CN108239764A - A kind of vacuum coating equipment - Google Patents
A kind of vacuum coating equipment Download PDFInfo
- Publication number
- CN108239764A CN108239764A CN201810345353.3A CN201810345353A CN108239764A CN 108239764 A CN108239764 A CN 108239764A CN 201810345353 A CN201810345353 A CN 201810345353A CN 108239764 A CN108239764 A CN 108239764A
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- China
- Prior art keywords
- vacuum coating
- electrically connected
- output terminal
- plc
- multiplier
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- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 35
- 238000004804 winding Methods 0.000 claims abstract description 5
- 238000006243 chemical reaction Methods 0.000 claims description 14
- 238000002955 isolation Methods 0.000 claims description 7
- 230000005611 electricity Effects 0.000 claims description 3
- 238000004891 communication Methods 0.000 abstract description 5
- 238000010438 heat treatment Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 4
- 230000033228 biological regulation Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 230000001429 stepping effect Effects 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Control Of Ac Motors In General (AREA)
Abstract
The invention belongs to vacuum coating equipment technical fields, disclose a kind of vacuum coating equipment, including sequentially connected winding module and vacuum coating module;It winds module and includes wire feeding centrol device;Vacuum coating module includes baking control device, and baking control device includes the control unit of temperature controller and multiple output terminals for being connected in temperature controller in parallel;Control unit includes the 2nd PLC, multiplier and heater strip power governor;The output terminal of 2nd PLC and the output terminal of temperature controller are electrically connected respectively with the first input port of multiplier and the second input port;Heater strip power governor is electrically connected with the output port of multiplier.The present invention solves the control of wire feeding motor and driving problems in vacuum coating up- coiler, reduces the cost of wire feeding centrol device;And the connecting element by the way that multiplier to be used as to temperature controller and the analog signal of the 2nd PLC, it is entirely avoided Conventional communication mode controls the out-of-control phenomenon of appearance, and longtime running is reliable and stable.
Description
Technical field
The invention belongs to vacuum coating equipment technical fields, and in particular to a kind of vacuum coating equipment.
Background technology
The wire feed of up- coiler in existing vacuum coating equipment is realized using motor, controls the control device packet of motor
It includes sequentially connected PLC, D/A module or fast frequency module and frequency converter, frequency converter is electrically connected with motor.Its advantage is simple
It is convenient, shortcoming be D/A module or fast frequency module cost and maintenance cost it is all very high;And the driving of two kinds of modules
Scarce capacity, it is necessary to the driving circuit outside plus.
And existing vacuum coating equipment usually needs to go control multichannel heating single simultaneously with temperature sensor signal all the way
Member, and each heating unit can be with separately adjustable power.Existing baking control device is realized using communication modes, because it is deposited
Phenomena such as interruption is susceptible in poor anti-interference, communication and is crashed, therefore reliability is poor.
Invention content
It is a kind of highly reliable with low cost present invention aims at providing in order to solve the above problem of the existing technology
Property wire feeding centrol device and reliable and stable baking control device vacuum coating equipment.The present invention is by setting controller and lock
Phase loop circuit solves the control of wire feeding motor and driving problems in vacuum coating up- coiler, reduces wire feeding centrol device
Cost;And the connecting element by the way that multiplier to be used as to temperature controller and the analog signal of the 2nd PLC, it is entirely avoided tradition
The out-of-control phenomenon that communication modes control occurs, longtime running are reliable and stable.
The technical solution adopted in the present invention is:
A kind of vacuum coating equipment, including sequentially connected winding module and vacuum coating module;It winds module and includes wire feed
Control device;Vacuum coating module includes baking control device, and the wire feeding centrol device includes the first PLC, the first isolation is driven
Dynamic circuit, controller, phase-locked loop circuit, the second isolated drive circuit, frequency converter and variable-frequency motor;
First PLC is electrically connected by the first isolated drive circuit with the first input port of the controller;
First output port of the controller is electrically connected with the input terminal of the phase-locked loop circuit, and the of the controller
Two input ports are electrically connected with the output terminal of the phase-locked loop circuit, and the second output terminal mouth of the controller passes through the second isolation
Driving circuit is electrically connected with the input terminal of the frequency converter;
The output terminal of the frequency converter is electrically connected with the input terminal of variable-frequency motor;
The baking control device includes temperature controller and multiple output terminals for being connected in the temperature controller in parallel
Control unit;
Described control unit includes the 2nd PLC, multiplier and heater strip power governor;The output terminal and temperature of 2nd PLC
The output terminal of degree controller is electrically connected respectively with the first input port of multiplier and the second input port;Heater strip power regulation
Device is electrically connected with the output port of multiplier.
Further, the wire feeding centrol device further includes phase-locked loop circuit;The input terminal of the phase-locked loop circuit and defeated
Outlet is electrically connected respectively with the first port of controller and second port.
Further, described control unit further includes the first follower;The input terminal of first follower is defeated with the 2nd PLC's
Outlet is electrically connected, and the output terminal of the second follower is electrically connected with the first input port of multiplier.
Further, described control unit further includes anti-surge voltage circuit, the input terminal of anti-surge voltage circuit and
The output terminal electrical connection of two PLC, the output terminal of anti-surge voltage circuit are electrically connected with the input terminal of the first follower.
Further, described control unit further includes the second follower;The input terminal of second follower and multiplier it is defeated
Exit port is electrically connected, and the output terminal of the second follower is electrically connected with the input terminal of heater strip power governor.
Further, described control unit further includes I/V conversion circuits;The input terminal of I/V conversion circuits is controlled with temperature
The output terminal electrical connection of device, the output terminal of I/V conversion circuits are electrically connected with the second input port of multiplier.
Further, the controller is CPLD.
Further, first isolated drive circuit is Darlington transistor.
Further, second isolated drive circuit is photo-coupler.
Beneficial effects of the present invention are:
The present invention is by setting controller and phase-locked loop circuit, the control for solving wire feeding motor in vacuum coating up- coiler
And driving problems, reduce the cost of wire feeding centrol device;And the mould by the way that multiplier to be used as to temperature controller and the 2nd PLC
Intend the connecting element of signal, it is entirely avoided Conventional communication mode controls the out-of-control phenomenon of appearance, and longtime running is reliable and stable;And
And control unit can control multichannel heating unit with arbitrary extension;Secondly, by setting phase-locked loop circuit, ensure controller
It is synchronous with output frequency to input frequency, improves the control accuracy and reliability of wire feeding centrol device;By setting first with
With device, impedance transformation is realized;By setting the second follower, the driving force of multiplier is improved;Also, by setting wave resistance
Potential circuit is gushed, surge voltage is inhibited in the baking acceptable threshold range of control device, ensures that baking control device is
Make by surge voltage interference also can normal operation, and can prevent baking control device in circuit components damage.
Description of the drawings
Fig. 1 is the control block diagram of the wire feeding centrol device in a kind of vacuum coating equipment of the present invention;
Fig. 2 is the control block diagram of the baking control device in a kind of vacuum coating equipment of the present invention.
Specific embodiment
Below in conjunction with the accompanying drawings and specific embodiment is the present invention further explaination.
Embodiment 1:
As shown in Figs. 1-2, the present embodiment provides a kind of vacuum coating equipment, including sequentially connected winding module and Vacuum Deposition
Film module;It winds module and includes wire feeding centrol device;Vacuum coating module includes baking control device, the wire feeding centrol device
Including the first PLC, the first isolated drive circuit, controller, phase-locked loop circuit, the second isolated drive circuit, frequency converter and frequency conversion
Motor;
First PLC is electrically connected by the first isolated drive circuit with the first input port of the controller;
First output port of the controller is electrically connected with the input terminal of the phase-locked loop circuit, and the of the controller
Two input ports are electrically connected with the output terminal of the phase-locked loop circuit, and the second output terminal mouth of the controller passes through the second isolation
Driving circuit is electrically connected with the input terminal of the frequency converter;
The output terminal of the frequency converter is electrically connected with the input terminal of variable-frequency motor;
The baking control device includes temperature controller and multiple output terminals for being connected in the temperature controller in parallel
Control unit;
Described control unit includes the 2nd PLC, multiplier and heater strip power governor;The output terminal and temperature of 2nd PLC
The output terminal of degree controller is electrically connected respectively with the first input port of multiplier and the second input port;Heater strip power regulation
Device is electrically connected with the output port of multiplier.
As shown in Fig. 2, in the present embodiment, there are two described control unit settings.Aobvious and opinion, control unit can be with
There are three, four, even more, particular number is determined according to on-site actual situations.The temperature controller, multiplies the 2nd PLC
Prior art realization may be used in musical instruments used in a Buddhist or Taoist mass and heater strip power governor.In the present embodiment, multiply described in the multiplier use
Musical instruments used in a Buddhist or Taoist mass is realized using AD633JR chips.
Operation principle:
The control principle of wire feeding centrol device:
Address and data port of the I/O modules of first PLC as wire feeding centrol device, the output signal of the first PLC is through
Enter controller after the driving of one isolated drive circuit, controller will enter phaselocked loop after the output signal filter shape of the first PLC
Circuit carries out phase lock control, and then the signal for completing phase lock control is entered frequency conversion by CPLD through the second isolated drive circuit
Device, frequency converter is according to the rotating speed of the FREQUENCY CONTROL wire feeding motor of received signal.Preferably, in the present embodiment, the fundamental frequency of CPLD
For 100Hz, make final output frequency after the processing of CPLD internal logics with 10Hz steppings.The phase-locked loop circuit may be used existing
There is a technology realization, in the present embodiment, the phase-locked loop circuit is HEF4046BT chips.Existing skill may be used in first PLC
Art is realized.First isolated drive circuit may be used the prior art and realize, in the present embodiment, the first isolation drive electricity
Road is Darlington transistor.Further, first isolated drive circuit is ULN2004 chips.The controller may be used
The prior arts such as FPGA or CPLD are realized, since the driving of FPGA is weaker, in the present embodiment, the controller is CPLD.
Further, the controller is LC4256V75TN100-10I chips.Second isolated drive circuit may be used existing
Technology is realized, in the present embodiment, second isolated drive circuit is photo-coupler.Further, second isolation drive
Circuit is TLP250 chips.
Toast the control principle of control device:
D/A module linear changing transmission of the control instruction through the 2nd PLC of host computer (not shown) such as PC or man-machine interface
Into multiplier;Second input port of the signal through multiplier of temperature controller output enters multiplier, and this completes temperature
The simulation trial that degree letter sample number is multiplied with control instruction;Then the output terminal of multiplier gives the signal transmission after multiplication to heating
Silk power governor, so as to control the heating power of each heater strip.
Embodiment 2:
As shown in Figs. 1-2, a kind of vacuum coating equipment of the present embodiment, including sequentially connected winding module and vacuum coating
Module;It winds module and includes wire feeding centrol device;Vacuum coating module includes baking control device, the wire feeding centrol device packet
Include the first PLC, the first isolated drive circuit, controller, phase-locked loop circuit, the second isolated drive circuit, frequency converter and variable-frequency electric
Machine;
First PLC is electrically connected by the first isolated drive circuit with the first input port of the controller;
First output port of the controller is electrically connected with the input terminal of the phase-locked loop circuit, and the of the controller
Two input ports are electrically connected with the output terminal of the phase-locked loop circuit, and the second output terminal mouth of the controller passes through the second isolation
Driving circuit is electrically connected with the input terminal of the frequency converter;
The output terminal of the frequency converter is electrically connected with the input terminal of variable-frequency motor;
The baking control device includes temperature controller and multiple output terminals for being connected in the temperature controller in parallel
Control unit;
Described control unit includes the 2nd PLC, multiplier and heater strip power governor;The output terminal and temperature of 2nd PLC
The output terminal of degree controller is electrically connected respectively with the first input port of multiplier and the second input port;Heater strip power regulation
Device is electrically connected with the output port of multiplier.
As shown in Fig. 2, in the present embodiment, described control unit further includes I/V conversion circuits;The input of I/V conversion circuits
End is electrically connected with the output terminal of temperature controller, and the output terminal of I/V conversion circuits is electrically connected with the second input port of multiplier.
The I/V conversion circuits are realized using the prior art.
Preferably, in order to realize impedance transformation and improve the driving force of multiplier, as shown in Fig. 2, described control unit
Further include the first follower and the second follower;The input terminal of first follower is electrically connected with the output terminal of the 2nd PLC, second with
It is electrically connected with the output terminal of device with the first input port of multiplier.The input terminal of second follower and the output port of multiplier
Electrical connection, the output terminal of the second follower are electrically connected with the input terminal of heater strip power governor.First follower and
Two followers may be used the prior art and realize, in the present embodiment, the first follower and the second follower use LM358 cores
Piece is realized.
Further, for the acceptable threshold range of baking control device by surge voltage inhibition in the present embodiment
It is interior, ensure baking control device even if interfere by surge voltage can normal operation, and can prevent from toasting control device
In circuit components damage, in the present embodiment, described control unit further includes anti-surge voltage circuit, anti-surge voltage circuit
Input terminal be electrically connected with the output terminal of the 2nd PLC, the input terminal of the output terminal of anti-surge voltage circuit and the first follower electricity
Connection.Available circuit realization may be used in the anti-surge voltage circuit.
Operation principle:
The control principle of wire feeding centrol device:
Address and data port of the I/O modules of first PLC as wire feeding centrol device, the output signal of the first PLC is through
Enter controller after the driving of one isolated drive circuit, controller will enter phaselocked loop after the output signal filter shape of the first PLC
Circuit carries out phase lock control, and then the signal for completing phase lock control is entered frequency conversion by CPLD through the second isolated drive circuit
Device, frequency converter is according to the rotating speed of the FREQUENCY CONTROL wire feeding motor of received signal.Preferably, in the present embodiment, the fundamental frequency of CPLD
For 100Hz, make final output frequency after the processing of CPLD internal logics with 10Hz steppings.It shows and opinion, in the present embodiment
Wire feeding centrol device can arbitrarily cascade, so as to control multiple wire feeding motors, so as to substantially reduce wire feeding centrol device
Cost, and increase the control accuracy and reliability of wire feeding centrol device.
Toast the control principle of control device:
D/A module linear changing transmission of the control instruction through the 2nd PLC of host computer such as PC or man-machine interface simultaneously carry out Anti-surging
Enter multiplier through the first follower after potential circuit processing;The 4-20mA pick-up signals of temperature controller output are converted through I/V
Become 0-10V signals after circuit conversion and enter multiplier, this completes the simulations that temperature letter sample number is multiplied with control instruction
Operation;Then the signal after multiplication is transferred to heater strip power governor by the output terminal of multiplier through the second follower, so as to
Control the heating power of each heater strip.
The present invention is not limited to above-mentioned optional embodiment, anyone can show that other are each under the enlightenment of the present invention
The product of kind form.Above-mentioned specific embodiment should not be understood the limitation of pairs of protection scope of the present invention, protection of the invention
Range should be subject to what is defined in claims, and specification can be used for interpreting the claims.
Claims (8)
1. a kind of vacuum coating equipment, including sequentially connected winding module and vacuum coating module;It winds module and includes wire feed control
Device processed;Vacuum coating module includes baking control device, it is characterised in that:The wire feeding centrol device includes the first PLC, the
One isolated drive circuit, controller, phase-locked loop circuit, the second isolated drive circuit, frequency converter and variable-frequency motor;
First PLC is electrically connected by the first isolated drive circuit with the first input port of the controller;
First output port of the controller is electrically connected with the input terminal of the phase-locked loop circuit, and the second of the controller is defeated
Inbound port is electrically connected with the output terminal of the phase-locked loop circuit, and the second output terminal mouth of the controller passes through the second isolation drive
Circuit is electrically connected with the input terminal of the frequency converter;
The output terminal of the frequency converter is electrically connected with the input terminal of variable-frequency motor;
The baking control device includes the control of temperature controller and multiple output terminals for being connected in the temperature controller in parallel
Unit processed;
Described control unit includes the 2nd PLC, multiplier and heater strip power governor;The output terminal of 2nd PLC and temperature control
The output terminal of device processed is electrically connected respectively with the first input port of multiplier and the second input port;Heater strip power governor with
The output port electrical connection of multiplier.
2. a kind of vacuum coating equipment according to claim 1, it is characterised in that:Described control unit further includes first and follows
Device;The input terminal of first follower is electrically connected with the output terminal of the 2nd PLC, the output terminal of the second follower and the first of multiplier
Input port is electrically connected.
3. a kind of vacuum coating equipment according to claim 2, it is characterised in that:Described control unit further includes Anti-surging electricity
Volt circuit, the input terminal of anti-surge voltage circuit are electrically connected with the output terminal of the 2nd PLC, the output terminal of anti-surge voltage circuit with
The input terminal electrical connection of first follower.
4. a kind of vacuum coating equipment according to claim 1, it is characterised in that:Described control unit further includes second and follows
Device;The input terminal of second follower is electrically connected with the output port of multiplier, output terminal and the heater strip power of the second follower
The input terminal electrical connection of adjuster.
5. a kind of vacuum coating equipment according to claim 1, it is characterised in that:Described control unit further includes I/V conversions
Circuit;The input terminal of I/V conversion circuits is electrically connected with the output terminal of temperature controller, the output terminal and multiplication of I/V conversion circuits
The second input port electrical connection of device.
6. a kind of vacuum coating equipment according to claim 1, it is characterised in that:The controller is CPLD.
7. a kind of vacuum coating equipment according to claim 1, it is characterised in that:First isolated drive circuit is up to woods
Pause pipe.
8. a kind of vacuum coating equipment according to claim 1, it is characterised in that:Second isolated drive circuit is optocoupler
Clutch.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201810345353.3A CN108239764B (en) | 2018-04-17 | 2018-04-17 | Vacuum coating machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810345353.3A CN108239764B (en) | 2018-04-17 | 2018-04-17 | Vacuum coating machine |
Publications (2)
Publication Number | Publication Date |
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CN108239764A true CN108239764A (en) | 2018-07-03 |
CN108239764B CN108239764B (en) | 2024-03-12 |
Family
ID=62699306
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Application Number | Title | Priority Date | Filing Date |
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CN201810345353.3A Active CN108239764B (en) | 2018-04-17 | 2018-04-17 | Vacuum coating machine |
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101638775A (en) * | 2009-08-26 | 2010-02-03 | 河南中光学集团有限公司 | Vacuum coater integrated control system |
CN201648506U (en) * | 2009-08-19 | 2010-11-24 | 河南中光学集团有限公司 | Baking device for optical film coater |
CN203904445U (en) * | 2014-04-18 | 2014-10-29 | 芜湖市德宝新材料股份有限公司 | Synchronous wire feeding system for coating machine |
CN208055460U (en) * | 2018-04-17 | 2018-11-06 | 成都国泰真空设备有限公司 | A kind of vacuum coating equipment |
-
2018
- 2018-04-17 CN CN201810345353.3A patent/CN108239764B/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201648506U (en) * | 2009-08-19 | 2010-11-24 | 河南中光学集团有限公司 | Baking device for optical film coater |
CN101638775A (en) * | 2009-08-26 | 2010-02-03 | 河南中光学集团有限公司 | Vacuum coater integrated control system |
CN203904445U (en) * | 2014-04-18 | 2014-10-29 | 芜湖市德宝新材料股份有限公司 | Synchronous wire feeding system for coating machine |
CN208055460U (en) * | 2018-04-17 | 2018-11-06 | 成都国泰真空设备有限公司 | A kind of vacuum coating equipment |
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