CN108414786B - Double-line photodiode array device and particle speed measuring method - Google Patents

Double-line photodiode array device and particle speed measuring method Download PDF

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CN108414786B
CN108414786B CN201810078235.0A CN201810078235A CN108414786B CN 108414786 B CN108414786 B CN 108414786B CN 201810078235 A CN201810078235 A CN 201810078235A CN 108414786 B CN108414786 B CN 108414786B
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photodiode array
particle
array unit
photodiode
double
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CN108414786A (en
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雷恒池
陈家田
黄敏松
张晓庆
郑首印
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Institute of Atmospheric Physics of CAS
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Institute of Atmospheric Physics of CAS
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Priority to PCT/CN2018/076211 priority patent/WO2019144443A1/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/64Devices characterised by the determination of the time taken to traverse a fixed distance
    • G01P3/68Devices characterised by the determination of the time taken to traverse a fixed distance using optical means, i.e. using infrared, visible, or ultraviolet light
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14643Photodiode arrays; MOS imagers

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Abstract

The invention discloses a double-wire photodiode array device, which is characterized in that two rows of photodiode array units with the same specification and performance are packaged on a photoelectric sensing element; the double-line photodiode array comprises a first photodiode array unit and a second photodiode array unit which are arranged in parallel, and is used for measuring the particle speed. According to the invention, two groups of photodiode arrays are integrated on a single photosensitive element, so that the distance between the two groups of photodiode arrays is greatly reduced, and the particle velocity can be measured more accurately.

Description

Double-line photodiode array device and particle speed measuring method
Technical Field
The invention relates to the field of particle measurement, in particular to a double-wire photodiode array device and a particle speed measuring method.
Background
Particles of various sizes and shapes exist in nature, such as cloud droplets, rain droplets and ice crystals in clouds, sea water droplets on the ocean, sand dust particles in sand storms, volcanic ash erupted from volcanoes, and the like. Accurate measurement of physical parameters such as size, shape and falling speed of these particles is of great importance to understanding the development and variation processes of corresponding natural phenomena.
One of the main methods of particle measurement at present is the optical measurement method, which can be specifically divided into the measurement technique based on optical scattering and the measurement technique based on optical imaging. The measurement technique based on optical scattering can measure the size of particles, but cannot acquire specific shape information of the particles, and the range of the measured particle diameter is limited. The measurement technology of optical imaging can not only measure the size of the particles, but also record the images of the particles, and the shape information of the particles can be obtained according to the images of the particles.
The particle measurement technology of optical imaging mainly comprises a particle imaging measurement device based on a single line array and a particle imaging measurement device based on a CCD camera. The particle imaging measuring device based on the CCD camera can accurately image the size and the shape of the particle, but cannot measure the particle speed; in addition, CCD cameras have limited their application in high-density, high-speed scenes due to their limited framing rate. The particle imaging measuring device based on the single linear array can measure the size, the shape and the speed of the particles, but the sampling rate of the particle image is prefabricated and cannot be matched with the speed of the particles, so that the measured particle image has great deviation, and the accuracy of the measured particle physical parameters is also seriously influenced. At present, two single linear arrays are also used for measuring the particle speed, but when the particle speed is measured by using the two single linear arrays, the distance between the two linear arrays is far due to the limitation of elements, the two linear arrays are very easily influenced by external environments such as wind during measurement, and in addition, errors can exist in the installation of separated elements, so that the accuracy of particle speed measurement is limited, and the precision is not high.
Disclosure of Invention
The invention aims to overcome the defect of low precision of the existing optical imaging measurement technology in particle speed measurement, and designs a double-wire photodiode array device.
In order to achieve the above object, the present invention provides a dual-line photodiode array device, wherein two rows of photodiode array units with the same specification and performance are packaged on a photosensor; the double-line photodiode array comprises a first photodiode array unit and a second photodiode array unit which are arranged in parallel, and is used for measuring the particle size and the speed of the particles.
As an improvement of the above device, the photodiode array unit is composed of N photodiodes; wherein N is more than or equal to 32 and less than or equal to 512.
As an improvement of the device, the light receiving surface of the photodiode is square, and the side length of the photodiode is 25-200 μm.
As an improvement of the above device, a distance s between the first photodiode array unit and the second photodiode array unit ranges from 1mm to 10 mm.
Based on the above two-wire photodiode array device, the present invention also provides a particle velocity measurement method, including: when the particles pass through the double-line photodiode array device, the time difference of the particles passing through the first photodiode array unit and the second photodiode array unit is obtained, and the speed of the particles is calculated according to the distance s between the first photodiode array unit and the second photodiode array unit.
As an improvement of the above method, the method specifically comprises:
when a laser beam output by a light source passes through the first photodiode array unit, the unit outputs a pulse indication signal to the FPGA chip, and the FPGA chip records the time t1 when the pulse is received; when the particles continuously fly and reach the second photodiode array unit, the unit outputs a pulse indication signal to the FPGA chip, and the FPGA chip records the moment as time t 2; the velocity v of the particles can be obtained after calculation:
Figure BDA0001560242480000021
the invention has the advantages that:
according to the invention, two groups of photodiode arrays are integrated on a single photosensitive element, so that the distance between the two groups of photodiode arrays is greatly reduced, and the particle velocity can be measured more accurately.
Drawings
FIG. 1 is a schematic diagram of a measuring device of the present invention;
FIG. 2 is a schematic diagram of the device of the present invention;
FIG. 3 is a schematic view of a measuring device of the present invention;
FIG. 4 is a schematic diagram of an optical system of the present invention;
FIG. 5 is a schematic illustration of an isometric optical lens assembly of an optical imaging module of the present invention;
FIG. 6 is a schematic view of an optical lens group of the optical imaging module of the present invention magnified 4 times;
FIG. 7 is a schematic diagram of a front-end signal conditioning circuit according to the present invention.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.
The measurement principle of the double-linear-array-based particle measurement device is as follows: a beam of laser with collimation and uniform light intensity distribution is directly irradiated on a photosensitive element with two rows of photodiode arrays after passing through an optical imaging system, wherein the two rows of photodiode arrays are distributed in parallel and have fixed distance. When a particle passes through the laser beam region, the particle blocks the laser beam and is imaged on a photosensitive element with two rows of photodiode arrays through an optical system, the two rows of photodiode arrays are scanned simultaneously at a certain frequency, and after the scanned signals are processed by a subsequent circuit, a complete particle image can be obtained by selecting any one of the optical array signals to be combined, as shown in fig. 1. In addition, the particles pass through the two photodiode arrays with a certain time difference, and the distance between the two photodiode arrays is fixed, as shown in fig. 2, so that the speed of the particles passing through the sampling area of the instrument can be obtained by measuring the time difference, as shown in formula (1):
Figure BDA0001560242480000031
as shown in fig. 3, a particle measurement device based on a twin-wire array comprises an optical system, a twin-wire photodiode array, a photoelectric signal acquisition and processing circuit, and a data processing and display module.
As shown in fig. 4, the optical system includes: the device comprises a light source, a laser beam shaping module and an imaging optical module; the light source is a semiconductor laser with the wavelength of 660nm, after optical shaping, the laser outputs a round laser beam which is collimated and has uniform light intensity distribution, and the light beam directly irradiates the double-line photodiode array through the imaging optical module.
Wherein, the light source is a semiconductor laser with the wavelength of 660nm and outputs a round laser beam with collimation and uniform light intensity distribution; the laser beam shaping module is a lens and is used for collimating the laser beam of the semiconductor laser into a parallel laser beam; the optical imaging module adopts the optical imaging principle of a Keplerian telescope, and a convex lens with proper parameters is selected on a light path from the output of a laser to a receiving surface of a detector element, so that an object on the optical imaging module can be clearly imaged on a plane taking the receiving surface of the detector as an image surface by taking the center of a sampling area, namely the middle point of two detection arms as an object surface, and the imaging is free from distortion. Under the condition that the whole optical path is fixed, the imaging of different resolutions of the object can be realized by configuring the lenses with different parameters. In practical application, two sets of lens combinations with different parameters can be selected, and equal-proportion imaging and 4-time magnification imaging of particles are respectively realized.
Parameters such as the size and shape of the particles can be acquired from the particle image.
As shown in fig. 5, the optical imaging module adopts a combination of a convex lens and a concave lens, the convex lens realizes reduction, the concave lens realizes enlargement, and the ratio of the final image to the particle size is 1: 1.
As shown in fig. 6, the optical imaging module adopts a combination scheme of a biconvex lens, where the first convex lens realizes equal-scale magnification and the second convex lens realizes 4-fold magnification.
The photoelectric signal acquisition processing circuit comprises: a front-end signal conditioning circuit and an FPGA control circuit; the double-line photodiode array outputs a current signal proportional to the light intensity of the laser, the current signal is converted into a binary signal which can be directly collected by the FPGA control circuit after passing through the front-end signal conditioning circuit, the binary signal is compressed in a certain data format after being processed by the FPGA control circuit, and the compressed data can be uploaded to the data processing and displaying module for processing, displaying and storing through the gigabit Ethernet port. And the data processing and displaying module runs on the upper computer.
The front-end signal conditioning circuit is mainly used for carrying out quick response processing on a weak transient signal generated by the photodiode array and providing the weak transient signal to the FPGA control circuit at the rear end to form a binary signal.
As shown in fig. 7, the front-end signal conditioning circuit includes: the circuit comprises a transimpedance amplification circuit U1, a post-stage signal amplification circuit U2, a voltage division emission follow-up circuit U3 and a comparison circuit U4.
The transimpedance amplification circuit U1 is configured to convert a current signal output by a photodiode into a voltage signal; the post-stage signal amplifying circuit U2 is used for amplifying the voltage signal output by the transimpedance amplifying circuit U1 so as to meet the requirement of subsequent processing; the voltage division follower circuit U3 is used for providing a threshold reference level for comparison for the comparison circuit U4; the comparator U4 is used to compare the input signal voltage, and its output voltage has only two possible states, high level or low level, if 1 is used to represent high level, and 0 is used to represent low level, the output of the comparator U4 just corresponds to the state of whether the particle is blocked or not. In this embodiment, when the laser is directly irradiated, a half of a voltage value generated by the light intensity received by the two-wire photodiode array is used as a threshold voltage of the comparing circuit of the sensor branch unit, that is, when the light intensity of the laser received by the two-wire photodiode array is weakened by more than half, it indicates that a particle occurs.
The FPGA control circuit selects an FPGA chip EP2C35F672C6N as a core unit of the whole circuit, and high-speed operation such as particle falling speed and particle image data compression coding is completed. The configuration module PROM EPCS16 stores the configuration information of the system, the ADC chip TLC549 is used for reading the working state of the instrument, the 64bits information of each linear array is input into the FPGA chip in sequence after being subjected to exclusion level conversion, and the information is collected by the FPGA chip. When particles appear, the device can calculate the falling speed of the particles by carrying out operation on the double-line photodiode array at the moment when the particles appear for the first time, updates the sampling rate to collect particle images, compresses and stores the collected particle image data, collects three paths of monitoring voltage values after one frame is stored, and transmits the three paths of monitoring voltage values together with the image data to an upper computer in a network transmission mode.
The double-line photodiode array is formed by packaging two rows of photodiode array units with completely consistent specifications and performances on one photoelectric sensing element, and comprises a first photodiode array unit and a second photodiode array unit; the distance s between the two photodiode array units is fixed, the value range of s is 1-10 mm, and each photodiode array unit consists of N photodiodes; wherein N is more than or equal to 32 and less than or equal to 512. The light receiving surface of the photodiode is square, and the side length size range of the photodiode is 25-200 mu m; when the magnification of the imaging optical module is 1, the resolution Res of the instrument is 100 micrometers, and the measurement range of the instrument is 100-6400 micrometers; when the magnification of the imaging optical module is 4, the resolution Res of the instrument is 25 μm, and the size of the measured particles of the instrument is 25-1600 μm. When the particles pass through the first photodiode array unit from top to bottom, the array outputs a pulse signal to the FPGA chip due to the reduction of light intensity, and the FPGA chip marks the moment as time t 1; when the particles continue to fall and reach the second photodiode array unit, the array will also output a pulse indication signal to the FPGA chip, and the FPGA chip will record the time as time t 2.
Finally, it should be noted that the above embodiments are only used for illustrating the technical solutions of the present invention and are not limited. Although the present invention has been described in detail with reference to the embodiments, it will be understood by those skilled in the art that various changes may be made and equivalents may be substituted without departing from the spirit and scope of the invention as defined in the appended claims.

Claims (6)

1. The double-wire photodiode array device is characterized in that two rows of photodiode array units with the same specification and performance are packaged on one photoelectric sensing element; the double-line photodiode array comprises a first photodiode array unit and a second photodiode array unit which are arranged in parallel, and is used for measuring the particle speed.
2. The two-wire photodiode array device of claim 1, wherein the photodiode array unit is comprised of N photodiodes, where 32 ≦ N ≦ 512.
3. The twin wire photodiode array device of claim 2, wherein the light receiving surface of the photodiode is square, and the side length of the photodiode is in the range of 25 μm to 200 μm.
4. The twin wire photodiode array device of claim 2, wherein the distance s between the first photodiode array unit and the second photodiode array unit ranges from 1mm to 10 mm.
5. A method of particle velocity measurement based on the two-wire photodiode array device of any of claims 1-4, the method comprising: when the particle passes through the double-wire photodiode array device, the time difference of passing through the first photodiode array unit and the second photodiode array unit is obtained, and the speed of the particle is calculated according to the distance s between the first photodiode array unit and the second photodiode array unit.
6. The method according to claim 5, characterized in that it comprises in particular:
when a laser beam output by a light source passes through the first photodiode array unit, the unit outputs a pulse indication signal to the FPGA chip, and the FPGA chip records the time t1 when the pulse is received; when the particles continuously fly and reach the second photodiode array unit, the unit outputs a pulse indication signal to the FPGA chip, and the FPGA chip records the moment as time t 2; the velocity v of the particles can be obtained after calculation:
Figure FDA0001560242470000011
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CN201810078235.0A CN108414786B (en) 2018-01-26 2018-01-26 Double-line photodiode array device and particle speed measuring method
US16/960,900 US11828905B2 (en) 2018-01-26 2018-02-11 Dual line diode array device and measurement method and measurement device for particle velocity
PCT/CN2018/076211 WO2019144443A1 (en) 2018-01-26 2018-02-11 Dual wire diode array device and measurement method and measurement device for particle velocity
FI20205820A FI130492B (en) 2018-01-26 2018-02-11 Dual line diode array device and measurement method and measurement device for particle velocity

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