CN108330453B - AlTiN/AlTiYN nano multilayer cutter coating and preparation method thereof - Google Patents

AlTiN/AlTiYN nano multilayer cutter coating and preparation method thereof Download PDF

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CN108330453B
CN108330453B CN201810095030.3A CN201810095030A CN108330453B CN 108330453 B CN108330453 B CN 108330453B CN 201810095030 A CN201810095030 A CN 201810095030A CN 108330453 B CN108330453 B CN 108330453B
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altin
altiyn
coating
layer
cutter
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CN108330453A (en
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王启民
莫锦君
高则翠
吴正涛
代伟
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Guangdong University of Technology
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Guangdong University of Technology
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications

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  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention belongs to the technical field of cutter coating materials, and discloses an AlTiN/AlTiYN nano multilayer cutter coating and a preparation method thereof. The method adopts an arc ion coating technology, and realizes the preparation of the AlTiN/AlTiYN nano multilayer coating cutter through the rotation of a sample rotating frame and the self-assembly of a coating structure. When the sample is directly opposite to the AlTi target, depositing an AlTiN layer on the substrate; when the AlTiYN layer faces the AlTiY target, a layer of AlTiYN layer is deposited; and the AlTiN layer and the AlTiYN layer are alternately deposited to form the AlTiN/AlTiYN nano multilayer coating. The coating comprises 20-32 at% of Al, 10-30 at% of Ti, 1-5 at% of Y and 45-57 at% of N. The thickness of the AlTiN and AlTiYN modulating layer can be regulated and controlled by adjusting the revolution speed and the rotation speed of the rotating frame.

Description

AlTiN/AlTiYN nano multilayer cutter coating and preparation method thereof
Technical Field
The invention belongs to the technical field of cutter coating materials, and particularly relates to an AlTiN/AlTiYN nano multilayer cutter coating and a preparation method thereof.
Background
Coating one or more layers of metal or nonmetal compound films (such as TiC, TiAlN and Al) with high hardness and good wear resistance on the hard alloy cutter substrate 203Etc.) which combines the advantages of high strength and toughness of the substrate and high hardness and high wear resistance of the coating, reduces the friction factor between the cutter and the workpiece, and improves the wear resistance of the cutter without reducing the toughness of the substrate. Therefore, the coated hard alloy cutter has high hardness and excellent wear resistance, and the cutting life of the cutter is prolonged. The TiN coating has limited temperature resistance, the coating begins to lose efficacy when the service temperature of the hard alloy coated cutter exceeds 500 ℃, and the TiAlN has the temperature resistance of about 700 ℃, so that the requirement of high-speed machining of the cutter cannot be met. AlTiN is a PVD tool coating formed by depositing Al element into TiN. Heretofore, increasing the aluminum content in TiAlN, AlTiN coatings, thereby enhancing the high temperature resistance and hardness of tool coatings, has been a major technical issue of interest to tool manufacturers and coating companies. Since 1995, people have been continuingRelated vapor deposition processes are investigated and improved. By the year 2000, the composition ratio of aluminum element to titanium element in the AlTiN coating layer has increased from 1: 2 to 3: 2, i.e., the aluminum content has increased from 33% to 60%. The hardness can reach 36GPa and the high-temperature oxidation resistance reaches 850 ℃ from the practical use effect. However, compared with the modern high-speed cutting requirement (when the cutter is used for cutting, the local temperature can reach about 1000 ℃), the high-temperature oxidation resistance of AlTiN still needs to be improved. The diversification of the coating components can improve the comprehensive performance of the coating. The rare earth element Y is one of the most effective elements for improving the high-temperature oxidation resistance of the coating, however, when the element Y exceeds a certain amount, part of the face center structure in the coating begins to be converted to a close-packed hexagonal structure, so that the hardness of the coating is reduced, and the coated cutting tool cannot meet the high hardness requirement of high-speed cutting.
The method for forming the multilayer structure can further improve the hardness, toughness and high-temperature oxidation resistance of the single-layer coating under the condition of fully utilizing the original excellent comprehensive mechanical property advantages of the single-layer coating, and is an important technical measure for improving the cutting performance of the cutter coating at present.
Disclosure of Invention
In order to overcome the defects in the prior art, the invention mainly aims to provide a preparation method of an AlTiN/AlTiYN nano multilayer cutter coating; the method is prepared by adopting the traditional PVD technology (arc ion plating), and the nano multilayer structure is realized by the rotation of a sample rotating stand; when the sample is directly opposite to the AlTi target, depositing an AlTiN layer on the substrate; when the AlTiYN layer faces the AlTiY target, a layer of AlTiYN layer is deposited; the AlTiN layer and the AlTiYN layer are alternately deposited to form an AlTiN/AlTiYN nano multilayer coating, the rotating speed determines the thickness of each AlTiN layer and the AlTiYN layer, and the problem to be solved is to realize the effects of high hardness, high wear resistance and good high-temperature oxidation resistance.
The invention also aims to provide an AlTiN/AlTiYN nano multilayer cutter coating obtained by the preparation method; the coating can realize the effects of high hardness, high wear resistance and good high-temperature oxidation resistance, and the coating has the advantages of simple preparation process, low cost, good adaptability and great application and popularization potential.
The purpose of the invention is realized by the following technical scheme:
a preparation method of an AlTiN/AlTiYN nanometer multilayer cutter coating comprises the following specific steps:
s1, cleaning a cutter base body: polishing the cutter substrate, then ultrasonically cleaning the cutter substrate by acetone and alcohol for 10-20 min, drying the cutter substrate by nitrogen, and then putting the cutter substrate into a vacuum chamber;
s2, Ar and metal ion bombardment: turning on a heater, heating to 300-500 ℃, and vacuumizing a vacuum chamber until the vacuum degree is 1.0-8.0 multiplied by 10 < -3 > Pa; then introducing Ar gas of 200-300 sccm, setting the bias voltage of the workpiece support to-800-1000V, and performing glow cleaning on the cavity for 10-20 min; reducing the bias voltage to-600 to-800V, igniting an AlTi target, wherein the target current is 60-150A, bombarding the substrate with high-energy AlTi metal cations for 3-15 min, and activating the surface of the metal substrate to improve the film-substrate bonding force;
s3, depositing an AlTiN transition layer: adjusting the sample to be kept still before the AlTi target, adjusting the bias voltage to-80 to-120V, and introducing N of 100-300 sccm2Adjusting the air pressure to 1.0-3.0 Pa, and depositing for 5-30 min to obtain an AlTiN transition layer;
s4, depositing a nano multilayer coating: introduction of N2Adjusting the revolution speed of a sample rotating frame, controlling the air pressure to be 1.0-3.0 Pa, igniting an AlTi target and an AlTiY target, alternately depositing an AlTiN layer and an AlTiYN layer with the target current of 60-150A and the bias voltage of-60-200V for 0.5-2 h to obtain an AlTiN/AlTiYN functional layer;
and S5, closing the arc power supply, opening the vacuum chamber to take out the substrate when the temperature of the vacuum chamber is reduced to room temperature, and forming a coating on the surface of the substrate, namely the AlTiN/AlTiYN nano multilayer cutter coating.
Preferably, the revolution speed in step S4 is 1-5 r/min.
Preferably, in step S4, the atomic percentages of the elements of the AlTi target are Al: 30-70 at.%, Ti: 20-60 at.%; the AlTiY target comprises the following elements in atomic percentage: 30-70 at.%, Ti: 20-50 at.%, Y: 2 to 10 at%
Preferably, the tool base body in step S1 is a WC-Co cemented carbide tool.
An AlTiN/AlTiYN nano multilayer cutter coating obtained by the preparation method.
The AlTiN/AlTiYN nano multilayer cutter coating comprises an AlTiN transition layer and an AlTiN/AlTiYN functional layer, wherein the AlTiN/AlTiYN functional layer is formed by alternately depositing AlTiN and AlTiYN modulation layers; the AlTiN/AlTiYN nanometer multilayer cutter coating comprises 20-32 at.% of Al, 10-30 at.% of Ti, 1-5 at.% of Y and 45-57 at.% of N.
Preferably, the total thickness of the AlTiN transition layer is 0.1-1 μm, and the total thickness of the AlTiN/AlTiYN nano multi-layer cutter coating is 2-10 μm.
Preferably, the thickness of the single layer of the AlTiN modulation layer is 2-20 nm, and the thickness of the single layer of the AlTiYN modulation layer is 4-30 nm.
Compared with the prior art, the invention has the following advantages and effects:
(1) according to the invention, the AlTiN/AlTiYN nano multilayer coating cutter is prepared by adopting the traditional PVD (electric arc ion plating) technology, the rare earth element Y (yttrium) is introduced into the coating, grains are refined, the surface smoothness of the coating is improved, meanwhile, the growth of an oxide layer is delayed, and the adhesive force between the oxide layer and a substrate is improved, so that the high-temperature oxidation resistance of the coating cutter is improved; and the nano multilayer structure in the cutter coating appears, the AlTiN nano layer and the AlTiYN nano layer form a coherent interface, the conversion of a part of cubic structure of the AlTiYN coating to a close-packed hexagonal structure is blocked, the high hardness performance of the AlTiN coating is kept, in addition, the growth of large and thick columnar grains is interrupted by the layered structure, so that the grains become small, meanwhile, the continuity of pores is also interrupted, and therefore, the coating has good corrosion resistance.
(2) The coated cutter can realize high wear resistance, corrosion resistance and high-temperature oxidation resistance, and simultaneously ensures the effect of high hardness.
(3) The method for manufacturing the AlTiN/AlTiYN nano multilayer coating cutter can be realized by adopting conventional equipment, and has the advantages of simple process, low equipment requirement, strong operability, good adaptability and low cost.
Drawings
FIG. 1 is a schematic view of the present invention employing an arc deposition apparatus.
FIG. 2 is SEM picture of AlTiN/AlTiYN nano multi-layer cutter coating prepared in example 1.
FIG. 3 is a schematic structural diagram of AlTiN/AlTiYN nano multilayer cutter coating.
FIG. 4 is a two-dimensional wear scar map and wear rate map for AlTiN single layer and AlTiN/AlTiYN nano multilayer tool coatings.
FIG. 5 is an SEM image of AlTiN single layer and AlTiN/AlTiYN nano multi-layer tool coatings after oxidation.
Detailed description of the invention
The present invention will be described in further detail with reference to examples, but the embodiments of the present invention are not limited thereto.
Example 1
An AlTiN/AlTiYN nano multilayer cutter coating comprises an AlTiN transition layer and an AlTiN/AlTiYN nano multilayer functional layer. Wherein the thickness of the AlTiN transition layer is 0.1 μm, the thickness of the AlTiN modulating layer in the nanometer multilayer functional layer is 2nm, the thickness of the AlTiYN modulating layer is 4nm, and the atomic percentage content of each element in the coating is as follows: 20 at.% of Al, 30 at.% of Ti, 5 at.% of Y and 45 at.% of N.
Polishing the cutter substrate, ultrasonically cleaning with acetone and alcohol for 10min, blow-drying with nitrogen, and placing into a vacuum chamber. Turning on a heater, heating to 300 deg.C, and vacuumizing to vacuum degree of 1.0 × 10-3Pa or less. Introducing Ar gas of 300sccm, setting the bias voltage of the workpiece support to be-1000V, and performing glow cleaning on the cavity for 10 min. And then reducing the bias voltage to-600V, igniting the AlTi target, carrying out target current of 150A, and bombarding the substrate with high-energy AlTi metal cations for 15 min. The bias voltage is adjusted to-80V, and N of 100sccm is introduced2Adjusting the air pressure to 1.0Pa, and depositing for 5min to obtain an AlTiN transition layer; the bias voltage is adjusted to-200V, and N is introduced into the chamber at 300sccm2And gas, controlling the gas pressure to be 3.0Pa by adjusting a throttle valve, igniting the AlTi target and the AlTiY target, wherein the target current is 60A, the deposition time is 0.5 hour, and the revolution speed of the rotary frame is 5 r/min. And after the film coating is finished, opening the vacuum chamber to cool the temperature of the vacuum chamber to room temperature, and taking out the substrate to form the AlTiN/AlTiYN nano multilayer cutter coating on the substrate.
FIG. 1 is a schematic view of an arc deposition apparatus according to the present invention. Rotating the sample rotating frame in the process of depositing the coating, and depositing an AlTiN layer on the substrate when the sample is directly opposite to the AlTi target; when the columnar AlTiY target is faced with the columnar AlTiYN target, depositing an AlTiYN layer; the AlTiN layer and the AlTiYN layer are alternately deposited to form an AlTiN/AlTiYN nano multilayer coating, and the rotating speed determines the thickness of each AlTiN layer and the AlTiYN layer.
FIG. 2 is an SEM picture of a nano-multilayer cutter coating of AlTiN/AlTiYN; as can be seen from figure 2, the coating has a compact structure, and compared with columnar crystals, the compact coating has narrower gaps, so that the diffusion of oxygen to the inner cutter matrix of the coating can be effectively delayed, and the oxidation resistance of the coated cutter is improved.
The coating detection result shows that: the bonding force is more than 80N detected by a scratch method, and the hardness is more than 36GPa detected by a nano-indentation method; the high-temperature oxidation starting temperature of the coating is as high as 950 ℃ (adopting a thermogravimetric analyzer), which shows that the cutter has higher high-temperature resistance.
The cutter life cutting test is carried out on the AlTiN/AlTiYN nano multilayer coating cutter of the invention: cutting conditions are as follows: diameter 6mm end mill 4 sword, work piece: k40(92.5HRA), dry milling, down milling, V200 m/min, feed speed 0.05mm/sec, radial depth of cut 0.1mm, axial depth of cut 2 mm. The flank face of the tool was checked for wear after a machining length of 50 m.
And (3) test results: the wear value of the back tool face of the AlTiN/AlTiYN nano multilayer coating tool is 0.2 mm. Compared with the existing milling cutter adopting TiN coating, the wear value of the rear cutter face is VB (0.8 mm); compared with TiN/Al0.54Ti0.46The N-coated milling cutter had a flank wear value VB of 0.4mm, and from the above data, it can be seen that the cutter of the present invention has high wear resistance.
Example 2
An AlTiN/AlTiYN nano multilayer coating cutter comprises an AlTiN transition layer and an AlTiN/AlTiYN nano multilayer functional layer. Wherein the thickness of the AlTiN transition layer is 0.5 mu m, the thickness of the AlTiN modulating layer in the nanometer multilayer functional layer is 8nm, the thickness of the AlTiYN modulating layer is 14nm, and the atomic percentage content of each element in the coating is as follows: 28 at.% of Al, 16 at.% of Ti, 3 at.% of Y, and 53 at.% of N.
Polishing the cutter substrate, ultrasonically cleaning with acetone and alcohol for 15min, blow-drying with nitrogen, and placing into a vacuum chamber. Turning on a heater, heating to 350 deg.C, and vacuumizing to 5.0 × 10-3Pa or less. Introducing Ar gas of 250sccm, setting the bias voltage of the workpiece support to be-800V, and performing glow cleaning on the cavity for 15 min. Then reducing the bias voltage to-800V, igniting the AlTi target, carrying out target current 120A, and bombarding the substrate with high-energy AlTi metal cations for 3 min. The bias voltage is adjusted to-100V, and 200sccm of N is introduced2Adjusting the air pressure to 2.0Pa, and depositing for 15min to obtain an AlTiN transition layer; the bias voltage is adjusted to-150V, and N is introduced into the chamber at 300sccm2Controlling the air pressure to be 1.5Pa, igniting the AlTi target and the AlTiY target, controlling the target current to be 80A, and depositing for 1 hour, wherein the revolution speed of the rotary frame is 2 r/min. And after the film coating is finished, opening the vacuum chamber to cool the temperature of the vacuum chamber to room temperature, and taking out the substrate to form the AlTiN/AlTiYN nano multilayer cutter coating on the substrate.
The coating detection result shows that: the bonding force is more than 80N detected by a scratch method, and the hardness is more than 36GPa detected by a nano-indentation method; the high-temperature oxidation starting temperature of the coating is as high as 950 ℃ (adopting a thermogravimetric analyzer), which shows that the cutter has higher high-temperature resistance.
A tool life cutting test was conducted in the same manner as in example 1, and the results showed that the AlTiN/AlTiYN nano multilayer coating tool of the present invention had a flank wear value of 0.18 mm.
Example 3
An AlTiN/AlTiYN nano multilayer coating cutter comprises an AlTiN transition layer and an AlTiN/AlTiYN nano multilayer functional layer. Wherein the thickness of the AlTiN transition layer is 0.5 mu m, the thickness of the AlTiN modulating layer in the nanometer multilayer functional layer is 20nm, the thickness of the AlTiYN modulating layer is 30nm, and the atomic percentage content of each element in the coating is as follows: 32 at.% of Al, 10 at.% of Ti, 1 at.% of Y, and 57 at.% of N.
Polishing the cutter substrate, ultrasonically cleaning with acetone and alcohol for 20min, blow-drying with nitrogen, and placing into a vacuum chamber. Turning on heater, heating to 500 deg.C, vacuumizing to vacuum degree of 8.0 × 10-3Pa or less. Introducing Ar gas of 200sccm, setting the bias voltage of the workpiece support to-900-1000V, and performing glow cleaning on the cavity for 20 min. And then reducing the bias voltage to-800V, igniting the AlTi target, wherein the target current is 60A, and bombarding the substrate with high-energy AlTi metal cation ions for 15 min. The bias voltage is adjusted to-120V, and N is introduced into the chamber at 300sccm2Adjusting the air pressure to 3.0Pa, and depositing for 30min to obtain an AlTiN transition layer; introduction of N2Controlling the air pressure at 3.0Pa, igniting the AlTi target and the AlTiY target, controlling the target current at 150A, biasing to 150V, and depositing for 2 hours, wherein the revolving speed of the revolving frame is 5 r/min. And after the film coating is finished, opening the vacuum chamber to cool the temperature of the vacuum chamber to room temperature, and taking out the substrate to form the AlTiN/AlTiYN nano multilayer cutter coating on the substrate.
The coating detection result shows that: the bonding force is more than 80N detected by a scratch method, and the hardness is more than 36GPa detected by a nano-indentation method; the high-temperature oxidation starting temperature of the coating is as high as 950 ℃ (adopting a thermogravimetric analyzer), which shows that the cutter has higher high-temperature resistance.
A tool life cutting test was conducted in the same manner as in example 1, and the results showed that the AlTiN/AlTiYN nano multilayer coating tool of the present invention had a flank wear value of 0.15 mm.
FIG. 3 is a schematic structural diagram of an AlTiN/AlTiYN nano multilayer coating cutter. Rotating the sample rotating frame in the process of depositing the coating, and depositing an AlTiN layer on the substrate when the sample is directly opposite to the AlTi target; when the AlTiYN layer faces the AlTiY target, a layer of AlTiYN layer is deposited; the AlTiN layer and the AlTiYN layer are alternately deposited to form an AlTiN/AlTiYN nano multilayer coating, and the rotating speed determines the thickness of each AlTiN layer and the AlTiYN layer. The coated cutter can realize the effects of high hardness, high wear resistance and good high-temperature oxidation resistance, and has the advantages of simple process, strong operability, good controllability, low cost, good adaptability and better economic benefit.
Effect embodiment:
the AlTiN/AlTiYN nano multilayer coated tool prepared in example 2 was compared with uncoated tools and other commercially available coated (AlTiN) tools for hardness, wear resistance, high temperature oxidation resistance and other tests. The method comprises the following specific steps:
(1) hardness analysis of the coating
The hardness of the coating was analyzed using a Swiss (TTX-NHT2) nanoindenter. The penetration depth was determined as 1/10 points of film thickness, and 10 different regions were selected from the sample and averaged. It can be seen that the AlTiN/AlTiYN nano multilayer coated tool prepared in example 2 has a hardness of 37GPa and the other commercially available coated (AlTiN) tools have a hardness of 32GPa, so that the AlTiN/AlTiYN nano multilayer coated tool prepared in example 2 has a hardness higher than that of the other commercially available coated (AlTiN) tools.
(2) Abrasion resistance test
The high-temperature friction test is carried out on a CSM HT-1000 type high-temperature friction wear testing machine, and Al is selected for the test2O3Balls (6 mm diameter) were used as friction pairs and the test conditions were as follows: the temperature is 800 ℃, the load is 2N, the rotating speed is 20cm/s, and the number of turns is 5000 turns. After the high-temperature friction test is finished, the sample is shot with the grinding mark to compare the wear degree as shown in figure 4. As can be seen from FIG. 4, the wear rate of the AlTiN/AlTiYN nano multilayer coating cutter is smaller than that of other commercially available coating (AlTiN) cutters, and the high-temperature wear resistance of the AlTiN/AlTiYN nano multilayer coating cutter is obviously improved.
(3) High temperature oxidation resistance test
The oxidation test was carried out on a tube furnace, the samples being placed in the tube furnace and kept at different temperatures in air for 2 hours. The temperature rise rate of the test is set to 10 degrees/min, and the temperature drop rate is set to 8 degrees/min. After the oxidation experiment is finished, the sample is taken out for SEM detection, and the thickness of the oxidized layer of the sample is analyzed according to an SEM picture, as shown in figure 5. FIG. 5 is an SEM image of AlTiN/AlTiYN nano multilayer coated tool prepared in example 2 and other commercially available coated (AlTiN) tools after oxidation at 900 ℃. From FIG. 5, it can be observed that the oxidation layer of the AlTiN/AlTiYN nano multi-layer coating cutter prepared in example 2at 900 ℃ is smaller than that of other commercially available coating (AlTiN) cutters, and the high-temperature oxidation resistance of the AlTiN/AlTiYN nano multi-layer coating cutter is obviously improved.
The above embodiments are preferred embodiments of the present invention, but the present invention is not limited to the above embodiments, and any other changes, modifications, substitutions, combinations, and simplifications which do not depart from the spirit and principle of the present invention should be construed as equivalents thereof, and all such changes, modifications, substitutions, combinations, and simplifications are intended to be included in the scope of the present invention.

Claims (8)

1. A preparation method of an AlTiN/AlTiYN nanometer multilayer cutter coating is characterized by comprising the following specific steps:
s1, cleaning the cutter base body: polishing the cutter substrate, then ultrasonically cleaning the cutter substrate by acetone and alcohol for 10-20 min, drying the cutter substrate by nitrogen, and then putting the cutter substrate into a vacuum chamber;
s2, Ar and metal ion bombardment: turning on a heater, heating to 300-500 ℃, and vacuumizing a vacuum chamber until the vacuum degree is 1.0-8.0 multiplied by 10 < -3 > Pa; then introducing Ar gas of 200-300 sccm, setting the bias voltage of the workpiece support to-800-1000V, and performing glow cleaning on the cavity for 10-20 min; reducing the bias voltage to-600 to-800V, igniting the AlTi target, wherein the target current is 60-150A, bombarding the substrate with high-energy AlTi metal cations for 3-15 min, and activating the surface of the metal substrate to improve the film-substrate bonding force;
s3, depositing an AlTiN transition layer: adjusting the sample to be kept still before the AlTi target, adjusting the bias voltage to-80 to-120V, and introducing N of 100-300 sccm2Adjusting the air pressure to 1.0-3.0 Pa, and depositing for 5-30 min to obtain an AlTiN transition layer;
s4, depositing the nano multilayer coating: introduction of N2Adjusting the revolution speed of a sample rotating frame, controlling the air pressure to be 1.0-3.0 Pa, igniting an AlTi target and an AlTiY target, alternately depositing an AlTiN layer and an AlTiYN layer with the target current of 60-150A and the bias voltage of-60-200V for 0.5-2 h to obtain an AlTiN/AlTiYN functional layer;
and S5, closing the arc power supply, opening the vacuum chamber to take out the substrate when the temperature of the vacuum chamber is reduced to room temperature, and forming a coating on the surface of the substrate, namely the AlTiN/AlTiYN nano multilayer cutter coating.
2. The method of claim 1, wherein: in the step S4, the revolution speed is 1-5 r/min.
3. The method of claim 1, wherein: in step S4, the atomic percentages of the elements of the AlTi target are Al: 30-70 at.%, Ti: 20-60 at.%, and the atomic percentages of the elements of the AlTiY target are Al: 30-70 at.%, Ti: 20-50 at.%, Y: 2-10 at.%.
4. The method of claim 1, wherein: in step S1, the tool base body is a WC-Co hard alloy tool.
5. An AlTiN/AlTiYN nano multilayer cutter coating obtained by the production method described in any one of claims 1 to 4.
6. The AlTiN/AlTiYN nano multilayer cutter coating of claim 5, wherein: the AlTiN/AlTiYN nano multilayer cutter coating comprises an AlTiN transition layer and an AlTiN/AlTiYN functional layer, wherein the AlTiN/AlTiYN functional layer is formed by alternately depositing AlTiN and AlTiYN modulation layers; the AlTiN/AlTiYN nanometer multilayer cutter coating comprises 20-32 at.% of Al, 10-30 at.% of Ti, 1-5 at.% of Y and 45-57 at.% of N.
7. The AlTiN/AlTiYN nano multilayer cutter coating of claim 6, wherein: the total thickness of the AlTiN transition layer is 0.1-1 mu m, and the total thickness of the AlTiN/AlTiYN nano multilayer cutter coating is 2-10 mu m.
8. The AlTiN/AlTiYN nano multilayer cutter coating of claim 6, wherein: the thickness of the single layer of the AlTiN modulation layer is 2-20 nm, and the thickness of the single layer of the AlTiYN modulation layer is 4-30 nm.
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