CN108490478B - Beam measuring fast wire scanning device - Google Patents
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- CN108490478B CN108490478B CN201810293828.9A CN201810293828A CN108490478B CN 108490478 B CN108490478 B CN 108490478B CN 201810293828 A CN201810293828 A CN 201810293828A CN 108490478 B CN108490478 B CN 108490478B
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- 230000008878 coupling Effects 0.000 claims abstract description 28
- 238000010168 coupling process Methods 0.000 claims abstract description 28
- 238000005859 coupling reaction Methods 0.000 claims abstract description 28
- 230000007246 mechanism Effects 0.000 claims abstract description 24
- 238000012546 transfer Methods 0.000 claims abstract description 21
- 238000005259 measurement Methods 0.000 claims abstract description 16
- 230000005540 biological transmission Effects 0.000 claims abstract description 10
- 125000006850 spacer group Chemical group 0.000 claims description 12
- 210000004907 gland Anatomy 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 238000007789 sealing Methods 0.000 abstract description 2
- 238000001514 detection method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 238000012544 monitoring process Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
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Abstract
本发明提供一种束流测量快丝扫描装置，包括：驱动机构、支撑转接机构、传动机构和摆针测量装置；所述驱动机构包括电机和磁耦合旋转导入器；所述支撑转接机构包括：转接法兰、电机固定架、支撑架和支撑板；所述传动机构包括转动轴和联轴器，所述摆针测量装置包括摆针、摇臂和倾角轴。本装置能够在保证密封的前提下，将电机提供的动力经由轴承传递至法兰的另一端，并最终将轴承的转动转化为摆动，使摆针快速往复摆动，性能可靠，扫描速度快。
The invention provides a beam current measurement fast wire scanning device, which includes: a driving mechanism, a support transfer mechanism, a transmission mechanism and a pendulum measuring device; the drive mechanism includes a motor and a magnetic coupling rotary introducer; the support transfer mechanism It includes: an adapter flange, a motor fixing frame, a support frame and a support plate; the transmission mechanism includes a rotating shaft and a coupling; the swing needle measurement device includes a swing needle, a rocker arm and an inclination axis. This device can transmit the power provided by the motor to the other end of the flange through the bearing while ensuring sealing, and finally converts the rotation of the bearing into swing, making the pendulum needle swing back and forth quickly, with reliable performance and fast scanning speed.
Description
技术领域Technical field
本发明涉及离子束流检测以及光束线监测领域，尤其涉及一种束流测量快丝扫描装置。The invention relates to the fields of ion beam current detection and beam line monitoring, and in particular to a beam current measurement fast wire scanning device.
背景技术Background technique
在离子束流检测中，通常采用法拉第筒进行束流强度的检测，这种拦截式测量方法虽然可以比较准确地测量束流强度，但是不利于调束和运行过程中监测束流传输各关键位置上束流强度的变化，因此实现束流诊断的非截断性检测是很有意义的；通过该装置扫描线可以沿着垂直于离子飞行的方向快速运动，用以检测离子流强度变化等数据，由于其为以快速摆动的单丝，不会对束流的形状、轨迹等的产生影响。In ion beam detection, a Faraday tube is usually used to detect the beam intensity. Although this interception measurement method can measure the beam intensity more accurately, it is not conducive to monitoring the key positions of the beam transmission during beam adjustment and operation. It is very meaningful to realize the change of beam intensity on the beam, so it is very meaningful to realize the non-interruption detection of beam diagnosis; through this device, the scanning line can move quickly along the direction perpendicular to the ion flight to detect the changes of ion intensity and other data. Because it is a rapidly swinging monofilament, it will not affect the shape and trajectory of the beam.
在光束线监测中，丝扫描型位置探测器(WBPM)是指利用光敏丝测量X射线位置的一类探测器(又称光敏丝型扫描探测器)，该装置通过固定在框架上的光敏丝，以及平行的偏压极板，并通过导线接到外部接线柱上，形成回路；当同步光通过XBPM时，光敏丝受到光子照射，由于光电效应，表面发射出光电子，光电子被偏压极板收集，并得以探测到电流信号，经过对信号的处理可以得到，光束的位置以及分布以及同步光斑的位置变化信息等数据。现有技术一般通过皮带转动作为驱动装置，污染严重，性能不可靠，因此为束流测量的需要，设计一种具有优良的稳定性、可靠性以及快速的束流测量快丝扫描驱动装置就变得尤为重要。In beam line monitoring, the wire scanning position detector (WBPM) refers to a type of detector that uses photosensitive wires to measure the position of X-rays (also known as photosensitive wire scanning detectors). The device uses photosensitive wires fixed on the frame. , and parallel bias plates, and are connected to the external terminals through wires to form a loop; when the synchronized light passes through the The current signal is collected and detected. After processing the signal, data such as the position and distribution of the beam and the position change information of the synchronized light spot can be obtained. The existing technology generally uses belt rotation as the driving device, which causes serious pollution and unreliable performance. Therefore, to meet the needs of beam measurement, it is necessary to design a fast wire scanning drive device for beam measurement with excellent stability, reliability and speed. is particularly important.
发明内容Contents of the invention
根据上述提出的技术问题，而提供一种性能稳定、可靠性高、扫描速度快的束流测量快丝扫描装置。According to the technical problems raised above, a beam current measurement fast wire scanning device with stable performance, high reliability and fast scanning speed is provided.
本发明采用的技术手段如下：The technical means adopted in the present invention are as follows:
一种束流测量快丝扫描装置，包括：驱动机构、支撑转接机构、传动机构和摆针测量装置；A beam current measurement fast wire scanning device, including: a driving mechanism, a support transfer mechanism, a transmission mechanism and a pendulum needle measurement device;
所述驱动机构包括电机和磁耦合旋转导入器；所述支撑转接机构包括：转接法兰、电机固定架、支撑架和支撑板；所述传动机构包括转动轴和联轴器，所述摆针测量装置包括摆针、摇臂和倾角轴；The driving mechanism includes a motor and a magnetically coupled rotary introducer; the support transfer mechanism includes: a transfer flange, a motor fixing frame, a support frame and a support plate; the transmission mechanism includes a rotating shaft and a coupling, and the The pendulum needle measuring device includes a pendulum needle, a rocker arm and an inclination axis;
所述电机通过第一联轴器与所述磁耦合旋转导入器一端相连，所述磁耦合旋转导入器另一端穿过所述转接法兰与第二联轴器相连，所述磁耦合旋转导入器的法兰与所述转接法兰的转接端相连，所述电机通过螺钉固接于所述电机固定架，所述电机固定架通过螺钉固接于所述转接法兰，所述支撑架通过螺钉固接于所述转接法兰的另一端，固定摆针测量装置的第一支撑板和第二支撑板通过螺钉固接于所述支撑架的端部；The motor is connected to one end of the magnetic coupling rotary introducer through a first coupling, and the other end of the magnetic coupling rotary introducer is connected to the second coupling through the adapter flange. The magnetic coupling rotary introducer The flange of the introducer is connected to the transfer end of the transfer flange, the motor is fixed to the motor fixing frame through screws, and the motor fixing frame is fixed to the transfer flange through screws. The support frame is fixed to the other end of the adapter flange with screws, and the first support plate and the second support plate of the fixed pendulum needle measuring device are fixed to the end of the support frame with screws;
所述第二联轴器另一端与第一转动轴相连，所述第一转动轴另一端穿过所述第一支撑板深入到轴承固定架内，第二转动轴深入到所述轴承固定架另一端，所述第一转动轴与所述第二转动轴通过轴承连接，所述摇臂的一端与所述第二转动轴相连，所述摇臂另一端通过销轴与倾角轴相连，所述倾角轴穿过所述第一支撑板和第二支撑板通过轴承Ⅳ与所述摆针相连。The other end of the second coupling is connected to the first rotating shaft, the other end of the first rotating shaft passes through the first support plate and goes deep into the bearing holder, and the second rotating shaft goes deep into the bearing holder. At the other end, the first rotation axis and the second rotation axis are connected through a bearing, one end of the rocker arm is connected to the second rotation axis, and the other end of the rocker arm is connected to the inclination axis through a pin, so The inclination axis passes through the first support plate and the second support plate and is connected to the swing pin through bearing IV.
进一步地，所述转接法兰上设有两个用于连接电极的电极接口。Further, the adapter flange is provided with two electrode interfaces for connecting electrodes.
进一步地，所述第一支撑板和第二支撑板通过连接杆加固。Further, the first support plate and the second support plate are reinforced by connecting rods.
进一步地，所述第一转动轴穿过轴承固定架内的一对轴承Ⅰ，所述轴承Ⅰ中间设有隔环Ⅰ，所述第二转动轴穿过轴承固定架内的一对轴承Ⅱ，所述轴承Ⅱ中间设有隔环Ⅱ，所述摇臂与销轴连接处两端分别设有轴承Ⅲ与隔环Ⅲ。Further, the first rotating shaft passes through a pair of bearings I in the bearing holder, a spacer ring I is provided in the middle of the bearing I, and the second rotating shaft passes through a pair of bearings II in the bearing holder, There is a spacer ring II in the middle of the bearing II, and a bearing III and a spacer ring III are respectively provided at both ends of the connection between the rocker arm and the pin.
进一步地，所述摇臂与第一转动轴之间设有压盖。Further, a gland is provided between the rocker arm and the first rotation axis.
进一步地，在第一支撑板设有开孔的面上，以水平面为x轴，摆针针头部与x轴所成夹角，即摆动范围为-8.5°≤α≤96.7°。Further, on the surface with the opening on the first support plate, taking the horizontal plane as the x-axis, the angle formed by the head of the pendulum needle and the x-axis, that is, the swing range is -8.5°≤α≤96.7°.
进一步地，所述摆针之间的扫描丝为单丝。摆针材料为无氧铜或SUS304不锈钢。Further, the scanning wire between the swing pins is a single wire. The swing pin material is oxygen-free copper or SUS304 stainless steel.
本发明具有以下优点：The invention has the following advantages:
1、本装置能够在保证密封的前提下，将电机提供的动力经由轴承传递至法兰的另一端，并最终将轴承的转动转化为摆动，使摆针快速往复摆动，性能可靠，扫描速度快。1. This device can transmit the power provided by the motor to the other end of the flange through the bearing while ensuring sealing, and finally convert the rotation of the bearing into swing, so that the pendulum needle swings back and forth quickly, with reliable performance and fast scanning speed. .
2、在法兰上配有电极接口连接法兰一端的丝敏线与电极板形成回路，完成检测功能，结构简单，检测精准，安装方便。2. The flange is equipped with an electrode interface to connect the silk sensitive wire at one end of the flange and the electrode plate to form a loop to complete the detection function. It has a simple structure, accurate detection and easy installation.
基于上述理由本发明可在束流检测领域广泛推广。Based on the above reasons, the present invention can be widely promoted in the field of beam detection.
附图说明Description of the drawings
为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图做以简单地介绍，显而易见地，下面描述中的附图是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动性的前提下，还可以根据这些附图获得其他的附图。In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that need to be used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings in the following description These are some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without exerting any creative effort.
图1为本发明束流测量快丝扫描装置结构示意图。Figure 1 is a schematic structural diagram of a fast wire scanning device for beam current measurement according to the present invention.
图2为本发明束流测量快丝扫描装置传动部分及摆针部分局部放大示意图。Figure 2 is a partial enlarged schematic diagram of the transmission part and the pendulum needle part of the fast wire scanning device for beam current measurement according to the present invention.
图3为本发明整体结构俯视图。Figure 3 is a top view of the overall structure of the present invention.
图4为本发明整体结构主视图。Figure 4 is a front view of the overall structure of the present invention.
图5为本发明侧视图即摆针运动轨迹示意图。Figure 5 is a side view of the present invention, that is, a schematic diagram of the motion trajectory of the swing needle.
图6为图4沿A-A剖面图。Figure 6 is a cross-sectional view taken along line A-A in Figure 4 .
图7为本发明磁耦合旋转导入器结构示意图。Figure 7 is a schematic structural diagram of the magnetic coupling rotary introducer of the present invention.
图中：1、电机，2、磁耦合旋转导入器，3、第一联轴器，4、法兰，5、电机固定架，6、第二联轴器，7、第一转动轴，8、支撑架，9、摆针，10、第一支撑板，11、连接杆，12、第二支撑板，13、倾角轴，14、摇臂，15、第二转动轴，16、轴承固定架，17、压盖，18、销轴，19、轴承Ⅰ，20、隔环Ⅰ，21、轴承Ⅱ，22、隔环Ⅱ、23、轴承Ⅲ，24、隔环Ⅲ，25、轴承Ⅳ。In the picture: 1. Motor, 2. Magnetic coupling rotary introducer, 3. First coupling, 4. Flange, 5. Motor holder, 6. Second coupling, 7. First rotating shaft, 8 , Support frame, 9. Swing pin, 10. First support plate, 11. Connecting rod, 12. Second support plate, 13. Inclination axis, 14. Rocker arm, 15. Second rotation axis, 16. Bearing holder , 17. Gland, 18. Pin, 19. Bearing I, 20. Spacer ring I, 21. Bearing II, 22. Spacer ring II, 23. Bearing III, 24. Spacer ring III, 25. Bearing IV.
具体实施方式Detailed ways
为使本发明实施例的目的、技术方案和优点更加清楚，下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments These are some embodiments of the present invention, rather than all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of the present invention.
如图1-6所示，一种束流测量快丝扫描装置，包括：驱动机构，支撑转接机构，传动机构和摆针测量装置；As shown in Figure 1-6, a beam current measurement fast wire scanning device includes: a driving mechanism, a support transfer mechanism, a transmission mechanism and a pendulum measuring device;
所述驱动机构包括电机1和磁耦合旋转导入器2(如图7所示)；所述支撑转接机构包括：转接法兰4，电机固定架5、支撑架8和支撑板；所述传动机构包括转动轴、联轴器，所述摆针测量装置包括摆针9、摇臂14和倾角轴13；The driving mechanism includes a motor 1 and a magnetic coupling rotary introducer 2 (as shown in Figure 7); the support transfer mechanism includes: an transfer flange 4, a motor fixing frame 5, a support frame 8 and a support plate; The transmission mechanism includes a rotating shaft and a coupling. The swing needle measuring device includes a swing needle 9, a rocker arm 14 and an inclination axis 13;
所述电机1通过第一联轴器3与所述磁耦合旋转导入器2一端相连，所述磁耦合旋转导入器2另一端穿过所述转接法兰4与第二联轴器6相连，所述磁耦合旋转导入器的法兰与所述转接法兰4的转接端相连，所述电机1通过螺钉固接于所述电机固定架5，所述电机固定架5通过螺钉固接于所述转接法兰4，所述支撑架8通过螺钉固接于所述转接法兰4的另一端，固定摆针测量装置的第一支撑板10和第二支撑板12通过螺钉固接于所述支撑架8的端部；The motor 1 is connected to one end of the magnetic coupling rotary introducer 2 through the first coupling 3, and the other end of the magnetic coupling rotary introducer 2 passes through the adapter flange 4 and is connected to the second coupling 6 , the flange of the magnetic coupling rotary introducer is connected to the transfer end of the transfer flange 4, the motor 1 is fixed to the motor fixing frame 5 through screws, and the motor fixing frame 5 is fixed through screws. Connected to the adapter flange 4, the support frame 8 is fixed to the other end of the adapter flange 4 through screws, and the first support plate 10 and the second support plate 12 of the swing needle measuring device are fixed through screws. Fixed to the end of the support frame 8;
所述第二联轴器6另一端与第一转动轴7相连，所述第一转动轴7另一端穿过所述第一支撑板10深入轴承固定架16，第二转动轴15深入所述轴承固定架16另一端，所述第一转动轴7与所述第二转动15轴通过轴承连接，所述摇臂14的一端连接于所述第二转动轴15，所述摇臂14另一端通过销轴18与倾角轴13相连，所述倾角轴13穿过所述第一支撑板10和第二支撑板12通过轴承Ⅳ25与所述摆针9相连。The other end of the second coupling 6 is connected to the first rotating shaft 7. The other end of the first rotating shaft 7 passes through the first support plate 10 and goes deep into the bearing holder 16. The second rotating shaft 15 goes deep into the bearing holder 16. At the other end of the bearing holder 16, the first rotation axis 7 and the second rotation axis 15 are connected through bearings. One end of the rocker arm 14 is connected to the second rotation axis 15, and the other end of the rocker arm 14 The pin 18 is connected to the inclination axis 13, and the inclination axis 13 passes through the first support plate 10 and the second support plate 12 and is connected to the swing pin 9 through the bearing IV25.
所述转接法兰4上还设有两个用于连接电极的电极接口，负责把信号线接入到真空腔体内部。The transfer flange 4 is also provided with two electrode interfaces for connecting electrodes, which are responsible for connecting signal lines to the interior of the vacuum chamber.
所述第一支撑板10和第二支撑板12通过连接杆11加固。The first support plate 10 and the second support plate 12 are reinforced by connecting rods 11 .
所述第一转动轴7穿过轴承固定架16内的一对轴承Ⅰ19，所述轴承Ⅰ19中间设有隔环Ⅰ20，所述第二转动轴15穿过轴承固定架16内的一对轴承Ⅱ21，所述轴承Ⅱ21中间设有隔环Ⅱ22，所述摇臂14与销轴18连接处两端分别设有轴承Ⅲ23与隔环Ⅲ24。The first rotating shaft 7 passes through a pair of bearings I19 in the bearing holder 16. A spacer ring I20 is provided in the middle of the bearing 119. The second rotating shaft 15 passes through a pair of bearings II21 in the bearing holder 16. , a spacer ring II22 is provided in the middle of the bearing II21, and a bearing III23 and a spacer ring III24 are respectively provided at both ends of the connection between the rocker arm 14 and the pin 18.
所述摇臂14与第一转动轴7之间设有压盖17。A gland 17 is provided between the rocker arm 14 and the first rotating shaft 7 .
在第一支撑板10设有开孔的面上，以水平面为x轴，摆针9针头部与x轴所成夹角，即摆动范围为-8.5°≤α≤96.7°。On the surface of the first support plate 10 with the opening, taking the horizontal plane as the x-axis, the angle formed by the head of the pendulum pin 9 and the x-axis, that is, the swing range is -8.5°≤α≤96.7°.
所述摆针之间的扫描丝为单丝，一般采用0.1mm的镀金钨丝，摆针材料为无氧铜或SUS304不锈钢。The scanning wire between the swing pins is a single wire, generally using 0.1mm gold-plated tungsten wire, and the swing pin material is oxygen-free copper or SUS304 stainless steel.
最后应说明的是：以上各实施例仅用以说明本发明的技术方案，而非对其限制；尽管参照前述各实施例对本发明进行了详细的说明，本领域的普通技术人员应当理解：其依然可以对前述各实施例所记载的技术方案进行修改，或者对其中部分或者全部技术特征进行等同替换；而这些修改或者替换，并不使相应技术方案的本质脱离本发明各实施例技术方案的范围。Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention, but not to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: The technical solutions described in the foregoing embodiments can still be modified, or some or all of the technical features can be equivalently replaced; and these modifications or substitutions do not deviate from the essence of the corresponding technical solutions from the technical solutions of the embodiments of the present invention. scope.
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