CN108508383A - Hall plate, Hall sensor with adjusting thresholds function and threshold adjustment methods - Google Patents
Hall plate, Hall sensor with adjusting thresholds function and threshold adjustment methods Download PDFInfo
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- CN108508383A CN108508383A CN201810264891.XA CN201810264891A CN108508383A CN 108508383 A CN108508383 A CN 108508383A CN 201810264891 A CN201810264891 A CN 201810264891A CN 108508383 A CN108508383 A CN 108508383A
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- hall
- hall plate
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/07—Hall effect devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/0023—Electronic aspects, e.g. circuits for stimulation, evaluation, control; Treating the measured signals; calibration
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N52/00—Hall-effect devices
Abstract
The present invention provides Hall plate, Hall sensor and threshold adjustment methods with adjusting thresholds function, the problems such as design cost that solves new product in the prior art is excessively high, comparator is more difficult with matching for Hall plate, the bigger error of Hall sensor switching point.Hall plate with adjusting thresholds function includes the output electrode of the driving electrodes and another diagonal upper output voltage on pair of horns added with driving voltage, and coordination electrode V is provided on the line of output electrodeH1And VH2, coordination electrode VH1And VH2Line relative to driving electrodes is symmetrical arranged；Coordination electrode VH1And VH2By electric resistance array respectively with external impressed current source ID1And ID2It is connected；ID1With ID2The sum of be constant C.Using the Hall sensor of above-mentioned Hall plate, zero-crossing comparator is used for the comparator of Bop and Brp in its circuit, such design can simplify circuit design, under the premise of not improving cost, significantly improve the precision of Hall sensor switching point and the signal-to-noise ratio of Hall plate.
Description
Technical field
The invention belongs to technical field of manufacturing semiconductors, it is related to a kind of Hall plate, Hall with adjusting thresholds function and passes
Sensor and threshold adjustment methods.
Background technology
Hall plate is the Sensitive Apparatus of Hall sensor, usually the semiconductor devices of silicon substrate, it and subsequent process circuit
It is integrated on same silicon chip and forms Hall sensor.Hall sensor extensively using with industrial automation technology, detection technique with
And information processing etc..The circuit block diagram of traditional Hall chip architecture and conventional Hall sensor is as depicted in figs. 1 and 2,
Add driving voltage on electrode on a pair of of linea angulata, output voltage is obtained on the electrode on another diagonal line, when magnetic field is vertical
When Hall plate passes through, output voltage changes, and can react the intensity in tested magnetic field, which passes through after amplification
Subsequent comparator carrys out configuration switch point Bon (magnetic is opened a little, transducers output low-level) and Boff, and (magnetic turns off point, sensor
Export high level).But aforesaid way can have the following defects：When needing the Hall sensor switch of different switching points, need
Subsequent comparator circuit is redesigned, to cause the design cost of new product excessively high；And since comparator circuit is separate
Signal Sensitive Apparatus (Hall plate), the matching of comparator and Hall plate is more difficult, therefore also results in Hall sensor switching point
Bigger error influences to use.
Invention content
In view of the above-mentioned deficiencies in the prior art, it is an object of the present invention to provide a kind of Hall plate with adjusting thresholds function,
Hall sensor and threshold adjustment methods can simplify the design of circuit, under the premise of not improving cost, improve hall sensing
The precision of device switching point.
To achieve the above object, technical solution provided by the invention is：
A kind of Hall plate with adjusting thresholds function, including added with driving electrodes of driving voltage and another on pair of horns
The output electrode of diagonal upper output voltage, is characterized in that:
Coordination electrode V is provided on the line of the output electrodeH1And VH2, coordination electrode VH1And VH2Relative to driving electricity
The line of pole is symmetrical arranged；
The coordination electrode VH1And VH2By electric resistance array respectively with external impressed current source ID1And ID2It is connected；The ID1With ID2
The sum of be constant C.
Further, the coordination electrode VH1And VH2Control size of current carried out by the resistance value of the electric resistance array
Adjustment.
Further, to remember, the distance between two output electrode centers is L, and the distance between two coordination electrode centers is N,
When N is closer to L (that is, coordination electrode VH1And VH2The distance between it is bigger), control electric current it is bigger to the change of output voltage,
The power consumption of whole system can be lower.It is defeated in order to ensure but since output electrode and coordination electrode itself all have certain size
Short circuit will not be occurred by going out electrode and coordination electrode, and therefore, the value range of N/L is 0.60~0.85, preferably N/L=0.82 or so
Effect is preferable, such as N/L=0.83.
Further, the size of constant C is related with the power consumption of Hall plate and control accuracy, and should compromise selection；C values are bigger,
Control accuracy is higher, but the power consumption of whole system is bigger.Conversely, power consumption is lower, control accuracy will decline, so as to cause threshold
The error for being worth point is larger.It is therefore preferred that C takes 10uA.
The present invention also provides a kind of Hall sensors with adjusting thresholds function, are characterized in that：Including suddenly
That piece and the comparator that conduction threshold Bop and cutoff threshold Brp are compared；The Hall plate has threshold value tune using above-mentioned
The Hall plate of whole function；The comparator being compared to conduction threshold Bop and cutoff threshold Brp uses zero-crossing comparator.
Meanwhile it present invention provides the threshold adjustment methods of above-mentioned Hall plate, being characterized in that：Including following step
Suddenly：
1) coordination electrode V is set on the line of Hall plate output electrodeH1And VH2, and coordination electrode VH1And VH2Relative to
The line of driving electrodes is symmetrical arranged；Coordination electrode VH1And VH2By electric resistance array respectively with external impressed current source ID1And ID2It is connected,
And ID1With ID2The sum of be constant C；
2) resistance different in metal layer connection electric resistance array is used, to obtain different control electric currents, and then adjusts threshold
Value, i.e. metal layer are as the interconnection line between resistance, when manufacturing corresponding product according to required threshold value, are connected with metal layer
Suitable resistance controls electric current in turn in electric resistance array, to meet design requirement；
Work as ID1=ID2, the coordination electrode VH1And VH2Controlling value to threshold value is zero；I.e. coordination electrode does not control at this time
Threshold point, threshold value zero；But in practical situations, to prevent Hall plate in zero saltus step back and forth, threshold value is not taken as zero.
Work as ID1-ID2>When 0, VH1>VH2, threshold size is by ID1-ID2Size determine, therefore, conduction threshold Bop is by ID1-
ID2It determines；
Work as ID2-ID1>When 0, VH2>VH1, threshold size is by ID2-ID1Size determine, therefore, cutoff threshold Brp is by ID2-
ID1It determines.
The principle of the present invention：
In order to control output voltage, threshold value is adjusted, the Hall plate of different switching points is obtained, is set on the line of output electrode
It is equipped with coordination electrode VH1And VH2, coordination electrode VH1And VH2Line between driving electrodes is symmetrical arranged.Control electricity
Pole VH1And VH2By electric resistance array respectively with external impressed current source ID1And ID2It is connected；And make the current difference poured into coordination electrode
ID1-ID2It meets specific requirement：ID1+ID2=C, ID1-ID2=n, wherein C are constant, for example C takes optimal value 10uA；N is a system
Differential value is arranged, such as (certain n can also take 0 to 10 to 0.5,1,1.5,2,2.5,3,3.5 (uA) ... to represent different threshold values
Between arbitrary value, to obtain the threshold value of arbitrary non-integer, but in the design of Hall sensor, for architecture and convenient for answering
With threshold value generally takes discrete finite point, is similar to resistor series), how many Gauss represented and depend on Hall sheet material by specific n
The structure (thickness and shape) etc. of material, doping concentration and Hall plate.
For example structure shown in Fig. 3, the cornerwise length of Hall plate are 100um, coordination electrode is with output electrode distance
2um, two kinds of electrode widths are 6um, and material is silicon, and N-type epitaxy layer resistance forms Hall plate, thickness 10um, doping concentration
For 2.3 × 10^16 electronics/centimetre ^3, at this moment 0.5uA differential drive currents after tested known to corresponding threshold value be 10 Gausses, i.e.,
Show when there is no magnetic, Hall plate coordination electrode VH1Output voltage be higher than coordination electrode VH2Output voltage, the raised area
It is equivalent to the Hall voltage of 10 gauss magnetic fields generation；Threshold value representated by other difference currents is then the control electric current with 0.5uA
Proportional correspondence threshold value (for different Hall chip architectures and doping concentration, represents different threshold values, but can pass through test
It obtains)；To make Hall plate output signal zero passage, need to add a magnetic field so that VH2=VH1, so as to cause subsequent zero passage
Comparator detects the point, it is believed that magnetic field reaches Bop switching points, to promote chip output switching activity (by controlling electric current and spy
Fixed magnetic field, zero-crossing comparator just can detect that magnetic field reaches threshold value, then cause chip output switching activity).The coordination electrode is logical
It crosses electric resistance array with external impressed current source to be connected, you can meet ID1-ID2The requirement of array, when need to change different threshold values so as to
It when obtaining the Hall plate of different switching points, only need to change one layer of metal layer, electricity different in electric resistance array is connected with metal layer
Resistance, you can obtain the product of different switching points.
Advantages of the present invention：
Using the Hall sensor of Hall plate of the present invention, zero passage ratio can be used in the comparator in circuit for Bop and Brp
Compared with device, when needing the Hall sensor switch of different switching points, without redesigning subsequent comparator circuit；Such design
Circuit design can be simplified, under the premise of not improving cost, be remarkably improved the precision of Hall sensor switching point, and suddenly
The signal-to-noise ratio of your piece.
Description of the drawings
Fig. 1 is the structure chart of conventional Hall piece；
Fig. 2 is the circuit block diagram of conventional Hall sensor；
Fig. 3 is the structure chart of Hall plate of the present invention；
Fig. 4 is the schematic diagram of electric resistance array on Hall plate of the present invention；
Fig. 5 is the circuit block diagram of Hall sensor of the present invention.
Reference numeral is as follows：
1- resistance；2- metal layers.
Specific implementation mode
The present invention is described in further detail below with reference to accompanying drawings and embodiments：
As shown in Figure 3-Figure 5, Hall plate includes driving electrodes on pair of horns added with driving voltage and another diagonally upper defeated
Go out the output electrode of voltage；In order to make Hall plate have the function of adjusting thresholds, coordination electrode is provided on the line of output electrode
VH1And VH2, coordination electrode VH1And VH2Line relative to driving electrodes is symmetrical arranged；Coordination electrode VH1And VH2Pass through Resistor Array Projector
Row respectively with external impressed current source ID1And ID2It is connected, and makes ID1With ID2The sum of be constant C.When needing to change different threshold values
It when obtaining the Hall plate of different switching points, only need to change one layer of metal layer 2, electricity different in electric resistance array is connected with metal layer 2
Resistance 1 can be obtained the Hall plate of different switching points.As shown in figure 4, each resistance is connected by metal layer 2 in electric resistance array, such as
The connection relation of each resistance 1 need to be changed, can be adjusted by required resistance sizes, extremely by 2 wire jumper of corresponding metal layer
Dotted line position in figure continues through other devices (such as metal-oxide-semiconductor) conducting, to obtain suitable control electric current.
Using the above-mentioned Hall sensor with adjusting thresholds Hall plate, it is used for conduction threshold Bop in circuit
Zero-crossing comparator can be used with the cutoff threshold Brp comparators being compared.
The threshold adjustment methods of above-mentioned Hall plate：
1) coordination electrode V is provided on the line of output electrodeH1And VH2, coordination electrode VH1And VH2Relative to driving electricity
The line of pole is symmetrical arranged；Coordination electrode VH1And VH2By electric resistance array respectively with external impressed current source ID1And ID2It is connected, and ID1
With ID2The sum of be constant C；
Wherein, coordination electrode VH1And VH2The distance between it is bigger, control electric current it is bigger to the change of output voltage, entirely
The power consumption of system is lower；
Such as：Cornerwise length where Hall plate output electrode is 100um, and it is diagonal that two output electrodes are located at this
The width of the endpoint of line, output electrode is 6um, and coordination electrode is located on the line of output electrode, coordination electrode to adjacent output
The distance of electrode is 2um, and the width of coordination electrode is 6um, and the distance N of two electrode centers is 78um in such coordination electrode,
The distance L of two electrode centers is 94um, N/L=78/94=0.83 in output electrode；In the case, control electric current is to defeated
The change for going out voltage is larger, and power consumption is smaller.
2) according to the different switching point of Hall sensor subsequent conditioning circuit, resistance different in electric resistance array is connected with metal layer
Different control electric currents is can be obtained, and then is adjusted to required threshold value；
Work as ID1=ID2, the coordination electrode VH1And VH2Controlling value to threshold value is zero, i.e., coordination electrode does not control at this time
Threshold point, threshold value zero；But in practical situations, to prevent Hall plate in zero saltus step back and forth, threshold value is not taken as zero.
Work as ID1-ID2>When 0, VH1>VH2, threshold size is by ID1-ID2Size determine, therefore, conduction threshold Bop is by ID1-
ID2It determines；
Work as ID2-ID1>When 0, VH2>VH1, threshold size is by ID2-ID1Size determine, therefore, cutoff threshold Brp is by ID2-
ID1It determines.
The above description is merely a specific embodiment, but scope of protection of the present invention is not limited thereto, any
Those familiar with the art can readily occur in various equivalent modifications or replace in technical scope disclosed by the invention
It changes, these modifications or substitutions should be covered by the protection scope of the present invention.
Claims (7)
1. a kind of Hall plate with adjusting thresholds function, including added with the driving electrodes of driving voltage and another pair on pair of horns
The output electrode of output voltage on angle, it is characterised in that：
Coordination electrode V is provided on the line of the output electrodeH1And VH2, coordination electrode VH1And VH2Relative to driving electrodes
Line is symmetrical arranged；
The coordination electrode VH1And VH2By electric resistance array respectively with external impressed current source ID1And ID2It is connected；The ID1With ID2The sum of
For constant C.
2. the Hall plate according to claim 1 with adjusting thresholds function, it is characterised in that：The coordination electrode VH1With
VH2Control size of current be adjusted by the resistance value of the electric resistance array.
3. the Hall plate according to claim 2 with adjusting thresholds function, it is characterised in that：The value range of N/L is
0.60~0.85, wherein L is the distance between two output electrode centers, and N is the distance between two coordination electrode centers.
4. according to any Hall plates with adjusting thresholds function of claim 1-3, it is characterised in that：C is 10uA.
5. the Hall plate according to claim 4 with adjusting thresholds function, it is characterised in that：N/L=0.83.
6. a kind of Hall sensor with adjusting thresholds function, it is characterised in that：Including Hall plate and to conduction threshold Bop and
The comparator that cutoff threshold Brp is compared；
The Hall plate uses the Hall plate according to any one of claims 1 to 5 with adjusting thresholds function；
The comparator being compared to conduction threshold Bop and cutoff threshold Brp uses zero-crossing comparator.
7. the threshold adjustment methods of any Hall plates of claim 1-5, which is characterized in that include the following steps：
1) coordination electrode V is set on the line of Hall plate output electrodeH1And VH2, and by coordination electrode VH1And VH2Relative to drive
The line of moving electrode is symmetrical arranged；Coordination electrode VH1And VH2By electric resistance array respectively with external impressed current source ID1And ID2It is connected, and
ID1With ID2The sum of be constant C；
2) resistance different in metal layer connection electric resistance array is used, to obtain different control electric currents, and then adjusts threshold value；
Work as ID1=ID2, the coordination electrode VH1And VH2Controlling value to threshold value is zero；
Work as ID1-ID2>When 0, VH1>VH2, threshold size is by ID1-ID2Size determine, therefore, conduction threshold Bop is by ID1-ID2Certainly
It is fixed；
Work as ID2-ID1>When 0, VH2>VH1, threshold size is by ID2-ID1Size determine, therefore, cutoff threshold Brp is by ID2-ID1Certainly
It is fixed.
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| CN201810264891.XA CN108508383A (en) | 2018-03-28 | 2018-03-28 | Hall plate, Hall sensor with adjusting thresholds function and threshold adjustment methods |
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| CN201810264891.XA CN108508383A (en) | 2018-03-28 | 2018-03-28 | Hall plate, Hall sensor with adjusting thresholds function and threshold adjustment methods |
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Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4011469A (en) * | 1973-07-09 | 1977-03-08 | U.S. Philips Corporation | Hall effect-switching device |
| JPH03252578A (en) * | 1990-03-02 | 1991-11-11 | Toshiba Corp | Magnetic detecting device |
| CN1561550A (en) * | 2001-10-01 | 2005-01-05 | 旭化成微系统株式会社 | Hall device and magnetic sensor |
| US20090315575A1 (en) * | 2007-09-28 | 2009-12-24 | Sayaka Yoshioka | Sensor threshold circuit |
| CN102636761A (en) * | 2011-02-08 | 2012-08-15 | 英飞凌科技股份有限公司 | Low offset spinning current hall plate and method to operate it |
| JP2013130543A (en) * | 2011-12-22 | 2013-07-04 | Asahi Kasei Electronics Co Ltd | Magnetic hall sensor |
| CN107390761A (en) * | 2017-07-31 | 2017-11-24 | 南京邮电大学 | A kind of CMOS integrated hall sensorses temperature-compensation circuit |
| CN107404313A (en) * | 2016-05-20 | 2017-11-28 | 霍尼韦尔国际公司 | Hall switch with adaptive threshold |
| CN208000371U (en) * | 2018-03-28 | 2018-10-23 | 中国科学院西安光学精密机械研究所 | Hall plate with adjusting thresholds function and Hall sensor |
-
2018
- 2018-03-28 CN CN201810264891.XA patent/CN108508383A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4011469A (en) * | 1973-07-09 | 1977-03-08 | U.S. Philips Corporation | Hall effect-switching device |
| JPH03252578A (en) * | 1990-03-02 | 1991-11-11 | Toshiba Corp | Magnetic detecting device |
| CN1561550A (en) * | 2001-10-01 | 2005-01-05 | 旭化成微系统株式会社 | Hall device and magnetic sensor |
| US20090315575A1 (en) * | 2007-09-28 | 2009-12-24 | Sayaka Yoshioka | Sensor threshold circuit |
| CN102636761A (en) * | 2011-02-08 | 2012-08-15 | 英飞凌科技股份有限公司 | Low offset spinning current hall plate and method to operate it |
| JP2013130543A (en) * | 2011-12-22 | 2013-07-04 | Asahi Kasei Electronics Co Ltd | Magnetic hall sensor |
| CN107404313A (en) * | 2016-05-20 | 2017-11-28 | 霍尼韦尔国际公司 | Hall switch with adaptive threshold |
| CN107390761A (en) * | 2017-07-31 | 2017-11-24 | 南京邮电大学 | A kind of CMOS integrated hall sensorses temperature-compensation circuit |
| CN208000371U (en) * | 2018-03-28 | 2018-10-23 | 中国科学院西安光学精密机械研究所 | Hall plate with adjusting thresholds function and Hall sensor |
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