CN108227388A - Photoetching projection objective lens control device - Google Patents
Photoetching projection objective lens control device Download PDFInfo
- Publication number
- CN108227388A CN108227388A CN201611133636.9A CN201611133636A CN108227388A CN 108227388 A CN108227388 A CN 108227388A CN 201611133636 A CN201611133636 A CN 201611133636A CN 108227388 A CN108227388 A CN 108227388A
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- Prior art keywords
- control
- objective lens
- projection objective
- plate
- photoetching projection
- Prior art date
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70275—Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
- G03F7/70725—Stages control
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
Abstract
The invention discloses a kind of photoetching projection objective lens control devices.The photoetching projection objective lens control device includes host computer, industry control cabinet, drive control box, piezoelectric actuator and capacitance sensor：The industrial personal computer case includes master control veneer computer, multi-channel optical fibre is provided with photoetching projection objective lens controller from plate and VPX bus backplanes, the master control veneer computer；The drive control box includes high drive plate and signal acquiring board；Control instruction is sent to multi-channel optical fibre from plate by the photoetching projection objective lens controller after object lens functionality regulating control command is received after closed loop moving control calculation process is carried out to the object lens functionality regulating control command and is packaged；The control instruction is sent to high drive plate by the multi-channel optical fibre from plate, and the high drive plate makes the control instruction D/A switch completion later to the drive control of piezoelectric actuator.Photoetching projection objective lens control device provided by the invention can carry out centralized Control to a functional regulating mechanism.
Description
Technical field
The invention belongs to photoetching projection objective lens control fields, and in particular to a kind of photoetching projection objective lens control device.
Background technology
Photoetching projection objective lens are ultra-precise optical systems important in litho machine, in the litho machine course of work, with exposure
Accumulation between light time, photoetching projection objective lens can generate thermal aberration due to the accumulation of laser thermoradiation efficiency.If be not compensated,
Thermal aberration can directly deteriorate alignment precision, and functional regulating mechanism is the main side for being used for compensating thermal aberration in photoetching projection objective lens
Method.
The prior art can not carry out centralized Control to multiple functional regulating mechanisms, and in real work, lithographic projection
Object lens generally require multiple functional regulating mechanisms cooperating simultaneously, therefore, realize that one kind can be to multiple functional adjustings
Mechanism, which carries out central controlled device, to be particularly important.
Invention content
The present invention is directed to overcome defect of the existing technology, the present invention uses following technical scheme：The present invention provides
A kind of photoetching projection objective lens control device.The photoetching projection objective lens control device includes host computer, industry control cabinet, drive control
Case, piezoelectric actuator and capacitance sensor：It is total from plate and VPX that the industrial personal computer case includes master control veneer computer, multi-channel optical fibre
Line backboard, master control veneer computer are inserted in VPX bus backplanes from plate with multi-channel optical fibre, are set on the master control veneer computer
There is photoetching projection objective lens controller；The drive control box includes high drive plate and signal acquiring board, the high drive plate
It is connect with piezoelectric actuator, the signal acquiring board is connect with capacitance sensor；The master control veneer computer connects with host computer
It connects；The multi-channel optical fibre is connect from plate with the signal acquiring board and high drive plate；The photoetching projection objective lens controller
After object lens functionality regulating control command is received, closed loop moving control is carried out to the object lens functionality regulating control command
Control instruction is sent to multi-channel optical fibre from plate after calculation process and packing；The multi-channel optical fibre sends out the control instruction from plate
It send to high pressure driving plate, the high drive plate is completed after D/A switch is made to the control instruction to piezoelectric actuator
Drive control.
In some embodiments, the photoetching projection objective lens controller includes application layer component, general layer component, driving layer
Component and system layer component；The application layer component includes mutually independent main control unit, synchronization unit, arithmetic element, execution
Unit, debugging unit and test cell；The general layer component includes mutually independent communication unit, storage operating unit and association
Discuss processing unit；The driving layer component includes mutually independent dispensing unit, interrupts control unit and I/O transmission units；Institute
System layer component is stated including mutually independent to operating system OS dispensing units, ingress logic and hardware resource application unit.
In some embodiments, the photoetching projection objective lens controller receives object lens by the communication unit of general layer component
After functional regulating control command, it is passed to the main control unit of application layer component；The main control unit is according to synchronization unit
Configuration to task priority passes data to arithmetic element and carries out closed loop moving control calculation process, after calculation process
Data are sent to multichannel after the packing of execution unit invocation protocol processing unit by the I/O transmission units for driving layer component
Optical fiber is from plate；Control instruction is sent to high drive plate by the multi-channel optical fibre from plate；The high drive plate is to control instruction
D/A switch completion later is made to the drive control of piezoelectric actuator.
In some embodiments, the operating system includes VxWorks or QNX or pSOS or RTLInux or WinCE is real-time
Operating system.
In some embodiments, the master control veneer computer and multi-channel optical fibre are between plate and the VPX bus backplanes
It is connected by VPX buses.
In some embodiments, the master control veneer computer and multi-channel optical fibre are between plate and the VPX bus backplanes
Data exchange is carried out using OpenVPX standards.
In some embodiments, the high drive plate is connected by high voltage analog signal transmission link and piezoelectric actuator
It connects；The signal acquiring board is connect by low-voltage analog signal transmission link with capacitance sensor.
In some embodiments, the master control veneer computer is connect by Industrial Ethernet transmission link with host computer；
The signal acquiring board is connect by the first fiber transmission link with multi-channel optical fibre from plate；The high drive plate passes through the second light
Fine transmission link is connect with multi-channel optical fibre from plate.
In some embodiments, the host computer uses work station or PC machine.
In some embodiments, the acp chip of the master control veneer computer is PowerPC.
Photoetching projection objective lens control device provided by the invention is realized using host computer, industry control cabinet and drive control box
To the centralized Control of multiple piezoelectric actuators and multiple capacitance sensors, and then realize the collection to multiple functional regulating mechanisms
Middle control.
Description of the drawings
Fig. 1 is the structure diagram according to the photoetching projection objective lens control device of one embodiment of the invention；
Fig. 2 is the photoetching projection objective lens controller in the photoetching projection objective lens control device according to one embodiment of the invention
Layered structure schematic diagram.
Specific embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, below in conjunction with attached drawing and specific implementation
Example, the present invention will be described in further detail.It should be appreciated that specific embodiment described herein is only explaining this hair
It is bright, without being construed as limiting the invention.
Refering to what is shown in Fig. 1, it is a kind of photoetching projection objective lens control device 100 provided by the invention.The lithographic projection object
Mirror control device 100 includes:Host computer 1, industry control cabinet 2, drive control box 6, piezoelectric actuator 15 and capacitance sensor 16：Institute
It states industry control cabinet 2 and includes master control veneer computer 11, multi-channel optical fibre from plate 4 and VPX bus backplanes 3, master control veneer computer 11
It is inserted in VPX bus backplanes 3 from plate 4 with multi-channel optical fibre, photoetching projection objective lens control is provided on the master control veneer computer 11
Device 110 processed；The drive control box 6 includes high drive plate 13 and signal acquiring board 7, and the high drive plate 13 drives with piezoelectricity
Dynamic device 15 connects, and the signal acquiring board 7 is connect with capacitance sensor 16；The master control veneer computer 11 connects with host computer 1
It connects；The multi-channel optical fibre is connect from plate 4 with the signal acquiring board 7 and high drive plate 13；The photoetching projection objective lens control
Device 110 processed carries out closed loop after object lens functionality regulating control command is received, to the object lens functionality regulating control command
Control instruction is sent to multi-channel optical fibre from plate 4 after motion control calculation process and packing；The multi-channel optical fibre is from plate 4 by described in
Control instruction is sent to high drive plate 13, and the high drive plate 13 makes the control instruction complete after D/A switch
The drive control of pairs of piezoelectric actuator 15.The piezoelectric actuator 15 is placed in the lithographic projection with the capacitance sensor 16
In object lens 9, for carrying out Closed loop positioning control to multiple functional regulating mechanisms in photoetching projection objective lens 9.
Referring to attached drawing 2, in this embodiment, the photoetching projection objective lens controller 110 includes application layer component, general layer
Component, driving layer component and system layer component；The application layer component includes mutually independent main control unit, synchronization unit, fortune
Calculate unit, execution unit, debugging unit and test cell；The general layer component includes mutually independent communication unit, storage
Operating unit and protocol processing unit；The driving layer component includes mutually independent dispensing unit, interrupts control unit and I/O
Transmission unit；The system layer component includes mutually independent to operating system OS dispensing units, ingress logic and hardware resource
Application unit.
The application layer component includes main control unit, synchronization unit, arithmetic element, execution unit, debugging unit, test list
Member, between each unit independently of each other；The main control unit is to realize management of process, initiates all functionalities inquiry/setting and grasp
Make；The synchronization unit is to realize based on synchronization between each process of multiple task operating system or task priority, task
Operation；The arithmetic element is to realize motion control arithmetic operation and Data Fusion of Sensor calculation function；It is described to perform list
Member is to realize the encapsulation of the operational orders such as all inquiries, setting, configuration and data；The debugging unit is to realize operation day
The debugging interfaces such as will, configuration file, the test cell, which is to realize, tests relevant interface；
The general layer component includes communication unit, storage operating unit, protocol processing unit etc., between each unit mutually
It is independent；The communication unit is to realize the Socket network communication operations based on ICP/IP protocol；The storage operating unit
It is to realize the operate interfaces such as the read-write based on operating system file system, additions and deletions, inquiry；The protocol processing unit is reality
The interface of the functions such as existing communication protocol is unpacked, is packaged, verification；
The driving layer component, from 4 driving device of plate, including dispensing unit, interrupts control unit, I/O as multi-channel optical fibre
Transmission unit, between each unit independently of each other；The dispensing unit is to realize the configuration of VPX bus transmission models；In described
Disconnected control unit is to realize the maintenance of the interrupt address interrupted based on VPX, interrupt levels and interrupt vector；The I/O transmission
Unit is to realize the I/O interfaces transmitted based on character type equipment or block type equipment according to the dispensing unit；
The system layer component is included to operating system OS dispensing units, ingress logic and hardware resource application unit, respectively
Between unit independently of each other；The operating system includes VxWorks or QNX or pSOS or RTLInux or WinCE real-time osses
System；The OS dispensing units are to realize the cutting to operating system and configuration feature；The ingress logic unit is for institute
State the portals maintenance that application layer component provides application program；The hardware application unit, which is to realize, calculates the master control veneer
The application and maintenance of the resources such as machine 11Cache, memory, Flash.
In some embodiments, the photoetching projection objective lens controller 110 is received by the communication unit of general layer component
After object lens functionality regulating control command, it is passed to the main control unit of application layer component；The main control unit is according to synchronization
Configuration of the unit to task priority passes data to arithmetic element and carries out closed loop moving control calculation process, calculation process
Data afterwards are sent to after the packing of execution unit invocation protocol processing unit by the I/O transmission units for driving layer component
Multi-channel optical fibre is from plate 4；Control instruction is sent to high drive plate 13 by the multi-channel optical fibre from plate 4；The high drive plate 13
D/A switch completion later is made to control instruction to the drive control of piezoelectric actuator 15.
In some embodiments, the operating system includes VxWorks or QNX or pSOS or RTLInux or WinCE is real-time
Operating system.
In some embodiments, the master control veneer computer 11 and multi-channel optical fibre are from plate 4 and the VPX bus backplanes 3
Between connected by VPX buses.
In some embodiments, the master control veneer computer 11 and multi-channel optical fibre are from plate 4 and the VPX bus backplanes 3
Between using OpenVPX standards carry out data exchange.
In some embodiments, the high drive plate 13 passes through high voltage analog signal transmission link and piezoelectric actuator 15
Connection；The signal acquiring board 7 is connect by low-voltage analog signal transmission link 8 with capacitance sensor 16.
In some embodiments, the master control veneer computer 11 passes through Industrial Ethernet transmission link 10 and host computer 1
Connection；The signal acquiring board 7 is connect by the first fiber transmission link 5 with multi-channel optical fibre from plate 4；The high drive plate 13
It is connect by the second fiber transmission link 12 with multi-channel optical fibre from plate 4.
In some embodiments, the host computer 1 uses work station or PC machine.The host computer 1 using work station or
Person's PC machine, the host computer 1 runs interactive software, using operating systems such as Linux or Windows.The master control list
The acp chip of plate computer 11 is PowerPC；The master control veneer computer 11 using VxWorks or QNX or pSOS or
RTLInux or WinCE real time operating systems.
In some embodiments, the acp chip of the master control veneer computer 11 is PowerPC.
The step of when the photoetching projection objective lens control device 100 that embodiment provided by the invention provides is run is：
Step 1：Host computer 1 sends object lens function by Industrial Ethernet transmission link 10 to master control veneer computer 11
Property regulating control command；
Step 2：The communication unit that photoetching projection objective lens controller in master control veneer computer 11 passes through general layer component
After receiving object lens functionality regulating control command, the main control unit of application layer component is passed to, main control unit is according to synchronization
Configuration of the unit to task priority passes data to arithmetic element and carries out closed loop moving control calculation process, calculation process
Data afterwards are sent to after the packing of execution unit invocation protocol processing unit by the I/O transmission units for driving layer component
Multi-channel optical fibre is from plate 4；Control instruction is sent to high drive plate by multi-channel optical fibre from plate 4 by the second fiber transmission link 12
13, high drive plate 13 is completed by high voltage analog signal transmission link 14 to pressure after D/A switch is made to control instruction
The drive control of electric drive 15；
Step 3：Signal acquiring board 7 acquires the data of capacitance sensor 16, after making analog/digital conversion, signal in real time
Collection plate 7 passes data to multi-channel optical fibre from plate 4 by the first fiber transmission link 5, and multi-channel optical fibre is total by VPX from plate 4
Line backboard 3 is applied interrupting to master control veneer computer 11；
Step 4：The main control unit of master control veneer computer 11 responds the interruption of above-mentioned steps three by interrupt management unit
Request, the data for the transmission of above-mentioned steps three of being read back by I/O transmission units, after storage operating unit stores data, notice
Main control unit, main control unit invocation protocol processing unit call communication unit to be transmitted by Industrial Ethernet after data are packaged
Link 10 completes primary complete lithographic objective adjustable mechanism control process to 1 returned data of host computer.
Step 5：On master control veneer computer 11 in operational process, main control unit calls photoetching projection objective lens controller
OS dispensing units, ingress logic unit grade hardware application unit realize the configuration to controller；In a non-operative state, pass through tune
Examination unit is debugged photoetching projection objective lens controller, is upgraded, is safeguarded；By test cell to photoetching projection objective lens controller
Make test.
Beneficial effects of the present invention are：A kind of photoetching projection objective lens control device of the embodiment of the present invention using host computer,
Industry control cabinet and drive control box realize the centralized Control to multiple piezoelectric actuators and multiple capacitance sensors, and then realize
To the centralized Control of multiple functional regulating mechanisms；And because the photoetching projection objective lens controller will be multiple using layered structure
Miscellaneous control function decoupling is several control units, and this modular design increases configurability, improves robustness.Institute
Industry control cabinet and the discrete placement of drive control cabinet are stated, is connected by high speed fibre transmission link, has both ensured instruction transmission effect
Rate, and increase the flexibility of space layout.
In the description of the present invention, it is to be understood that term " " center ", " longitudinal direction ", " transverse direction ", " length ", " width ",
" thickness ", " on ", " under ", "front", "rear", "left", "right", " vertical ", " level ", " top ", " bottom " " interior ", " outer ", " up time
The orientation or position relationship of the instructions such as needle ", " counterclockwise ", " axial direction ", " radial direction ", " circumferential direction " be based on orientation shown in the drawings or
Position relationship is for only for ease of the description present invention and simplifies description rather than instruction or imply that signified device or element must
There must be specific orientation, with specific azimuth configuration and operation, therefore be not considered as limiting the invention.
In addition, term " first ", " second " are only used for description purpose, and it is not intended that instruction or hint relative importance
Or the implicit quantity for indicating indicated technical characteristic.Define " first " as a result, the feature of " second " can be expressed or
Implicitly include at least one this feature.
In the present invention unless specifically defined or limited otherwise, term " installation ", " connected ", " connection ", " fixation " etc.
Term should be interpreted broadly, for example, it may be being fixedly connected or being detachably connected or integral；Can be that machinery connects
It connects or is electrically connected；It can be directly connected, can also be indirectly connected by intermediary, can be in two elements
The connection in portion or the interaction relationship of two elements, unless otherwise restricted clearly.For those of ordinary skill in the art
For, the concrete meaning of above-mentioned term in the present invention can be understood as the case may be.
In the present invention unless specifically defined or limited otherwise, fisrt feature can be with "above" or "below" second feature
It is that the first and second features are in direct contact or the first and second features pass through intermediary mediate contact.Moreover, fisrt feature exists
Second feature " on ", " top " and " above " but fisrt feature right over second feature or oblique upper or be merely representative of
Fisrt feature level height is higher than second feature.Fisrt feature second feature " under ", " lower section " and " below " can be
One feature is immediately below second feature or obliquely downward or is merely representative of fisrt feature level height less than second feature.
In the description of this specification, reference term " one embodiment ", " example ", " is specifically shown " some embodiments "
The description of example " or " some examples " etc. means specific features, structure, material or the spy for combining the embodiment or example description
Point is contained at least one embodiment of the present invention or example.In the present specification, schematic expression of the above terms are not
It must be directed to identical embodiment or example.Moreover, particular features, structures, materials, or characteristics described can be in office
It is combined in an appropriate manner in one or more embodiments or example.In addition, without conflicting with each other, the skill of this field
Art personnel can tie the different embodiments or examples described in this specification and the feature of different embodiments or examples
It closes and combines.
Although the embodiments of the present invention has been shown and described above, it is to be understood that above-described embodiment is example
Property, it is impossible to limitation of the present invention is interpreted as, those of ordinary skill in the art within the scope of the invention can be to above-mentioned
Embodiment is changed, changes, replacing and modification.
The specific embodiment of present invention described above, is not intended to limit the scope of the present invention..Any basis
Various other corresponding changes and deformation made by the technical concept of the present invention, should be included in the guarantor of the claims in the present invention
In the range of shield.
Claims (10)
1. a kind of photoetching projection objective lens control device, which is characterized in that including host computer, industry control cabinet, drive control box, piezoelectricity
Driver and capacitance sensor：
The industrial personal computer case includes master control veneer computer, multi-channel optical fibre from plate and VPX bus backplanes, master control veneer computer with
Multi-channel optical fibre is inserted in from plate in VPX bus backplanes, and photoetching projection objective lens controller is provided on the master control veneer computer；
The drive control box includes high drive plate and signal acquiring board, and the high drive plate is connect with piezoelectric actuator,
The signal acquiring board is connect with capacitance sensor；
The master control veneer computer is connect with host computer；
The multi-channel optical fibre is connect from plate with the signal acquiring board and high drive plate；
The photoetching projection objective lens controller is after object lens functionality regulating control command is received, to the object lens functionality tune
Section control instruction carries out that control instruction is sent to multi-channel optical fibre from plate after closed loop moving controls calculation process and is packaged；
The control instruction is sent to high drive plate by the multi-channel optical fibre from plate, and the high drive plate refers to the control
It enables and makes D/A switch completion later to the drive control of piezoelectric actuator.
2. photoetching projection objective lens control device according to claim 1, which is characterized in that the photoetching projection objective lens control
Device includes application layer component, general layer component, driving layer component and system layer component；The application layer component includes mutual indepedent
Main control unit, synchronization unit, arithmetic element, execution unit, debugging unit and test cell；
The general layer component includes mutually independent communication unit, storage operating unit and protocol processing unit；The driving
Layer component includes mutually independent dispensing unit, interrupts control unit and I/O transmission units；The system layer component includes mutual
It is independent to operating system OS dispensing units, ingress logic and hardware resource application unit.
3. photoetching projection objective lens control device according to claim 2, which is characterized in that
The photoetching projection objective lens controller receives object lens functionality regulating control command by the communication unit of general layer component
Afterwards, it is passed to the main control unit of application layer component；
The main control unit passes data to arithmetic element and carries out closed loop fortune according to configuration of the synchronization unit to task priority
It moves and controls calculation process, the data after calculation process are after the packing of execution unit invocation protocol processing unit, by driving layer
The I/O transmission units of component are sent to multi-channel optical fibre from plate；
Control instruction is sent to high drive plate by the multi-channel optical fibre from plate；
The high drive plate makes control instruction D/A switch completion later to the drive control of piezoelectric actuator.
4. photoetching projection objective lens control device according to claim 2, which is characterized in that
The operating system includes VxWorks or QNX or pSOS or RTLInux or WinCE real time operating systems.
5. photoetching projection objective lens control device as described in claim 1, which is characterized in that the master control veneer computer and more
Road optical fiber is connected between plate and the VPX bus backplanes by VPX buses.
6. photoetching projection objective lens control device as claimed in claim 5, which is characterized in that the master control veneer computer and more
Road optical fiber carries out data exchange between plate and the VPX bus backplanes using OpenVPX standards.
7. photoetching projection objective lens control device as described in claim 1, which is characterized in that
The high drive plate is connect by high voltage analog signal transmission link with piezoelectric actuator；
The signal acquiring board is connect by low-voltage analog signal transmission link with capacitance sensor.
8. photoetching projection objective lens control device as described in claim 1, which is characterized in that
The master control veneer computer is connect by Industrial Ethernet transmission link with host computer；
The signal acquiring board is connect by the first fiber transmission link with multi-channel optical fibre from plate；
The high drive plate is connect by the second fiber transmission link with multi-channel optical fibre from plate.
9. photoetching projection objective lens control device according to claim 1, which is characterized in that the host computer uses work station
Or PC machine.
10. photoetching projection objective lens control device according to claim 1, which is characterized in that the master control veneer computer
Acp chip be PowerPC.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611133636.9A CN108227388A (en) | 2016-12-10 | 2016-12-10 | Photoetching projection objective lens control device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611133636.9A CN108227388A (en) | 2016-12-10 | 2016-12-10 | Photoetching projection objective lens control device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108227388A true CN108227388A (en) | 2018-06-29 |
Family
ID=62637767
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611133636.9A Pending CN108227388A (en) | 2016-12-10 | 2016-12-10 | Photoetching projection objective lens control device |
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| CN (1) | CN108227388A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110096035A (en) * | 2019-05-14 | 2019-08-06 | 桂林电子科技大学 | High-precision high-speed sports platform Synchronous motion control system and method based on Open VPX |
| CN110968000A (en) * | 2019-11-28 | 2020-04-07 | 中国科学院微电子研究所 | Measurement and control system synchronous control system based on OpenVPX framework |
-
2016
- 2016-12-10 CN CN201611133636.9A patent/CN108227388A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110096035A (en) * | 2019-05-14 | 2019-08-06 | 桂林电子科技大学 | High-precision high-speed sports platform Synchronous motion control system and method based on Open VPX |
| CN110096035B (en) * | 2019-05-14 | 2021-06-08 | 桂林电子科技大学 | Open VPX-based high-precision high-speed motion table synchronous motion control system and method |
| CN110968000A (en) * | 2019-11-28 | 2020-04-07 | 中国科学院微电子研究所 | Measurement and control system synchronous control system based on OpenVPX framework |
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Application publication date: 20180629 |