 2020-12-29 昆山国显光电有限公司 Mask assembly and display device
CN110571253A (en) * 2019-08-29 2019-12-13 武汉华星光电半导体显示技术有限公司 display panel and mask plate
CN111273515B (en) * 2020-02-14 2023-10-20 合肥鑫晟光电科技有限公司 Mask plate, manufacturing method, display panel and display device
CN112410726B (en) * 2020-11-17 2022-09-27 昆山工研院新型平板显示技术中心有限公司 Mask plate

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Publication number Priority date Publication date Assignee Title
CN107236927A (en) * 2017-06-16 2017-10-10 京东方科技集团股份有限公司 Mask plate module, organic EL display panel and preparation method thereof
CN208328089U (en) * 2018-06-28 2019-01-04 京东方科技集团股份有限公司 A kind of mask plate, organic light emitting display panel and display device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107236927A (en) * 2017-06-16 2017-10-10 京东方科技集团股份有限公司 Mask plate module, organic EL display panel and preparation method thereof
CN208328089U (en) * 2018-06-28 2019-01-04 京东方科技集团股份有限公司 A kind of mask plate, organic light emitting display panel and display device

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