CN108303373B - Device for detecting vanishing grade and control method thereof - Google Patents
Device for detecting vanishing grade and control method thereof Download PDFInfo
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- CN108303373B CN108303373B CN201810101455.0A CN201810101455A CN108303373B CN 108303373 B CN108303373 B CN 108303373B CN 201810101455 A CN201810101455 A CN 201810101455A CN 108303373 B CN108303373 B CN 108303373B
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- 238000000034 method Methods 0.000 title claims abstract description 40
- 230000003287 optical effect Effects 0.000 claims abstract description 121
- 239000000758 substrate Substances 0.000 claims abstract description 79
- 238000001228 spectrum Methods 0.000 claims abstract description 37
- 230000003595 spectral effect Effects 0.000 claims abstract description 13
- 230000008030 elimination Effects 0.000 claims description 32
- 238000003379 elimination reaction Methods 0.000 claims description 32
- 239000012780 transparent material Substances 0.000 claims description 8
- 230000005540 biological transmission Effects 0.000 claims description 3
- ORQBXQOJMQIAOY-UHFFFAOYSA-N nobelium Chemical compound [No] ORQBXQOJMQIAOY-UHFFFAOYSA-N 0.000 description 22
- 239000010408 film Substances 0.000 description 13
- 230000008569 process Effects 0.000 description 9
- 238000001514 detection method Methods 0.000 description 8
- 230000008033 biological extinction Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000005530 etching Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 230000008054 signal transmission Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
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- 238000000576 coating method Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
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Abstract
The invention discloses a device for detecting vanishing grade and a control method thereof, wherein the device comprises: a light source, an optical element positioned in an optical path of the light source, a spectral detector, and a controller in electrical signal connection with the spectral detector; the optical element is used for enabling light rays emitted by the light source to be incident to the pattern area, enabling reflected light of the pattern area to be incident to the spectrum detector, enabling the light rays emitted by the light source to be incident to the channel area, and enabling the reflected light of the channel area to be incident to the spectrum detector; the spectrum detector is used for detecting the light coordinate of the reflected light of the pattern area, sending the light coordinate of the reflected light of the pattern area to the controller, detecting the light coordinate of the reflected light of the channel area and sending the light coordinate of the reflected light of the channel area to the controller; and the controller is used for determining the shadow eliminating grade of the substrate to be measured according to the light coordinates of the reflected light of the pattern area and the channel area. The device realizes data representation of macroscopic phenomena, and can accurately obtain the vanishing grade of the substrate to be measured.
Description
Technical Field
The present invention relates to the field of display technologies, and in particular, to a device for detecting a shadow elimination level and a control method thereof.
Background
With the continuous development of Display technology, Display screens or touch screens are widely used in the life of people, wherein Liquid Crystal Displays (LCDs) have the characteristics of small volume, low power consumption, no radiation and the like, and occupy an important position in the market. Organic Light-Emitting diodes (OLEDs) have the advantages of self-luminescence, fast response, wide viewing angle, high brightness, bright color, lightness, thinness, and the like, and have also been widely used in the market.
In the display technology field, transparent thin film materials are often used in the process of manufacturing display panels, for example, Indium Tin Oxide (ITO) is the most commonly used thin film material for manufacturing transparent electrodes. The preparation process of the ITO film is to deposit an ITO material on the surface of a substrate to form an ITO film layer by adopting a magnetron sputtering process under certain vacuum degree. Since the sputtering (Sputter) process is a full-surface coating, a channel cannot be formed on the surface of the substrate, and then the ITO film layer needs to be etched into a plurality of channels by an etching (Etch) process, a Pattern (Pattern) area (with ITO) and an etching groove area (without ITO) are formed on the ITO film layer.
Because the light transmittance of the ITO film layer is usually 80% to 90%, the non-uniform reflectivity of the pattern region and the etching groove region may cause the texture on the surface of the display panel to be visually apparent. The difference between the pattern area and the etching groove area is usually reduced as much as possible by using an im (index margin) pre-shadow elimination technique and a SION post-shadow elimination technique, but the two methods still cannot completely eliminate the visual difference on the surface of the substrate, so that the shadow elimination level of the ITO film layer is detected during the process of manufacturing the display panel, so as to prevent the production of unqualified products. However, in the prior art, the vanishing level is generally determined by comparing the difference between the produced display panel and the sample through human eyes, and the detection method has high subjectivity and low detection accuracy.
Disclosure of Invention
The embodiment of the invention provides a device for detecting a shadow elimination grade and a control method thereof, which are used for solving the problem that the shadow elimination level of a display panel cannot be accurately detected in the prior art.
In a first aspect, an embodiment of the present invention provides an apparatus for detecting a vanishing level, including: a light source, an optical element positioned in an optical path of the light source, a spectral detector, and a controller in electrical signal connection with the spectral detector; wherein,
the optical element is used for enabling the light emitted by the light source to be incident to the pattern area of the substrate to be detected, enabling the reflected light of the pattern area to be incident to the spectrum detector, enabling the light emitted by the light source to be incident to the channel area of the substrate to be detected, and enabling the reflected light of the channel area to be incident to the spectrum detector; the pattern area is an area with a transparent material;
the spectrum detector is used for detecting the optical coordinates of the reflected light of the pattern area, sending the optical coordinates of the reflected light of the pattern area to the controller, detecting the optical coordinates of the reflected light of the channel area, and sending the optical coordinates of the reflected light of the channel area to the controller;
the controller is used for receiving the optical coordinates of the reflected light of the pattern area and the channel area and determining the shadow eliminating grade of the substrate to be measured according to the optical coordinates of the reflected light of the pattern area and the channel area.
In a possible implementation manner, in the apparatus for detecting a vanishing level provided in an embodiment of the present invention, the apparatus further includes: an image collector;
the optical element is used for dividing the reflected light into a first light beam and a second light beam, enabling the first light beam to be incident to the spectrum detector, and enabling the second light beam to be incident to the image collector;
the image collector is used for obtaining the image of the part of the substrate to be measured corresponding to the reflection position of the reflected light.
In a possible implementation manner, in the apparatus for detecting a vanishing level provided in an embodiment of the present invention, the apparatus further includes: a position controller;
the position controller is fixedly connected with the optical element and used for moving the optical element.
In a possible implementation manner, in the apparatus for detecting a vanishing level provided in an embodiment of the present invention, the position controller includes: a key for controlling the direction of movement of the optical element.
In a possible implementation manner, in the apparatus for detecting a vanishing level provided by an embodiment of the present invention, the optical element includes: the first half mirror and the second half mirror are positioned on a transmission light path of the first half mirror;
the first half mirror is used for enabling the light emitted by the light source to be incident to the substrate to be detected and enabling the reflected light of the substrate to be detected to be incident to the second half mirror;
the second half mirror is used for dividing the reflected light into a first light beam and a second light beam, enabling the first light beam to be incident to the spectrum detector, and enabling the second light beam to be incident to the image collector.
In a possible implementation manner, in the apparatus for detecting a vanishing level provided in an embodiment of the present invention, the controller is specifically configured to:
determining a difference value between the optical coordinate of the reflected light of the pattern region and the optical coordinate of the reflected light of the channel region;
and comparing the difference with a preset light coordinate range corresponding to each shadow elimination grade, and determining the shadow elimination grade corresponding to the difference.
In a possible implementation manner, in the apparatus for detecting a vanishing level provided in an embodiment of the present invention, the controller is further configured to determine, according to a size of the received optical coordinate of the reflected light, whether an area corresponding to the optical coordinate of the reflected light is a pattern area or a channel area.
In a second aspect, an embodiment of the present invention further provides a method for controlling the apparatus for detecting a vanishing level, where the method includes:
the controller receives the light coordinates of the reflected light of the pattern region and the channel region;
and the controller determines the shadow eliminating grade of the substrate to be measured according to the light coordinates of the reflected light of the pattern area and the channel area.
In a possible implementation manner, in the control method provided in an embodiment of the present invention, the determining, by the controller, a shadow elimination level of the substrate to be measured according to optical coordinates of reflected light of the pattern region and the channel region specifically includes:
the controller determines a difference value between the optical coordinates of the reflected light of the pattern region and the optical coordinates of the reflected light of the channel region;
and the controller compares the difference value with a preset light coordinate range corresponding to each shadow elimination grade to determine the shadow elimination grade corresponding to the difference value.
In a possible implementation manner, in the control method provided in the embodiment of the present invention, the method further includes:
and the controller determines whether the area corresponding to the optical coordinate of the reflected light is a pattern area or a channel area according to the size of the received optical coordinate of the reflected light.
The invention has the following beneficial effects:
the device for detecting the shadow elimination grade and the control method thereof provided by the embodiment of the invention comprise: a light source, an optical element positioned in an optical path of the light source, a spectral detector, and a controller in electrical signal connection with the spectral detector; the optical element is used for enabling light emitted by the light source to be incident to a pattern area of the substrate to be detected, enabling reflected light of the pattern area to be incident to the spectrum detector, enabling light emitted by the light source to be incident to a channel area of the substrate to be detected, and enabling reflected light of the channel area to be incident to the spectrum detector; the pattern area is an area with a transparent material; the spectrum detector is used for detecting the light coordinate of the reflected light of the pattern area, sending the light coordinate of the reflected light of the pattern area to the controller, detecting the light coordinate of the reflected light of the channel area and sending the light coordinate of the reflected light of the channel area to the controller; and the controller is used for receiving the light coordinates of the reflected light of the pattern area and the channel area and determining the shadow eliminating grade of the substrate to be detected according to the light coordinates of the reflected light of the pattern area and the channel area. According to the device for detecting the vanishing level provided by the embodiment of the invention, the reflected light is incident to the spectrum detector through the optical element, the spectrum detector can detect the optical coordinate of the reflected light, and the controller can determine the vanishing level of the substrate to be detected according to the optical coordinate of the reflected light of the pattern area and the channel area, so that the data representation of the macroscopic phenomenon is realized, and the vanishing level of the substrate to be detected can be accurately obtained.
Drawings
Fig. 1 is a schematic structural diagram of an apparatus for detecting a vanishing level according to an embodiment of the present invention;
FIG. 2 is a top view of a substrate under test according to an embodiment of the present invention;
FIG. 3 is a second schematic structural diagram of an apparatus for detecting a vanishing level according to an embodiment of the present invention;
fig. 4 is a flowchart of a control method of the apparatus for detecting a vanishing level according to an embodiment of the present invention;
100, a substrate to be tested; 101. a light source; 102. an optical element; 1021. a first half mirror; 1022. a second half mirror; 103. a spectral detector; 104. a controller; 105. an image collector; 106. a position controller.
Detailed Description
The embodiment of the invention provides a device for detecting a shadow elimination grade and a control method thereof, aiming at the problem that the shadow elimination level of a display panel can not be accurately detected in the prior art.
The following describes in detail a specific embodiment of an apparatus for detecting a vanishing level and a control method thereof according to an embodiment of the present invention with reference to the accompanying drawings. The sizes and shapes of the various elements in the drawings are not necessarily to scale, emphasis instead being placed upon illustrating the present invention.
In a first aspect, an embodiment of the present invention provides an apparatus for detecting a vanishing level, including: a light source 101, an optical element 102 positioned in an optical path of the light source 101, a spectral detector 103, and a controller 104 in electrical signal connection with the spectral detector 103; wherein,
an optical element 102 configured to emit light from the light source 101 to the pattern area a of the substrate 100, emit reflected light from the pattern area a to the spectrum detector 103, emit light from the light source 101 to the channel area B of the substrate 100, and emit reflected light from the channel area B to the spectrum detector 103; the pattern area A is an area with a transparent material;
a spectrum detector 103 for detecting the optical coordinates of the reflected light of the pattern area a and transmitting the optical coordinates of the reflected light of the pattern area a to the controller 104, and detecting the optical coordinates of the reflected light of the channel area B and transmitting the optical coordinates of the reflected light of the channel area B to the controller 104;
and the controller 104 is configured to receive the optical coordinates of the reflected light of the pattern area a and the channel area B, and determine a shadow elimination level of the substrate 100 to be tested according to the optical coordinates of the reflected light of the pattern area a and the channel area B.
According to the device for detecting the vanishing level provided by the embodiment of the invention, the reflected light is incident to the spectrum detector through the optical element, the spectrum detector can detect the optical coordinate of the reflected light, and the controller can determine the vanishing level of the substrate to be detected according to the optical coordinate of the reflected light of the pattern area and the channel area, so that the data representation of the macroscopic phenomenon is realized, and the vanishing level of the substrate to be detected can be accurately obtained.
In the embodiment of the present invention, as shown in fig. 1, since the substrate 100 to be tested has a transparent film layer, for example, an electrode layer made of Indium Tin Oxide (ITO), and the transparent film layer generally has a specific pattern, a pattern region a having a transparent material and a channel region B are formed, and fig. 1 shows a schematic cross-sectional view of the substrate 100 to be tested, a schematic partial top view of the substrate to be tested may refer to fig. 2, in a specific implementation, a transparent film layer (for example, an ITO film layer) may be formed on a substrate by a magnetron sputtering process, and then a specific pattern is formed by an etching process, so as to form the pattern region a having a transparent material and the channel region B with a transparent material etched away. Fig. 1 and 2 are merely exemplary, and do not limit the pattern of the transparent film layer.
Because the transparent film layer has a certain light transmittance, for example, the light transmittance of the ITO film layer is 80% -90%, when light irradiates the pattern area a, the transparent material affects the reflected light of the light, so that the reflected light of the pattern area a is different from that of the channel area B, and thus the shadow eliminating grade of the substrate to be detected can be determined by detecting the optical coordinates of the reflected light of the pattern area a and the channel area B. In the embodiment of the invention, the light coordinate can also be understood as a color coordinate, and can be used for distinguishing the color difference of the reflected light of the pattern area and the channel area.
As shown in fig. 1, the optical element 102 is located on an optical path of the light source 101, that is, light emitted from the light source 101 passes through the optical element 102, light a emitted from the light source 101 passes through the optical element 102 to obtain light b, the optical element 102 irradiates the light b to the substrate 100 to be measured, the light b reflects from the substrate 100 to be measured to obtain reflected light c, the reflected light c passes through the optical element 102 to obtain light d, the optical element 102 irradiates the light d to the spectrum detector 103, and the spectrum detector 103 can determine an optical coordinate of the reflected light of the substrate to be measured by analyzing a spectrum of the light d. The controller 104 may determine a shadow level of the substrate 100 to be measured according to the optical coordinates of the reflected light of the pattern region a and the channel region B.
In practical applications, the incident position of the light beam B may be located in the pattern area a or the channel area B, and the controller 104 needs the light coordinates of the pattern area a and the light coordinates of the reflected light of the channel area B to determine the shadow elimination level of the substrate 100 to be tested, so that, in the actual detection process, after the spectrum detector 103 detects the light coordinates of the reflected light of one area (for example, the pattern area a), the area where the incident position of the light beam B is located needs to be changed, and the spectrum detector 103 detects the light coordinates of the reflected light corresponding to another area (for example, the channel area B) again, so that the controller receives the light coordinates of the reflected light of the pattern area a and the light coordinates of the reflected light of the channel area B, thereby determining the shadow elimination level of the substrate 100 to be tested. In a specific implementation, a plurality of detecting points distributed in the pattern region a and the channel region B may be selected on the substrate 100 to be tested to determine the shadow elimination level of the substrate 100 to be tested, and the detecting points may be uniformly distributed or distributed in a specific area, for example, the middle portion of the substrate 100 to be tested, which is only an example and is not limited to the positions of the detecting points.
Further, the apparatus for detecting a vanishing level according to an embodiment of the present invention, as shown in fig. 1, may further include: an image collector 105;
an optical element 102 configured to split the reflected light (light c) into a first light beam (i.e., light d) and a second light beam (i.e., light e), and to emit the first light beam d to the spectral detector 103 and emit the second light beam e to the image collector 105;
and an image collector 105 for acquiring an image of a portion of the substrate 100 to be measured corresponding to the reflection position of the reflected light.
In the actual detection process, the image of the substrate 100 to be detected corresponding to the reflection position is acquired by the image acquirer 105, and an operator can view the incident position of the light emitted from the light source 101 on the substrate 100 to be detected in real time through the image acquired by the image acquirer 105, so that the operator can change the incident position of the light emitted from the light source 101 on the substrate 100 to be detected by moving the substrate 100 to be detected or moving the optical element 102 while viewing the image acquired by the image acquirer 105, and the light emitted from the light source 101 can be accurately positioned in the pattern area a or the channel area B. That is, by providing the image collector 105, the precise positioning of the light incident position on the substrate 100 to be measured is realized.
Specifically, the image collector 105 is preferably a Charge Coupled Device (CCD) camera, and other devices having an image collecting function may be used, which is not limited herein. In practical applications, if the image collector 105 has a function of displaying an image, an operator may know to directly view the substrate 100 through the image collector 105, and if the image collector does not have the function of displaying an image, the operator may also send the collected image to the controller 104, and when the controller 104 employs a device having a display function, such as a computer, a mobile phone, or a tablet computer, the operator may view the collected image through the controller 104.
Further, the apparatus for detecting a vanishing level according to an embodiment of the present invention, as shown in fig. 1, may further include: a position controller 106;
the position controller 106 is fixedly connected to the optical element 102 for moving the optical element 102.
In an implementation, an operator may operate the position controller 106 while viewing the image captured by the image capturing device 105, so as to precisely control the incident position of the light on the substrate 100 to be measured. In practical applications, if the moving range of the optical element 102 is small, only the optical element 102 may be moved, and if the moving range is large, the light source 101, the spectrum detector 103, and the image collector 105 may be controlled to move together with the light source element 102, or the substrate 100 to be measured may be controlled to move at the same time.
Specifically, in the apparatus for detecting a shadow level according to an embodiment of the present invention, the position controller 106 may include: a key for controlling the direction of movement of the optical element 102.
In specific implementation, the key may be a physical key, or may be a touch or light control key, where the type of the key is not limited. The plurality of keys may be arranged to control the optical element 102 to move in each direction, for example, four keys may be arranged to control the optical element to move in four directions, i.e., up, down, left, and right, respectively, which is only an example here, in practical applications, more keys may also be arranged, and the number of the keys is not limited. It is also possible to set the optical element 102 to move a specific distance in a specific direction per key press, for example, to move the optical element 1021 μm to the left by pressing a key, thereby precisely controlling the position of the optical element 102.
In practical implementation, in the apparatus for detecting a vanishing level according to an embodiment of the present invention, as shown in fig. 1, the optical element 102 includes: a first half mirror 1021, and a second half mirror 1022 located on a transmission optical path of the first half mirror 1021;
a first half mirror 1021 for allowing the light emitted from the light source 101 (i.e., the light ray a) to enter the substrate 100 to be tested and allowing the reflected light of the substrate 100 to be tested (i.e., the light ray c) to enter the second half mirror 1022;
the second half mirror 1022 is configured to split the reflected light into a first light beam (i.e., light beam d) and a second light beam (i.e., light beam e), and to inject the first light beam d to the spectral detector 103 and inject the second light beam e to the image collector 105.
As shown in fig. 1, a light ray a emitted from the light source 101 is reflected by the first half mirror 1021 to obtain a light ray b, the light ray b is emitted to the substrate 100 to be measured and reflected by the substrate 100 to be measured to obtain a reflected light ray c, the reflected light ray c passes through the first half mirror 1021 and emits to the second half mirror 1022, the light ray c is emitted to the second half mirror 1022, a part of the light ray c is reflected to obtain a first light beam d, another part of the light ray c is transmitted to obtain a second light beam e, the first light beam d emits to the spectrum detector 103, and the second light beam e emits to the image collector 105.
In fig. 1, the first half mirror 1021 and the second half mirror 1022 have different tilt directions, so that the light source 101 and the spectrum detector 103 are located on different sides of the optical element 102, and in practical implementation, the first half mirror 1021 and the second half mirror 1022 may also be set to have the same tilt direction, as shown in fig. 3, so that the light source 101 and the spectrum detector 103 may be located on the same side of the optical element 102.
In addition, referring to fig. 1, the second half mirror 1022 divides the light c into a first light beam d and a second light beam e, both of which are reflected light of the substrate 100 to be measured, so that the positions of the spectrum detector 103 and the image collector 105 can be interchanged, that is, the first light beam d can be emitted to the image collector 105 and the second light beam e can be emitted to the spectrum detector 103, and similarly, for the structure shown in fig. 3, the positions of the spectrum detector 103 and the image collector 105 can be interchanged.
Specifically, in the apparatus for detecting a vanishing level provided in an embodiment of the present invention, the controller may be specifically configured to:
determining the difference value of the optical coordinate of the reflected light of the pattern area and the optical coordinate of the reflected light of the channel area;
and comparing the difference value with a preset light coordinate range corresponding to each shadow eliminating grade, and determining the shadow eliminating grade corresponding to the difference value.
In specific implementation, the preset optical coordinate range corresponding to each shadow elimination level may be set according to actual needs, for example, three shadow elimination levels lv1, lv2, and lv3 may be set, and the optical coordinate range corresponding to each shadow elimination level may be:
lv1：0～(∣a1∣，∣b1∣)；
lv2：(∣a1∣，∣b1∣)～(∣a2∣，∣b2∣)；
lv3：(∣a2∣，∣b2∣)～∞；
wherein (| a1 |, | b1 |) and (| a2 |, | b2 |) respectively indicate a threshold value of the optical coordinate range of the preset extinction level, and if the difference (Δ | a |, | b |) of the optical coordinates of the reflected light corresponding to the pattern area and the channel area is | (| a1 |, | b1 |), the extinction level of the substrate under test is lv 1; if (| a1 |, | b1 |) < (|, Δ | b) |) < (| a2 |, | b2 |), the level of vanishing of the substrate to be measured is lv 2; if (| a, | b) > | a2 | and | b2 |), the extinction level of the substrate to be tested is lv 3. In practical applications, the number of the vanishing levels and the corresponding light coordinate range can be determined according to actual needs.
To more clearly illustrate the way in which the vanishing level is determined, the following are exemplified by specific values:
for example, lv1 is 0 to (10, 15); lv2 is (10,15) - (25, 30); lv3 is (25,30) ∞; if the optical coordinate of the reflected light corresponding to the pattern area is (5,10) and the optical coordinate of the reflected light corresponding to the channel area is (6,12), the difference value of the optical coordinates of the reflected light corresponding to the pattern area and the channel area is (1,2), and since (1,2) is less than (10,15), the shadow elimination grade of the substrate to be measured is lv 1.
In the embodiment of the invention, the controller quantitatively reflects the macroscopic display difference by using the optical coordinate data by comparing the difference of the optical coordinates of the reflected light of the pattern area and the channel area, so that the shadow eliminating grade of the substrate to be detected can be accurately obtained, the shadow eliminating level of a product can be monitored at any time in actual production, the output of unqualified products is prevented, the product waste is reduced, and the production yield is improved.
Further, in the apparatus for detecting a vanishing level provided in an embodiment of the present invention, the controller may be further configured to determine, according to a size of the optical coordinate of the received reflected light, whether the area corresponding to the optical coordinate of the reflected light is a pattern area or a channel area.
Because there is a certain difference between the light coordinates corresponding to the reflected light of the pattern region and the channel region of the substrate to be measured, it can be determined whether the region corresponding to the light coordinates of the reflected light is the pattern region or the channel region by setting a threshold, for example, the range of the light coordinates of the reflected light of the pattern region is set M, the range of the light coordinates of the reflected light of the channel region is set N, if the detected light coordinates of the reflected light belong to set M, it can be determined that the reflected light corresponds to the pattern region, and if the detected light coordinates of the reflected light belong to set N, it can be determined that the reflected light corresponds to the channel region. Therefore, after the controller receives the optical coordinate of the reflected light of the substrate to be detected, the controller can automatically judge the area corresponding to the optical coordinate, and other parts are not needed to send corresponding area information to the controller in a signal transmission mode, so that the detection speed is improved, and the detection cost can be saved. In practical applications, the corresponding area information may be manually input to the controller, and the method of determining which area the optical coordinates correspond to is not limited herein.
In a second aspect, based on the same inventive concept, an embodiment of the present invention further provides a control method for the apparatus for detecting a vanishing level. Because the principle of the control method for solving the problem is similar to that of the device for detecting the vanishing levels, the implementation of the control method can be referred to that of the device for detecting the vanishing levels, and repeated parts are not described again.
As shown in fig. 4, the method for controlling the apparatus for detecting a vanishing level according to an embodiment of the present invention includes:
s201, receiving light coordinates of reflected light of a pattern area and a channel area by a controller;
s202, the controller determines the shadow eliminating grade of the substrate to be measured according to the light coordinates of the reflected light of the pattern area and the channel area.
According to the control method of the device for detecting the shadow elimination grade, provided by the embodiment of the invention, the controller can determine the shadow elimination grade of the substrate to be detected according to the optical coordinates of the reflected light of the pattern area and the channel area, so that the data representation of the macroscopic phenomenon is realized, and the shadow elimination grade of the substrate to be detected can be accurately obtained.
Specifically, in the control method provided in the embodiment of the present invention, the step S202 may specifically include:
the controller determines the difference value of the light coordinate of the reflected light of the pattern area and the light coordinate of the reflected light of the channel area;
and the controller compares the difference value with a preset light coordinate range corresponding to each shadow eliminating grade to determine the shadow eliminating grade corresponding to the difference value.
In specific implementation, the preset optical coordinate range corresponding to each shadow elimination level may be set according to actual needs, for example, three shadow elimination levels lv1, lv2, and lv3 may be set, and the optical coordinate range corresponding to each shadow elimination level may be:
lv1：0～(∣a1∣，∣b1∣)；
lv2：(∣a1∣，∣b1∣)～(∣a2∣，∣b2∣)；
lv3：(∣a2∣，∣b2∣)～∞；
wherein (| a1 |, | b1 |) and (| a2 |, | b2 |) respectively indicate a threshold value of the optical coordinate range of the preset extinction level, and if the difference (Δ | a |, | b |) of the optical coordinates of the reflected light corresponding to the pattern area and the channel area is | (| a1 |, | b1 |), the extinction level of the substrate under test is lv 1; if (| a1 |, | b1 |) < (|, Δ | b) |) < (| a2 |, | b2 |), the level of vanishing of the substrate to be measured is lv 2; if (| a, | b) > | a2 | and | b2 |), the extinction level of the substrate to be tested is lv 3. In practical applications, the number of the vanishing levels and the corresponding light coordinate range can be determined according to actual needs.
Further, in the control method provided in the embodiment of the present invention, the method may further include:
and the controller determines whether the area corresponding to the optical coordinate of the reflected light is a pattern area or a channel area according to the size of the optical coordinate of the received reflected light.
Because there is a certain difference between the light coordinates corresponding to the reflected light of the pattern region and the channel region of the substrate to be measured, it can be determined whether the region corresponding to the light coordinates of the reflected light is the pattern region or the channel region by setting a threshold, for example, the range of the light coordinates of the reflected light of the pattern region is set M, the range of the light coordinates of the reflected light of the channel region is set N, if the detected light coordinates of the reflected light belong to set M, it can be determined that the reflected light corresponds to the pattern region, and if the detected light coordinates of the reflected light belong to set N, it can be determined that the reflected light corresponds to the channel region. Therefore, after the controller receives the optical coordinate of the reflected light of the substrate to be detected, the controller can automatically judge the area corresponding to the optical coordinate, and other parts are not needed to send corresponding area information to the controller in a signal transmission mode, so that the detection speed is improved, and the detection cost can be saved. In practical applications, the corresponding area information may be manually input to the controller, and the method of determining which area the optical coordinates correspond to is not limited herein.
According to the device for detecting the vanishing grade and the control method thereof provided by the embodiment of the invention, the reflected light of the pattern area or the channel area is incident to the spectrum detector through the optical element, the spectrum detector can detect the optical coordinate of the reflected light, and the controller can determine the vanishing grade of the substrate to be detected according to the optical coordinate of the reflected light of the pattern area and the channel area, so that the data representation of the macroscopic phenomenon is realized, the vanishing grade of the substrate to be detected can be accurately obtained, and in addition, the accurate control of the incident light on the substrate to be detected can be realized through arranging the image collector and the position controller.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (9)
1. An apparatus for detecting a vanishing level, comprising: a light source, an optical element positioned in an optical path of the light source, a spectral detector, and a controller in electrical signal connection with the spectral detector; wherein,
the optical element is used for enabling the light emitted by the light source to be incident to the pattern area of the substrate to be detected, enabling the reflected light of the pattern area to be incident to the spectrum detector, enabling the light emitted by the light source to be incident to the channel area of the substrate to be detected, and enabling the reflected light of the channel area to be incident to the spectrum detector; the pattern area is an area with a transparent material;
the spectrum detector is used for detecting the optical coordinates of the reflected light of the pattern area, sending the optical coordinates of the reflected light of the pattern area to the controller, detecting the optical coordinates of the reflected light of the channel area, and sending the optical coordinates of the reflected light of the channel area to the controller;
the controller is used for receiving the optical coordinates of the reflected light of the pattern area and the channel area and determining the shadow eliminating grade of the substrate to be detected according to the optical coordinates of the reflected light of the pattern area and the channel area; and the controller is specifically configured to:
determining a difference value between the optical coordinate of the reflected light of the pattern region and the optical coordinate of the reflected light of the channel region;
and comparing the difference with a preset light coordinate range corresponding to each shadow elimination grade, and determining the shadow elimination grade corresponding to the difference.
2. The apparatus of claim 1, further comprising: an image collector;
the optical element is used for dividing the reflected light into a first light beam and a second light beam, enabling the first light beam to be incident to the spectrum detector, and enabling the second light beam to be incident to the image collector;
the image collector is used for obtaining the image of the part of the substrate to be measured corresponding to the reflection position of the reflected light.
3. The apparatus of claim 2, further comprising: a position controller;
the position controller is fixedly connected with the optical element and used for moving the optical element.
4. The apparatus of claim 3, wherein the position controller comprises: a key for controlling the direction of movement of the optical element.
5. The apparatus of claim 2, wherein the optical element comprises: the first half mirror and the second half mirror are positioned on a transmission light path of the first half mirror;
the first half mirror is used for enabling the light emitted by the light source to be incident to the substrate to be detected and enabling the reflected light of the substrate to be detected to be incident to the second half mirror;
the second half mirror is used for dividing the reflected light into a first light beam and a second light beam, enabling the first light beam to be incident to the spectrum detector, and enabling the second light beam to be incident to the image collector.
6. The apparatus of claim 1, wherein the controller is further configured to determine whether the area corresponding to the light coordinate of the reflected light is a pattern area or a channel area according to the magnitude of the received light coordinate of the reflected light.
7. A control method of an apparatus for detecting a vanishing level as claimed in any one of claims 1 to 6, comprising:
the controller receives the light coordinates of the reflected light of the pattern region and the channel region;
and the controller determines the shadow eliminating grade of the substrate to be measured according to the light coordinates of the reflected light of the pattern area and the channel area.
8. The method as claimed in claim 7, wherein the determining, by the controller, the shadow level of the substrate to be tested according to the optical coordinates of the reflected light of the pattern region and the channel region comprises:
the controller determines a difference value between the optical coordinates of the reflected light of the pattern region and the optical coordinates of the reflected light of the channel region;
and the controller compares the difference value with a preset light coordinate range corresponding to each shadow elimination grade to determine the shadow elimination grade corresponding to the difference value.
9. The control method according to claim 8, further comprising:
and the controller determines whether the area corresponding to the optical coordinate of the reflected light is a pattern area or a channel area according to the size of the received optical coordinate of the reflected light.
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| CN103196554B (en) * | 2013-03-14 | 2015-02-25 | 合肥京东方光电科技有限公司 | System and method for testing and adjusting light intensity uniformity of light source |
| KR101565855B1 (en) * | 2014-04-21 | 2015-11-05 | 에스케이씨하스디스플레이필름(유) | Transparent conductive optical sheet having high invisibility of pattern |
| JP6256413B2 (en) * | 2015-05-27 | 2018-01-10 | 信越半導体株式会社 | Semiconductor wafer evaluation method |
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