CN108467194B - Automatic clamping device for liner tube in PCVD (plasma chemical vapor deposition) equipment - Google Patents

Automatic clamping device for liner tube in PCVD (plasma chemical vapor deposition) equipment Download PDF

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Publication number
CN108467194B
CN108467194B CN201810210623.XA CN201810210623A CN108467194B CN 108467194 B CN108467194 B CN 108467194B CN 201810210623 A CN201810210623 A CN 201810210623A CN 108467194 B CN108467194 B CN 108467194B
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sleeve
rotary
shaft sleeve
liner
liner tube
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CN108467194A (en
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武启
吴骏
王珂
邓睿
何勤国
朱继红
张欣
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Yangtze Optical Fibre and Cable Co Ltd
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Yangtze Optical Fibre and Cable Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
    • C03B37/01884Means for supporting, rotating and translating tubes or rods being formed, e.g. lathes
    • C03B37/01892Deposition substrates, e.g. tubes, mandrels

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Branch Pipes, Bends, And The Like (AREA)
  • Joints Allowing Movement (AREA)

Abstract

The invention discloses an automatic clamping device for a liner tube in a PCVD (plasma chemical vapor deposition) device, which comprises a fixed end and a rotating end, wherein the fixed end comprises a fixed supporting shaft sleeve and an air tube; the rotating end comprises a rotary sealing clamping sleeve, a rotary shaft sleeve, a synchronous belt wheel and a connecting flange; the rotary sealing clamping sleeve comprises a body and a rubber inner layer located in the body, an interlayer between the rubber inner layer and the body is hollow and communicated with a gas pipe, a hollow convex heat-resistant rubber ring is formed on the rubber inner layer, the heat-resistant rubber ring expands when compressed gas is introduced into the gas pipe, the heat-resistant rubber ring is tightly attached to the periphery of the liner pipe to clamp the liner pipe, and a gas inlet hole and a fixed supporting shaft sleeve inner cavity are formed in the body and communicated with a working gas inlet pipe. The automatic clamping device for the liner tube in the PCVD equipment provided by the invention realizes the automatic clamping of the liner tube.

Description

Automatic clamping device for liner tube in PCVD (plasma chemical vapor deposition) equipment
Technical Field
The invention relates to the technical field of production and preparation of optical fiber preforms, in particular to an automatic clamping device for a liner tube in PCVD (plasma chemical vapor deposition) equipment.
Background
In the preparation of a preform by a PCVD (Plasma activated Chemical vapor Deposition) process, the Deposition of a high purity core rod is a key to the production of a good quality preform. At present, the liner tube clamping for depositing the core rod mostly adopts a mode of matching a mechanical nut with an O-shaped ring to solve the clamping and sealing problems of the liner tube. However, the existing method has the following disadvantages:
1. the types of liner tubes are more, and the liner tubes with different specifications and external diameters need to be matched with O-shaped rings and locking nuts with different specifications;
2. the sealing performance of a single O-shaped ring is poor, and the risk of working gas leakage exists;
3. the installation and the dismantlement of bushing pipe are mostly the manual work and lock and dismantle lock nut, and work efficiency is low.
Disclosure of Invention
The invention mainly aims to provide an automatic clamping device for a liner tube in a PCVD (plasma chemical vapor deposition) equipment, aiming at realizing the automatic clamping of the liner tube.
To achieve the above objects, the present invention provides an automatic clamping device for a liner tube in a PCVD apparatus, comprising a fixed end and a rotatable end rotatable relative thereto, wherein,
the fixed end comprises a fixed supporting shaft sleeve and an air pipe, one end of the air pipe extends into the inner cavity of the fixed supporting shaft sleeve and is used for introducing compressed air;
the rotary end comprises a rotary sealing clamping sleeve for sleeving the liner tube, a rotary shaft sleeve sleeved on the rotary sealing clamping sleeve, a synchronous belt wheel connected with the driving mechanism and a connecting flange for connecting the synchronous belt wheel and the rotary shaft sleeve, and the rear end of the rotary shaft sleeve is supported in a front-end inner cavity bearing of the fixed supporting shaft sleeve;
the rotary sealing clamping sleeve comprises a body and a rubber inner layer located in the body, an interlayer between the rubber inner layer and the body is hollow and communicated with an air pipe, a hollow convex heat-resistant rubber ring is formed on the rubber inner layer, the heat-resistant rubber ring expands when compressed gas is introduced into the air pipe, the heat-resistant rubber ring is tightly attached to the periphery of the liner pipe to clamp the liner pipe, an air inlet hole is formed in the body and communicated with an inner cavity of the fixed supporting shaft sleeve to allow working gas to enter the liner pipe, and the air inlet hole is communicated with the inner cavity of the rotary sealing clamping sleeve.
Preferably, the body be hopper-shaped, the great and rotatory axle sleeve front end inner chamber of anterior segment diameter links to each other in a sealing manner, the back end diameter is less to be linked together through rotary joint and trachea, the outside of rotary joint and rotatory axle sleeve back end inner chamber between the clearance form annular cavity for working gas gets into the bushing pipe.
Preferably, a gap is formed between the rear section of the rotary sealing clamping sleeve body and the inner cavity of the rear section of the rotary shaft sleeve to form an annular cavity for the working gas to enter the liner tube.
Preferably, the body comprises a connecting end and a clamping sleeve end connected with the connecting end, wherein the air inlet is positioned on the clamping sleeve end, the clamping sleeve end is sleeved on the liner tube, the connecting end is provided with a central hole communicated with the rotary joint, and the central hole is also communicated with an interlayer of the rotary sealing clamping sleeve.
Preferably, the heat-resistant rubber ring is provided in plurality.
Preferably, a gap is arranged between two adjacent heat-resistant rubber rings.
Preferably, the rotary sealing clamping sleeve is in threaded connection and seals with the rotary shaft sleeve.
Preferably, a sealing ring is further arranged between the rotating shaft sleeve and the fixed supporting shaft sleeve.
The automatic clamping device for the liner tube in the PCVD equipment, provided by the invention, has the following beneficial effects:
1. the automatic clamping of the liner tube is realized, the potential safety hazard caused by manual operation is reduced, the operation of a user is facilitated, and meanwhile, the production efficiency is improved;
2. the multiple groups of heat-resistant rubber rings are attached to the liner tube, so that the liner tube has better sealing property than a single sealing ring;
3. due to the scalability of the inner rubber layer, the automatic clamping device is suitable for liner tubes with multiple diameters, and the universal matching performance of the automatic clamping device is improved.
Drawings
FIG. 1 is a schematic view showing the internal cross-sectional structure of the automatic clamping apparatus for a liner in a PCVD apparatus according to the present invention;
FIG. 2 is a schematic view of the external structure of the automatic clamping device for a liner in a PCVD apparatus according to the present invention;
FIG. 3 is a schematic view of the internal cross-section of the rotary seal clamping sleeve of the present invention.
In the figure, 1-a fixed supporting shaft sleeve, 2-an air pipe, 3-a rotary joint, 4-a sealing ring, 5-a bearing, 6-a synchronous belt wheel, 7-a pin, 8-a connecting flange, 9-a rotary sealing clamping sleeve, 10-a rotary shaft sleeve, 11-a rubber inner layer, 12-a liner pipe, 14-an air inlet hole, 15-an external thread, 16-a heat-resistant rubber ring, 17-a connecting end and 18-a clamping sleeve end.
The implementation, functional features and advantages of the objects of the present invention will be further explained with reference to the accompanying drawings.
Detailed Description
It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
It should be noted that in the description of the present invention, the terms "lateral", "longitudinal", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
Referring to fig. 1 to 3, in the preferred embodiment, an automatic clamping device for a liner in a PCVD apparatus includes a fixed end and a rotatable end rotatable with respect thereto, wherein,
the fixed end comprises a fixed supporting shaft sleeve 1 and an air pipe 2, one end of the air pipe extends into the inner cavity 1 of the fixed supporting shaft sleeve and is used for introducing compressed air;
the rotating end comprises a rotating sealing clamping sleeve 9 for sleeving a liner tube 12, a rotating shaft sleeve 10 sleeved on the rotating sealing clamping sleeve 9, a synchronous pulley 6 connected with a driving mechanism (such as a motor) and a connecting flange 8 for connecting the synchronous pulley 6 and the rotating shaft sleeve 10 (the connecting flange 8 is fixed on the synchronous pulley 6 through a pin 7), and the rear end of the rotating shaft sleeve 10 is supported in a front-end inner cavity bearing of the fixed supporting shaft sleeve 1;
the rotary sealing clamping sleeve 9 comprises a body and a rubber inner layer 11 positioned in the body, the rubber inner layer 11 is sleeved on a liner tube 12, an interlayer between the rubber inner layer 11 and the body is hollow and communicated with a gas tube 2, the rubber inner layer 11 is provided with a hollow convex heat-resistant rubber ring 16, the heat-resistant rubber ring 16 expands when compressed gas is introduced into the gas tube 2, the periphery of the rubber inner layer 11 and the periphery of the liner tube 12 are tightly attached to clamp the liner tube 12, the body is provided with a gas inlet hole 14 (the gas inlet hole 14 can be provided with a plurality of) which is communicated with an inner cavity of a fixed supporting shaft sleeve 1 to allow working gas to enter the liner tube 12, and the gas inlet hole is communicated with the inner cavity of the rotary sealing clamping sleeve (the working.
The rotary sealing clamping sleeve 9 is provided with two cavities, one cavity is a sandwich layer, namely a middle layer between the body and the rubber inner layer 11, and the other cavity is an inner cavity for sleeving the liner tube 12.
The rear end of the fixed supporting shaft sleeve 1 is used for introducing deposition gas, namely working gas. The air pipe 2 penetrates through the fixed supporting shaft sleeve 1 and extends into the inner cavity of the fixed supporting shaft sleeve to be communicated with the rotary sealing clamping sleeve 9 so as to introduce compressed air into the inner cavity of the rotary sealing clamping sleeve. The synchronous belt wheel 6 is sleeved outside the front end of the fixed supporting shaft sleeve 1, and the connecting flange 8 is sleeved at the front end of the fixed supporting shaft sleeve 1.
Specifically, a gap is formed between the rear section of the body of the rotary sealing clamping sleeve 9 and the inner cavity of the rear section of the rotary shaft sleeve 10 to form an annular cavity for the working gas to enter the liner tube 12 (through the air inlet hole 14). The bearing is installed in the front end inner cavity of the fixed supporting shaft sleeve 1, the rear end of the rotating shaft sleeve 10 is inserted into the inner cavity of the fixed supporting shaft sleeve 1, and the bearing sleeve is sleeved outside the rotating shaft sleeve 10. The connecting flange 8 is connected and fastened with the rotating shaft sleeve 10 through screws. The rotary sealing clamping sleeve 9 is in threaded connection and sealing with the rotary shaft sleeve 10, wherein an external thread 15 is arranged on the outer side wall of the body of the rotary sealing clamping sleeve 9. A sealing ring 4 is also arranged between the rear end of the rotary shaft sleeve 10 inserted into the fixed supporting shaft sleeve 1 and the fixed supporting shaft sleeve 1.
The body is hopper-shaped, and the great and rotatory axle sleeve 10 front end inner chamber of anterior segment diameter is sealed continuous, and the back end diameter is less to be linked together through rotary joint 3 and trachea 2, and the clearance forms annular cavity between rotary joint 3's the outside and the rotatory axle sleeve 10 back end inner chamber and supplies working gas to get into bushing pipe 12. Through setting up rotary joint 3, guaranteed the unblocked of compressed air gas circuit under rotatory state.
Specifically, the funnel-shaped body includes a connecting end 17 (i.e., a rear section) and a clamping sleeve end 18 (i.e., a front section) connected thereto, wherein the air inlet hole 14 is located on the clamping sleeve end 18, the clamping sleeve end 18 is sleeved on the liner tube 12, the connecting end 17 is used for being connected with an air tube, which is provided with a central hole communicated with the rotary joint 3, and the central hole is also communicated with the interlayer of the rotary sealing clamping sleeve 9.
Further, the heat-resistant rubber ring 16 is provided in plural, and the sealing performance is improved compared with that of a single seal ring. In addition, a gap is arranged between two adjacent heat-resistant rubber rings 16, so that the heat-resistant rubber rings 16 after expansion are prevented from interfering with each other.
The automatic clamping device for the liner tube in the PCVD equipment works as follows. Firstly, a liner tube 12 is placed in a hole of a rotary sealing clamping sleeve 9, then compressed air is introduced into an air pipe 2, a heat-resistant rubber ring 16 is expanded under the extrusion of the compressed air, and a rubber inner layer 11 of the rotary sealing clamping sleeve 9 is expanded to be attached to the outer wall of the liner tube 12, so that the liner tube 12 is clamped and sealed. Subsequently, the synchronous belt wheel 6 is driven by the motor to rotate, so that the rotating end is driven to work, and the PCVD equipment works.
The automatic clamping device for the liner tube in the PCVD equipment, provided by the invention, has the following beneficial effects:
1. automatic clamping of liner tube 12 is realized, potential safety hazards caused by manual operation are reduced, operation by a user is facilitated, and meanwhile production efficiency is improved;
2. the multiple groups of heat-resistant rubber rings 16 are attached to the liner tube 12, so that the liner tube has better sealing property than a single sealing ring;
3. due to the scalability of the rubber inner layer 11, the automatic clamping device is suitable for liner tubes 12 with multiple diameters, and the compatibility of the automatic clamping device is improved.
The above description is only for the preferred embodiment of the present invention and is not intended to limit the scope of the present invention, and all equivalent structural changes made by using the contents of the present specification and the drawings, or any other related technical fields, are intended to be covered by the scope of the present invention.

Claims (8)

1. An automatic clamping device for a liner tube in a PCVD equipment is characterized by comprising a fixed end and a rotating end which can rotate relative to the fixed end, wherein,
the fixed end comprises a fixed supporting shaft sleeve and an air pipe, one end of the air pipe extends into the inner cavity of the fixed supporting shaft sleeve and is used for introducing compressed air;
the rotary end comprises a rotary sealing clamping sleeve for sleeving the liner tube, a rotary shaft sleeve sleeved on the rotary sealing clamping sleeve, a synchronous belt wheel connected with the driving mechanism and a connecting flange for connecting the synchronous belt wheel and the rotary shaft sleeve, and the rear end of the rotary shaft sleeve is supported in a front-end inner cavity bearing of the fixed supporting shaft sleeve;
the rotary sealing clamping sleeve comprises a body and a rubber inner layer located in the body, an interlayer between the rubber inner layer and the body is hollow and communicated with an air pipe, a hollow convex heat-resistant rubber ring is formed on the rubber inner layer, the heat-resistant rubber ring expands when compressed gas is introduced into the air pipe, the heat-resistant rubber ring is tightly attached to the periphery of the liner pipe to clamp the liner pipe, an air inlet hole is formed in the body and communicated with an inner cavity of the fixed supporting shaft sleeve to allow working gas to enter the liner pipe, and the air inlet hole is communicated with the inner cavity of the rotary sealing clamping sleeve.
2. The apparatus of claim 1, wherein the body is funnel-shaped, the front section of the body has a larger diameter and is sealingly connected to the inner cavity of the front end of the rotating sleeve, the rear section of the body has a smaller diameter and is connected to the air tube through the rotating joint, and a gap is formed between the outer portion of the rotating joint and the inner cavity of the rear section of the rotating sleeve to form an annular cavity for the working gas to enter the liner.
3. The automatic clamping device for the liner tube in the PCVD apparatus, as recited in claim 1, wherein a gap is formed between the rear section of the rotary seal clamping sleeve body and the inner cavity of the rear section of the rotary shaft sleeve to form an annular cavity for the working gas to enter the liner tube.
4. The apparatus of claim 2, wherein the body comprises a connection end and a clamping sleeve end connected thereto, wherein the air inlet hole is located on the clamping sleeve end, the clamping sleeve end is sleeved on the liner tube, the connection end is provided with a central hole communicated with the rotary joint, and the central hole is further communicated with the interlayer of the rotary sealing clamping sleeve.
5. The automatic clamping device for a liner tube in a PCVD apparatus according to claim 1, wherein the heat-resistant rubber ring is provided in plurality.
6. The automatic clamping device for the liner tube in the PCVD apparatus, according to claim 5, wherein a gap is formed between two adjacent heat-resistant rubber rings.
7. The apparatus of claim 1, wherein the rotary seal clamp sleeve is threadably engaged with and seals against the rotary sleeve.
8. The automatic clamping device for the liner in the PCVD apparatus of any one of claims 1 to 7, wherein a sealing ring is further disposed between the rotating shaft sleeve and the fixed supporting shaft sleeve.
CN201810210623.XA 2018-03-14 2018-03-14 Automatic clamping device for liner tube in PCVD (plasma chemical vapor deposition) equipment Active CN108467194B (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109351444B (en) * 2018-10-30 2020-10-20 长沙天创粉末技术有限公司 Freezing liquid nitrogen type ball mill
CN112499957B (en) * 2020-12-18 2021-11-23 长飞光纤光缆股份有限公司 Multi-channel rotary chuck of PCVD lathe

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JP2003342035A (en) * 2002-05-28 2003-12-03 Furukawa Electric Co Ltd:The Method and device for supporting optical fiber preform
CN1934041A (en) * 2004-03-19 2007-03-21 信越化学工业株式会社 Method of manufacturing glass base material for optical fiber
CN203487040U (en) * 2013-09-12 2014-03-19 江苏奥维信亨通光学科技有限公司 Sintering furnace chuck of optical fiber preform rod
CN205603455U (en) * 2016-05-13 2016-09-28 藤仓烽火光电材料科技有限公司 Level pressure clamping device is used in optical fiber perform production

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JP5520640B2 (en) * 2010-03-08 2014-06-11 株式会社フジクラ Method of attaching / detaching base material and method of manufacturing optical fiber
CN102276144B (en) * 2011-06-29 2013-08-14 长飞光纤光缆有限公司 Rotary seal chuck of optical fiber preform rod deposition lathe
CN106743553B (en) * 2016-12-16 2019-01-18 佛山市启达研磨器材科技有限公司 A kind of rodlike profile clamping device of sized flap wheel
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Publication number Priority date Publication date Assignee Title
JP2003342035A (en) * 2002-05-28 2003-12-03 Furukawa Electric Co Ltd:The Method and device for supporting optical fiber preform
CN1934041A (en) * 2004-03-19 2007-03-21 信越化学工业株式会社 Method of manufacturing glass base material for optical fiber
CN203487040U (en) * 2013-09-12 2014-03-19 江苏奥维信亨通光学科技有限公司 Sintering furnace chuck of optical fiber preform rod
CN205603455U (en) * 2016-05-13 2016-09-28 藤仓烽火光电材料科技有限公司 Level pressure clamping device is used in optical fiber perform production

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