CN108511493A - Organic light emitting display panel and preparation method thereof, organic light-emitting display device - Google Patents
Organic light emitting display panel and preparation method thereof, organic light-emitting display device Download PDFInfo
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- CN108511493A CN108511493A CN201810283501.3A CN201810283501A CN108511493A CN 108511493 A CN108511493 A CN 108511493A CN 201810283501 A CN201810283501 A CN 201810283501A CN 108511493 A CN108511493 A CN 108511493A
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/122—Pixel-defining structures or layers, e.g. banks
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/121—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
Abstract
A kind of organic light emitting display panel of offer of the embodiment of the present invention and preparation method thereof, organic light-emitting display device, are related to display technology field.Organic light emitting display panel provided in an embodiment of the present invention includes：Array substrate, pixel defining layer, multiple spacer structures and multiple organic luminescent devices, pixel defining layer and multiple spacer structures are set in array substrate, pixel defining layer has multiple pixel openings, pixel openings are divided into multiple sub-pixels and are open by spacer structure, and the shape of the cross section of spacer structure is inverted trapezoidal；There are one organic luminescent devices for setting in each sub-pixel opening, and each organic luminescent device being arranged in the same pixel openings is used to emit the light of same color；Wherein, organic luminescent device includes anode and at least one organic luminescence function layer, and the organic luminescence function layer for being located at each spacer structure both sides is mutually discrete.Technical scheme of the present invention can improve the display effect of organic light emitting display panel.
Description
Technical field
The present invention relates to display technology fields more particularly to a kind of organic light emitting display panel and preparation method thereof, organic
Luminous display unit.
Background technology
With flourishing for flat-panel screens technology, organic light emitting display panel (Organic Light Emitting
Display, abbreviation OLED) since it is with good characteristics such as self-luminous, high brightness, wide viewing angle, fast reactions, using increasingly
Extensively.
As shown in FIG. 1, FIG. 1 is the schematic cross-section for the organic light emitting display panel that the prior art provides, organic light emission is aobvious
Show that panel includes array substrate 1 ', the pixel defining layer 2 ' being located in array substrate 1 ' and multiple organic luminescent devices 3 ', wherein
There are pixel defining layer 2 ' multiple pixel openings, organic luminescent device 3 ' to be positioned in pixel openings.To make organic light emitting display
Panel realizes that high-resolution is shown, as shown in Figure 1, placing at least two in a pixel openings for emitting same color
Organic luminescent device 3 '.During display, independent control can be carried out to each organic luminescent device 3 ' in a pixel openings
System, and then reach and put forward high-resolution purpose.
The inventors of the present application found that in the organic luminescence function layer for preparing organic luminescent device using inkjet printing technology
When, in a pixel openings, the organic luminescence function layer of adjacent each organic luminescent device 3 ' is inevitably connected with each other,
It is integral structure, can not achieve and be completely independent, so that can interact between organic luminescent device 3 ', it in this way can be significantly
The display effect for weakening organic light emitting display panel, influences the perception of people.
Invention content
A kind of organic light emitting display panel of offer of the embodiment of the present invention and preparation method thereof, organic light-emitting display device, can
To improve the display effect of organic light emitting display panel.
In a first aspect, the embodiment of the present invention provides a kind of organic light emitting display panel, the organic light emitting display panel packet
It includes：
Array substrate is provided with multiple pixel-driving circuits in the array substrate；
Pixel defining layer and multiple spacer structures, the pixel defining layer and the multiple spacer structure are set to the battle array
On row substrate, the pixel defining layer has multiple pixel openings, and the pixel openings are divided into multiple by the spacer structure
Sub-pixel is open, and the shape of the cross section of the spacer structure is inverted trapezoidal；
Multiple organic luminescent devices, setting is and same there are one organic luminescent device in each sub-pixel opening
Each organic luminescent device being arranged in the pixel openings is used to emit the light of same color；
Wherein, the organic luminescent device includes anode and at least one organic luminescence function layer, the anode with it is described
Pixel-driving circuit corresponds electrical connection, and the organic luminescence function layer for being located at each spacer structure both sides is mutually discrete.
Optionally, the width at the top of the spacer structure is more than 3 microns, and the spacer structure is perpendicular to the array
Thickness on orientation substrate is more than 0.3 micron.
Optionally, the material of the spacer structure is the acrylic formed by negative photosensitive resin.
Optionally, the spacer structure is more than 1 micron in the thickness on the array substrate direction.
Optionally, the apex angle of the spacer structure be more than or equal to 40 °, and be less than 90 °.
Optionally, the material of the spacer structure is silicon nitride.
Optionally, the spacer structure is micro- more than or equal to 0.5 in the thickness on the array substrate direction
Rice, and it is less than or equal to 1 micron.
Optionally, the apex angle of the spacer structure be more than or equal to 25 °, and be less than 90 °.
Optionally, the apex angle of the spacer structure be more than or equal to 28 °, and be less than or equal to 30 °.
Optionally, on the array substrate direction, the thickness of the pixel defining layer and the spacer structure
Thickness difference be more than 1 micron.
Optionally, the shape of the pixel openings is triangle, between described there are three settings in each pixel openings
Every structure, each pixel openings are divided into three sub-pixel openings；
Alternatively, the shape of the pixel openings is hexagon, there are six the intervals for setting in each pixel openings
Structure, each pixel openings are divided into six sub-pixel openings；
Alternatively, the shape of the pixel openings is rectangle, there are four the intervals to tie for setting in each pixel openings
Structure, each pixel openings are divided into four sub-pixel openings.
Second aspect, the embodiment of the present invention provide a kind of organic light-emitting display device, the organic light-emitting display device packet
Include the organic light emitting display panel described in any of the above item.
The third aspect, the embodiment of the present invention provide a kind of production method of organic light emitting display panel, the organic light emission
The production method of display panel includes：
Array basal plate is provided, multiple pixel-driving circuits are provided in the array substrate；
Multiple anodes that multiple organic luminescent devices include, the anode and the pixel are formed in the array substrate
Driving circuit corresponds electrical connection；
In the array substrate for foring multiple anodes, multiple spacer structures and pixel defining layer, the picture are formed
There are plain definition layer multiple pixel openings, the spacer structure pixel openings are divided into multiple sub-pixels and are open, each
The corresponding organic luminescent device of sub-pixel opening, and each organic luminescent device being arranged in the same pixel openings
The shape of light for emitting same color, the cross section of the spacer structure is inverted trapezoidal；
In the array substrate for foring multiple spacer structures and the pixel defining layer, vapor deposition forms organic light emission
At least one organic luminescence function layer that device includes is located at the organic luminescence function layer of each spacer structure both sides mutually
It is discrete.
Optionally, in the array substrate for foring multiple anodes, forming multiple spacer structures includes：
In the array substrate for foring multiple anodes, one layer of negative photosensitive resin is coated；
The negative photosensitive resin is covered using mask plate；
The negative photosensitive resin is exposed；
Develop to the negative photosensitive resin after exposure；
The negative photosensitive resin after development is toasted, multiple spacer structures, the spacer structure are formed
Material be acrylic.
Optionally, in the array substrate for foring multiple anodes, forming multiple spacer structures includes：
In the array substrate for foring multiple anodes, deposited silicon nitride layer；
Dry etching is carried out to the silicon nitride layer, forms multiple spacer structures.
An embodiment of the present invention provides a kind of organic light emitting display panel and preparation method thereof, organic light-emitting display device,
Wherein, organic light emitting display panel includes pixel defining layer and multiple spacer structures, and pixel defining layer has multiple pixel openings,
Pixel openings are divided into multiple sub-pixels and are open by spacer structure, although there are one organic light emissions for setting in each sub-pixel opening
Device, and each organic luminescent device being arranged in the same pixel openings is used to emit the light of same color, is steamed passing through
When plating forms organic light emitting functional layer, although evaporation material can be not only deposited in sub-pixel opening, can also it be deposited on positioned at same
On the top of the spacer structure between adjacent subpixels opening in one pixel openings, but due to the cross section of spacer structure
Shape is inverted trapezoidal, so that evaporation material can not be deposited on the side wall of spacer structure, therefore, is deposited on adjacent subpixels
Evaporation material in opening will not be connected with each other, so that the organic luminescence function layer positioned at each spacer structure both sides formed
It is mutually discrete, so as to avoid interacting between organic luminescent device, organic light emitting display face can be effectively improved
The display effect of plate improves the perception of people.
Description of the drawings
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technology description to be briefly described, it should be apparent that, the accompanying drawings in the following description is this hair
Some bright embodiments for those of ordinary skill in the art without having to pay creative labor, can be with
Obtain other attached drawings according to these attached drawings.
Fig. 1 is the schematic cross-section for the organic light emitting display panel that the prior art provides；
Fig. 2 is the vertical view one of organic light emitting display panel provided in an embodiment of the present invention；
Fig. 3 is schematic cross-sections of the Fig. 2 provided in an embodiment of the present invention along the directions AA '；
Fig. 4 is the structural schematic diagram of pixel defining layer provided in an embodiment of the present invention and spacer structure；
Fig. 5 is the schematic cross-section of spacer structure provided in an embodiment of the present invention；
Fig. 6 is the structural schematic diagram of organic luminescent device provided in an embodiment of the present invention；
Fig. 7 is the vertical view two of organic light emitting display panel provided in an embodiment of the present invention；
Fig. 8 is the vertical view three of organic light emitting display panel provided in an embodiment of the present invention；
Fig. 9 is the vertical view of organic light-emitting display device provided in an embodiment of the present invention；
Figure 10 is the production flow diagram of organic light emitting display panel provided in an embodiment of the present invention.
Specific implementation mode
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art
The every other embodiment obtained without creative efforts, shall fall within the protection scope of the present invention.
The embodiment of the present invention provides a kind of organic light emitting display panel, and as shown in Figures 2 and 3, Fig. 2 is the embodiment of the present invention
The vertical view one of the organic light emitting display panel of offer, Fig. 3 are that Fig. 2 provided in an embodiment of the present invention shows along the section in the directions AA '
It is intended to, organic light emitting display panel includes array substrate 1, pixel defining layer 2, multiple spacer structures 3 and multiple organic illuminators
Part 4.Specifically, as shown in Fig. 2, Fig. 3, Fig. 4, Fig. 5 and Fig. 6, Fig. 4 is pixel defining layer provided in an embodiment of the present invention and interval
The structural schematic diagram of structure, Fig. 5 are the schematic cross-section of spacer structure provided in an embodiment of the present invention, and Fig. 6 is that the present invention is implemented
The structural schematic diagram for the organic luminescent device that example provides is provided with multiple pixel-driving circuits 11, pixel definition in array substrate 1
Layer 2 and multiple spacer structures 3 are set in array substrate 1, and pixel defining layer 2 has multiple pixel openings 21, spacer structure 3 will
Pixel openings 21 are divided into multiple sub-pixel openings 210, and the shape of the cross section of spacer structure 3 is inverted trapezoidal, each sub-pixel
There are one organic luminescent devices 4 for setting in opening 210, and each organic luminescent device 4 being arranged in the same pixel openings 21 is used
In the light for emitting same color；Organic luminescent device 4 includes anode 41 and at least one organic luminescence function layer 42, anode
41 are electrically connected with the one-to-one correspondence of pixel-driving circuit 11, are located at the organic luminescence function layer 42 of 3 both sides of each spacer structure mutually
It is discrete.
As shown in figure 5, above-mentioned " shape of the cross section of spacer structure 3 is inverted trapezoidal " refers to the vertex angle theta of spacer structure 3
For acute angle, i.e. the vertex angle theta of spacer structure 3 is more than 0 ° and is less than 90 °.Wherein, the vertex angle theta of spacer structure 3 is smaller, and vapor deposition is formed with
When machine light emitting functional layer 42, evaporation material is difficult in the deposited on sidewalls of spacer structure 3.
Above-mentioned " the organic luminescence function layer 42 for being located at 3 both sides of each spacer structure is mutually discrete " refers to being located at each interval
The organic luminescence function layer 42 of 3 both sides of structure is respectively independent between each other without any connection.If organic luminescent device 4 includes
Multilayer organic luminescence function layer 42, then all organic luminescence function layers 42 its be located at the part of 3 both sides of spacer structure mutually
It is discrete.
When organic light emitting display panel in the embodiment of the present invention is with structure as described above, at least have has as follows
Beneficial effect：
On the one hand, since the pixel defining layer 2 that organic light emitting display panel includes has multiple pixel openings 21, interval knot
Pixel openings 21 are divided into multiple sub-pixel openings 210 by structure 3, and there are one organic light emissions for the 210 interior setting of each sub-pixel opening
Device 4, and each organic luminescent device 4 being arranged in the same pixel openings 21 is used to emit the light of same color, i.e., often
At least two organic luminescent devices 4 for emitting same color light, organic illuminator are provided in a pixel openings 21
Part 4 includes anode 41 and at least one organic luminescence function layer 42, and anode 41 is electrically connected with the one-to-one correspondence of pixel-driving circuit 11,
So as under the premise of 21 number of pixel openings is certain, by each pixel-driving circuit 11 in a pixel openings 21
Each organic luminescent device 4 be independently controlled, and then play the role of carrying high-resolution.Wherein, in each pixel openings 21
It is provided with the specific implementation form of the organic luminescent device 4 of at least two light for emitting same color, the present invention is real
Regular meeting is applied to be illustrated in subsequent content.
On the other hand, when forming organic light emitting functional layer 42 by vapor deposition, although evaporation material can not only be deposited on son
In pixel openings 210, can also be deposited in same pixel openings 21 adjacent subpixels opening 210 between spacer structure
On 3 top, but since the shape of the cross section of spacer structure 3 is inverted trapezoidal, so that evaporation material can not be deposited on
On the side wall of spacer structure 3, therefore, the evaporation material being deposited in adjacent subpixels opening 210 will not be connected with each other, and then be made
The organic luminescence function layer 42 positioned at 3 both sides of each spacer structure that must be formed is mutually discrete, so as to avoid organic light emission
Interacting between device 4 can be effectively improved the display effect of organic light emitting display panel, improve the perception of people.
By the above it is found that the specific set-up mode of spacer structure 3 has very greatly the luminescent properties of organic luminescent device 4
Influence, below the embodiment of the present invention the specific set-up mode of spacer structure 3 is illustrated, it should be noted that it is following
Illustrate to be only for example and non-limiting.
Inventor has found that the width and spacer structure 3 to the top of spacer structure 3 are on 1 direction of array substrate
Thickness carry out reasonably select have a very important significance, concrete reason is, the width and thickness at the top of spacer structure 3
The size of degree when forming organic light emitting functional layer 42 to vapor deposition, has in the adjacent organic luminescent device 4 in same pixel openings 21
The disconnection degree of machine light emitting functional layer 42 has a major impact, and/or, have an impact to the manufacture craft of organic light emitting display panel,
And/or have an impact to aperture opening ratio, the cost etc. of organic light emitting display panel.If for example, the width mistake at the top of spacer structure 3
It is small, the manufacture craft difficulty of organic light emitting display panel can be increased；If the width at the top of spacer structure 3 is excessive, can be unfavorable for
The promotion of the aperture opening ratio of organic light emitting display panel；If the thickness of spacer structure 3 is too small, vapor deposition can be caused to form organic light emission work(
When ergosphere 42, the possibility of the interconnection of organic luminescence function layer 42 in the adjacent organic luminescent device 4 in same pixel openings 21
It is larger, and manufacture craft difficulty is larger；If the thickness of spacer structure 3 is excessive, it can make the cost of organic light emitting display panel
It is larger, and spacer structure 3 can occupy larger area in array substrate 1, under the aperture opening ratio for leading to organic light emitting display panel
Drop, brightness reduce.
Based on the above, in the embodiment of the present invention, optionally, the width at the top of spacer structure 3 is more than 3 microns,
It is more than 0.3 micron in the thickness on 1 direction of array substrate every structure 3.
The material of spacer structure 3 can be any material that can form inverted trapezoidal structure in the embodiment of the present invention.It is optional
The material on ground, spacer structure 3 is the acrylic or silicon nitride formed by negative photosensitive resin, negative photosensitive resin and silicon nitride
It is the material often applied in organic light emitting display panel, making spacer structure 3 using it will not be to organic light emitting display panel
Manufacture craft produce bigger effect.
Inventor has found that make spacer structure 3 due to the use of negative photosensitive resin makes spacer structure 3 with using silicon nitride
Manufacture craft it is different, and then the structure of the spacer structure made respectively using the two 3 is caused to would also vary from.
Illustratively, when the material of spacer structure 3 is the acrylic formed by negative photosensitive resin, following methods can be used
Make spacer structure 3：First, in the array substrate for foring multiple anodes, one layer of negative photosensitive resin is coated；Then, make
Negative photosensitive resin is covered with mask plate；Then, negative photosensitive resin is exposed；Then, to the negative photosensitive after exposure
Resin develops；Finally, the negative photosensitive resin after development is toasted, forms the interval that multiple materials are acrylic and ties
Structure.Since negative photosensitive resin is in exposure process, the light exposure further away from the negative photosensitive resin of array substrate is bigger, more leans on
The light exposure of the negative photosensitive resin of nearly array substrate is smaller, in addition at the light irradiation position of negative photosensitive resin, is developing
Can be retained in the process, light it is not illuminated go out, can be removed in developing process, so that can make in the above manner
The shape for making cross section is the spacer structure 3 of inverted trapezoidal.
Optionally, when the material of spacer structure 3 is the acrylic formed by negative photosensitive resin, spacer structure 3 is hanging down
Directly it is more than 1 micron in the thickness on 1 direction of array substrate, so that during making spacer structure 3, in array substrate
The homogeneity for coating the film layer formed when negative photosensitive resin is good, and manufacture craft difficulty is low, it can be achieved that property is good, and stability is good.
When spacer structure 3 apex angle be more than or equal to 40 °, and less than 90 ° when, negative photosensitive resin is exposed
The technology difficulty of the techniques such as light, development is relatively low, it can be achieved that property is high, and stability is good, the structural homogeneity of the spacer structure 3 of preparation
It is good, be based on this, the embodiment of the present invention select when the material of spacer structure 3 for formed by negative photosensitive resin acrylic when,
Every structure 3 apex angle can be more than or equal to 40 °, and be less than 90 °.
Illustratively, when the material of spacer structure 3 is silicon nitride, following methods can be used and make spacer structure 3：First,
In the array substrate for foring multiple anodes, deposited silicon nitride layer (can pass through the depositions such as PECVD)；Then, to silicon nitride layer
Dry etching is carried out, multiple spacer structures are formed.
It wherein, can be by etching power, etching gas relevant parameter if the concentration of the silicon nitride layer of deposition is consistent
(such as gas density, air pressure etc.) is adjusted, and then the spacer structure 3 that the shape for producing cross section is inverted trapezoidal；If heavy
Gradient concentration technique is used during product silicon nitride layer so that the silicon nitride layer of deposition is dense along the direction far from array substrate 1
Degree gradually increases, then can be performed etching to silicon nitride layer by simple dry etch process, since silicon nitride layer is along array
The direction concentration of substrate 1 is gradually incremented by, therefore when performing etching, and the etching speed of the side far from array substrate 1 is slower, leans on
The etching speed of the side of nearly array substrate 1 is very fast, and the shape so as to form cross section is the spacer structure 3 of inverted trapezoidal.
Optionally, when the material of spacer structure 3 is silicon nitride, spacer structure 3 is on 1 direction of array substrate
Thickness is more than or equal to 0.5 micron, and is less than or equal to 1 micron, so that during making spacer structure, in battle array
On row substrate when deposited silicon nitride, the technology difficulty of deposition is relatively low, it can be achieved that property is good, and the silicon nitride layer stability of formation is good, and
The cost of manufacture craft is relatively low.In addition, inventor has found when forming organic light emitting functional layer using inkjet printing technology, drop
Capacity excessive drop may be caused to cover spacer structure so that the adjacent organic luminescence function layer being located in same pixel openings
Between be connected with each other, cannot achieve mutually it is discrete, and inventor by experiment obtain when spacer structure 3 is perpendicular to array substrate
When thickness on direction is more than or equal to 0.5 micron, it is ensured that drop will not cover spacer structure, advantageously ensure that and be located at
Adjacent organic luminescence function layer in same pixel openings is mutually discrete, also, inventor considers the apex angle when spacer structure
When fixed, the height of spacer structure is higher, and the area of the top and bottom of spacer structure is bigger, i.e., spacer structure is in array base
Bigger area can be occupied on plate, the aperture opening ratio of organic light emitting display panel is caused to decline, and brightness reduces, and therefore, the present invention is real
Applying in example selects spacer structure to be less than or equal to 1 micron in the thickness on 1 direction of array substrate.
When spacer structure 3 apex angle be more than or equal to 25 °, and less than 90 ° when, to silicon nitride layer carry out dry etching
Technology difficulty it is relatively low, it can be achieved that property is high, stability is good, and prepare spacer structure 3 structural homogeneity it is good, be based on this, this
Selected in inventive embodiments when the material of spacer structure 3 for silicon nitride when, the apex angle of spacer structure 3 can be more than or equal to
25 °, and it is less than 90 °.In conjunction with description before it is found that the apex angle of spacer structure 3 is smaller, vapor deposition forms organic light emitting functional layer 42
When, evaporation material is difficult in the deposited on sidewalls of spacer structure 3, therefore, spacer structure 3 is further selected in the embodiment of the present invention
Apex angle be more than or equal to 28 °, and be less than or equal to 30 °.It is formed using inkjet printing technology in addition, inventor also found to work as
When organic luminescence function layer, as above setting also has apparent advantageous effect, specific as follows：On 1 direction of orthogonal array substrate
Thickness it is constant when, the apex angle of spacer structure 3 is smaller, and the space that plane where the side wall of spacer structure 3 and its bottom surrounds is got over
Greatly, which can be used for accommodating liquid when inkjet printing forms organic light emitting functional layer, and then is conducive to reduction drop and covers
The possibility of spacer structure 3 advantageously ensures that the adjacent organic luminescence function layer in same pixel openings is mutually discrete.
Optionally, on 1 direction of array substrate, the difference of the thickness of pixel defining layer 2 and the thickness of spacer structure 3
More than 1 micron.Since usually in organic light emitting display panel, the thickness of pixel defining layer 2 is 1.5 microns~2 microns, because
This, such setting can make the thickness size of spacer structure 3 suitable, on the one hand can be very good to ensure to be located at spacer structure 3
The light emitting functional layer 42 that the vapor deposition of both sides is formed is mutually discrete, on the other hand it is also possible that spacer structure 3 is in array substrate 1
Footprint area it is smaller, be conducive to expand footprint area of the organic luminescent device 4 in array substrate 1, and then be conducive to improve
The aperture opening ratio of organic light emitting display panel.Also, since spacer material can also usually be arranged in pixel defining layer 2, spacer material is main
For supporting mask plate during vapor deposition forms organic light emitting functional layer, when on 1 direction of array substrate, pixel
The difference of the thickness of definition layer 2 and the thickness of spacer structure 3 be more than 1 micron when, if during vapor deposition mask plate accidentally with it is organic
Structure on light emitting display panel collides, rubs, and causes the scratch of the structure in organic light emitting display panel, due to
The restriction of upper thickness so that, will not even if mask plate can only abrade pixel defining layer if surprisingly touching organic light emitting display panel
Spacer structure 3 is abraded, the apex angle of spacer structure 3 will not be made to disappear, ensure that the stability of the structure of spacer structure 3, in turn
It ensure that spacer structure 3 realizes its effect.
In addition, can also be learnt by the foregoing description, it is same for emitting that at least two are provided in each pixel openings 21
The organic luminescent device 4 of kind color, can make under the premise of 21 number of pixel openings is certain, pass through each pixel driver electricity
Road 11 is independently controlled each organic luminescent device 4 in a pixel openings 21, and then plays the role of carrying high-resolution.
Organic illuminator of the embodiment of the present invention to the light for emitting same color being arranged in each pixel openings 21 below
The number of part 4 is illustrated：
In the first instance, as shown in Fig. 2, the shape of pixel openings is rectangle, four are provided in each pixel openings
A spacer structure 3, each pixel openings are divided into four sub- pixel openings so that there are four be used for for setting in each pixel openings
Emit the organic luminescent device 4 of same color.Optionally, four spacer structures 3 each organic luminescent device 4 separated are in ten
Font is arranged, wherein 3 equal one end of each spacer structure connects the geometric center of pixel openings, and the other end connects pixel openings
One side midpoint, such setting can make planting oneself for each organic luminescent device 4 more concentrate, and each organic illuminator
The size of part 4 is closer to, and is conducive to the display effect for improving organic light emitting display panel.
In second example, as shown in fig. 7, Fig. 7 is bowing for organic light emitting display panel provided in an embodiment of the present invention
The shape of view two, pixel openings is hexagon, and there are six spacer structure 3, each pixel openings for the interior setting of each pixel openings
It is divided into six sub- pixel openings so that setting having there are six the light for emitting same color in each pixel openings
Machine luminescent device 4.Optionally, six spacer structures 3 each organic luminescent device 4 separated are in center radiation arrangement, wherein each
3 equal one end of a spacer structure connects the geometric center of pixel openings, and the other end connects a vertex of pixel openings, is arranged such
Planting oneself for each organic luminescent device 4 can be made more to concentrate, and the size of each organic luminescent device 4 more connects
Closely, be conducive to improve the display effect of organic light emitting display panel.
In third example, as shown in figure 8, Fig. 8 is bowing for organic light emitting display panel provided in an embodiment of the present invention
The shape of view three, pixel openings is triangle, and there are three spacer structure 3, each pixel openings for the interior setting of each pixel openings
It is divided into three sub- pixel openings so that setting having there are three the light for emitting same color in each pixel openings
Machine luminescent device 4.Optionally, three spacer structures 3 each organic luminescent device 4 separated are arranged in T-shaped, wherein three
The tie point of spacer structure 3 is the geometric center of pixel openings, and such setting can make occupying for each organic luminescent device 4
Position is more concentrated, and the size of each organic luminescent device 4 is closer to, and is conducive to improve the aobvious of organic light emitting display panel
Show effect.
The embodiment of the present invention remarks additionally to the other structures for including in organic light emitting display panel below.
The particular circuit configurations for the pixel-driving circuit 11 not being arranged in array substrate 1 in the embodiment of the present invention carry out
It limits, those skilled in the art can select according to actual needs.Array substrate 1 generally includes multiple film layers, each film
Layer includes required figure, and then forms pixel-driving circuit 11, not according to the particular circuit configurations of pixel-driving circuit 11
Together, the figure that each film layer includes is also different, and those skilled in the art can also select according to actual needs.It is optional
Ground is provided with multiple connection vias, respectively as shown in figure 3, organic light emitting display panel further includes planarization layer 5 on planarization layer 5
Anode 41 is electrically connected by connecting via with corresponding pixel-driving circuit 11.
As shown in fig. 6, organic luminescent device 4 may include along the anode being cascading far from 1 direction of array substrate
41, hole injection layer 42a, hole transmission layer 42b, luminescent layer 42c, electron transfer layer 42d, electron injecting layer 42e and cathode 43.
Wherein, hole injection layer 42a, hole transmission layer 42b, luminescent layer 42c, electron transfer layer 42d, electron injecting layer 42e are to have
Machine light emitting functional layer 42, the i.e. organic luminescent device 4 include five organic luminescence function layers 42, at this point, the foregoing description " is located at
The organic luminescence function layer 42 of 3 both sides of each spacer structure is mutually discrete " refer to that the hole positioned at 3 both sides of each spacer structure is noted
Enter that layer 42a is mutually discrete, and the hole transmission layer 42b positioned at 3 both sides of each spacer structure is mutually discrete, and is located at each spacer structure
The luminescent layer 42c of 3 both sides is mutually discrete, and the electron transfer layer 42d positioned at 3 both sides of each spacer structure is mutually discrete, and is located at
The electron injecting layer 42e of 3 both sides of each spacer structure is mutually discrete.
It should be noted that not being defined above to the cathode 43 that organic luminescent device 4 includes, optionally, own
The cathode 43 of organic luminescent device 4 is a flood structure, so that the structure of organic light emitting display panel is simple, driving is convenient.
Specifically, in 4 course of work of organic luminescent device, cathode 43 generates electronics, and anode 41 generates hole, in cathode 43
Under electric field action between anode 41, hole is moved by hole injection layer 42a and hole transmission layer 42b to luminescent layer 42c,
Electronics is moved by electron injecting layer 42e and electron transfer layer 42d to luminescent layer 42c, when hole and electronics are in luminescent layer 42c
After meeting, the two is compound to release energy, to make the organic luminescent device 4 emit beam.
Optionally, as shown in figs. 2,7 and 8, organic luminescent device 4 can be divided into：For emitting red organic hair
Optical device 4 (R is expressed as in Fig. 2, Fig. 7 and Fig. 8) (is indicated for emitting the organic luminescent device 4 of green in Fig. 2, Fig. 7 and Fig. 8
For G) and for emitting blue organic luminescent device 4 (being expressed as B in Fig. 2, Fig. 7 and Fig. 8), so that organic light emitting display panel
Realize full-color display.
Based on this, in conjunction with the difference of the shape of the pixel openings in pixel defining layer 2, it is used in organic light emitting display panel
Emit the organic luminescent device 4 of a variety of colors arrangement mode can there are many, the composition of display unit is not yet during display
Together.Below for ease of description, the referred to as red picture of pixel openings for emitting red organic luminescent device 4 will be provided with
Element opening will be provided with and be referred to as green pixel opening for emitting the pixel openings of green organic luminescent device 4, will be arranged
The pixel openings for being useful for the organic luminescent device 4 of transmitting blue are referred to as blue pixel opening.
It is red pixel opening, green in the x-direction with the directions y as shown in Fig. 2, when pixel openings are rectangular in one example
Color pixel is open and blue pixel opening is arranged alternately successively；Optionally, four intervals each organic luminescent device 4 separated
Structure 3 is arranged in cross, at this point, 4 organic luminescent devices 4 in dotted line frame can be used as a display unit, is carried out color
Color is shown.
In another example, as shown in fig. 7, when pixel openings are hexagonal, in the x-direction, it are provided only with red pixel and open
Mouthful, alternatively, being provided only with green pixel opening, alternatively, being provided only with blue pixel opening, red pixel is open, is green in the y-direction
Color pixel is open and blue pixel opening is arranged alternately successively；Optionally, the six interval knots each organic luminescent device 4 separated
Structure 3, at this point, 6 organic luminescent devices 4 in dotted line frame can be used as a display unit, carries out color in center radiation arrangement
Color is shown.
In another example, as shown in figure 8, when pixel openings are triangular in shape, in the x-direction with the directions y, red pixel opens
Mouth, green pixel opening and blue pixel opening are arranged alternately successively.Optionally, as shown in Fig. 2, by each organic luminescent device
4 three spacer structures 3 separated are arranged in T-shaped, at this point, 6 organic luminescent devices 4 in dotted line frame can be used as one
Or two display units, carry out colored display.
In addition, organic light emitting display panel provided in an embodiment of the present invention can be flexibility, or non-flexible.
When organic light emitting display panel is flexible, the substrate of array substrate 1 is flexible substrate, such as (polyamides is sub- by PI
Amine), thin-film package should also be used to the encapsulation of organic luminescent device 4, to meet organic light emitting display panel for flexibility simultaneously
With the encapsulation double requirements of organic luminescent device 4, packaging film may include plural layers, such as can be inorganic+organic+nothing
Three layers of machine or five-layer structure.Wherein, the effect of inorganic layer is to obstruct water oxygen, and the effect of organic layer is that alleviating bending answers
Power.The material of inorganic layer can be silicon nitride or silica etc., and the mode that plated film (for example, PECVD) may be used is formed；Have
The material of machine layer can be organo-silicon compound, aromatic series, diyl benzene, styrene etc..
When organic light emitting display panel is non-flexible, the substrate of array substrate 1 is hard substrates, such as glass, to having
Metal melting encapsulation can be used in the encapsulation of machine luminescent device 4, is packaged by glass powder packaged type, effectively to obstruct the external world
Water, oxygen, avoid caused by due to water, oxygen organic luminescence function layer 42 from failing, advantageously ensure that organic light emitting display panel
Normal luminous.
The embodiment of the present invention provides a kind of organic light-emitting display device, as shown in figure 9, Fig. 9 provides for the embodiment of the present invention
Organic light-emitting display device vertical view, organic light-emitting display device includes the organic light emitting display face described in any of the above item
Plate 100.Organic light-emitting display device provided by the embodiments of the present application can be for example smart mobile phone, wearable intelligent watch,
Intelligent glasses, tablet computer, television set, display, laptop, Digital Frame, navigator, Vehicular display device, e-book
Etc. any product or component with display function.
The embodiment of the present invention also provides a kind of production method of organic light emitting display panel, and as shown in Figure 10, Figure 10 is this
The production flow diagram for the organic light emitting display panel that inventive embodiments provide, the production method of organic light emitting display panel include：
Step S1, array basal plate 1 is provided, multiple pixel-driving circuits 11 are provided in array substrate 1；
Step S2, multiple anodes 41 that multiple organic luminescent devices 4 include, anode 41 and picture are formed in array substrate 1
Plain driving circuit 11 corresponds electrical connection；
Step S3, in the array substrate 1 for foring multiple anodes 41, multiple spacer structures 3 and pixel defining layer are formed
2, there are pixel defining layer 2 multiple pixel openings 21, spacer structure 3 pixel openings are divided into multiple sub-pixel openings 210, often
A sub- pixel openings 210 correspond to an organic luminescent device 4, and each organic luminescent device being arranged in the same pixel openings 21
The shape of 4 light for emitting same color, the cross section of spacer structure 3 is inverted trapezoidal；
Step S4, in the array substrate 1 for foring multiple spacer structures 3 and pixel defining layer 2, vapor deposition forms organic hair
At least one organic luminescence function layer 42 that optical device 4 includes, the organic luminescence function layer 42 for being located at 3 both sides of each spacer structure are equal
It is mutually discrete.
It should be noted that between " shape of the cross section of spacer structure 3 is inverted trapezoidal " refers to as shown in figure 5, above-mentioned
It is acute angle every the apex angle of structure 3, i.e., the apex angle of spacer structure 3 is more than 0 ° and is less than 90 °.Wherein, the apex angle of spacer structure 3 is got over
Small, when vapor deposition forms organic light emitting functional layer 42, evaporation material is difficult in the deposited on sidewalls of spacer structure 3.
Above-mentioned " the organic luminescence function layer 42 for being located at 3 both sides of each spacer structure is mutually discrete " refers to being located at each interval
The organic luminescence function layer 42 of 3 both sides of structure is respectively independent between each other without any connection.If organic luminescent device 4 includes
Multilayer organic luminescence function layer 42, then all organic luminescence function layers 42 its be located at the part of 3 both sides of spacer structure mutually
It is discrete.
In above-mentioned steps S3, " in the array substrate 1 for foring multiple anodes 41, multiple spacer structures 3 and pixel are formed
Definition layer 2 " includes a variety of situations.For example, first in the array substrate for foring multiple anodes, multiple spacer structures are formed,
Then pixel defining layer is formed in the array substrate for foring multiple spacer structures；Alternatively, foring multiple anodes first
Array substrate on, form pixel defining layer, then in the array substrate for foring pixel defining layer, form multiple intervals and tie
Structure；Alternatively, in the array substrate for foring multiple anodes, it is formed simultaneously multiple spacer structures and pixel defining layer.
The material of spacer structure 3 can be any material that can form inverted trapezoidal structure in the embodiment of the present invention.It is optional
The material on ground, spacer structure 3 is the acrylic or silicon nitride formed by negative photosensitive resin, negative photosensitive resin and silicon nitride
It is the material often applied in organic light emitting display panel, making spacer structure 3 using it will not be to organic light emitting display panel
Manufacture craft produce bigger effect.
Inventor has found that make spacer structure 3 due to the use of negative photosensitive resin makes spacer structure 3 with using silicon nitride
Manufacture craft it is different, and then the structure of the spacer structure made respectively using the two 3 is caused to would also vary from.
Illustratively, when the material of spacer structure 3 is the acrylic formed by negative photosensitive resin, following methods can be used
Make spacer structure 3：First, in the array substrate for foring multiple anodes, one layer of negative photosensitive resin is coated；Then, make
Negative photosensitive resin is covered with mask plate；Then, negative photosensitive resin is exposed；Then, to the negative photosensitive after exposure
Resin develops；Finally, the negative photosensitive resin after development is toasted, forms the interval that multiple materials are acrylic and ties
Structure.Since negative photosensitive resin is in exposure process, the light exposure further away from the negative photosensitive resin of array substrate is bigger, more leans on
The light exposure of the negative photosensitive resin of nearly array substrate is smaller, in addition at the light irradiation position of negative photosensitive resin, is developing
Can be retained in the process, light it is not illuminated go out, can be removed in developing process, so that can make in the above manner
The shape for making cross section is the spacer structure 3 of inverted trapezoidal.
Optionally, when the material of spacer structure 3 is the acrylic formed by negative photosensitive resin, spacer structure 3 is hanging down
Directly it is more than 1 micron in the thickness on 1 direction of array substrate, so that during making spacer structure 3, in array substrate
The homogeneity for coating the film layer formed when negative photosensitive resin is good, and manufacture craft difficulty is low, it can be achieved that property is good, and stability is good.
When spacer structure 3 apex angle be more than or equal to 40 °, and less than 90 ° when, negative photosensitive resin is exposed
The technology difficulty of the techniques such as light, development is relatively low, it can be achieved that property is high, and stability is good, the structural homogeneity of the spacer structure 3 of preparation
It is good, be based on this, the embodiment of the present invention select when the material of spacer structure 3 for formed by negative photosensitive resin acrylic when,
Every structure 3 apex angle can be more than or equal to 40 °, and be less than 90 °.
Illustratively, when the material of spacer structure 3 is silicon nitride, following methods can be used and make spacer structure 3：First,
In the array substrate for foring multiple anodes, deposited silicon nitride layer (can pass through the depositions such as PECVD)；Then, to silicon nitride layer
Dry etching is carried out, multiple spacer structures are formed.
It wherein, can be by etching power, etching gas relevant parameter if the concentration of the silicon nitride layer of deposition is consistent
(such as gas density, air pressure etc.) is adjusted, and then the spacer structure 3 that the shape for producing cross section is inverted trapezoidal；If heavy
Gradient concentration technique, i.e. silicon nitride layer is used gradually to increase along the direction concentration far from array substrate 1 during product silicon nitride layer
Height can then perform etching silicon nitride layer by simple dry etch process, since silicon nitride layer is along array substrate 1
Direction concentration is gradually incremented by, therefore when performing etching, and the etching speed of the side far from array substrate 1 is slower, close to array
The etching speed of the side of substrate 1 is very fast, and the shape so as to form cross section is the spacer structure 3 of inverted trapezoidal.
Optionally, when the material of spacer structure 3 is silicon nitride, spacer structure 3 is on 1 direction of array substrate
Thickness is more than or equal to 0.5 micron, and is less than or equal to 1 micron, so that during making spacer structure 3,
In array substrate when deposited silicon nitride, the technology difficulty of deposition is relatively low, it can be achieved that property is good, and the silicon nitride layer stability of formation is good,
And the cost of manufacture craft is relatively low.In addition, inventor has found when inkjet printing forms organic light emitting functional layer, the capacity of drop
It is excessive that drop may be caused to cover spacer structure 3 so as to be located between the adjacent organic luminescence function layer in same pixel openings
Be connected with each other, cannot achieve mutually it is discrete, and inventor by experiment obtain when spacer structure 3 is perpendicular to 1 side of array substrate
When upward thickness is more than or equal to 0.5 micron, it is ensured that drop will not cover spacer structure 3, advantageously ensure that and be located at
Adjacent organic luminescence function layer in same pixel openings is mutually discrete, also, inventor considers the apex angle when spacer structure 3
When fixed, the height of spacer structure 3 is higher, and the area of the top and bottom of spacer structure 3 is bigger, i.e., spacer structure 3 is in battle array
Bigger area can be occupied on row substrate 1, and the aperture opening ratio of organic light emitting display panel is caused to decline, brightness reduces, therefore, this hair
Spacer structure 3 is selected to be less than or equal to 1 micron in the thickness on 1 direction of array substrate in bright embodiment.
When spacer structure 3 apex angle be more than or equal to 25 °, and less than 90 ° when, to silicon nitride layer carry out dry etching
Technology difficulty it is relatively low, it can be achieved that property is high, stability is good, and prepare spacer structure 3 structural homogeneity it is good, be based on this, this
Selected in inventive embodiments when the material of spacer structure 3 for silicon nitride when, the apex angle of spacer structure 3 can be more than or equal to
25 °, and it is less than 90 °.In conjunction with description before it is found that the apex angle of spacer structure 3 is smaller, vapor deposition forms organic light emitting functional layer 42
When, evaporation material is difficult in the deposited on sidewalls of spacer structure 3, therefore, spacer structure 3 is further selected in the embodiment of the present invention
Apex angle be more than or equal to 28 °, and be less than or equal to 30 °.It is formed using inkjet printing technology in addition, inventor also found to work as
When organic luminescence function layer, as above setting also has apparent advantageous effect, specific as follows：On 1 direction of orthogonal array substrate
Thickness it is constant when, the apex angle of spacer structure 3 is smaller, and the space that plane where the side wall of spacer structure 3 and its bottom surrounds is got over
Greatly, which can be used for accommodating liquid when inkjet printing forms organic light emitting functional layer, and then is conducive to reduction drop and covers
The possibility of spacer structure 3 advantageously ensures that the adjacent organic luminescence function layer in same pixel openings is mutually discrete.
You need to add is that may also apply to organic light emitting display about the associated description of organic light emitting display panel before
The production method of panel.
An embodiment of the present invention provides a kind of organic light emitting display panel and preparation method thereof, organic light-emitting display device,
Wherein, organic light emitting display panel includes pixel defining layer and multiple spacer structures, and pixel defining layer has multiple pixel openings,
Pixel openings are divided into multiple sub-pixels and are open by spacer structure, although there are one organic light emissions for setting in each sub-pixel opening
Device, and each organic luminescent device being arranged in the same pixel openings is used to emit the light of same color, is steamed passing through
When plating forms organic light emitting functional layer, although evaporation material can be not only deposited in sub-pixel opening, can also it be deposited on positioned at same
On the top of the spacer structure between adjacent subpixels opening in one pixel openings, but due to the cross section of spacer structure
Shape is inverted trapezoidal, so that evaporation material can not be deposited on the side wall of spacer structure, therefore, is deposited on adjacent subpixels
Evaporation material in opening will not be connected with each other, so that the organic luminescence function layer positioned at each spacer structure both sides formed
It is mutually discrete, so as to avoid interacting between organic luminescent device, organic light emitting display face can be effectively improved
The display effect of plate improves the perception of people.
Finally it should be noted that：The above embodiments are only used to illustrate the technical solution of the present invention., rather than its limitations；To the greatest extent
Present invention has been described in detail with reference to the aforementioned embodiments for pipe, it will be understood by those of ordinary skill in the art that：Its according to
So can with technical scheme described in the above embodiments is modified, either to which part or all technical features into
Row equivalent replacement；And these modifications or replacements, various embodiments of the present invention technology that it does not separate the essence of the corresponding technical solution
The range of scheme.
Claims (15)
1. a kind of organic light emitting display panel, which is characterized in that including：
Array substrate is provided with multiple pixel-driving circuits in the array substrate；
Pixel defining layer and multiple spacer structures, the pixel defining layer and the multiple spacer structure are set to the array base
On plate, there are the pixel defining layer multiple pixel openings, the spacer structure pixel openings are divided into multiple sub- pictures
The shape of element opening, the cross section of the spacer structure is inverted trapezoidal；
Multiple organic luminescent devices, setting is and same described there are one organic luminescent device in each sub-pixel opening
Each organic luminescent device being arranged in pixel openings is used to emit the light of same color；
Wherein, the organic luminescent device includes anode and at least one organic luminescence function layer, the anode and the pixel
Driving circuit corresponds electrical connection, and the organic luminescence function layer for being located at each spacer structure both sides is mutually discrete.
2. organic light emitting display panel according to claim 1, which is characterized in that the width at the top of the spacer structure
More than 3 microns, the spacer structure is more than 0.3 micron in the thickness on the array substrate direction.
3. organic light emitting display panel according to claim 1, which is characterized in that the material of the spacer structure is by bearing
The acrylic that sexy photopolymer resin is formed.
4. organic light emitting display panel according to claim 3, which is characterized in that the spacer structure is perpendicular to described
Thickness on array substrate direction is more than 1 micron.
5. organic light emitting display panel according to claim 3 or 4, which is characterized in that the apex angle of the spacer structure is
More than or equal to 40 °, and it is less than 90 °.
6. organic light emitting display panel according to claim 1, which is characterized in that the material of the spacer structure is nitridation
Silicon.
7. organic light emitting display panel according to claim 6, which is characterized in that the spacer structure is perpendicular to described
Thickness on array substrate direction is more than or equal to 0.5 micron, and is less than or equal to 1 micron.
8. the organic light emitting display panel described according to claim 6 or 7, which is characterized in that the apex angle of the spacer structure is
More than or equal to 25 °, and it is less than 90 °.
9. organic light emitting display panel according to claim 8, which is characterized in that the apex angle of the spacer structure be more than
Or it is equal to 28 °, and it is less than or equal to 30 °.
10. organic light emitting display panel according to claim 1, which is characterized in that perpendicular to the array substrate side
Upwards, the difference of the thickness of the thickness of the pixel defining layer and the spacer structure is more than 1 micron.
11. organic light emitting display panel according to claim 1, which is characterized in that
The shape of the pixel openings is triangle, and there are three the spacer structures for setting in each pixel openings, each
The pixel openings are divided into three sub-pixel openings；
Alternatively, the shape of the pixel openings is hexagon, the spacer structure there are six settings in each pixel openings,
Each pixel openings are divided into six sub-pixel openings；
Alternatively, the shape of the pixel openings is rectangle, there are four the spacer structures for setting in each pixel openings, often
A pixel openings are divided into four sub-pixel openings.
12. a kind of organic light-emitting display device, which is characterized in that including such as organic hair of claim 1~11 any one of them
Light display panel.
13. a kind of production method of organic light emitting display panel, which is characterized in that including：
Array basal plate is provided, multiple pixel-driving circuits are provided in the array substrate；
Multiple anodes that multiple organic luminescent devices include, the anode and the pixel driver are formed in the array substrate
Circuit corresponds electrical connection；
In the array substrate for foring multiple anodes, multiple spacer structures and pixel defining layer are formed, the pixel is fixed
Adopted layer has multiple pixel openings, and the pixel openings are divided into multiple sub-pixels and are open by the spacer structure, each described
The corresponding organic luminescent device of sub-pixel opening, and each organic luminescent device being arranged in the same pixel openings is used for
Emit the light of same color, the shape of the cross section of the spacer structure is inverted trapezoidal；
In the array substrate for foring multiple spacer structures and the pixel defining layer, vapor deposition forms organic luminescent device
Including at least one organic luminescence function layer, the organic luminescence function layer positioned at each spacer structure both sides mutually divides
It is vertical.
14. the production method of organic light emitting display panel according to claim 13, which is characterized in that multiple foring
In the array substrate of the anode, forming multiple spacer structures includes：
In the array substrate for foring multiple anodes, one layer of negative photosensitive resin is coated；
The negative photosensitive resin is covered using mask plate；
The negative photosensitive resin is exposed；
Develop to the negative photosensitive resin after exposure；
The negative photosensitive resin after development is toasted, multiple spacer structures, the material of the spacer structure are formed
Matter is acrylic.
15. the production method of organic light emitting display panel according to claim 13, which is characterized in that multiple foring
In the array substrate of the anode, forming multiple spacer structures includes：
In the array substrate for foring multiple anodes, deposited silicon nitride layer；
Dry etching is carried out to the silicon nitride layer, forms multiple spacer structures.
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