CN108348877B - Gas mixer - Google Patents
Gas mixer Download PDFInfo
- Publication number
- CN108348877B CN108348877B CN201680028757.9A CN201680028757A CN108348877B CN 108348877 B CN108348877 B CN 108348877B CN 201680028757 A CN201680028757 A CN 201680028757A CN 108348877 B CN108348877 B CN 108348877B
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- China
- Prior art keywords
- pilot
- gas
- pressure
- valve
- passage
- Prior art date
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- Expired - Fee Related
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- 239000007789 gas Substances 0.000 claims description 277
- 238000001125 extrusion Methods 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 4
- 238000007599 discharging Methods 0.000 claims 2
- 230000002093 peripheral effect Effects 0.000 description 9
- 230000004043 responsiveness Effects 0.000 description 9
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/71—Feed mechanisms
- B01F35/712—Feed mechanisms for feeding fluids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/10—Mixing gases with gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/71—Feed mechanisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/71—Feed mechanisms
- B01F35/717—Feed mechanisms characterised by the means for feeding the components to the mixer
- B01F35/71805—Feed mechanisms characterised by the means for feeding the components to the mixer using valves, gates, orifices or openings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/80—Forming a predetermined ratio of the substances to be mixed
- B01F35/81—Forming mixtures with changing ratios or gradients
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D16/00—Control of fluid pressure
- G05D16/04—Control of fluid pressure without auxiliary power
- G05D16/06—Control of fluid pressure without auxiliary power the sensing element being a flexible membrane, yielding to pressure, e.g. diaphragm, bellows, capsule
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Control Of Fluid Pressure (AREA)
- Multiple-Way Valves (AREA)
- Accessories For Mixers (AREA)
- Fluid-Driven Valves (AREA)
Abstract
A gas mixer (1) comprises a pilot pressure reducing valve (2) and a pressure equalizing valve (3). The pilot pressure reducing valve (2) comprises a first pilot housing (21), a pilot valve rod (22), a second pilot housing (23), a pilot seal (24) and a pilot valve body (26). A state in which the pilot valve body (26) and the second pilot housing (23) are in contact with each other and are separated from each other is achieved by the pilot stem (22) reciprocating in the axial direction. In a state where the pilot valve body (26) and the second pilot housing (23) are in contact with each other, a first pressure space (21A), a second pressure space (21B), and a third pressure space (21C) are formed in the first pilot housing (21). The third pressure space (21C) communicates with the second pressure space (21B). A pilot seal (24) is fixed to the first pilot housing (21).
Description
Technical Field
The invention relates to a gas mixer.
Background
A gas mixer may be used to mix two different gases together for supply. In the structure of the gas mixer, for example, a pressure reducing valve is used to reduce the gas pressure from a main pressure to an equal prescribed sub-pressure, and the resultant gases are mixed together (see, for example, patent document 1).
CITATION LIST
Patent document
Patent document 1: japanese patent application laid-open No. 2006-349030
Disclosure of Invention
Technical problem
The gas mixer preferably has high responsiveness. The invention aims to provide a gas mixer with excellent responsiveness.
Solution to the problem
The gas mixer according to the invention comprises a pilot pressure reducing valve, a pressure equalizing valve, and a mixing section. The pilot pressure reducing valve reduces the pressure of the introduced pilot gas to the pilot pressure, and discharges the resultant gas. The pressure equalizing valve is connected to the pilot pressure reducing valve, and reduces pressures of the introduced first gas and second gas to an equal pressure based on a pilot pressure of the pilot gas discharged from the pilot pressure reducing valve and discharges the resulting gas. The mixing section receives the first gas and the second gas discharged from the pressure equalizing valve, mixes the first gas and the second gas, and discharges the resulting gas. The pilot pressure reducing valve comprises a first pilot housing, a pilot valve rod, a second pilot housing, a pilot sealing piece, a pilot extrusion piece and a pilot valve body. The pilot valve stem is disposed within the first pilot housing and is reciprocable in an axial direction. The second pilot housing is disposed within and fixed to the first pilot housing. The pilot seal is disposed in contact with an outer surface of the pilot valve rod and an inner surface of the first pilot housing to maintain an airtight state between the pilot valve rod and the first pilot housing. The pilot extrusion is disposed to contact the pilot valve rod and to extrude the pilot valve rod in an axial direction. The pilot valve body is mounted on the pilot valve stem. The pilot stem achieves a state in which the pilot valve body and the second pilot housing are in contact with each other and a state in which the pilot valve body and the second pilot housing are separated from each other by reciprocating in the axial direction. A pilot inflow passage through which pilot gas flows in and a pilot outflow passage through which pilot gas whose pressure is reduced to a pilot pressure flows out are formed in the first pilot housing. In a state where the pilot valve body and the second pilot housing are in contact with each other, a first pressure space, a second pressure space, and a third pressure space are formed in the first pilot housing. The first pressure space is surrounded by the pilot stem, the first pilot housing, and the second pilot housing, and is connected to the pilot inflow passage. The second pressure space is provided on the opposite side of the pilot valve body from the side where the first pressure space is located, and is connected to the pilot outflow passage. The third pressure space is provided on the opposite side of the pilot seal from the side where the first pressure space is located, and contacts one end of the pilot valve stem. The third pressure space communicates with the second pressure space. The pilot seal is fixed to the first pilot housing.
The gas mixer of the present invention includes a pressure equalizing valve that is connected to a pilot reducing valve and reduces pressures of introduced first and second gases to an equal pressure based on a pilot pressure of a pilot gas discharged from the pilot reducing valve, and discharges the first and second gases reduced in pressure. This makes it possible to adjust the pressures of the first gas and the second gas by adjusting the pilot pressure of the pilot gas discharged from the pilot pressure reducing valve.
Further, in the gas mixer of the present invention, the third pressure space and the second pressure space within the pilot pressure reducing valve communicate with each other. This reduces the force acting on the pilot valve lever corresponding to the pressure difference between the third pressure space and the second pressure space. However, a force in the axial direction corresponding to the pressure difference between the third pressure space and the first pressure space may act on the pilot seal. Here, in order to maintain a state in which the pilot valve body and the second pilot housing are in contact with each other, an axial force (pressing load) is applied to the pilot valve rod in a direction in which the pilot valve body is pressed against the second pilot housing.
In the case where the pilot seal is fixed to the pilot valve stem, a force corresponding to the pressure difference between the third pressure space and the first pressure space will act on the pilot valve stem. Therefore, in order to maintain the state in which the pilot valve body and the second pilot housing are in contact with each other, it is necessary to apply a force corresponding to the differential pressure between the third pressure space and the first pressure space to the pilot valve lever in addition to the above-described pressing load.
Specifically, for example, assuming that the maximum differential pressure between the third pressure space and the first pressure space is 0.45MPa, the minimum differential pressure between the third pressure space and the first pressure space is 0.15MPa, and the cross-sectional area of the pilot seal in the plane perpendicular to the axial direction is 18.8mm2And the above-mentioned crushing load is 5.89N. In this case, in order to maintain the contact state between the pilot valve body and the second pilot housing, the force to be applied to the pilot stem is set as follows.
The force acting on the pilot seal is derived by multiplying the pressure difference between the third pressure space and the first pressure space by the cross-sectional area of the pilot seal in a plane perpendicular to the axial direction. When the differential pressure between the third pressure space and the first pressure space and the cross-sectional area of the pilot seal were the above values, the force acting on the pilot seal became 8.46N when the differential pressure between the third pressure space and the first pressure space reached the maximum differential pressure. On the other hand, when the pressure difference between the third pressure space and the first pressure space reaches the minimum pressure difference, the force acting on the pilot seal becomes 2.82N. In this way, the force acting on the pilot seal changes in accordance with the change in the pressure difference between the third pressure space and the first pressure space.
In order to maintain the contact state between the pilot valve body and the second pilot housing, a force corresponding to when the differential pressure between the third pressure space and the first pressure space becomes the maximum differential pressure (i.e., a force of 14.35N obtained by adding 8.46N to the above-described pressing load of 5.89N) should be applied to the pilot valve lever. In this case, however, the force acting on the pilot valve stem will be excessive when the pressure difference between the third pressure space and the first pressure space becomes small. When the pressure difference between the third pressure space and the first pressure space is minimum, the force required to maintain the contact state between the pilot valve body and the second pilot housing is 8.71N, which is obtained by adding 2.82N to the above-described pressing load of 5.89N. This means that when the pressure difference between the third pressure space and the first pressure space becomes the minimum pressure difference, an excessive force of 5.64N will act on the pilot valve stem.
That is, when the differential pressure between the third pressure space and the first pressure space becomes small, the pilot valve lever becomes unresponsive within the above-described range of excessive force. As a result, with the pilot seal fixed to the pilot valve stem, the responsiveness of the pilot pressure reducing valve is reduced.
In contrast, in the gas mixer according to the present invention, the pilot seal is fixed to the first pilot housing. This configuration enables the first pilot housing to withstand a force acting on the pilot seal corresponding to a pressure difference between the third pressure space and the first pressure space. It is not necessary to apply a force to the pilot valve lever corresponding to the pressure difference between the third pressure space and the first pressure space. As a result, the range in which the pilot valve rod becomes unresponsive to the pressure change in the second pressure space is narrowed, thereby improving the responsiveness of the pilot pressure reducing valve.
Thus, according to the gas mixer of the present invention, a gas mixer having excellent responsiveness can be provided.
In above-mentioned gas mixer, the pressure-equalizing valve can include pressure-equalizing housing, first pressure-equalizing valve rod, second pressure-equalizing valve rod, first pressure-equalizing extruded article, second pressure-equalizing extruded article, first soft valve body, the soft valve body of second, the hard valve body of first hard valve body and second. The first pressure equalizing valve rod and the second pressure equalizing valve rod are arranged in the pressure equalizing shell and reciprocate in the axial direction. The first pressure equalizing presser is provided in the pressure equalizing housing, constitutes a part of a wall surface of the pilot gas chamber (which is a space connected to the pilot pressure reducing valve), and contacts the first pressure equalizing valve stem and presses the first pressure equalizing valve stem in the axial direction. The second pressure equalizing presser is provided in the pressure equalizing housing, constitutes another part of the wall surface of the pilot gas chamber, and contacts the second pressure equalizing valve stem and presses the second pressure equalizing valve stem in the axial direction. The first soft valve body is arranged on the first pressure equalizing valve rod. The second soft valve body is arranged on the second pressure equalizing valve rod. The first hard valve body is arranged to reciprocate axially relative to the first pressure equalization valve stem. The second hard valve body is arranged to reciprocate axially relative to the second pressure equalizing stem. A first gas inflow channel, a first gas discharge channel, a first gas intermediate channel, a second gas inflow channel, a second gas discharge channel and a second gas intermediate channel are formed in the pressure equalizing shell. The first gas flows in through the first gas inflow passage. The first gas is discharged through the first gas discharge passage. The first gas intermediate passage connects the first gas inflow passage and the first gas discharge passage. The second gas flows in through the second gas inflow passage. The second gas is discharged through the second gas discharge passage. The second gas intermediate passage connects the second gas inflow passage and the second gas discharge passage. The first soft valve body is arranged at the connection between the first gas inflow channel and the first gas intermediate channel. The first hard valve body is disposed at a junction between the first gas intermediate passage and the first gas discharge passage. The second soft valve body is arranged at the connection between the second gas inflow channel and the second gas intermediate channel. A second hard valve body is arranged at the junction between the second gas intermediate channel and the second gas discharge channel.
This configuration allows each of the hard valve bodies mounted on the respective pressure equalizing valve rods to reciprocate in the axial direction to open and close the connection between the gas intermediate passage and the gas discharge passage, thereby making it possible to stably control the small flow rate of the gas flowing from the gas inflow passage to the gas discharge passage. Further, when the soft valve body fixed to the pressure equalizing valve rod closes the gap between the gas intermediate passage and the gas inflow passage, the connection with the gas discharge passage is sealed by the soft valve body, and thus the tightly closed state between the gas inflow passage and the gas discharge passage is stably maintained. Thus, it is possible to ensure control of both a small gas flow rate and a reliable sealing state. By adopting the above-described pressure equalizing valve, it is possible to provide a high-performance gas mixer as a combination of a pilot pressure reducing valve excellent in responsiveness and a pressure equalizing valve capable of ensuring control of both a small gas flow rate and a reliable sealing state. Each hard valve body is made of, for example, metal or other material that does not substantially deform when closing the gap. Each of the soft valve bodies is made of, for example, resin, rubber, or other material that is deformable when closing the gap.
In the above gas mixer, each of the first pressure equalizing extrusion and the second pressure equalizing extrusion may include an elastic member and a support member. The support member is made of a material having higher rigidity than the elastic member, and supports the elastic member. The elastic member includes a base portion and a protruding portion. The base portion is disc-shaped. The protruding portion is provided so as to surround the outer periphery of the base portion and protrude in a direction in which the pilot gas chamber is enlarged. The base portion is entirely supported by the support. This configuration makes it possible to transmit the pilot pressure to each pressure equalizing stem while preventing the elastic member from suffering elastic loss.
In the above gas mixer, the mixing section may include a mixing ratio adjuster and a combining vessel. The mixing ratio adjuster adjusts the mixing ratio of the first gas and the second gas discharged from the pressure equalizing valve and discharges the first gas and the second gas from the first gas passage and the second gas passage, respectively. The merging container is connected to the first gas passage and the second gas passage, and has a merging chamber having a cross-sectional area perpendicular to a flow direction of the first gas and the second gas larger than cross-sectional areas of the first gas passage and the second gas passage. This configuration enables uniform mixing of the first gas and the second gas with high mixing accuracy.
In the above gas mixer, the direction in which the first gas is discharged from the first gas passage to the combining container may be along the direction in which the second gas is discharged from the second gas passage to the combining container. This configuration prevents the mixing accuracy from being lowered due to the collision of the first gas and the second gas discharged from the pressure equalizing valve.
Effects of the invention
As is apparent from the above description, according to the gas mixer of the present invention, a gas mixer having excellent responsiveness can be provided.
Drawings
Fig. 1 is a schematic diagram showing the structure of a gas mixer;
fig. 2 is a schematic cross-sectional view showing the structure of a pilot pressure reducing valve;
FIG. 3 is a schematic cross-sectional view showing the structure of the pressure equalizing valve;
fig. 4 is a schematic enlarged sectional view showing a main portion of the pressure equalizing valve;
FIG. 5 is a schematic cross-sectional view illustrating operation of a pilot pressure relief valve;
FIG. 6 is another schematic cross-sectional view illustrating operation of a pilot pressure relief valve;
FIG. 7 is a schematic cross-sectional view illustrating the operation of the pressure equalization valve;
FIG. 8 is another schematic cross-sectional view illustrating the operation of the pressure equalization valve;
FIG. 9 is another schematic cross-sectional view illustrating the operation of the pressure equalization valve.
Description of the reference numerals
1: a gas mixer; 2: a pilot pressure reducing valve; 21: a first pilot housing; 211: a first outer frame; 211B: an adjusting portion; 211C: an adjustment shaft; 211D: a first support portion; 212: a second outer frame; 212B: a bottom; 21A: a first pressure space; 21B: a second pressure space; 21C: a third pressure space; 21D: a pilot interior space; 22: a pilot valve stem; 22A: a through hole; 23: a second pilot housing; 231: an O-ring; 232: a bearing portion; 23A: a housing channel; 24: a pilot seal; 241: a first seal-securing portion; 242: an O-ring; 243: a second seal-securing portion; 25: a pilot extrusion; 251: a pilot spring; 252: a diaphragm; 252A: a protruding portion; 253: a support portion; 254: a pressing portion; 26: a pilot valve body; 261: a valve body fastening portion; 262: a coil spring; 27: a pilot inflow channel; 28: a pilot outflow channel; 3: a pressure equalizing valve; 301: a first pressure reducing valve; 302: a second pressure reducing valve; 31: a pressure equalizing shell; 311: a first valve housing; 312: a second valve housing; 31A: a first gas inflow channel; 31B: a first gas discharge passage; 31C: a first gas intermediate channel; 31D: a second gas inflow channel; 31E: a second gas discharge channel; 31F: a second gas intermediate channel; 32: a first pressure equalizing valve stem; 321: an engaging portion; 322: a bearing portion; 33: a second pressure equalizing valve rod; 33A: a through hole; 34: a pilot gas chamber; 35: a first pressure equalizing extrusion; 351: an elastic member; 351A: a base portion; 351B: a protruding portion; 352: a support member; 353: a fastening portion; 354: a pressing portion; 36: a second pressure equalizing extrusion; 371: a first soft valve body; 372: a first hard valve body; 381: a second soft valve body; 382: a second hard valve body; 382A: a tapered surface; 41: a coil spring; 43: a valve seat; 44: a valve body fastening portion; 46: a fastening portion; 47: an O-ring; 48: a fastening portion; 5: a mixing section; 51: merging the containers; 51A: a first gas passage; 51B: a second gas passage; 52: a merging chamber; 53: a mixing ratio adjuster; 6: a flow rate regulating valve; 91: a first conduit; 92: a second conduit; 93: a third pipeline; 94: a fourth conduit; 95: a fifth pipeline; 96: a sixth pipeline; 97: a seventh pipe; 98: an eighth conduit; 99: a ninth conduit; a: a first gas; b: a second gas.
Detailed Description
Embodiments of the present invention will be described below with reference to the accompanying drawings. In the following drawings, the same or corresponding parts are denoted by the same reference numerals, and thus a description thereof will not be repeated.
Referring to fig. 1, a gas mixer 1 according to a first embodiment includes a pilot pressure reducing valve 2, a pressure equalizing valve 3, a mixing section 5, and a flow rate regulating valve 6.
The pressure equalizing valve 3 is connected to a first pipe 91, a second pipe 92, a third pipe 93, and a fourth pipe 94. The first pipe 91 is connected to the first gas inflow passage 31A. The second pipe 92 is connected to the second gas inflow passage 31D. The third pipe 93 is connected to the first gas discharge passage 31B. The fourth piping 94 is connected to the second gas discharge passage 31E.
The pilot pressure reducing valve 2 is connected to a fifth pipe 95 and a sixth pipe 96. One end of the fifth conduit 95 is connected to the pilot inflow passage 27 of the pilot pressure reducing valve 2. The other end of the fifth pipe 95 is connected to the second pipe 92. One end of the sixth pipe 96 is connected to the pilot outflow passage 28. The other end of the sixth conduit 96 is connected to the pilot gas chamber 34 in the pressure equalizing casing 31 of the pressure equalizing valve 3.
The mixing section 5 includes a combining vessel 51 and a mixing ratio adjuster 53. The mixing ratio adjuster 53 is connected to a third pipe 93 and a fourth pipe 94. The merging tank 51 and the mixing ratio adjuster 53 are connected via a seventh pipe 97 and an eighth pipe 98. The seventh pipe 97 is connected to the first gas passage 51A. The eighth conduit 98 is connected to the second gas passage 51B. A ninth conduit 99 is provided between the mixing section 5 and the flow rate adjustment valve 6.
Referring to fig. 2, the pilot pressure reducing valve 2 includes a first pilot housing 21, a pilot valve lever 22, a second pilot housing 23, a pilot seal 24, a pilot extrusion 25, and a pilot valve body 26.
The first pilot housing 21 includes a first outer frame 211 and a second outer frame 212. The second outer frame 212 has a multi-stage cylindrical inner space with a bottom 212B at one end and an opening at the other end. The diameter of the inner space of the second outer frame 212 decreases as the distance from the one end decreases. The first outer frame 211 has a multi-stage cylindrical pilot inner space 21D, both ends of which are open. The diameter of the leading internal space 21D of the first external frame 211 decreases as the distance from one end thereof decreases. The first and second outer frames 211 and 212 are coupled when being assembled with each other such that the outer circumferential surface of the other end of the first outer frame 211 is in contact with the inner circumferential surface of the other end of the second outer frame 212.
The adjustment shaft 211C is disposed to pass through one end of the first outer frame 211. An adjusting portion 211B is connected to one end of the adjusting shaft 211C. The other end of the adjustment shaft 211C is located in the pilot inner space 21D.
Pilot pressure reducing valve 2 includes a pilot spring 251 located in pilot inner space 21D. One end of the pilot spring 251 contacts the first support portion 211D. The other end of the adjustment shaft 211C contacts a side of the first support portion 211D opposite to a side contacting the pilot spring 251.
The pilot extrusion 25 includes a diaphragm 252, a support portion 253, and an extrusion portion 254. The diaphragm 252 having a through hole at the center is sandwiched between the first and second outer frames 211 and 212 and supported. The outer peripheral portion of the diaphragm 252 has a protruding portion 252A that protrudes toward the pilot inner space 21D. The pressing portion 254 is in a shape including a disk-shaped main body portion and a protruding portion protruding from the main body portion in the axial direction. The main portion of the pressing portion 254 is located on the second outer frame 212 side with respect to the diaphragm 252, and the protruding portion passes through the through hole of the diaphragm 252 into the first outer frame 211 side. The support portion 253 has a disk shape with a through hole at the center. The support portion 253 is provided on the first outer frame 211 side with respect to the diaphragm 252. In a state where the protruding portion of the pressing portion 254 is inserted into the through hole of the supporting portion 253, the diaphragm 252 is in contact with and sandwiched between the pressing portion 254 and the supporting portion 253. The support portion 253 is provided in contact with the other end of the pilot spring 251.
The pilot stem 22 is disposed within the second outer frame 212. A through hole 22A is formed in the pilot stem 22, and the through hole 22A is open at one end, extends axially, and penetrates radially at a position closer to the other end of the pilot valve body 26. The other end of the pilot stem 22 contacts the pressing portion 254. The pilot stem 22 is arranged to be movable in the axial direction.
The second pilot housing 23 is arranged to surround a part of the outer circumference of the pilot stem. A bearing portion 232 is provided between the second pilot housing 23 and the pilot valve lever 22. The second pilot housing 23 is airtightly fixed to the center of the inner peripheral surface of the second outer frame 212 with an O-ring 231 interposed therebetween. A housing passage 23A is formed in the second pilot housing 23, and the housing passage 23A connects the second pressure space 21B and the first pressure space 21A. The through hole 22A of the pilot stem 22 communicates with the housing passage 23A. Thus, the second pressure space 21B communicates with the third pressure space 21C.
The pilot valve body 26 is annular. Since the pilot stem 22 is inserted through the pilot valve body 26, the pilot valve body 26 is fixed to the pilot stem 22. By the pilot stem 22 reciprocating in the axial direction, a state in which the pilot valve body 26 and the second pilot housing 23 are in contact with each other and a state in which the pilot valve body and the second pilot housing are separated from each other are achieved. The cylindrical valve body fastening portion 261 is provided to cover an outer peripheral portion of the pilot valve body 26.
The pilot seal 24 includes a first seal securing portion 241, an O-ring 242, and a second seal securing portion 243. The pilot seal 24 is fixed to an inner peripheral surface of the second outer frame 212 on a side opposite to the second pilot housing 23 side with respect to the pilot valve body 26. A coil spring 262 is provided between the second seal fastening portion 243 and the valve body fastening portion 261. One end of the coil spring 262 contacts the second seal-fastening portion 243. The other end of the coil spring 262 contacts the valve body fastening portion 261. An O-ring 242 is provided sandwiched between the first and second seal securing portions 241, 243. The O-ring 242 is disposed to contact an outer circumferential surface of the pilot stem 22 and an inner circumferential surface of the second outer frame 212. The pilot stem 22 and the second outer frame 212 are sealed against each other by an O-ring 242.
A first pressure space 21A is formed in the first pilot housing 21, and the pilot valve lever 22, the first pilot housing 21, and the second pilot housing 23 surround the first pressure space 21A. The first pressure space 21A is connected to the pilot inflow passage 27. The second pressure space 21B is provided on the side opposite to the first pressure space 21A side with respect to the pilot valve body 26. The second pressure space 21B is connected to the pilot outflow channel 28. A third pressure space 21C is also formed, which third pressure space 21C is provided on the side opposite to the first pressure space 21A side with respect to the pilot seal 24 and is in contact with one end of the pilot valve lever 22. The third pressure space 21C communicates with the second pressure space 21B.
Referring to fig. 3 and 4, the pressure equalizing valve 3 includes: a pressure equalizing case 31; a first pressure reducing valve 301 comprising a first pressure equalizing valve stem 32, a first pressure equalizing extrusion 35, a first soft valve body 371, and a first hard valve body 372; and a second pressure reducing valve 302 including a second pressure equalizing valve stem 33, a second pressure equalizing pressure member 36, a second soft valve body 381, and a second hard valve body 382. The first pressure reducing valve 301 and the second pressure reducing valve 302 are provided in pairs so as to be opposed to each other along the axis. The first pressure equalizing presser 35 is provided inside the pressure equalizing housing 31, and constitutes a part of the wall surface of the pilot gas chamber 34, the pilot gas chamber 34 being a space connected to the pilot pressure reducing valve 2. The second pressure equalizing presser 36 constitutes another part of the wall surface of the pilot gas chamber 34.
A pilot gas chamber 34 surrounded by the first pressure equalizing presser 35, the second pressure equalizing presser 36, and the pressure equalizing housing 31 is formed between the first pressure reducing valve 301 and the second pressure reducing valve 302. The pilot gas chamber 34 is connected to the pilot outflow passage 28.
The first pressure reducing valve 301 and the second pressure reducing valve 302 have a similar structure, and therefore the following description will focus on the second pressure reducing valve 302. Referring to fig. 4, the second pressure reducing valve 302 includes a first valve housing 311 and a second valve housing 312. The first valve housing 311 has a multi-stage cylindrical inner space, both ends of which are open. The second valve housing 312 has a multi-stage cylindrical inner space with one end being a bottom and the other end being open.
The second pressure equalizing pressing member 36 includes an elastic member 351 (which is a diaphragm), a support 352, a fastening portion 353, and a pressing portion 354. The elastic member 351 has a disk shape with a through hole at the center. The outer peripheral portion of the elastic member 351 is connected to the pressure equalizing housing 31. The elastic member 351 includes a disk-shaped seating portion 351A and a protruding portion 351B. The protruding portion 351B is provided to surround the outer periphery of the base portion 351A and protrudes in a direction to enlarge the pilot gas chamber 34. The base portion 351A is entirely sandwiched between the pair of supporting pieces 352 and supported by the pair of supporting pieces 352.
The second pressure equalization valve stem 33 is disposed within the first valve housing 311. The second pressure equalizing valve rod 33 has a through hole 33A formed therein, the through hole 33A being open at one end, extending toward the other end, and penetrating radially near the other end. One end of the second pressure equalizing valve stem 33 contacts the pressing portion 354. The outer peripheral surface of one end of the second pressure equalizing valve stem 33 is radially supported by a bearing portion 322 with respect to one end of the first valve housing 311. A radially protruding engaging portion 321 is fixed on the outer peripheral surface of the second pressure equalizing valve rod 33. The second pressure equalizing valve stem 33 is arranged to be movable in the axial direction.
Second hard valve body 382 is hollow cylindrical. A prescribed clearance T is formed in the axial direction between the second hard valve body 382 and the engagement portion 321. The second pressure equalization valve stem 33 is inserted through the second hard valve body 382. Second hard valve body 382 includes a tapered surface 382A, the outer diameter of tapered surface 382A decreasing toward one end thereof. The second hard valve body 382 and the second pressure equalizing stem 33 are sealed against each other by the O-ring 42. The second hard valve body 382 is arranged to be movable in the axial direction relative to the second pressure equalizing valve stem 33. The second hard valve body 382 is arranged such that it can achieve a state in which the tapered surface 382A of the second hard valve body 382 and the first valve housing 311 are in contact with each other and are not in contact with each other.
The other end of the first valve housing 311 is provided with a valve seat 43. The valve seat 43 is annular. The valve seat 43 is provided sandwiched between the first valve housing 311 and the second valve housing 312. The valve seat 43 contacts one end of the coil spring 41. The other end of coil spring 41 contacts second hard valve body 382.
The second soft valve body 381 is ring-shaped. The second equalizing valve stem 33 is inserted through the second soft valve body 381. The second soft valve body 381 is configured to be able to contact a surface of the valve seat 43 opposite to a surface in contact with the coil spring 41. The cylindrical valve body fastening portion 44 is provided to cover the outer peripheral surface of the second soft valve body 381. The second soft valve body 381 is movable in the axial direction integrally with the second pressure equalizing valve stem 33.
An O-ring 47 is provided between the outer peripheral surface of the other end of the second equalizer valve stem 33 and the second valve housing 312. A first fastening portion 46 and a second fastening portion 48 (each annular) are provided to axially sandwich the O-ring 47 therebetween. The first fastening portion 46 contacts one end of the coil spring 45. The other end of the coil spring 45 contacts the valve body fastening portion 44.
Further, with reference to FIG. 3, formed within the pressure equalizing housing 31 are: a first gas inflow passage 31A through which the first gas a flows in, a first gas discharge passage 31B through which the first gas is discharged, a first gas intermediate passage 31C connecting the first gas inflow passage 31A and the first gas discharge passage 31B, a second gas inflow passage 31D through which the second gas B flows in, a second gas discharge passage 31E through which the second gas B is discharged, and a second gas intermediate passage 31F connecting the second gas inflow passage D and the second gas discharge passage E. The first soft valve body 371 is provided at the connection between the first gas inflow passage 31A and the first gas intermediate passage 31C. A first hard valve body 372 is provided at the connection between the first gas intermediate passage 31C and the first gas discharge passage 31B. The second soft valve body 381 is provided at the connection between the second gas inflow passage 31D and the second gas intermediate passage 31F. A second hard valve body 382 is provided at the junction between the second gas intermediate passage 31F and the second gas discharge passage 31E.
Referring to fig. 1, the mixing section 5 includes a mixing ratio adjuster 53 and a combining vessel 51. The merging container 51 is connected to the first gas passage 51A and the second gas passage 51B, and has a merging chamber 52, and a sectional area of the merging chamber 52 perpendicular to a flow direction of the first gas a and the second gas B is larger than sectional areas of the first gas passage 51A and the second gas passage 51B. The direction in which the first gas a is discharged from the first gas passage 51A to the merge container 51 is along (more specifically, in line with) the direction in which the second gas B is discharged from the second gas passage 51B to the merge container 51.
The operation of the gas mixer 1 will now be described. First, the pilot pressure reducing valve 2 is activated. Referring to fig. 2, the pilot pressure is set by rotating the adjusting portion 211B to move the adjusting shaft 211C in the axial direction, thereby compressing the pilot spring 251 in the axial direction.
Referring to fig. 2 and 5, the second gas B (e.g., carbon dioxide) is supplied to the pilot inflow channel 27 via the second pipe 92 and the fifth pipe 95. In the case where the pressure in the second pressure space 21B is higher than the set pilot pressure, the pilot valve body 26 is closed, and on the other hand, referring to fig. 2 and 6, when the pressure in the second pressure space 21B becomes lower than the set pilot pressure, the pilot presser 25 moves the pilot valve rod 22 toward the pilot seal 24 side in the axial direction. This forms a gap S between the pilot valve body 26 and the second pilot housing 23. The gas flows from the gap S thus formed into the second pressure space 21B. Thus, the pressure in the second pressure space 21B is adjusted to the set, or pilot, pressure. Referring to fig. 1, the pilot gas discharged from the pilot pressure reducing valve 2 flows into the pilot gas chamber 34 through the sixth pipe 96. Thus, the pressure of the pilot gas chamber 34 is adjusted to the pilot pressure.
Referring to fig. 1, 4 and 7, a first gas a (e.g., argon) is supplied to the pressure equalizing valve 3 via a first pipe 91. A second gas B (e.g., carbon dioxide) is provided to the pressure equalization valve 3 via a second conduit 92. The pressure adjustment of the second gas B will be described below. The pressure of the first gas a is reduced to a level equal to the second gas B by a mechanism similar to that used for the second gas B. And thus a description thereof will be omitted. When the pressure in the second gas discharge passage 31E is higher than the pilot pressure, both the second hard valve body 382 and the second soft valve body 381 are closed. On the other hand, referring to fig. 4 and 8, when the pressure in the second gas discharge passage 31E becomes lower than the pilot pressure, the second pressure equalizing presser 36 moves the second pressure equalizing valve stem 33 in the axial direction toward the bottom side of the second valve housing 312. At this time, the second pressure equalizing valve stem 33 alone moves in the axial direction until the engaging portion 321 of the second pressure equalizing valve stem 33 contacts the second hard valve body 382. This causes the second soft valve body 381 to move toward the bottom side of the second valve housing 312 integrally with the second pressure equalizing valve stem 33 in the axial direction. Therefore, a gap U is formed between the second soft valve body 381 and the valve seat 43. The gap U opens the communication between the second gas inflow passage 31D and the second gas intermediate passage 31F.
Referring to fig. 4 and 9, thereafter, the engaging portion 321 of the second pressure equalizing valve stem 33 is in contact with the second hard valve body, and the second hard valve body 382 is moved toward the bottom side of the second valve housing 312 integrally with the second pressure equalizing valve stem 33. This forms a gap P between the second hard valve body 382 and the first valve housing 311. Through the gap P, the second gas intermediate passage 31F and the second gas discharge passage 31E communicate with each other. Thus, the second gas B, the pressure of which is reduced to the desired pressure, is provided to the mixing section 5 via the fourth conduit 94.
Then, in the mixing section 5, the second gas B is mixed with the first gas a, and the pressure of the first gas a is reduced to an equal pressure by a mechanism similar to that for the second gas B. Specifically, in the mixing ratio adjuster 53, the flow rate is adjusted so that the first gas a and the second gas B are mixed at a desired mixing ratio, and the gases are combined in the combining container 51 to become a mixed gas. Thereafter, the flow rate of the mixed gas is adjusted by the flow rate adjusting valve 6, and the resultant mixed gas is supplied to the subject to which the gas is supplied.
Here, in the gas mixer 1 of the present embodiment, the pilot seal 24 is fixed to the first pilot housing 21 within the pilot relief valve 2. This configuration enables the first pilot housing 21 to support a force corresponding to the pressure difference between the third pressure space and the first pressure space, which acts on the pilot seal 24. This makes it unnecessary to apply a force corresponding to the pressure difference between the third pressure space and the first pressure space to the pilot valve lever 22. Therefore, the range in which the pilot valve lever 22 becomes unresponsive to the pressure change in the second pressure space is narrowed, thereby improving the responsiveness of the pilot pressure reducing valve 2.
Further, inside the pressure equalizing valve 3, the second hard valve body 382 mounted on the second pressure equalizing valve stem 33 is reciprocated in the axial direction to open and close the connection between the second gas intermediate passage 31F and the second gas discharge passage 31E, thereby making it possible to stably control the small flow rate of the gas flowing from the second gas inflow passage 31D to the second gas discharge passage 31E. Further, when the second soft valve body 381 fixed to the second pressure equalizing valve stem 33 closes the gap between the second gas intermediate passage 31F and the second gas inflow passage 31D, the connection with the second gas discharge passage 31E is sealed by the second soft valve body 381, and thus the tightly closed state between the second gas inflow passage 31D and the second gas discharge passage 31E is stably maintained. Thus, it is possible to ensure control of both a small gas flow rate and a reliable sealing state.
Further, the seat portion 351A of the elastic member 351 in the pressure equalizing valve 3 is supported by the support member 352, and the entire seat portion is on the support member. This configuration makes it possible to transmit the pilot pressure to the second pressure equalizing valve rod 33 while preventing the elastic member 351 from being elastically lost.
Further, the merging vessel 51 in the mixing section 5 has a merging chamber 52, and the cross-sectional area of the merging chamber 52 perpendicular to the flow direction of the first gas a and the second gas B is larger than the cross-sectional areas of the first gas passage 51A and the second gas passage 51B. This configuration enables uniform mixing of the first gas a and the second gas B with high mixing accuracy.
Further, the direction in which the first gas a is discharged from the first gas passage 51A to the merge container 51 is along the direction in which the second gas B is discharged from the second gas passage 51B to the merge container 51. This configuration prevents the mixing accuracy from being lowered due to the collision of the first gas a and the second gas B discharged from the pressure equalizing valve 3.
Industrial applicability
The gas mixer according to the present invention can be particularly advantageously applied to a gas mixer requiring high responsiveness.
Claims (5)
1. A gas mixer, comprising:
a pilot pressure reducing valve 2 configured to reduce a pressure of an incoming pilot gas to a pilot pressure and discharge the resulting pilot gas;
a pressure equalizing valve 3 connected to the pilot pressure reducing valve and configured to reduce pressures of the introduced first and second gases to a pressure at which the introduced first and second gases are equal and discharge the resultant first and second gases, based on the pilot pressure of the pilot gas discharged from the pilot pressure reducing valve; and
a mixing section 5 configured to receive and mix the first gas and the second gas discharged from the pressure equalizing valve, and discharge the resulting gas; wherein
The pilot pressure reducing valve includes:
a first pilot housing which is provided with a first pilot housing,
a pilot stem disposed within the first pilot housing and reciprocally movable in an axial direction,
a second pilot housing disposed within and fixed to the first pilot housing,
a pilot seal disposed in contact with an outer surface of the pilot stem and an inner surface of the first pilot housing to maintain an airtight state between the pilot stem and the first pilot housing,
a pilot extrusion disposed in contact with the pilot valve rod and configured to extrude the pilot valve rod in an axial direction, and
a pilot valve body mounted on the pilot valve stem,
the pilot stem achieves a state in which the pilot valve body and the second pilot housing are in contact with each other and a state in which the pilot valve body and the second pilot housing are separated from each other by reciprocating in the axial direction,
a pilot inflow passage and a pilot outflow passage are formed in the first pilot housing, the pilot gas flows into the first pilot housing through the pilot inflow passage, and the pilot gas whose pressure is reduced to the pilot pressure flows out of the first pilot housing through the pilot outflow passage,
in a state where the pilot valve body and the second pilot housing are in contact with each other, the first pilot housing has formed therein:
a first pressure space surrounded by the pilot stem, the first pilot housing, and the second pilot housing, and connected to the pilot inflow passage,
a second pressure space which is arranged on the opposite side of the pilot valve body to the side where the first pressure space is located and which is connected to the pilot outflow channel, and
a third pressure space provided on a side of the pilot seal opposite to a side where the first pressure space is located, and which is in contact with one end of the pilot valve stem,
the third pressure space communicates with the second pressure space, and
the pilot seal is fixed to the first pilot housing.
2. The gas mixer of claim 1, wherein
The pressure equalizing valve comprises:
the pressure-equalizing shell is provided with a pressure-equalizing shell,
a first pressure equalizing valve stem disposed within the pressure equalizing housing and reciprocally movable in the axial direction,
a second pressure equalizing valve rod disposed within the pressure equalizing housing and reciprocally movable in the axial direction,
a first pressure equalizing presser provided in the pressure equalizing housing and constituting a part of a wall surface of a pilot gas chamber, the pilot gas chamber being a space connected to the pilot pressure reducing valve, and configured to contact the first pressure equalizing valve stem and press the first pressure equalizing valve stem in an axial direction,
a second pressure equalizing pressing member that is provided in the pressure equalizing housing and constitutes another part of a wall surface of the pilot gas chamber, and that is configured to contact the second pressure equalizing valve rod and press the second pressure equalizing valve rod in an axial direction,
the first soft valve body is arranged on the first pressure equalizing valve rod,
the second soft valve body is arranged on the second pressure equalizing valve rod,
a first hard valve body arranged to be axially reciprocable relative to the first pressure equalizing stem, an
A second hard valve body arranged to be axially reciprocable relative to the second pressure equalizing stem,
the pressure equalizing shell is internally provided with:
a first gas inflow passage through which the first gas flows,
a first gas discharge passage through which the first gas is discharged,
a first gas intermediate passage connecting the first gas inflow passage and the first gas discharge passage,
a second gas inflow passage through which the second gas flows,
a second gas discharge passage through which the second gas is discharged, an
A second gas intermediate passage connecting the second gas inflow passage and the second gas exhaust passage,
the first soft valve body is provided at a junction between the first gas inflow passage and the first gas intermediate passage,
the first hard valve body is arranged at the connection between the first gas intermediate channel and the first gas discharge channel,
the second soft valve body is arranged at the joint between the second gas inflow channel and the second gas intermediate channel, and
the second hard valve body is disposed at a junction between the second gas intermediate passage and the second gas discharge passage.
3. The gas mixer of claim 2, wherein
Each of the first pressure equalizing extrusion and the second pressure equalizing extrusion comprises:
an elastic member, and
a support member made of a material having a higher rigidity than the elastic member and configured to support the elastic member,
the elastic member includes:
having a disc-shaped base part, an
A protruding portion provided so as to surround an outer periphery of the base portion and protruding in a direction in which the pilot gas chamber is enlarged, and
the base portion is supported by the support, the entire base portion being on the support.
4. The gas mixer of any of claims 1-3, wherein the mixing section comprises:
a mixing ratio adjuster configured to adjust a mixing ratio of the first gas and the second gas discharged from the pressure equalizing valve and discharge the first gas and the second gas discharged from the pressure equalizing valve from a first gas passage and a second gas passage, respectively, and
a merging vessel connected to the first gas passage and the second gas passage, and having a merging chamber having a cross-sectional area perpendicular to a flow direction of the first gas and the second gas that is larger than cross-sectional areas of the first gas passage and the second gas passage.
5. The gas mixer of claim 4, wherein a direction of the first gas discharging from the first gas passage to the merge vessel is along a direction of the second gas discharging from the second gas passage to the merge vessel.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2016/081164 WO2018073945A1 (en) | 2016-10-20 | 2016-10-20 | Gas mixer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108348877A CN108348877A (en) | 2018-07-31 |
| CN108348877B true CN108348877B (en) | 2020-11-03 |
Family
ID=58666495
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201680028757.9A Expired - Fee Related CN108348877B (en) | 2016-10-20 | 2016-10-20 | Gas mixer |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6121083B1 (en) |
| CN (1) | CN108348877B (en) |
| MY (1) | MY192058A (en) |
| WO (1) | WO2018073945A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112339299B (en) * | 2020-09-25 | 2022-01-18 | 华南理工大学 | Multi-layer co-extrusion continuous forming method and equipment for composite material with extreme rheological behavior |
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| WO2012112808A2 (en) * | 2011-02-16 | 2012-08-23 | Tyco Fire Products Lp | Dry pilot actuator |
| CN203431245U (en) * | 2013-03-14 | 2014-02-12 | 伊顿公司 | Electromagnetic valve assembly with a pilot pressure control device |
| CN104048070A (en) * | 2013-03-14 | 2014-09-17 | 伊顿公司 | Electromagnetic valve assembly with pilot pressure control device |
| CN104373605A (en) * | 2014-10-16 | 2015-02-25 | 中国工程物理研究院化工材料研究所 | Ultrahigh pressure proportional pressure relief valve |
| CN204345010U (en) * | 2014-12-02 | 2015-05-20 | 费斯托（中国）自动化制造有限公司 | Guide's overflow-type reduction valve |
| CN205479649U (en) * | 2016-04-01 | 2016-08-17 | 成都科盛石油科技有限公司 | Main valve guide device in decompression gas circuit |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52109084A (en) * | 1976-03-08 | 1977-09-12 | Toho Gasu Kougiyou Kk | Electromagnetically actuated three stage operational vacuum driving apparatus |
| JPS5786913A (en) * | 1980-11-19 | 1982-05-31 | Matsushita Electric Ind Co Ltd | Pressure control valve |
| JPH0716594B2 (en) * | 1989-09-21 | 1995-03-01 | 株式会社日立製作所 | Gas mixing equipment |
| JPH03156618A (en) * | 1989-11-15 | 1991-07-04 | Tlv Co Ltd | Reducing valve |
| JP2561311Y2 (en) * | 1992-03-16 | 1998-01-28 | 伊藤工機株式会社 | Pressure proportional control valve |
| JP3445569B2 (en) * | 2000-09-18 | 2003-09-08 | Ｓｍｃ株式会社 | Pilot operated 2-port vacuum valve |
| JP2006349030A (en) * | 2005-06-15 | 2006-12-28 | Sanyuu Technology:Kk | Two-way delivery valve |
| GB0521454D0 (en) * | 2005-10-21 | 2005-11-30 | Energy Equipment Corp | Devices, method and apparatus |
| US8136545B2 (en) * | 2008-05-20 | 2012-03-20 | Emerson Process Management Regulator Technologies, Inc. | Apparatus to regulate fluid flow |
-
2016
- 2016-10-20 JP JP2017506815A patent/JP6121083B1/en not_active Expired - Fee Related
- 2016-10-20 CN CN201680028757.9A patent/CN108348877B/en not_active Expired - Fee Related
- 2016-10-20 WO PCT/JP2016/081164 patent/WO2018073945A1/en active Application Filing
- 2016-10-20 MY MYPI2017704433A patent/MY192058A/en unknown
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012112808A2 (en) * | 2011-02-16 | 2012-08-23 | Tyco Fire Products Lp | Dry pilot actuator |
| CN203431245U (en) * | 2013-03-14 | 2014-02-12 | 伊顿公司 | Electromagnetic valve assembly with a pilot pressure control device |
| CN104048070A (en) * | 2013-03-14 | 2014-09-17 | 伊顿公司 | Electromagnetic valve assembly with pilot pressure control device |
| CN104373605A (en) * | 2014-10-16 | 2015-02-25 | 中国工程物理研究院化工材料研究所 | Ultrahigh pressure proportional pressure relief valve |
| CN204345010U (en) * | 2014-12-02 | 2015-05-20 | 费斯托（中国）自动化制造有限公司 | Guide's overflow-type reduction valve |
| CN205479649U (en) * | 2016-04-01 | 2016-08-17 | 成都科盛石油科技有限公司 | Main valve guide device in decompression gas circuit |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108348877A (en) | 2018-07-31 |
| MY192058A (en) | 2022-07-25 |
| JPWO2018073945A1 (en) | 2018-10-18 |
| JP6121083B1 (en) | 2017-04-26 |
| WO2018073945A1 (en) | 2018-04-26 |
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