CN108421410A - A kind of adsorbent - Google Patents

A kind of adsorbent Download PDF

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Publication number
CN108421410A
CN108421410A CN201810310693.2A CN201810310693A CN108421410A CN 108421410 A CN108421410 A CN 108421410A CN 201810310693 A CN201810310693 A CN 201810310693A CN 108421410 A CN108421410 A CN 108421410A
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CN
China
Prior art keywords
gas
hydroxide
component
special gas
adsorbent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201810310693.2A
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Chinese (zh)
Inventor
张帅
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Individual
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Individual
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Priority to CN201810310693.2A priority Critical patent/CN108421410A/en
Publication of CN108421410A publication Critical patent/CN108421410A/en
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B01D53/8659—Removing halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B01D53/8621—Removing nitrogen compounds
    • B01D53/8634—Ammonia
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B01D53/8671—Removing components of defined structure not provided for in B01D53/8603 - B01D53/8668
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

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  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)

Abstract

The present invention proposes a kind of adsorbent, including acid gas adsorption component, the first special gas absorbed component and the second special gas absorbed component, this adsorbent passes through catalyst, it is reacted at high temperature with toxic gas, the thermal decomposition rate of these gases is accelerated under certain catalyst action, to realize removing toxic substances, since process route is shorter, and other residuals are not generated, can directly be buried, it is extremely environmentally friendly.

Description

A kind of adsorbent
Technical field
The present invention relates to sorbing material fields, more particularly, to a kind of adsorbent.
Background technology
The research and development and production of absorption purifier are derived from American-European countries during the manufacturing, especially semiconductor production And manufacturing field, some more special gases, such as AsH3, PH3 etc. are will produce in production process, due to traditional activated carbon Absorption and water-washing method adsorption process easily generate heat, adsorb after unstable, easy secondary volatilization, there is still a need for handled again.
Invention content
In order to solve the above technical problems, the present invention proposes a kind of adsorbent, including acid gas adsorption component, One special gas absorbed component and the second special gas absorbed component.
Preferably, the acid gas adsorption component includes consisting of：Calcium hydroxide 75%-85%, vermiculite 10%- 20%, diatomite 1%-5%, sodium hydroxide 0.5%-2, surplus are water.
Preferably, the gas of the acid gas adsorption component absorption is：Cl2 or HCL or HBR or HF or BCl3.
Preferably, the first special gas absorbed component include manganese dioxide 20%-30%, copper oxide 40%-50%, Cupric sulfate pentahydrate 20%-30%, iron oxide 2%-20%, surplus are water.
Preferably, the gas of the first special gas absorbed component absorption is SiH4 or NH3 or PH3 or ASH3.
Preferably, the second special gas absorbed component is boron trifluoride 10%-30%, barium hydroxide 8%- 30%, strontium hydroxide 30%-40%, calcium hydroxide 10%-20%, calcium hydroxide 5%-10%, iron oxide 2%-7%, pigment Yellow 5%-20%, sodium hydroxide 1%-5%.
Preferably, the gas of the second special gas absorbed component absorption is：BF3 or HF.
Adsorbent proposed by the present invention has following advantageous effect：This adsorbent by catalyst, at high temperature with have Poison gas precursor reactant, the thermal decomposition rate of these gases is accelerated under certain catalyst action, to realize removing toxic substances, due to technique Route is shorter, and does not generate other residuals, can directly bury, extremely environmentally friendly.
Specific implementation mode
Below in conjunction with the embodiment of the present invention, technical scheme in the embodiment of the invention is clearly and completely described.
Embodiment 1
The present invention proposes a kind of adsorbent, including acid gas adsorption component, the first special gas absorbed component With the second special gas absorbed component, the acid gas adsorption component therein includes consisting of：Calcium hydroxide 75%, leech Stone 10%, diatomite 1%, sodium hydroxide 0.5%, surplus are water.The gas of acid gas adsorption component absorption is： Cl2 or HCL or HBR or HF or BCl3.
The first special gas absorbed component includes manganese dioxide 20%, copper oxide 40%, cupric sulfate pentahydrate 20%, oxygen Change iron 2%, surplus is water.The gas of the first special gas absorbed component absorption is SiH4 or NH3 or PH3 or ASH3.
The second special gas absorbed component be boron trifluoride 10%, barium hydroxide 8%, strontium hydroxide 30%, Calcium hydroxide 10%, calcium hydroxide 5%, iron oxide 2%, pigment yellow 6%, sodium hydroxide 1%, remaining is water.Preferably, described Second special gas absorbed component absorption gas be：BF3 or HF.
Embodiment 2
The present invention proposes a kind of adsorbent, including acid gas adsorption component, the first special gas absorbed component With the second special gas absorbed component, the acid gas adsorption component includes consisting of：Calcium hydroxide 80%, vermiculite 10%, diatomite 4%, sodium hydroxide 2%, surplus are water, and the gas of the acid gas adsorption component absorption is：Cl2 or HCL or HBR or HF or BCl3.
The first special gas absorbed component includes manganese dioxide 20%, copper oxide 40%, cupric sulfate pentahydrate 30%, oxygen Change iron 5%, surplus is water, and the gas of the first special gas absorbed component absorption is SiH4 or NH3 or PH3 or ASH3.
The second special gas absorbed component be boron trifluoride 20%, barium hydroxide 9%, strontium hydroxide 30%, Calcium hydroxide 10%, calcium hydroxide 5%, iron oxide 2%, pigment yellow 5%, sodium hydroxide 4%, the second special gas absorption Component absorption gas be：BF3 or HF.
Embodiment 3
The present invention proposes a kind of adsorbent, including acid gas adsorption component, the first special gas absorbed component With the second special gas absorbed component, the acid gas adsorption component includes consisting of：Calcium hydroxide 70%, vermiculite 15%, diatomite 5%, sodium hydroxide 2%, surplus are water, and the gas of the acid gas adsorption component absorption is：Cl2 or HCL or HBR or HF or BCl3.
The first special gas absorbed component includes manganese dioxide 30%, copper oxide 45%, cupric sulfate pentahydrate 20%, oxygen Change iron 5%, surplus is water, and the gas of the first special gas absorbed component absorption is SiH4 or NH3 or PH3 or ASH3.
The second special gas absorbed component be boron trifluoride 20%, barium hydroxide 15%, strontium hydroxide 30%, Calcium hydroxide 10%, calcium hydroxide 6%, iron oxide 4%, pigment yellow 5%, sodium hydroxide 5%, the second special gas absorption Component absorption gas be：BF3 or HF.
Above-mentioned adsorbent is packed into retort so that toxic gas is decomposed into：
SiH4→Si+H2
PH3→P+H2
B2H6→B+H2
GeH4→Ge+H2
Obtained solid matter is nontoxic, without reprocessing, can directly bury.
Fixed adsorbent is taken as test sample, each lead into cl2, HCL, HBR, HF, BCl3, SiH4, NH3, PH3, ASH3、BF3、HF：By monitoring the gas concentration variation of inflow stream and absorption, to calculate absorption total amount, and it is scaled standard Amount.
Gas type Test result (L/L) >Factory calibration (L/L) Treatment effeciency
ASH3 62.5 55 99%
PH3 58.9 55 99%
B2H6 37.4 30 99%
SiH4 26 25 99%
NH3 85.4 80 99%
Cl2 38.5 30 99%
BCl3 31.5 30 99%
HBr 72.6 70 99%
HCl 74.1 70 99%
HF 79.5 70 99%
BF3 32 30 99%
A variety of modifications of embodiment will be apparent to those skilled in the art, determine herein The General Principle of justice can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, originally Invention is not intended to be limited to the embodiments shown herein, and is to fit to and the principles and novel features disclosed herein Consistent widest range.

Claims (7)

1. a kind of adsorbent, which is characterized in that including acid gas adsorption component, the first special gas absorbed component and Two special gas absorbed components.
2. adsorbent according to claim 1, which is characterized in that the acid gas adsorption component includes with the following group At：Calcium hydroxide 75%-85%, vermiculite 10%-20%, diatomite 1%-5%, sodium hydroxide 0.5%-2%, surplus are Water.
3. adsorbent according to claim 2, which is characterized in that the gas of the acid gas adsorption component absorption For：Cl2 or HCL or HBR or HF or BCl3.
4. adsorbent according to claim 1, which is characterized in that the first special gas absorbed component includes two Manganese oxide 20%-30%, copper oxide 40%-50%, cupric sulfate pentahydrate 20%-30%, iron oxide 2%-20%, surplus are Water.
5. adsorbent according to claim 4, which is characterized in that the first special gas absorbed component absorption Gas is SiH4 or NH3 or PH3 or ASH3.
6. adsorbent according to claim 1, which is characterized in that the second special gas absorbed component is trifluoro Change boron 10%-30%, barium hydroxide 8%-30%, strontium hydroxide 30%-40%, calcium hydroxide 10%-20%, hydroxide Calcium 5%-10%, iron oxide 2%-7%, pigment yellow 5%-20%, sodium hydroxide 1%-5%, remaining is water.
7. adsorbent according to claim 6, which is characterized in that the second special gas absorbed component absorption Gas is：BF3 or HF.
CN201810310693.2A 2018-04-09 2018-04-09 A kind of adsorbent Pending CN108421410A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810310693.2A CN108421410A (en) 2018-04-09 2018-04-09 A kind of adsorbent

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810310693.2A CN108421410A (en) 2018-04-09 2018-04-09 A kind of adsorbent

Publications (1)

Publication Number Publication Date
CN108421410A true CN108421410A (en) 2018-08-21

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Family Applications (1)

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CN201810310693.2A Pending CN108421410A (en) 2018-04-09 2018-04-09 A kind of adsorbent

Country Status (1)

Country Link
CN (1) CN108421410A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1784259A (en) * 2002-12-09 2006-06-07 应用材料有限公司 Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent stream

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1784259A (en) * 2002-12-09 2006-06-07 应用材料有限公司 Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent stream

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Application publication date: 20180821