CN108160572A - A kind of cleaning, drying integrated device for bearing machining - Google Patents

A kind of cleaning, drying integrated device for bearing machining Download PDF

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Publication number
CN108160572A
CN108160572A CN201711440438.1A CN201711440438A CN108160572A CN 108160572 A CN108160572 A CN 108160572A CN 201711440438 A CN201711440438 A CN 201711440438A CN 108160572 A CN108160572 A CN 108160572A
Authority
CN
China
Prior art keywords
driving motor
bearing
drying
plate
falsework
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201711440438.1A
Other languages
Chinese (zh)
Inventor
单秀英
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xinchang County Wiltshire Bearing Co Ltd
Original Assignee
Xinchang County Wiltshire Bearing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xinchang County Wiltshire Bearing Co Ltd filed Critical Xinchang County Wiltshire Bearing Co Ltd
Priority to CN201711440438.1A priority Critical patent/CN108160572A/en
Publication of CN108160572A publication Critical patent/CN108160572A/en
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02Cleaning by the force of jets or sprays
    • B08B3/022Cleaning travelling work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B13/00Accessories or details of general applicability for machines or apparatus for cleaning
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26DRYING
    • F26BDRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B21/00Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
    • F26B21/004Nozzle assemblies; Air knives; Air distributors; Blow boxes
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26DRYING
    • F26BDRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B23/00Heating arrangements
    • F26B23/04Heating arrangements using electric heating
    • F26B23/06Heating arrangements using electric heating resistance heating
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26DRYING
    • F26BDRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B25/00Details of general application not covered by group F26B21/00 or F26B23/00
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26DRYING
    • F26BDRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B25/00Details of general application not covered by group F26B21/00 or F26B23/00
    • F26B25/005Treatment of dryer exhaust gases
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26DRYING
    • F26BDRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B9/00Machines or apparatus for drying solid materials or objects at rest or with only local agitation; Domestic airing cupboards
    • F26B9/06Machines or apparatus for drying solid materials or objects at rest or with only local agitation; Domestic airing cupboards in stationary drums or chambers
    • F26B9/066Machines or apparatus for drying solid materials or objects at rest or with only local agitation; Domestic airing cupboards in stationary drums or chambers the products to be dried being disposed on one or more containers, which may have at least partly gas-previous walls, e.g. trays or shelves in a stack

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Cleaning By Liquid Or Steam (AREA)

Abstract

The invention discloses a kind of cleaning, drying integrated devices for bearing machining, including pedestal, mobile working frame, bearing shelves, wiper mechanism, drying mechanism and control mechanism, the bearing shelves include fixing axle, are transversely mounted plate, longitudinally mounted plate, expansion plate, rotation axis and the first driving motor, the wiper mechanism includes the second driving motor, high-pressure spraying head, discharge outlet, drainpipe and waste water tank, and the drying mechanism includes third driving motor, bellows, Resistant heating plate, exhaust outlet, guide pipeline and exhaust pipe.The present invention is cooperated by mobile working frame and bearing shelves, and 360 degree are cleaned and dried to bearing;It is cooperated by bellows, Resistant heating plate, exhaust outlet, guide pipeline and exhaust pipe, using ventilation and heats to achieve the effect that flash baking;The humidity and temperature of drying mechanism are monitored in real time by humidity sensor and temperature sensor, control drying time, prevents temperature is excessively high from causing bearing annealing rotten.

Description

A kind of cleaning, drying integrated device for bearing machining
【Technical field】
The present invention relates to the technical field of bearing ancillary equipment, more particularly to a kind of cleaning, dryings one for bearing machining The technical field of body device.
【Background technology】
Bearing is the important foundation parts of all kinds of mechanized equipments, its precision, performance, life and reliability are to host Precision, performance, life and reliability play conclusive effect.In engineering goods, bearing belongs to high-precision product, not only needs The comprehensive support that the subjects such as mathematics, physics are theoretical is wanted, and needs material science, heat treatment technics, Precision Machining and survey Amount technology, Numeric Control Technology and the subjects such as effective numerical method and powerful computer technology service for it, therefore, Bearing is a product for representing national science and technology strength again.After international financial crisis outburst, country is reply financial crisis, is taken Increasing infrastructure input pulls the proactive fiscal policy of economic development.The development of relevant industries is benefited from, bearing production and marketing is fast Speed expands, and profit level gets a promotion, and industry development is significantly accelerated.
In actual production operation, find bearing the reason of not turning, be it is greasy with villus through dead, the bearing of high temperature action exsiccation Itself is basic without wearing or wearing very little, needs to clean bearing, bearing is cleaned and is typically made using kerosene It is manually cleaned for detergent, since kerosene has larger smell, is detrimental to health, pollute environment, labor intensity is big, labour It is of high cost, and bearing cleaning machine currently on the market is not only complicated, in cleaning process, the centrifugal force that high speed rotation generates holds Easily bearing is thrown away, easily cleaning machine is damaged in itself, there are larger security risks during use.After bearing cleaning The component of generally use air blower etc dries up the surface of bearing, but this drying mode uneven heating is even, easily The excessively high damage bearing of local temperature is caused, efficiency is low, of high cost, and footprint area is big.
【Invention content】
The purpose of the present invention is exactly to solve the problems of the prior art, proposes a kind of cleaning, drying one for bearing machining Body device disposably completes feeding, cleaning and drying operation, and high degree of automation is simple in structure, easy to operate, substantially reduces Labor intensity, bearing rotary formula are cleaned and are dried, and cleaning performance is good, and drying course middle (center) bearing is heated evenly, and is prevented The excessively high damage bearing of local temperature.
To achieve the above object, the present invention proposes a kind of cleaning, drying integrated device for bearing machining, including base Seat, mobile working frame, bearing shelves, wiper mechanism, drying mechanism and control mechanism, the wiper mechanism, drying mechanism peace Dress is fixed on pedestal, and the wiper mechanism is connected with drying mechanism, and the wiper mechanism is equipped with the driven by control mechanism One door, the drying mechanism are equipped with the second door driven by control mechanism, the mobile working frame and the first door, second Door is mutually adapted, and the mobile working frame is moveably mounted on pedestal, and the bearing shelves are fixed on movement On falsework, the bearing shelves include fixing axle, are transversely mounted plate, longitudinally mounted plate, expansion plate, rotation axis and the first drive Dynamic motor, the fixing axle are fixed on mobile working frame, and the plate that is transversely mounted is fixed in fixing axle, described Plate is transversely mounted equipped with longitudinally mounted plate and expansion plate, the installation that the expansion plate can do stretching motion in the vertical direction is consolidated It is scheduled on and is transversely mounted on plate, the expansion plate cooperates with rotation axis, and the rotation axis is rotatably mounted on longitudinally mounted On plate, the rotation axis is connected with the first driving motor, and first driving motor is connected with control mechanism, the wiper mechanism Including the second driving motor, high-pressure spraying head, discharge outlet, drainpipe and waste water tank, the top of the wiper mechanism is equipped with several A high-pressure spraying head, the high-pressure spraying head are connected with the second driving motor, and second driving motor is connected with control mechanism, The lower section of the wiper mechanism is equipped with discharge outlet, and the discharge outlet is connected by drainpipe with waste water tank, the drying mechanism packet Third driving motor, bellows, Resistant heating plate, exhaust outlet, guide pipeline and exhaust pipe are included, fan is equipped in the bellows, The fan is connected with third driving motor, and the bellows are equipped with ventilation opening, and the Resistant heating plate is fixed on baking The top of dry mechanism, the lower section of the drying mechanism are equipped with guide pipeline, and the end of the guide pipeline is connected with exhaust pipe, institute The side wall for stating drying mechanism is equipped with several exhaust outlets.
Preferably, the mobile working frame includes falsework transverse slat, two falsework risers and the 4th driving motor, institute It states the 4th driving motor with control mechanism to be connected, the falsework transverse slat and falsework riser are mutually perpendicular to, described two work Frame riser is located at the both ends of falsework transverse slat respectively, and the falsework transverse slat and two falsework risers are an integral structure, institute The lower end for stating falsework riser is equipped with pulley, and the pedestal is equipped with sliding rail, and the pulley is mutually adapted with sliding rail, the movement Falsework is moved reciprocatingly under the driving of the 4th driving motor by pulley in sliding rail.
Preferably, the quantity of the high-pressure spraying head is for two and more than two.
Preferably, the guide pipeline is equipped with humidity sensor and temperature sensor.
Beneficial effects of the present invention:The present invention is cooperated by wiper mechanism and drying mechanism, disposable to complete cleaning With drying operation, high degree of automation is simple in structure, easy to operate, substantially reduces labor intensity;Pass through mobile working frame It cooperates with bearing shelves, bearing can not stall around rotation axis, and 360 degree are cleaned and dried to bearing, guarantee operation Quality;It is cooperated by bellows, Resistant heating plate, exhaust outlet, guide pipeline and exhaust pipe, accelerates air passage rates, Using ventilation and heat to achieve the effect that flash baking;By humidity sensor and temperature sensor to the humidity of drying mechanism It is monitored in real time with temperature, controls drying time, prevent temperature is excessively high from causing bearing annealing rotten.
The feature and advantage of the present invention will be described in detail by embodiment combination attached drawing.
【Description of the drawings】
Fig. 1 is a kind of structure diagram of cleaning, drying integrated device for bearing machining of the invention.
In figure:1- pedestals, 2- mobile workings frame, 3- bearings shelves, 4- wiper mechanisms, 5- drying mechanisms, 6- control machines Structure, 11- sliding rails, 21- falseworks transverse slat, 22- falseworks riser, the 4th driving motors of 23-, 221- pulleys, 31- fixing axles, 32- Be transversely mounted the longitudinally mounted plate of plate, 33-, 34- expansion plates, 35- rotation axis, the first driving motors of 36-, the second driving motors of 41-, 42- high-pressure sprayings head, 43- discharge outlet, 44- drainpipes, 45- waste water tanks, the first doors of 46-, 51- thirds driving motor, 52- wind Case, 53- Resistant heatings plate, 54- exhaust outlets, 55- guide pipelines, 56- exhaust pipes, the second doors of 57-, 521- fans, 522- Ventilation opening, 551- humidity sensors, 552- temperature sensors.
【Specific embodiment】
Refering to Fig. 1, a kind of cleaning, drying integrated device for bearing machining of the invention, including pedestal 1, mobile working frame 2nd, bearing shelves 3, wiper mechanism 4, drying mechanism 5 and control mechanism 6, the wiper mechanism 4, the installation of drying mechanism 5 are fixed On pedestal 1, the wiper mechanism 4 is connected with drying mechanism 5, and the wiper mechanism 4 is equipped with first driven by control mechanism 6 Door 46, the drying mechanism 5 are equipped with the second door 57 driven by control mechanism 6,2 and first door of mobile working frame 46th, the second door 57 is mutually adapted, and the mobile working frame 2 is moveably mounted on pedestal 1, and the bearing shelves 3 are pacified Dress be fixed on mobile working frame 2, the bearing shelves 3 include fixing axle 31, be transversely mounted plate 32, longitudinally mounted plate 33, Expansion plate 34,35 and first driving motor 36 of rotation axis, the fixing axle 31 are fixed on mobile working frame 2, the horizontal stroke It being fixed in fixing axle 31 to installing plate 32, the plate 32 that is transversely mounted is equipped with longitudinally mounted plate 33 and expansion plate 34, The expansion plate 34 stretching motion can be fixed on and be transversely mounted on plate 32 in the vertical direction, the expansion plate 34 with Rotation axis 35 cooperates, and the rotation axis 35 is rotatably mounted on longitudinally mounted plate 33, the rotation axis 35 and first Driving motor 36 is connected, and first driving motor 36 is connected with control mechanism 6, and the wiper mechanism 4 includes the second driving electricity Machine 41, high-pressure spraying head 42, discharge outlet 43, drainpipe 44 and waste water tank 45, the top of the wiper mechanism 4 are equipped with several height Spray head 42 is pressed, the high-pressure spraying head 42 is connected with the second driving motor 41, second driving motor 41 and control mechanism 6 It is connected, the lower section of the wiper mechanism 4 is equipped with discharge outlet 43, and the discharge outlet 43 is connected by drainpipe 44 with waste water tank 45, The drying mechanism 5 includes third driving motor 51, bellows 52, Resistant heating plate 53, exhaust outlet 54, guide pipeline 55 and row Tracheae 56, the bellows 52 are interior to be equipped with fan 521, and the fan 521 is connected with third driving motor 51, is set on the bellows 52 There is ventilation opening 522, the Resistant heating plate 53 is fixed on the top of drying mechanism 5, and the lower section of the drying mechanism 5 is set There is guide pipeline 55, the end of the guide pipeline 55 is connected with exhaust pipe 56, and the side wall of the drying mechanism 5 is equipped with several A exhaust outlet 54.
The mobile working frame 2 includes 21, two 22 and the 4th driving motors 23 of falsework riser of falsework transverse slat, described 4th driving motor 23 is connected with control mechanism 6, and the falsework transverse slat 21 and falsework riser 22 are mutually perpendicular to, described two Falsework riser 22 is located at the both ends of falsework transverse slat 21 respectively, and the falsework transverse slat 21 and two falsework risers 22 are one Body formula structure, the lower end of the falsework riser 22 are equipped with pulley 221, and the pedestal 1 is equipped with sliding rail 11, the pulley 221 It is mutually adapted with sliding rail 11, the mobile working frame 2 is under the driving of the 4th driving motor 23 by pulley 221 in sliding rail 11 It moves reciprocatingly.The quantity of the high-pressure spraying head 42 is for two and more than two.The guide pipeline 55 is passed equipped with humidity Sensor 551 and temperature sensor 552.
The course of work of the present invention:
During the work time, original state moves down starts building a kind of cleaning, drying integrated device for bearing machining of the invention Make the left side that frame 2 is located at wiper mechanism 4, by bearing holder (housing, cover) to be cleaned in rotation axis 35, expansion plate 34 extends upwards, expansion plate 34 cooperate with rotation axis 35, by the bearing lock in rotation axis 35 between expansion plate 34 and longitudinally mounted plate 33, rotation Bearing on axis 35 is rotated with rotation axis 35, opens the first door 46, mobile working frame 2 is in the 4th driving motor 23 It is moved under driving along sliding rail 11 into wiper mechanism 4, after mobile working frame 2 enters wiper mechanism 4, the first door 46 is closed, high Spray head 42 is pressed to clean to the bearing of rotation by the cleaning solution spray to bearing of pressurization, in cleaning process, flow into clear Sewage in washing machine structure 4 is drained by drainpipe 44 in waste water tank 45 by discharge outlet 43, after cleaning, the second door 57 It opens, mobile working frame 2 moves under the driving of the 4th driving motor 23 along sliding rail 11 into drying mechanism 5, mobile working frame 2 Into after drying mechanism 5, the second door 57 is closed, and starts to carry out bearing drying operation, and Resistant heating plate 53 starts to turning The bearing rotated on moving axis 35 carries out drying heating, and bellows 52 drive air flowing by the rotation of fan 521, and air is from ventilation opening 522 enter drying mechanism 5, and air discharges drying mechanism 5, humidity sensor 551 by bearing surface and then by exhaust outlet 54 The humidity in drying mechanism 5 and temperature are monitored in real time with temperature sensor 552, drying time, fan 521 are controlled according to data Rotary speed and Resistant heating plate 53 temperature, prevent bearing annealing damage while, ensure drying it is quick and high Effect, after drying, Resistant heating plate 53 stops heating, and fan 521 stops rotating, and rotation axis 35 stops operating, the first storehouse The 46, second door 57 of door is again turned on, and bearing returns to initial position with mobile working frame 2, and the good bearing of cleaning, drying is taken Under continue the processing operation of next group bearing.
Above-described embodiment is the description of the invention, is not limitation of the invention, it is any to simple transformation of the present invention after Scheme all belong to the scope of protection of the present invention.

Claims (4)

1. a kind of cleaning, drying integrated device for bearing machining, it is characterised in that:Including pedestal (1), mobile working frame (2), bearing shelves (3), wiper mechanism (4), drying mechanism (5) and control mechanism (6), the wiper mechanism (4), dryer Structure (5) is fixed on pedestal (1), and the wiper mechanism (4) is connected with drying mechanism (5), and the wiper mechanism (4) is equipped with The first door (46) driven by control mechanism (6), the drying mechanism (5) is equipped with the second storehouse driven by control mechanism (6) Door (57), the mobile working frame (2) are mutually adapted with the first door (46), the second door (57), the mobile working frame (2) It is moveably mounted on pedestal (1), the bearing shelves (3) are fixed on mobile working frame (2), the bearing peace Put frame (3) including fixing axle (31), be transversely mounted plate (32), longitudinally mounted plate (33), expansion plate (34), rotation axis (35) and One driving motor (36), the fixing axle (31) are fixed on mobile working frame (2), described to be transversely mounted plate (32) installation It is fixed in fixing axle (31), the plate (32) that is transversely mounted is described to stretch equipped with longitudinally mounted plate (33) and expansion plate (34) Contracting plate (34) stretching motion can be fixed on and be transversely mounted on plate (32) in the vertical direction, the expansion plate (34) with Rotation axis (35) cooperates, and the rotation axis (35) is rotatably mounted on longitudinally mounted plate (33), the rotation axis (35) it is connected with the first driving motor (36), first driving motor (36) is connected with control mechanism (6), the wiper mechanism (4) it is described including the second driving motor (41), high-pressure spraying head (42), discharge outlet (43), drainpipe (44) and waste water tank (45) The top of wiper mechanism (4) is equipped with several high-pressure spraying heads (42), the high-pressure spraying head (42) and the second driving motor (41) it is connected, second driving motor (41) is connected with control mechanism (6), and the lower section of the wiper mechanism (4) is equipped with draining Mouth (43), the discharge outlet (43) are connected by drainpipe (44) with waste water tank (45), and the drying mechanism (5) includes third and drives Dynamic motor (51), bellows (52), Resistant heating plate (53), exhaust outlet (54), guide pipeline (55) and exhaust pipe (56), it is described Fan (521) is equipped in bellows (52), the fan (521) is connected with third driving motor (51), is set on the bellows (52) There is ventilation opening (522), the Resistant heating plate (53) is fixed on the top of drying mechanism (5), the drying mechanism (5) Lower section be equipped with guide pipeline (55), the end of the guide pipeline (55) is connected with exhaust pipe (56), the drying mechanism (5) Side wall be equipped with several exhaust outlets (54).
2. a kind of cleaning, drying integrated device for bearing machining as described in claim 1, it is characterised in that:The movement Falsework (2) includes falsework transverse slat (21), two falsework risers (22) and the 4th driving motor (23), the 4th driving Motor (23) is connected with control mechanism (6), and the falsework transverse slat (21) and falsework riser (22) are mutually perpendicular to, described two Falsework riser (22) is located at the both ends of falsework transverse slat (21), the falsework transverse slat (21) and two falsework risers respectively (22) it is an integral structure, the lower end of the falsework riser (22) is equipped with pulley (221), and the pedestal (1) is equipped with sliding rail (11), the pulley (221) is mutually adapted with sliding rail (11), and the mobile working frame (2) is in the drive of the 4th driving motor (23) It is moved reciprocatingly in sliding rail (11) by pulley (221) under dynamic.
3. a kind of cleaning, drying integrated device for bearing machining as described in claim 1, it is characterised in that:The high pressure The quantity of spray head (42) is for two and more than two.
4. a kind of cleaning, drying integrated device for bearing machining as described in claim 1, it is characterised in that:The air guide Pipeline (55) is equipped with humidity sensor (551) and temperature sensor (552).
CN201711440438.1A 2017-12-27 2017-12-27 A kind of cleaning, drying integrated device for bearing machining Pending CN108160572A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201711440438.1A CN108160572A (en) 2017-12-27 2017-12-27 A kind of cleaning, drying integrated device for bearing machining

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201711440438.1A CN108160572A (en) 2017-12-27 2017-12-27 A kind of cleaning, drying integrated device for bearing machining

Publications (1)

Publication Number Publication Date
CN108160572A true CN108160572A (en) 2018-06-15

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201711440438.1A Pending CN108160572A (en) 2017-12-27 2017-12-27 A kind of cleaning, drying integrated device for bearing machining

Country Status (1)

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CN (1) CN108160572A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113182265A (en) * 2020-12-23 2021-07-30 李厚平 Cleaning equipment for producing image sensor chip and using method thereof

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201644449U (en) * 2010-04-21 2010-11-24 宁波达克轴承有限公司 Bearing cleaning production line
CN103469513A (en) * 2013-09-11 2013-12-25 浙江省黄岩服装机械厂 Electrothermal steam drying and setting machine
CN104550087A (en) * 2014-12-20 2015-04-29 新昌县隆豪轴承有限公司 Bearing washing and drying integration device
CN206094860U (en) * 2016-08-26 2017-04-12 邹近才 Chinese -medicinal material fast drying case
CN106623207A (en) * 2017-02-24 2017-05-10 盐城市三川轴承制造有限公司 Closed type automatic cleaning machine for bearings
CN206622375U (en) * 2017-03-14 2017-11-10 海盐得胜化工设备有限公司 A kind of metal structured packing cleaning product line

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201644449U (en) * 2010-04-21 2010-11-24 宁波达克轴承有限公司 Bearing cleaning production line
CN103469513A (en) * 2013-09-11 2013-12-25 浙江省黄岩服装机械厂 Electrothermal steam drying and setting machine
CN104550087A (en) * 2014-12-20 2015-04-29 新昌县隆豪轴承有限公司 Bearing washing and drying integration device
CN206094860U (en) * 2016-08-26 2017-04-12 邹近才 Chinese -medicinal material fast drying case
CN106623207A (en) * 2017-02-24 2017-05-10 盐城市三川轴承制造有限公司 Closed type automatic cleaning machine for bearings
CN206622375U (en) * 2017-03-14 2017-11-10 海盐得胜化工设备有限公司 A kind of metal structured packing cleaning product line

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113182265A (en) * 2020-12-23 2021-07-30 李厚平 Cleaning equipment for producing image sensor chip and using method thereof

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