CN108212876A - Graphene chip manufacture device - Google Patents
Graphene chip manufacture device Download PDFInfo
- Publication number
- CN108212876A CN108212876A CN201711365660.XA CN201711365660A CN108212876A CN 108212876 A CN108212876 A CN 108212876A CN 201711365660 A CN201711365660 A CN 201711365660A CN 108212876 A CN108212876 A CN 108212876A
- Authority
- CN
- China
- Prior art keywords
- cylinder
- rack
- outlet passageway
- chip manufacture
- manufacture device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
- B08B3/022—Cleaning travelling work
Abstract
The invention discloses a kind of graphene chip manufacture devices, including rack, piston plate is disposed in rack from top to bottom, cylinder, gear motor-driven, the nut being fixed in rack, outlet passageway, the cleaning pipe of liquid storage cylinder and elasticity, wherein piston plate is fixed in rack, it is slidingly sealed between piston plate and cylinder, cylinder is disposed with the spline segment being connect with gear spline from top to bottom, breather check valve, thread segment and outgassing nonreturn valve, its middle cylinder body is by forming screw thread pair between thread segment and nut, it is connected between outgassing nonreturn valve and outlet passageway, gear is rotatably connected in rack, outlet passageway is in the dumbbell shaped of big at both ends and small in middle, and liquid storage cylinder is connected with the middle section of outlet passageway, conveyer belt is by below cleaning pipe.The present invention solves the problems, such as that silicon ingot cleaning is excessively complicated in the prior art.
Description
Technical field
The present invention relates to graphene chip manufacture technical fields, and in particular to a kind of graphene chip manufacture device.
Background technology
Graphene chip, the scientist of IBM Corporation of the U.S. have developed first integrated circuit made of graphene disk,
It goes a step further before exploitation graphene computer chip, scientists think that this breakthrough can substitute silicon wafer with graphene disk
Piece, the foundation of this block integrated circuit form on one block of silicon carbide, and by some graphene field effect transistors.
Existing graphene chip preparing process includes silicon purification, cutting silicon ingot, photocopy, etching, repeats layering, encapsulation etc.
Six big steps wherein before silicon purification, need just carry out silicon purification after first raw material silicon ingot is cleaned.As Chinese patent discloses
Number disclose a kind of polycrystalline silicon material cleaning device, including pickling tube, the bottom surface of the pickling tube for the document of CN205008303U
Tap hole is provided with, is further included：The charging basket being set in the pickling tube, the bottom surface for feeding basket are provided with multiple small
Hole；At least a pair of spacer bar for being used to fix polycrystalline silicon material being set in the charging basket；Wherein, polycrystalline silicon material is anti-
Face and the reaction surface of another polycrystalline silicon material is answered to be disposed opposite to each other, and the polycrystalline silicon material is connected between the spacer bar.
Although this device can not only effectively remove the specified reaction surface of silicon ingot, and can effectively remove and be embedded in silicon
Impurity inside ingot given side, but need silicon ingot being dipped in pickling tube in cleaning process, not only efficiency is low, and reaction is slow,
And pickle is easy to waste and causes chip manufacturing cost high.
Invention content
The present invention provides a kind of graphene chip manufacture device, it is intended that it is low to solve silicon ingot cleaning efficiency in the prior art
Problem.
Graphene chip manufacture device, be disposed with from top to bottom including rack, in rack piston plate, cylinder, by
Motor-driven gear, the nut being fixed in rack, outlet passageway, liquid storage cylinder and elasticity cleaning pipe, wherein piston plate
It is fixed in rack, is slidingly sealed between piston plate and cylinder, cylinder is disposed with what is connect with gear spline from top to bottom
Spline segment, breather check valve, thread segment and outgassing nonreturn valve, middle cylinder body is by forming screw thread between thread segment and nut
Pair, outgassing nonreturn valve are connected with outlet passageway, and gear is rotatably connected in rack, outlet passageway be in dumbbell shaped, and liquid storage cylinder with
The neck connection of outlet passageway.
Dumbbell shaped refers to that the outlet passageway both ends big mid diameter of diameter is small, and centre is neck.
Gear in the present invention connect to drive barrel body rotation, while cylinder and gear by forming spline between cylinder
Between can also move axially relatively, screw thread pair is formed between cylinder and nut, nut is fixed in rack；When by gear just
To when driving, cylinder can spin movement, i.e., cylinder can be moved up axially while rotating, cylinder and piston
It is slidingly sealed between plate, cylinder increases with the plunger shaft volume that piston plate surrounds, and pressure reduces, and extraneous clean gas passes through
Breather check valve is entered in plunger shaft, and cleaning pipe is moved up with cylinder spiral at this time, so as to far from workpiece；Conversely, when by tooth
When wheel reversely drives, cylinder moves axially down while rotation, and the plunger shaft volume that cylinder is surrounded with piston plate subtracts
Small, pressure increases, and the gas in plunger shaft is discharged along outlet passageway, and speed increases when gas passes through outlet passageway neck, pressure
It is strong to reduce, so as to which the cleaning solution in liquid storage cylinder be attracted to enter, and cleaning solution spraying is formed in outlet passageway end together, it is final to pass through
It is sprayed onto on silicon ingot workpiece by cleaning pipe.
Compared with prior art, the advantage of the invention is that：
1st, structure of the invention simplifies compact, and cleaning process is simple and effective, solves silicon ingot cleaning in the prior art
It is the problem of excessively complicated, at low cost and efficient.
2nd, movement in an axial direction can be realized so as to match with piston in the tube structure that the present invention is set during rotation
The action for realizing pumping and exhaust is closed, is skillfully constructed and simple and effective.
3rd, the gas that the present invention generates can be combined with cleaning solution in outlet passageway and then generate cleaning solution spraying, so as to
Reach significantly more efficient cleaning performance.
4th, cylinder is spinned movement, is ensured gas discharge amount consistent always, so as to coordinate with outlet passageway, is being gone out
Relatively stable air source is formed at gas feeder connection, ensure that the stability of spraying output.
5th, it while cleaning pipe during the work time can be with barrel body rotation, constantly moves down, it is more so as to be carried out to workpiece
Comprehensive cleaning of angle, more intensity, greatly improves cleaning performance.
Further, the cleaning pipe is twist set；Spiral setting can ensure to flow into high speed in cleaning pipe
It can be in axial elongation, so as to obtain to workpiece cleaning closely or wider and angle cleaning during cleaning solution.
Further, the conveyer belt for conveying workpieces is further included, conveyer belt is located at immediately below cleaning pipe；Conveyer belt being capable of profit
In the cleaning efficiency for improving silicon ingot workpiece, while cause entire cleaning process the degree of automation higher, cleaning performance is more preferable.
Further, fixed link is further included, piston plate is fixed on by fixed link in rack；So set, reality can be facilitated
The now assembly relation between the installation of piston plate, piston plate and cylinder.
Further, liquid storage cylinder is threaded in cylinder lower end；Under such setting, liquid storage cylinder and cylinder installation one are saved
Space can also reduce the distance between liquid storage cylinder and outlet passageway, efficient between liquid storage cylinder and outlet passageway so as to ensure
Cooperation.
Further, several through-holes are provided on conveyer belt；The cleaning solution of complete silicon ingot workpiece easy to clean can pass through through-hole
Quick outflow conveyer belt, facilitates the cleaning for keeping conveyer belt.
Further, collecting tank is further included, collecting tank is fixed in rack and below conveyer belt；Collecting tank can be used in
Cleaning solution is collected, facilitates centralized recovery or does other processing.
Description of the drawings
Fig. 1 is the structure diagram of the embodiment of the present invention.
Specific embodiment
Below by the further details of explanation of specific embodiment：
Reference numeral in Figure of description includes：Cylinder 10, gear 12, thread segment 13, nut 14, goes out spline segment 11
Gas channel 15, cleaning pipe 16, workpiece 20, conveyer belt 21, collecting tank 22.
Embodiment is substantially as shown in Figure 1：Graphene chip manufacture device, including rack, in rack from top to bottom according to
It is secondary to be provided with fixed link, piston plate, cylinder 10, gear motor-driven 12, nut 14, the outlet passageway being fixed in rack
15th, liquid storage cylinder, the cleaning pipe 16 of elasticity, conveyer belt 21 and collecting tank 22.
Wherein piston plate is fixed on by fixed link in rack, is slidingly sealed between piston plate and cylinder 10.
Cylinder 10 is disposed with spline segment 11, breather check valve, the thread segment being connect with 12 spline of gear from top to bottom
13 and outgassing nonreturn valve, middle cylinder body 10 between thread segment 13 and nut 14 by forming screw thread pair, and outgassing nonreturn valve is with going out
It is connected between gas channel 15, gear 12 is rotatably connected in rack, and cleaning pipe 16 is whole twist.
Outlet passageway 15 is in the dumbbell shaped of big at both ends and small in middle.Liquid storage cylinder is threaded in 10 lower end of cylinder, and liquid storage cylinder
It is connected with the middle section (i.e. neck) of outlet passageway 15.
And conveyer belt 21 is then driven by roller, conveyer belt 21 passes through 16 lower section of cleaning pipe, and silicon is placed on conveyer belt 21
Ingot workpiece 20, silicon ingot workpiece 20 are arranged at intervals between any two, and several through-holes are provided on conveyer belt 21, and collecting tank 22 is fixed on machine
On frame and positioned at 21 lower section of conveyer belt.
Gear 12 by forming spline between cylinder 10 connect that cylinder 10 is driven to rotate, while cylinder 10 and gear 12
Between can also move axially relatively, screw thread pair is formed between cylinder 10 and nut 14, nut 14 is fixed in rack；Work as quilt
Gear 12 is positive when driving, and cylinder 10 can spin movement, i.e., cylinder 10 can be axially to moving up while rotating
It is dynamic, it is slidingly sealed between cylinder 10 and piston plate, cylinder 10 increases with the plunger shaft volume that piston plate surrounds, and pressure subtracts
Small, extraneous clean gas is entered by breather check valve in plunger shaft, and cleaning pipe 16 is moved up with 10 spiral of cylinder at this time, from
And far from workpiece 20；Conversely, when reversely being driven by gear 12, cylinder 10 moves axially down while rotation, cylinder
Body 10 reduces with the plunger shaft volume that piston plate surrounds, pressure increase, and the gas in plunger shaft is discharged along outlet passageway 15, gas
Speed increases when body passes through 15 neck of outlet passageway, and pressure reduces, so as to which the cleaning solution in liquid storage cylinder be attracted to enter, and exist together
15 end of outlet passageway forms cleaning solution spraying, is finally sprayed onto on silicon ingot workpiece 20 via cleaning pipe 16.
Claims (7)
1. graphene chip manufacture device, including rack, it is characterised in that：Piston is disposed in rack from top to bottom
Plate, cylinder, gear motor-driven, the nut being fixed in rack, outlet passageway, liquid storage cylinder and elasticity cleaning pipe,
Wherein piston plate is fixed in rack, is slidingly sealed between piston plate and cylinder, and cylinder is disposed with from top to bottom and gear
Spline segment, breather check valve, thread segment and the outgassing nonreturn valve of spline connection, middle cylinder body pass through between thread segment and nut
Screw thread pair is formed, outgassing nonreturn valve is connected with outlet passageway, and gear is rotatably connected in rack, and outlet passageway is in dumbbell shaped, and
Liquid storage cylinder is connected with the neck of outlet passageway.
2. graphene chip manufacture device according to claim 1, it is characterised in that：Cleaning pipe is twist set.
3. graphene chip manufacture device according to claim 2, it is characterised in that：It further includes for conveying workpieces
Conveyer belt, conveyer belt are located at immediately below cleaning pipe.
4. graphene chip manufacture device according to claim 3, it is characterised in that：Further include fixed link, piston plate
It is fixed in rack by fixed link.
5. graphene chip manufacture device according to claim 4, it is characterised in that：Liquid storage cylinder is threaded in cylinder
Lower end.
6. graphene chip manufacture device according to claim 5, it is characterised in that：It is provided on conveyer belt several logical
Hole.
7. graphene chip manufacture device according to claim 6, it is characterised in that：Further include collecting tank, collecting tank
It is fixed in rack and below conveyer belt.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711365660.XA CN108212876B (en) | 2017-12-18 | 2017-12-18 | Device is used in processing of graphite alkene chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711365660.XA CN108212876B (en) | 2017-12-18 | 2017-12-18 | Device is used in processing of graphite alkene chip |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108212876A true CN108212876A (en) | 2018-06-29 |
| CN108212876B CN108212876B (en) | 2020-06-30 |
Family
ID=62649793
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711365660.XA Active CN108212876B (en) | 2017-12-18 | 2017-12-18 | Device is used in processing of graphite alkene chip |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108212876B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108838168A (en) * | 2018-07-18 | 2018-11-20 | 重庆双龙机械配件有限公司 | A kind of automobile-used blank cleaning equipment of two-wheel |
| CN110899198A (en) * | 2019-11-29 | 2020-03-24 | 河南科技大学第一附属医院 | Cleaning and sterilizing equipment for anaesthetic mask |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE20006495U1 (en) * | 2000-04-07 | 2000-06-29 | Skf Gmbh | Device for cleaning workpieces, in particular bearing rings or rolling elements |
| CN2877882Y (en) * | 2006-01-26 | 2007-03-14 | 上海交通大学 | Eddy flow steam-liquid atomization injector |
| CN106560257A (en) * | 2015-10-20 | 2017-04-12 | 重庆市德顺汽车部件制造有限公司 | High-cleanliness workpiece cleaning machine |
| CN206519362U (en) * | 2016-12-29 | 2017-09-26 | 河南超威电源有限公司 | A kind of cleaning machine of lead pig |
| CN107437743A (en) * | 2017-09-25 | 2017-12-05 | 邵林芳 | Dust arrester inside a kind of power distribution cabinet |
-
2017
- 2017-12-18 CN CN201711365660.XA patent/CN108212876B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE20006495U1 (en) * | 2000-04-07 | 2000-06-29 | Skf Gmbh | Device for cleaning workpieces, in particular bearing rings or rolling elements |
| CN2877882Y (en) * | 2006-01-26 | 2007-03-14 | 上海交通大学 | Eddy flow steam-liquid atomization injector |
| CN106560257A (en) * | 2015-10-20 | 2017-04-12 | 重庆市德顺汽车部件制造有限公司 | High-cleanliness workpiece cleaning machine |
| CN206519362U (en) * | 2016-12-29 | 2017-09-26 | 河南超威电源有限公司 | A kind of cleaning machine of lead pig |
| CN107437743A (en) * | 2017-09-25 | 2017-12-05 | 邵林芳 | Dust arrester inside a kind of power distribution cabinet |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108838168A (en) * | 2018-07-18 | 2018-11-20 | 重庆双龙机械配件有限公司 | A kind of automobile-used blank cleaning equipment of two-wheel |
| CN110899198A (en) * | 2019-11-29 | 2020-03-24 | 河南科技大学第一附属医院 | Cleaning and sterilizing equipment for anaesthetic mask |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108212876B (en) | 2020-06-30 |
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