CN108254108A - A kind of MEMS pressure sensor based on information engineering - Google Patents
A kind of MEMS pressure sensor based on information engineering Download PDFInfo
- Publication number
- CN108254108A CN108254108A CN201810109925.8A CN201810109925A CN108254108A CN 108254108 A CN108254108 A CN 108254108A CN 201810109925 A CN201810109925 A CN 201810109925A CN 108254108 A CN108254108 A CN 108254108A
- Authority
- CN
- China
- Prior art keywords
- lever
- movable axis
- protecting box
- pressure sensor
- information engineering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 10
- 238000006243 chemical reaction Methods 0.000 claims abstract description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 19
- 238000009413 insulation Methods 0.000 claims description 14
- 239000011888 foil Substances 0.000 claims description 6
- 230000001681 protective effect Effects 0.000 abstract description 3
- 238000009530 blood pressure measurement Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000009421 internal insulation Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000003129 oil well Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The invention discloses a kind of MEMS pressure sensors based on information engineering; including protecting box and micro-control switch; the lower end inner surface of the protecting box is installed with lever mount; and lever is provided with above lever mount; the outer surface middle position of the lever is provided with No.1 movable axis; and lever is flexibly connected by No.1 movable axis with lever mount; the upper end outer surface side of the lever is installed with firm banking; and lever upper end outer surface opposite side is provided with spring pedestal, and No. two movable axis and spring are provided with above the spring pedestal.A kind of MEMS pressure sensor based on information engineering of the present invention; equipped with micro-control switch, lever and protecting box; do not need to outer bound pair its power supply in the case of by pressure conversion be electric signal; and pressure measurement range bigger; protecting box plays protective effect to whole device; it avoids, due to the excessive damage sensor of pressure, bringing better prospect of the application.
Description
Technical field
The present invention relates to sensor field, more particularly to a kind of MEMS pressure sensor based on information engineering.
Background technology
Pressure sensor is to experience pressure signal, and can be converted into pressure signal according to certain rule available defeated
The device or device of the electric signal gone out, are usually made of pressure-sensing device and signal processing unit, be in industrial practice the most
A kind of common sensor is widely used in various industrial automatic control environment, be related to water conservancy and hydropower, railway traffic, intelligent building,
Produce numerous industries such as automatic control, aerospace, military project, petrochemical industry, oil well, electric power, ship, lathe, pipeline；Traditional pressure sensing
There are certain drawbacks when in use for device；As pressure signal conversion is cumbersome, while needs to provide energy, and can measuring pressure model
It encloses smaller, sensor degradation may be caused when in addition pressure is excessive, for this purpose, we have proposed a kind of MEMS based on information engineering
Pressure sensor.
Invention content
The technical problem to be solved by the present invention is to overcome the defects of the prior art, provide a kind of MEMS based on information engineering
Pressure sensor.
In order to solve the above technical problem, the present invention provides following technical solutions：
A kind of MEMS pressure sensor based on information engineering of the present invention, including protecting box and micro-control switch, the protection
The lower end inner surface of box is installed with lever mount, and lever is provided with above lever mount, the outer surface of the lever
Middle position is provided with No.1 movable axis, and lever is flexibly connected by No.1 movable axis with lever mount, the lever
Upper end outer surface side is installed with firm banking, and lever upper end outer surface opposite side is provided with spring pedestal, the bullet
No. two movable axis and spring are provided with above spring pedestal, and the outer surface middle position of No. two movable axis is provided with fixed circle
Ring, the upper end inner surface of the protecting box are installed with movable axis guide pad, and the micro-control switch is fixedly installed in protecting box
Side inner surface, and the lower end inner surface of micro-control switch is provided with fixed frame, and the centre position of the fixed frame is provided with iron
Heart guiding axis, and iron core guiding axis is internally provided with electromagnetic core, the upper end outer surface of the iron core guiding axis is provided with absolutely
Edge boxcar, and the side inner surface for the boxcar that insulate is provided with fixed baffle, the lower end outer surface setting of the fixed baffle
There is foil gauge, the front inner surface of the insulation boxcar is provided with signal amplifier, the outer surface edge position of the protecting box
The place of putting is provided with fastener.
Preferably, No. two movable axis are through movable axis guide pad and protecting box, and No. two movable axis pass through spring
It is flexibly connected with protecting box.
Preferably, the electromagnetic core is through iron core guiding axis, and electromagnetic core is turned by iron core guiding axis and insulation
Change box flexible connection.
Preferably, the outer surface of the insulation boxcar is provided with data line, and the boxcar that insulate is passed by data
Defeated line is electrically connected with micro-control switch.
Preferably, the opposite side inner surface of the insulation boxcar is provided with wire interface, the signal amplifier
Both sides be equipped with conducting wire, and signal amplifier passes through conducting wire and is electrically connected with wire interface.
Preferably, the front inner surface of the protecting box is installed with signal processor, and the micro-control switch passes through number
It is electrically connected according to transmission line and signal processor.
The advantageous effect that is reached of the present invention is：The MEMS pressure sensor based on information engineering, it is micro- by what is be equipped with
Pressure conversion is electric signal in the case where not needing to outer bound pair its power supply, separately by control switch and its internal insulation boxcar
It is outer that larger pressure conversion is become smaller using lever principle so that whole device can measure the pressure of bigger, the protection being equipped with
Box plays protective effect to whole device, avoids due to the excessive damage sensor of pressure, the MEMS pressure of entire information engineering
Sensor structure is simple, easy to operate, and the effect used is more preferable relative to traditional approach.
Description of the drawings
Attached drawing is used to provide further understanding of the present invention, and a part for constitution instruction, the reality with the present invention
Example is applied together for explaining the present invention, is not construed as limiting the invention.In the accompanying drawings：
Fig. 1 is the structure diagram of the present invention；
Fig. 2 is the partial schematic diagram of the present invention；
Fig. 3 is the partial enlarged view at A in Fig. 2 of the invention；
Fig. 4 is the partial enlarged view at B in Fig. 3 of the invention.
In figure：1st, micro-control switch；2nd, electromagnetic core；3rd, firm banking；4th, No.1 movable axis；5th, lever mount；6th, lever；
7th, spring pedestal；8th, spring；9th, clamping rings；10th, No. two movable axis；11st, movable axis guide pad；12nd, data line；13、
Signal processor；14th, protecting box；15th, fastener；16th, iron core guiding axis；17th, insulate boxcar；18th, fixed frame；19th, it is fixed
Baffle；20th, foil gauge；21st, signal amplifier；22nd, wire interface.
Specific embodiment
The preferred embodiment of the present invention is illustrated below in conjunction with attached drawing, it should be understood that preferred reality described herein
It applies example to be merely to illustrate and explain the present invention, be not intended to limit the present invention.
Embodiment 1
As shown in Figs 1-4, a kind of MEMS pressure sensor based on information engineering, including protecting box 14 and micro-control switch 1,
The lower end inner surface of protecting box 14 is installed with lever mount 5, and the top of lever mount 5 is provided with lever 6, lever 6
Outer surface middle position is provided with No.1 movable axis 4, and lever 6 is flexibly connected by No.1 movable axis 4 with lever mount 5,
The upper end outer surface side of lever 6 is installed with firm banking 3, and 6 upper end outer surface opposite side of lever is provided with spring bottom
Seat 7, the top of spring pedestal 7 is provided with No. two movable axis 10 and spring 8, and the outer surface middle position of No. two movable axis 10
Clamping rings 9 is provided with, the upper end inner surface of protecting box 14 is installed with movable axis guide pad 11, and micro-control switch 1 fixes peace
Side inner surface loaded on protecting box 14, and the lower end inner surface of micro-control switch 1 is provided with fixed frame 18, the centre of fixed frame 18
Position is provided with iron core guiding axis 16, and iron core guiding axis 16 is internally provided with electromagnetic core 2, the upper end of iron core guiding axis 16
Outer surface is provided with insulation boxcar 17, and the side inner surface for the boxcar 17 that insulate is provided with fixed baffle 19, fixed baffle
19 lower end outer surface is provided with foil gauge 20, and the front inner surface of insulation boxcar 17 is provided with signal amplifier 21, protects
Fastener 15 is provided at the outer surface edge position of box 14.
No. two movable axis 10 through movable axis guide pad 11 and protecting box 14, and No. two movable axis 10 by spring 8 with
Protecting box 14 is flexibly connected；Electromagnetic core 2 is through iron core guiding axis 16, and electromagnetic core 2 is by iron core guiding axis 16 and absolutely
Edge boxcar 17 is flexibly connected；The outer surface of insulation boxcar 17 is provided with data line 12, and the boxcar 17 that insulate passes through
Data line 12 is electrically connected with micro-control switch 1；The opposite side inner surface of insulation boxcar 17 is provided with wire interface 22, believes
The both sides of number amplifier 21 are equipped with conducting wire, and signal amplifier 21 is electrically connected by conducting wire and wire interface 22；Protecting box
14 front inner surface is installed with signal processor 13, and micro-control switch 1 passes through data line 12 and signal processor 13
It is electrically connected.
Have under certain pressure it should be noted that the present invention works as a kind of MEMS pressure sensor based on information engineering
No. two movable axis 10 are pressed, No. two movable axis 10 compress downwards along movable axis guide pad 11, by being fixed on No. two movable axis 10
9 compressed spring 8 of clamping rings on surface, then lever 6 is pushed by spring pedestal 7, since lever 6 is lived by No.1 movable axis 4
Dynamic to be installed in lever mount 5, so the other end of lever 6 tilts, the firm banking 3 for being set to 6 surface of lever at this time compresses
Electromagnetic core 2 inside micro-control switch 1, electromagnetic core 2 are squeezed along the iron core guiding axis 16 for being fixed on 18 centre position of fixed frame
Pressure insulation boxcar 17 is set to the foil gauge 20 on 19 surface of fixed baffle, and electromagnetic core 2 moves in coil, generates induced electricity
Stream deforms upon resistance and changes since foil gauge 20 is squeezed, and circuital current changes, and signal amplifier 21 will be thin
The electric current of microvariations by data line 12 sends signal processor 13 to after capturing and amplifying, and signal processor 13 carries out
It handles operation and shows real-time pressure size, fastener 15 facilitates the fixation of protecting box 14, and protecting box 14 plays whole device
Protective effect is avoided due to the excessive damage sensor of pressure, more practical.
Finally it should be noted that：The foregoing is only a preferred embodiment of the present invention, is not intended to restrict the invention,
Although the present invention is described in detail referring to the foregoing embodiments, for those skilled in the art, still may be used
To modify to the technical solution recorded in foregoing embodiments or carry out equivalent replacement to which part technical characteristic.
All within the spirits and principles of the present invention, any modification, equivalent replacement, improvement and so on should be included in the present invention's
Within protection domain.
Claims (6)
1. a kind of MEMS pressure sensor based on information engineering, including protecting box (14) and micro-control switch (1), feature exists
In：The lower end inner surface of the protecting box (14) is installed with lever mount (5), and is provided with above lever mount (5)
Lever (6), the outer surface middle position of the lever (6) are provided with No.1 movable axis (4), and lever (6) is lived by No.1
Moving axis (4) is flexibly connected with lever mount (5), and the upper end outer surface side of the lever (6) is installed with firm banking
(3), and lever (6) upper end outer surface opposite side is provided with spring pedestal (7), and two are provided with above the spring pedestal (7)
Number movable axis (10) and spring (8), and the outer surface middle position of No. two movable axis (10) is provided with clamping rings (9), institute
The upper end inner surface for stating protecting box (14) is installed with movable axis guide pad (11), and the micro-control switch (1) is fixedly installed in
The side inner surface of protecting box (14), and the lower end inner surface of micro-control switch (1) is provided with fixed frame (18), the fixed frame
(18) centre position is provided with iron core guiding axis (16), and iron core guiding axis (16) is internally provided with electromagnetic core (2), institute
The upper end outer surface for stating iron core guiding axis (16) is provided with insulation boxcar (17), and the side inner surface for the boxcar (17) that insulate
Fixed baffle (19) is provided with, the lower end outer surface of the fixed baffle (19) is provided with foil gauge (20), the insulation conversion
The front inner surface of box (17) is provided with signal amplifier (21), is provided at the outer surface edge position of the protecting box (14)
Fastener (15).
2. a kind of MEMS pressure sensor based on information engineering according to claim 1, it is characterised in that：Described No. two
Movable axis (10) is through movable axis guide pad (11) and protecting box (14), and No. two movable axis (10) pass through spring (8) and guarantor
Box (14) is protected to be flexibly connected.
3. a kind of MEMS pressure sensor based on information engineering according to claim 1, it is characterised in that：The electromagnetism
Iron core (2) is through iron core guiding axis (16), and electromagnetic core (2) is living with insulation boxcar (17) by iron core guiding axis (16)
Dynamic connection.
4. a kind of MEMS pressure sensor based on information engineering according to claim 1, it is characterised in that：The insulation
The outer surface of boxcar (17) is provided with data line (12), and insulate boxcar (17) by data line (12) with it is micro-
Control switch (1) is electrically connected.
5. a kind of MEMS pressure sensor based on information engineering according to claim 1, it is characterised in that：The insulation
The opposite side inner surface of boxcar (17) is provided with wire interface (22), and the both sides of the signal amplifier (21), which are equipped with, leads
Line, and signal amplifier (21) is electrically connected by conducting wire and wire interface (22).
6. a kind of MEMS pressure sensor based on information engineering according to claim 1-4, it is characterised in that：The guarantor
The front inner surface of shield box (14) is installed with signal processor (13), and the micro-control switch (1) passes through data line
(12) it is electrically connected with signal processor (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810109925.8A CN108254108B (en) | 2018-02-05 | 2018-02-05 | MEMS pressure sensor based on information engineering |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810109925.8A CN108254108B (en) | 2018-02-05 | 2018-02-05 | MEMS pressure sensor based on information engineering |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108254108A true CN108254108A (en) | 2018-07-06 |
| CN108254108B CN108254108B (en) | 2024-06-28 |
Family
ID=62743723
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810109925.8A Active CN108254108B (en) | 2018-02-05 | 2018-02-05 | MEMS pressure sensor based on information engineering |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108254108B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB787812A (en) * | 1954-07-15 | 1957-12-18 | G M Giannini & Co Inc | Improvements in or relating to pressure transducers |
| CN206114850U (en) * | 2016-10-24 | 2017-04-19 | 浙江巨磁智能技术有限公司 | Succinct convenient current sensor chip test fixture |
| CN106644244A (en) * | 2016-11-17 | 2017-05-10 | 歌尔股份有限公司 | MEMS pressure sensor |
| CN206399564U (en) * | 2017-01-05 | 2017-08-11 | 南京凯基特电气有限公司 | A kind of wireless pressure sensor |
| CN207964136U (en) * | 2018-02-05 | 2018-10-12 | 安徽微泰导航电子科技有限公司 | A kind of MEMS pressure sensor based on information engineering |
-
2018
- 2018-02-05 CN CN201810109925.8A patent/CN108254108B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB787812A (en) * | 1954-07-15 | 1957-12-18 | G M Giannini & Co Inc | Improvements in or relating to pressure transducers |
| CN206114850U (en) * | 2016-10-24 | 2017-04-19 | 浙江巨磁智能技术有限公司 | Succinct convenient current sensor chip test fixture |
| CN106644244A (en) * | 2016-11-17 | 2017-05-10 | 歌尔股份有限公司 | MEMS pressure sensor |
| CN206399564U (en) * | 2017-01-05 | 2017-08-11 | 南京凯基特电气有限公司 | A kind of wireless pressure sensor |
| CN207964136U (en) * | 2018-02-05 | 2018-10-12 | 安徽微泰导航电子科技有限公司 | A kind of MEMS pressure sensor based on information engineering |
Non-Patent Citations (1)
| Title |
|---|
| 李科峰;: "基于压力传感器、光敏传感器的车库车辆自动计数系统", 电子世界, no. 04 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108254108B (en) | 2024-06-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN207964136U (en) | A kind of MEMS pressure sensor based on information engineering | |
| CN206787480U (en) | A kind of structure improved magnetostrictive displacement sensor | |
| CN108061849A (en) | A kind of circuit board testing system and its test method | |
| CN203479748U (en) | Nondestructive integrated detection system for damage of steel wire and aluminum stranded wire of power transmission line | |
| CN108254108A (en) | A kind of MEMS pressure sensor based on information engineering | |
| CN207816506U (en) | A kind of precision pressure sensor | |
| CN206387444U (en) | A kind of electric power detecting instrument | |
| CN206480518U (en) | A kind of breaker Mume flower contact contacting travel intelligent detection device | |
| CN208060298U (en) | A kind of plastic tube crush test device | |
| CN206849666U (en) | A kind of mechanism of measuring transformer top-oil temperature | |
| CN106270283A (en) | A kind of forcing press punching press tonnage monitoring device | |
| CN203455228U (en) | Normal-temperature long-term stress performance inspection device of carbon fiber composite cable core | |
| CN206057483U (en) | Sucked type live detection equipment ultrasonic sensor probe | |
| CN205826000U (en) | Pressure controllable type battery assembling kit | |
| CN108871251A (en) | It is equipped with the coordinate measuring set of anticollision dust-extraction unit | |
| CN209672076U (en) | A kind of gas pipeline leakage detection device | |
| CN206804702U (en) | A kind of circuit board detecting equipment easy to operation | |
| CN209196298U (en) | A kind of U-tube folder | |
| CN201811696U (en) | Automatic unfastening device for sensor | |
| CN205748756U (en) | Torque arm formula tension pick-up | |
| CN206533018U (en) | A kind of quick electrical connection mechanism of flexible cable | |
| CN105717192A (en) | Sensor for online and high-temperature eddy current monitoring | |
| CN204903081U (en) | Vacuum sensor device | |
| CN201569521U (en) | Expansion internal stress measuring sensor for concrete wall body | |
| CN205449887U (en) | Online high temperature vortex monitor sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |