CN108227410A - Develop adjuvant - Google Patents

Develop adjuvant Download PDF

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Publication number
CN108227410A
CN108227410A CN201810212622.9A CN201810212622A CN108227410A CN 108227410 A CN108227410 A CN 108227410A CN 201810212622 A CN201810212622 A CN 201810212622A CN 108227410 A CN108227410 A CN 108227410A
Authority
CN
China
Prior art keywords
sodium
development
ether
developer solution
glycol
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201810212622.9A
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Chinese (zh)
Inventor
冯献超
冯泽宪
唐瑞泽
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kunshan Changyou Electronic Materials Co Ltd
Original Assignee
Kunshan Changyou Electronic Materials Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kunshan Changyou Electronic Materials Co Ltd filed Critical Kunshan Changyou Electronic Materials Co Ltd
Priority to CN201810212622.9A priority Critical patent/CN108227410A/en
Publication of CN108227410A publication Critical patent/CN108227410A/en
Pending legal-status Critical Current

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Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26Processing photosensitive materials; Apparatus therefor
    • G03F7/30Imagewise removal using liquid means
    • G03F7/32Liquid compositions therefor, e.g. developers

Abstract

The invention discloses a kind of development adjuvants, are including following each component and each component weight percentage:Organic base:0.01~5%;Inorganic base:0.01~5%;Organic solvent:0.1~10%;Surfactant:0.01~5%;Water:Surplus.Present invention development adjuvant can prevent the generation of residue in dry film developing process, reduce metal covering pollution, promote product yield;Molten film amount can also be promoted, and then reduces developer solution dosage, reduces developer solution wastewater treatment capacity and production cost.

Description

Develop adjuvant
Technical field
The present invention relates to the development adjuvants in a kind of printing industry for metallic circuit.
Background technology
Direction with electronics industry to high speed, micromation is developed, and the requirement to packing density is also higher and higher.Figure Transfer process is an important link of printed circuit board production.Dry film experienced solvent type, half water-soluble since launch Property type to water-soluble type evolution.At present generally using material of the water-soluble dry film as pattern transfer.Water solubility is dry Film contains organic high molecular compound, and main component has:Film-forming resin, photo polymerization monomer, photoinitiator, plasticizer, tackifier, The ingredients such as hot polymerization inhibitor, colorant and solvent.The principle that dry film is shown is:Dry film is in exposure, small point containing unsaturated carbon bond Sub- monomer attack organic long-chain, formation cross-linked polymer can play shielding protection under the action of chain initiator in rear process Effect is to dissolve away no photosensitive film without causing to hinder to photosensitive part in development to photo polymerization dry film Evil can just obtain remarkable transition diagram in this way.
The developer solution of traditional water-soluble dry films is the natrium carbonicum calcinatum or solution of potassium carbonate of l~2%, is 20 in liquid temperature It works under conditions of~40 DEG C.But using sodium carbonate as developing powder existing for developer solution is slow, lack of homogeneity, easily The problems such as crossing aobvious plating.
Current water-soluble developer solution has higher surface tension, therefore, developer solution is difficult to fast when dry film develops Speed, uniformly spread on entire photopolymer layer, be easy to cause development is uneven, development not exclusively and part development is excessively etc. aobvious Shadow defect.Moreover, it to be formed when the organic polymer salt dissolved in developer solution can be accumulated gradually when saturation is precipitated in developer solution Insoluble organic substance eventually forms the residue of water-insoluble.Such residue is readily adsorbed in pixel region, generates non-development section The remaining of position particle or undissolved object, then be difficult to show accurate pattern.
In addition, in dry film developing process, the dry film developer solution of general 1000L can produce the pcb board of 200-600 ㎡, Each developing line discharges 2000L-3000L developer solutions once a day, and developer solution belongs to high-concentration waste water, and processing cost is high. In the developer solution way to manage of the prior art, daily 2000-3000L developer solutions and 15000L washing waters is needed to discharge and handle aobvious Shadow liquid waste water, since developer solution wastewater treatment capacity is big, concentration is high, and treatment effeciency is low, greatly increases production cost.
Invention content
Goal of the invention:Insufficient existing for developer solution in the prior art in order to solve, the purpose of the present invention is to provide one kind For the development adjuvant of dry film development, the generation of residue in dry film developing process is prevented, metal covering pollution is reduced, promotes product Yield;And molten film amount can be promoted, and then reduces developer solution dosage.
To achieve these goals, present invention employs following technical solutions:A kind of development adjuvant, including following Component and each component weight percentage is:
Organic base:0.01~5%;
Inorganic base:0.01~5%;
Organic solvent:0.1~10%;
Surfactant:0.01~5%;
Water:Surplus.
Further, the organic base is monoethanolamine, diethanol amine, triethanolamine, tetramethylammonium hydroxide, second two At least one of amine, monomethyl amine, dimethylamine, trimethylamine, 2-amino-2-methyl-1-propanol.
Further, the inorganic base is sodium hydroxide, potassium hydroxide, sodium carbonate, potassium carbonate, sodium metasilicate, sodium acetate, first At least one of sour sodium, sodium peroxydisulfate, sodium sulphate, sodium citrate, sodium oxalate, sodium sulfite.
Further, the organic solvent is methyl pyrrolidone, butyl, butyl glycol ether, dimethyl Asia At least one of sulfone, dimethylformamide, dimethylacetylamide, propylene glycol monomethyl ether, propylene glycol methyl ether acetate, isopropanol.
Further, the surfactant for polyethers, isomerous tridecanol polyoxyethylene ether, ethoxylated dodecyl alcohol, In isooctanol polyethoxylate, polyethylene glycol, polypropylene glycol, neopelex, octyl phenol polyoxyethylene ether at least It is a kind of.
Advantages of the present invention and advantageous effect:
1st, the generation of residue in dry film developing process is prevented, metal covering pollution is reduced, promotes product yield;
2nd, molten film amount is promoted, and then reduces developer solution dosage, reduces developer solution wastewater treatment capacity and production cost.
Specific embodiment:
Further explanation is done to the present invention below.
The present invention a kind of development adjuvant, be including following each component and each component weight percentage:
Organic base:0.01~5%;
Inorganic base:0.01~5%;
Organic solvent:0.1~10%;
Surfactant:0.01~5%;
Water:Surplus.
Wherein:The developing powder of dry film can be accelerated by adding in organic base, add in inorganic base can make dry film obtain one it is stable Developing powder, the molten film amount of developer solution can be increased by adding in organic solvent, and the surface of dry film, wet film can be reduced by adding in surfactant Tension makes developer solution uniformly spread on entire photopolymer layer.
Preferably, the organic base for monoethanolamine, diethanol amine, triethanolamine, tetramethylammonium hydroxide, ethylenediamine, At least one of monomethyl amine, dimethylamine, trimethylamine, 2-amino-2-methyl-1-propanol.
Preferably, the inorganic base is sodium hydroxide, potassium hydroxide, sodium carbonate, potassium carbonate, sodium metasilicate, sodium acetate, formic acid At least one of sodium, sodium peroxydisulfate, sodium sulphate, sodium citrate, sodium oxalate, sodium sulfite.
Preferably, the organic solvent for methyl pyrrolidone, butyl, butyl glycol ether, dimethyl sulfoxide (DMSO), At least one of dimethylformamide, dimethylacetylamide, propylene glycol monomethyl ether, propylene glycol methyl ether acetate, isopropanol.
Preferably, the surfactant be polyethers, it is isomerous tridecanol polyoxyethylene ether, ethoxylated dodecyl alcohol, different At least one in octanol polyoxyethylene ether, polyethylene glycol, polypropylene glycol, neopelex, octyl phenol polyoxyethylene ether Kind.
It is several groups of comparative examples below:
Comparative example 1
Preparation conventional developer solution is weighed by following composition mass percent:
Sodium carbonate:1%;
Water:99%.
Comparative example 2
Preparation development adjuvant is weighed by following composition mass percent:
Monoethanolamine:0.3%;
Sodium peroxydisulfate:0.2%;
Isopropanol:0.5%;
Ethoxylated dodecyl alcohol:0.2%;
Water:98.8%.
The development adjuvant of preparation is added in 1% sodium carbonate development liquor.
Comparative example 3
Preparation development adjuvant is weighed by following composition mass percent:
Monoethanolamine:2%;
Sodium peroxydisulfate:1.5%;
Isopropanol:5%;
Ethoxylated dodecyl alcohol:1%;
Water:90.5%.
The development adjuvant of preparation is added in 1% sodium carbonate development liquor.
Comparative example 4
Preparation development adjuvant is weighed by following composition mass percent:
Tetramethylammonium hydroxide:1%;
Sodium peroxydisulfate:0.8%;
Butyl:2%;
Ethoxylated dodecyl alcohol:1%;
Water:95.2%.
The development adjuvant of preparation is added in 1% sodium carbonate development liquor.
Comparative example 5
Preparation development adjuvant is weighed by following composition mass percent:
Tetramethylammonium hydroxide:0.25%;
Sodium peroxydisulfate:2%;
Butyl:4%;
Ethoxylated dodecyl alcohol:2%;
Water:91.75%.
The development adjuvant of preparation is added in 1% sodium carbonate development liquor.
The development liquor that each embodiment obtains is subjected to dry film development respectively, operating procedure is as follows:
1) 1 liter of development liquor is put into thermostat water bath, is heated to 30 degree;
2) 0.2 ㎡ of dry film is dissolved by the liquor that develops, compares developer solution clarity;
3) development has exposed dry film, records circuit quality after developing time and comparison development;
4) hydrochloric acid is added into development liquor, is acidified to PH < 3, situation is precipitated in dry film in comparison development liquor.
It is carried out according to situation after circuit quality, acidification after the developer solution clarity of each comparative example, developing time, development Comparison, comparing result are as follows:
The above is only the preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art For member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications also should It is considered as protection scope of the present invention.

Claims (5)

1. a kind of development adjuvant, it is characterised in that be including following each component and each component weight percentage:
Organic base:0.01~5%;
Inorganic base:0.01~5%;
Organic solvent:0.1~10%;
Surfactant:0.01~5%;
Water:Surplus.
2. a kind of development adjuvant according to claim 1, it is characterised in that:The organic base is monoethanolamine, diethyl Hydramine, triethanolamine, tetramethylammonium hydroxide, ethylenediamine, monomethyl amine, dimethylamine, trimethylamine, 2-amino-2-methyl-1-propanol At least one of.
3. a kind of development adjuvant according to claim 1, it is characterised in that:The inorganic base is sodium hydroxide, hydrogen-oxygen Change potassium, sodium carbonate, potassium carbonate, sodium metasilicate, sodium acetate, sodium formate, sodium peroxydisulfate, sodium sulphate, sodium citrate, sodium oxalate, sulfurous At least one of sour sodium.
4. a kind of development adjuvant according to claim 1, it is characterised in that:The organic solvent is crassitude Ketone, butyl, butyl glycol ether, dimethyl sulfoxide (DMSO), dimethylformamide, dimethylacetylamide, propylene glycol monomethyl ether, third At least one of glycol methyl ether acetate, isopropanol.
5. a kind of development adjuvant according to claim 1, it is characterised in that:The surfactant is polyethers, isomery Tridecanol polyoxyethylene ether, ethoxylated dodecyl alcohol, isooctanol polyethoxylate, polyethylene glycol, polypropylene glycol, dodecyl At least one of benzene sulfonic acid sodium salt, octyl phenol polyoxyethylene ether.
CN201810212622.9A 2018-03-15 2018-03-15 Develop adjuvant Pending CN108227410A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810212622.9A CN108227410A (en) 2018-03-15 2018-03-15 Develop adjuvant

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810212622.9A CN108227410A (en) 2018-03-15 2018-03-15 Develop adjuvant

Publications (1)

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CN108227410A true CN108227410A (en) 2018-06-29

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020056627A1 (en) * 2018-09-18 2020-03-26 周连惠 High-concentration developing solution stock solution composition
CN113504715A (en) * 2021-09-10 2021-10-15 深圳市板明科技股份有限公司 Printed circuit board developing additive

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5753421A (en) * 1994-03-31 1998-05-19 Tokyo Ohka Kogya Co., Ltd. Stock developer solutions for photoresists and developer solutions prepared by dilution thereof
CN1503064A (en) * 2002-11-19 2004-06-09 东进半导体化学株式会社 Photoresist developer compositions
CN1585914A (en) * 2001-11-13 2005-02-23 三星电子株式会社 Chemical rinse composition
CN105676599A (en) * 2016-04-06 2016-06-15 东莞市广华化工有限公司 Developing solution based on new polymers and applied to image developing technology
CN106406037A (en) * 2015-06-11 2017-02-15 易安爱富科技有限公司 Photoresist developer

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5753421A (en) * 1994-03-31 1998-05-19 Tokyo Ohka Kogya Co., Ltd. Stock developer solutions for photoresists and developer solutions prepared by dilution thereof
CN1585914A (en) * 2001-11-13 2005-02-23 三星电子株式会社 Chemical rinse composition
CN1503064A (en) * 2002-11-19 2004-06-09 东进半导体化学株式会社 Photoresist developer compositions
CN106406037A (en) * 2015-06-11 2017-02-15 易安爱富科技有限公司 Photoresist developer
CN105676599A (en) * 2016-04-06 2016-06-15 东莞市广华化工有限公司 Developing solution based on new polymers and applied to image developing technology

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020056627A1 (en) * 2018-09-18 2020-03-26 周连惠 High-concentration developing solution stock solution composition
CN113504715A (en) * 2021-09-10 2021-10-15 深圳市板明科技股份有限公司 Printed circuit board developing additive

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