CN108548977A - A kind of Zinc-oxide piezoresistor ageing state lossless detection method of the dielectric spectroscopy based on optimization - Google Patents

A kind of Zinc-oxide piezoresistor ageing state lossless detection method of the dielectric spectroscopy based on optimization Download PDF

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CN108548977A
CN108548977A CN201810570021.5A CN201810570021A CN108548977A CN 108548977 A CN108548977 A CN 108548977A CN 201810570021 A CN201810570021 A CN 201810570021A CN 108548977 A CN108548977 A CN 108548977A
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zinc
oxide piezoresistor
state
detection method
ageing state
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CN108548977B (en
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武康宁
李建英
黄雨薇
李盛涛
刘文凤
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Xian Jiaotong University
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Xian Jiaotong University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere

Abstract

The present invention discloses a kind of Zinc-oxide piezoresistor ageing state lossless detection method of the dielectric spectroscopy based on optimization, including:1) set temperature interval measures the frequency domain response characteristic of Zinc-oxide piezoresistor capacitance C at high temperature;2) it calculates and drawsWith the relation spectrum of frequency f (angular frequency=2 π f);3) it takes under different temperatures TExtreme frequencies f in spectrogramm, it is lnf to draw out ordinatem, abscissa is the spectrogram of 1000/T, and calculates its activation energy by linear fit, and activation energy corresponds to the interfacial state energy level of Zinc-oxide piezoresistor grain boundaries.The frequency domain response characteristic that the present invention passes through capacitance under measurement Zinc-oxide piezoresistor high temperature, using a kind of new characterizing method, interfacial state electron trap relaxation signals are extracted from DC conductance cover, and using interfacial state electron trap relaxation activation energy as the evaluation parameter of Zinc-oxide piezoresistor ageing state.The present invention is not damaged to test sample, is the effective means for assessing Zinc-oxide piezoresistor ageing state.

Description

A kind of Zinc-oxide piezoresistor ageing state of the dielectric spectroscopy based on optimization is lossless Detection method
Technical field
The invention belongs to electrical engineering voltage-sensitive ceramic field, more particularly to a kind of Zinc-oxide piezoresistor ageing state is lossless Detection method.
Background technology
In engineer application, the aging of Zinc-oxide piezoresistor influences whether the reliability of operation power, stability.With The further intensification of degree of aging, voltage-sensitive ceramic is possible to can be by heat or electrical breakdown, to bring weight to the operation of power equipment Big security risk.Assessing the big test for mostly using voltage-current characteristic and nonlinear factor and letting out to ageing state at present The parameters such as leakage current.But the reason of aging character that these parameters only show macroscopic view does not analyze aging from microcosmic angle.
The deterioration of electrical property is the drop due to the Schottky barrier of microcosmic upper crystal boundary in Zinc-oxide piezoresistor ageing process It is low to cause, and depletion layer and negatively charged interfacial state that Schottky barrier is made of positively charged donor ion are constituted. The negatively charged ion in interface is either neutralized to interfacial migration from depletion layer due to positively charged zinc interstitial ion Or oxygen can show as the variation of interfacial state after aging in the desorption at interface.
The frequency domain response analysis of Zinc-oxide piezoresistor is concentrated in two relaxation processes of low temperature range.The two relax The origin of Henan process is zinc calking and the Lacking oxygen of crystal boundary area depletion layer.But the interfacial state frequency domain response of Zinc-oxide piezoresistor is deposited It is under conditions of at higher temperature or more low frequency, and DC conductance component is sharply increased in high temperature and low frequency response, often covers Relaxation process therein, therefore the report of the rare high temperature relaxation process to Zinc-oxide piezoresistor.
Invention content
The purpose of the present invention is to provide a kind of Zinc-oxide piezoresistor ageing states of the dielectric spectroscopy based on optimization Lossless detection method can be detected its ageing state from the microcosmic cause of Zinc-oxide piezoresistor aging.
To achieve the above objectives, present invention employs following technical schemes:
A kind of Zinc-oxide piezoresistor ageing state lossless detection method of the dielectric spectroscopy based on optimization, including it is following Step:
1) set temperature interval measures the frequency domain response characteristic of Zinc-oxide piezoresistor capacitance C at high temperature;
2) it calculates and drawsWith the relation spectrum of frequency f;
3) it takes under different temperatures TExtreme frequencies f in spectrogramm, it is lnf to draw out ordinatem, horizontal seat It is designated as the spectrogram of 1000/T, and its activation energy is calculated by linear fit, activation energy corresponds to Zinc-oxide piezoresistor grain boundaries Interfacial state energy level.
Further, with the intensification of Zinc-oxide piezoresistor degree of aging, the activation of interfacial state electron trap relaxation It can continuously decrease;The interfacial state energy order reaction Zinc-oxide piezoresistor that Zinc-oxide piezoresistor grain boundaries are obtained by step 3) is old Change state.
Further, the temperature interval set in step 1) is 10 DEG C.
Further, high temperature described in step 1) refers to>120℃.
Further,With in the relation spectrum of frequency f, the π f of angular frequency=2.
Further,With in the relation spectrum of frequency f<103There are an extreme points under Hz frequencies.
Further, with the intensification of Zinc-oxide piezoresistor degree of aging, the activation of interfacial state electron trap relaxation It can be gradually lowered to 0.89eV from 1.01eV.
Compared with the existing technology, the invention has the advantages that:The present invention passes through to electric in Zinc-oxide piezoresistor The frequency domain response of appearance, which advanced optimizes, obtains the relaxation process of the capture of its interfacial state electron trap and launching electronics formation, and leads to The degree of aging for crossing the relaxation activation energy size to assess Zinc-oxide piezoresistor.Any Zinc-oxide piezoresistor exists>120 DEG C of temperature It can be existed by this method under degree<103An extreme point is observed under Hz frequencies, passes through the corresponding frequency of extreme point under different temperatures The activation energy that rate is calculated is the activation energy of interfacial state electron trap relaxation.Its activation of not aged Zinc-oxide piezoresistor Can be 1.01eV, with the intensification of degree of aging, activation energy is gradually lowered to 0.89eV.The interfacial state electron trap relaxation activates The size of energy is to weigh a major criterion of Zinc-oxide piezoresistor ageing state.The invention is to assessing Zinc-oxide piezoresistor Degree of aging have universality.
The present invention by measure Zinc-oxide piezoresistor high temperature under capacitance frequency domain response characteristic, using a kind of new characterization Method extracts interfacial state electron trap relaxation signals from DC conductance cover, and by interfacial state electron trap relaxation Evaluation parameter of the activation energy as Zinc-oxide piezoresistor ageing state.The present invention is easy to operate, flexibly and easily, to test sample It is not damaged, it is the effective means for assessing Zinc-oxide piezoresistor ageing state.
Description of the drawings
Fig. 1 is different ageing step J-E curves;
Fig. 2 is nonlinear factor α and leakage current ILWith the variation of ageing time;
Fig. 3 is under unaged Zinc-oxide piezoresistor high temperatureRelationship with frequency f and high temperature low frequency interface State relaxation activation energy is fitted and calculates view;
Fig. 4 is after direct current accelerated ageing 225 hours under Zinc-oxide piezoresistor high temperatureWith the relationship of frequency f And high temperature low frequency interfacial state relaxation activation energy is fitted and calculates view;
Fig. 5 is variation relation view of the high temperature low frequency interfacial state relaxation activation energy with the direct current accelerated ageing time.
Specific implementation mode
The present invention provides a kind of Zinc-oxide piezoresistor ageing state non-destructive testing side of the dielectric spectroscopy based on optimization Method includes the following steps:
1) with 10 DEG C for interval, measure Zinc-oxide piezoresistor high temperature (>120 DEG C) under capacitance C frequency domain response characteristic;
2) it calculates and drawsWith the relation spectrum of frequency f (angular frequency=2 π f), which exists<103Hz There are an extreme points under frequency;
3) it takes under different temperatures TExtreme frequencies f in spectrogramm, it is lnf to draw out ordinatem, horizontal seat It is designated as the spectrogram of 1000/T, and its activation energy, the interfacial state of corresponding Zinc-oxide piezoresistor grain boundaries are calculated by linear fit Energy level;
4) with the intensification of degree of aging, the activation energy of the interfacial state electron trap relaxation continuously decreases;Pass through interfacial state Energy level can reflect Zinc-oxide piezoresistor ageing state.
Embodiment 1:
Accelerated aging tests are carried out to Zinc-oxide piezoresistor, aging temperature is 135 DEG C, and DC voltage is that current density is 1mA/cm2When 0.8 times of varistor both end voltage, choose unaged, aging 9 hours, 36 hours, 81 hours, 150 hours, Sample after 225 hours carries out frequency domain capacitance response test under voltage-current characteristic and high temperature (140~220 DEG C).
Fig. 1 is the voltage-to-current test result of the Zinc-oxide piezoresistor in different direct current accelerated ageing stages, electric potential gradient E1mASubstantially it does not change.
Fig. 2 is the nonlinear factor α and leakage electricity of the different ageing steps obtained by voltage-to-current test result calculations Flow IL, with the intensification of degree of aging, nonlinear factor is gradually reduced, and leakage current gradually increases.
Zinc-oxide piezoresistor high temperature after Fig. 3 and Fig. 4 is respectively unaged and direct current accelerated ageing 225 hours (140~ 220 DEG C) underWith the relation spectrum of frequency f (angular frequency=2 π f), low frequency (<103Hz) there is interfacial state electronics Trap relaxation process.Under different degree of agings, which is calculated by Arrhenius formula, and is summarized in Table 1.
Table 1
The direct current accelerated ageing time Interfacial state electron trap relaxation activation energy/eV
It is unaged 1.01
Aging 8 hours 0.97
Aging 36 hours 0.94
Aging 81 hours 0.92
Aging 150 hours 0.90
Aging 225 hours 0.89
As can be drawn from Table 1, interfacial state electron trap relaxation activation energy is continuously decreased with the intensification of degree of aging.Always Either zinc interstitial ion neutralizes the anion at interface or the solution of interface oxygen from depletion layer to interfacial migration during changing Absorption, what is ultimately caused is all the reduction of heterointerface state charge, and conduction band bottom is moved closer to so as to cause interfacial state energy level.The relaxation The activation energy of process can be considered the microscopic sdIBM-2+2q.p.approach parameter of Zinc-oxide piezoresistor degree of aging, and due under high temperature/low frequency condition DC conductance is significantly increased, and the relaxation process can not be characterized by dielectric loss/electricity modulus imaginary part/imaginary part of dielectric constant etc., And pass throughInfluence of the method removal DC conductance in frequency domain response can clearly symbolize the relaxation Process.
Result, it is believed that by under high temperatureThe interfacial state electronics characterized with the relation spectrum of frequency is fallen into The size of trap relaxation activation energy can reflect the depth of the degree of aging of Zinc-oxide piezoresistor.

Claims (7)

1. a kind of Zinc-oxide piezoresistor ageing state lossless detection method of dielectric spectroscopy based on optimization, feature exist In including the following steps:
1) set temperature interval measures the frequency domain response characteristic of Zinc-oxide piezoresistor capacitance C at high temperature;
2) it calculates and drawsWith the relation spectrum of frequency f;
3) it takes under different temperatures TExtreme frequencies f in spectrogramm, it is lnf to draw out ordinatem, abscissa is The spectrogram of 1000/T, and its activation energy is calculated by linear fit, activation energy corresponds to the interface of Zinc-oxide piezoresistor grain boundaries State energy level.
2. a kind of Zinc-oxide piezoresistor ageing state of dielectric spectroscopy based on optimization according to claim 1 is lossless Detection method, which is characterized in that with the intensification of Zinc-oxide piezoresistor degree of aging, the work of interfacial state electron trap relaxation Change can continuously decrease;The interfacial state energy order reaction Zinc-oxide piezoresistor of Zinc-oxide piezoresistor grain boundaries is obtained by step 3) Ageing state.
3. a kind of Zinc-oxide piezoresistor ageing state of dielectric spectroscopy based on optimization according to claim 1 is lossless Detection method, which is characterized in that the temperature interval set in step 1) is 10 DEG C.
4. a kind of Zinc-oxide piezoresistor ageing state of dielectric spectroscopy based on optimization according to claim 1 is lossless Detection method, which is characterized in that high temperature described in step 1) refers to>120℃.
5. a kind of Zinc-oxide piezoresistor ageing state of dielectric spectroscopy based on optimization according to claim 1 is lossless Detection method, which is characterized in thatWith in the relation spectrum of frequency f, the π f of angular frequency=2.
6. a kind of Zinc-oxide piezoresistor ageing state of dielectric spectroscopy based on optimization according to claim 1 is lossless Detection method, which is characterized in thatWith in the relation spectrum of frequency f<103There are an extreme values under Hz frequencies Point.
7. a kind of Zinc-oxide piezoresistor ageing state of dielectric spectroscopy based on optimization according to claim 1 is lossless Detection method, which is characterized in that with the intensification of Zinc-oxide piezoresistor degree of aging, the work of interfacial state electron trap relaxation Change can be gradually lowered to 0.89eV from 1.01eV.
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
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CN102103166A (en) * 2010-11-30 2011-06-22 西安交通大学 Method for lossless detection on performance evaluation of ZnO piezoresistor

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110133460A (en) * 2019-05-30 2019-08-16 国网湖南省电力有限公司 The ageing properties of zinc oxide resistance sheet test appraisal procedure

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