CN108278325A - The passive air-flotation type vibration-isolating platform integrated control cabinet of large-scale high-precision - Google Patents

The passive air-flotation type vibration-isolating platform integrated control cabinet of large-scale high-precision Download PDF

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Publication number
CN108278325A
CN108278325A CN201810026349.0A CN201810026349A CN108278325A CN 108278325 A CN108278325 A CN 108278325A CN 201810026349 A CN201810026349 A CN 201810026349A CN 108278325 A CN108278325 A CN 108278325A
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China
Prior art keywords
button
exhaust
groups
air
gas tube
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Granted
Application number
CN201810026349.0A
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Chinese (zh)
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CN108278325B (en
Inventor
胡明祎
张同亿
黄伟
秦敬伟
兰日清
伍文科
张瑞宇
王菲
李颖
刘鑫
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China IPPR International Engineering Co Ltd
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China IPPR International Engineering Co Ltd
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Priority to CN201810026349.0A priority Critical patent/CN108278325B/en
Publication of CN108278325A publication Critical patent/CN108278325A/en
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/023Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
    • F16F15/027Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means comprising control arrangements
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/023Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
    • F16F15/0232Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means with at least one gas spring
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/023Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
    • F16F15/027Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means comprising control arrangements
    • F16F15/0275Control of stiffness
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F2230/00Purpose; Design features
    • F16F2230/0005Attachment, e.g. to facilitate mounting onto confer adjustability
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F2230/00Purpose; Design features
    • F16F2230/06Fluid filling or discharging
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F2230/00Purpose; Design features
    • F16F2230/18Control arrangements
    • F16F2230/186Control arrangements with manual adjustments

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Vibration Prevention Devices (AREA)

Abstract

The invention discloses a kind of passive air-flotation type vibration-isolating platform integrated control cabinets of large-scale high-precision, including:Switch region and diagnostic region;The wherein described switch region includes always opening button (ON), always closing button (OFF), pressure regulation button and instrument board, and the button (ON) of always opening to three groups of springs of air floating platform for carrying out integral inflating;Total pass button (OFF) is used to stop integral inflating to three groups of springs of air floating platform, and the pressure regulation button is used to that three groups of spring atmospheric pressure values to be carried out set overall and be adjusted;The diagnostic region includes three groups of exhaust buttons and instrument board, described three groups of exhaust buttons pair, three groups of air sources carry out independent gas exhaust inspecting respectively, each group of exhaust button include height (H) based on exhaust velocity, in (M), low (L) third gear exhaust button.

Description

The passive air-flotation type vibration-isolating platform integrated control cabinet of large-scale high-precision
Technical field
The present invention relates to vibration control technology field more particularly to a kind of passive air-flotation type vibration-isolating platform collection of large-scale high-precision At switch board.
Background technology
Currently, the vibration isolation for large-scale high-precision air-flotation type platform controls, mostly uses and manually platform shock-absorbing spring is carried out Inflation, debugging, maintenance etc., take time and effort, efficiency is low, or is controlled with some simple control systems, but its shortage is mating Fault diagnosis miscellaneous function.It is summarized, Traditional project method has the following defects:
(1) without control cabinet matched, it is not easy to management control.There are many problems for artificial control method.First, manually Method needs one by one to be filled and deflated by air spring to the control of vibration-isolating platform, and debugs one by one, time-consuming and laborious, and efficiency is low; Secondly, inevitably there is artificial caused error in control artificially, and accuracy is not easy to control;Finally, when platform occurs When failure, it is not easy to maintenance, debugging.
(2) lack mating fault diagnosis miscellaneous function.Existing control system lacks mating fault diagnosis miscellaneous function, to being The maintenance of system brings big inconvenience, fault diagnosis to investigate, recorded under different air pressures sometimes for each group of spring Data, and test, compare repeatedly, it is not only bothered using artificial method, sometimes due to the step mistake during diagnosis, makes Cancel at test data, where cannot finding problem in time, efficiency is low, error-prone.
Therefore, it is necessary to new vibration control technologies, are used for the passive air-flotation type vibration-isolating platform integrated control of large-scale high-precision.
Invention content
It is an object of the invention to overcome the above-mentioned problems in the prior art, a kind of large-scale high-precision quilt is thus provided Floating of taking offence vibration-isolating platform integrated control system, present invention is generally directed to the passive air-flotation type vibration-isolating platform vibration controls of large-scale high-precision System processed fills the efficiency in gas exhaust inspecting and failure diagnostic process in air spring, proposes that one kind considering air floating platform The factors such as lifting is steady, it is convenient to fill bleeding, pressure control fining degree height, pass through the reasonable cloth to source gas line system Office and framework, setting switch region (filling exhaust), diagnostic region (stepping exhaust) two parts independent control, design a kind of efficient collect At vibration control system refinement switch board.
According to an aspect of the present invention, a kind of passive air-flotation type vibration-isolating platform integrated control cabinet of large-scale high-precision is provided, is wrapped It includes:
Switch region and diagnostic region;
The wherein described switch region includes always opening button (ON), always closing button (OFF), pressure regulation button and instrument board, described total Button (ON) is opened for carrying out integral inflating to three groups of springs of air floating platform;Total pass button (OFF) is used for air floating platform Three groups of springs stop integral inflating, and the pressure regulation button is used to that three groups of spring atmospheric pressure values to be carried out set overall and be adjusted;
The diagnostic region include three groups of exhaust buttons and instrument board, described three groups of exhaust buttons pair, three groups of air sources respectively into The independent gas exhaust inspecting of row, each group of exhaust button include height (H) based on exhaust velocity, in (M), the exhaust of low (L) third gear press Button.
According to another aspect of the present invention, a kind of air-flotation type vibration-isolating platform control system is provided, including according to claim 1 Switch board, air floating platform, air supply system and the filtration system,
The wherein described air floating platform includes three groups of springs, first group of spring by gas tube I with always open button (ON) and always Close button (OFF) be connected, second group of spring by gas tube II and always open button (ON) and always pass button (OFF) be connected, Third group spring by gas tube I II with always open button (ON) and total button (OFF) that closes is connected;
The air supply system is connected via filtration system with the switch board, and by always opening button (ON) and total pass button (OFF) come to supply to air floating platform;
Three groups of exhaust buttons by exhaust pipe I, exhaust pipe I I and exhaust pipe I II respectively with gas tube I, inflation Pipe II and gas tube II I are connected, come control the air floating platform three groups of springs exhaust.
An embodiment according to the present invention is being filled wherein the air-flotation type vibration-isolating platform control system further includes setting Switch valve on tracheae I, gas tube II and gas tube III, such as the switch valve can be solenoid valve, for controlling gas tube Switch.Such as in exhaust, each switch valve is closed, to ensure the autonomous working of each exhaust pipe, prevents from collaborating.
The passive air-flotation type vibration-isolating platform integrated control cabinet of large-scale high-precision of the present invention includes core two large divisions, first Be divided into switch region, by the expected atmospheric pressure value of setting, using master switch, to three groups of air springs carry out simultaneously, quickly, stabilization fills Gas and bleeding;Second part is diagnostic region, and can three groups of air spring groups be carried out with independent exhaustion, and gas exhaust inspecting point High (H), in (M), low (L) third gear, for being finely adjusted to the air pressure of every group of air spring under different operating modes, or for assisting shaking The performance fault of autocontrol system diagnoses.
Description of the drawings
In order to illustrate the technical solution of the embodiments of the present invention more clearly, will be described below to embodiment required Attached drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for ability For the those of ordinary skill of domain, without creative efforts, other skills are can also be obtained according to these attached drawings Art scheme.
Fig. 1 is the structural schematic diagram according to the air-flotation type vibration-isolating platform control system of one embodiment of the invention.
Specific implementation mode
To make the object, technical solutions and advantages of the present invention clearer, below in conjunction with attached drawing to each reality of the present invention The mode of applying is explained in detail.However, it will be understood by those skilled in the art that in each embodiment of the present invention, In order to make the reader understand this application better, many technical details are proposed.But even if without these technical details and base In the various changes and modifications of following embodiment, each claim of the application technical side claimed can also be realized Case.
Fig. 1 is the Structure and Process schematic diagram according to the air-flotation type vibration-isolating platform control system of one embodiment of the invention.
With reference to figure 1, air-flotation type vibration-isolating platform control system of the invention includes three areas:Air floating platform arranges the areas A of area, gas The source capsule line arrangement areas B of area, the areas air supporting switch board directorial area C.
It includes air floating platform that air floating platform, which arranges area mainly, and the air floating platform includes high rigidity platform and three groups of inflations Spring is provided with viscous damper in each groups of springs.The basic structure of air floating platform is well known to those skilled in the art This is not described in detail.
First group of spring by gas tube I with always open button (ON) and total button (OFF) that closes is connected, second group of spring is logical Overcharge tracheae II and always open button (ON) and total button (OFF) that closes is connected, third group spring by gas tube II I with always open Button (ON) is connected with total button (OFF) that closes.
Source gas line arrangement area is mainly used for arranging each gas circuit pipe, for example, gas tube I shown in figure, gas tube II, with And gas tube II I and exhaust pipe I, exhaust pipe II and exhaust pipe III.Wherein, exhaust pipe I, exhaust pipe I I and exhaust Pipe I I I are connected with gas tube I, gas tube II and gas tube III respectively.
Switch valve on gas tube I, gas tube II and gas tube I II, for example, the switch valve can be solenoid valve or Person is its suitable valve, the switch for controlling gas tube.Such as in exhaust, each switch valve is closed, to ensure each exhaust The autonomous working of pipe prevents from collaborating.
Exhaust pipe I, exhaust pipe II and exhaust pipe I II respectively with the passive air-flotation type vibration-isolating platform of the large-scale high-precision Three groups of exhaust buttons I, II and III of integrated control cabinet are connected.
As shown, the passive air-flotation type vibration-isolating platform of large-scale high-precision that air supporting switch board directorial area includes the present invention integrates Switch board (namely air supporting switch board), air supply system and filtration system.
The air supporting switch board of the present invention is divided into two parts region:Switch region and diagnostic region.Switch region is used for air floating platform Three groups of springs carry out integral inflating, and overall gas pressure is adjusted;Diagnostic region is used to carry out auxiliary diagnosis to three groups of air sources Control.
More specifically, switch region includes always opening button (ON), always closing button (OFF), pressure regulation button, instrument board, it is real respectively Integral inflating now is carried out to three groups of springs of air floating platform, stops inflation and is carried out by set overall and is adjusted for three groups of spring atmospheric pressure values Section, consistency is good, and deviation is small, efficient.Pass through gas tube I, gas tube that is, always opening button (ON) and always closing button (OFF) II, gas tube III are connected with first group of spring, second group of spring and third group spring and control inflation respectively.
With reference to figure 1, the air supply system is connected via filtration system with the switch board, and by always open button (ON) and It is total that button (OFF) is closed to be supplied to air floating platform.The air supply system and filtration system are well known to those skilled in the art, This is not described in detail.
Three groups of exhaust buttons are connected by gas tube I, gas tube I I and gas tube I II, described to control The exhaust of three groups of springs of air floating platform.
Instrument board is used for showing various parameters such as pressure etc..
The diagnostic region include three groups of exhaust buttons and instrument board, described three groups of exhaust buttons pair, three groups of air sources respectively into The independent gas exhaust inspecting of row, each group of exhaust button include height (H) based on exhaust velocity, in (M), the exhaust of low (L) third gear press Button.
As shown in Figure 1, first group of exhaust button includes T-I-H, T-I-M and T-I-L, for controlling first group of spring Exhaust;Second group of exhaust button includes T-I I-H, T-I I-M and T-II-L, the exhaust for controlling second group of spring;The Three groups of exhaust buttons include T-III-H, T-III-M and T-II I-L, the exhaust for controlling third group spring.
Instrument board is used for showing various parameters such as flow velocity, flow etc..
In one embodiment of the invention, the high, normal, basic third gear exhaust button of three groups of air sources (totally 9).It can be achieved to being The auxiliary of system controls, including is exhausted control respectively to three groups of air sources, exhaust button point height (H), in (M), low (L) third gear, Three groups of air springs are accurately controlled, different duty requirements are met.
More specifically, exhaust button can be divided into high, medium and low third gear according to exhaust velocity, referring for example to the prior art The exhaust velocities of various operating modes high, medium and low third gear exhaust velocity is set.High-grade exhaust velocity could be provided as higher than existing The exhaust velocity of technology, middle gear gas velocity degree are equal to the exhaust velocity of the prior art, and low gear gas velocity degree is less than the prior art Exhaust velocity.
Three groups of air source independent exhaustions of switch board diagnostic region are arranged, and exhaust multiple-rank control, be conducive to system into Row fault diagnosis.By being vented the setting of air pressure, every group of spring parameter under different air pressures is tested and compared, to right Problem is excluded and is diagnosed, simple to operation.Such as exhaust velocity under existing various working and capacity can be recorded Data carry out analysis and arrangement to data, establish relevant database, summarize air spring rigidity and damping about air pressure change Diagnosis process is instructed in the regularity of distribution, quantization.
The present invention has the advantage that:
(1) control air floating platform working condition starts or closes, whole fast aeration, Quick air-discharge.The invention is using whole The quick charge, exhaust pattern of body carries out charge, exhaust work by three groups of gas tubes and three groups of exhaust pipes to air-flotation type vibration-isolating platform respectively Industry.After setting nominal pressure value, press always open button (ON) start inflate or be vented, when vibration-isolating platform reaches nominal pressure After press total switch (OFF) that closes and stop inflation.Whole control mode is simple and convenient to operate.
(2) it can be needed to set inflation nominal pressure value according to feature.The switch board is integrated with voltage stabilizing adjusting apparatus, can be by After the atmospheric pressure value adjusting voltage stabilizing regulation button to nominal pressure of air-flotation type vibration-isolating platform design motivation feature request, presses and always open Button is inflated or is vented, until design atmospheric pressure value.
(3) exhaust can individually be controlled to grouping air source.The switch board air supporting switch board directorial area has three groups of gas exhaust inspectings Button, this group of button are connected by three groups of independent exhaust pipes air spring corresponding with air floating platform, and button adjusting is pressed by this Section air spring atmospheric pressure value can individually control exhaust to grouping air source.
(4) the high, medium and low third gear of grouping capacity point is conducive to assist trouble diagnosis.The switch board independent exhaustion button point For high, medium and low third gear, contribute to multi-state, the comparison of multiple target experimental test, air spring rigidity and damping are found convenient for accurate About the regularity of distribution of air pressure change, diagnosis process is instructed in quantization.
In the description of this specification, reference term " one embodiment ", " embodiment, " is specifically shown " example " The description of example " etc. means that specific features described in conjunction with this embodiment or example, structure, material live feature and be contained in the present invention At least one embodiment or example in.In the present specification, schematic expression of the above terms are not necessarily referring to identical Embodiment or example.Moreover, particular features, structures, materials, or characteristics described can be real in any one or more It applies and can be combined in any suitable manner in example or example.
The above description is merely a specific embodiment, but scope of protection of the present invention is not limited thereto, any Those familiar with the art in the technical scope disclosed by the present invention, can easily think of the change or the replacement, and should all contain Lid is within protection scope of the present invention.Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (3)

1. a kind of passive air-flotation type vibration-isolating platform integrated control cabinet of large-scale high-precision, including:
Switch region and diagnostic region;
The wherein described switch region includes always opening button (ON), always pass button (OFF), pressure regulation button and instrument board, it is described always open by Button (ON) is used to carry out integral inflating to three groups of springs of air floating platform;Total pass button (OFF) is used for three groups of air floating platform Spring stops integral inflating, and the pressure regulation button is used to that three groups of spring atmospheric pressure values to be carried out set overall and be adjusted;
The diagnostic region includes three groups of exhaust buttons and instrument board, and described three groups of exhaust buttons pair, three groups of air sources carry out solely respectively Vertical gas exhaust inspecting, each group of exhaust button include height (H) based on exhaust velocity, in (M), low (L) third gear exhaust button.
2. a kind of air-flotation type vibration-isolating platform control system, including switch board according to claim 1, air floating platform, gas supply System and filtration system,
The wherein described air floating platform include three groups of springs, first group of spring by gas tube I and always open button (ON) and always pass press Button (OFF) is connected, second group of spring by gas tube II with always open button (ON) and total button (OFF) that closes is connected, third Group spring by gas tube III and always open button (ON) and always pass button (OFF) be connected;
The air supply system is connected via filtration system with the switch board, and by always opening button (ON) and total pass button (OFF) come to supply to air floating platform;
Three groups of exhaust buttons by exhaust pipe I, exhaust pipe II and exhaust pipe III respectively with gas tube I, gas tube II with And gas tube III is connected, come control the air floating platform three groups of springs exhaust.
3. air-flotation type vibration-isolating platform control system according to claim 2 further includes being arranged in gas tube I, gas tube II And the switch valve on gas tube III.
CN201810026349.0A 2018-01-11 2018-01-11 Large-scale high-precision passive air-floating vibration isolation platform integrated control cabinet Active CN108278325B (en)

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CN201810026349.0A CN108278325B (en) 2018-01-11 2018-01-11 Large-scale high-precision passive air-floating vibration isolation platform integrated control cabinet

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109406119A (en) * 2018-10-23 2019-03-01 广东邦达实业有限公司 Compressor air spring vibration isolation foot pad kinetic characteristics matching test bench

Citations (5)

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Publication number Priority date Publication date Assignee Title
WO1980000055A1 (en) * 1978-06-19 1980-01-24 Asahitrans Co Ltd Automatic digital blood pressure measurement system
JP2005061588A (en) * 2003-08-20 2005-03-10 Kurashiki Kako Co Ltd Active vibration control device for vibration isolating table and its control gain setting method
CN106763464A (en) * 2017-03-02 2017-05-31 江苏大学 A kind of active air vibration isolation unit for micro-vibration technology
CN206545668U (en) * 2016-09-14 2017-10-10 中国电子工程设计院 A kind of air spring vibration isolation platform control system
CN108036019A (en) * 2017-11-27 2018-05-15 中国电子工程设计院 The height levelling control system and method for a kind of air spring vibration isolation platform

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1980000055A1 (en) * 1978-06-19 1980-01-24 Asahitrans Co Ltd Automatic digital blood pressure measurement system
JP2005061588A (en) * 2003-08-20 2005-03-10 Kurashiki Kako Co Ltd Active vibration control device for vibration isolating table and its control gain setting method
CN206545668U (en) * 2016-09-14 2017-10-10 中国电子工程设计院 A kind of air spring vibration isolation platform control system
CN106763464A (en) * 2017-03-02 2017-05-31 江苏大学 A kind of active air vibration isolation unit for micro-vibration technology
CN108036019A (en) * 2017-11-27 2018-05-15 中国电子工程设计院 The height levelling control system and method for a kind of air spring vibration isolation platform

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109406119A (en) * 2018-10-23 2019-03-01 广东邦达实业有限公司 Compressor air spring vibration isolation foot pad kinetic characteristics matching test bench

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