CN108471042A - Fixed pulse width intracavity double frequency ultraviolet laser and operating method - Google Patents
Fixed pulse width intracavity double frequency ultraviolet laser and operating method Download PDFInfo
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- CN108471042A CN108471042A CN201810388819.8A CN201810388819A CN108471042A CN 108471042 A CN108471042 A CN 108471042A CN 201810388819 A CN201810388819 A CN 201810388819A CN 108471042 A CN108471042 A CN 108471042A
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
- H01S3/108—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
- H01S3/109—Frequency multiplication, e.g. harmonic generation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
- H01S3/1123—Q-switching
- H01S3/117—Q-switching using intracavity acousto-optic devices
Abstract
The invention discloses a kind of fixed pulse width intracavity double frequency ultraviolet laser and operating methods, including the first dual wavelength speculum, the second dual wavelength speculum and planoconvex spotlight, acoustooptic switch, first laser hysteroscope, laser crystal, second laser hysteroscope, laser mirror, two frequency-doubling crystals, frequency tripling crystal, the first dual wavelength speculum is placed on motorized precision translation stage, by changing the position of the first dual wavelength speculum, the chamber for changing laser is long.The present invention carries pulsewidths constant, it can ensure the invariance of pulsewidth in certain frequency range, highest pump power can be used either under low repetition and under Gao Zhongying simultaneously, either can realize highest energy output in low repetition or Gao Zhongying in this way.
Description
Technical field
The present invention relates to field of laser device technology, more particularly to a kind of fixed pulse width intracavity double frequency ultraviolet laser and
Operating method.
Background technology
The laser of high-power and high-lighting beam quality is grown rapidly in the application of each row material processing industry in recent years, is swashed
Light device type is various:It is divided into gas laser, Solid State Laser, optical-fiber laser, semiconductor laser according to the difference of structure, becomes support
The mainstream of material processing industry;Its wave-length coverage can cover (200nm~20um) from far infrared to deep ultraviolet, different rows
Industry can also use and arrive different power brackets, different beam qualities, different laser way of output etc..It is non-in film processed
Metal material, semiconductor crystal wafer cutting, the fields such as organic glass cutting, drilling, mark influence to reduce fuel factor, it is desirable to small
The effect of aperture hot spot and high-peak power, the effect of ultraviolet laser and status are exactly so outstanding and irreplaceable.
Wavelength for intermetallic composite coating is mostly infrared band, and processing metal, but its are acted on it is expected high power high heat
Infrared or visible light usually makes the mode of material gasification, fusing be processed by generating the local heating of high brightness.But it is this
Heat can cause the periphery material in laser action region to be affected or even be destroyed, thus limit processing edge quality and work
Industry application range.And ultraviolet laser is short wavelength's high-energy photons laser, it is direct destruction material atom to be applied on substance
The chemical bond of component, without generating heat, so general be all referred to as " cold " processing ultraviolet laser processing.
Currently, ultraviolet laser is very suitable for scientific research, industry, OEM system integration developments.In terms of scientific research, ultraviolet laser
Device can be used for the research of atom/analysis spectrum, chemical kinetics etc..Industrial aspect, based on ultraviolet laser production
The data storage disk space of disk is higher by 20 times than blue laser.
The pulsewidth of solid state laser usually changes with the change that pump power, q-frequency, chamber are grown.For not having
There is the solid state laser for carrying out MOPA usually can be by the parameter of all lasers all if the pulsewidth of light extraction is allowed to remain unchanged
It records, by controlling pump power, goes out light frequency to make the pulsewidth of laser be consistent, but usually such case needs
To be dressed to worst situation, be with pump power highest, go out light frequency it is highest when pulsewidth on the basis of, when going out optical frequency
When rate declines, the power for reducing pump light is needed, laser pulse width and Gao Zhongying are high in this way under the low pump power of low repetition
Pulsewidth under pump power is approximate consistent.It is done so that maximum problem is exactly that pump power under low repetition is relatively low, go out
Light energy is relatively low, and what is become in this way is nonsensical.
Invention content
Technical problem present in for the above-mentioned prior art, the object of the present invention is to provide a kind of fixed pulse width intracavitary times
Frequency ultraviolet laser and operating method.
To achieve the purpose of the present invention, the present invention provides a kind of fixed pulse width intracavity double frequency ultraviolet lasers, including
A pair of wave mirror A1, the second dual wavelength speculum A2 and planoconvex spotlight B, acousto-optic Q-switching C, first laser hysteroscope D, swash
Luminescent crystal E, second laser hysteroscope F, laser mirror H, two frequency-doubling crystal N, frequency tripling crystal M,
The first dual wavelength speculum A1 is placed on motorized precision translation stage H, is reflected by changing first dual wavelength
The position of mirror A1, the chamber for changing laser are long.
Correspondingly, further include a kind of fixed pulse width intracavity double frequency ultraviolet laser operating method, the laser includes the
A pair of wave mirror A1, the second dual wavelength speculum A2 and planoconvex spotlight B, acousto-optic Q-switching C, first laser hysteroscope D, swash
Luminescent crystal E, second laser hysteroscope F, laser mirror H, two frequency-doubling crystal N, frequency tripling crystal M,
The first dual wavelength speculum A1 is placed on motorized precision translation stage H, is reflected by changing first dual wavelength
The position of mirror A1, the chamber for changing laser are long.
Compared with prior art, beneficial effects of the present invention be provide a pulsewidths constant end pumping it is ultraviolet swash
Light device, so-called pulsewidths constant are can to ensure pulsewidth not in certain frequency range in certain use scope
Denaturation, while highest pump power can be used either under low repetition and under Gao Zhongying, so either low heavy
Frequency or Gao Zhongying can realize highest energy output.
Description of the drawings
Fig. 1 show the structural schematic diagram of the application;
In figure, A1- the first dual wavelength speculums, A2- the second dual wavelength speculums, B- planoconvex spotlights, C- acousto-optic Q-switchings,
D- first laser hysteroscopes, E- laser crystals, F- second laser hysteroscopes, H- laser mirrors, bis- frequency-doubling crystals of N-, M- frequency triplings are brilliant
Body, R- beam splitters, I- photoelectric probes, P- motorized precision translation stages, J- motor servo drivers, the monitoring of K- acousto-optic Q-switchings Q, L- pulsewidth
Device, Q-MCU control panels.
Specific implementation mode
The present invention is described in further detail below in conjunction with the drawings and specific embodiments.It should be appreciated that described herein
Specific embodiment be only used to explain the present invention, be not intended to limit the present invention.
It should be noted that in the absence of conflict, the features in the embodiments and the embodiments of the present application can phase
Mutually combination.
The end pumping ultraviolet laser of pulsewidths constant provided by the present application, frequency multiplication mode uses intracavity frequency doubling mode, whole
Body design scheme is as shown in Figure 1.
The present invention provides a kind of fixed pulse width intracavity double frequency ultraviolet lasers, including the first dual wavelength speculum A1,
Two dual wavelength speculum A2 and planoconvex spotlight B, acousto-optic Q-switching C, first laser hysteroscope D, laser crystal E, second laser hysteroscope
F, laser mirror (H), two frequency-doubling crystal N, frequency tripling crystal M,
Wherein (A1) BCDEFHMN (A2) is expressed as the cavity composition of intracavity double frequency ultraviolet laser.A1 is in the design
Speculum in laser, fundamental frequency light are propagated by A1 through BCDEFH to M in laser chamber body, when fundamental frequency light is after M,
Since M is Brewster cutting, so corresponding polarization direction propagation loss very little, is again by N, N by the fundamental frequency light after M
Frequency-doubling crystal is propagated and is reflected to A2 at frequency doubled light, fundamental frequency light and frequency doubled light by fundamental frequency light part frequency conversion after N,
After reflected light is again by N, at frequency doubled light, the fundamental frequency light and frequency doubled light of backpropagation are then logical for frequency conversion again for part of fundamental light
M is crossed, fundamental frequency light and frequency doubled light carry out in M and frequently, to the frequency tripling light, that is, ultraviolet light generated, the exit facet of M cuts into cloth
This special angle of scholar, fundamental frequency light, frequency doubled light, frequency tripling light is emitted from surface, due to refractive index difference, so being emitted in Brewster face
Three-beam is with regard to separately being propagated afterwards, and wherein ultraviolet light is the light beam that we need, and to be usually rubbish light be collected green light,
Fundamental frequency light is continued to amplify by H to A1 back to cavity is interior again by gain crystal.Distance between wherein EF, ED, DA1, FA2,
The distance between AB is determined according to laser cavity design requirement, and distance is less than DA1 between usual EF, ED, between FA2
Distance, the distance between AB are not distinctly claimed, and the usually shorter power that can be pumped of distance is higher.Between A2 to MN away from
From being normally controlled in the rayleigh range of laser.The positions of C in the cavity are not distinctly claimed, and are generally positioned at laser light
Beam diameter is less than the acousto-optic crsytal zone of action.Laser is exported in the positions M wherein after laser coelosis, the laser of output passes through
R-portion reflection proceeds to I and measures, most of to be propagated through R.A1 is positioned on P, and the length of P is mainly by laser
What the design of device determined, realize that pulsewidth is consistent in higher frequency range if necessary, then extended length, but corresponding machine adds
Difficulty increases.The position of rest part is not distinctly claimed.
The first dual wavelength speculum A1 is placed on motorized precision translation stage H, is reflected by changing first dual wavelength
The position of mirror A1, the chamber for changing laser are long.
Wherein, further include that beam splitter R, photoelectric probe I and pulse width detection device L, MCU control panel Q, the frequency tripling are brilliant
The laser of body M outgoing is propagated to beam splitter R, and photoelectric probe I receives the light of beam splitter R reflections, the arteries and veins of testing laser device
Width, the photoelectric probe I give data measured Real-time Feedback to pulsewidth monitoring device L, the pulsewidth monitoring device L and MCU plates Q phases
Mutual communication.
Wherein, the motor servo driver J, the Q communication connections of acousto-optic Q-switching K and MCU plate, the servo motor driving
Device J is connect with the Serve Motor Control of motorized precision translation stage P, and the acousto-optic Q-switching Q is connected with acousto-optic Q-switching C controls.
Wherein, the first laser hysteroscope D and second laser hysteroscope F is plano-convex speculum, and corresponding reflection angle is different.
Wherein, the frequency-doubling crystal N, frequency tripling crystal M are lbo crystal.
Wherein, the ends cutting of the lbo crystal is Brewster.
It should be noted that A1 and A2 is dual wavelength speculum, for reflecting fundamental frequency light and frequency doubled light, D, F are plano-convex
Speculum, only corresponding mirror angle is different, is to supplement the heat of high power pump using the main function of planoconvex spotlight
Effect.The chamber of entire laser is grown the length between two eyeglasses A1 and A2 and is determined, wherein the reflection near convex lens B location
Mirror A1 is placed on motorized precision translation stage P, changes the length of laser cavity by changing the position of A1, to change pulsewidth.B is convex
Lens, the main function of B are steady area's range of change laser works, can be by laser works when placing B
First steady area is moved in the range of short focus, can pump higher pump power in limited chamber length in this way.E is corresponding
Laser work crystal, usual realization high working efficiency when, select yttrium vanadate crystal, here in order to realize good frequency multiplication
Efficiency and processing effect choose the mode of end pump pumping.C is acousto-optic Q crystal, main to be just used for realizing that the laser of Gao Zhongying is defeated
Go out, N is frequency-doubling crystal, considers industrial customer handling characteristics, and it is two frequency-doubling crystals to choose not deliquescent LBO, and M is that frequency tripling is brilliant
Body generally selects lbo crystal, and the wherein ends cutting of lbo crystal is Brewster's angle, in this way on this face, fundamental frequency light, and two
Frequency doubled light, frequency tripling light can be propagated according to the angle being individually separated, and can be achieved with intracavity frequency doubling ultraviolet laser in this way
Output.
Entire laser pumps to realize in height to realize that double-ended pump design scheme may be used in high pump power
Under the conditions of Pu, the pulsewidths constant of different frequency can be realized by changing chamber length.It is different under identical pump power
Working frequency, the energy accumulated on upper energy level is just different, according to laser rate equation, corresponding arteries and veins when energy accumulation is few
Wide just wide, corresponding pulsewidth is with regard to narrow when energy accumulation is more.So when low repetition, speculum A1 is stepper motor P's
When distalmost end, i.e. optics cavity longest, at this time optical gain is maximum and light path longest, when Gao Zhongying A1 P most
Proximal end, i.e., when optics cavity is shortest, optical gain is minimum and light path is most short, and after frequency increases, the gain of corresponding crystal is just
It reduces, while pulsewidth and gain are inversely proportional and chamber length is directly proportional, so two reverse operatings can ensure laser pulse width low
It is approximate consistent when low with the high power repetition of power Gao Zhongying.Wherein the main function of B be exactly can during A1 is moved
So that thermal focal is in the centre in steady area, can use in this way laser relative to heat and machinery stability it is optimal, can by A due to
The interference that machine error generates laser minimizes.The length of P is limited, is usually worked as in the design of industrial goods laser
In, pulse pulsewidth in 50kHz~100kHz is constant to meet corresponding application requirement substantially.
P is corresponding motorized precision translation stage, and the drive motor driver that J is corresponding backstage, the wherein action step of P by Q,
The internal processes of MCU plates are controlled.
Said program realizes coarse adjustment pulsewidth scheme substantially, and fine-tuning pulsewidth can be by adjusting the switch time of Q come real
It is existing.It is propagated from the laser after M outgoing to R, R is beam splitter, and wherein most transmissive has part light reflection to enter light
Electric probe I, photoelectric probe I are mainly used for the pulsewidth of testing laser device, while giving data measured Real-time Feedback to monitoring device L,
Monitoring device L and MCU control panel Q is in communication with each other, using the software program in the high speed characteristics compiling MCU plates Q of FPGA, so just
The logical action process of MCU plates can be controlled.After receiving signal in monitoring device L, the program in MCU plates to measuring in real time
As a result judging, when pulsewidth exceeds certain range, MCU plates send out energy storage width adjusting order to acousto-optic Q-switching Q,
The control to the pulsewidth of laser is realized by adjusting the quality factor of laser.
The pulsewidth that laser can accurately be controlled by closed loop feedback control in this way, to which the light extraction precision for reaching high is wanted
It asks.The fixed end pumping ultraviolet laser of the pulsewidth of technical grade can be realized by optimization design.
The above is only a preferred embodiment of the present invention, it is noted that for the common skill of the art
For art personnel, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications
Also it should be regarded as protection scope of the present invention.
Claims (7)
1. a kind of fixed pulse width intracavity double frequency ultraviolet laser, which is characterized in that including the first dual wavelength speculum (A1), second
Dual wavelength speculum (A2) and planoconvex spotlight (B), acousto-optic Q-switching (C), first laser hysteroscope (D), laser crystal (E), second
Laser mirror (F), laser mirror (H), two frequency-doubling crystals (N), frequency tripling crystal (M),
The first dual wavelength speculum (A1) is placed on motorized precision translation stage (H), is reflected by changing first dual wavelength
The position of mirror (A1), the chamber for changing laser are long.
2. fixed pulse width intracavity double frequency ultraviolet laser according to claim 1, which is characterized in that further include beam splitter
(R), photoelectric probe (I) and pulse width detection device (L), MCU control panels (Q), the laser of the frequency tripling crystal (M) outgoing to
Beam splitter (R) is propagated, and photoelectric probe (I) receives the light of beam splitter (R) reflection, the pulsewidth of testing laser device, the light
Electric probe (I) gives data measured Real-time Feedback to pulsewidth monitoring device (L), the pulsewidth monitoring device (L) and MCU plates (Q) phase
Mutual communication.
3. fixed pulse width intracavity double frequency ultraviolet laser according to claim 2, which is characterized in that the servo motor drives
Dynamic device (J), acousto-optic Q-switching (K) and MCU plates (Q) communicate to connect, on the motor servo driver (J) and motorized precision translation stage (H)
Serve Motor Control connection, the control of the acousto-optic Q-switching (Q) and acousto-optic Q-switching (C) connects.
4. fixed pulse width intracavity double frequency ultraviolet laser according to claim 1, which is characterized in that the first laser chamber
Mirror (D) and second laser hysteroscope (F) are plano-convex speculum.
5. fixed pulse width intracavity double frequency ultraviolet laser according to claim 1, which is characterized in that the frequency-doubling crystal
(N), frequency tripling crystal (M) is lbo crystal.
6. fixed pulse width intracavity double frequency ultraviolet laser according to claim 5, which is characterized in that the lbo crystal
Ends cutting is Brewster's angle.
7. a kind of fixed pulse width intracavity double frequency ultraviolet laser operating method, which is characterized in that the laser includes first pair
Wave mirror (A1), the second dual wavelength speculum (A2) and planoconvex spotlight (B), acousto-optic Q-switching (C), first laser hysteroscope
(D), laser crystal (E), second laser hysteroscope (F), laser mirror (H), two frequency-doubling crystals (N), frequency tripling crystal (M),
The first dual wavelength speculum (A1) is placed on motorized precision translation stage (H), is reflected by changing first dual wavelength
The position of mirror (A1), the chamber for changing laser are long.
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN113381283A (en) * | 2021-06-11 | 2021-09-10 | 福州市纳飞光电科技有限公司 | Compact pulse laser amplifier |
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CN104218440A (en) * | 2014-09-19 | 2014-12-17 | 福州紫凤光电科技有限公司 | Internal frequency doubling ultraviolet laser of semiconductor side pump cavity |
CN105932534A (en) * | 2016-06-17 | 2016-09-07 | 北京国科世纪激光技术有限公司 | Intracavity frequency doubling astigmatism compensation type laser |
CN209029674U (en) * | 2018-04-27 | 2019-06-25 | 国科世纪激光技术(天津)有限公司 | Fixed pulse width intracavity double frequency ultraviolet laser |
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2018
- 2018-04-27 CN CN201810388819.8A patent/CN108471042A/en active Pending
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US20020024978A1 (en) * | 2000-08-28 | 2002-02-28 | Yoshihiko Inagaki | Laser device and seed light optimization method |
WO2008017214A1 (en) * | 2006-08-04 | 2008-02-14 | Shenzhen Han's Laser Technology Co., Limited | A method for generating a fourth harmonic solid laser |
CN104218440A (en) * | 2014-09-19 | 2014-12-17 | 福州紫凤光电科技有限公司 | Internal frequency doubling ultraviolet laser of semiconductor side pump cavity |
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Application publication date: 20180831 |