CN108458129A - A kind of film cushion solenoid valve - Google Patents

A kind of film cushion solenoid valve Download PDF

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Publication number
CN108458129A
CN108458129A CN201810634814.9A CN201810634814A CN108458129A CN 108458129 A CN108458129 A CN 108458129A CN 201810634814 A CN201810634814 A CN 201810634814A CN 108458129 A CN108458129 A CN 108458129A
Authority
CN
China
Prior art keywords
film
valve seat
valve body
film pad
pad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201810634814.9A
Other languages
Chinese (zh)
Inventor
王勇
张迎春
纪俊章
马彬
王万纪
蒲申申
薛勇
季素音
陆化
阮辉
周阳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SUZHOU ZHONGKUANG SANJIE TECHNOLOGY Co Ltd
Original Assignee
SUZHOU ZHONGKUANG SANJIE TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SUZHOU ZHONGKUANG SANJIE TECHNOLOGY Co Ltd filed Critical SUZHOU ZHONGKUANG SANJIE TECHNOLOGY Co Ltd
Priority to CN201810634814.9A priority Critical patent/CN108458129A/en
Publication of CN108458129A publication Critical patent/CN108458129A/en
Pending legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/17Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00Actuating devices; Operating means; Releasing devices
    • F16K31/02Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/06Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
    • F16K31/0644One-way valve
    • F16K31/0672One-way valve the valve member being a diaphragm
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00Actuating devices; Operating means; Releasing devices
    • F16K31/12Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/36Actuating devices; Operating means; Releasing devices actuated by fluid in which fluid from the circuit is constantly supplied to the fluid motor
    • F16K31/365Actuating devices; Operating means; Releasing devices actuated by fluid in which fluid from the circuit is constantly supplied to the fluid motor the fluid acting on a diaphragm

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Magnetically Actuated Valves (AREA)

Abstract

The invention discloses a kind of film cushion solenoid valves, including valve seat, valve body, dynamic iron core, dynamic iron core spring, guide sleeve, coil, film pad spring, film pad, valve body is mounted on valve seat, coil is mounted in valve body, guide sleeve is arranged in intermediate in coil, dynamic iron core is set in guide sleeve, and the top of dynamic iron core connects valve body fixed core by dynamic iron core spring;One baffle is set in valve seat, and valve seat slot is arranged in baffle top, and film pad is located in valve seat slot, it is fixed by valve body and valve seat, film pads spring junctional membrane pad and valve body, and control outlet is arranged on the valve seat between baffle and outlet, and film pad blocks control outlet in the operating condition;Pressure release passage is set on valve seat and valve body, and pressure release passage input end is located on the inlet side valve body of valve seat, the pressure release passage outlet through valve body internal channel connection valve seat slot and on the outlet side valve body of valve seat.The present invention in high-low pressure can normal use, and water yield is very big, leakproofness is fabulous, greatly improves the performance and use scope of product.

Description

A kind of film cushion solenoid valve
Technical field
The present invention relates to a kind of solenoid valve more particularly to a kind of film cushion solenoid valves.
Background technology
Currently, the dedusting mechanism of underground is mainly solenoid valve form, solenoid valve is divided into film pad-type, two kinds through-type.Its Middle film pad-type uses pilot circuit elder generation venting partial pressure, generates pressure difference between upside on the downside of film pad, is beaten using hydraulic pressure Film pad is opened, flow is made to be sprayed by drain hole.The dedusting mechanism of such structure is only applicable to low pressure, in high pressure due to film pad Relatively low be easily torn of intensity leads to product failure.Moreover, if inlet pipeline is thinner in use, film can be caused Pad cannot be opened completely, and flow hydraulic pressure after film pad-type solenoid valve becomes smaller and cannot spray.Through-type solenoid valve is due to hydraulic pressure The pressure of generation is larger, if thinking normally to open the aperture that can only reduce drain hole, the straight-through valve sluicing aperture of underground is equal at present In 5mm hereinafter, causing water yield less, and the sealing not with great difficulty leak in low pressure, seriously reduce the performance of product.
To solve the above-mentioned problems, it is desirable to be able in high and low pressure can normal use, and water yield disclosure satisfy that need It asks, the structure of good seal performance, but has not been reported in the prior art.
Invention content
In order to solve the problems, such as current techniques, the object of the present invention is to provide one kind can be in high and low pressure Can normal use, and water yield disclosure satisfy that demand, the film cushion solenoid valve of good seal performance.
In order to achieve the above objectives, the technology used in the present invention means are:A kind of film cushion solenoid valve, including valve seat, valve Body, dynamic iron core, dynamic iron core spring, guide sleeve, coil, film pad spring, film pad, the valve body are mounted on valve seat, and coil is mounted on In valve body, guide sleeve is arranged in intermediate in coil, dynamic iron core is arranged in guide sleeve, the top of dynamic iron core passes through dynamic iron core spring connection valve Body fixed core;Inlet and outlet is set on the valve seat, a baffle is set in valve seat between import and export, on baffle Valve seat slot is arranged in portion, and film pad is located in valve seat slot, and is extended to outside valve seat slot outside film pad, is fixed by valve body and valve seat, film Spring one end junctional membrane pad is padded, the other end connects valve body, one and baffle upper end is arranged on the valve seat between baffle and outlet Parallel edge sealing, the gap between edge sealing and baffle constitute control outlet, and film pad in the operating condition, blocks control outlet;Institute It states and pressure release passage is set on valve seat and valve body, pressure release passage input end is located on the inlet side valve body of valve seat, leads in valve body Road connection valve seat slot and the pressure release passage outlet on the outlet side valve body of valve seat.
Further, the valve seat, contain pilot hole in valve body, the pressure release in valve seat and valve body import side junction is logical Setting water inlet copper post in road, setting water outlet copper post, is moved in valve body in the pressure release passage of valve seat and valve outlet side junction Sluicing copper post is set in the pressure release passage under iron core.
Further, a polyurethane stick is inlayed in the bottom of the dynamic iron core, and flat slot is opened in the both sides of dynamic iron core.
Further, the film pad includes that sequentially connected film pads outer ring, film pads centre circle and film pad inner ring, outside the film pad It encloses as with certain thickness annulus, the film pad centre circle pads outer ring from film including one and film pads centre circle junction into film pad The imploded arcs in direction are enclosed, for imploded arcs with plane where film pad outer ring to lower recess, mounting hole, film pad are opened in the film pad inner ring middle part Inner ring top is connect with film pad centre circle, and film pads inner ring lower part and raised annulus is arranged.
Further, the film pad centre circle further includes connecting arc in one, and interior even arc one end connects imploded arcs to outside film pad Enclose the one end extended, the other end junctional membrane pad inner ring top of interior even arc.
Further, a lower groove is arranged in film pad inner ring lower part, and lower groove is located on the inside of the annulus of protrusion, recessed Gasket is installed, film pads inner ring top and constitutes a upper groove with interior even arc, riveting piece is arranged in upper groove, is worn by bolt in slot It crosses mounting hole riveting piece, gasket are fixed on film pad inner ring.
Further, the film pad spring is pagoda spring, and the big nose circle of pagoda spring is mounted on film pad, and small nose circle connects Connect valve body.
When work, coil, which is powered, generates magnetic field, and the valve body fixed core above guide sleeve generates suction under magnetic fields, moves iron Core moved upwards under suction with sluicing copper post be detached from, at this time part flow by pressure release passage import through intake copper post, let out Water copper post, the circuit of valve inner, water outlet copper post outflow, hydraulic pressure becomes smaller above film pad, in lower section under the action of hydraulic pressure film pad to On lift, the control outlet on the rebasing portion of film and valve seat is detached from, and water flows through this large amount of outflow in control outlet, when the coil is de-energized, Fixed core above guide sleeve loses magnetic force, and dynamic iron core drops back into original position, sluicing copper post quilt under the action of dead weight and dynamic iron core spring It blocks, hydraulic pressure starts to become larger above film pad, and under the action of hydraulic pressure and pagoda spring, film pad, which is fallen after rise downwards, extremely to be contacted with valve seat, Control outlet on valve seat is plugged, and solenoid valve is fully sealed.
The advantageous effects of the present invention:The annulus that film pads inner ring protrusion is in close contact under hydraulic pressure effect with valve seat, real It is now fully sealed, film mat structure greatly extends the service life of film pad;The imploded arcs composition deformed region that film pads centre circle can Great deflection is kept in a smaller space, significantly increases the flexibility of film pad, ensures the feelings smaller in inflow Condition lower film pad can also be opened completely;The pagoda structure of film pad spring ensures that in low pressure, film pad is realized under film pad spring effect It is fully sealed;The solenoid valve of this structure in high and low pressure can normal use, and water yield is very big, leakproofness is fabulous, carries significantly The performance and use scope of product are risen.
Description of the drawings
The present invention is further elaborated with reference to the accompanying drawings and examples.
Fig. 1 is the structural diagram of the present invention;
Fig. 2 is the structural schematic diagram of inventive film pad.
In figure:1, valve seat, 2, valve body, 3, water inlet copper post, 4, film pad, 41, film pad outer ring, 42, film pad centre circle, 43, film pad Inner ring, 44, imploded arcs, 45, mounting hole, 46, the annulus of protrusion, 47, interior even arc, 48, lower groove, 49, upper groove, 5, sluicing copper Column, 6, dynamic iron core, 7, dynamic iron core spring, 8, guide sleeve, 9, coil, 10, film pad spring, 11, water outlet copper post, 12, riveting piece, 13, pad Piece.
Specific implementation mode
Embodiment 1
As shown in Figure 1, a kind of film cushion solenoid valve, including valve seat 1, valve body 2, dynamic iron core 6, dynamic iron core spring 7, guide sleeve 8, coil 9, film pad spring 10, film pad 4, the valve body 2 are mounted on valve seat 1, and coil 9 is mounted in valve body 2, is set in the centre of coil 9 Guide sleeve 8 is set, dynamic iron core 6 is set in guide sleeve 8, the top of dynamic iron core 6 connects valve body fixed core by dynamic iron core spring 7;The valve Inlet and outlet is set on seat 1, a baffle is set in valve seat 1 between import and export, valve seat slot is arranged in baffle top, Film pad 4 is located in valve seat slot, and the outside of film pad 4 extends to outside valve seat slot, is fixed by valve body 2 and valve seat 1, and film pads spring 10 1 Junctional membrane pad 4, the other end is held to connect valve body 2, setting one is parallel with baffle upper end on the valve seat 1 between baffle and outlet Edge sealing, the gap between edge sealing and baffle constitute control outlet, and film pad 4 in the operating condition, blocks control outlet;The valve seat 1 and valve body 2 on pressure release passage is set, pressure release passage input end is located on the inlet side valve body of valve seat, through valve body internal channel connect Connect valve seat slot and the pressure release passage outlet on the outlet side valve body of valve seat.
Embodiment 2
As to the preferred of embodiment 1, contain pilot hole in the valve seat 1, valve body 2, connects in valve seat 1 and 2 inlet side of valve body Setting water inlet copper post 3 in the pressure release passage at place is connect, water outlet is set in the pressure release passage of 2 outlet side junction of valve seat 1 and valve body Copper post 11, setting sluicing copper post 5 in the pressure release passage in valve body 2 under dynamic iron core 6.
Contain pilot hole inside valve seat 1, valve body 2, and mutual using water inlet copper post 3, sluicing copper post 5, water outlet copper post 11 Connection composition pilot circuit.
Inlay a polyurethane stick in the bottom of dynamic iron core 6, it is ensured that dynamic iron core 6 falls soft when being contacted with sluicing copper post 5 connect Tactile realization is fully sealed, and a flat slot is opened in the both sides of dynamic iron core 6, Reduction by Drainage slight drag when rising so as to dynamic iron core 6.
Embodiment 3
As to the preferred of embodiment 1, the film pad 4 includes in sequentially connected film pad outer ring 41, film pad centre circle 42 and film pad Circle 43, film pad outer ring 41 be with certain thickness annulus, the film pad centre circle 42 include one from film pad outer ring 41 with Film pads 42 junction of centre circle to the imploded arcs 44 in film pad inner ring direction, and imploded arcs 44 pad 41 place plane of outer ring to recessed with film It falls into, mounting hole 45 is opened at 43 middle part of film pad inner ring, and film pads 43 top of inner ring and connect with film pad centre circle 42, and film pads 43 lower part of inner ring Raised annulus 46 is set.
4 lower section of film pad has the annulus 46 of a protrusion, this annulus to be in close contact with valve seat 1 under hydraulic pressure effect, plays O-ring Effect, it can be achieved that being fully sealed.
The film pad centre circle 42 further includes connecting arc 47 in one, and interior even 47 one end of arc connects imploded arcs 44 and prolongs to film pad outer ring The one end stretched, 43 top of other end junctional membrane pad inner ring of interior even arc 47.
The imploded arcs of film pad centre circle constitute a deformed region, and the region is in the arc-shaped to be bent downwardly, can be smaller Great deflection, the structure is kept to significantly increase the flexibility of film pad in space, it is ensured that in the smaller feelings of inflow Condition lower film pad can also be opened completely, ensure the effect of product when in use.
Film pads 43 lower part of inner ring and a lower groove 48 is arranged, and lower groove 48 is located at 46 inside of annulus of protrusion, in lower groove Gasket 13 is installed, film pads 43 top of inner ring and constitutes a upper groove 49 with interior even arc 47, and riveting piece is arranged in upper groove 49 in 48 12, it passes through mounting hole that riveting piece 12, gasket 13 are fixed on film by bolt and pads on inner ring 43.
One gasket 13 is installed on the inside of the annulus of 4 lower section of film pad and is fixed on one with the riveting piece 12 of 4 top of screw and film pad It rises, this gasket 13 is played a supporting role, it is ensured that in high pressure, film pad 4 will not be inhaled into the outlet of the control on valve seat 1, the knot Structure greatly extends the service life of film pad.
The film pad spring 10 is pagoda spring, and the big nose circle of pagoda spring is mounted on film pad, small nose circle connection valve body. Pagoda spring structure can guarantee that in low pressure, film pad 4 is realized under the action of pagoda spring and be fully sealed.
Coil 9, which is powered, when work generates magnetic field, and the fixed core of 8 top of guide sleeve generates suction, dynamic iron core 6 under magnetic fields It moves upwards under suction and is detached from sluicing copper post 5, part water flows through water inlet copper post 3, sluicing copper post 5, in valve body 2 at this time The circuit in portion, water outlet copper post 11 flow out, and 4 top hydraulic pressure of film pad becomes smaller, and in lower section, film pad 4 is lifted up under the action of hydraulic pressure, film It pads 4 bottoms to be detached from the control outlet on valve seat 1, water flows through this large amount of outflow in control outlet.When coil 9 powers off, on guide sleeve 8 The fixed core of side loses magnetic force, and dynamic iron core 6 drops back into original position under the action of dead weight and dynamic iron core spring 7, and sluicing copper post 5 is blocked Firmly, 4 top hydraulic pressure of film pad starts to become larger, and under the action of hydraulic pressure and pagoda spring, film pad 4, which is fallen after rise downwards, extremely to be contacted with valve seat 1, Control outlet on valve seat 1 is plugged, and solenoid valve is fully sealed.
The solenoid valve of such structure in high and low pressure can normal use, and water yield is very big, leakproofness is fabulous, significantly Improve the performance and use scope of product.

Claims (7)

1. a kind of film cushion solenoid valve, including valve seat, valve body, dynamic iron core, dynamic iron core spring, guide sleeve, coil, film pad spring, film Pad, the valve body are mounted on valve seat, and coil is mounted in valve body, it is characterised in that:Guide sleeve, guide sleeve is arranged in intermediate in coil The top of interior setting dynamic iron core, dynamic iron core connects valve body fixed core by dynamic iron core spring;Import is set on the valve seat and is gone out Mouthful, a baffle is set in valve seat between import and export, valve seat slot is arranged in baffle top, and film pad is located in valve seat slot, And extended to outside film pad outside valve seat slot, it is fixed by valve body and valve seat, film pads spring one end junctional membrane pad, other end connection valve An edge sealing parallel with baffle upper end, the gap between edge sealing and baffle are arranged on the valve seat between baffle and outlet for body Control outlet is constituted, film pad in the operating condition, blocks control outlet;Pressure release passage, pressure release are set on the valve seat and valve body Channel entrance end is located on the inlet side valve body of valve seat, through valve body internal channel connection valve seat slot and positioned at the outlet side valve of valve seat Pressure release passage outlet on pedestal.
2. film cushion solenoid valve according to claim 1, it is characterised in that:Contain pilot hole in the valve seat, valve body, The setting water inlet copper post in the pressure release passage of valve seat and valve body import side junction, in letting out for valve seat and valve outlet side junction Setting is discharged copper post in pressure passageway, and sluicing copper post is arranged in the pressure release passage in valve body under dynamic iron core.
3. film cushion solenoid valve according to claim 2, it is characterised in that:Inlay a poly- ammonia in the bottom of the dynamic iron core Open flat slot in the both sides of ester stick, dynamic iron core.
4. film cushion solenoid valve according to claim 1, it is characterised in that:The film pad includes outside sequentially connected film pad Circle, film pad centre circle and film pad inner ring, film pad outer ring be with certain thickness annulus, the film pad centre circle include one from Film pads outer ring and film and pads imploded arcs of the centre circle junction to film pad inner ring direction, and imploded arcs are with plane where film pad outer ring to recessed It falls into, mounting hole is opened at the film pad inner ring middle part, and film pads inner ring top and connect with film pad centre circle, and film pads the setting of inner ring lower part with convex The annulus risen.
5. film cushion solenoid valve according to claim 4, it is characterised in that:The film pad centre circle further includes connecting in one Arc, interior even arc one end connect one end that imploded arcs extend to film pad outer ring, the other end junctional membrane pad inner ring top of interior even arc.
6. film cushion solenoid valve according to claim 4, it is characterised in that:Film pad inner ring lower part setting one is recessed Slot, lower groove are located on the inside of the annulus of protrusion, and gasket is installed in lower groove, and film pads inner ring top and constituted on one with interior even arc Riveting piece is arranged in groove in upper groove, passes through mounting hole that riveting piece, gasket are fixed on film by bolt and pads on inner ring.
7. film cushion solenoid valve according to claim 1, it is characterised in that:The film pad spring is pagoda spring, pagoda The big nose circle of spring is mounted on film pad, small nose circle connection valve body.
CN201810634814.9A 2018-06-20 2018-06-20 A kind of film cushion solenoid valve Pending CN108458129A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810634814.9A CN108458129A (en) 2018-06-20 2018-06-20 A kind of film cushion solenoid valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810634814.9A CN108458129A (en) 2018-06-20 2018-06-20 A kind of film cushion solenoid valve

Publications (1)

Publication Number Publication Date
CN108458129A true CN108458129A (en) 2018-08-28

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Family Applications (1)

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CN201810634814.9A Pending CN108458129A (en) 2018-06-20 2018-06-20 A kind of film cushion solenoid valve

Country Status (1)

Country Link
CN (1) CN108458129A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020159477A (en) * 2019-03-27 2020-10-01 株式会社フジキン Valve device, fluid control device using this valve device and semiconductor manufacturing device

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1150053A2 (en) * 2000-04-24 2001-10-31 Smc Corporation Diaphragm valve with solenoid pilot valve
CN104089071A (en) * 2014-05-12 2014-10-08 宿州中矿三杰科技有限公司 Mining explosion-proof type electromagnetic valve
CN204004699U (en) * 2014-06-13 2014-12-10 苏州固基电子科技有限公司 Solenoid valve
CN206786060U (en) * 2017-04-21 2017-12-22 浙江中孚流体机械有限公司 A kind of guide diaphragm type electromagnetic driven stop valve
CN107532731A (en) * 2015-05-06 2018-01-02 曼·胡默尔有限公司 For adjusting or controlling the unit of Fluid pressure
CN107940021A (en) * 2017-11-29 2018-04-20 宿州中矿三杰科技有限公司 A kind of mine underground dust-extraction unit

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1150053A2 (en) * 2000-04-24 2001-10-31 Smc Corporation Diaphragm valve with solenoid pilot valve
CN104089071A (en) * 2014-05-12 2014-10-08 宿州中矿三杰科技有限公司 Mining explosion-proof type electromagnetic valve
CN204004699U (en) * 2014-06-13 2014-12-10 苏州固基电子科技有限公司 Solenoid valve
CN107532731A (en) * 2015-05-06 2018-01-02 曼·胡默尔有限公司 For adjusting or controlling the unit of Fluid pressure
CN206786060U (en) * 2017-04-21 2017-12-22 浙江中孚流体机械有限公司 A kind of guide diaphragm type electromagnetic driven stop valve
CN107940021A (en) * 2017-11-29 2018-04-20 宿州中矿三杰科技有限公司 A kind of mine underground dust-extraction unit

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020159477A (en) * 2019-03-27 2020-10-01 株式会社フジキン Valve device, fluid control device using this valve device and semiconductor manufacturing device
JP7333577B2 (en) 2019-03-27 2023-08-25 株式会社フジキン Valve device, fluid control device and semiconductor manufacturing device using this valve device

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Application publication date: 20180828

RJ01 Rejection of invention patent application after publication