CN108206236A - Piezoelectric vibrator and preparation method thereof - Google Patents
Piezoelectric vibrator and preparation method thereof Download PDFInfo
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- CN108206236A CN108206236A CN201711436908.7A CN201711436908A CN108206236A CN 108206236 A CN108206236 A CN 108206236A CN 201711436908 A CN201711436908 A CN 201711436908A CN 108206236 A CN108206236 A CN 108206236A
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- electrode
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- piezoelectric vibrator
- vibration level
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/072—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by laminating or bonding of piezoelectric or electrostrictive bodies
Abstract
The present invention relates to a kind of piezoelectric vibrators and preparation method thereof.Piezoelectric vibrator, including：Substrate；Vibration level is set to the substrate side, and the electrode layer including being stacked and at least one layer of piezoceramics layer, the electrode layer include multilayer, and each piezoceramics layer is between the adjacent electrode layer；The polarization direction of adjacent two piezoceramics layer on the contrary, and the piezoelectric vibrator the substrate and the vibration level by being laminated and being sintered be in one.Above-mentioned piezoelectric vibrator, including substrate and vibration level, and vibration level includes electrode layer and is stacked at least one layer of piezoceramics layer in substrate side, is in one by being laminated and being sintered, forms overall structure.Since each layer is bonded together not by adhesive by the piezoelectric vibrator, but by being laminated and being sintered in integral structure, therefore the structural strength of piezoelectric vibrator and reliability are not influenced by adhesive, so as to improve the compression strength of piezoelectric vibrator, impact strength and reliability.
Description
Technical field
The present invention relates to piezo-electric device technical field, more particularly to a kind of piezoelectric vibrator and preparation method thereof.
Background technology
At present, piezoelectric vibrator is widely used in the electronics such as timer, communication apparatus, electronic toy, alarm and computer
It is used in product as sounding component.
However, general piezoelectric vibrator is molding by way of adhesive bonding.However, bonded by adhesive
The compression strength and impact strength of the molding piezoelectric vibrator of method are poor, and the reliability bonded can not satisfy the use demand.
Invention content
Based on this, it is necessary to for the resistance to compression of drive piezo oscillator, impact strength difference and the problem of poor reliability, provide
A kind of piezoelectric vibrator for improving compression strength, impact strength and reliability and preparation method thereof.
Piezoelectric vibrator, including：
Substrate；
Vibration level is set to the substrate side, and the electrode layer including being stacked and at least one layer of piezoceramics layer,
The electrode layer includes multilayer, and each piezoceramics layer is between the adjacent electrode layer；
Wherein, adjacent two piezoceramics layers polarization direction on the contrary, and the piezoelectric vibrator the substrate and institute
It is in one that vibration level, which is stated, by being laminated and being sintered.
Above-mentioned piezoelectric vibrator, including substrate and vibration level, and vibration level includes the electrode layer being stacked and at least one layer
Piezoceramics layer is in one by being laminated and being sintered, forms overall structure.Since the piezoelectric vibrator will not by adhesive
Each layer is bonded together, but by being laminated and being sintered in integral structure, therefore the structural strength of piezoelectric vibrator and reliability are not
It is influenced by adhesive, so as to improve the compression strength of piezoelectric vibrator, impact strength and reliability.
In one embodiment, the material of the substrate is glass-ceramic, and several closings are distributed in the substrate
Hole.
In one embodiment, the described hole in the ceramic substrate is uniformly distributed.
In one embodiment, every layer of electrode layer includes first electrode and spaced with the first electrode
Second electrode, the first electrode and the second electrode of every layer of electrode layer are covered in a piezoceramics layer one
Side side, and the area coverage of the first electrode is more than the area coverage of the second electrode.
In one embodiment, the first electrode of every layer of electrode layer and the second electrode are arranged side by side, and
Be directed toward in every layer of electrode layer by the first electrode in the direction electrode layer adjacent thereto of the second electrode by
The direction that the first electrode is directed toward the second electrode is opposite.
In one embodiment, the vibration level further includes：
Close to the first electrode of described vibration level the same end and institute in first extraction electrode, with each layer electrode layer
State second electrode electrical connection；
Close to the first electrode of the vibration level opposite other end in second extraction electrode, with each layer electrode layer
And the second electrode electrical connection.
In one embodiment, the vibration level be provided with run through its opposite sides two through holes, described first
Extraction electrode is arranged in wherein one through hole, and second extraction electrode is arranged in another through hole, so that described
First extraction electrode and second extraction electrode lead to a side surface of the vibration level far from the substrate respectively.
In one embodiment, first extraction electrode and second extraction electrode lead to the vibration level respectively
The end face of opposite end.
Piezoelectric vibrator preparation method, including step：
One substrate is provided；
Vibration level is molded in the side of the substrate, forms element idiosome；
The element idiosome is laminated, and the element idiosome is cut to form multiple piezoelectric vibrators；
Molding is sintered to the piezoelectric vibrator.
Above-mentioned piezoelectric vibrator preparation method is molded vibration level in the side of substrate, forms element idiosome, and to element idiosome
It is laminated, element idiosome is then cut into multiple piezoelectric vibrators, then each piezoelectric vibrator is sintered, form one knot
Structure.Each layer is bonded together since the piezoelectric vibrator needs not move through adhesive, but is in one by being laminated and being sintered
Structure, therefore the structural strength of piezoelectric vibrator and reliability are not influenced by adhesive, so as to improve the resistance to compression of piezoelectric vibrator
Intensity, impact strength and reliability.
In one embodiment, step is further included before the step of forming the element idiosome：
Shape is stacked in the opposite sides shaped electrode layer of piezoelectric ceramic plate, and by least one piezoelectric ceramic plate
Into the vibration level.
Description of the drawings
Fig. 1 is the structure diagram of the piezoelectric vibrator in an embodiment of the present invention；
Fig. 2 is the decomposition texture schematic diagram of the piezoelectric vibrator in Fig. 1；
Fig. 3 is the structure diagram of the electrode layer of the piezoelectric vibrator in Fig. 1；
Fig. 4 is the flow chart of the piezoelectric vibrator preparation method in an embodiment of the present invention；
Fig. 5 is the flow chart of the piezoelectric vibrator preparation method in another embodiment of the present invention.
Wherein, 10 piezoelectric vibrator；100 substrates；110 vibration levels；112 piezoceramics layers；114 electrode layers；1140 first electricity
Pole；1142 second electrodes.
Specific embodiment
For the ease of understanding the present invention, the present invention is described more fully below with reference to relevant drawings.In attached drawing
Give the preferred embodiment of the present invention.But the present invention can realize in many different forms, however it is not limited to herein
Described embodiment.On the contrary, the purpose for providing these embodiments is to make the understanding to the disclosure more saturating
It is thorough comprehensive.
It should be noted that when element is referred to as " being fixed on " another element, it can be directly on another element
Or there may also be elements placed in the middle.When an element is considered as " connection " another element, it can be directly connected to
To another element or it may be simultaneously present centering elements.Term as used herein " vertical ", " horizontal ", " left side ",
" right side " and similar statement are for illustrative purposes only.
Unless otherwise defined, all of technologies and scientific terms used here by the article is with belonging to technical field of the invention
The normally understood meaning of technical staff is identical.Term used in the description of the invention herein is intended merely to description tool
The purpose of the embodiment of body, it is not intended that in the limitation present invention.Term as used herein " and/or " including one or more phases
The arbitrary and all combination of the Listed Items of pass.
As shown in Figures 1 and 2, the piezoelectric vibrator 10 in one embodiment of the application, including substrate 100 and is set to substrate
The vibration level 110 of 100 sides.Vibration level 110 includes the electrode layer 114 being stacked and at least one layer of piezoceramics layer 112, electricity
Pole layer 114 includes multilayer, and each piezoceramics layer 112 is between adjacent electrode layer 114.
Wherein, adjacent two piezoceramics layer 112 polarization direction on the contrary, and piezoelectric vibrator 10 substrate 100 and vibration level
110 by being laminated and being sintered in one.
Above-mentioned piezoelectric vibrator 10, including substrate 100 and vibration level 110, and vibration level 110 includes the electrode layer being stacked
114 and at least one layer of piezoceramics layer 112, it is in one by being laminated and being sintered, forms overall structure.Due to the piezoelectric vibrator 10
Each layer is bonded together not by adhesive, but by being laminated and being sintered in integral structure, therefore piezoelectric vibrator 10
Structural strength and reliability do not influenced by adhesive, so as to improve the compression strength of piezoelectric vibrator 10, impact strength
And reliability.
In one embodiment, the material of the substrate 100 is glass-ceramic, and several blind bores are distributed in the substrate
Hole.Further, several holes are uniformly distributed in the substrate 100.
Specifically, hole diameter is 20~100 μm.
Further, the density of substrate 100 after sintering is less than or equal to 0.6g/cm3, thickness is the piezoelectric vibrator 10
The 1/4 of operation wavelength.
Specifically, vibration level 110 includes two layers of piezoceramics layer 112, and the opposite sides of vibration level 110 and two layers of piezoelectricity
Three layers of electrode layer 114 are provided between ceramic layer 112.
In one embodiment, substrate 100 includes component SiO2、ZnO、Al2O3、B2O3Deng.
In one embodiment, the sintering temperature of piezoelectric vibrator 10 is 900~1000 DEG C.
In one embodiment, the thickness of piezoceramics layer 112 is 60 μm.
Please also refer to Fig. 3, in one embodiment, every layer of electrode layer 114 includes first electrode 1140 and with first
1140 spaced second electrode 1142 of electrode, the first electrode 1140 and second electrode 1142 of every layer of electrode layer 114 are covered
The side side of a piezoceramics layer 112 is placed on, and the area coverage of first electrode 1140 is more than the covering of second electrode 1142
Area.
Further, the first electrode 1140 of every layer of electrode layer 114 and second electrode 1142 are arranged side by side, every layer of electrode layer
It is directed toward in the direction electrode layer 114 adjacent thereto of second electrode 1142 by first electrode 1140 by first electrode 1140 in 114
The direction for being directed toward second electrode 1142 is opposite.
Further, vibration level 110 further includes the first extraction electrode (not shown) and the second extraction electrode (not shown).
First extraction electrode and the first electrode 1140 and second electrode close to vibration level the same end in each layer electrode layer 114
1142 electrical connections.
The first electrode 1140 of the second extraction electrode other end opposite with vibration level 110 close in each layer electrode layer 114
And second electrode 1142 is electrically connected.It is each layer in this way, when the first extraction electrode is electrically connected external power supply with the second extraction electrode
Piezoceramics layer 112 provides operating voltage.
In one embodiment, vibration level 110 is provided with two through hole (not shown) for running through its opposite sides, the
One extraction electrode is arranged in wherein one through hole, and the second extraction electrode is arranged in another through hole, so that first draws
Go out electrode and the second extraction electrode leads to a side surface of the vibration level far from substrate respectively.
Alternatively, the first extraction electrode and the second extraction electrode lead to the end face of the opposite end of vibration level 110 respectively, such as
This, does not need to carry out trepanning to vibration level 110, you can realizes the electrode in electrode layer 114 leading to the outer of vibration level 110
Side convenient for being electrically connected with external power supply, and does not reduce the intensity of vibration level 110.
It is understood that the side of the opposite sides of vibration level 110 and the end face of the opposite end of vibration level 110 are mutual
Vertically.That is, the perpendicular line of the opposite sides side of vibration level 110 is vibrated through each layer piezoceramics layer 112
The vertical line and each layer piezoceramics layer 112 of the end face of the opposite end of layer 110 are parallel.
In one embodiment, first electrode 1140 and second electrode 1142 include being rectangle.In another embodiment
In, first electrode 1140 and second electrode 1142 may be other shapes, as long as the area coverage of first electrode 1140 is more than
The area coverage of second electrode 1142.
Fig. 4 and Fig. 5 is referred to, according to above-mentioned piezoelectric vibrator, the application also provides a kind of preparation method of piezoelectric vibrator, packet
Include step：
S110：One substrate is provided；
S120：Vibration level is molded in the side of substrate, forms element idiosome；
S130：Element idiosome is laminated, and element idiosome is cut to form multiple piezoelectric vibrators；
S140：Molding is sintered to piezoelectric vibrator.
Above-mentioned piezoelectric vibrator preparation method is molded vibration level in the side of substrate, forms element idiosome, and to element idiosome
It is laminated, element idiosome is then cut into multiple piezoelectric vibrators, then each piezoelectric vibrator is sintered, form one knot
Structure.Each layer is bonded together since the piezoelectric vibrator needs not move through adhesive, but is in one by being laminated and being sintered
Structure, therefore the structural strength of piezoelectric vibrator and reliability are not influenced by adhesive.So as to improve the resistance to compression of piezoelectric vibrator
Intensity, impact strength and reliability.
Specifically, the material of the substrate is glass-ceramic, and several blind bore holes are distributed in the substrate.Further
Ground, several holes are uniformly distributed in the substrate.
Specifically, hole diameter is 20~100 μm.
Specifically, the temperature of the sinter molding of piezoelectric vibrator is 900~1000 DEG C.
Specifically, the density of substrate after sintering is less than or equal to 0.6g/cm3, thickness is the operating wave of the piezoelectric vibrator
Long 1/4.
In one embodiment, step S150 is further included after step s 140：
It polarizes respectively to every layer of piezoelectric ceramic plate；
Wherein, the polarization direction of adjacent two piezoelectric ceramic plate is opposite.
Further, step S121 is further included before step S120：
In the opposite sides shaped electrode layer of piezoelectric ceramic plate, and by least one piezoelectric ceramic plate for being formed with electrode layer
It is stacked to form vibration level.
Specifically, the electrode layer of piezoelectric ceramic plate opposite sides is covered in using printing technology molding in step S121.
It is understood that molding electrode layer includes first electrode and second electrode in step S121.
Specifically, in step S121 the first electrode of molding electrode layer with second electrode side by side and compartment of terrain is covered in
The side side of piezoelectric ceramic plate, the area coverage of the first electrode are more than the area coverage of the second electrode.
Further, the direction for being directed toward second electrode in every layer of electrode layer by first electrode in step S121 is adjacent thereto
Electrode layer in by first electrode be directed toward second electrode direction it is opposite.That is, the first electrode in adjacent two electrode layer
It is opposite with the arragement direction of second electrode.
Specifically, the first electrode of molding electrode layer and second electrode can rectangular or circles in step S121
The other shapes such as shape, ellipse.
In one embodiment, step S123 is further included between step S121 and step S120：
First electrode in every layer of electrode layer and second electrode are led into a side surface of the vibration level far from substrate respectively.
Specifically, step S123 is specifically included：
Two through holes through its opposite sides, and the pass through aperture wherein by way of filling perforation are opened up in vibration level
The first extraction electrode of interior molding is molded the second extraction electrode, and the first extraction electrode and each layer electrode layer in another through hole
In close to vibration level the same end first electrode and second electrode electrical connection.Second extraction electrode shakes with close in each layer electrode layer
The first electrode of dynamic layer opposite other end and second electrode electrical connection.
In another embodiment, step S123 is may not include between step S121 and step S120, but in step
Include step S151 after S150：
First electrode in every layer of electrode layer and second electrode are led to the end face of the opposite end of vibration level respectively.
Specifically, step S151 is specifically included：
The first electrode of every layer of electrode layer and second electrode are extended respectively into the end of corresponding vibration level, and will prolong
The first electrode of vibration level one end and second electrode electrical connection are extended to, the first extraction electrode is formed, it is opposite to will extend into vibration level
First electrode and the second electrode electrical connection of the other end, form the second extraction electrode.
It is understood that first extraction electrode and the second extraction electrode with external power supply for being electrically connected, it is each pressure
Electroceramics plate provides operating voltage so that piezoelectric vibrator is in beam mode.
Specifically, the first extraction electrode in step S151 and the second extraction electrode can be used printing or sputtering technology into
Shape.
Each technical characteristic of embodiment described above can be combined arbitrarily, to make description succinct, not to above-mentioned reality
It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, it is all considered to be the range of this specification record.
Embodiment described above only expresses the several embodiments of the present invention, and description is more specific and detailed, but simultaneously
It cannot therefore be construed as limiting the scope of the patent.It should be pointed out that those of ordinary skill in the art are come
It says, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to the protection of the present invention
Range.Therefore, the protection domain of patent of the present invention should be determined by the appended claims.
Claims (10)
1. piezoelectric vibrator, which is characterized in that including：
Substrate；
Vibration level is set to the substrate side, and the electrode layer including being stacked and at least one layer of piezoceramics layer, described
Electrode layer includes multilayer, and each piezoceramics layer is between the adjacent electrode layer；
Wherein, the polarization direction of adjacent two piezoceramics layers is on the contrary, and the substrate of the piezoelectric vibrator and described shake
Dynamic layer is in one by being laminated and being sintered.
2. piezoelectric vibrator according to claim 1, which is characterized in that the material of the substrate is glass-ceramic, and described
Several blind bore holes are distributed in substrate.
3. piezoelectric vibrator according to claim 2, which is characterized in that the described hole in the ceramic substrate uniformly divides
Cloth.
4. piezoelectric vibrator according to claim 1, which is characterized in that every layer of electrode layer include first electrode and with
The spaced second electrode of first electrode, the first electrode and the second electrode of every layer of electrode layer are covered
A piezoceramics layer side side is placed on, and the area coverage of the first electrode is more than the covering surface of the second electrode
Product.
5. piezoelectric vibrator according to claim 4, which is characterized in that the first electrode of every layer of electrode layer and institute
It states second electrode to be arranged side by side, and by the direction of the first electrode direction second electrode and its in every layer of electrode layer
The direction for being directed toward the second electrode in the adjacent electrode layer by the first electrode is opposite.
6. piezoelectric vibrator according to claim 5, which is characterized in that the vibration level further includes：
Close to the first electrode of described vibration level the same end and described the in first extraction electrode, with each layer electrode layer
Two electrodes are electrically connected；
Close to the first electrode of the vibration level opposite other end and institute in second extraction electrode, with each layer electrode layer
State second electrode electrical connection.
7. piezoelectric vibrator according to claim 6, which is characterized in that the vibration level, which is provided with, runs through its opposite sides
Two through holes, first extraction electrode is arranged in wherein one through hole, and second extraction electrode is arranged in separately
One through hole, so that first extraction electrode and second extraction electrode lead to the vibration level far from institute respectively
State a side surface of substrate.
8. piezoelectric vibrator according to claim 6, which is characterized in that first extraction electrode and the second extraction electricity
Pole leads to the end face of the vibration level opposite end respectively.
9. piezoelectric vibrator preparation method, which is characterized in that including step：
One substrate is provided；
Vibration level is molded in the side of the substrate, forms element idiosome；
The element idiosome is laminated, and the element idiosome is cut to form multiple piezoelectric vibrators；
Molding is sintered to the piezoelectric vibrator.
10. piezoelectric vibrator preparation method according to claim 9, which is characterized in that in the step for forming the element idiosome
Step is further included before rapid：
It is stacked to form institute in the opposite sides shaped electrode layer of piezoelectric ceramic plate, and by least one piezoelectric ceramic plate
State vibration level.
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| CN201711436908.7A CN108206236A (en) | 2017-12-26 | 2017-12-26 | Piezoelectric vibrator and preparation method thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113140667A (en) * | 2021-04-22 | 2021-07-20 | 广东奥迪威传感科技股份有限公司 | Piezoelectric vibration device |
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