CN108334124B - Equipment water supply temperature control device and control method - Google Patents
Equipment water supply temperature control device and control method Download PDFInfo
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- CN108334124B CN108334124B CN201710049197.1A CN201710049197A CN108334124B CN 108334124 B CN108334124 B CN 108334124B CN 201710049197 A CN201710049197 A CN 201710049197A CN 108334124 B CN108334124 B CN 108334124B
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- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
- G05D23/20—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature
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Abstract
The invention relates to a device and a method for controlling the water supply temperature of equipment, wherein the device comprises a water supply unit, a water supply unit and a control unit, wherein the water supply unit is used for supplying cooling water; the temperature control unit is used for detecting the temperature of the cooling water provided by the water supply unit, modulating the temperature according to the water demand of the water using equipment unit and providing circulating water with accurate temperature control for the water using equipment unit, and the mixed flow temperature equalizing unit is arranged between the water supply unit and the temperature control unit and is used for performing homogenization treatment on the cooling water provided by the water supply unit. The invention can avoid the temperature shock as the external interference factor to influence the heat exchange process of the temperature control unit by the access of the mixed flow temperature-equalizing unit under the condition that the plant system is not good enough, thereby ensuring the temperature control precision of the temperature control unit and improving the adaptability of the temperature control unit to the severe plant conditions.
Description
Technical Field
The invention relates to cooling of industrial equipment, in particular to a device and a method for controlling the temperature of equipment water supply.
Background
In order to ensure normal and continuous operation of industrial equipment, Fab cooling water is often used to remove heat.
As the stability index requirement of conventional industrial equipment on Fab Cooling Water is generally not high, most of Water chiller equipment manufactured and sold in the market is simpler, a compressor set with similar refrigeration power and a simple control algorithm are only configured according to the heat dissipation capacity requirement of a client under most conditions, the temperature stability of the finally output PCW (process Cooling Water system, English full name: Processing Cooling Water) is poor, and particularly, sudden temperature drop often occurs at the refrigerating moment.
For a high-precision temperature control system, the severe fluctuation of the PCW often becomes an external interference factor, and further affects the temperature control precision of the temperature control system. Fig. 1 is a schematic diagram of a temperature control scheme of a critical area of a semiconductor device, which includes a water chiller 1, a temperature control unit 2, and an exposure unit 3, wherein the water chiller 1 provides Plant Cooling Water (PCW) for the temperature control unit 2 to take away heat to be dissipated in a temperature control process of the temperature control unit 2; the temperature control unit 2 outputs circulating Water (Circuit Water) satisfying the exposure requirement of the exposure unit 3 for stabilizing the overall and local environments of the exposure unit 3; the exposure unit 3 can perform an exposure action only when the environment satisfies the condition. As can be seen from the two temperature curves of the plant cooling water and the circulating water in fig. 1, if the PCW temperature output by the water chiller 1 has poor performance, each sudden temperature change will be used as an external interference factor to affect the heat exchange process of the temperature control unit 2, and further affect the performance of the circulating water and the air bath, and finally affect the exposure of the exposure unit 3.
With the continuous improvement of the exposure precision of the lithography machine, the requirement of the lithography machine on the temperature control precision of the objective lens is higher and higher, the temperature requirement of the temperature control unit on the Fab cooling water is further improved, most Fab plants do not have a very good PCW circulating system, but use an industrial water chiller as a PCW generating device, and the requirement of the temperature control unit on the stability of the PCW is difficult to meet. Therefore, it is very practical and necessary to develop a device and a method capable of improving the adaptability of the high-precision temperature control system to the plant PCW.
Disclosure of Invention
The invention provides a device and a method for controlling the temperature of equipment water supply, which aim to solve the technical problem.
In order to solve the above technical problems, the present invention provides a device for controlling the temperature of water supplied to an apparatus, comprising a water supply unit for supplying cooling water; the temperature control unit is used for detecting the temperature of the cooling water provided by the water supply unit, modulating the temperature according to the water demand of the water using equipment unit and providing circulating water with accurate temperature control for the water using equipment unit, and the mixed flow temperature equalizing unit is arranged between the water supply unit and the temperature control unit and is used for performing homogenization treatment on the cooling water provided by the water supply unit.
Preferably, the mixed flow and uniform temperature unit comprises a support and a mixed flow cavity fixed on the support, the mixed flow cavity is provided with a water inlet interface and a water outlet interface and is communicated with the water supply unit and the temperature control unit, and a plurality of mixed flow baffles are arranged in the mixed flow cavity.
Preferably, the mixed flow baffles are fixed on two corresponding side walls of the mixed flow cavity in a staggered manner at intervals, and a return water channel from the water inlet interface to the water outlet interface is formed in the mixed flow cavity.
Preferably, the number of the water inlet interfaces and the water outlet interfaces is multiple.
Preferably, the temperature control unit includes a temperature sensor, a controller, a heat exchanger, and a water tank, and the circulating water circulates between the water tank and the water-using equipment unit; the cooling water and the circulating water exchange heat in the heat exchanger, the temperature sensor is fixed at an inlet of the heat exchanger, and an output signal of the temperature sensor is connected with an input end of the controller.
Preferably, a refrigerating device and a heating device are further arranged between the water using equipment unit and the water tank, and the output end of the controller is respectively connected with the refrigerating device and the heating device.
Preferably, the water supply unit is a water chiller.
Preferably, the water-using equipment unit is an exposure unit.
The invention also provides a device water supply temperature control method, wherein cooling water provided by the water supply unit exchanges heat with circulating water provided by the water using device unit in the temperature control unit, the cooling water is homogenized by the mixed flow temperature homogenizing unit before entering the temperature control unit, the temperature control unit detects the temperature of the cooling water provided by the water supply unit, modulates the temperature according to the water using requirement of the water using device unit, and provides the circulating water with accurate temperature control for the water using device unit.
Preferably, the temperature control unit comprises a temperature sensor, a controller, a heat exchanger, a refrigerating device, a heating device and a water tank, the refrigerating device, the heating device and the water equipment unit are sequentially connected to form a loop, and the circulating water circularly flows in the loop; the cooling water and the circulating water exchange heat in the heat exchanger, the temperature sensor detects the temperature of the cooling water before entering the heat exchanger and transmits a temperature signal to the controller, and the controller adopts a feedforward control algorithm to control the refrigerating device and the heating device.
Preferably, the feedforward control algorithm adopts an incremental PI control algorithm.
Preferably, the controller reads the temperature of the cooling water in real time, calculates a heat compensation value, and adjusts the output temperature of the refrigerating device and the heating device according to the compensation value.
Compared with the prior art, the device for controlling the temperature of the supplied water of the equipment and the control method thereof provided by the invention comprise a water supply unit, a water supply unit and a control unit, wherein the water supply unit is used for supplying cooling water; the temperature control unit is used for detecting the temperature of the cooling water provided by the water supply unit, modulating the temperature according to the water demand of the water using equipment unit and providing circulating water with accurate temperature control for the water using equipment unit, and the mixed flow temperature equalizing unit is arranged between the water supply unit and the temperature control unit and is used for performing homogenization treatment on the cooling water provided by the water supply unit. The invention can avoid the temperature shock as the external interference factor to influence the heat exchange process of the temperature control unit by the access of the mixed flow temperature-equalizing unit under the condition that the plant system is not good enough, thereby ensuring the temperature control precision of the temperature control unit and improving the adaptability of the temperature control unit to the severe plant conditions.
Drawings
FIG. 1 is a schematic structural diagram of a water supply temperature control device of a conventional apparatus;
FIG. 2 is a schematic structural diagram of a water supply temperature control device according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of a mixed flow temperature-equalizing unit according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of a method for controlling the temperature of water supplied to a device according to an embodiment of the present invention;
FIG. 5 is a flow chart of a feedforward control algorithm in accordance with an embodiment of the present invention.
In fig. 1: 1-a water cooling machine, 2-a temperature control unit and 3-an exposure unit;
in FIGS. 2-4: 10-water supply unit, 20-temperature control unit, 21-temperature sensor, 22-controller, 23-heat exchanger, 24-water tank, 25-refrigerating device, 26-heating device, 30-water using equipment unit, 40-mixed flow temperature-equalizing unit, 41-support, 42-mixed flow cavity, 43-water inlet/outlet interface and 44-mixed flow baffle.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. It is to be noted that the drawings are in simplified form and are not to precise scale, which is provided for the purpose of facilitating and distinctly claiming the embodiments of the present invention.
The device for controlling the temperature of the supplied water of the equipment, as shown in fig. 2, comprises a water supply unit 10 (such as a water chiller) for supplying cooling water; the temperature control unit 20 is configured to detect the temperature of the cooling water provided by the water supply unit 10, adjust the temperature according to the water demand of the water using equipment unit 30 (such as an exposure unit), and provide the circulating water with accurate temperature control for the water using equipment unit 30, and further includes a mixed flow temperature-equalizing unit 40, which is disposed between the water supply unit 10 and the temperature control unit 20, and is configured to homogenize the cooling water provided by the water supply unit 10. As can be seen from the water flow fluctuation curve in fig. 3, the cooling water from the water supply unit 10 has large temperature fluctuation, and after sufficient mixed flow under the action of the mixed flow temperature equalizing unit 40, relatively smooth cooling water can be obtained and then flows through the temperature control unit 20, so that the interference of the temperature fluctuation of the cooling water to the temperature control unit 20 is greatly weakened, and relatively stable input is provided for high-precision temperature control.
Preferably, please refer to fig. 3 with emphasis, the mixed flow and temperature equalizing unit 40 includes a support 41 and a mixed flow cavity 42 fixed on the support 41, the mixed flow cavity 42 is provided with a water inlet/outlet port 43 for communicating with the water supply unit 10 and the temperature control unit 20, the mixed flow cavity 42 is provided with a plurality of mixed flow baffles 44 therein, specifically, in this embodiment, the mixed flow baffles 44 are fixed on two corresponding sidewalls of the mixed flow cavity 42 at intervals in a staggered manner, a water channel from the water inlet port to the water outlet port is formed in the mixed flow cavity 42 to turn back, the mixed flow baffles 44 slow down the water flow before entering the temperature control unit 20, and prevent the temperature shock from affecting the heat exchange process of the temperature control unit 20 as an external interference factor.
Preferably, the number of the water inlet/outlet ports 43 may be plural, and certainly, the pressure resistance and pressure maintaining performance of the mixed flow cavity 42, the volume of the mixed flow cavity 42, the structure and number of the mixed flow baffles 44, the size of the water inlet/outlet ports 43 and the structure and number of the brackets 41 may be scientifically designed according to specific use scenarios and temperature control requirements, which is not limited herein.
Preferably, referring to fig. 4 with emphasis, the temperature control unit 20 includes a temperature sensor 21, a controller 22, a heat exchanger 23, and a water tank 24, and the circulating water circulates between the water tank 24 and the water-using equipment unit 30; the cooling water and the circulating water exchange heat in the heat exchanger 23, the temperature sensor 21 is fixed at an inlet of the cooling water entering the heat exchanger 23, and an output signal of the temperature sensor 21 is connected with an input end of the controller 22; preferably, a refrigerating device 25 and a heating device 26 are further disposed between the water using equipment unit 30 and the water tank 24, and the output end of the controller 22 is connected to the refrigerating device 25 and the heating device 26, respectively. The controller 22 controls the refrigerating device 25 and the heating device 26 with the temperature detected by the temperature sensor 21 as an input signal, further precisely controls the temperature of the circulating water, and eliminates disturbance of the cooling water. As can be seen from the water flow fluctuation curve in fig. 4, using a feed forward algorithm, the controller 22 can be cycled to take the cooling water temperature and compensate for temperature shock through the chiller 25 and heater 26.
Referring to fig. 4 and fig. 2, the present invention further provides a method for controlling the temperature of the supplied water, in which the cooling water provided by the water supply unit 10 exchanges heat with the circulating water provided by the water using equipment unit 30 in the temperature control unit 20, the flow-mixing temperature-uniforming unit 40 is used to homogenize the cooling water before the cooling water enters the temperature control unit 20, the temperature control unit 20 detects the temperature of the cooling water provided by the water supply unit 10, and modulates the temperature according to the water demand of the water using equipment unit 30, so as to provide the circulating water with accurate temperature control for the water using equipment unit 30. The method can improve the plant service adaptability of the temperature control unit 20 and ensure the temperature control precision of the temperature control unit 20.
Preferably, with reference to fig. 4, the temperature control unit 20 includes a temperature sensor 21, a controller 22, a heat exchanger 23, a refrigeration device 25, a heating device 26, and a water tank 24, the refrigeration device 25, the heating device 26, and the water-using equipment unit 30 are connected in sequence to form a loop, and the circulating water circulates in the loop; the cooling water and the circulating water are heat-exchanged in the heat exchanger 23, the temperature sensor 21 detects the temperature of the cooling water before entering the heat exchanger 23, and transmits a temperature signal to the controller 22, and the controller 22 controls the refrigerating device 25 and the heating device 26 by using a feedforward control algorithm.
Specifically, the feedforward control algorithm adopts an incremental PI control algorithm, specifically, the controller 22 reads the temperature of the cooling water in real time and calculates a heat compensation value, and adjusts the output temperatures of the refrigerating device 25 and the heating device 26 according to the compensation value, and the theoretical support formula is as follows:
1. simulating the principle of an incremental PI control algorithm:
2. digital incremental PI control algorithm principle:
Δu(k)＝u(k)-u(k-1)＝Kp[e(k)-e(k-1)]+Kie (k) (equation 4)
Under the action of the mixed flow baffle 44, the cooling water is fully mixed in the mixed flow cavity 42 and then becomes relatively stable and gentle, so that the temperature fluctuation is greatly weakened; then, with reference to fig. 5, by combining with the feedforward control algorithm of the controller 22, the controller 22 is used to obtain the values Tpcw (n) and Tpcw (n-1) … … flowing into the temperature sensor 21 in real time, calculate the temperature fluctuation value Δ T ═ Tpcw (n-1) -Tpcw (n), and calculate the heat compensation value according to the fluctuation value to counteract the severe fluctuation of the cooling water, and finally ensure the temperature control accuracy of the temperature control unit 20, so as to ensure that the circulating water output by the water tank 24 has relatively high temperature stability to meet the environmental conditions required by the exposure unit.
Experiments show that when the mixed flow temperature-uniforming unit 40 is singly adopted, the volume of the mixed flow cavity 42 and the number of the mixed flow baffles 44 are properly increased, so that the fluctuation can be further gentle, but the fluctuation rule of the cooling water (such as a water flow fluctuation curve in fig. 3) cannot be completely eliminated; when the feedforward control algorithm is adopted alone, the phenomena of untimely compensation and no compensation can occur for rapid fluctuation, and a good effect can be shown for mild fluctuation (such as a water flow fluctuation curve in fig. 4). The invention adopts the method of combining the mixed flow temperature equalizing unit 40 and the feedforward control algorithm to obtain more ideal and more economical temperature control effect (such as a water flow fluctuation curve in figure 2).
In summary, the device for controlling the temperature of the supplied water of the equipment and the control method thereof provided by the invention comprise a water supply unit 10 for supplying cooling water; the temperature control unit 20 is configured to detect the temperature of the cooling water provided by the water supply unit 10, adjust the temperature according to the water demand of the water consumption equipment unit 30, and provide the water consumption equipment unit 30 with circulating water with accurate temperature control, and further includes a mixed flow temperature-equalizing unit 40, which is disposed between the water supply unit 10 and the temperature control unit 20, and is configured to homogenize the cooling water provided by the water supply unit 10. The invention can avoid the temperature shock as the external interference factor to influence the heat exchange process of the temperature control unit 20 by the access of the mixed flow temperature-equalizing unit 40 under the condition that the plant system is not good enough, thereby ensuring the temperature control precision of the temperature control unit 20 and improving the adaptability of the temperature control unit 20 to the severe plant conditions.
It will be apparent to those skilled in the art that various changes and modifications may be made in the invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (10)
1. The device for controlling the temperature of the supplied water of the equipment is characterized by comprising a water supply unit, a temperature control unit and a temperature control unit, wherein the water supply unit is used for supplying cooling water; the temperature control unit is used for detecting the temperature of cooling water provided by the water supply unit and modulating the temperature according to the water demand of the water using equipment unit to provide circulating water with accurate temperature control for the water using equipment unit, and also comprises a mixed flow temperature equalizing unit which is arranged between the water supply unit and the temperature control unit and is used for carrying out homogenization treatment on the cooling water provided by the water supply unit, wherein the temperature control unit comprises a temperature sensor, a controller, a heat exchanger and a water tank, the circulating water circularly flows between the water tank and the water using equipment unit, the cooling water and the circulating water carry out heat exchange in the heat exchanger, the cooling water takes away the heat which needs to be dissipated in the temperature control process of the temperature control unit, the temperature sensor is fixed at the inlet of the heat exchanger, the output signal of the temperature sensor is connected with the input end of the controller, a refrigerating device and a heating device are further arranged between the water using equipment unit and the water tank, and the output end of the controller is connected with the refrigerating device and the heating device respectively.
2. The water supply temperature control device of claim 1, wherein the mixed flow and uniform temperature unit comprises a support and a mixed flow cavity fixed on the support, the mixed flow cavity is provided with a water inlet and a water outlet for communicating with the water supply unit and the temperature control unit, and a plurality of mixed flow baffles are arranged in the mixed flow cavity.
3. The water supply temperature control device according to claim 2, wherein the mixed flow baffles are fixed on two corresponding side walls of the mixed flow cavity at intervals in a staggered manner, and a return water channel from the water inlet port to the water outlet port is formed in the mixed flow cavity.
4. The apparatus of claim 2, wherein the number of the water inlet and outlet ports is plural.
5. The apparatus of claim 1, wherein the water supply unit is a water chiller.
6. The facility supply water temperature control device according to claim 1, wherein the water facility unit is an exposure unit.
7. A method for controlling the water supply temperature of equipment is characterized in that cooling water provided by a water supply unit exchanges heat with circulating water provided by a water using equipment unit in a temperature control unit, the cooling water is homogenized by a mixed flow temperature homogenizing unit before entering the temperature control unit, the temperature control unit detects the temperature of the cooling water provided by the water supply unit, modulates the temperature according to the water demand of the water using equipment unit and provides the circulating water with accurate temperature control for the water using equipment unit, wherein the temperature control unit comprises a temperature sensor, a controller, a heat exchanger, a refrigerating device, a heating device and a water tank, the refrigerating device, the heating device and the water using equipment unit are sequentially connected to form a loop, the circulating water circularly flows in the loop, and the cooling water and the circulating water exchange heat in the heat exchanger, the cooling water carries away heat to be dissipated in the temperature control process of the temperature control unit, the temperature sensor detects the temperature of the cooling water before the cooling water enters the heat exchanger and transmits a temperature signal to the controller, and the controller controls the refrigerating device and the heating device.
8. The facility feed water temperature control method of claim 7, wherein the controller controls the cooling device and the heating device using a feed forward control algorithm.
9. The facility supply water temperature control method of claim 8, wherein the feed forward control algorithm employs an incremental PI control algorithm.
10. The facility supply water temperature control method of claim 8, wherein the controller reads the temperature of the cooling water in real time and calculates a heat compensation value, and adjusts the output temperatures of the cooling device and the heating device according to the compensation value.
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| CN201710049197.1A CN108334124B (en) | 2017-01-20 | 2017-01-20 | Equipment water supply temperature control device and control method |
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| CN109062295B (en) * | 2018-08-23 | 2021-04-02 | 山东建筑大学 | Control system and control method for automatically adjusting climate room temperature and humidity |
| CN109270972A (en) * | 2018-10-11 | 2019-01-25 | 中国船舶重工集团公司第七〇九研究所 | A kind of thermostatically-controlled equipment |
| CN110213844B (en) * | 2019-06-28 | 2021-04-13 | 厦门艾美森新材料科技股份有限公司 | Air cushion machine and automatic compensation method for heating power of heating wire of air cushion machine |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2090549U (en) * | 1991-06-15 | 1991-12-11 | 黎建华 | Water-temp. controller |
| CN101364116A (en) * | 2008-09-18 | 2009-02-11 | 上海微电子装备有限公司 | Thermostatic control device |
| CN202067163U (en) * | 2011-05-26 | 2011-12-07 | 杭州山立净化设备有限公司 | Liquid-supplying device |
| CN202694171U (en) * | 2012-06-15 | 2013-01-23 | 宁波圣莱达电器股份有限公司 | Water temperature adjustment device of boiled water machine |
| CN205732929U (en) * | 2016-05-23 | 2016-11-30 | 淮安和通汽车零部件有限公司 | A kind of cooling water termostat system being applied to aluminium alloy casting |
-
2017
- 2017-01-20 CN CN201710049197.1A patent/CN108334124B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2090549U (en) * | 1991-06-15 | 1991-12-11 | 黎建华 | Water-temp. controller |
| CN101364116A (en) * | 2008-09-18 | 2009-02-11 | 上海微电子装备有限公司 | Thermostatic control device |
| CN202067163U (en) * | 2011-05-26 | 2011-12-07 | 杭州山立净化设备有限公司 | Liquid-supplying device |
| CN202694171U (en) * | 2012-06-15 | 2013-01-23 | 宁波圣莱达电器股份有限公司 | Water temperature adjustment device of boiled water machine |
| CN205732929U (en) * | 2016-05-23 | 2016-11-30 | 淮安和通汽车零部件有限公司 | A kind of cooling water termostat system being applied to aluminium alloy casting |
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