CN108427908A - Fingerprint identification system and method for sensing and manufacturing method - Google Patents
Fingerprint identification system and method for sensing and manufacturing method Download PDFInfo
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- CN108427908A CN108427908A CN201711422172.8A CN201711422172A CN108427908A CN 108427908 A CN108427908 A CN 108427908A CN 201711422172 A CN201711422172 A CN 201711422172A CN 108427908 A CN108427908 A CN 108427908A
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
- G06V40/00—Recognition of biometric, human-related or animal-related patterns in image or video data
- G06V40/10—Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
- G06V40/12—Fingerprints or palmprints
- G06V40/13—Sensors therefor
- G06V40/1324—Sensors therefor by using geometrical optics, e.g. using prisms
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Abstract
The present invention discloses a kind of fingerprint identification system, including panel, for placing finger；Light source is set to the lower section of panel, and for generating light, wherein light is pointed into finger and reflection, to generate reflection light；Processor, for according to sensing signal, opponent's fingering row identification of fingerprint；And optical sensing array, it is set to the lower section of panel, is coupled to processor, for generating sensing signal, including OPTICAL SENSORS, the reflection light for receiving finger reflection, to generate sensing signal；Focus layer is set to the top of OPTICAL SENSORS, and the reflection light for reflecting finger focuses；Barrier layer is set to the lower section of focus layer, for obstructing the reflection light of part to reduce the diffraction phenomenon of reflection light；Light shield layer is set to the lower section of barrier layer, for the reflection light of shaded portions to control the incident angle of reflection light；Aperture layer is set to the lower section of light shield layer and the top of OPTICAL SENSORS, for stopping spurious rays.
Description
Technical field
The present invention relates to a kind of fingerprint identification system and method for sensing and manufacturing method, especially one kind can be focused from hand
The reflection light that digital reflex is returned is to promote the fingerprint identification system and method for sensing and manufacturing method of identification of fingerprint rate.
Background technology
Optical fingerprint identification system is to focus light to carry out identification of fingerprint, can be further divided into imaging type (Image
) and non-imaging type (Non Image System) System.Imaging type fingerprint identification system can obtain large range of light
Angle, it may have the preferable quality of image, but component therein is also required to have larger thickness and size, to assemble imaging model
The light enclosed.For non-imaging type fingerprint identification system by taking calibration lens system (Collimator System) as an example, structure is more close
Collection, and large range of light angle is not needed, but the angular range of acquired light is restricted, what sensor received
Light luminance is relatively low, makes the noise of fingerprint sensing signal than increasing, therefore exerts an adverse impact to sensing signal quality.
Therefore, the size of components that imaging type fingerprint identification system needs is larger, causes imaging type fingerprint identification system in body
Higher disadvantage in product cost.The angular range of the incident ray of non-imaging type fingerprint identification system is restricted, cause it is non-at
As the formula fingerprint identification system disadvantage second-rate in the signal of identification of fingerprint.In this case, existing optical fingerprint is distinguished
Knowledge system has improved necessity.
Invention content
Therefore, the main purpose of the present invention is to provide a kind of fingerprint identification system and method for sensing and manufacturing method, with
Lower area cost, obtains the reflection light of larger incident angle, to promote the signal quality of identification of fingerprint.
The present invention proposes a kind of fingerprint identification system, including panel, for placing finger；Light source is set to the panel
Lower section, for generating light, wherein the light is pointed into the finger and reflection, to generate reflection light；Processor is used for
According to sensing signal, identification of fingerprint is carried out to the finger；And optical sensing array, it is set to the lower section of the panel, coupling
It is connected to the processor, for generating the sensing signal, including OPTICAL SENSORS, for receiving the described anti-of the finger reflection
Light is penetrated, to generate the sensing signal；Focus layer is set to the top of the OPTICAL SENSORS, for reflecting the finger
The reflection light focus；Barrier layer is set to the lower section of the focus layer, for obstruct the reflection light of part with
Reduce the diffraction phenomenon of the reflection light；Light shield layer is set to the lower section of the barrier layer, for the described anti-of shaded portions
Light is penetrated to control the incident angle of the reflection light；And aperture layer, it is set to the lower section of the light shield layer and the light
The top of sensor, the spurious rays for stopping the reflection light.
The present invention is applied to fingerprint identification system, the fingerprint identification system includes face it is also proposed that a kind of method for sensing
Plate, light source, optical sensing array, for carrying out fingerprint sensing, the method for sensing includes that a user places a finger in institute
The top of the panel of fingerprint identification system is stated, the light source of the fingerprint identification system generates light, is pointed into the hand
Refer to and reflect, to generate reflection light；It, will be described using the concentric circles optical channel in the focus layer of the fingerprint identification system
The reflection light of finger reflection is focused；Part, which is obstructed, using the barrier layer of the fingerprint identification system has passed through institute
The reflection light for stating focus layer reduces the diffraction phenomenon of the reflection light；Utilize the shading of the fingerprint identification system
Layer masking is by the focus layer and at least part of the reflection light of the barrier layer, to control the reflected light
The incident angle of line；Pass through the focus layer, the barrier layer and institute using the aperture layer blocking of the fingerprint identification system
State the spurious rays of the reflection light of light shield layer；And it is sensed using the OPTICAL SENSORS of the fingerprint identification system
By the focus layer, the reflection light of the barrier layer, the light shield layer and the aperture layer, to generate sensing letter
Number.
The present invention separately proposes a kind of manufacturing method, for manufacturing optical sensing array, is formed included in the top of silicon substrate
OPTICAL SENSORS, the OPTICAL SENSORS is used to receive the reflection light of finger reflection, to generate sensing signal；In the OPTICAL SENSORS
Upper formation aperture layer, the aperture layer are used to stop the spurious rays of the reflection light；It is formed in the top of the aperture layer
An at least light shield layer, an at least light shield layer are used for the reflection light of shaded portions to control entering for the reflection light
Firing angle degree；Barrier layer is formed in the top of an at least light shield layer, the barrier layer is used to obstruct the reflected light of part
Line is to reduce the diffraction phenomenon of the reflection light；And focus layer is formed in the top of an at least light shield layer, it is described poly-
The reflection light that focus layer is used to reflect on the finger focuses.
Description of the drawings
Figure 1A is the schematic diagram of one fingerprint identification system of the embodiment of the present invention.
Figure 1B is the schematic diagram that fingerprint identification system of the embodiment of the present invention carries out identification of fingerprint.
Fig. 2 is the diagrammatic cross-section of one optical sensing array of the embodiment of the present invention and the vertical view of each layer.
Fig. 3 A to Fig. 3 E are the manufacturing method schematic diagram of one sensing unit of the embodiment of the present invention.
Fig. 4 is one flow diagram of the embodiment of the present invention.
Fig. 5 is the diagrammatic cross-section of one optical sensing array of the embodiment of the present invention.
Fig. 6 is the diagrammatic cross-section of one optical sensing array of the embodiment of the present invention.
Specific implementation mode
A and Figure 1B is please referred to Fig.1, Figure 1A is the schematic diagram of one fingerprint identification system 1 of the embodiment of the present invention, and Figure 1B is this hair
One fingerprint identification system 1 of bright embodiment carries out the schematic diagram of identification of fingerprint.Fingerprint identification system 1 include a glass panel 13,
One processor 12, an optical sensing array 10 and a light source 14.When the finger of user is pressed in fingerprint identification system 1
When on glass panel, the light L1 from light source 14 can be pointed into finger and the reflection of user, to generate reflection light L2,
And the optical sensing array 10 in fingerprint identification system 1 can sense the reflection light L2 reflected from the finger of user, with
Sensing signal is generated, sensing signal can be sent to processor 12 and be distinguished to generate finger print information and carry out fingerprint by optical sensing array
Know.
Specifically, as shown in Figure 1A, the optical sensing array 10 in fingerprint identification system 1 includes and arranges in a matrix fashion
A plurality of sensing units 11, spacing between sensing unit 11 can according to the width and/or density of fingerprint line peak and line paddy and
Adjustment, but not limited to this.Those skilled in the art should can set according to the width and/or density of the peaks and troughs in fingerprint
Set the spacing distance of the sensing unit 11 of optical sensing array 10, and setting in fingermark image quality and optical sensing array 10
It sets and obtains rational equalization point between density.In addition to this, the set-up mode of optical sensing array 10 is not limited to shown in Fig. 1
The set-up mode of checkerboard type annular can also be arranged or cellular arrangement mode is presented, also belongs to the scope of the present invention.
In addition, as shown in Figure 1B, when user carries out identification of fingerprint using fingerprint identification system 1, fingerprint identification system 1
Light source 14 launch light L1, be pointed into the finger reflection of user and be incident upon optical sensing array after generating reflection light L2
10.Sensing unit 11 in optical sensing array 10 can be focused and remove noise to the reflection light L2 from finger,
To sense the reflection light L2 in specific incident angle, identification of fingerprint is carried out to generate sensing signal.
Then, referring to FIG. 2, the right side of Fig. 2 is the section signal of the sensing unit 11 of optical sensing array 10 in Fig. 1
Figure.As shown, each sensing unit 11 includes a focus layer 100, a barrier layer 102, a light shield layer 104, an aperture layer
106 and an OPTICAL SENSORS 108.Optical sensing array 10 can receive the reflection light L2 reflected from finger, reflection light
L2 is focused reflection light L2 using focus layer 100, and removes denoising by barrier layer 102, light shield layer 104 and aperture layer 106
After sound, then sensed by OPTICAL SENSORS 108.Specifically, focus layer 100 includes a concentric circles optical channel, has one
Circular hole 1000 and multiple circular above-mentioned circular holes 1000 simultaneously have the circle hole 1002 of different-diameter to form one
The pattern of concentric circles, reflection light L2 to be focused.Barrier layer 102 is set to the lower section of focus layer 100, to will be anti-
The diffracted light for penetrating light L2 is obstructed, to reduce the diffraction phenomenon of reflection light L2.Light shield layer 104 is set to barrier layer
102 lower section, to control the incident angle of reflection light L2.It is worth noting that, barrier layer 102 includes one second circle
Hole 1020, light shield layer 104 include a third circular hole 1040, to make light shield layer 104 control the incidence of reflection light L2
Angle, preferably, the diameter of third circular hole 1040 can carry out adjustment appropriate according to the diameter of the second circular hole 1020,
In this embodiment, the diameter of the second circular hole 1020 is more than the diameter of third circular hole 1040.Aperture layer 106 is then arranged
In the lower section of light shield layer 104 and the top of OPTICAL SENSORS 108, it to be used for the spurious rays (stray of blocking reflected light L2
light).OPTICAL SENSORS 108 is then photosensory assembly, for sensing reflection light L2 to obtain finger print information.It is worth noting that,
Since focus layer 100 is used to carry out the focusing of reflection light L2, the distance between focus layer 100 to OPTICAL SENSORS 108 is certainly
It is formed by diffraction angle after having determined concentric circles optical channels of the reflection light L2 by focus layer 100.In addition, focus layer 100, resistance
The distance of 106 each interlayer of interlayer 102, light shield layer 104 and aperture layer can be according to the width and feature distribution of fingerprint wave crest/trough
Density, the brightness of reflection light L2, the thickness of glass panel and reflection light L2 wavelength and suitably adjust.
With continued reference to FIG. 2, the left side of Fig. 2 include by sensing unit 11 focus layer 100, barrier layer 102, light shield layer
104 and aperture layer 106 vertical view.As shown in the left side of fig 2, focus layer 100 has concentric circles optical channel, includes a circle
The circle hole 1002 of shape hole 1000 and different-diameter forms a concentric circles, for gathering reflection light L2
It is burnt.It is worth noting that, focus layer 100 is formed by black light-absorbing material, and its concentric circles optical channel forms rounded slot.It is different
In in the prior art, general optical lens is the structure with Fresnel lens (Fresnel Lens) to lower transparent glasses lens
Thickness, the present invention utilize the concentric circles light channel structure of focus layer 100, and reflection light L2 is made to generate diffraction, bright to generate pa pine
Point (Poisson Spot) phenomenon, to focus reflection light L2.It is worth noting that, the concentric circles light by focus layer 100 is logical
Road, present invention may effectively utilize diffraction phenomenons to focus reflection light L2；Meanwhile focus layer 100 is only needed with single layer plane
The black light-absorbing material of structure can make, and can effectively reduce thickness, size and making of the optical sensing array in making
Complexity.On the other hand, focus layer 100 is for focusing from the reflected reflection light L2 of finger, to obtain the finger of finger
The information such as line feature, therefore, concentric circles optical channel width L1, slit width L2, slit separation distance L3 or slot number etc. are all
It can be suitably adjusted according to the feature of finger print or the distribution of optical sensing array.Wherein, concentric circles optical channel width
L1 can be determined according to the feature distribution of fingerprint, width or density.And it is good to obtain in order to obtain enough light luminances
Signal quality is sensed, slit width L2 and slot number all can flexibly adjust according to light luminance.It is noted that being
Reflection light L2 is focused on the central point of OPTICAL SENSORS 108, each other slit separation distance L3 can be inconsistent, a
Other slit separation distance L3 is according to the distance between the center of slit and circular hole 1000, and according to OPTICAL SENSORS 108
The area of reflection light L2 is received, adjustment concentric circles optical channel width L1, slit width L2 and slit separation distance L3, purpose exist
Reflection light L2 is set suitably to focus on OPTICAL SENSORS 108, to obtain good sensing signal quality.
In addition, as shown in the left side of fig 2, barrier layer 102 is the circular hole that black material is formed, in reflection light
L2 obstructs part reflection light L2, makes OPTICAL SENSORS 108 when receiving reflection light L2 after focus layer 100 generates diffraction
Diffraction phenomenon can be reduced, reflection light L2 can be preferably focused, and to avoid the generation of noise, therefore, barrier layer 102 can carry
Rise the focusing quality of reflection light L2.And light shield layer 104 is also circular hole, and compared with barrier layer 102, bore hole size ratio
Barrier layer 102 is small, can be further used for limiting the travel range and travel angle of reflection light L2.It is worth noting that, hiding
Photosphere 104 can be multilayered structure, the incident angle for effectively limitation reflection light L2.Specifically, according to identification of fingerprint
The arrangement mode of sensing unit 11 in system 1 can suitably dispose the light shield layer 104 of multilayered structure, come for effectively barrier
The reflection light L2 scattered from adjacent or other sensing units 11, avoids the generation of noise.Finally, aperture layer 106 is a side
Type hole hole is set to the top of OPTICAL SENSORS 108, for reducing noise caused by due to reflection light L2 is deviated.
In addition, the aperture layer 106 and OPTICAL SENSORS 108 of sensing unit 11 can pass through complementary metal oxide semiconductor
(Complementary Metal-Oxide-Semiconductor, CMOS) processing procedure (CMOS Process) formation, and focus layer
100, barrier layer 102 and light shield layer 104 can be formed in aperture layer 106 by micro-photographing process (Lithography Process)
And the top of OPTICAL SENSORS 108.Focus layer 100, barrier layer 102 and light shield layer 104 then can by epitaxy (Epitaxy),
Storehouse (Stacking) etches processing procedures such as (Etching) and generates.Furthermore it is noted that aperture layer 106 can be by metal
Material is made, and optionally coordinates the processing procedure of OPTICAL SENSORS 108 and is formed on OPTICAL SENSORS 108, or cooperation focus layer
100, the processing procedure of barrier layer 102 and light shield layer 104 and be formed under light shield layer 104.In other words, the processing procedure of aperture layer 106
It is not limited to CMOS processing procedures or epitaxial growth process etc., can be adjusted according to the different designs demand of optical sensing array 10.
Specifically, A to Fig. 3 E is please referred to Fig.3, Fig. 3 A to Fig. 3 E are the system of optical sensing of embodiment of the present invention array 10
Make method schematic diagram.As shown in Figure 3A, OPTICAL SENSORS 108 is formed on a silicon substrate by CMOS processing procedures.As shown in Figure 3B, light
Ring layer 106 is formed on OPTICAL SENSORS 108.Wherein, it is notable that aperture layer 106 can utilize CMOS processing procedures, or with it is poly-
Focus layer 100, barrier layer 102 and light shield layer 104 etc. are with identical generation type, by the processing procedures such as epitaxy, storehouse or etching
It is formed, as long as aperture layer 106 is formed on OPTICAL SENSORS 108 to obstruct reflection light.Light shield layer 104 is formed in aperture layer
On 106, and barrier layer 102 is then formed on light shield layer 104.Finally, focus layer 100 is formed on barrier layer 102.Its
In, focus layer 100, barrier layer 102 and light shield layer 104 are all using processing procedures such as epitaxy, storehouse or etchings to be formed in aperture layer
On 106, and visually the demand of manufacture or user select processing procedure mode to aperture layer 106, to be formed in OPTICAL SENSORS 108
Top.
It further illustrates, referring to FIG. 4, as shown in figure 4, the operation of fingerprint identification system 1 can be summarized as a flow 40.Stream
Journey 40 includes following steps：
Step 400：Start.
Step 402：User places finger in the top of the panel 13 of fingerprint identification system 1, and fingerprint identification system 1
Light source 14 generates light L1, finger and reflection is pointed into, to generate reflection light L2.
Step 404：Using the concentric circles optical channel in the focus layer 100 of optical sensing array 10, by what is reflected from finger
Reflection light L2 is focused.
Step 406：Part, which is obstructed, using the barrier layer 102 of optical sensing array 10 passes through the reflection of focus layer 100
Light L2 reduces the diffraction phenomenon of reflection light L2.
Step 408：Pass through focus layer 100 and barrier layer 102 using the masking of light shield layer 104 of optical sensing array 10
At least part of reflection light L2, to control an incident angle of reflection light L2.
Step 410：Using optical sensing array 10 aperture layer 106 blocking by focus layer 100, barrier layer 102 and
A spurious rays of the reflection light L2 of light shield layer 104.
Step 412：Using optical sensing array 10 OPTICAL SENSORS 108 sensing by focus layer 100, barrier layer 102,
The reflection light L2 of light shield layer 104 and aperture layer 106, to generate a sensing signal.
Step 414：Terminate.
First, according to step 402, finger is placed on the top of the panel 13 of fingerprint identification system 1 by user, and fingerprint is distinguished
The light source 14 of knowledge system 1 generates the finger that light L1 is pointed into user, is reflected by the finger of user and generated reflection light L2,
So that fingerprint identification system 1 carries out identification of fingerprint.According to step 404, fingerprint identification system 1 utilizes the poly- of optical sensing array 10
The reflection light L2 reflected from finger is focused by the concentric circles optical channel in focus layer 100, to obtain large range of reflection
Light L2 incident angles.According to step 406, pass through focus layer 100 using the masking of barrier layer 102 of optical sensing array 10
Reflection light L2 reduces the diffraction phenomenon of reflection light L2, to promote the quality of sensing signal.According to step 408, optics is utilized
The light shield layer 104 for sensing array 10 covers by focus layer 100 and the part reflection light L2 of barrier layer 102, makes reflected light
Line L2 is focused with incident angle appropriate.Meanwhile according to the interval distance between sensing unit 11 in optical sensing array 10
From width, density or the shape that can suitably adjust 104 circular hole of light shield layer, allow light shield layer 104 obstruct from adjacent or
The scattering light of other neighbouring sensing units 11, to avoid the generation of noise.According to step 410, optical sensing array is utilized
10 aperture layer 106 stops the spurious rays of the reflection light L2 by focus layer 100, barrier layer 102 and light shield layer 104,
Areas imaging can be limited and promote sensing signal quality.Finally, according to step 412, the light sensing of optical sensing array 10 is utilized
Device 108 senses by the reflection light L2 of focus layer 100, barrier layer 102, light shield layer 104 and aperture layer 106, according to sensing
Generated sensing signal carries out fingerprint sensing and judges user's status.
It is noted that previous embodiment is to illustrate idea of the invention, those skilled in the art works as can evidence
To do different modifications, and it is without being limited thereto.For example, referring to FIG. 5, Fig. 5 is one optical sensing array of the embodiment of the present invention
50 diagrammatic cross-section.Optical sensing array 50 is similar to optical sensing array 10, therefore identical component continues to use identical symbol
Number.As shown in figure 5, optical sensing array 50 includes a plurality of light shield layers 504, it is notable that the barrier layer 102 in Fig. 1
It can merge in the multilayered structure of light shield layer 504, as long as the diffracted light of reflection light L2 can be obstructed and be limited anti-by it
The incident angle of light L2 is penetrated, and removes denoising, so that OPTICAL SENSORS 108 is sensed.In addition, the hole of aperture layer 106
Hole shape adaptively can also be adjusted to the shapes such as rectangle, diamond shape or circle according to system design considerations, as long as can obstruct
The spurious rays of reflection light L2 make it that can not reach OPTICAL SENSORS 108.
In addition, referring to FIG. 6, Fig. 6 is the diagrammatic cross-section of one optical sensing array 60 of the embodiment of the present invention.Optical sensing
Array 60 is similar to optical sensing array 10, therefore identical component continues to use identical symbol.As shown in fig. 6, light source 64 is arranged
In the top of the focus layer 100 of sensing unit 61, and it is an Organic Light Emitting Diode (Organic Light-Emitting
Diode, OLED) display, wherein light source 64 (i.e. OLED display) L1 that can emit beam is pointed into finger and reflection, anti-to generate
Light L2 is penetrated, and sensing unit 61 can receive the reflection light L2 reflected from the finger of user.Thus, optics sense
Preferably sensing signal quality can be obtained to carry out fingerprint by the way that light source 64 to be set to the top of focus layer 100 by surveying array 60
Identification.
In conclusion optical sensing array 10 of the present invention is focused by focus layer 100, its concentric circles optical channel is utilized
Larger reflection light incident angle is obtained, and further utilizes barrier layer 102, light shield layer 104, the barrier reflection of aperture layer 106
The spurious rays of light finally recycle OPTICAL SENSORS 108 to by focus layer 100, barrier layer 102, light shield layer 104 and aperture
Layer 106 and the reflection light that reaches OPTICAL SENSORS 108 is sensed.The optical sensing array 10 of the present invention can efficiently control instead
Incident angle of the entering ray degree and travel range, and noise is obstructed, signal quality is sensed caused by OPTICAL SENSORS 108 to be promoted,
To promote the discrimination power of identification of fingerprint.
The foregoing is only a preferred embodiment of the present invention, is not intended to restrict the invention, for the skill of this field
For art personnel, the invention may be variously modified and varied.All within the spirits and principles of the present invention, any made by repair
Change, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
Claims (18)
1. a kind of fingerprint identification system, which is characterized in that include：
Panel, for placing finger；
Light source is set to the lower section of the panel, for generating light, wherein the light is pointed into the finger and transmitting, with
Generate reflection light；
Processor, for according to sensing signal, identification of fingerprint to be carried out to the finger；And
Optical sensing array is set to the lower section of the panel, is coupled to the processor, for generating the sensing signal,
Including：
OPTICAL SENSORS, the reflection light for receiving the finger reflection, to generate the sensing signal；
Focus layer is set to the top of the OPTICAL SENSORS, and the reflection light for reflecting the finger focuses；
Barrier layer is set to the lower section of the focus layer, for obstructing the reflection light of part to reduce the reflected light
The diffraction phenomenon of line；
Light shield layer is set to the lower section of the barrier layer, for the reflection light of shaded portions to control the reflected light
The incident angle of line；And
Aperture layer is set to the lower section of the light shield layer and the top of the OPTICAL SENSORS, for stopping the reflection light
Spurious rays.
2. fingerprint identification system as described in claim 1, which is characterized in that the focus layer includes a circular hole and plural number
The circle hole of a different-diameter, to form a concentric circles optical channel.
3. fingerprint identification system as described in claim 1, which is characterized in that when the reflection light passes through the focus layer,
The reflection light generates diffraction phenomenon by the concentric circles optical channel and focuses.
4. fingerprint identification system as described in claim 1, which is characterized in that the barrier layer includes one second circular hole,
The light shield layer includes a third circular hole, and the diameter of second circular hole is more than the straight of the third circular hole
Diameter.
5. fingerprint identification system as described in claim 1, which is characterized in that the aperture layer is made of metal.
6. fingerprint identification system as described in claim 1, which is characterized in that the aperture layer has a rectangular hole.
7. fingerprint identification system as described in claim 1, which is characterized in that at least one light shield layer and the focus layer
Color be black, and at least one light shield layer and the focus layer are formed by light absorbent.
8. fingerprint identification system as described in claim 1, which is characterized in that the light source is organic light-emitting diode display
Device.
9. a kind of method for sensing is applied to fingerprint identification system, the fingerprint identification system includes panel, light source, optics sense
Array is surveyed, for carrying out fingerprint sensing, the method for sensing includes：
One user places a finger in the top of the panel of the fingerprint identification system, the institute of the fingerprint identification system
It states light source and generates light, the finger and reflection are pointed into, to generate reflection light；
Using the concentric circles optical channel in the focus layer of the fingerprint identification system, the reflected light that the finger is reflected
Line is focused；
Using the fingerprint identification system barrier layer obstruct part pass through the reflection light of the focus layer, reduce
The diffraction phenomenon of the reflection light；
Pass through the focus layer and the transmitting light of the barrier layer using the light shield layer masking of the fingerprint identification system
At least part of line, to control the incident angle of the transmitting light；
Pass through the focus layer, the barrier layer and the light shield layer using the aperture layer blocking of the fingerprint identification system
The spurious rays of the transmitting light；And
Pass through the focus layer, the barrier layer, the screening using the OPTICAL SENSORS sensing of the fingerprint identification system
The transmitting light of photosphere and the aperture layer, to generate sensing signal.
10. method for sensing as claimed in claim 9, which is characterized in that logical using the concentric circles light in the focus layer
Road utilizes the concentric circles light in the focus layer the step of being focused the transmitting light from the finger
Channel makes to generate diffraction phenomenon by the transmitting light of the focus layer, to be focused.
11. a kind of manufacturing method, for manufacturing optical sensing array, which is characterized in that include：
OPTICAL SENSORS is formed in the top of silicon substrate, the OPTICAL SENSORS is used to receive the transmitting light of finger reflection, to generate
Sensing signal；
Aperture layer is formed on the OPTICAL SENSORS, the aperture layer is used to stop the spurious rays of the transmitting light；
An at least light shield layer is formed in the top of the aperture layer, an at least light shield layer is used for the reflection of shaded portions
Light is to control the incident angle of the reflection light；
An at least light shield layer top formed barrier layer, the barrier layer for obstruct the reflection light of part with
Reduce the diffraction phenomenon of the reflection light；And
Focus layer, the reflection that the focus layer is used to reflect on the finger are formed in the top of an at least light shield layer
Light focusing.
12. manufacturing method as claimed in claim 11, which is characterized in that form a circular hole in the focus layer and answer
The circle hole of several different-diameters, to form a concentric circles optical channel.
13. manufacturing method as claimed in claim 11, which is characterized in that form one second round hole on the barrier layer
Hole, an and third circular hole is formed on the light shield layer, and the second diameter of second circular hole is more than described the
The third diameter of three circular holes.
14. manufacturing method as claimed in claim 11, which is characterized in that an at least light shield layer and the focus layer
Color is black, and an at least light shield layer and the focus layer are formed by light absorbent.
15. manufacturing method as claimed in claim 11, which is characterized in that the aperture layer is made of metal.
16. manufacturing method as claimed in claim 11, which is characterized in that the forming method of the aperture layer and the light sensing
Device is identical as the focus layer.
17. manufacturing method as claimed in claim 11, which is characterized in that the focus layer, the barrier layer and the screening
The forming method of photosphere is selected from one of epitaxial growth process, storehouse processing procedure or etch process.
18. manufacturing method as claimed in claim 11, which is characterized in that the OPTICAL SENSORS is by Complementary MOS transistor
Processing procedure is formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US15/871,935 US10388689B2 (en) | 2017-02-13 | 2018-01-15 | Fingerprint identification system, sensing method and manufacturing method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201762458228P | 2017-02-13 | 2017-02-13 | |
| US62/458,228 | 2017-02-13 |
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| CN108427908A true CN108427908A (en) | 2018-08-21 |
| CN108427908B CN108427908B (en) | 2020-08-07 |
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| CN201711422172.8A Active CN108427908B (en) | 2017-02-13 | 2017-12-25 | Fingerprint identification system, sensing method and manufacturing method |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109685003A (en) * | 2018-12-24 | 2019-04-26 | 武汉华星光电半导体显示技术有限公司 | OLED display panel and the lower optical finger print recognition methods of screen |
| CN109948512A (en) * | 2019-03-15 | 2019-06-28 | 昆山国显光电有限公司 | Fingerprint identification device and display device |
| CN110426891A (en) * | 2019-07-31 | 2019-11-08 | 厦门天马微电子有限公司 | A kind of display panel and display device |
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| US11830281B2 (en) | 2021-08-12 | 2023-11-28 | Samsung Electronics Co., Ltd. | Electronic device including a fingerprint sensor |
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