CN108550977A - RFID antenna, RFID tag and RFID antenna production method - Google Patents

RFID antenna, RFID tag and RFID antenna production method Download PDF

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Publication number
CN108550977A
CN108550977A CN201810289018.6A CN201810289018A CN108550977A CN 108550977 A CN108550977 A CN 108550977A CN 201810289018 A CN201810289018 A CN 201810289018A CN 108550977 A CN108550977 A CN 108550977A
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CN
China
Prior art keywords
rfid antenna
rfid
nickel
ceramic substrate
distributing point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201810289018.6A
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Chinese (zh)
Inventor
涂小军
赵袆
文莉贵
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenzhen Zhenhua Microelectronics Co Ltd
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Shenzhen Zhenhua Microelectronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shenzhen Zhenhua Microelectronics Co Ltd filed Critical Shenzhen Zhenhua Microelectronics Co Ltd
Priority to CN201810289018.6A priority Critical patent/CN108550977A/en
Publication of CN108550977A publication Critical patent/CN108550977A/en
Pending legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q1/00Details of, or arrangements associated with, antennas
    • H01Q1/12Supports; Mounting means
    • H01Q1/22Supports; Mounting means by structural association with other equipment or articles
    • H01Q1/2208Supports; Mounting means by structural association with other equipment or articles associated with components used in interrogation type services, i.e. in systems for information exchange between an interrogator/reader and a tag/transponder, e.g. in Radio Frequency Identification [RFID] systems
    • H01Q1/2225Supports; Mounting means by structural association with other equipment or articles associated with components used in interrogation type services, i.e. in systems for information exchange between an interrogator/reader and a tag/transponder, e.g. in Radio Frequency Identification [RFID] systems used in active tags, i.e. provided with its own power source or in passive tags, i.e. deriving power from RF signal
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06KGRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K19/00Record carriers for use with machines and with at least a part designed to carry digital markings
    • G06K19/06Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code
    • G06K19/067Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q1/00Details of, or arrangements associated with, antennas
    • H01Q1/36Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q1/00Details of, or arrangements associated with, antennas
    • H01Q1/48Earthing means; Earth screens; Counterpoises
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q1/00Details of, or arrangements associated with, antennas
    • H01Q1/50Structural association of antennas with earthing switches, lead-in devices or lightning protectors

Abstract

The present invention relates to a kind of RFID antenna, RFID tag and RFID antenna production method, wherein RFID antenna, slurry is starched for nickel, and wherein nickel slurry meets:Viscosity is between 85Pas 115Pas, and linear resolution is less than 200 μm, and resistivity is less than 80m Ω/Sq, and adhesive force is greater than or equal to 625N/cm2.RFID antenna cost can be reduced and achieve the effect that energy-saving and emission-reduction by implementing the present invention.

Description

RFID antenna, RFID tag and RFID antenna production method
Technical field
The present invention relates to field of antenna, are made more specifically to a kind of RFID antenna, RFID tag and RFID antenna Method.
Background technology
Radio RF recognition technology (RadioFrequency Identification, RFID) is automatic identification technology A kind of advanced form, RFID is as an advanced automatic identification technology, and, identification big, read-write with amount of storage is apart from remote, knowledge Other speed is fast, service life is long, good environmental adaptability and the features such as multi-tag may be implemented while identifying, can be widely applied to supply Chain management, traffic management, industrial production management, animal identification management, gate inhibition, anti-fake, antitheft and logistics are answered, is moved The a variety of occasions of calendar scheduling.
With the fast development of global Internet of Things, the annual requirement of RFID tag will be in terms of hundreds of millions, RFID tag label It is cost effective have become the inevitable requirement quickly popularized and developed for Internet of Things, be especially used for vehicle management system project Ceramic RFID tag, currently, ceramic RFID label antenna is essentially all to print noble silver electrocondution slurry using thick-film technique It makes, wherein occupying 70% or more entire RFID tag using silver paste as the cost of electrocondution slurry its electrocondution slurry.So that whole A RFID antenna cost is higher.
Invention content
The technical problem to be solved in the present invention is, for the drawbacks described above of the prior art, provide a kind of RFID antenna, RFID tag and RFID antenna production method.
The technical solution adopted by the present invention to solve the technical problems is:A kind of RFID antenna is constructed, slurry is starched for nickel, The wherein described nickel slurry meets:Viscosity is between 85Pas-115Pas, and linear resolution is less than 200 μm, and resistivity is less than 80m Ω/Sq, adhesive force are greater than or equal to 625N/cm2
Preferably, the ceramic substrate for printing the nickel slurry includes the ceramic substrate that alumina content is 96%.
Preferably, the frequency range of the RFID antenna work includes 840MHz-845MHz.
Preferably, the RFID antenna includes the T-type matching network for impedance matching.
Preferably, the RFID antenna includes:
Distributing point for signal input;
Connect the distributing point and relative to two L-shaped transmission lines of distributing point mirror image each other;
Connect the linear type transmission line of the described two one end of L-shaped transmission line far from the distributing point;
The matched line parallel with one end that described two L-shaped transmission lines connect the distributing point;
Two radiation arms at linear type transmission line both ends are separately connected, described two radiation arms are relative to the feed Put mirror image each other.
The present invention also constructs a kind of RFID tag, including the RFID antenna described in any of the above item.
Preferably, the ceramic substrate of the RFID antenna passes through double faced adhesive tape and cage connection.
The invention further relates to a kind of RFID antenna production method, the method includes:Configuration viscosity is in 85Pas- Between 115Pas, linear resolution is less than 200 μm, resistivity is less than 80m Ω/Sq, adhesive force is greater than or equal to 625N/cm2 Nickel slurry, and nickel slurry is printed on ceramic substrate and is sintered.
Preferably, the ceramic substrate use alumina content for 96% ceramic substrate.
Preferably, the sintering includes that sintering temperature is used to be sintered for 700 DEG C ± 20 DEG C of low-temperature sintering technology.
A kind of RFID antenna, RFID tag and the RFID antenna production method for implementing the present invention, have the advantages that:
1. compare the silver-colored conductive noble metal slurry being most widely used, nickel base conductive pulp can reduce material cost 35% with On, meet the management philosophy that enterprise scale reduces cost;
2. nickel has good stability, soldering resistance, electric conductivity and thermal conductivity, meet the low-resistance of electronic label antenna material Anti-, soldering resistance, without Ion transfer and silk-screen printing compliance;
3. oxidation resistant nickel base conductive pulp is fully able to be sintered in air, original thick film firing need not be set It is standby to carry out any change;
4. for needing the conductive silver slurry that is sintered at 850 DEG C or more, nickel base conductive pulp can in low-temperature sintering, With apparent energy-saving and emission-reduction advantage;
5. nickel is the cathode inert material of strong resistance to Current Voltage bombardment, it is not likely to produce drift phenomenon;
6. having in aspect of performance than conductive silver slurry in soldering resistance, magnetic loss etc. with the antenna that nickel base conductive pulp prints It is improved.
7. for the conductive silver slurry for needing also to need printing-sintering protective layer (glass glaze) on the silver layer of sintering, Oxidation resistant nickel base conductive pulp does not need printing-sintering protective layer then, directly reduce the printing of protective layer (glass glaze), drying and It is sintered three processes.
Therefore, realize that nickel base conductive pulp substitutes noble silver electrocondution slurry and not only has the specific market demand and meet state The developing direction of family's industrialization energy-saving and emission-reduction, and there is huge economic benefit and social benefit.
Description of the drawings
Present invention will be further explained below with reference to the attached drawings and examples, in attached drawing:
Fig. 1 is the structural schematic diagram of one embodiment of RFID antenna of the present invention;
Fig. 2 is the dimensional drawing of one embodiment of RFID antenna of the present invention;
Fig. 3 is the structural schematic diagram of one embodiment of RFID tag of the present invention;
Fig. 4 is the S11 parameters simulation results of Fig. 1 embodiments;
Fig. 5 is the Smith chart simulation result of Fig. 1 embodiments;
Fig. 6 is the sensitivity test result of Fig. 2 embodiments;
Fig. 7 is the identification distance test result of Fig. 2 embodiments;
Fig. 8 is the reflection power test result of Fig. 2 embodiments.
Specific implementation mode
For a clearer understanding of the technical characteristics, objects and effects of the present invention, now control attached drawing is described in detail The specific implementation mode of the present invention.
A kind of RFID antenna of the present invention, slurry are starched for nickel, and wherein nickel slurry meets:Viscosity is in 85Pas-115Pas Between, linear resolution is less than 200 μm, and resistivity is less than 80m Ω/Sq, and adhesive force is greater than or equal to 625N/cm2.Specifically, Existing RFID antenna is typically to print electrocondution slurry on substrate to be made, and RFID antenna uses on ceramic substrate in the present invention The nickel slurry (nickel slurry constitutes antenna body) met the requirements is printed, is then sintered into, the different proportion of nickel can be selected here, Debug out suitable nickel slurry.Compared to the silver-colored conductive paste that needs also need printing-sintering protective layer (glass glaze) on the silver layer of sintering For material, oxidation resistant nickel base conductive pulp does not need printing-sintering protective layer then, directly reduce protective layer (glass glaze) printing, Three processes of drying and sintering.Here the main component in nickel slurry has NixB@Ni composite powders, glass powder, organic thickening agent etc., can To reach said effect by allocating the different proportion between a variety of materials.
Further, the ceramic substrate for printing nickel slurry includes the ceramic substrate that alumina content is 96%.Specifically, Nickel can be starched and be printed on 96 aluminium oxide ceramic substrates, i.e., the ceramic substrate that alumina content is 96% is situated between using the material Electric constant be 9.4 disclosure satisfy that antenna performance requirement, and it is frangible play the effect of tamper, while there is advantage at low cost.
Further, the frequency range of RFID antenna work includes 840MHz-845MHz.Specifically, due to nickel conductive paste The conductivity of material is weaker than conductive silver slurry, centre frequency of the centre frequency of antenna than silver paste label made of usual nickel slurry It is high.
Further, RFID antenna includes the T-type matching network for impedance matching.Specifically, in order to realize antenna with Matching between chip, matching network are typically used in the design application of RFID antenna.Additional matching network can undoubtedly increase Add the cost of antenna, and increases the size of antenna.Therefore, many RFID antennas are usually by matching network and Antenna Design one It rises, can not only realize the matching between antenna and chip well in this way, also reduce the cost and size of antenna.It is common at present RFID antenna feeding network have:T-type matching network, aperture-coupled network, gap nesting feeding network etc..It is real herein It applies and uses T-type matching network B1 as shown in Figure 1 in example, the matching way is simple in structure, and can easily be accommodated antenna impedance and normal Design for RFID antenna.
Further, include in RFID antenna 100 (wherein substrate is not shown) as shown in Figure 1:For signal input Distributing point A1;Connect distributing point A1 and relative to two L-shaped transmission lines B11, B12 of distributing point A1 mirror images each other;Connect two L The linear type transmission line B13 of the one end of shape transmission line B11, B12 far from distributing point A1;It is connect with two L-shaped transmission lines B11, B12 The parallel matched line B14 in one end of distributing point A1;It is separately connected two radiation arm C1, C2 at the both ends linear type transmission line B13, two A radiation arm C1, C2 are relative to distributing point A1 mirror images each other.Specifically, distributing point A1 is used for connecting the chip of RFID, for connecing Receive signal input and the signal output of chip.There are gaps between matched line B14 and L-shaped transmission line B11, B12 galianconism, should Gap can be adjusted as needed.Entire RFID antenna includes using symmetrical layout designs, matching network herein For matched L-shaped transmission line B11, B12, linear type transmission line B13, and for carrying out radiation arm C1, C2 of radio-frequency radiation.When So, it can also be designed in some embodiments using other structures mode.
In addition, RFID antenna 100 (wherein substrate is not shown) as shown in Figure 2, gives when said structure design Antenna size (mainly antenna body made of nickel slurry) reference, antenna size unit here is mm (millimeter).Here typical Size such as radiation arm C1, C2 size be 24mmx48mm rectangle, the distance between two radiation arms C1, C2 be 34mm, this The width of the length of a length namely linear type transmission line B13, linear type transmission line B13 is 3mm, L-shaped transmission line B11, B12's It is length 12.1mm to connect the long-armed of linear type transmission line B13, the gap between galianconism be 2mm (here it can be appreciated that The size of distributing point).
To reduce the design cycle, design cost is reduced, using electromagnetic field simulation software HFSS, HFSS-High Frequency Structure 3 D electromagnetics simulation software can obtain the simulation result of the RFID antenna of the present invention herein, With reference to Fig. 4, Fig. 5.It is noted here that according to the conductivity of nickel pulp material, in simulations, it is practical to emulate the center frequency ratio used The centre frequency for the RFID antenna product to be designed wants high.To ensure that actual product meets design requirement.
In addition, the RFID tag 200 of the present invention, including above-mentioned RFID antenna 100, the ceramic substrate 102 of RFID antenna 100 Pass through double faced adhesive tape 202 and shell 201.Specifically, in embodiment as shown in Figure 3, the structure of nickel base conductive pulp RFID tag 200 Include shell 201 successively, RFID antenna 100 (includes the ceramics of antenna body 101 and printed antenna ontology 101 made of nickel slurry Substrate 102), further include release paper 204 in some embodiments.RFID chip 206 is connected to RFID antenna distributing point A1, carries out Signal between chip 206 and RFID antenna 100 transmits.Shell 201 and the ceramic substrate 102 of RFID antenna 100 are printed with day The one side of line ontology 101 is connected by double faced adhesive tape 202, and the another side of ceramic substrate 102 is by double faced adhesive tape 203 with release paper 204 Connection.Ceramic substrate 102 uses 96% aluminium oxide ceramics, meets the requirement of GB/T14619.Antenna sheet on ceramic substrate 102 Body 101 is printed using nickel base conductive pulp and low sintering technique.Double faced adhesive tape 202,203 uses acrylic foam base material, colourless Transparent, adhesive strength is more than or equal to 0.28N/mm2, positive that sticking strength is drawn to be not less than 7kgf/cm2, dynamic shear strength is not less than 4kgf/cm2, -40 DEG C~+85 DEG C of operating temperature range.
The target for reaching design for the properties of RFID tag 200 that is very fast and accurately debugging out the present invention, uses Tagformance tests system carries out debugging test, determines that RFID tag, Tagformance are surveyed after debugging test repeatedly The test result of the sizing nickel base conductive pulp RFID tag of test system test is as shown in figs 6-8.It can be seen that nickel starches RFID tag Centre frequency between 840MHz-845MHz, and sensitivity≤- 16dBm, for identification distance up to 28m, reflection power is big In equal to -36dBm.
In addition, a kind of RFID antenna production method of the present invention, including:Configuration viscosity between 85Pas-115Pas, Linear resolution is less than 200 μm, resistivity is less than 80m Ω/Sq, adhesive force is greater than or equal to 625N/cm2Nickel slurry, and by nickel Slurry, which is printed on ceramic substrate, to be sintered.
Specifically, according to the selected viscosity of the requirement of thick-film technique and electronic tag performance 85Pas-115Pas it Between, linear resolution be less than 200 μm, resistivity be less than 80m Ω/Sq, adhesive force be greater than or equal to 625N/cm2Nickel slurry, here Main component in nickel slurry has NixB@Ni composite powders, glass powder, organic thickening agent etc., can be by allocating between a variety of materials Different proportion reach said effect.In some embodiments, it is also contemplated that the inoxidizability of nickel slurry.
Further, ceramic substrate use alumina content for 96% ceramic substrate.It is printed specifically, nickel can be starched On 96 aluminium oxide ceramic substrates, i.e., ceramic substrate is made in the ceramics that alumina content is 96%.Using the material dielectric constant Disclosure satisfy that antenna performance requirement for 9.4, and it is frangible play the effect of tamper, while there is advantage at low cost.
Further, sintering includes that sintering temperature is used to be sintered for 700 DEG C ± 20 DEG C of low-temperature sintering technology.Specifically , in the sintering process of nickel slurry, sintering temperature cannot be excessively high, excessively high to burn out nickel placenta percreta, and sintering temperature can not be too low, It is too low that nickel placenta percreta can be made to be easy to fall off.Optimal Temperature is at 700 DEG C or so.Such as the knot of above-mentioned RFID antenna may be used Structure makes the silk screen that printing nickel starches RFID antenna structure by film figure, makes pottery in 96% aluminium oxide of 85.6mmx54mmx0.635mm On porcelain carry out nickel slurry printing, after through drying and low-temperature sintering station be complete nickel starch RFID antenna making.
It should be understood that above example only expresses the preferred embodiment of the present invention, description is more specific and detailed Carefully, but it cannot be construed as a limitation to the scope of the present invention;It should be pointed out that for the common skill of this field For art personnel, without departing from the inventive concept of the premise, above-mentioned technical characterstic can be freely combined, can also be done Go out several modifications and improvements, these are all within the scope of protection of the present invention;Therefore, all to be done with scope of the invention as claimed Equivalents and modification, should all belong to the covering scope of the claims in the present invention.

Claims (10)

1. a kind of RFID antenna, which is characterized in that its slurry is starched for nickel, wherein nickel slurry meets:Viscosity is in 85Pas- Between 115Pas, linear resolution is less than 200 μm, and resistivity is less than 80m Ω/Sq, and adhesive force is greater than or equal to 625N/cm2
2. RFID antenna according to claim 1, which is characterized in that the ceramic substrate for printing the nickel slurry includes oxygen Change the ceramic substrate that aluminium content is 96%.
3. RFID antenna according to claim 2, which is characterized in that the frequency range of RFID antenna work includes 840MHz-845MHz。
4. RFID antenna according to claim 3, which is characterized in that the RFID antenna includes the T for impedance matching Type matching network.
5. RFID antenna according to claim 4, which is characterized in that the RFID antenna includes:
Distributing point for signal input;
Connect the distributing point and relative to two L-shaped transmission lines of distributing point mirror image each other;
Connect the linear type transmission line of the described two one end of L-shaped transmission line far from the distributing point;
The matched line parallel with one end that described two L-shaped transmission lines connect the distributing point;
Two radiation arms at linear type transmission line both ends are separately connected, described two radiation arms are mutual relative to the distributing point For mirror image.
6. a kind of RFID tag, which is characterized in that including the RFID antenna described in claim 1-5 any one.
7. RFID tag according to claim 6, which is characterized in that the ceramic substrate of the RFID antenna passes through double faced adhesive tape With cage connection.
8. a kind of RFID antenna production method, which is characterized in that the method includes:
Configuration viscosity is between 85Pas-115Pas, linear resolution be less than 200 μm, resistivity be less than 80m Ω/Sq, attached Put forth effort to be greater than or equal to 625N/cm2Nickel slurry, and nickel slurry is printed on ceramic substrate and is sintered.
9. RFID antenna production method according to claim 8, which is characterized in that the ceramic substrate is contained using aluminium oxide The ceramic substrate that amount is 96%.
10. RFID antenna production method according to claim 9, which is characterized in that the sintering includes using sintering temperature Degree is sintered for 700 DEG C ± 20 DEG C of low-temperature sintering technology.
CN201810289018.6A 2018-03-30 2018-03-30 RFID antenna, RFID tag and RFID antenna production method Pending CN108550977A (en)

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Application Number Priority Date Filing Date Title
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Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101290824A (en) * 2008-06-03 2008-10-22 华中科技大学 Preparing method of nickel based conductive slurry
CN101567264A (en) * 2008-04-24 2009-10-28 广州三则电子材料有限公司 Base metal nickel internal electrode slurry of microwave multiple-layer sheet ceramic capacitor
CN102110872A (en) * 2011-03-10 2011-06-29 江苏拓元科技发展有限公司 Radio frequency identification tag antenna applicable to non-metallic surface
CN202025846U (en) * 2010-10-13 2011-11-02 杭州英思睿信息科技有限公司 Ultrahigh frequency radio frequency identification tag antenna
CN102496776A (en) * 2011-12-08 2012-06-13 南京大学 Tag antenna capable of covering global UHF RFID frequency ranges, electronic tag
CN102709688A (en) * 2012-06-11 2012-10-03 杭州电子科技大学 RFID (radio frequency identification) tag antenna simulation design method and tag antenna
CN102869732A (en) * 2010-03-30 2013-01-09 元安技术株式会社 Ink for printing a mobile phone antenna pattern, method for manufacturing a synthetic resin part for a mobile phone on which an antenna pattern is printed using the ink, and synthetic resin part for a mobile phone on which an antenna pattern is print
CN103489027A (en) * 2013-09-27 2014-01-01 南京铭旷电子科技有限公司 Low-cost ceramic-based radio frequency identification (RFID) tag and manufacturing method thereof
CN204143483U (en) * 2014-10-17 2015-02-04 敏锐速联科技有限公司 Fragile electronic label
CN104684249A (en) * 2013-11-26 2015-06-03 住友电气工业株式会社 Printed wiring board and method of manufacturing same
CN106535520A (en) * 2016-10-12 2017-03-22 歌尔股份有限公司 Functional ceramic backplane and manufacturing method thereof
CN107545943A (en) * 2016-06-28 2018-01-05 上海光线新材料科技有限公司 A kind of silver-colored nickel slurry and the method for making printed circuit using silver-colored nickel slurry

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101567264A (en) * 2008-04-24 2009-10-28 广州三则电子材料有限公司 Base metal nickel internal electrode slurry of microwave multiple-layer sheet ceramic capacitor
CN101290824A (en) * 2008-06-03 2008-10-22 华中科技大学 Preparing method of nickel based conductive slurry
CN102869732A (en) * 2010-03-30 2013-01-09 元安技术株式会社 Ink for printing a mobile phone antenna pattern, method for manufacturing a synthetic resin part for a mobile phone on which an antenna pattern is printed using the ink, and synthetic resin part for a mobile phone on which an antenna pattern is print
CN202025846U (en) * 2010-10-13 2011-11-02 杭州英思睿信息科技有限公司 Ultrahigh frequency radio frequency identification tag antenna
CN102110872A (en) * 2011-03-10 2011-06-29 江苏拓元科技发展有限公司 Radio frequency identification tag antenna applicable to non-metallic surface
CN102496776A (en) * 2011-12-08 2012-06-13 南京大学 Tag antenna capable of covering global UHF RFID frequency ranges, electronic tag
CN102709688A (en) * 2012-06-11 2012-10-03 杭州电子科技大学 RFID (radio frequency identification) tag antenna simulation design method and tag antenna
CN103489027A (en) * 2013-09-27 2014-01-01 南京铭旷电子科技有限公司 Low-cost ceramic-based radio frequency identification (RFID) tag and manufacturing method thereof
CN104684249A (en) * 2013-11-26 2015-06-03 住友电气工业株式会社 Printed wiring board and method of manufacturing same
CN204143483U (en) * 2014-10-17 2015-02-04 敏锐速联科技有限公司 Fragile electronic label
CN107545943A (en) * 2016-06-28 2018-01-05 上海光线新材料科技有限公司 A kind of silver-colored nickel slurry and the method for making printed circuit using silver-colored nickel slurry
CN106535520A (en) * 2016-10-12 2017-03-22 歌尔股份有限公司 Functional ceramic backplane and manufacturing method thereof

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