CN108267852B - Display device and method for manufacturing the same - Google Patents
Display device and method for manufacturing the same Download PDFInfo
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- CN108267852B CN108267852B CN201810101781.1A CN201810101781A CN108267852B CN 108267852 B CN108267852 B CN 108267852B CN 201810101781 A CN201810101781 A CN 201810101781A CN 108267852 B CN108267852 B CN 108267852B
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Abstract
The invention discloses a display device and a manufacturing method thereof, and belongs to the technical field of display. The display device includes: the display device comprises a bearing substrate, a plurality of display units and a plurality of control units, wherein the display units and the control units are arranged on the bearing substrate in an array mode, the display units correspond to the control units one by one, and each display unit is used for reflecting light of one color; each display unit includes: the first reflecting layer and the second reflecting layer are sequentially arranged in parallel along the direction far away from the bearing substrate, the first reflecting layer comprises a shape memory layer and a reflecting film layer which are sequentially arranged along the direction far away from the bearing substrate, and the second reflecting layer comprises a substrate base plate and a semi-transparent semi-reflecting film layer arranged on the substrate base plate; each control unit is used for changing the thickness of the shape memory layer in the corresponding display unit so as to adjust the interval between the first reflection layer and the second reflection layer. The invention solves the problems of complex structure and complex manufacturing process of the IMOD device in the related technology. The invention is used for manufacturing the display device.
Description
Technical Field
The present invention relates to the field of display technologies, and in particular, to a display device and a method for manufacturing the same.
Background
The Interferometric Modulator Display (IMOD) technology is a reflective Display technology. The IMOD display includes a plurality of display units, each of which includes two parallel reflective layers, and when light is irradiated onto the two parallel reflective layers, the reflected light may produce a reinforcing effect when a wavelength of the reflected light and a surface interval of the two reflective layers conform to a specific relationship based on an interference principle of the light, and thus, a color of the reflected light and an intensity of the reflected light may be adjusted by changing the surface interval of the two reflective layers.
In the related art, the distance between two reflective layers is generally adjusted by a Micro-Electro-Mechanical System (MEMS), which generally includes a plurality of tiny components such as gears, springs, cantilevers, and channel structures, and the cantilevers bear the reflective layers on the side of the two reflective layers far from the light exit surface, and control the cantilevers to move up and down to adjust the distance between the two reflective layers, thereby achieving the purpose of adjusting the color and intensity of the reflected light.
However, since the structure of the mems is complex, the structure of the IMOD device in the related art is complex, and the manufacturing process is complicated.
Disclosure of Invention
The embodiment of the invention provides a display device and a manufacturing method thereof, which can solve the problems of complex structure and complex manufacturing process of an IMOD device in the related technology. The technical scheme is as follows:
in one aspect, there is provided a display device including: the display device comprises a bearing substrate, a plurality of display units and a plurality of control units, wherein the display units and the control units are arranged on the bearing substrate in an array mode, the display units correspond to the control units one by one, and each display unit is used for reflecting light of one color;
each of the display units includes: the first reflecting layer and the second reflecting layer are sequentially arranged in parallel along the direction far away from the bearing substrate, the first reflecting layer comprises a shape memory layer and a reflecting film layer which are sequentially arranged along the direction far away from the bearing substrate, and the second reflecting layer comprises a substrate base plate and a semi-transmitting semi-reflecting film layer arranged on the substrate base plate;
wherein each control unit is used for changing the thickness of the shape memory layer in the corresponding display unit so as to adjust the interval between the first reflection layer and the second reflection layer.
Optionally, the second reflective layer further includes a color-resist layer, and the color-resist layer is disposed between the substrate and the semi-transparent semi-reflective film layer;
the color of the color resistance layer in each display unit is the same as the color of the reflected light of the display unit.
Optionally, the shape memory layer is made of a magnetic control shape memory material, and the control unit is a magnetic field generator;
the control unit is arranged between the bearing substrate and the first reflecting layer.
Optionally, in the display unit, a distance a between the reflection surface of the semi-transparent and semi-reflective film layer and the reflection surface of the reflection film layer satisfies:
A＝k×(λ/2)×c；
where k is a positive number, λ is a wavelength of reflected light of the display unit, and c is a speed of light.
Optionally, the range of the magnetic field intensity provided by the magnetic field generator is 0.4-0.9 tesla.
Optionally, a grid is arranged between any two adjacent display units in the plurality of display units, and the grid is arranged on the carrier substrate;
the first reflecting layer and the second reflecting layer are fixedly arranged on the grid.
In another aspect, there is provided a method of manufacturing a display device, the method including:
providing a bearing substrate;
arranging a plurality of control units on the bearing substrate in an array manner;
arranging a plurality of display units in an array on a bearing substrate provided with a plurality of control units, wherein the display units and the control units are in one-to-one correspondence, each display unit is used for reflecting light of one color, and each display unit comprises: the first reflecting layer and the second reflecting layer are sequentially arranged in parallel along the direction far away from the bearing substrate, the first reflecting layer comprises a shape memory layer and a reflecting film layer which are sequentially arranged along the direction far away from the bearing substrate, and the second reflecting layer comprises a substrate base plate and a semi-transmitting semi-reflecting film layer arranged on the substrate base plate;
changing the thickness of the shape memory layer in the corresponding display unit through the control unit to adjust the interval between the first reflection layer and the second reflection layer.
Optionally, the array arrangement of a plurality of display units on the carrier substrate provided with the plurality of control units includes:
for each display cell:
preparing the shape memory layer, and forming the reflecting film layer on one surface of the shape memory layer close to the light emergent side through an electroplating process or a magnetron sputtering process to form the first reflecting layer;
forming a color resistance layer on the substrate through a composition process, and forming the semi-transparent and semi-reflective film layer on the substrate with the color resistance layer to form the second reflecting layer;
and the first reflecting layer and the second reflecting layer are sequentially arranged right above the corresponding control units.
Optionally, the method further includes:
forming a plurality of grids on the bearing substrate;
set gradually directly over the corresponding control unit first reflection stratum with the second reflection stratum includes:
and the first reflecting layer and the second reflecting layer are sequentially and fixedly arranged between two adjacent grids, so that a sealed cavity is formed between the first reflecting layer and the second reflecting layer.
Optionally, the shape memory layer is made of a magnetic control shape memory material, and the control unit is a magnetic field generator.
The technical scheme provided by the embodiment of the invention has the following beneficial effects:
according to the display device and the manufacturing method thereof provided by the embodiment of the invention, the shape memory layer is arranged in the first reflecting layer, the interval between the first reflecting layer and the second reflecting layer can be adjusted by changing the thickness of the shape memory layer through the control unit, so that the intensity of reflected light of the display unit is adjusted.
Drawings
Fig. 1 is a schematic structural diagram of a display device according to an embodiment of the present invention;
FIG. 2 is a schematic view of a partial structure of the display device shown in FIG. 1;
FIG. 3 is a top view of the display device shown in FIG. 1;
FIG. 4 is a schematic diagram of a partial structure of another display device according to an embodiment of the present invention;
FIG. 5 is a schematic diagram of a partial structure of another display device according to an embodiment of the present invention;
FIG. 6 is a schematic diagram of deformation of twin crystals under the action of a magnetic field according to an embodiment of the present invention;
FIG. 7 is a diagram illustrating the relationship between the deformation amount and the magnetic field strength of a magnetic shape memory material provided by an embodiment of the present invention;
FIG. 8A is a schematic diagram illustrating the superposition of the intensity of red light reflected by the first reflective layer and the intensity of red light reflected by the second reflective layer according to an embodiment of the present invention;
FIG. 8B is a schematic diagram illustrating the superposition of the intensity of red light reflected by the first reflective layer and the intensity of red light reflected by the second reflective layer according to another embodiment of the present invention;
FIG. 8C is a schematic diagram illustrating the superposition of the light intensity of red light reflected by the first reflective layer and the red light reflected by the second reflective layer according to another embodiment of the present invention;
fig. 9 is a flowchart of a method for manufacturing a display device according to an embodiment of the present invention;
fig. 10 is a flowchart of another method for manufacturing a display device according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
The IMOD display technology is a novel reflective display technology, and since the IMOD display does not need to be provided with a backlight source, the IMOD display has stronger cruising ability compared with a liquid crystal display and the like. The IMOD display includes a plurality of display units each for reflecting light of one color, each display unit including two parallel reflection layers, and when light is irradiated onto the two parallel reflection layers, the reflected light produces a reinforcing effect when a wavelength of the reflected light and a surface interval of the two reflection layers conform to a specific relationship based on an interference principle of the light, and thus, a color of the reflected light and an intensity of the reflected light can be adjusted by changing the surface interval of the two reflection surfaces. In the related art, the distance between the two reflective layers is generally adjusted by a micro electro mechanical system, but on one hand, the structure of the existing micro electro mechanical system is complex, which results in the complex structure and complex manufacturing process of the IMOD device, and on the other hand, because the structure of the display unit is small, when the distance between the two reflective layers is adjusted by the micro electro mechanical system, the adjustment precision is difficult to guarantee, and the display reliability of the IMOD device is low.
An embodiment of the present invention provides a display device, as shown in fig. 1, including: the display device comprises a bearing substrate 101, a plurality of display units 102 and a plurality of control units 103, wherein the display units 102 and the control units 103 are arranged on the bearing substrate 101 in an array mode, the display units 102 correspond to the control units 103 in a one-to-one mode, and each display unit 102 is used for reflecting light of one color.
Fig. 2 is a partially enlarged structural view of the display device shown in fig. 1, and as shown in fig. 2, each display unit includes: the first reflective layer 1021 and the second reflective layer 1022 are sequentially arranged in parallel along a direction away from the carrier substrate 101, the first reflective layer 1021 comprises a shape memory layer 1021a and a reflective film layer 1021b which are sequentially arranged along the direction away from the carrier substrate 101, and the second reflective layer 1022 comprises a substrate 1022a and a semi-transparent semi-reflective film layer 1022b arranged on the substrate 1022 a.
Each control unit is used for changing the thickness of the shape memory layer in the corresponding display unit so as to adjust the interval between the first reflection layer and the second reflection layer.
Alternatively, as shown in fig. 1, a barrier 104 may be disposed between any two adjacent display units 102 in the plurality of display units 102, where the barrier 104 is disposed on the carrier substrate 101; as shown in fig. 2, the first reflection layer 1021 and the second reflection layer 1022 are fixedly disposed on the barrier 104.
Fig. 3 is a top view of the display device shown in fig. 1, in a manufacturing process of the display device, a plurality of bars 104 arranged in a matrix as shown in fig. 3 may be formed on the carrier substrate 101, and an arrangement area of the display unit 102 may be determined by the bars 104, that is, the display unit 102 may be arranged in an area surrounded by the bars 104, and the bars may support each hierarchical structure in the display unit.
In practical applications, the first reflective layer and the second reflective layer in the display unit may be supported and fixed by other structures, which is not limited in the embodiment of the present invention.
Optionally, the barrier between the display units may be made of a non-light-transmissive material, for example, a black matrix material, so as to avoid light-emitting crosstalk between adjacent display units.
In summary, in the display device provided in the embodiments of the present invention, the shape memory layer is disposed in the first reflective layer, and the control unit changes the thickness of the shape memory layer, so as to adjust the interval between the first reflective layer and the second reflective layer, thereby adjusting the intensity of the reflected light of the display unit.
Optionally, as shown in fig. 4, the second reflective layer 1022 may further include a color resist layer 1022c, and the color resist layer 1022c is disposed between the substrate 1022a and the transflective film layer 1022 b. The color of the color resist layer in each display cell is the same as the color of the reflected light of the display cell.
It should be noted that, a color resistance layer with the same color as the reflected light of the display unit is arranged in each display unit, and when light enters from the outside, the color resistance layer in the second reflection layer can filter the incident light, so that the color of the light entering the display unit from the second reflection layer is the same as the color of the color resistance layer; when light is emitted from the display unit after being reflected by the first reflecting layer, the color resistance layer in the second reflecting layer can carry out secondary filtering on the emitted light, so that the color gamut of a product is improved.
Alternatively, the shape memory layer may be made of a magnetically controlled shape memory material, and accordingly, the control unit is a magnetic field generator. As shown in fig. 5, the control unit 103 is disposed between the carrier substrate 101 and the first reflective layer 1021, the magnetic field generator may include a ferromagnetic body 1031 and a coil 1032, both ends of the coil 1032 are respectively connected to a positive pole (+) and a negative pole (-) of an external driving circuit (not shown), and the external driving circuit and the magnetic field generator are disposed in a one-to-one correspondence. When the external drive circuit applies a voltage to the electrodes, the ferromagnetic body can generate a magnetic field, and H represents a magnetic induction line of the magnetic field generated by the ferromagnetic body, as shown in fig. 5.
The magnetic control shape memory material can deform in the direction orthogonal to the magnetic field under the action of the magnetic field, and the magnetic control shape memory material can deform rapidly under the action of the magnetic field, so that the response speed of the display unit can be within 1 millisecond. The action principle of the magnetic control shape memory material is as follows:
under the action of a magnetic field, twin crystals in the magnetron shape memory material can reorient phase, FIG. 6 is a deformation schematic diagram of twin crystals under the action of the magnetic field, and as shown in FIG. 6, when the magnetic field strength H is increased from 0 to a certain value (the direction of an arrow J in the figure represents the direction of magnetic moment), the martensite twin crystal modification M is rearranged, the twin crystal boundary L is moved, and the deformation is macroscopically shown to occur in the direction orthogonal to the magnetic field.
FIG. 7 is a schematic diagram of the relationship between the deformation amount of the magnetron shape memory material and the magnetic field strength, wherein the abscissa represents the magnetic field strength H in Tesla (T), the ordinate represents the deformation amount Δ L of the magnetron shape memory material relative to itself, and the Δ L is expressed in percentage form and can be 0% -100%, as shown in FIG. 7, when the magnetic field strength is between 0.4T and 0.9T, the deformation amount of the magnetron shape memory material is linearly related to the magnetic field strength, and the deformation range of the magnetron shape memory material is 0% -9%.
Optionally, the magnetically controlled shape memory material may be a magnetically controlled shape memory alloy.
It should be noted that, in the display unit provided in the embodiment of the present invention, a distance a between the reflection surface of the transflective film layer and the reflection surface of the reflection film layer satisfies:
and A is k × (lambda/2) × c, wherein k is positive number, lambda is the wavelength of the reflected light of the display unit, and c is the speed of light.
In the display device shown in fig. 5, when the external light irradiates on the second reflective layer, a part of the light is reflected by the transflective film layer, and another part of the light is transmitted from the second reflective layer to the first reflective layer (when the second reflective layer includes the color resist layer, the transmitted light is the same color as the color resist layer); at this time, voltage is applied to the electrode in the magnetic field generator, so that the ferromagnetic body is in a power-on state, a magnetic field is further generated, the thickness change of the magnetic control shape memory material is controlled by controlling the magnetic field intensity of the generated magnetic field, and therefore the distance between the reflecting surface of the semi-transparent and semi-reflective film layer and the reflecting surface of the reflecting film layer meets the condition that the color light required to be displayed by the display unit is subjected to interference addition. The distance between the reflecting surface of the semi-transparent and semi-reflective film layer and the reflecting surface of the reflective film layer satisfies the interference addition of the light with the specified color, the intensity is increased, and the light with other colors has no effect, so the display color of the display unit is the specified color.
Typically a display device comprises a plurality of pixel units, each pixel unit comprising at least two pixels, for example 3 pixels, a red pixel, a green pixel and a blue pixel. In the embodiment of the present invention, one display unit is one pixel, and for example, the plurality of display units may include a red display unit, a green display unit, and a blue display unit, which are sequentially arranged, where the red display unit is configured to reflect red light, the green display unit is configured to reflect green light, and the blue display unit is configured to reflect blue light.
Optionally, when the display unit is a red display unit, a ═ k1×(λRed light/2) × c, when the display element is a green display element, A ═ k2×(λGreen light/2) × c, when the display element is a blue display element, A ═ k3×(λBlue light/2)×c，k1、k2And k3Are all positive numbers. The display device shown in fig. 1 includes two pixel units (the left three display units are one pixel unit, the right three display units are another pixel unit), and each pixel unit includes a red display unit, a green display unit, and a blue display unit arranged sequentially from left to right. Wherein λ isRed lightRepresenting the wavelength of red light, which may be 675 nanometers, lambdaGreen lightRepresenting the wavelength of green light, which may be 520 nanometers, λBlue lightRepresenting the wavelength of blue light, which may be 450 nanometers.
For example, the embodiment of the present invention takes a red display unit as an example, and explains the gray scale display principle of the display unit:
fig. 8A, 8B and 8C are schematic diagrams illustrating the superposition of the light intensity of the red light reflected by the first reflective layer and the red light reflected by the second reflective layer, respectively, where R1 represents the red light reflected by the first reflective layer, R2 represents the red light reflected by the second reflective layer, and R represents the red light emitted by the red display unit. When k is1When the number of the red display units is even, the light intensity superposition diagram of the R1 and the R2 is shown in fig. 8A, and the intensity of the red light emitted by the red display unit is the maximum at this time, that is, the red display unit is the brightest at this time; when k is1When the number of the red display units is odd, the light intensity superposition of the R1 and the R2 is schematically shown in fig. 8B, and the intensity of the red light emitted by the red display unit is the smallest, that is, the red display unit is the darkest. It should be noted that, when the second reflective layer in the red display unit is provided with a red color resist, k1When the light intensity is a non-integer, the light intensity superposition schematic diagram of R1 and R2 is shown in fig. 8C, and at this time, the intensity of the red light emitted by the red display unit is between the maximum intensity and the minimum intensity, and since the distance between the first reflective layer and the second reflective layer is linearly adjustable, the brightness of the red display unit in this state is also adjustable, so that multi-gray scale display can be realized; wherein the red color resistance is to ensure when k is1When the number of the light emitting elements is not an integer, the light emitted by the display unit is red light.
In practical applications, the distance between the first reflective layer and the second reflective layer may be adjusted such that k in formula a ═ k × (λ/2) × c is a non-integer, and when the second reflective layer is not provided with a color resist layer, the display unit may be used for displaying black and white images, for example, the display device may be electronic paper or electronic book, and the intensity of the emergent light may be changed by adjusting the distance between the first reflective layer and the second reflective layer, so as to realize multi-gray scale display of the display unit.
Therefore, when k is an even number, the display unit can emit reflected light of maximum intensity; when k is an odd number, the display unit can emit the reflected light with the minimum intensity; when k is a non-integer, the intensity of the reflected light emitted by the display unit is between the maximum intensity and the minimum intensity.
It should be noted that the shape memory material provided in the embodiment of the present invention may also be other materials, for example, an electric field control shape memory material, a temperature control shape memory material, or a humidity control shape memory material, and correspondingly, the control unit may also be an electric field control unit, a temperature control unit, or a humidity control unit, and the type of the shape memory material is not limited in the embodiment of the present invention.
Optionally, the display device provided in the embodiment of the present invention may be any product or component having a display function, such as a mobile phone, a tablet computer, a television, a display, a notebook computer, a digital photo frame, a navigator, an electronic paper, or an electronic book, and the size and the number of the display units are not limited in the embodiment of the present invention.
In summary, in the display device provided in the embodiments of the present invention, the shape memory layer is disposed in the first reflective layer, and the control unit changes the thickness of the shape memory layer, so as to adjust the interval between the first reflective layer and the second reflective layer, thereby adjusting the intensity of the reflected light of the display unit.
Fig. 9 is a flowchart of a method for manufacturing a display device according to an embodiment of the present invention, and as shown in fig. 9, the method may include:
Wherein each display unit is adapted to reflect light of one color, see fig. 2, each display unit comprising: the first reflecting layer and the second reflecting layer are arranged in parallel in sequence along the direction of keeping away from the bearing substrate, the first reflecting layer comprises a shape memory layer and a reflecting film layer which are arranged in sequence along the direction of keeping away from the bearing substrate, and the second reflecting layer comprises a substrate base plate and a semi-transparent semi-reflecting film layer arranged on the substrate base plate.
And 204, changing the thickness of the shape memory layer in the corresponding display unit through the control unit so as to adjust the interval between the first reflection layer and the second reflection layer.
In summary, in the manufacturing method of the display device according to the embodiment of the invention, the shape memory layer is disposed in the first reflective layer of each display unit of the display device, and the control unit changes the thickness of the shape memory layer, so that the distance between the first reflective layer and the second reflective layer can be adjusted to adjust the intensity of the reflected light of the display unit.
Fig. 10 is a flowchart of another method for manufacturing a display device according to an embodiment of the present invention, and as shown in fig. 10, the method may include:
Alternatively, the carrier substrate may be a substrate made of a material having a certain hardness, such as glass, quartz, or resin.
Alternatively, a plurality of bars as shown in fig. 3 may be formed on the carrier substrate through a patterning process. The composition process comprises the following steps: photoresist coating, exposure, development, etching and photoresist stripping. The area enclosed by the grids is the setting area of the display unit.
Alternatively, the barrier may be made of a non-light-transmissive material, for example, a black matrix material, so as to avoid light-emitting crosstalk between adjacent display units.
And step 303, arranging a plurality of control units in an array between the grids on the bearing substrate.
Alternatively, the control unit may be a magnetic field generator, which may comprise a ferromagnetic body and a coil. The coil may be formed by winding a wire outside the ferromagnetic body, or a spiral metal wire may be formed on the ferromagnetic body by processes such as film formation, exposure, and etching, and the coil is not limited in the embodiment of the present invention. The ferromagnetic body may be made of materials such as iron, cobalt, or nickel, and a material capable of significantly enhancing the magnetic field of the coil may be selected.
And 304, fixedly arranging a plurality of display units between the grids on the bearing substrate, wherein the display units correspond to the control units one by one.
Wherein each display unit is adapted to reflect light of one color, see fig. 2, each display unit comprising: the first reflecting layer and the second reflecting layer are arranged in parallel in sequence along the direction of keeping away from the bearing substrate, the first reflecting layer comprises a shape memory layer and a reflecting film layer which are arranged in sequence along the direction of keeping away from the bearing substrate, and the second reflecting layer comprises a substrate base plate and a semi-transparent semi-reflecting film layer arranged on the substrate base plate.
Alternatively, the shape memory layer may be made of a magnetically controlled shape memory material.
Accordingly, the forming process for each display unit may include:
s41, preparing a shape memory layer, and forming a reflection film layer on one surface of the shape memory layer close to the light emergent side through an electroplating process or a magnetron sputtering process to form a first reflection layer.
Optionally, the magnetically controlled shape memory material comprises a magnetically controlled shape memory alloy. Currently, the magnetic shape memory alloy mainly includes nickel (Ni) based alloys, cobalt (Co) based alloys, iron (Fe) based alloys, and the like. Wherein the Ni alloy comprises nickel manganese gallium alloy (Ni-Mn-Ga), nickel manganese alloy (Ni-Mn), nickel aluminum manganese alloy (Ni-A1-Mn) and the like; the Co-based alloy includes cobalt nickel alloy (Co-Ni) and cobalt nickel gallium alloy (Co-Ni-Ga); the Fe-based alloy includes Fe-Pd alloy (Fe-Pd), Fe-Mn-Si alloy (Fe-Mn-Si), Fe-Ni-Co-Ti alloy, and the like.
By way of example, the present invention is illustrated by the preparation of Ni-Mn-Ga comprising:
ni, Mn, Ga and Si with the purity of 99.9 percent are proportioned according to the stoichiometry of 50.5: 27.1: 22.1: 0.3, the ingredients are placed in a water-cooled copper crucible and then placed in a vacuum arc furnace to be smelted in a high-purity argon environment, in order to make the components of the alloy obtained by smelting uniform, the alloy is repeatedly turned over and smelted for 4 times, and the smelted alloy melt is poured on a flat substrate in the argon environment to form an alloy film with a certain thickness, wherein the size of the alloy film is consistent with that of a display unit. On the one hand, the alloy melt can be poured on a substrate which is matched with the size of the display unit, and the size of the generated alloy film is consistent with that of the display unit; on the other hand, the alloy melt can be poured on a larger substrate to form an alloy film, and then the alloy film is cut to obtain the alloy film with the corresponding size. The embodiment of the invention does not limit the method for preparing the magnetic control shape memory alloy film.
Further, a reflection film layer may be formed on the magnetron shape memory alloy film by an electroplating process or a magnetron sputtering process. Because the reflection efficiency of the reflection film layer to light directly influences the light-emitting efficiency of the display unit, the reflection efficiency of the prepared reflection film layer to light needs to be as high as possible, and the metal silver can be selected as a material for preparing the reflection film layer.
And S42, forming a color resistance layer on the substrate through a composition process, and forming a semi-transparent and semi-reflective film layer on the substrate on which the color resistance layer is formed to form a second reflective layer.
The substrate is a transparent substrate, and may be a light guide substrate made of glass, quartz, transparent resin, or the like and having a certain hardness. The process of forming the photoresist layer on the substrate by the patterning process can refer to the related art, and is not described herein.
Optionally, the semi-transparent semi-reflective film layer may be prepared from a metal-induced polysilicon material, and in the embodiment of the present invention, the semi-transparent semi-reflective film layer may be prepared by doping boron in the metal-induced polysilicon material.
Optionally, a metal-induced polysilicon film may be formed on the color resist layer as a transflective film layer, the thickness of the metal-induced polysilicon film is in a range of 40-60 nm, and the metal-induced polysilicon film has low absorption and near transflective properties in a visible light band.
And S43, sequentially arranging a first reflection layer and a second reflection layer right above the corresponding control units.
Optionally, a first reflective layer and a second reflective layer may be sequentially and fixedly disposed between two adjacent barriers, so that a sealed cavity is formed between the first reflective layer and the second reflective layer.
It should be noted that, the first reflective layer and the second reflective layer are sequentially disposed right above the control unit, that is, there is an overlapping portion between an orthographic projection of the disposed first reflective layer and the orthographic projection of the disposed second reflective layer on the carrier substrate and an orthographic projection of the control unit on the carrier substrate.
Before the first reflecting layer and the second reflecting layer are arranged, the distance between the first reflecting layer and the second reflecting layer in the display unit of each color needs to be calculated in advance, and bearing structures used for fixing the first reflecting layer and the second reflecting layer are arranged at corresponding positions of the grid blocks respectively, so that the distance between the first reflecting layer and the second reflecting layer in each display unit meets the condition of adding interference of light of the corresponding color.
And 305, changing the thickness of the shape memory layer in the corresponding display unit through the control unit to adjust the interval between the first reflection layer and the second reflection layer.
Optionally, after the display unit is set, the control unit may be powered on to change the thickness of the shape memory layer in the corresponding display unit, so as to adjust the interval between the first reflective layer and the second reflective layer, and debug the display device. In practical application, in order to shorten the response time of the display device, a magnetic field with the strength of 0.4T can be provided for the magnetic control shape memory layer in the initial state of the display device; alternatively, in order to improve the cruising ability of the display device, the magnetic field generator may not be powered in the initial state of the display device, which is not limited in the embodiment of the present invention.
It should be noted that, the sequence of the steps of the manufacturing method of the display device provided in the embodiment of the present invention may be appropriately adjusted, for example, the sequence of step 302 and the sequence of step 303 may be interchanged, and the steps may be increased or decreased according to the circumstances.
In summary, in the manufacturing method of the display device according to the embodiment of the invention, the shape memory layer is disposed in the first reflective layer of each display unit of the display device, and the control unit changes the thickness of the shape memory layer, so that the distance between the first reflective layer and the second reflective layer can be adjusted to adjust the intensity of the reflected light of the display unit.
The invention is not to be considered as limited to the particular embodiments shown and described, but is to be understood that various modifications, equivalents, improvements and the like can be made without departing from the spirit and scope of the invention.
Claims (8)
1. A display device, characterized in that the display device comprises: the display device comprises a bearing substrate, a plurality of display units and a plurality of control units, wherein the display units and the control units are arranged on the bearing substrate in an array mode, the display units correspond to the control units one by one, and each display unit is used for reflecting light of one color;
each of the display units includes: the first reflecting layer and the second reflecting layer are sequentially arranged in parallel along the direction far away from the bearing substrate, the first reflecting layer comprises a shape memory layer and a reflecting film layer which are sequentially arranged along the direction far away from the bearing substrate, and the second reflecting layer comprises a substrate base plate and a semi-transmitting semi-reflecting film layer arranged on the substrate base plate;
wherein each control unit is used for changing the thickness of the shape memory layer in the corresponding display unit so as to adjust the interval between the first reflection layer and the second reflection layer;
the shape memory layer is made of a magnetic control shape memory material, and the control unit is a magnetic field generator;
the magnetic field generator is arranged between the bearing substrate and the first reflecting layer, and the shape memory layer in the first reflecting layer is positioned on one side, far away from the bearing substrate, of the magnetic field generator.
2. The display device according to claim 1, wherein the second reflective layer further comprises a color resist layer disposed between the base substrate and the transflective film layer;
the color of the color resistance layer in each display unit is the same as the color of the reflected light of the display unit.
3. The display device according to claim 1, wherein a distance a between the reflection surface of the transflective film layer and the reflection surface of the reflection film layer in the display unit satisfies:
A＝k×(λ/2)×c；
where k is a positive number, λ is a wavelength of reflected light of the display unit, and c is a speed of light.
4. The display device according to claim 3,
the range of the magnetic field intensity provided by the magnetic field generator is 0.4-0.9 Tesla.
5. The display device according to claim 1, wherein a barrier is disposed between any two adjacent display units of the plurality of display units, and the barrier is disposed on the carrier substrate;
the first reflecting layer and the second reflecting layer are sequentially and fixedly arranged between two adjacent grids, so that a sealed cavity is formed between the first reflecting layer and the second reflecting layer.
6. A method of manufacturing a display device, the method comprising:
providing a bearing substrate;
arranging a plurality of control units on the bearing substrate in an array manner;
arranging a plurality of display units in an array on a bearing substrate provided with a plurality of control units, wherein the display units and the control units are in one-to-one correspondence, each display unit is used for reflecting light of one color, and each display unit comprises: the first reflecting layer and the second reflecting layer are sequentially arranged in parallel along the direction far away from the bearing substrate, the first reflecting layer comprises a shape memory layer and a reflecting film layer which are sequentially arranged along the direction far away from the bearing substrate, and the second reflecting layer comprises a substrate base plate and a semi-transmitting semi-reflecting film layer arranged on the substrate base plate;
changing the thickness of the shape memory layer in the corresponding display unit through the control unit to adjust the interval between the first reflection layer and the second reflection layer;
the shape memory layer is made of a magnetic control shape memory material, and the control unit is a magnetic field generator;
the magnetic field generator is arranged between the bearing substrate and the first reflecting layer, and the shape memory layer in the first reflecting layer is positioned on one side, far away from the bearing substrate, of the magnetic field generator.
7. The method according to claim 6, wherein the arranging a plurality of display units in an array on a carrier substrate provided with the plurality of control units comprises:
for each display cell:
preparing the shape memory layer, and forming the reflecting film layer on one surface of the shape memory layer close to the light emergent side through an electroplating process or a magnetron sputtering process to form the first reflecting layer;
forming a color resistance layer on the substrate through a composition process, and forming the semi-transparent and semi-reflective film layer on the substrate with the color resistance layer to form the second reflecting layer;
and the first reflecting layer and the second reflecting layer are sequentially arranged right above the corresponding control units.
8. The method of claim 7, further comprising:
forming a plurality of grids on the bearing substrate;
set gradually directly over the corresponding control unit first reflection stratum with the second reflection stratum includes:
and the first reflecting layer and the second reflecting layer are sequentially and fixedly arranged between two adjacent grids, so that a sealed cavity is formed between the first reflecting layer and the second reflecting layer.
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Citations (4)
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|---|---|---|---|---|
| CN202648612U (en) * | 2012-04-26 | 2013-01-02 | 翁光远 | Displacement deformation physical sensor based on magnetically controlled shape memory alloy |
| CN105425428A (en) * | 2016-01-04 | 2016-03-23 | 京东方科技集团股份有限公司 | Array substrate and magneto-optical switch display |
| CN106019573A (en) * | 2016-08-08 | 2016-10-12 | 京东方科技集团股份有限公司 | Display panel and display device |
| CN106066553A (en) * | 2016-08-10 | 2016-11-02 | 京东方科技集团股份有限公司 | A kind of display floater, its driving method and display device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US7852545B2 (en) * | 1994-05-05 | 2010-12-14 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202648612U (en) * | 2012-04-26 | 2013-01-02 | 翁光远 | Displacement deformation physical sensor based on magnetically controlled shape memory alloy |
| CN105425428A (en) * | 2016-01-04 | 2016-03-23 | 京东方科技集团股份有限公司 | Array substrate and magneto-optical switch display |
| CN106019573A (en) * | 2016-08-08 | 2016-10-12 | 京东方科技集团股份有限公司 | Display panel and display device |
| CN106066553A (en) * | 2016-08-10 | 2016-11-02 | 京东方科技集团股份有限公司 | A kind of display floater, its driving method and display device |
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