CN108193265A - Based on optical micro- drop-down stove seed crystal centering adjusting method - Google Patents
Based on optical micro- drop-down stove seed crystal centering adjusting method Download PDFInfo
- Publication number
- CN108193265A CN108193265A CN201810007665.3A CN201810007665A CN108193265A CN 108193265 A CN108193265 A CN 108193265A CN 201810007665 A CN201810007665 A CN 201810007665A CN 108193265 A CN108193265 A CN 108193265A
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- China
- Prior art keywords
- crucible
- image
- seed rod
- camera
- seed
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Classifications
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/08—Downward pulling
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
Abstract
The invention discloses one kind based on optical micro- drop-down stove seed crystal centering adjusting method, include the following steps：1）Camera is installed, which connect after imaging sensor and communication module with monitor terminal image；2）Crucible image is acquired by camera；3）Seed rod is put into, the image of seed rod is then acquired by camera；4）Carry out image definition calculating；5）The clarity of image is sent to monitor terminal；6）Monitor terminal judges whether distance value size of the crucible away from camera and distance value size of the seed rod away from camera are consistent；7）Staff is front and rear to adjust seed rod；8）Repeat step 4）—7）, until seed rod and crucible centering；9）In seeding growth course, step 4 is repeated）—8）.The present invention can quickly judge seed crystal and crucible whether centering, so as to adjust the position between seed rod and crucible in time, so as to ensure the growth quality of crystal and stability.
Description
Technical field
The present invention relates to technical field of crystal growth more particularly to one kind to be adjusted based on optical micro- drop-down stove seed crystal centering
Method.
Background technology
Micro- drop-down (Micro-Pulling-Down, μ-PD) method crystal growing furnace is directly to prepare high quality fibers monocrystalline
Professional equipment can realize that diameter reaches 1000mm, the uniform high quality fibers monocrystalline of component up to 0.5-5mm, length.With the equipment
The fiber monocrystalline of growth is development efficient mini laser light source, high temperature detection equipment, high-resolution medical image system, novel photoelectric
The critical material of device etc..
Micro- drop-down crystal growth technique is as follows, and the charging feedstock in crucible is melted raw material by medium, high frequency sensing heater
Change, then rise seed crystal and approached with crucible, by micro- drop-down system call interception seed crystal position, adjust power control melt temperature, shape
Into stable meniscus, the fiber monocrystalline of given shape is obtained, then starts slowly drop-down under seed crystal traction, finally when fiber list
Solid liquid interface is pulled after crystals growth to certain length, and is cooled down, is finally completed the preparation of fiber monocrystalline.
In micro- glass tube down-drawing crystal growing process, the centering of seed crystal and crucible is extremely important, and seeding technique is by seed crystal and earthenware
The melt drop contact of crucible bottom starts, and can the centering degree of seed crystal and crucible determines substantially grow crystal.If seed crystal
Larger with crucible deviation, the crystal grown is easily broken, in some instances it may even be possible to can not seeding.Before crystal growth, staff is led to
Often by observation window or direct visual perception seed crystal and the whether direct centering of crucible, adopt this method be easy to judge seed crystal and
Crucible whether left and right centering, but whether seed crystal before and after crucible in being difficult to judge.
Convex lens meet lens imaging formula：1/u+1/v=1/f is (i.e.：The sum of the inverse of object distance and the inverse of image distance
Equal to the inverse of focal length.If) image distance and focal length it is certain, when convex lens is into sharply defined image, object distance also one is set to definite value.Based on this,
The present invention provides one kind based on optical micro- drop-down stove seed crystal centering adjusting method, it can realize that seed crystal is accurately front and rear with crucible
Centering.
Invention content
For deficiencies of the prior art, it is an object of the invention to solve seed crystal and crucible centering to judge to be stranded
Difficulty leads to the problem of crystal growth is of poor quality, and stability is low, provides a kind of based on optical micro- drop-down stove seed crystal centering adjusting side
Method, can quickly judge seed crystal and crucible whether centering, so as to adjust the position between seed rod and crucible in time, so as to ensure
The growth quality and stability of crystal.
In order to solve the above-mentioned technical problem, the technical solution adopted by the present invention is such：One kind based on it is optical it is micro- under
Draw stove seed crystal centering adjusting method, it is characterised in that：Include the following steps：
1) camera, and the position face contacted with crucible and seed crystal, the camera shooting are installed on the observation window of micro- drop-down stove
Head is connect after imaging sensor and communication module with monitor terminal Image communicating；
2) crucible image is acquired by camera, and adjusts the image distance of camera, make the crucible image imaging clearly of acquisition；
3) it keeps the image distance of camera constant, is put into seed rod, and regulate the position of seed rod, then passes through camera
Acquire the image of seed rod；
4) the crucible image and seed rod image that imaging sensor acquires camera carry out image definition calculating respectively；
5) clarity of crucible image and seed rod image is sent to monitor terminal by imaging sensor through communication module；
6) after monitor terminal receives the signal of imaging sensor transmission, comparison crucible image is clear with seed rod image
Degree, judges whether distance value size of the crucible away from camera and distance value size of the seed rod away from camera are consistent：If clarity
Unanimously, then crucible is identical with seed rod object distance, and seed rod and crucible are consistent away from camera distance at this time, before and after seed rod and crucible
Centering；If clarity is inconsistent, crucible is different from seed rod object distance, i.e., seed rod has partially with crucible away from camera distance at this time
Difference, seed rod and the front and rear deviation of crucible；
7) staff adjusts forward seed rod according to the result that monitor terminal is shown, repeats step 4) -6), if image
Clarity increases, then continues to adjust seed rod；If image definition reduces, seed rod is adjusted backward；
8) step 4) -7 are repeated), until the clarity of seed rod is consistent with the clarity of crucible, realize seed rod and earthenware
Crucible centering；
9) in seeding growth course, step 4) -8 are repeated), you can judge the relative position of seed crystal and crucible, and pass through tune
It saves seed rod and realizes seed crystal and crucible centering.
Further, described image clarity is differentiated using point sharpness method, is conceived to around each pixel of statistics
Gray scale spread condition, Image Definition calculating formula are as follows：
Wherein, image size is m × n, and f (x, y) is the gray value of respective pixel, and df is grey scale change amplitude, and dx is picture
Distance increment between element.
Further, described image sensor is CCD or cmos image sensor.
Compared with prior art, the invention has the advantages that：It, can be fast by Image Acquisition, processing and comparative analysis
Speed judge seed crystal and crucible front and back position whether centering；In this way, staff can just be adjusted in time, so as to fulfill seed
(front and rear) centering of brilliant (bar) and crucible, can greatly improve growing efficiency in this way, and ensure to ensure the growth matter of crystal
Amount and stability.
Description of the drawings
Fig. 1 is the connection block diagram of the equipment used herein arrived.
Specific embodiment
Below in conjunction with accompanying drawings and embodiments, the invention will be further described.
Embodiment：Referring to Fig. 1, one kind is based on optical micro- drop-down stove seed crystal centering adjusting method, it is characterised in that：Including
Following steps：
1) camera is installed, and position (the i.e. bottom of crucible contacted with crucible and seed crystal on the observation window of micro- drop-down stove
Portion position) face, which connect after imaging sensor and communication module with monitor terminal Image communicating；It was embodied
Cheng Zhong, which uses wireless communication module, more convenient, clean and tidy so as to be laid out.
2) crucible image is acquired by camera, and adjusts the image distance of camera, make the crucible image imaging clearly of acquisition.
3) it keeps the image distance of camera constant, is put into seed rod, and regulate the position of seed rod, then passes through camera
Acquire the image of seed rod；In specific implementation process, rise seed rod, make seed rod (or seed crystal in seed rod upper recess)
It approaches, but does not contact with crucible mouth, be aligned seed crystal and crucible or so by observation window adjusting.
4) the crucible image and seed rod image that imaging sensor acquires camera carry out image definition calculating respectively；
Described image sensor is CCD or cmos image sensor.
5) clarity of crucible image and seed rod image is sent to monitor terminal by imaging sensor through communication module.
6) after monitor terminal receives the signal of imaging sensor transmission, comparison crucible image is clear with seed rod image
Degree, judges whether distance value size of the crucible away from camera and distance value size of the seed rod away from camera are consistent.If clarity
Unanimously, then crucible is identical with seed rod object distance, and seed rod and crucible are consistent away from camera distance at this time, before and after seed rod and crucible
Centering；If clarity is inconsistent, crucible is different from seed rod object distance, i.e., seed rod has partially with crucible away from camera distance at this time
Difference, seed rod and the front and rear deviation of crucible；
Wherein, described image clarity differentiates the gray scale for using point sharpness method, being conceived to and counting around each pixel
Spread condition, Image Definition calculating formula are as follows：
Wherein, image size is m × n, and f (x, y) is the gray value of respective pixel, and df is grey scale change amplitude, and dx is picture
Distance increment between element.
7) staff adjusts forward seed rod according to the result that monitor terminal is shown, repeats step 4) -6), if image
Clarity increases, then continues to adjust seed rod；If image definition reduces, seed rod is adjusted backward；
8) step 4) -7 are repeated), until the clarity of seed rod is consistent with the clarity of crucible, realize seed rod and earthenware
Crucible centering；
9) in seeding growth course, step 4) -8 are repeated), you can judge the relative position of seed crystal and crucible, and pass through tune
It saves seed rod and realizes seed crystal and crucible centering.
Finally it should be noted that the above embodiments are merely illustrative of the technical solutions of the present invention rather than restriction technologies side
Case, it will be understood by those of ordinary skill in the art that, those are modified or replaced equivalently technical scheme of the present invention, and
The objective and range of the technical program are not departed from, is intended to be within the scope of the claims of the invention.
Claims (3)
1. one kind is based on optical micro- drop-down stove seed crystal centering adjusting method, it is characterised in that：Include the following steps：
1) camera, and the position face contacted with crucible and seed crystal, camera warp are installed on the observation window of micro- drop-down stove
It is connect after imaging sensor and communication module with monitor terminal Image communicating；
2) crucible image is acquired by camera, and adjusts the image distance of camera, make the crucible image imaging clearly of acquisition；
3) it keeps the image distance of camera constant, is put into seed rod, and regulate the position of seed rod, is then acquired by camera
The image of seed rod；
4) the crucible image and seed rod image that imaging sensor acquires camera carry out image definition calculating respectively；
5) clarity of crucible image and seed rod image is sent to monitor terminal by imaging sensor through communication module；
6) after monitor terminal receives the signal of imaging sensor transmission, the clarity of comparison crucible image and seed rod image,
Judge whether distance value size of the crucible away from camera and distance value size of the seed rod away from camera are consistent：If clarity one
Cause, then crucible is identical with seed rod object distance, at this time seed rod and crucible away from camera distance unanimously, seed rod with it is right before and after crucible
In；If clarity is inconsistent, crucible is different from seed rod object distance, i.e., seed rod has partially with crucible away from camera distance at this time
Difference, seed rod and the front and rear deviation of crucible；
7) staff adjusts forward seed rod according to the result that monitor terminal is shown, repeats step 4) -6), if image clearly
Degree increase then continues to adjust seed rod；If image definition reduces, seed rod is adjusted backward；
8) step 4) -7 are repeated), until the clarity of seed rod is consistent with the clarity of crucible, realize seed rod and crucible pair
In；
9) in seeding growth course, step 4) -8 are repeated), you can judge the relative position of seed crystal and crucible, and pass through adjusting seed
Crystalline style realizes seed crystal and crucible centering.
It is 2. according to claim 1 based on optical micro- drop-down stove seed crystal centering adjusting method, it is characterised in that：The figure
Image sharpness differentiates the gray scale spread condition for using point sharpness method, being conceived to and counting around each pixel, image definition
Evaluation function calculating formula is as follows：
Wherein, image size is m × n, and f (x, y) is the gray value of respective pixel, and df is grey scale change amplitude, and dx is between pixel
Distance increment.
It is 3. according to claim 1 based on optical micro- drop-down stove seed crystal centering adjusting method, it is characterised in that：The figure
As sensor is CCD or cmos image sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810007665.3A CN108193265A (en) | 2018-01-04 | 2018-01-04 | Based on optical micro- drop-down stove seed crystal centering adjusting method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810007665.3A CN108193265A (en) | 2018-01-04 | 2018-01-04 | Based on optical micro- drop-down stove seed crystal centering adjusting method |
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| CN108193265A true CN108193265A (en) | 2018-06-22 |
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| CN201810007665.3A Pending CN108193265A (en) | 2018-01-04 | 2018-01-04 | Based on optical micro- drop-down stove seed crystal centering adjusting method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115125609A (en) * | 2022-07-19 | 2022-09-30 | 山东新升光电科技有限责任公司 | Sapphire seeding control process and system based on image processing algorithm |
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| JP2005179123A (en) * | 2003-12-19 | 2005-07-07 | Sumitomo Mitsubishi Silicon Corp | Method for pulling single crystal and apparatus therefor |
| CN101168848A (en) * | 2006-10-23 | 2008-04-30 | 北京有色金属研究总院 | Method for controlling fused silicon liquid level position of czochralski silicon mono-crystal furnace |
| CN102026914A (en) * | 2008-05-16 | 2011-04-20 | 株式会社德山 | Pretreated metal fluorides and process for production of fluoride crystals |
| CN206635454U (en) * | 2017-03-28 | 2017-11-14 | 中国电子科技集团公司第二十六研究所 | A kind of micro- drop-down stove seed rod position adjustment structure |
-
2018
- 2018-01-04 CN CN201810007665.3A patent/CN108193265A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005179123A (en) * | 2003-12-19 | 2005-07-07 | Sumitomo Mitsubishi Silicon Corp | Method for pulling single crystal and apparatus therefor |
| CN101168848A (en) * | 2006-10-23 | 2008-04-30 | 北京有色金属研究总院 | Method for controlling fused silicon liquid level position of czochralski silicon mono-crystal furnace |
| CN102026914A (en) * | 2008-05-16 | 2011-04-20 | 株式会社德山 | Pretreated metal fluorides and process for production of fluoride crystals |
| CN206635454U (en) * | 2017-03-28 | 2017-11-14 | 中国电子科技集团公司第二十六研究所 | A kind of micro- drop-down stove seed rod position adjustment structure |
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| 沙定国等: "《光学测试技术》", 31 January 2010, 北京理工大学出版社 * |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115125609A (en) * | 2022-07-19 | 2022-09-30 | 山东新升光电科技有限责任公司 | Sapphire seeding control process and system based on image processing algorithm |
| CN115125609B (en) * | 2022-07-19 | 2023-11-03 | 山东新升光电科技有限责任公司 | Sapphire seeding control process and system based on image processing algorithm |
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Application publication date: 20180622 |
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