CN108229055A - The rigidity air-flotation type vibrating isolation system optimum design method such as three-dimensional that one germplasm has just overlapped - Google Patents
The rigidity air-flotation type vibrating isolation system optimum design method such as three-dimensional that one germplasm has just overlapped Download PDFInfo
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- CN108229055A CN108229055A CN201810082315.3A CN201810082315A CN108229055A CN 108229055 A CN108229055 A CN 108229055A CN 201810082315 A CN201810082315 A CN 201810082315A CN 108229055 A CN108229055 A CN 108229055A
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Abstract
The rigidity air-flotation type vibrating isolation system optimum design method such as three-dimensional just overlapped the present invention provides a germplasm, including step：(1) vibration control system design parameter is determined；(2) air-flotation type vibration control system tentative programme is determined；(3) the variable finite element variate model of design parameter is established according to design parameter, with suitable precision grid division, realizes and global finite element Full Parameterized is modeled；(4) modal calculation；(5) desirable design parameters model is determined：Whether the relevant parameter of air-flotation type vibration control system mode for judging to obtain by modal calculation meets certain relationship, the design parameter of air-flotation system at this time is recorded if meeting, if being unsatisfactory for return to step (2) modification air-flotation type vibration control system tentative programme；(6) ideal model amendment：According to the value range of design parameter in Practical Project and meet the economic goal of minimum consuming, than amendment design parameter after choosing so that it is determined that the final scheme of vibration control system.
Description
Technical field
The present invention relates to a kind of design method of vibrating isolation system, particularly a kind of air-flotation type vibrating isolation system optimization design side
Method.
Background technology
According to vibration control principle difference, active control and passive control can be divided into.Active vibration control refers to
During vibration control, the structure or system vibration that are detected according to sensor, using certain control strategy, by counting in real time
It calculates, driving actuator applies certain power or torque to structure or system, with the vibration of control structure or system.Passively control
Device is due to having the advantages of simple structure and easy realization, at present both at home and abroad generally using air spring as passive vibration isolation element.For passive
Vibrating isolation system, in order to obtain to the various good vibration isolating effects of disturbance, the natural frequency of vibration should be as small as possible.But it anticipates from reality
From justice, the natural frequency of vibration is difficult to be reduced to below 1Hz.Therefore passive vibration isolation system is limited to the control effect of micro-vibration, and
And for the direct interference on platform, passive vibration isolation system is substantially helpless, therefore, to precision assembly asymmetric arrangement,
Extensive air spring uneven group-division, special-shaped branch mode ginseng are shaken the large scale special-shaped air floating platform passive vibration isolation works such as proportion is higher
How journey in the case where primary condition is relatively limited, quickly realizes that efficient overall design is not disclose in the prior art
Corresponding technical solution, those skilled in the art are more likely to abandon passive control device to transfer to invest active control device.
At present, traditional technology method usually only considers to reduce air-flotation type vibration when for the vibration control of precision assembly
The fundamental frequency of control system when frequency meets design requirement, reaches damping requirements by regulating system damping ratio, may cause
System mode is chaotic, and simultaneity factor stability is poor.So as to which conventional method has the disadvantages that：
(1) traditional technology method does not consider that system three-way rigidity is equal usually when for precision assembly vibration control, only
Consider to reduce fundamental frequency, blindly reduce system fundamental frequency, first three rank mode fundamental frequency of system difference is larger in actual use, leads to system
Mode is chaotic, and damping efficiency is relatively low or even will appear the phenomenon that high order mode ginseng shakes, causes high order resonance.
(2) traditional technology method generally use control system fundamental frequency, the method for adjusting damping ratio vibration damping.It is bigger when damping
When, system stiffness is larger, and system fundamental frequency is caused to increase, it is difficult to meet the requirement that precision equipment fundamental frequency is less than 1Hz；It damps smaller
When, system stability is poor, and damping efficiency is low.
Invention content
In order to overcome drawbacks described above of the existing technology, design concept of the invention is for precision assembly because of operation
Environmental demand uses air-flotation type micro-vibration control design case method, based on theory of vibration isolation, passive type air supporting system when just being overlapped using matter
The dynamic characteristic of system, establishes Mode Shape quality and adds up and participate in coefficient and first three dual quantization of rank basic frequency mutual ratios relationship
One infinite degrees of freedom dynamical system is designed to a similar simple substance point single-mode system, finally realizes gas by discrimination technology
Floating vibrating isolation system is in three directions equal stiffness or close on two levels and a vertical direction, is easy to fill precision
Standby micro-vibration environment is efficiently controlled.
The rigidity air-flotation type vibrating isolation system such as three-dimensional just overlapped the purpose of the present invention is to provide a germplasm optimization design side
Method includes the following steps：
(1) design parameter determines：Allow vibration values, architecture structure form and foundation true according to load, precision equipment
Determine vibration control system design parameter；
(2) air-flotation type vibration control system tentative programme is determined, quantity, arrangement and model including air spring；
(3) parametric modeling：The variable finite element variate model of design parameter is established according to design parameter, with suitable essence
Grid division is spent, realizes and global finite element Full Parameterized is modeled.
(4) modal calculation：The relevant parameter of air-flotation type vibration control system mode is calculated；
(5) desirable design parameters model is determined：Judge the air-flotation type vibration control system mode obtained by modal calculation
Whether relevant parameter meets certain relationship, if meeting certain relationship, records the design parameter of air-flotation system at this time,
If being unsatisfactory for certain relationship, return to step (2) modification air-flotation type vibration control system tentative programme；
(6) ideal model amendment：According to the value range of design parameter in Practical Project and meet the warp of minimum consuming
Ji target, than amendment design parameter reasonable after choosing, so that it is determined that the final scheme of vibration control system.
Preferably, the design parameter of the step (1) includes：The basic thickness h of air-flotation system high rigidity platform1, air supporting
The T-shaped sagging thickness h of system high rigidity platform2And the basic length of side w of air-flotation system high rigidity platform, quality and/or rigidity.
Preferably, the step (2) includes：
(2-1) according to needed for determining precision equipment quality air spring quantity；
(2-2) determines air spring arrangement according to system platform top plate；
(2-3) selects the model of air spring according to the implementation experience of Sinilar engineering.
Preferably, suitable precision described in the step (3) is the mode meter represented using adjacent mesh refinement twice
It calculates basic frequency value difference in result and is no more than 0.1%, then it is assumed that the grid precision of system meets suitable precision.
Preferably, the relevant parameter of mode described in the step (4) includes：First three first order mode x1、x2、x3And its frequency
Value f1, f2, f3, vibration shape modal participating mass ratio δ1, δ2, δ3。
Preferably, the relevant parameter of the mode for obtaining the step (4) includes：It is special to the intrinsic power of air floating platform
Property, partial differential equation are solved using the separation of variable, obtain air-flotation type first three first order mode of vibration control system x1、x2、x3And its frequency
Rate value f1, f2, f3, vibration shape modal participating mass ratio δ1, δ2, δ3。
Preferably, relationship certain in the step (5) includes：δ1+δ2+δ3＞ 95% and | f1/f2- 1 | ＜ 5%, |
f1/f3- 1 | ＜ 5%, | f2/f3- 1 | ＜ 5%, wherein δ1, δ2, δ3Represent air-flotation type vibration control system first three first order mode quality ginseng
With coefficient, f1, f2, f3Represent first three order frequency value of air-flotation type vibration control system.
Preferably, the step (6) includes：According to the basic thickness h of air-flotation system high rigidity platform in Practical Project1,
The T-shaped sagging thickness h of air-flotation system high rigidity platform2And the value range of the basic length of side w of air-flotation system high rigidity platform,
And meet the economic goal of minimum consuming, than the basic thickness of amendment design parameter air-flotation system high rigidity platform reasonable after choosing
h1, the T-shaped sagging thickness h of air-flotation system high rigidity platform2And the basic length of side w of air-flotation system high rigidity platform, so that it is determined that
The final scheme of vibration control system.
Using the optimum design method of the present invention, following technique effect can be reached：
(1) vibrating isolation system mass centre overlaps with center of rigidity.The structure of feature has just been overlapped with matter, stability is good,
And stress and deformation are all than more uniform.The design object is applied in air supporting vibration isolation system, and system can be made integrally to be translatable mode
The accumulated coefficient of the vibration shape obtains high value, substantially reduces the ginsengs such as such as torsional deflection of the non-translational mode shape of system, bending vibration shape and shakes tribute
It offers.
(2) it is easily achieved unidirectional design and obtains the rigidity characteristics such as three-dimensional.The component of air supporting vibration isolation system is air spring,
It is designed by the selection of single branch air spring and combinatory analysis, easily by the design to air spring vertical rigidity, utilizes air
Spring diaphragm architectural characteristic obtains the effect of the rigidity such as three directions.Moreover, because conventional earth pulsation peace stability ambient vibration lotus
The order of magnitude carried in three directions is essentially identical, and Three-direction deformation is consistent if system designs, and vibration damping or energy consumption are horizontal consistent,
Be conducive to the synthesis damping capacity of system improving system.
(3) equivalent simple substance point single-mode system is conducive to system interference identification.Design has just been overlapped by matter, vibration has been controlled
System processed is equivalent to simple substance point system with 3 degrees of freedom, and system three-way rigidity is equal, first three order frequency is close, joins contribution one of shaking
It causes, system approximation has smooth unimodal frequency response function characteristic, vibration control is more convenient, is in simple substance point single-mode system
System is disturbed easily diagnosis identification.
According to the accompanying drawings to the detailed description of the specific embodiment of the invention, those skilled in the art will be brighter
The above and other objects, advantages and features of the present invention.
Description of the drawings
Some specific embodiments of detailed description of the present invention by way of example rather than limitation with reference to the accompanying drawings hereinafter.
Identical reference numeral denotes same or similar component or part in attached drawing.It should be appreciated by those skilled in the art that these
What attached drawing was not necessarily drawn to scale.The target and feature of the present invention considers that the description below in conjunction with attached drawing will be apparent from,
In attached drawing：
Attached drawing 1 is the rigidity air-flotation type vibrating isolation system optimization design sides such as the three-dimensional just overlapped according to the matter of the embodiment of the present invention
Method flow chart；
Attached drawing 2 is the air-flotation type vibration control system tentative programme according to the embodiment of the present invention.
Specific embodiment
Referring to attached drawing 1, represent that the rigidity air-flotation type vibrating isolation system such as three-dimensional that matter according to embodiments of the present invention has just overlapped is excellent
Change design method flow chart, include the following steps：
(1) design parameter determines：Allow vibration values, architecture structure form and foundation true according to load, precision equipment
Determine vibration control system design parameter, design parameter includes：The basic thickness h of air-flotation system high rigidity platform1, air-flotation system height
The T-shaped sagging thickness h of rigid platfor2And the basic length of side w of air-flotation system high rigidity platform, quality and/or rigidity；
(2) air-flotation type vibration control system tentative programme is determined, as shown in Figure 2 the quantity including air spring, arrangement side
Formula and model, including：
(2-1) according to needed for determining precision equipment quality air spring quantity；
(2-2) determines air spring arrangement according to system platform top plate；
(2-3) selects the model of air spring according to the implementation experience of Sinilar engineering；
(3) parametric modeling：The variable finite element variate model of design parameter is established according to design parameter, with suitable essence
Grid division is spent, realizes and global finite element Full Parameterized is modeled, is represented in the present embodiment using adjacent mesh refinement twice
Basic frequency value difference is no more than 0.1% in FEM modal analysis and modal, then it is assumed that and the grid precision of system meets suitable precision, when
So, it is required that other criterions may be used according to design accuracy, as long as those skilled in the art's accreditation.
(4) modal calculation：It is calculated the relevant parameter of air-flotation type vibration control system mode, mode phase in the embodiment
The parameter of pass includes：First three first order mode x1、x2、x3And its frequency values f1, f2, f3, vibration shape modal participating mass ratio δ1, δ2, δ3, obtain
The relevant parametric technique of mode is the natural dynamics behaviors to air floating platform, solves partial differential equation using the separation of variable, obtains
Take first three first order mode of air-flotation type vibration control system x1、x2、x3And its frequency values f1, f2, f3, vibration shape modal participating mass ratio δ1, δ2,
δ3；
(5) desirable design parameters model is determined：Judge the air-flotation type vibration control system mode obtained by modal calculation
Whether relevant parameter meets certain relationship：δ1+δ2+δ3＞ 95% and | f1/f2- 1 | ＜ 5%, | f1/f3- 1 | ＜ 5%, |
f2/f3- 1 | ＜ 5%, wherein δ1, δ2, δ3Represent first three first order mode modal participating mass ratio of air-flotation type vibration control system, f1, f2, f3
It represents first three order frequency value of air-flotation type vibration control system, if meeting above-mentioned relation, records the design of air-flotation system at this time
Parameter, if being unsatisfactory for above-mentioned relation, return to step (2) modification air-flotation type vibration control system tentative programme；
(6) ideal model amendment：According to the basic thickness h of air-flotation system high rigidity platform in Practical Project1, air-flotation system
The T-shaped sagging thickness h of high rigidity platform2And the value range and satisfaction of the basic length of side w of air-flotation system high rigidity platform
The economic goal of minimum consuming, than the basic thickness h of amendment design parameter air-flotation system high rigidity platform reasonable after choosing1, air supporting
The T-shaped sagging thickness h of system high rigidity platform2And the basic length of side w of air-flotation system high rigidity platform, so that it is determined that vibration control
The final scheme of system processed.
The rigidity Designs works such as the air-flotation type vibrating isolation system three-dimensional just overlapped based on matter can be established by above-mentioned link synthesis
Skill by complicated infinite degrees of freedom engineering problem Efficient Conversion into effectively controllable simple substance point single-degree-of-freedom system, avoids system
There is torsional response.The art inventions can efficiently instruct air-flotation type passive vibration isolation system to design, and be easy to lifting system anti-vibration performance,
Conducive to the examination and analysis of stationarity interference signal during system maintenance.
Although the present invention is described by reference to specific illustrative embodiment, will not be by these embodiments
Restriction and only limited by accessory claim.It it should be understood by those skilled in the art that can be without departing from the present invention's
The embodiment of the present invention can be modified and be changed in the case of protection domain and spirit.
Claims (8)
1. the rigidity air-flotation type vibrating isolation system optimum design method such as three-dimensional that a germplasm has just overlapped, it is characterised in that including walking as follows
Suddenly：
(1) design parameter determines：Vibration values, architecture structure form and foundation is allowed to determine to shake according to load, precision equipment
Autocontrol system design parameter；
(2) air-flotation type vibration control system tentative programme is determined, quantity, arrangement and model including air spring；
(3) parametric modeling：The variable finite element variate model of design parameter is established according to design parameter, is drawn with suitable precision
Subnetting lattice are realized and global finite element Full Parameterized are modeled；
(4) modal calculation：The relevant parameter of air-flotation type vibration control system mode is calculated；
(5) desirable design parameters model is determined：Judge the air-flotation type vibration control system mode correlation obtained by modal calculation
Parameter whether meet certain relationship, if meeting certain relationship, the design parameter of air-flotation system at this time is recorded, if not
Meet certain relationship, then return to step (2) modification air-flotation type vibration control system tentative programme；
(6) ideal model amendment：According to the value range of design parameter in Practical Project and meet the economic mesh of minimum consuming
Mark, than amendment design parameter reasonable after choosing, so that it is determined that the final scheme of vibration control system.
2. the rigidity air-flotation type vibrating isolation system optimum design method such as three-dimensional that a germplasm according to claim 1 has just overlapped,
It is characterized in that the design parameter of the step (1) includes：The basic thickness h of air-flotation system high rigidity platform1, air-flotation system height
The T-shaped sagging thickness h of rigid platfor2And the basic length of side w of air-flotation system high rigidity platform, quality and/or rigidity.
3. the rigidity air-flotation type vibrating isolation system optimum design method such as three-dimensional that a germplasm according to claim 1 has just overlapped,
It is characterized in that the step (2) includes：
(2-1) according to needed for determining precision equipment quality air spring quantity；
(2-2) determines air spring arrangement according to system platform top plate；
(2-3) selects the model of air spring according to the implementation experience of Sinilar engineering.
4. the rigidity air-flotation type vibrating isolation system optimum design method such as three-dimensional that a germplasm according to claim 1 has just overlapped,
It is characterized in that suitable precision described in the step (3) is the FEM modal analysis and modal represented using adjacent mesh refinement twice
Middle basic frequency value difference is no more than 0.1%, then it is assumed that the grid precision of system meets suitable precision.
5. the rigidity air-flotation type vibrating isolation system optimum design method such as three-dimensional that a germplasm according to claim 1 has just overlapped,
It is characterized in that the relevant parameter of mode described in the step (4) includes：First three first order mode x1、x2、x3And its frequency values f1,
f2, f3, vibration shape modal participating mass ratio δ1, δ2, δ3。
6. the rigidity air-flotation type vibrating isolation system optimum design method such as three-dimensional that a germplasm according to claim 5 has just overlapped,
It is characterized in that the relevant parameter of the mode for obtaining the step (4) includes：To the natural dynamics behaviors of air floating platform, adopt
Partial differential equation are solved with the separation of variable, obtain air-flotation type first three first order mode of vibration control system x1、x2、x3And its frequency values
f1, f2, f3, vibration shape modal participating mass ratio δ1, δ2, δ3。
7. the rigidity air-flotation type vibrating isolation system optimum design method such as three-dimensional that a germplasm according to claim 1 has just overlapped,
It is characterized in that relationship certain in the step (5) includes：δ1+δ2+δ3＞ 95% and | f1/f2- 1 | ＜ 5%, | f1/f3-1
| ＜ 5%, | f2/f3- 1 | ＜ 5%, wherein δ1, δ2, δ3Represent first three first order mode modal participating mass ratio of air-flotation type vibration control system,
f1, f2, f3Represent first three order frequency value of air-flotation type vibration control system.
8. the rigidity air-flotation type vibrating isolation system optimum design method such as three-dimensional that a germplasm according to claim 1 has just overlapped,
It is characterized in that the step (6) includes：According to the basic thickness h of air-flotation system high rigidity platform in Practical Project1, air supporting system
The T-shaped sagging thickness h of system high rigidity platform2And the value range of the basic length of side w of air-flotation system high rigidity platform, Yi Jiman
The economic goal of the minimum consuming of foot, than the basic thickness h of amendment design parameter air-flotation system high rigidity platform reasonable after choosing1, gas
The T-shaped sagging thickness h of floating system high rigidity platform2And the basic length of side w of air-flotation system high rigidity platform, so that it is determined that vibration
The final scheme of control system.
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