CN108169998A - Mask plate and its application method, exposure sources - Google Patents
Mask plate and its application method, exposure sources Download PDFInfo
- Publication number
- CN108169998A CN108169998A CN201810004145.7A CN201810004145A CN108169998A CN 108169998 A CN108169998 A CN 108169998A CN 201810004145 A CN201810004145 A CN 201810004145A CN 108169998 A CN108169998 A CN 108169998A
- Authority
- CN
- China
- Prior art keywords
- mask
- light transmission
- air bag
- mask unit
- transmission air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 11
- 230000005540 biological transmission Effects 0.000 claims abstract description 122
- 239000000975 dye Substances 0.000 claims description 8
- 238000009738 saturating Methods 0.000 claims description 6
- 239000002775 capsule Substances 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 3
- 238000001125 extrusion Methods 0.000 claims description 2
- YGYAWVDWMABLBF-UHFFFAOYSA-N Phosgene Chemical compound ClC(Cl)=O YGYAWVDWMABLBF-UHFFFAOYSA-N 0.000 claims 3
- 239000000565 sealant Substances 0.000 abstract description 18
- 238000005516 engineering process Methods 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 description 16
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/54—Absorbers, e.g. of opaque materials
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
Abstract
The present invention provides a kind of mask plate and its application method, exposure sources, belong to display technology field.Wherein, mask plate, including：Multiple mask units of array arrangement, each mask unit include shading status and light transmission state；Control unit, for each mask unit to be controlled to be switched between shading status and light transmission state.By technical scheme of the present invention, same mask plate is enabled to be suitable for the curing of the sealant of different display products.
Description
Technical field
The present invention relates to display technology fields, particularly relate to a kind of mask plate and its application method, exposure sources.
Background technology
In existing liquid crystal display, color membrane substrates and array substrate are packaged together by sealant.To sealant
When being cured, need to carry out uv-exposure to sealant using mask plate.
The size and model of liquid crystal display are varied, and the liquid crystal display of different sizes and different model is come
It says, needs to design different mask plates to cure sealant.In the prior art, in the display product of production different model
When, different mask plates is needed replacing to carry out uv-exposure, it is not only cumbersome, and reduce production efficiency.
Invention content
The technical problem to be solved in the present invention is to provide a kind of mask plate and its application method, exposure sources, enable to
Same mask plate is suitable for the curing of the sealant of different display products.
In order to solve the above technical problems, the embodiment of the present invention offer technical solution is as follows：
On the one hand, a kind of mask plate is provided, including：
Multiple mask units of array arrangement, each mask unit include shading status and light transmission state；
Control unit, for each mask unit to be controlled to be switched between shading status and light transmission state.
Further, the mask unit includes：
Accommodating chamber；
Shading solution positioned at the accommodating chamber bottom；
Light transmission air bag at the top of the accommodating chamber, it is described when the volume of the light transmission air bag is less than first threshold
Shading solution is laid in the accommodating chamber bottom, and the mask unit is in shading status；It is big in the volume of the light transmission air bag
When second threshold, the light transmission air bag is by the shading Solution extrusion to the accommodating chamber edge, at the mask unit
In light transmission state, the second threshold is more than the first threshold.
Further, described control unit includes：
The vent line connected with the light transmission air bag；
The air valve being arranged on vent line；
Controller, for controlling the closing of the air valve and opening, to control the vent line to the light transmission air bag
The gas that being passed through gas makes the volume of the light transmission air bag be more than in second threshold or the discharge light transmission air bag makes the light transmission
The volume of air bag is less than first threshold.
Further, the shading solution is the organic solution containing black dyes.
Further, the accommodating chamber is in cubic or cylindrical shape.
Further, the volume of the shading solution is the 1/5-1/7 of the accommodating chamber capacity.
The embodiment of the present invention additionally provides a kind of application method of mask plate as described above, including：
Determine required mask graph；
Control the first mask unit corresponding with required mask graph is in shading status, and control is covered with required
The second mask unit except corresponding first mask unit of mould figure is in light transmission state.
Further, the control the first mask unit corresponding with required mask graph is in shading status, controls
The second mask unit except system the first mask unit corresponding with required mask graph includes in light transmission state：
The volume of the light transmission air bag of first mask unit is controlled to be more than second threshold, controls second mask unit
Light transmission air bag volume be less than first threshold.
Further, the volume of the light transmission air bag of control first mask unit includes more than second threshold：
Control corresponding with the light transmission air bag of first mask unit air valve opening, by with first mask unit
The light transmission air bag of from vent line to first mask unit of light transmission air bag connection be passed through gas so that first mask
The volume of the light transmission air bag of unit is more than second threshold；
The volume of the light transmission air bag of control second mask unit includes less than first threshold：
When the initial volume of the light transmission air bag of second mask unit is less than first threshold, control is covered with described second
The corresponding air valve of light transmission air bag of form unit is closed；It is more than first in the initial volume of the light transmission air bag of second mask unit
During threshold value, control corresponding with the light transmission air bag of second mask unit air valve opening, by with second mask unit
The vent line of light transmission air bag connection discharge gas in the light transmission air bag of second mask unit so that described second covers
The volume of the light transmission air bag of form unit is less than first threshold.
The embodiment of the present invention additionally provides a kind of exposure sources, including mask plate as described above.
The embodiment of the present invention has the advantages that：
In said program, mask plate is divided into multiple mask units of array arrangement, each mask unit includes shading shape
State and light transmission state, and the state of each mask unit can be controlled individually, can pass through control according to the needs of display product in this way
The state of each mask unit is made, is spliced into different mask patterns so that mask plate can be suitable for different model display production
The curing of the sealant of product.When producing different display products using the mask plate of the present embodiment, if mask plate at it just
It does not all need to replace within the scope of normal service life, the display of different model can be produced by the mask pattern for controlling mask plate
The sealant of product is cured so that and technological operation is simple, improves the production efficiency of display product, saves energy consumption,
Reduce the production cost of display product.
Description of the drawings
Fig. 1 is the floor map of mask plate of the embodiment of the present invention；
Fig. 2 is schematic diagram when mask unit of the present invention is in shading status；
Fig. 3 is schematic diagram when mask unit of the embodiment of the present invention is in light transmission state.
Reference numeral
1 mask plate
2 mask units
3 accommodating chambers
4 shading solution
5 light transmission air bags
6 vent lines
7 air valves
8 ultraviolet lights
Specific embodiment
To make the embodiment of the present invention technical problems to be solved, technical solution and advantage clearer, below in conjunction with
Drawings and the specific embodiments are described in detail.
In the prior art, in the display product for producing different model, it is ultraviolet to carry out to need replacing different mask plates
Exposure, it is not only cumbersome, and reduce the production efficiency of display product.
The embodiment of the present invention can make in view of the above-mentioned problems, provide a kind of mask plate and its application method, exposure sources
Obtain the curing that same mask plate is suitable for the sealants of different display products.
The embodiment of the present invention provides a kind of mask plate 1, as shown in Figure 1, mask plate 1 includes：
Multiple mask units 2 of array arrangement, each mask unit 2 include shading status and light transmission state；
Control unit, for each mask unit 2 to be controlled to be switched between shading status and light transmission state.
In the present embodiment, divide mask plate 1 to multiple mask units 2 for array arrangement, each mask unit 2 includes shading
State and light transmission state, and the state of each mask unit 2 can be controlled individually, can be led in this way according to the needs of display product
The state for controlling each mask unit 2 is crossed, is spliced into different mask patterns so that mask plate 1 can be suitable for different model
Show the curing of the sealant of product.When the mask plate 1 using the present embodiment produces different display products, as long as mask plate
1 does not all need to replace within the scope of its normal service life, can be to different model by the mask pattern for controlling mask plate 1
The sealant of display product cured so that technological operation is simple, improves the production efficiency of display product, saves life
Production capacity consumes, and reduces the production cost of display product.
In one specific embodiment, each mask cell can include an opening and be arranged on the barn door of opening, turn
When moving first retainer, barn door can block ultraviolet light 8 and pass through opening；Control unit is by controlling barn door to be rotated to
So that mask unit 2 switches between shading status and light transmission state.
In another specific embodiment, as shown in Figures 2 and 3, the mask unit 2 includes：
Accommodating chamber 3；
Shading solution 4 positioned at 3 bottom of accommodating chamber；
Light transmission air bag 5 positioned at 3 top of the accommodating chamber, as shown in Fig. 2, the volume in the light transmission air bag 5 is less than the
During one threshold value, the shading solution 4 is laid in 3 bottom of accommodating chamber, and the mask unit 2 is in shading status；Such as Fig. 3 institutes
Show, when the volume of the light transmission air bag 5 is more than second threshold, the light transmission air bag 5 squeezes the shading solution 4 to described
3 edge of accommodating chamber, the mask unit 2 are in light transmission state, ultraviolet light 8 can by mask unit 2, wherein, described
Two threshold values are more than the first threshold.
Mask plate 1 is divided into multiple small mask cells by the present embodiment, and each mask cell is by accommodating chamber 3 and is arranged on
The composition of two parts up and down in accommodating chamber 3, top section is mainly vent line 6, air valve 7 and light transmission air bag 5；Underclad portion is
Shading solution 4 containing black dyes.Gas tolerance in the light transmission air bag 5 is less, and the volume of light transmission air bag 5 is less than the
During one threshold value, the light transmission air bag 5 occupies the sub-fraction space of the accommodating chamber 3, and the shading solution 4 is laid in the appearance
Receive 3 bottom of chamber, can block ultraviolet 8 penetrate accommodating chamber 3, the mask unit 2 is in shading status；In light transmission air bag 5
Gas tolerance it is more, when the volume of light transmission air bag 5 is more than second threshold, the light transmission air bag 5 occupies the big of the accommodating chamber 3
Segment space, the shading solution 4 are squeezed the bottom corner in the accommodating chamber 3, and it is saturating that shading solution 4 is unable to block ultraviolet 8
Accommodating chamber 3 is crossed, the mask unit 2 is in light transmission state.
Further, described control unit includes：
The vent line 6 connected with the light transmission air bag 5；
The air valve 7 being arranged on vent line 6；
Controller, for controlling the closing of the air valve 7 and opening, to control the vent line 6 to the light transmission gas
The gas that capsule 5 is passed through gas the volume of the light transmission air bag 5 is made to be more than in second threshold or the discharge light transmission air bag 5 makes described
The volume of light transmission air bag 5 is less than first threshold.
Wherein, vent line 6 is connected with each light transmission air bag 5, by controlling the switch of air valve 7, can control gas
Break-make realizes the expansion and contraction of light transmission air bag 5, final to realize so as to control the position of the shading solution 4 containing black dyes
Control to the state of mask unit 2 so that ultraviolet light 8 can be blocked by mask cell or by mask cell, pass through control
The state of each mask unit 2, is spliced into different mask patterns so that mask plate 1 can be suitable for different model display production
The curing of the sealant of product.
Specifically, the shading solution 4 can be the organic solution containing black dyes.Certainly, the not office of shading solution 4
Be limited to the organic solution containing black dyes, can also be other kinds of liquid, if can block ultraviolet 8 through being
It can.
Specifically, the accommodating chamber 3 is in cubic or cylindrical shape, and accommodating chamber 3 can also be other columns, such as three
Corner post shape, elliptic cylindrical shape etc..Preferably, accommodating chamber 3 is in cubic, and accommodating chambers 3 different in this way can be arranged closely in one
It rises.
If the volume of shading solution 4 is excessive, the bottom corner in the accommodating chamber 3 is squeezed even if shading solution 4
More ultraviolet light 8 can be blocked, if the volume of shading solution 4 is very few, shading solution 4 is laid in 3 bottom of accommodating chamber
When it is limited to the barrier effect of ultraviolet light 8.Preferably, the volume of the shading solution 4 is the 1/5-1/ of 3 capacity of accommodating chamber
7, in this way, when the bottom corner that shading solution 4 is squeezed in the accommodating chamber 3 will not block more ultraviolet light 8, and shading is molten
Also effectively ultraviolet light 8 can be stopped when liquid 4 is laid in 3 bottom of accommodating chamber.
The embodiment of the present invention additionally provides a kind of application method of mask plate as described above 1, including：
Determine required mask graph；
Control the first mask unit corresponding with required mask graph is in shading status, and control is covered with required
The second mask unit except the corresponding first mask unit of mould figure is in light transmission state.
In the present embodiment, divide mask plate 1 to multiple mask units 2 for array arrangement, each mask unit 2 includes shading
State and light transmission state, and the state of each mask unit 2 can be controlled individually, can be led in this way according to the needs of display product
The state for controlling each mask unit 2 is crossed, is spliced into different mask patterns so that mask plate 1 can be suitable for different model
Show the curing of the sealant of product.When the mask plate 1 using the present embodiment produces different display products, as long as mask plate
1 does not all need to replace within the scope of its normal service life, can be to different model by the mask pattern for controlling mask plate 1
The sealant of display product cured so that technological operation is simple, improves the production efficiency of display product, saves life
Production capacity consumes, and reduces the production cost of display product.
As shown in Figures 2 and 3, the mask unit 2 includes：
Accommodating chamber 3；
Shading solution 4 positioned at 3 bottom of accommodating chamber；
Light transmission air bag 5 positioned at 3 top of accommodating chamber, when the volume of the light transmission air bag 5 is less than first threshold, institute
It states shading solution 4 and is laid in 3 bottom of accommodating chamber, the mask unit 2 is in shading status；In the light transmission air bag 5
When volume is more than second threshold, the light transmission air bag 5 squeezes the shading solution 4 to 3 edge of accommodating chamber, described to cover
Touch unit 2 and be in light transmission state, ultraviolet light 8 can by mask unit 2, wherein, the second threshold is more than first threshold
Value.
Further, the control the first mask unit corresponding with required mask graph is in shading status, controls
The second mask unit except system the first mask unit corresponding with required mask graph includes in light transmission state：
The volume of the light transmission air bag 5 of the first mask unit is controlled to be more than second threshold, controls the second mask list
The volume of the light transmission air bag 5 of member is less than first threshold.
Mask plate 1 is divided into multiple small mask cells by the present embodiment, and each mask cell is by accommodating chamber 3 and is arranged on
The composition of two parts up and down in accommodating chamber 3, top section is mainly vent line 6, air valve 7 and light transmission air bag 5；Underclad portion is
Shading solution 4 containing black dyes.Gas tolerance in the light transmission air bag 5 is less, and the volume of light transmission air bag 5 is less than the
During one threshold value, the light transmission air bag 5 occupies the sub-fraction space of the accommodating chamber 3, and the shading solution 4 is laid in the appearance
Receive 3 bottom of chamber, can block ultraviolet 8 penetrate accommodating chamber 3, the mask unit 2 is in shading status；In light transmission air bag 5
Gas tolerance it is more, when the volume of light transmission air bag 5 is more than second threshold, the light transmission air bag 5 occupies the big of the accommodating chamber 3
Segment space, the shading solution 4 are squeezed the bottom corner in the accommodating chamber 3, and it is saturating that shading solution 4 is unable to block ultraviolet 8
Accommodating chamber 3 is crossed, the mask unit 2 is in light transmission state.
Further, described control unit includes：
The vent line 6 connected with the light transmission air bag 5；
The air valve 7 being arranged on vent line 6；
Controller, for controlling the closing of the air valve 7 and opening, to control the vent line 6 to the light transmission gas
The gas that capsule 5 is passed through gas the volume of the light transmission air bag 5 is made to be more than in second threshold or the discharge light transmission air bag 5 makes described
The volume of light transmission air bag 5 is less than first threshold.
Further, the volume of the light transmission air bag 5 of control the first mask unit includes more than second threshold：
Control opened with the 5 corresponding air valve 7 of light transmission air bag of the first mask unit, by with the first mask list
The light transmission air bag 5 of from vent line 6 to the first mask unit that the light transmission air bag 5 of member connects is passed through gas so that described the
The volume of the light transmission air bag 5 of one mask unit is more than second threshold；
The volume of the light transmission air bag 5 of control the second mask unit includes less than first threshold：
When the initial volume of the light transmission air bag 5 of the second mask unit is less than first threshold, control and described second
The 5 corresponding air valve 7 of light transmission air bag of mask unit is closed；It is big in the initial volume of the light transmission air bag 5 of the second mask unit
When first threshold, control is opened with the 5 corresponding air valve 7 of light transmission air bag of the second mask unit, by with described second
The vent line 6 that the light transmission air bag 5 of mask unit connects discharges the gas in the light transmission air bag 5 of the second mask unit, makes
The volume for obtaining the light transmission air bag 5 of the second mask unit is less than first threshold.
Wherein, vent line 6 is connected with each light transmission air bag 5, by controlling the switch of air valve 7, can control gas
Break-make realizes the expansion and contraction of light transmission air bag 5, final to realize so as to control the position of the shading solution 4 containing black dyes
Control to the state of mask unit 2 so that ultraviolet light 8 can be blocked by mask cell or by mask cell, pass through control
The state of each mask unit 2, is spliced into different mask patterns so that mask plate 1 can be suitable for different model display production
The curing of the sealant of product.
The embodiment of the present invention additionally provides a kind of exposure sources, including mask plate 1 as described above.Utilize the exposure sources
It can cure to showing the sealant of product.In the present embodiment, divide mask plate 1 to multiple mask units for array arrangement
2, each mask unit 2 includes shading status and light transmission state, and the state of each mask unit 2 can be controlled individually, in this way may be used
With the needs according to display product, by controlling the state of each mask unit 2, it is spliced into different mask patterns so that cover
Template 1 can be suitable for the curing that different model shows the sealant of product.Difference is being produced using the mask plate 1 of the present embodiment
Display product when, as long as mask plate 1 does not all need to replace within the scope of its normal service life, by controlling mask plate 1
Mask pattern the sealant of the display product of different model can be cured so that technological operation is simple, improves aobvious
Show the production efficiency of product, save energy consumption, reduce the production cost of display product.
Unless otherwise defined, the technical term or scientific terminology that the disclosure uses, which are should be in fields of the present invention, to be had
The ordinary meaning that the personage for having general technical ability is understood." first ", " second " and the similar word used in the disclosure is simultaneously
It does not indicate that any sequence, quantity or importance, and is used only to distinguish different component parts." comprising " or "comprising" etc.
Either object covers the element or object for appearing in the word presented hereinafter to the element that similar word means to occur before the word
And its it is equivalent, and it is not excluded for other elements or object.The similar word such as " connection " or " connected " is not limited to physics
Or mechanical connection, but electrical connection can be included, either directly or indirectly." on ", " under ",
"left", "right" etc. is only used for representing relative position relation, and after the absolute position for being described object changes, then the relative position is closed
System may also correspondingly change.
It is appreciated that ought such as layer, film, region or substrate etc element be referred to as be located at another element "above" or "below"
When, the element can " direct " "above" or "below" another element or there may be intermediary element.
The above is the preferred embodiment of the present invention, it is noted that for those skilled in the art
For, without departing from the principles of the present invention, several improvements and modifications can also be made, these improvements and modifications
It should be regarded as protection scope of the present invention.
Claims (10)
1. a kind of mask plate, which is characterized in that including：
Multiple mask units of array arrangement, each mask unit include shading status and light transmission state；
Control unit, for each mask unit to be controlled to be switched between shading status and light transmission state.
2. mask plate according to claim 1, which is characterized in that the mask unit includes：
Accommodating chamber；
Shading solution positioned at the accommodating chamber bottom；
Light transmission air bag at the top of the accommodating chamber, when the volume of the light transmission air bag is less than first threshold, the shading
Solution is laid in the accommodating chamber bottom, and the mask unit is in shading status；It is more than the in the volume of the light transmission air bag
During two threshold values, for the light transmission air bag by the shading Solution extrusion to the accommodating chamber edge, the mask unit is in saturating
Light state, the second threshold are more than the first threshold.
3. mask plate according to claim 2, which is characterized in that described control unit includes：
The vent line connected with the light transmission air bag；
The air valve being arranged on vent line；
Controller, for controlling the closing of the air valve and opening, the vent line to be controlled to be passed through to the light transmission air bag
The gas that gas makes the volume of the light transmission air bag be more than in second threshold or the discharge light transmission air bag makes the light transmission air bag
Volume be less than first threshold.
4. mask plate according to claim 2, which is characterized in that the shading solution is organic molten containing black dyes
Liquid.
5. mask plate according to claim 2, which is characterized in that the accommodating chamber is in cubic or cylindrical shape.
6. mask plate according to claim 2, which is characterized in that the volume of the shading solution is the accommodating chamber capacity
1/5-1/7.
7. a kind of application method of mask plate as described in any one of claim 1-6, which is characterized in that including：
Determine required mask graph；
Control the first mask unit corresponding with required mask graph is in shading status, control and required mask artwork
The second mask unit except corresponding first mask unit of shape is in light transmission state.
8. the application method of mask plate according to claim 7, which is characterized in that applied to as claimed in claim 2
Mask plate, corresponding with required mask graph the first mask unit of the control are in shading status, control with it is required
Corresponding first mask unit of mask graph except the second mask unit include in light transmission state：
The volume of the light transmission air bag of first mask unit is controlled to be more than second threshold, controls the saturating of second mask unit
The volume of phosgene capsule is less than first threshold.
9. the application method of mask plate according to claim 8, which is characterized in that applied to as claimed in claim 3
Mask plate, the volume of the light transmission air bag of control first mask unit include more than second threshold：
Control air valve corresponding with the light transmission air bag of first mask unit is opened, by saturating with first mask unit
The light transmission air bag of vent line to first mask unit of the connection of phosgene capsule is passed through gas so that first mask unit
Light transmission air bag volume be more than second threshold；
The volume of the light transmission air bag of control second mask unit includes less than first threshold：
When the initial volume of the light transmission air bag of second mask unit is less than first threshold, control and the second mask list
The corresponding air valve of light transmission air bag of member is closed；It is more than first threshold in the initial volume of the light transmission air bag of second mask unit
When, air valve corresponding with the light transmission air bag of second mask unit is controlled to open, by saturating with second mask unit
The vent line of phosgene capsule connection discharges the gas in the light transmission air bag of second mask unit so that the second mask list
The volume of the light transmission air bag of member is less than first threshold.
10. a kind of exposure sources, which is characterized in that including the mask plate as described in any one of claim 1-6.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810004145.7A CN108169998B (en) | 2018-01-03 | 2018-01-03 | Mask plate, use method thereof and exposure equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810004145.7A CN108169998B (en) | 2018-01-03 | 2018-01-03 | Mask plate, use method thereof and exposure equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108169998A true CN108169998A (en) | 2018-06-15 |
| CN108169998B CN108169998B (en) | 2021-01-08 |
Family
ID=62517057
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810004145.7A Expired - Fee Related CN108169998B (en) | 2018-01-03 | 2018-01-03 | Mask plate, use method thereof and exposure equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108169998B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108873598A (en) * | 2018-08-16 | 2018-11-23 | 京东方科技集团股份有限公司 | Mask set and its control method |
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| CN105242491A (en) * | 2014-07-11 | 2016-01-13 | 株式会社迪思科 | Method for manufacturing exposure mask |
| CN206737722U (en) * | 2017-05-08 | 2017-12-12 | 沭阳华新玻璃科技有限公司 | A kind of compound glass of heated shading |
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|---|---|---|---|---|
| CN1248713A (en) * | 1998-09-10 | 2000-03-29 | 罗姆股份有限公司 | LCD element and making method thereof |
| JP2015072300A (en) * | 2013-10-01 | 2015-04-16 | 株式会社ディスコ | Method for producing photomask |
| CN105242491A (en) * | 2014-07-11 | 2016-01-13 | 株式会社迪思科 | Method for manufacturing exposure mask |
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| CN206737722U (en) * | 2017-05-08 | 2017-12-12 | 沭阳华新玻璃科技有限公司 | A kind of compound glass of heated shading |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108873598A (en) * | 2018-08-16 | 2018-11-23 | 京东方科技集团股份有限公司 | Mask set and its control method |
| CN108873598B (en) * | 2018-08-16 | 2021-10-12 | 京东方科技集团股份有限公司 | Mask device and control method thereof |
| US11194193B2 (en) | 2018-08-16 | 2021-12-07 | Boe Technology Group Co., Ltd. | Mask assembly, mask apparatus and mask control method |
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|---|---|
| CN108169998B (en) | 2021-01-08 |
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