CN108279215B - Photoelectric gas detection device and working method thereof - Google Patents

Photoelectric gas detection device and working method thereof Download PDF

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Publication number
CN108279215B
CN108279215B CN201711437944.5A CN201711437944A CN108279215B CN 108279215 B CN108279215 B CN 108279215B CN 201711437944 A CN201711437944 A CN 201711437944A CN 108279215 B CN108279215 B CN 108279215B
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light
herriott
cavity
emitted
detector
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CN108279215A (en
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俞大海
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FOCUSED PHOTONICS (HANGZHOU) Inc
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FOCUSED PHOTONICS (HANGZHOU) Inc
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106General arrangement of respective parts
    • G01N2021/0112Apparatus in one mechanical, optical or electronic block
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02ATECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A50/00TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
    • Y02A50/20Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters

Abstract

The invention provides a photoelectric gas detection device and a working method thereof, wherein the photoelectric gas detection device comprises a light source, a Herriott cavity and a detector, wherein the Herriott cavity is provided with an inlet hole; the light separator is arranged in the inlet hole and is used for isolating the interior and the outside of the Herriott cavity; the light separator includes: the refractive index of the first part is n 1 The method comprises the steps of carrying out a first treatment on the surface of the The light source is arranged against the first side surface of the first part, and emitted measuring light is emitted from the first side surface and sequentially passes through the first part, the combining part and the second part and then is emitted into the Herriott cavity; the first part and the second part are connected by a joint, and the refractive index of the joint is n 0 ,n 0 ≠n 1 ,n 0 ≠n 2 The method comprises the steps of carrying out a first treatment on the surface of the The second part has a refractive index of n 2 ,n 1 ≠n 2 The method comprises the steps of carrying out a first treatment on the surface of the The detector is disposed against the second side of the second portion; the detection light emitted from the Herriott cavity passes through the second part and then is totally reflected at the joint part, and the detection light emitted from the second part is received by the detector. The invention has the advantages of simple structure, low cost and the like.

Description

Photoelectric gas detection device and working method thereof
Technical Field
The invention relates to gas detection, in particular to a photoelectric gas detection device and a working method thereof.
Background
In the measurement of trace gases, in order to improve the measurement sensitivity and reduce the detection lower limit, a technical scheme of multiplying the equivalent optical path of a measuring beam passing through the gas by several times or even hundreds of thousands of times is generally adopted to enhance the overall absorption intensity.
Such as absorption spectra using Herriott cavities, and OA-ICOS techniques and CRDs techniques using high definition cavities, are often used for concentration detection of trace and even trace gases. These techniques have very high precision requirements for both the angle of incidence and the location of incidence of the light beam into the gas chamber, and even require fine tuning to optimize the angle of incidence to match the subtle differences of the different gas chambers, often leaving a distance between the light source (or detector) and the gas chamber for ease of optical adjustment. This situation makes it difficult to measure gas components that are present in the atmosphere in a constant amount, such as minute amounts of moisture and oxygen.
To solve this problem, it is often necessary to introduce a micro-positive pressure inert purge gas, such as high purity N, into the instrument 2 And the like, the measurement is greatly influenced in case of failure of the purging system, and the detection lower limit of the whole instrument is limited.
Disclosure of Invention
In order to solve the defects in the prior art, the invention provides the photoelectric gas detection device which has the advantages of simple structure, no need of gas purging, low detection lower limit and high reliability.
A photoelectric gas detection device comprising a light source, a herriott cavity and a detector, the herriott cavity having an entrance aperture; the photoelectric gas detection device further includes:
the light separator is arranged in the entrance hole and is used for isolating the interior of the Herriott cavity from the outside; the light separator includes:
a first portion having a refractive index n 1 The method comprises the steps of carrying out a first treatment on the surface of the The light source is arranged against the first side surface of the first part, and measuring light emitted by the light source is emitted from the first side surface and sequentially passes through the first part, the combining part and the second part and then is emitted into the Herriott cavity;
a second portion having a refractive index n 2 ,n 1 ≠n 2
A joint portion through which the first and second portions are connected, the joint portion having a refractive index n 0 ,n 0 ≠n 1 ,n 0 ≠n 2
The detector is disposed against the second side of the second portion; the detection light emitted from the Herriott cavity passes through the second part and then is totally reflected at the combination part, and the detection light emitted from the second part is received by the detector.
According to the photoelectric gas detection device described above, it is preferable that the measurement light and the detection light are coplanar in the light separator and perpendicular to the joint portion.
According to the photoelectric gas detection device described above, preferably, the emission point of the measurement light emitted into the herriott cavity coincides with the incidence point of the detection light emitted into the second portion at the emission point of the second portion.
According to the photoelectric gas detection device described above, it is preferable that at the exit point, the exit angle of the measurement light and the incident angle of the detection light are equal.
According to the photoelectric gas detection device described above, preferably, the light source is a semiconductor laser.
According to the photoelectric gas detection device described above, preferably, the first side surface is adjacent to the second side surface.
The invention aims at realizing the following technical scheme:
the invention also aims to provide a working method of the photoelectric gas detection device, and the invention aims to be realized through the following technical scheme:
the working method of the photoelectric gas detection device comprises the following steps:
(A1) The light source emits measuring light, and the measuring light sequentially passes through the first part, the combining part and the second part and then is emitted into the Herriott cavity;
(A2) Measuring light is reflected back and forth for a plurality of times in the Herriott cavity;
(A3) The detection light emitted from the Herriott cavity passes through the second part and then is totally reflected at the combining part;
(A4) The detection light exiting the second portion is received by the detector.
Compared with the prior art, the invention has the following beneficial effects:
1. the device does not need a gas purging device, and has simple structure and low cost;
the light separator is fixedly arranged at the incident hole of the Herriott cavity, the laser and the detector are arranged along the light separator, and the distance between the laser and the detector is zero, so that adverse effects of air containing gas to be detected are eliminated, the detection lower limit is effectively reduced, and the reliability is improved;
2. the total reflection of light is creatively utilized to spatially separate the incident measuring light from the outgoing detecting light.
Drawings
The present disclosure will become more readily understood with reference to the accompanying drawings. As will be readily appreciated by those skilled in the art: the drawings are only for illustrating the technical scheme of the present invention and are not intended to limit the scope of the present invention. In the figure:
FIG. 1 is a schematic diagram of an electro-optical gas detection device according to an embodiment of the present invention;
fig. 2 is a schematic diagram of an optical separator according to an embodiment of the present invention.
Detailed Description
Figures 1-2 and the following description depict alternative embodiments of the invention to teach those skilled in the art how to make and reproduce the invention. In order to teach the technical solution of the present invention, some conventional aspects have been simplified or omitted. Those skilled in the art will appreciate variations or alternatives derived from these embodiments that fall within the scope of the invention. Those skilled in the art will appreciate that the features described below can be combined in various ways to form multiple variations of the invention. Thus, the invention is not limited to the following alternative embodiments, but only by the claims and their equivalents.
Example 1
Fig. 1 schematically shows a schematic configuration diagram of an optoelectronic gas detecting device according to an embodiment of the present invention, as shown in fig. 1, the optoelectronic gas detecting device includes:
a light source 31, a herriott cell 11 and a detector 32, the herriott cell 11 having an entrance aperture; the light source 31, the herriott cell 11 and the detector 32 are prior art in the field, and the specific structure and operation are not described herein;
a light separator 21, the light separator 21 being disposed in the entrance hole to isolate the inside of the herriott chamber 11 from the outside; as shown in fig. 2, the light separator 31 includes:
a first portion 211, the refractive index of the first portion 211 being n 1 The method comprises the steps of carrying out a first treatment on the surface of the The light source 31 is disposed along the first side of the first portion 211, the interval is zero, and the measurement light emitted by the light source 31 is emitted from the first side and then sequentially passes through the first portion 211, the combining portion 212 and the second portion 213 and then is emitted into the herriott cavity 11;
a second portion 213, the second portion 213 having a refractive index n 2 ,n 1 ≠n 2
A joint 212, the first portion 211 and the second portion 213 being connected by the joint 212, the junctionThe refractive index of the combined portion 212 is n 0 ,n 0 ≠n 1 ,n 0 ≠n 2
The detector 32 is disposed against the second side of the second portion 213 with zero pitch; the detection light emitted from the herriott cavity 11 passes through the second portion 213 and then totally reflects at the combining portion 212, and the detection light emitted from the second portion 213 is received by the detector 32; the measuring light and the detecting light are coplanar within the light separator 21 and perpendicular to the joint 212; the exit point of the measurement light entering the herriott cavity 11 at the second portion 213 coincides with the incident point of the detection light entering the second portion 213; at the exit point, an exit angle of the measurement light and an incident angle of the detection light are equal.
The working method of the photoelectric gas detection device comprises the following steps:
(A1) The light source 31 emits measurement light, and the measurement light sequentially passes through the first portion 211, the combining portion 212 and the second portion 213 and then is emitted into the herriott cavity 11;
(A2) Measuring light is reflected back and forth in the herriott cell 11 a plurality of times;
(A3) The detection light emitted from the herriott cavity 11 passes through the second portion 213 and then totally reflects at the combining portion 212;
(A4) The detection light exiting the second portion 213 is received by the detector 32.
Example 2
Application example of photoelectric gas detection device and working method thereof according to embodiment 1 of the present invention.
In this application example, the light source 31 is a semiconductor laser; the first side surface is adjacent to the second side surface; the light separator 21 is fixed on the incident hole (i.e. the exit hole, shared by the incident hole and the exit hole) of the herriott cavity 11 through glue, so as to well isolate the interior of the herriott cavity 11 from the outside; the semiconductor laser is fixed against the first side and the detector 32 is fixed against the second side.
According to the working method of the photoelectric gas detection device, the working method comprises the following steps:
(A1) The light source 31 emits measurement light, the measurement light directly enters the first portion 211, then sequentially passes through the combination portion 212 and the second portion 213 and then is emitted into the Herriott cavity 11, the emergent point of the measurement light at the second portion 213 is point A, and the emergent angle is alpha;
(A2) Measuring light is reflected back and forth in the herriott cell 11 a plurality of times;
(A3) The detection light emitted from the herriott cavity 11 enters the second portion 213, passes through the second portion 213, and then is totally reflected at the junction 212; the measurement light and the detection light are coplanar within the light separator 21 and perpendicular to the joint 212; the incidence point of the detection light at the second portion 213 is B, and the incidence angle is β; the point A and the point B coincide, and alpha=beta;
(A4) The detection light exiting the second portion 213 is received directly by the detector 32.

Claims (4)

1. A photoelectric gas detection device comprising a light source, a herriott cavity and a detector, the herriott cavity having an entrance aperture; the method is characterized in that: the photoelectric gas detection device further includes:
the light separator is arranged in the entrance hole and is used for isolating the interior of the Herriott cavity from the outside; the light source and detector are both mounted against a light separator with zero distance between them, the light separator comprising:
a first portion having a refractive index n 1 The method comprises the steps of carrying out a first treatment on the surface of the The light source is arranged against the first side surface of the first part, and measuring light emitted by the light source is emitted from the first side surface and sequentially passes through the first part, the combining part and the second part and then is emitted into the Herriott cavity;
a second portion having a refractive index n 2 ,n 1 ≠n 2
A joint portion through which the first and second portions are connected, the joint portion having a refractive index n 0 ,n 0 ≠n 1 ,n 0 ≠n 2
The detector is disposed against the second side of the second portion; the detection light emitted from the Herriott cavity passes through the second part and then is totally reflected at the combination part, and the detection light emitted from the second part is received by the detector;
the measuring light and the detecting light are coplanar in the light separator and perpendicular to the combining part, the emergent point of the measuring light which is emitted into the Herriott cavity at the second part coincides with the incident point of the detecting light which is emitted into the second part, and at the emergent point, the emergent angle of the measuring light is equal to the incident angle of the detecting light.
2. The photoelectric gas detection apparatus according to claim 1, wherein: the light source is a semiconductor laser.
3. The photoelectric gas detection apparatus according to claim 1, wherein: the first side is adjacent to the second side.
4. A method of operating a photoelectric gas detection apparatus according to any one of claims 1 to 3, the method comprising the steps of:
(A1) The light source emits measuring light, and the measuring light sequentially passes through the first part, the combining part and the second part and then is emitted into the Herriott cavity;
(A2) Measuring light is reflected back and forth for a plurality of times in the Herriott cavity;
(A3) The detection light emitted from the Herriott cavity passes through the second part and then is totally reflected at the combining part;
(A4) The detection light exiting the second portion is received by the detector.
CN201711437944.5A 2017-12-26 2017-12-26 Photoelectric gas detection device and working method thereof Active CN108279215B (en)

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101470072A (en) * 2002-09-06 2009-07-01 Tdw特拉华有限公司 Apparatus for detecting gas by absorption spectrometry
CN103472014A (en) * 2013-09-09 2013-12-25 中国电子科技集团公司第八研究所 Gas multi-reflect pool detection device with multi-dimensional laser self-alignment function
CN103471994A (en) * 2013-09-09 2013-12-25 中国电子科技集团公司第八研究所 Detection device for gas multi-reflect pool with single fiber transmission function
CN104897613A (en) * 2015-04-08 2015-09-09 中国科学院合肥物质科学研究院 Photo-thermal interference apparatus by using Herriott cell to measure aerosol absorption and method thereof
CN107144549A (en) * 2017-05-11 2017-09-08 西安科技大学 Detection means and method based on TDLAS trace CO gas concentrations
CN207742105U (en) * 2017-12-26 2018-08-17 聚光科技(杭州)股份有限公司 Photo-electric gas-detecting device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101470072A (en) * 2002-09-06 2009-07-01 Tdw特拉华有限公司 Apparatus for detecting gas by absorption spectrometry
CN103472014A (en) * 2013-09-09 2013-12-25 中国电子科技集团公司第八研究所 Gas multi-reflect pool detection device with multi-dimensional laser self-alignment function
CN103471994A (en) * 2013-09-09 2013-12-25 中国电子科技集团公司第八研究所 Detection device for gas multi-reflect pool with single fiber transmission function
CN104897613A (en) * 2015-04-08 2015-09-09 中国科学院合肥物质科学研究院 Photo-thermal interference apparatus by using Herriott cell to measure aerosol absorption and method thereof
CN107144549A (en) * 2017-05-11 2017-09-08 西安科技大学 Detection means and method based on TDLAS trace CO gas concentrations
CN207742105U (en) * 2017-12-26 2018-08-17 聚光科技(杭州)股份有限公司 Photo-electric gas-detecting device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
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