CN108268159A - Stretchable sensing element and its method for sensing - Google Patents

Stretchable sensing element and its method for sensing Download PDF

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Publication number
CN108268159A
CN108268159A CN201611264248.4A CN201611264248A CN108268159A CN 108268159 A CN108268159 A CN 108268159A CN 201611264248 A CN201611264248 A CN 201611264248A CN 108268159 A CN108268159 A CN 108268159A
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China
Prior art keywords
sensing
sensing element
stretchable
substrate
electrode
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Chinese (zh)
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王圣博
张志嘉
王朝仁
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Industrial Technology Research Institute ITRI
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Industrial Technology Research Institute ITRI
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Priority to CN201611264248.4A priority Critical patent/CN108268159A/en
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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0414—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using force sensing means to determine a position

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

The present invention discloses a kind of stretchable sensing element and its method for sensing.The stretchable sensing element includes at least one first unit structure, at least one second unit structure and a retractable material layer.First unit structure includes first substrate and the first sensing element layer, and wherein first substrate has multiple first slits and the multiple first cabling areas marked off by the first slit.First sensing element floor includes a plurality of be mutually electrically insulated and the first sensing electrode in the first cabling area.Second unit structure is located in first unit structure, and the second sensing element layer including second substrate and on second substrate.Retractable material layer makes at least two the first sensing electrodes for being located at adjacent first cabling area be separated by a variable spacing between first unit structure and second unit structure.A kind of method for sensing of stretchable sensing element is also suggested.

Description

Stretchable sensing element and its method for sensing
Technical field
The present invention relates to a kind of sensing element, and more particularly to a kind of stretchable sensing element.
Background technology
With the high development of electronic technology, electronic product continues to introduce new.Electronic product is in order to can be applied to difference Field, deflection, frivolous and characteristic unrestricted external form are gradually taken seriously.That is, electronic product is gradually required Need have different external forms according to different application mode and application environment.It, for the electronic product of three-dimensional contouring It is very difficult that circuit is made on curved surface.In addition, the design of three-dimensional contouring may not be rule circular or positive round Spherical moulding, the bending degree or radian on surface must change according to design requirement.
Invention content
The purpose of the present invention is to provide a kind of stretchable sensing elements, can stretch and be launched into according to need non-planar junction Structure.
In order to achieve the above object, the stretchable sensing element of one embodiment of the invention, including at least one first unit structure, At least one second unit structure and a retractable material layer.First unit structure includes first substrate and the first sensing element Layer, wherein first substrate have multiple first slits and the multiple first cabling areas marked off by the first slit.First sensing Part floor includes a plurality of be mutually electrically insulated and the first sensing electrode in the first cabling area.Second unit structure is located at first On cellular construction, and the second sensing element layer including second substrate and on second substrate.Retractable material layer is located at the Between one cellular construction and second unit structure, at least two the first sensing electrodes for being located at adjacent first cabling area is made to be separated by one Variable spacing.
In the stretchable sensing element of one embodiment of the invention, retractable material floor is distributed in the first adjacent cabling area Between, change the spacing between the first distributed areas, stretchable sensing element can have what is stretched with use demand Effect, and then increase the application of stretchable sensing element.In the sensing side of the stretchable sensing element of one embodiment of the invention In method, the retractable material floor in the first cabling area of connection is formd, the deformed state of stretchable sensing element can be sensed.
For the present invention can be clearer and more comprehensible, special embodiment below, and attached drawing appended by cooperation is described in detail below.
Description of the drawings
Figure 1A is the upper schematic diagram of the stretchable sensing element according to one embodiment of the invention；
Figure 1B is the diagrammatic cross-section along Figure 1A Vertical Centre Lines A-A '；
Fig. 1 C be according to one embodiment of the invention stretchable sensing element by external force when there is corresponding deformation shape The diagrammatic cross-section of state；
Fig. 1 D are the diagrammatic cross-sections of the stretchable sensing element of two-layer equation according to first embodiment of the invention；
Fig. 2 is the diagrammatic cross-section of the stretchable sensing element of two-layer equation according to second embodiment of the invention；
Fig. 3 is the diagrammatic cross-section of the stretchable sensing element of two-layer equation according to third embodiment of the invention；
Fig. 4 is the diagrammatic cross-section of the stretchable sensing element of two-layer equation according to fourth embodiment of the invention；
Fig. 5 is the diagrammatic cross-section of the stretchable sensing element of two-layer equation according to fifth embodiment of the invention；
Fig. 6 is the diagrammatic cross-section of the stretchable sensing element of two-layer equation according to sixth embodiment of the invention；
Fig. 7 is the diagrammatic cross-section of the stretchable sensing element of two-layer equation according to seventh embodiment of the invention；
Fig. 8 is the diagrammatic cross-section of the stretchable sensing element of two-layer equation according to eighth embodiment of the invention；
Fig. 9 is the diagrammatic cross-section of the stretchable sensing element of two-layer equation according to ninth embodiment of the invention；
Figure 10 is the diagrammatic cross-section of the stretchable sensing element of two-layer equation according to tenth embodiment of the invention；
Figure 11 is the diagrammatic cross-section of the stretchable sensing element of two-layer equation according to eleventh embodiment of the invention；
Figure 12 is the diagrammatic cross-section of the stretchable sensing element of two-layer equation according to twelveth embodiment of the invention；
Figure 13 is the diagrammatic cross-section of the stretchable sensing element of two-layer equation according to thriteenth embodiment of the invention；
Figure 14 A are the upper schematic diagrams of the stretchable sensing element of two-layer equation according to fourteenth embodiment of the invention；
Figure 14 B are the diagrammatic cross-sections along Figure 14 A Vertical Centre Lines B-B '；
Figure 15 be according to one embodiment of the invention stretchable sensing element by Y-direction extruding external force when have pair The upper schematic diagram for the deformed state answered；
Figure 16 be according to one embodiment of the invention stretchable sensing element by X-direction extruding external force when have pair The upper schematic diagram for the deformed state answered.
Symbol description
10、10'、100、200、300、400、500、600、700、800、900、100、110、1200、1300、1400、 1500、1600：Stretchable sensing element
110、210、310、410、510、610、710、1010、1110、1210、1410：First unit structure
120、220、320、420、520、620、720、1020、1120、1220、1420：First substrate
122、122A、122'A、122B、122'B、222、422、522、622：First slit
124、224：First cabling area
130、230、330、430、530、630、730、1030、1130、1230、1430：First sensing element layer
132、332、432、532、632、732、1032、1132、1232、1332、1332、132N、232N、332N、432N、 532N、632N、1032N、1132N、1232N、1432N1、1432N2、132E、232E、332E、432E、532E、632E、 1032E、1432E、132S、132W、232W、332W、432W、532W、632W、1032W、1432W：First sensing electrode
140、240、340、440、540、640、740、1040、1140、1240、1440：Second unit structure
150、350、450、550、650、750、1050、1150、1250、1450：Second substrate
152、152A、152B、252、652：Second slit
154、254、1454：Second cabling area
160、260、360、460、560、660、760、1060、1160、1260、1460：Second sensing element layer
162、262、362、462、562、662、762、1062、1162、1262、1462、162N、262N、362N、462N、 562N、662N、1062N、1462N1、1462N2、162E、262E、362E、462E、562E、662E、1062E、1462E、162W、 262W、362W、462W、562W、662W、1062W、1462W：Second sensing electrode
170、270、370、470、570、670、770、870、970、1070、1170、1270、1470：Retractable material layer
680a、780a、980a、1080a、1180a、1280a、1380a：First insulating layer
1380b：Second insulating layer
C：Controller
O1：First unit center
S1、S1’：First level spacing
S2、S2’：Second level interval
S3：Third level interval
DW：First vertical interval
DE：Second vertical interval
DN：Third vertical interval
DF：Touch vertical interval
1501、1502、1601、1602：Electrode spacing
F：Finger
X、Y、Z：Direction
Specific embodiment
Figure 1A is the upper schematic diagram of the stretchable sensing element according to one embodiment of the invention, wherein Figure 1A clippeds Film layer.Figure 1B is along the diagrammatic cross-section of Figure 1A Vertical Centre Lines A-A ', wherein in figure 1A, Z-direction is perpendicular to X-direction and Y side To, and project the direction that face is painted in Figure 1A.Please also refer to Figure 1A and Figure 1B, the stretchable sensing element 10 of the present embodiment includes At least one 110 and one retractable material layer 170 of first unit structure.First unit structure 110 include first substrate 120 with First sensing element layer 130.First substrate 120 has multiple first slits 122 and is marked off by multiple first slits 122 Multiple first cabling areas 124.First sensing element layer 130 includes a plurality of the first sensing electrode 132 being mutually electrically insulated, In the first sensing electrode 132 be located in the first cabling area 124.Retractable material layer 170 is at least set in the first slit 122, Two the first sensing electrodes 132 for being located at adjacent first cabling area 124 is made to be separated by a variable spacing.In figure 1A, only illustrate A first unit structure 110 is shown to property, however, the present invention is not limited thereto.In other embodiments, stretchable sensing element 10 may include multiple first unit structures 110, and multiple first unit structures 110 can be arranged and formed in a manner of array-like Sense array (sensor array).
Specifically, in the present embodiment, the first slit 122 of first substrate 120 for example, arc, and the first slit 122 along a first unit center O1 from inside to outside sequential circular path be distributed, however, the present invention is not limited thereto.At other In embodiment, the first slit 122 can have the external form of straight line, broken line or curve, so that the first of stretchable sensing element 10 Substrate 120 deforms to be stretched, compress or be bent by corresponding first slit 122.
In the present embodiment, first substrate 120 is, for example, flexible base plate.Therefore, first substrate 120 have can destroy or force to yield or The property of bending, material is for example including polyimide (polyimide, PI), makrolon (polycarbonate, PC), poly- Amide (polyamide, PA), polyethylene terephthalate (polyethylene terephthalate, PET), poly- naphthalene two Formic acid glycol ester (polyethylene naphthalate, PEN), polyethyleneimine (polyethylenimine, PEI), Polyurethane (polyurethane, PU), dimethyl silicone polymer (polydimethylsiloxane, PDMS), acryl system (acrylate) polymer is, for example, polymethyl methacrylate (polymethylmethacrylate, PMMA) etc., ether system (ether) polymer is, for example, polyether sulfone (polyethersulfone, PES) or polyether-ether-ketone (polyetheretherketone, PEEK) etc., polyene (polyolefin) or other flexible materials, but it is of the invention and unlimited In this.Positioned at first substrate 120 the first slit 122 be, for example, with etch, cut or computer numerical control (Computer Numerical Control, CNC) mode of punching press is formed on first substrate 120, but the present invention is not limited thereto.
In the present embodiment, retractable material floor 170 can be formed in the two neighboring first cabling area of first substrate 120 In the first slit 122 between 124.Thus, the first slit 122 of first substrate 120 can not basket it is empty, and retractable material The scalable property that floor 170 has allows between the level of two the first sensing electrodes 132 for being located at adjacent first cabling area 124 Away from being variable.Retractable material layer 170 has extending or compression property, and material is for example including polyimide (Polyimide, PI), saturation or unsaturated rubber, silica gel or other elastic materials.Specifically, retractable material layer 170 can To be accordingly extended or compress when stretchable sensing element 10 is by external force, corresponded to so that stretchable sensing element 10 has Deformed state.In addition, stress when retractable material layer 170 can be assisted extension or compression disperses and makes first substrate 120 Or structure thereon is hardly damaged.After above-mentioned external force disappears, it can be returned to stretchable sensing element 10 and be not affected by Original state during external force.In the present embodiment, the forming method of retractable material layer 170 be, for example, rubbing method, it is bonding method, molten Sol-gel (Sol-Gel method) or pressing method.For example, retractable material is formed in the first slit 122 or first After on cellular construction 110, photopolymerization (photopolymerization) or baking can be carried out according to the property of retractable material (baking) manufacture craft makes retractable material be solidified to form retractable material layer 170.In the present embodiment, first substrate The ratio of 120 young's modulus (Young's modulus) and the young's modulus of retractable material layer 170 is greater than or equal to 10. In one embodiment, the young's modulus of first substrate 120 and the ratio of the young's modulus of retractable material layer 170 are greater than or equal to 50.Alternatively, in one embodiment, the ratio of the young's modulus and the young's modulus of retractable material layer 170 of first substrate 120 is big In or equal to 100.That is, for compared to first substrate 120, the plastically deformable after 170 stress of retractable material layer Degree is larger.
In the present embodiment, the first sensing electrode 132 is distributed in the first cabling area 124 of first substrate 120, such as can wriggle At least part of first slit 122 is conformed to Yan to be laid out.In figure 1A, four the first sensing electrodes are only symbolically shown 132E, 132W, 132S, 132N, and four first sensing electrodes 132E, 132W, 132S, 132N are electrically independent each other.But, exist In other embodiments, on first substrate 120 quantity of the first set sensing electrode 132 can with different design requirements and Adjustment.In the present embodiment, two the first sensing electrodes 132N, 132S in Y-direction can be mutually symmetrical, and positioned at X Two the first sensing electrodes 132E, 132W on direction can be mutually symmetrical, and but not limited to this.
Figure 1A to Fig. 1 C is please referred to, Fig. 1 C are the stretchable sensing elements according to one embodiment of the invention by external force when institute Diagrammatic cross-section with corresponding deformed state.Specifically, the stretchable sensing element 10 ' of Fig. 1 C is the stretchable of Figure 1B Sensing element 10 is when being acted on by external force and with the state of corresponding deformation.In the stretchable sensing element 10 of Figure 1A and Figure 1B In, the first slit 122 between the first sensing electrode 132W and the first sensing electrode 132N is for example labeled as 122A herein, and first The first slit 122 between sensing electrode 132E and the first sensing electrode 132N is for example labeled as 122B.In fig. 1 c, due to can It stretches sensing element 10 ' to be acted on by above-mentioned external force, the retractable material layer 170 ' in the first slit 122 ' A and 122 ' B can To be accordingly extended or shrink, so that stretchable sensing element 10 ' has corresponding deformed state.
Specifically, in the stretchable sensing element 10 of Figure 1A and Figure 1B, the sensings of the first sensing electrode 132W and first Between electrode 132N there is first level interval S 1, and have the between the first sensing electrode 132E and the first sensing electrode 132N Two level interval S2.In the stretchable sensing element 10 ' of Fig. 1 C, the first sensing electrode 132W and the first sensing electrode 132N it Between have first level interval S 1 ', and between the first sensing electrode 132E and the first sensing electrode 132N have the second level between Away from S2 '.In the present embodiment, the first variation delta S1 of first level interval S 1 to first level interval S 1 ' can cause first Electrical signals variation between sensing electrode 132W and the first sensing electrode 132N, and similar, the second level interval S2 to the The second variation delta S2 of two level interval S2 ' can cause the electricity between the first sensing electrode 132E and the first sensing electrode 132N Property signal intensity.Stretchable sensing can be determined that by the signal intensity for measuring first sensing electrode 132E, 132W, 132S, 132N Element 10 becomes the deformed state of stretchable sensing element 10 '.
For example, the change amount signal between the first sensing electrode 132W and the first sensing electrode 132N judges The change amount signal that first variation delta S1 is more than between the first sensing electrode 132E and the first sensing electrode 132N judges The second variation delta S2, then it is larger to can determine that region between the first sensing electrode 132W and the first sensing electrode 132N has Deformation, and the region between the first sensing electrode 132E and the first sensing electrode 132N have smaller deformation.With capacitance It, ought first since the capacitance between two electric conductors is reduced as distance to each other increases for electrical signals Variation delta S1 is timing, then can be determined as the first sensing electrode 132W and the by the controller C of stretchable sensing element 10 The increased tensile deformation of distance between one sensing electrode 132N；When the first variation delta S1 is negative, then it can pass through stretchable sense The controller C of survey element 10 is determined as the compressed shape of the distance reduction of the first sensing electrode 132W and the first sensing electrode 132N Become.Thus, it can be obtained by entire stretchable sensing after the variable quantity measured is integrated with corresponding location information The deformed state of element 10.
In addition, the first variation delta S1 can be generated with the second variation delta S2 under a variety of occupation modes.For example, Stretchable sensing element 10 can be as the element of touch-control sensing.At this point, the touching push action of user can be touched The first slit 122 touched at position generates deformation, but first slit 122 in touched region may not have deformation. Stretchable sensing element 10 can have the corresponding position of changed first sensing electrode 132 to judge by the first signal value Position of touch.In another embodiment, stretchable sensing element 10 can conformably cover the surface of scheduled stereo article. At this point, the first slit of part 122 or even all first slits 122 on stretchable sensing element 10, are likely to generate change Shape.Therefore, stretchable sensing element 10 can be sentenced by the variable quantity of the first signal value measured by the first sensing electrode 132 Disconnected stretchable sensing element 10 is in the deformed state of respective regions.
In order to realize sensing function, stretchable sensing element 10 can be communicatively coupled to sensing circuit, to carry out mutual tolerance (mutual capacitance) sensing modes, from hold (self capacitance) sensing modes, resistance sensing pattern or At least one of above-mentioned sensing modes.Under mutual tolerance sensing modes, sensing circuit may include scanner driver and sensing driver. Scanner driver can scan the driving electrodes of the first sensing element layer 130, and by sensing driver to the first sensing element layer In 130, corresponding sensing electrode carries out the reading of sensing signal, to obtain corresponding first signal value.For example, scanning is driven Dynamic device can scan one of them of adjacent two first sensing electrode 132, and by sensing driver to another the first sensing electricity The reading that pole 132 carries out sensing signal is sensed with to perform inductance capacitance and obtains one first signal value.And it is possible to repeat Above-mentioned mutual tolerance senses, by the variable quantity of the first signal value repeatedly measured, to judge to correspond to stretchable sensing element 10 Deformed state.
In another embodiment, the first sensing electrode 132 respectively may be electrically connected to corresponding scanner driver (not being painted) And sensing driver (not being painted) from appearance sensing modes and measures corresponding first signal value with progress.And it is possible to repeat into Row is above-mentioned to be sensed, by the variable quantity of the first signal value repeatedly measured, to judge to correspond to stretchable sensing element from appearance 10 deformed state.
In other feasible embodiments, sensing circuit may include resistance sensing device (not being painted), and the first sensing electrode 132 can be respectively connected to corresponding resistance sensing device.Due to, when stretchable sensing element 10 is by external force, the first sensing electricity Pole 132 can receive stretching or contraction and have corresponding resistance variations.When stretchable sensing element 10 is in resistance sensing pattern Under, by resistance sensing device resistance sensing can be carried out to multiple first sensing electrodes 132 respectively, to obtain corresponding one first signal Value.And it is possible to repeat above-mentioned resistance sensing by the variable quantity of the first signal value repeatedly measured, to judge pair It should be in the deformed state of stretchable sensing element 10.
In addition, when stretchable sensing element 10 includes multiple first unit structures 110, and these first unit structures 110 When array arrangement is presented, each first unit structure 110 can be independent sensing unit to be used for being sensed in its set set Put the deformed state at place.At this point, the one at least within of the sensing modes of foregoing description can be used in each first unit structure 110 To be sensed.
Diagrammatic cross-sections of Fig. 1 D according to the stretchable sensing element of two-layer equation of first embodiment of the invention.Stretchable sensing Element 100 includes at least one first unit structure 110,140 and one retractable material layer of at least one second unit structure 170.First unit structure 110 substantially can refer to the first unit structure 110 of aforementioned scalable sensing element 10.Second unit Structure 140 includes 150 and second sensing element layer 160 of second substrate, wherein the second sensing element layer 160 is located at second substrate On 150.Retractable material layer 170 is between first unit structure 110 and second unit structure 140, and the first sensing electrode 132 between retractable material layer 170 and first substrate 120.In the present embodiment, the second base of second unit structure 140 Plate 150 has multiple second slits 152 and the multiple second cabling areas 154 marked off by multiple second slits 152.Second Sensing element layer 160 includes a plurality of the second sensing electrode 162 being mutually electrically insulated, wherein the second sensing electrode 162 is located at the In two cabling areas 154, and second substrate 150 is between the second sensing electrode 162 and retractable material layer 170.
In the present embodiment, the second substrate 150 of second unit structure 140 and the first substrate of first unit structure 110 120 can be overlapping (for example, the first cabling area 124 of first substrate 120 can be overlapped in the in the orthographic projection on second substrate 150 Second cabling area 154 of two substrates 150 is in the orthographic projection on second substrate 150), the second sensing of second unit structure 140 First sensing element layer 130 of part layer 160 and first unit structure 110 can be Chong Die (that is, the first sensing element layer 130 is in the Orthographic projection on two substrates 150 can be overlapped in the second sensing element layer 160 in the orthographic projection on second substrate 150), and second is narrow The 152, second cabling area 154 of seam and the second sensing electrode 162 correspond respectively to the first slit 122, the first cabling area 124 and first Sensing electrode 132 is set.That is, in the stretchable sensing element 100 of the present embodiment, the structure of second unit structure 140 Design can be substantially the same in first unit structure 110, and two cellular constructions may be used mode aligned with each other and be set to The opposite sides of retractable material layer 170, however, the present invention is not limited thereto.Second sensing electrode 162 is distributed in second substrate 150 Second cabling area 154, such as at least part of second slit 152 can be conformed to sinuously and be laid out, and the first sensing electrode 132 with Second sensing electrode 162 can be overlapping (that is, the first sensing electrode 132 can be overlapped in the second sense in the orthographic projection of second substrate 150 Electrode 162 is surveyed in the orthographic projection on second substrate 150).
By the second structural unit 140 in this present embodiment have similar to first structure unit 110 structure design, first The sensing modes of structural unit 110 can also be applied in the second structural unit 140.Also that is, the present embodiment can utilize second The second signal value that these second sensing electrodes 162 measure in sensing element layer 160 judges the second structural unit 140 The deformed state of (or second slit 152).
In Fig. 1 D, three second sensing electrodes 162E, 162W, 162N, and three second senses are only symbolically shown Electrode 162E, 162W, 162N is surveyed to be electrically insulated from.Have the between first sensing electrode 132W and the second sensing electrode 162W One vertical interval DW has the second vertical interval DE, and first between the first sensing electrode 132E and the second sensing electrode 162E There is third vertical interval DN between sensing electrode 132N and the second sensing electrode 162N.The present embodiment can be adjacent by performing The first sensing electrode 132 and the second sensing electrode 162 between inductance capacitance sensing, obtain corresponding third signal value, with Judge the deformed state of stretchable sensing element 100 in z-direction.
Specifically, in the stretchable sensing element 100 of Fig. 1 D, the first vertical interval DW, the second vertical interval DE with Third vertical interval DN respectively make corresponding first sensing electrode 132E, 132W, 132N and second sensing electrode 162E, 162W, Third signal value is generated between 162N, and third signal value may correspond to the deformed state of stretchable sensing element 100 in z-direction And change.Stretchable sensing element 100 may be used as the method described in Fig. 1 C with first sensing electrode 132E, 132W, It the first signal measured by 132N or uses if the method described in Fig. 1 C is with second sensing electrode 162E, 162W, 162N institute The second signal measured judges deformation situation of the stretchable sensing element 100 in the plane perpendicular to Z-direction.It in addition, can Stretch sensing element 100 more may be used first sensing electrode 132E, 132W, 132N measure with the second sensing electrode 162E, Third signal measured by 162W, 162N judges the deformation situation of stretchable sensing element 100 in z-direction.Generally, The present embodiment may determine that whole deformed state of the stretchable sensing element 100 in solid space.
For example, the change amount signal between the first sensing electrode 132N and the second sensing electrode 162N judges The change amount signal that third vertical change amount Δ DN is more than between the first sensing electrode 132W and the second sensing electrode 162W judges The first vertical change amount Δ DW out, then can determine that the region between the first sensing electrode 132N and the second sensing electrode 162N With larger deformation, and the region between the first sensing electrode 132W and the second sensing electrode 162W has smaller deformation. Or third vertical change amount Δ DN is more than the change amount signal between the first sensing electrode 132E and the second sensing electrode 162E The the second vertical change amount Δ DE judged, then can determine that between the first sensing electrode 132N and the second sensing electrode 162N Region has larger deformation, and the region between the first sensing electrode 132E and the second sensing electrode 162E has smaller shape Become.It can be obtained by entire stretchable sensing element 100 after the variable quantity measured is integrated with corresponding location information Deformed state.
In addition, the first vertical change amount Δ DW, the second vertical change amount Δ DE and third vertical change amount Δ DN can be It is generated under a variety of occupation modes.For example, stretchable sensing element 100 can be as the element of touch-control sensing.At this point, make The touching push action of user can cause the retractable material layer 170 at touched position to generate deformation, Bu Guowei in z-direction The retractable material layer 170 in touched region may not have deformation.Stretchable sensing element 100 can pass through third signal Value has the corresponding position of changed first sensing electrode, 132 or second sensing electrode 162 to judge position of touch.Another In embodiment, stretchable sensing element 100 can conformably cover the surface of scheduled stereo article.At this point, stretchable sense 122 or second slit 152 of part the first slit 122 or the second slit 152 or even all first slits on element 100 is surveyed, all It is possible that it is deformed.Therefore, stretchable sensing element 100 can pass through the first signal measured by the first sensing electrode 132 The variable quantity of value by the variable quantity of the second signal value measured by the second sensing electrode 162 or passes through the first sensing electrode 132 and second the variable quantity of third signal value measured between sensing electrode 162 judge stretchable sensing element 100 a The deformed state in other region.
To stretchable sensing element be illustrated with different embodiments below.It should be noted that following embodiments can adopt The element numbers and partial content of previous embodiment, wherein identical or approximate element can be represented using identical label, and The explanation of portion of techniques content is omitted.Explanation about clipped can refer to previous embodiment, and following embodiments are no longer It repeats.
Fig. 2 is the diagrammatic cross-section of the stretchable sensing element of two-layer equation according to second embodiment of the invention.Second implements The stretchable sensing element 200 of two-layer equation of example is similar with the stretchable sensing element 100 of Fig. 1 D.In fig. 2, it is same or similar in The label of Figure 1A~Fig. 1 D represents the same or similar component, therefore can refer to for the component illustrated in Figure 1A~Fig. 1 D aforementioned Illustrate and in this by brief description.In the present embodiment, stretchable sensing element 200 includes first structure unit 210, second Structural unit 240 and retractable material layer 270, wherein retractable material layer 270 are located at 210 and second structure of first structure unit Between unit 240, and the second structural unit 240 is set to the side for being closer to user.First structure unit 210 includes having The first substrate 220 of first slit 222 and the first sensing element floor being set in the first cabling area 224 of first substrate 220 230, and the second structural unit 240 includes the second substrate 250 with the second slit 252 and is set to the of second substrate 250 The second sensing element floor 260 in two cabling areas 254.In addition, the first sensing element layer 230 includes the first sensing electrode 232 (232W, 232N, 232E), and the second sensing element layer 260 includes the second sensing electrode 262 (262W and 262E).
In the present embodiment, the design of first structure unit 210 can be similar to the first structure list described in previous embodiment Member 110.Second substrate 250 is be overlapped with the first substrate 220 of part, the second sensing element layer 260 and the first sensing of part Part layer 230 is overlapped, but the size of the second slit 252 is different from the first slit 222.It is here, big with the size of the second slit 252 Illustrate for the size of the first slit 222.
In the present embodiment, since 252 size of the second slit is larger, user can be drawn with finger F or other modes touching When stretching sensing element 200, the touched region of stretchable sensing element 200 is likely located at the senses of the second sensing electrode 262E and second It surveys in the second slit 252 between electrode 262W, also that is, above the first sensing electrode 232N.At this point, the first sensing electrode There is touching vertical interval DF between the surface (i.e. the contact surface of finger F) that 232N and stretchable sensing element 200 are touched.The One sensing electrode 232N can be carried out from holding sensing modes and measuring corresponding first signal value, to judge to correspond to finger F Touch action.And it is possible to repeat the above-mentioned sensing modes that hold certainly with by the change of the first signal value repeatedly measured Change amount judges that the touch action corresponding to finger F causes the deformed state of stretchable sensing element 200.For example, it uses It is larger that the touching pressing strength of person can so that the retractable material layer 270 at touched position generates in z-direction when larger Deformation, touching vertical interval DF are smaller.Relatively, can cause at touched position when the touching pressing strength of user is smaller Retractable material layer 270 generates smaller deformation in z-direction, and touching vertical interval DF is larger.First signal value is above-mentioned two Different variable quantities will be generated under kind situation, therefore can touching pressing strength be judged by the variable quantity of the first signal value Size.
In addition, retractable material layer 270 is acted on deformable, the second sensing electrode 262E and the second sensing electrode by external force The width of the second slit 252 between 262W may also change because of the touch action of finger F.Therefore, stretchable sensing Part 200 can also be measured pair using mutual tolerance sensing modes are carried out between the second sensing electrode 262E and the second sensing electrode 262W The touch action changed to judge finger F for the second signal value answered.
Fig. 3 is the diagrammatic cross-section of the stretchable sensing element of two-layer equation according to third embodiment of the invention.Third is implemented The stretchable sensing element 300 of two-layer equation of example is similar with the stretchable sensing element 200 of Fig. 2.In figure 3, same or similar Fig. 2 Or the label of Figure 1A~Fig. 1 D represents the same or similar component, therefore for the already explained component of previous embodiment in this It is not described in detail.In the present embodiment, stretchable sensing element 300 includes first structure unit 310, the second structural unit 340 are located at 310 and second structural unit 340 of first structure unit with retractable material layer 370, wherein retractable material layer 370 Between, and first structure unit 310 is set to the side for being closer to user.First structure unit 310 includes having the first base Plate 320 and the first sensing element layer 330 being set on first substrate 320, and the second structural unit 340 includes second substrate 350 the second sensing element layer 360 with being set on second substrate 350.In addition, the first sensing element layer 330 includes first Sensing electrode 332 (332W, 332N, 332E), and the second sensing element layer 360 include the second sensing electrode 362 (362W with 362E)。
In the present embodiment, the design of first structure unit 310 can be similar to the first structure list described in previous embodiment Member 110.Second substrate 350 is be overlapped with the first substrate 320 of part, the second sensing element layer 360 and the first sensing of part Part layer 330 is overlapped, but the slit on second substrate 350 is different from first substrate 320.In addition, first substrate 320 is located at first Between 330 and second sensing element layer 360 of sensing element layer, the second sensing element layer 360 is located at 320 and second base of first substrate Between plate 350.
When user touches stretchable sensing element 300 with finger F or other modes, stretchable sensing element 300 is touched The region touched is likely located above the first sensing electrode 332N.At this point, have between the first sensing electrode 332N and finger F surface Touch vertical interval DF.In the present embodiment, it can carry out repeatedly measuring from sensing modes are held by the first sensing electrode 332N The variable quantity of the first signal value that measures judges corresponding touching.For example, the touching push action of user can make The variation that the first sensing electrode 332N at touched position generates self-capacitance is obtained, and the first sensing electrode 332W and first is sensed Electrode 332E may change without apparent self-capacitance.From under holding sensing modes, stretchable sensing element 300 can be by the One signal value has the corresponding position of changed first sensing electrode 332N to judge position of touch.
In addition, the touch action of finger F may cause retractable material layer 370 to deform upon and cause the first sensing electrode The adjacent capacitance between the two of 332W, 332N, 332E change, and cause between the second sensing electrode 362W, 362E Capacitance changes, and causes between the first sensing electrode 332W and the second sensing electrode 332W and/or the first sensing electrode Capacitance between 332E and the second sensing electrode 332E changes.Pass through the first letter measured by the first sensing electrode 332 The variable quantity of number value, the variable quantity of the second signal value measured by the second sensing electrode 362 and the first sensing electrode 332 and the The variable quantity of third signal value between two sensing electrodes 362 judges deformation of the stretchable sensing element 300 when touched State.
Fig. 4 is the diagrammatic cross-section of the stretchable sensing element of two-layer equation according to fourth embodiment of the invention.4th implements The stretchable sensing element 400 of two-layer equation of example is similar with the stretchable sensing element 200 of Fig. 2.In Fig. 4, same or similar figure The label of 1A~Fig. 1 D and Fig. 2 represent the same or similar component, therefore are not retouched in detail in this for the component illustrated in Fig. 2 It states.In the present embodiment, stretchable sensing element 400 include first structure unit 410, the second structural unit 440 with it is scalable Material layer 470, wherein retractable material layer 470 are located between 410 and second structural unit 440 of first structure unit, and second Structural unit 440 is set to the side for being closer to user.First structure unit 410 includes first substrate 420 and is set to the The first sensing element layer 430 on one substrate 420, and the second structural unit 440 includes second substrate 450 and is set to the second base The second sensing element layer 460 on plate 450.In addition, the first sensing element layer 430 include the first sensing electrode 432 (432W, 432N, 432E), and the second sensing element layer 460 includes the second sensing electrode 462 (462W and 462E).
In the present embodiment, second substrate 450 is be overlapped with the first substrate 420 of part, the second sensing element layer 460 and portion The the first sensing element layer 430 divided is overlapped, but is corresponded at the slit of second substrate 450 and be provided with the first sensing electrode 432N Two parts, and first substrate 420 between two parts of the first sensing electrode 432N have the first slit 422.First Retractable material layer 470 is filled in slit 422, so that it is variable to be separated by one between two parts of the first sensing electrode 432N Third level interval S3.
Stretchable sensing element 400 as touch-control sensing element when, user is carried out with finger F or other objects Touching push action can cause third level interval S3 to change.At this point, the electricity between two parts of the first sensing electrode 432N Field can also change.When the electrode structure that two parts of the first sensing electrode 432N are integral with each other, the can be utilized One sensing electrode 432N carries out self-capacitance sensing modes to obtain the first sensing value corresponding to above-mentioned touch action.When the first sense When two parts for surveying electrode 432N are two electrode structures independent of each other, two of the first sensing electrode 432N can be utilized Part carries out inductance capacitance sensing modes to obtain the first sensing value corresponding to above-mentioned touch action.
In addition, the touch action of finger F may cause retractable material layer 470 to deform upon and cause the first sensing electrode The adjacent capacitance between the two of 432W, 432N, 432E changes, causes between the second sensing electrode 462W, 462E Capacitance changes, causes between the first sensing electrode 432W and the second sensing electrode 462W and/or the first sensing electrode Capacitance between 432E and the second sensing electrode 462E changes.Pass through the first letter measured by the first sensing electrode 432 The variable quantity of number value, the variable quantity of the second signal value measured by the second sensing electrode 462 and the first sensing electrode 432 and the The variable quantity of third signal value between two sensing electrodes 462 judges deformation of the stretchable sensing element 400 when touched State.
Fig. 5 is the diagrammatic cross-section of the stretchable sensing element of two-layer equation according to fifth embodiment of the invention.5th implements The stretchable sensing element 500 of two-layer equation of example is similar with the stretchable sensing element 400 of Fig. 4.In the present embodiment, stretchable sense It surveys element 500 and includes first structure unit 510, the second structural unit 540 and retractable material layer 570, wherein retractable material Layer 570 is between 510 and second structural unit 540 of first structure unit, and first structure unit 510 is set to and is closer to make The side of user.First structure unit 510 includes first substrate 520 and the first sensing element being set on first substrate 520 Layer 530, and the second structural unit 540 includes second substrate 550 and the second sensing element layer being set on second substrate 550 560.In addition, the first sensing element layer 530 includes the first sensing electrode 532 (532W, 532N, 532E), and the second sensing Part layer 560 includes the second sensing electrode 562 (562W and 562E).
First substrate 520 is between the first sensing element layer 530 and the second sensing element layer 560, the second sensing element Layer 560 is between first substrate 520 and second substrate 550.In the present embodiment, at corresponding to the slit of second substrate 520 Be provided with two parts of the first sensing electrode 532N, and first substrate 520 two parts of the first sensing electrode 532N it Between have the first slit 522.Retractable material layer 570 is filled in first slit 522, so that two of the first sensing electrode 532N It is separated by a variable third level interval S3 between part.
Fig. 6 is the diagrammatic cross-section of the stretchable sensing element of two-layer equation according to sixth embodiment of the invention.6th implements The stretchable sensing element 600 of two-layer equation of example is similar with the stretchable sensing element 100 of Fig. 1 D.In figure 6, it is same or similar in The label of Figure 1A~Fig. 1 D represents the same or similar component, therefore can refer to for the component illustrated in Figure 1A~Fig. 1 D aforementioned Illustrate and in this by brief description.In the present embodiment, stretchable sensing element 600 includes first structure unit 610, second Structural unit 640 and retractable material layer 670, wherein retractable material layer 670 are located at 610 and second structure of first structure unit Between unit 640.First structure unit 610 includes the first substrate 620 with slit and be set on first substrate 620 the One sensing element layer 630, and the second structural unit 240 includes the second substrate 650 with slit and is set to second substrate 650 On the second sensing element layer 660.In addition, the first sensing element layer 630 include the first sensing electrode 632 (632W, 632N, 632E), and the second sensing element layer 660 include the second sensing electrode 662 (662W, 662N, 662E).In the present embodiment, The design of one structural unit 610 and the second structural unit 640 can be similar to first structure unit 110 described in previous embodiment with Second structural unit 140.
In addition, the first insulating layer 680a can be had more between the first sensing electrode 632N and the second sensing electrode 662N, the The young's modulus of one insulating layer 680a can be more than Stretch material layer 670.In the present embodiment, the first sensing electrode 632N and Third vertical interval DN between two sensing electrode 662N does not have too big variation.Specifically, in stretchable sensing When part 600 is acted on by external force and has deformation, the first vertical interval DW variable quantities can be big with the second vertical interval DE variable quantities In the variable quantity of third vertical interval DN.By carrying out inductance capacitance to the first sensing electrode 632N and the second sensing electrode 662N Third signal value obtained by sensing can be used as a correction signal value.In the present embodiment, the Young system of the first insulating layer 680a The ratio of number and the young's modulus of retractable material layer 670 can be greater than or equal to 10, however, the present invention is not limited thereto.
Specifically, by the first sensing electrode 632 sensed obtained by the first signal value with by the second sensing electrode 662 Second signal value obtained by being sensed can change corresponding to stretchable sensing element 600 in the tensile deformation state of X-Y plane Become, the third signal value corresponding to third vertical interval DN can be substantially constant, and the first vertical interval DW and the second vertical interval Third signal value corresponding to DE can correspond to the stretching in z-direction of stretchable sensing element 600 or compressive deformation state and Change.The present embodiment may determine that whole deformed state of the stretchable sensing element 600 in solid space.
Fig. 7 is the diagrammatic cross-section of the stretchable sensing element of two-layer equation according to seventh embodiment of the invention.7th implements The stretchable sensing element 700 of two-layer equation of example is similar with the stretchable sensing element 600 of Fig. 6.In the figure 7, same or similar Fig. 6 Label represent the same or similar component, therefore be not described in detail for the component illustrated in Fig. 6 in this.In the present embodiment In, stretchable sensing element 700 includes first structure unit 710, the second structural unit 740 and retractable material layer 770, wherein Retractable material layer 770 is located between 710 and second structural unit 740 of first structure unit.First structure unit 710 includes tool There are the first substrate 720 of slit and a first sensing element layer 730 being set on first substrate 720, and the second structural unit 740 Including the second substrate 750 with slit and the second sensing element layer 760 being set on second substrate 750.In addition, the first sense It surveys element layer 730 and includes multiple first sensing electrodes 732, and the second sensing element layer 760 includes multiple second sensing electrodes 762.In the present embodiment, the design of 710 and second structural unit 740 of first structure unit can be similar to described in previous embodiment 110 and second structural unit 140 of first structure unit.
In addition, there is the first insulating layer between each first sensing electrode 732 and corresponding second sensing electrode 762 780a, and the young's modulus of the first insulating layer 780a be more than retractable material layer 770, therefore the first vertical interval DW, second hang down Straight space D E and third vertical interval DN does not have too big variation.Thus, when stretchable sensing element 700 by Have after external force under corresponding deformed state, the third signal value between the first sensing electrode 732 and the second sensing electrode 762 Too big variation is not had.
Fig. 8 is the diagrammatic cross-section of the stretchable sensing element of two-layer equation according to eighth embodiment of the invention.8th implements The stretchable sensing element 800 of two-layer equation of example is similar with the stretchable sensing element 600 of Fig. 6.In fig. 8, same or similar Fig. 6 Label represent the same or similar component, therefore be not described in detail for the component illustrated in Fig. 6 in this.In the present embodiment In, the thickness of retractable material layer 870 can be relatively thin, and retractable material layer 870 does not insert the second slit of second substrate 650 In 652.Thus, the second slit 652 of second substrate 650 can be with basket sky.
Fig. 9 is the diagrammatic cross-section of the stretchable sensing element of two-layer equation according to ninth embodiment of the invention.9th implements The stretchable sensing element 900 of two-layer equation of example is similar with the stretchable sensing element 800 of Fig. 8.It is worth noting that, in fig.9, The label of same or similar Fig. 8 represents the same or similar component, and the embodiment of Fig. 8 is also similar to the embodiment of Fig. 6, therefore needle The component illustrated in Fig. 8 or Fig. 6 is repeated no more in this.In the present embodiment, the thickness of retractable material layer 970 can be compared with It is thin, and retractable material layer 970 is not inserted in the first slit 622 of first substrate 620.Thus, the of first substrate 620 One slit 622 can be with basket sky.
Figure 10 is the diagrammatic cross-section of the stretchable sensing element according to tenth embodiment of the invention.Tenth embodiment can It is similar with the stretchable sensing element 600 of Fig. 6 to stretch sensing element 1000.In Fig. 10, the label of same or similar Fig. 6 represents The same or similar component, therefore be not described in detail for the component illustrated in Fig. 6 in this.In the present embodiment, it is stretchable Sensing element 1000 includes first structure unit 1010, the second structural unit 1040 and retractable material layer 1070, wherein can stretch Compression material layer 1070 is located between 1010 and second structural unit 1040 of first structure unit.First structure unit 1010 includes tool There are the first substrate 1020 of slit and a first sensing element layer 1030 being set on first substrate 1020, and the second structural unit 1040 include the second substrate 1050 with slit and the second sensing element layer 1060 being set on second substrate 1050.This Outside, the first sensing element layer 1030 includes multiple first sensing electrodes 1032, and the second sensing element layer 1060 is including multiple Second sensing electrode 1062.There is the first insulating layer 1080a between first sensing electrode 1032N and the second sensing electrode 1062N, And first insulating layer 1080a young's modulus be more than retractable material layer 1070.In the present embodiment, first structure unit 1010 Design can be similar to first structure unit 110 described in previous embodiment.
Second substrate 1050 is be overlapped with the first substrate 1020 of part, the second sensing element layer 1060 and the first sense of part Element layer 1030 is surveyed to be overlapped, and retractable material layer 1070 is covered in the second sensing electrode 1062.Specifically, in this implementation In example, the first sensing electrode 1032N is Chong Die with the second sensing electrode 1062N.First sensing electrode 1032W and the first sensing electrode It is not covered above 1032E by second substrate 1050.
In the present embodiment, user can be with finger F or other modes touching retractable material layer 1070.For example, The touched region of retractable material layer 1070 is located on the first sensing electrode 1032W, then the first sensing electrode 1032W is with that can draw Stretching between sensing element 1070 is touched face has touching vertical interval DF.First sensing electrode 1032W can be carried out from appearance sense Survey pattern simultaneously measures corresponding first signal value, to judge the touch action corresponding to finger F.And it is possible to repeat It is above-mentioned to hold sensing modes certainly by the variable quantity of the first signal value repeatedly measured, to judge the touching corresponding to finger F Action causes the deformed state of stretchable sensing element 1000.For example, can make when the touching pressing strength of user is larger It obtains the retractable material layer 1070 at touched position and generates larger deformation in z-direction, touching vertical interval DF is smaller.Phase Over the ground, it can cause retractable material layer 1070 at touched position in z-direction when the touching pressing strength of user is smaller Smaller deformation is generated, touching vertical interval DF is larger.First signal value will generate different variations in both the above situations Amount can judge the size of touching pressing strength by the variable quantity of the first signal value.
Figure 11 is the diagrammatic cross-section of the stretchable sensing element of two-layer equation according to eleventh embodiment of the invention.11st The stretchable sensing element 1100 of two-layer equation of embodiment is similar with the stretchable sensing element 100 of Fig. 1 D.In fig. 11, it is identical or The label of similar diagram 1A~Fig. 1 D represents the same or similar component, thus for the component illustrated in Figure 1A~Fig. 1 D in this not It is described in detail again.In the present embodiment, stretchable sensing element 1100 includes first structure unit 1110, the second structural unit 1140 are located at 1110 and second structural unit of first structure unit with retractable material layer 1170, wherein retractable material layer 1170 Between 1140.First structure unit 1110 includes the first substrate 1120 with slit and be set on first substrate 1120 the One sensing element layer 1130, and the second structural unit 1140 includes entire second substrate 1150 and is set to second substrate 1150 On the second sensing element layer 1160.In addition, the first sensing element layer 1130 includes multiple first sensing electrodes 1132, and Two sensing element layers 1160 include the second sensing electrode 1162.Between first sensing electrode 1132N and the second sensing electrode 1162 Young's modulus with the first insulating layer 1180a, and the first insulating layer 1180a can be more than retractable material layer 1170.In this reality It applies in example, the design of first structure unit 1110 can be similar to the first structure unit 110 described in previous embodiment.
Second sensing electrode 1162 of the second sensing element layer 1160 is, for example, to be located at the second base in a manner of to cover comprehensively On plate 1150, and second substrate 1150, between the first sensing element layer 1130 and the second sensing element layer 1160, first feels Element layer 1130 is surveyed between first substrate 1120 and second substrate 1150.Specifically, in the present embodiment, the second sensing Electrode 1162 can be for example a common electrode.For example, the second sensing electrode 1162 can be grounded or be electrically connected to common voltage VSS.The present embodiment can be sensed by the inductance capacitance performed between the first sensing electrode 1132 and the second sensing electrode 1162, And a third signal value is obtained, to judge the deformed state of stretchable sensing element 1100 in z-direction.
In another embodiment, the second sensing element layer 1160 can be patterned and including at least one second sensing electrode Second sensing electrode 1162 is only schematically drawn out in 1162, wherein Figure 11 with sectional view, top view or other regard In the drawing at angle, the second sensing element layer 1160 can include the second sensing electrode 1162 of multiple absolute construction.First sensing 1132 respective extending direction of electrode can crisscross other second sensing electrode 1162 or indivedual second sensing electrodes 1162 local area can be overlapped in the local area of one or more first sensing electrodes 1132.Thus, the first sense Mutual capacitance type sensing can be carried out, and obtain a third signal value by surveying 1132 and second sensing electrode 1162 of electrode, stretchable to judge The deformed state of sensing element 1100 in z-direction.
Figure 12 is the diagrammatic cross-section of the stretchable sensing element of two-layer equation according to twelveth embodiment of the invention.12nd The stretchable sensing element 1200 of two-layer equation of embodiment is similar with the stretchable sensing element 1100 of Figure 11.In fig. 12, it is identical Or similar label represents the same or similar component, therefore be not described in detail for the component illustrated in Figure 11 in this. In the present embodiment, stretchable sensing element 1200 includes first structure unit 1210, the second structural unit 1240 and scalable material The bed of material 1270, wherein retractable material layer 1270 are located between 1210 and second structural unit 1240 of first structure unit.First Structural unit 1210 includes the first substrate 1220 with slit and the first sensing element layer being set on first substrate 1220 1230, and second that the second structural unit 1240 includes entire second substrate 1250 and is set on second substrate 1250 senses Element layer 1260.In addition, the first sensing element layer 1230 includes multiple first sensing electrodes 1232, and the second sensing element layer 1260 include the second sensing electrode 1262.There is the first insulation between first sensing electrode 1232N and the second sensing electrode 1262 Layer 1280a, and the young's modulus of the first insulating layer 1280a can be more than retractable material layer 1270.In the present embodiment, the first knot The design of structure unit 1210 can be similar to the first structure unit 110 described in previous embodiment.In addition, first substrate 1220 is located at Between first sensing element layer 1230 and the second sensing element layer 1260, the second sensing element layer 1260 is located at first substrate 1220 Between second substrate 1250.
Figure 13 is the diagrammatic cross-section of the stretchable sensing element of two-layer equation according to thriteenth embodiment of the invention.13rd The stretchable sensing element 1300 of two-layer equation of embodiment is similar with the stretchable sensing element 1100 of Figure 11.In fig. 13, it is identical Or the label of similar diagram 11 represents the same or similar component, therefore no longer retouched in detail in this for the component illustrated in Figure 11 It states.In the present embodiment, second insulating layer 1380b is had more between the first sensing electrode 1132N and the second sensing electrode 1162, Wherein second insulating layer 1380b is set to the first insulating layer 1380a peripheries, and the generation type of second insulating layer 1380b and the One insulating layer 1380a is similar, however, the present invention is not limited thereto.The young's modulus of second insulating layer 1380b can be more than the first insulating layer 1380a, therefore the vertical interval between the first sensing electrode 1132N and the second sensing electrode 1162 does not have too big change Change.Thus, by carrying out obtained by inductance capacitance sensing the to the first sensing electrode 1132N and the second sensing electrode 1162 Three signal values can be used as a correction signal value.In the present embodiment, the young's modulus of second insulating layer 1380b and first absolutely The ratio of the young's modulus of edge layer 1380a can be greater than or equal to 10, however, the present invention is not limited thereto.
Figure 14 A are the upper schematic diagrams of the stretchable sensing element of two-layer equation according to fourteenth embodiment of the invention, wherein Figure 14 A omissions are painted part film layer, and in Figure 14 A, and Z-direction is perpendicular to x-direction and y-direction, and projects and is painted in Figure 14 A Show the direction in face.Figure 14 B are the diagrammatic cross-sections along Figure 14 A Vertical Centre Lines B-B '.The stretchable sense of two-layer equation of 14th embodiment It is similar with the stretchable sensing element 800 of Fig. 8 to survey element 1400.In Figure 14 A- Figure 14 B, the label table of same or similar Fig. 8 Show the same or similar component, therefore be not described in detail for the component illustrated in Fig. 8 in this.In the present embodiment, it can draw It stretches sensing element 1400 and includes first structure unit 1410, the second structural unit 1440 and retractable material layer 1470, wherein can Strictive material 1470 is located between 1410 and second structural unit 1440 of first structure unit.First structure unit 1410 includes First substrate 1420 with slit and the first sensing element layer 1430 being set on first substrate 1420, and the second structure list Member 1440 includes the second substrate 1450 with slit and the second sensing element layer 1460 being set on second substrate 1450.This Outside, the first sensing element layer 1430 includes the first sensing electrode 1432 (1432W, 1432N1,1432N2,1432E, 1432S), And the second sensing element layer 1460 includes the second sensing electrode 1462 (1462W, 1462N1,1462N2,1462E, 1462S). In the present embodiment, the layout type of the first sensing electrode 1432 and the second sensing electrode 1462 can be identical and layout areas that This overlapping, Figure 14 A only show the first sensing electrode 1432 and the slit of first substrate 1420 in first structure unit 1410 To illustrate its layout type.
By Figure 14 B it is found that two the first sensing electrodes 1432N1,1432N2 are located at the identical cabling area of first substrate 1420 On, and be electrically insulated from.But, two the second sensing electrodes 1462N1,1462N2 are located at the second different cabling areas 1454, And it is electrically insulated from.Specifically, there is a fixed third level between two the first sensing electrodes 1432N1,1432N2 Interval S 3, and when stretchable sensing element 1400 has deformed state, third level interval S3 does not have corresponding variation.Such as This one, by between the first sensing electrode 1432N1,1432N2 carry out inductance capacitance sensing obtained by the first signal value, can Using as a correction signal value.
In the stretchable sensing element of one embodiment of the invention, the capacitance detected respectively between two arrays of electrodes can be utilized to push away Fixed stretchable sensing element has corresponding deformed state after stress., such as the stretchable sensing in Figure 1A specifically In element 10, method for detecting can be the inductance capacitance detected respectively between the first sensing electrode 132N and the first sensing electrode 132S Induced electricity capacitance, the first sensing electrode 132N and the first sense between value, the first sensing electrode 132W and the first sensing electrode 132E Survey the induced electricity capacitance between electrode 132W or the induced electricity capacitance between the first sensing electrode 132S and 132E.By above-mentioned induced electricity Capacitance is compared with preset value or corrected value, to calculate stretchable sensing element possessed corresponding deformation shape after stress State.
Referring to Figure 1A, Figure 1B and Figure 15, Figure 15 be according to one embodiment of the invention stretchable sensing element by To Y-direction extruding external force when there is the upper schematic diagram of corresponding deformed state.Specifically, the stretchable sensing of Figure 15 Element 1500 has the state of corresponding deformation for the stretchable sensing element 10 of Figure 1A when being acted on by external force.In Figure 15 In, stretchable sensing element 1500 is squeezed power effect in the Y direction, produces corresponding deformation.For example, compared to Figure 1A with The state of Figure 1B, in fig.15, the electrode spacing 1501 between the first sensing electrode 132N and the first sensing electrode 132S become smaller, Electrode spacing 1502 between first sensing electrode 132W and the first sensing electrode 132E becomes larger.Using capacitance as electrical signals For, the capacitance between two conductors can be reduced as distance to each other increases, and can be deduced corresponding to electrode spacing 1501 Induced electricity capacitance can increase due to the deformation of stretchable sensing element 1500, the induced electricity capacitance corresponding to electrode spacing 1502 It can be reduced due to the deformation of stretchable sensing element 1500.Variation relation according to above-mentioned induced electricity capacitance is provided with corresponding position After news are integrated, the controller C of stretchable sensing element 10 is the deformation that can determine that stretchable sensing element 1500, entire to obtain The deformed state of stretchable sensing element 1500.
Referring to Figure 1A, Figure 1B and Figure 16, Figure 16 be according to one embodiment of the invention stretchable sensing element by To X-direction extruding external force when there is the upper schematic diagram of corresponding deformed state.Specifically, the stretchable sensing of Figure 16 Element 1600 has the state of corresponding deformation for the stretchable sensing element 10 of Figure 1A when being acted on by external force.In Figure 16 In, stretchable sensing element 1600 in be squeezed in X-direction power effect have corresponding deformation.For example, compared to Figure 1A with The state of Figure 1B, in figure 16, the electrode spacing 1601 between the first sensing electrode 132N and the first sensing electrode 132S become larger, Electrode spacing 1602 between first sensing electrode 132W and the first sensing electrode 132E becomes smaller.Using capacitance as electrical signals For, the capacitance between two conductors can be reduced as distance to each other increases, and can be deduced corresponding to electrode spacing 1601 Induced electricity capacitance can be reduced due to the deformation of stretchable sensing element 1600, the induced electricity capacitance corresponding to electrode spacing 1602 It can increase due to the deformation of stretchable sensing element 1600.Variation relation according to above-mentioned induced electricity capacitance is provided with corresponding position After news are integrated, the controller C of stretchable sensing element 10 is the deformation that can determine that stretchable sensing element 1600, entire to obtain The deformed state of stretchable sensing element 1600.
In other words, referring to Figure 1A, Figure 1B, Figure 15 and Figure 16, if the sensing electricity of the first sensing electrode 132N and first Induced electricity capacitance between the 132S of pole increases, the induced electricity capacitance drop between the first sensing electrode 132W and the first sensing electrode 132E It is low, stretchable sensing element 10 can be judged by the extruding external force of Y-direction, shape by the controller C of stretchable sensing element 10 The compressional deformation state of stretchable sensing element 1500 into such as Figure 15.If the first sensing electrode 132N and the first sensing electrode Induced electricity capacitance between 132S reduces, and the induced electricity capacitance between the first sensing electrode 132W and the first sensing electrode 132E increases, Extruding external force of the stretchable sensing element 10 by X-direction can be judged by the controller C of stretchable sensing element 10, is formed such as The compressional deformation state of stretchable sensing element 1600 in Figure 16.
Based on similar decision procedure, if the inductance capacitance between the first sensing electrode 132N and the first sensing electrode 132W Value and induced electricity capacitance between the first sensing electrode 132S and the first sensing electrode 132E increases, the first sensing electrode 132N with The sense between induced electricity capacitance and the first sensing electrode 132W and the first sensing electrode 132S between first sensing electrode 132E Capacitance is answered to reduce, stretchable sensing element 10 can be judged by+X+Y to-X- by the controller C of stretchable sensing element 10 The extruding external force of Y-direction (i.e. the upper right of drawing to lower left).If the first sensing electrode 132N and the first sensing electrode 132W Between induced electricity capacitance and induced electricity capacitance between the first sensing electrode 132S and the first sensing electrode 132E reduce, first Induced electricity capacitance and the sensing electricity of the first sensing electrode 132W and first between sensing electrode 132N and the first sensing electrode 132E Induced electricity capacitance between the 132S of pole increases, and can judge stretchable sensing element by the controller C of stretchable sensing element 10 10 by+X-Y to-X+Y directions (i.e. the upper left of drawing to lower right) extruding external force.
Based on similar decision procedure, above-mentioned method for sensing also can by stretchable sensing element 10 before deformation with shape Become the ratio of front and rear inductance capacitance value difference value or induced electricity capacitance to judge the deformation of stretchable sensing element 10 or corresponding Stress size.
In the stretchable sensing element of one embodiment of the invention, the connection of retractable material layer can be utilized to be demarcated by slit Thus the cabling area come, stretchable sensing element with using and deformation, can increase the application of stretchable sensing element.At this In the method for sensing of stretchable sensing element for inventing an embodiment, form and stretched what the cabling area of separation linked together Compression material layer, and retractable material layer has the characteristic that can return plastic deformation, stretchable sensing element can pass through the sense on substrate Survey the deformed state that electrode senses go out stretchable sensing element.
Although disclosing the present invention with reference to above example, it is not limited to the present invention, any affiliated technology Skilled person in field without departing from the spirit and scope of the present invention, can make some changes and embellishment, therefore of the invention Protection domain should be subject to the claim enclosed and its equivalency range defined.

Claims (20)

1. a kind of method for sensing of sensing device further, the wherein sensing device further include a stretchable sensing element, wherein this is stretchable Sensing element includes first substrate, the first sensing element layer and retractable material layer, and the first substrate is narrow with multiple first It stitches and multiple first cabling areas is marked off by multiple first slit, and the first sensing element layer includes the multiple first sensing electricity Pole, multiple first sensing electrode are located in multiple first cabling area, and the retractable material layer makes at least two to be located at phase First sensing electrode in adjacent first cabling area is separated by a variable spacing, and first sensing electrode is along multiple the first slit of part It wriggles and is distributed, wherein the method for sensing includes：
An electrical signals sensing is carried out to multiple first sensing electrode, it is respectively corresponding to obtain a plurality of first sensing electrode One first signal value；And
The deformed state of the stretchable sensing element is judged by the variation of first signal value.
2. the method for sensing of sensing device further as described in claim 1, wherein the electricity carried out to multiple first sensing electrode Property signal sensing include a resistance sensing is carried out respectively to multiple first sensing electrode.
3. the method for sensing of sensing device further as described in claim 1, wherein the electricity carried out to multiple first sensing electrode Property signal sensing include a capacitance sensing is carried out respectively to multiple first sensing electrode.
4. the method for sensing of sensing device further as claimed in claim 3, also comprises the steps of：
Multiple inductance capacitance sensing is carried out at least a pair of first sensing electrode in multiple first sensing electrode, it is more to obtain A first signal value；And
The variable quantity of multiple first signal value is calculated, with the deformed state of the corresponding stretchable sensing element of judgement.
5. the method for sensing of sensing device further as claimed in claim 3, the wherein sensing device further further include second substrate, with configuration In the second sensing element layer on the second substrate, and the retractable material layer be located at multiple first sensing electrode with this second Between sensing element layer, wherein the method for sensing further includes：
One electrical signals sensing is carried out to the second sensing element layer, to obtain one second corresponding to the second sensing element layer Signal value.
6. the method for sensing of sensing device further as claimed in claim 5, wherein the second sensing element layer include the multiple second senses Electrode is surveyed, and the method for sensing further includes：
Inductance capacitance sensing is carried out at least a pair of the second adjacent sensing electrode in multiple second sensing electrode, to obtain The second signal value；And
The variable quantity of first signal value and the second signal value is calculated, with the deformation of the corresponding stretchable sensing element of judgement Amount.
7. the method for sensing of sensing device further as claimed in claim 5, wherein the second sensing element layer include the multiple second senses Electrode is surveyed, and the method for sensing further includes：
At least one first sensing electrode is made to carry out inductance capacitance sensing with one of them second sensing electrode, to obtain a third Signal value；And
First signal value, the second signal value and the variable quantity of the third signal value are calculated, with the corresponding stretchable sense of judgement Survey the deformation quantity of element.
8. the method for sensing of sensing device further as claimed in claim 5, the wherein sensing device further further include the first insulating layer, and should First insulating layer between the one of which of multiple first sensing electrode and the one of which of multiple second sensing electrode, Wherein the method for sensing further includes：
With the one of which of multiple second sensing electrode of the first insulating layer both sides and multiple first sensing electrode The signal value that one of which progress inductance capacitance senses is as a correction signal value.
9. the method for sensing of sensing device further as claimed in claim 3, the wherein sensing device further further include second substrate, with configuration In the second sensing element layer on the second substrate, and the retractable material layer be located at multiple first sensing electrode with this second Between sensing element layer, wherein the method for sensing further includes：
At least one first sensing electrode is made to carry out inductance capacitance sensing with the second sensing element layer, to obtain third signal Value；And
The variable quantity of first signal value and the third signal value is calculated, with the deformation of the corresponding stretchable sensing element of judgement Amount.
10. the method for sensing of sensing device further as described in claim 1, the wherein sensing device further further include controller, wherein should Controller can judge the deformed state of the stretchable sensing element by the variation of respectively first signal value.
11. a kind of stretchable sensing element, including：
At least one first unit structure, including：
First substrate, the wherein first substrate have multiple first slits and mark off multiple first by multiple first slit Line area；
First sensing element layer, including a plurality of the first sensing electrode being mutually electrically insulated, and a plurality of first sensing electrode position In in multiple first cabling area；
At least one second unit structure, including：
Second substrate；
Second sensing element layer, on the second substrate；And
Retractable material layer between the first unit structure and the second unit structure, makes at least two to be located at adjacent the First sensing electrode in one cabling area is separated by a variable spacing.
12. stretchable sensing element as claimed in claim 11, wherein the retractable material layer are formed in the first substrate In multiple first slit, and multiple first slit is along the circular path of first unit center sequential from inside to outside Distribution, and the first sensing electrode of each conforms to the first slit of at least one of which and wriggles.
13. stretchable sensing element as claimed in claim 11, the wherein second substrate have multiple second slits, to divide Go out multiple second cabling areas.
14. stretchable sensing element as claimed in claim 13, wherein at least one of which in multiple first cabling area in The frontal projected area of the second substrate be overlapped in multiple second cabling area one of them in the orthographic projection of the second substrate.
15. stretchable sensing element as claimed in claim 13, wherein the second sensing element layer include mutually being electrically insulated Multiple second sensing electrodes, and multiple second sensing electrode is located in multiple second cabling area.
16. stretchable sensing element as claimed in claim 13, wherein the retractable material layer are formed in the second substrate In multiple second slit.
17. stretchable sensing element as claimed in claim 11, wherein the first sensing element layer be located at the first substrate and Between the second substrate, and the second substrate is located between the first sensing element layer and the second sensing element layer；Or
The second sensing element layer is located between the first substrate and the second substrate, and the first substrate is located at first sensing Between element layer and the second sensing element layer.
18. stretchable sensing element as claimed in claim 11, further includes the first insulating layer, positioned at multiple first cabling area At least one between the second sensing element layer, wherein the young's modulus of first insulating layer be more than the retractable material Layer.
19. stretchable sensing element as claimed in claim 18, further includes second insulating layer, positioned at multiple first cabling area This at least one between the second sensing element layer, and the second insulating layer is set to the first insulating layer periphery, wherein The young's modulus of the second insulating layer is more than the young's modulus of first insulating layer.
20. stretchable sensing element as claimed in claim 11 further includes a controller, wherein the controller can be by each One first signal value corresponding to the first sensing electrode of item judges the deformation quantity of the corresponding stretchable sensing element.
CN201611264248.4A 2016-12-30 2016-12-30 Stretchable sensing element and its method for sensing Pending CN108268159A (en)

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