CN108152949A - The design method and device of a kind of diffraction optical element - Google Patents

The design method and device of a kind of diffraction optical element Download PDF

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CN108152949A
CN108152949A CN201711183812.4A CN201711183812A CN108152949A CN 108152949 A CN108152949 A CN 108152949A CN 201711183812 A CN201711183812 A CN 201711183812A CN 108152949 A CN108152949 A CN 108152949A
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complex amplitude
diffraction
image
optical element
coherent light
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CN108152949B (en
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刘娟
段俊毅
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Beijing Institute of Technology BIT
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    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0012Optical design, e.g. procedures, algorithms, optimisation routines
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F30/00Computer-aided design [CAD]
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Abstract

The present invention provides a kind of design method and device of diffraction optical element, wherein, the method includes:The partially coherent light field of image light field complex amplitude and partially coherent light source of the diffraction image at pre-determined distance is treated in S1, superposition, obtains interference complex amplitude;The luminous intensity of the partially coherent light field is substituted into the phase of the interference complex amplitude, obtains diffraction complex amplitude by S2;The phase of the diffraction complex amplitude is designed the diffraction optical element by S3.The design method and device of a kind of diffraction optical element provided by the invention, by partially coherent light Coherent Part codified and modulation, incoherent part can be averaged speckle the characteristics of be applied to design of diffractive optical element field, while wavefront modification is realized weaken optical field amplitude mutually rise at random cancellation the phenomenon that, speckle is inhibited, enhances picture quality.

Description

The design method and device of a kind of diffraction optical element
Technical field
The present invention relates to diffractive optics technology field more particularly to the design methods and device of a kind of diffraction optical element.
Background technology
Diffraction optical element is a kind of novel optical element with important application prospect, and design is based on optical diffraction Theory, and pass through Computer Design kinoform, it is made of microelectronic processing technique, can finally realize several light simultaneously Learn function.
The design method of conventional diffractive optical element is all premised on coherent light, during optical modulation, it may appear that The situation of random mutually long cancellation, and then lead to occur speckle in modulation result, influence image quality.For this problem, lead to Can often take iterative algorithm, it is time-multiplexed, relevant record incoherent reproduction and pixel separation method etc. be averaged complex amplitude with The coherent superposition of machine weakens speckle while ensureing that modulation result is accurate, certain promotion is played to the improvement of image quality Effect.
But in the above method, for coherent light design diffraction optical element, only reduction coherence disappears in modulated process Except the method for speckle is not ideal solution, there are deviations in often designing and actually use.It is contemplated that light source phase The design method of dryness is very necessary to the actual use of diffraction optical element.
Invention content
The present invention influences image quality to solve the problems, such as that coherent light in the prior art disappears with captain, provides one The design method and device of kind diffraction optical element.
On the one hand, the present invention proposes a kind of design method of diffraction optical element, including:S1, superposition treat that diffraction image exists The partially coherent light field of image light field complex amplitude and partially coherent light source at pre-determined distance obtains interference complex amplitude;S2, by institute The luminous intensity for stating partially coherent light field is substituted into the phase of the interference complex amplitude, obtains diffraction complex amplitude;S3, by the diffraction The phase of complex amplitude designs the diffraction optical element as transmissivity.
Preferably, it further includes:S0 treats the image light field complex amplitude at diffraction image pre-determined distance using the calculating of point source method; Fourier transformation, fetching portion coherent states field are carried out to partially coherent light source.
Preferably, it is further included before the step S0:Random phase is added in diffraction image is treated.
Preferably, the reference light of the point source method application in calculation is coherent light.
Preferably, the partially coherent light source is Gauss light source.
On the other hand, the present invention proposes a kind of design device of diffraction optical element, including:Complex amplitude is interfered to obtain single Member, for being superimposed the partially coherent light for treating image light field complex amplitude and partially coherent light source of the diffraction image at pre-determined distance , obtain interference complex amplitude;Diffraction complex amplitude acquiring unit, it is described dry for the luminous intensity of the partially coherent light field to be substituted into In the phase for relating to complex amplitude, diffraction complex amplitude is obtained;Unit is realized, for using the phase of the diffraction complex amplitude as transmissivity Design the diffraction optical element;The diffraction complex amplitude acquiring unit interferes complex amplitude acquiring unit and realization with described respectively Unit is electrically connected.
Preferably, image complex amplitude acquiring unit light filed acquisition unit related to part, described image complex amplitude are further included The related light filed acquisition unit of acquiring unit and part is electrically connected respectively with the interference complex amplitude acquiring unit;Described image is shaken again Width acquiring unit is used to treat the image light field complex amplitude at diffraction image pre-determined distance using the calculating of point source method;The part is related Light filed acquisition unit is used to carry out Fourier transformation, fetching portion coherent states field to partially coherent light source.
Preferably, image pre-processing unit is further included, described image pretreatment unit obtains single with described image complex amplitude Member electrical connection;For adding in random phase in diffraction image is treated.
In another aspect, the present invention proposes a kind of design equipment of diffraction optical element, including:At least one processor;With And at least one processor being connect with the processor communication, wherein:The memory, which is stored with, to be held by the processor Capable program instruction, the processor call described program instruction to be able to carry out method as described before.
Another aspect, the present invention propose a kind of non-transient computer readable storage medium storing program for executing, and the non-transient computer is readable Storage medium stores computer instruction, and the computer instruction makes the computer perform method as described before.
The design method and device of a kind of diffraction optical element provided by the invention, partially coherent light Coherent Part can be compiled Code and modulation, incoherent part can be averaged speckle the characteristics of be applied to design of diffractive optical element field, realize wavefront modification While weaken optical field amplitude mutually rise at random cancellation the phenomenon that, it is suppressed that speckle enhances picture quality.
Description of the drawings
Fig. 1 is a kind of flow diagram of the design method of diffraction optical element of the specific embodiment of the invention;
Fig. 2 is a kind of flow diagram of the design method of diffraction optical element of the specific embodiment of the invention;
Fig. 3 is a kind of structure diagram of the design device of diffraction optical element of the specific embodiment of the invention;
Fig. 4 is a kind of structure diagram of the design equipment of diffraction optical element of the specific embodiment of the invention.
Specific embodiment
With reference to the accompanying drawings and examples, the specific embodiment of the present invention is described in further detail.Implement below Example is used to illustrate the present invention, but be not limited to the scope of the present invention.
Fig. 1 is a kind of flow diagram of the design method of diffraction optical element of the specific embodiment of the invention, such as Fig. 1 institutes Show, a kind of design method of diffraction optical element, including:S1, superposition treat that image light field of the diffraction image at pre-determined distance is answered The partially coherent light field of amplitude and partially coherent light source obtains interference complex amplitude;S2, by the luminous intensity of the partially coherent light field It substitutes into the phase of the interference complex amplitude, obtains diffraction complex amplitude;S3, using the phase of the diffraction complex amplitude as transmissivity Design the diffraction optical element.
Specifically, first, image light field complex amplitude H of the diffraction image at pre-determined distance d is treatedC(x, y) and part phase The partially coherent light field E that dry light source generatesP(x, y) carries out complex amplitude superposition, i.e., by image light field complex amplitude HC(x, y) and part Coherent states field EP(x, y) is multiplied, and obtains interference complex amplitude Hi(x,y).Wherein, the partially coherent light source issued section coherent light, The partially coherent light can eliminate some ill-effects of coherent light, such as cyclization, speckle, edge effect and burnt shifting.
Secondly, by the partially coherent light field EPThe light intensity of (x, y) is substituted into previous step by being superimposed the interference obtained Complex amplitude HiOptical bleaching is carried out in the phase of (x, y), obtains diffraction complex amplitude H (x, y), the diffraction complex amplitude H (x, y) is The COMPLEX AMPLITUDE of the diffraction optical element.Wherein, the optical bleaching is in the manufacturing process of phase type hologram, is incited somebody to action The light distribution of exposure is linearly changed into the phase distribution of hologram.
Finally, using the phase bit position Φ (x, y) of the diffraction complex amplitude H (x, y) as the saturating of the diffraction optical element Penetrate rate distribution.The diffraction optical element can be in the degree of coherence light source identical with the partially coherent light source as reproduction light Under the conditions of, reconstruction image I is observed at the pre-determined distancer(x,y)。
In the specific embodiment of the invention, partially coherent light Coherent Part codified and modulation, incoherent part can be averaged The characteristics of speckle, is applied to design of diffractive optical element field, weakens optical field amplitude while wavefront modification is realized and mutually rises at random The phenomenon that cancellation, it is suppressed that speckle enhances picture quality.
Based on above-described embodiment, a kind of design method of diffraction optical element further includes:S0 is treated using the calculating of point source method Image light field complex amplitude at diffraction image pre-determined distance;Fourier transformation is carried out to partially coherent light source, fetching portion is concerned with Light field.
Specifically, diffraction image and pre-determined distance are treated according to known, diffraction image is treated using described in the calculating of point source method Light field complex amplitude H of the complex amplitude light field at pre-determined distanceC(x,y);
To the partially coherent light source application Fourier transformation part, corresponding fetching portion coherent states field EP(x,y).Its In, the Fourier transformation (Fourier Transform, FT) is frequency spectrum optical Information Processing in coherence imaging system Information in incoherent imaging system, is interpreted as image quality problem the variation of spectrum information, and dissects the propagation of light with this, spreads out The basic opticals problem such as penetrate and be imaged.In the specific embodiment of the invention, the Fourier transformation is used for the partially coherent light The light field of source input is converted to it in the corresponding output light field E of domain spaceP(x,y)。
In the specific embodiment of the invention, image light field complex amplitude and portion are obtained by point source method and Fourier transformation respectively Divide coherent states field, the design for the diffraction element parameter provides calculating basis.
Based on any of the above-described embodiment, a kind of design method of diffraction optical element is further included before the step S0:It is treating Random phase is added in diffraction image.
Specifically, first, it reads in and treats diffraction image I0(x, y), and treating diffraction image I0Random phase is added in (x, y) Distribution obtains image complex amplitudeIn the specific embodiment of the invention, by initial in image complex amplitude Change in flow and add in random phase, diffusing reflection is formed convenient for imaging surface, realize the purpose for observing image from different angles.
Based on any of the above-described specific embodiment, a kind of design method of diffraction optical element, the point source method should in calculating Reference light is coherent light.In the specific embodiment of the invention, the coherent light is preferably plane wave.
Based on any of the above-described specific embodiment, a kind of design method of diffraction optical element, the partially coherent light source is Gauss light source.
Specifically, the Gauss light source sends out Gaussian beam, and the Gaussian beam refers in the plane comprising the direction of propagation Optical field distribution be in Gaussian function curve shape continuous laser beam.In the specific embodiment of the invention, the Gauss light source is half The sphere shape light that diameter is ρ, intensity is Gaussian Profile, the phase random distribution in light source range, degree of coherence are decided by initial height The radius ρ of this light beam.
In order to better understand with applying a kind of design method of diffraction optical element proposed by the present invention, the present invention carries out The example below, and the present invention is not only limited to the example below.
Fig. 2 is a kind of flow diagram of the design method of diffraction optical element of the specific embodiment of the invention, such as Fig. 2 institutes Show, by taking a 2D image as an example:
1) calculative image I is read in a computer0(x,y);
2) in I0Random phase is added in (x, y) to be distributed to obtain image complex amplitude:
3) light field complex amplitude H of the image complex amplitude light field at distance d in step 2) is calculated with point source methodc(x, y) is (silent Reference light is recognized for plane wave);
4) sphere shape light that be ρ by Radius, intensity is Gaussian Profile, the phase random distribution in light source range carries out Fu In leaf transformation, as a result be the space segment coherent states field H based on circular Gaussian beamp(x, y), degree of coherence are decided by initially The radius ρ of Gaussian beam;
5) by the space segment coherent states field H in step 4)p(x, y) and image light field complex amplitude Hc(x, y) is multiplied, and obtains Interfere complex amplitude Hi(x,y);
6) intensity I of space segment coherent states field is takeni(x, y) is added to interference complex amplitude HiIt is carried out in the phase of (x, y) Optical bleaching finally obtains diffraction element COMPLEX AMPLITUDE H (x, y);
7) take the phase bit position Φ (x, y) of H (x, y), corresponding grating be etched into laser direct writing system, and with 4) in The space segment coherent light of same coherent degree is rebuilding observation reconstruction image I at distance d as light is reproducedr(x,y);
In the specific embodiment of the invention, partially coherent light is applied to design of diffractive optical element field, is realizing wavefront While modulation weaken optical field amplitude mutually rise at random cancellation the phenomenon that, it is suppressed that speckle enhances picture quality.
Fig. 3 is a kind of structure diagram of the design device of diffraction optical element of the specific embodiment of the invention, such as Fig. 3 institutes Show, based on any of the above-described method specific embodiment, a kind of design device of diffraction optical element obtains single including interference complex amplitude Member 301, diffraction complex amplitude acquiring unit 302 and realization unit 303;Wherein, the interference complex amplitude acquiring unit 301, is used for The partially coherent light field of image light field complex amplitude and partially coherent light source of the diffraction image at pre-determined distance is treated in superposition, is obtained dry Relate to complex amplitude;The diffraction complex amplitude acquiring unit 302, for the luminous intensity of the partially coherent light field to be substituted into the interference In the phase of complex amplitude, diffraction complex amplitude is obtained;It is described realization unit 303, for using the phase of the diffraction complex amplitude as Transmissivity designs the diffraction optical element;The diffraction complex amplitude acquiring unit 302 obtains respectively with the interference complex amplitude Unit 301 and realization unit 303 are electrically connected.
Specifically, first, interference complex amplitude acquiring unit 301 treats image light field of the diffraction image at pre-determined distance d Complex amplitude HCThe partially coherent light field E that (x, y) and partially coherent light source generateP(x, y) carries out complex amplitude superposition, i.e., by image light Field complex amplitude HC(x, y) and partially coherent light field EP(x, y) is multiplied, and obtains interference complex amplitude Hi(x,y).Wherein, the part phase Dry light source issued section coherent light, the partially coherent light can eliminate some ill-effects of coherent light, such as cyclization, speckle, Edge effect and burnt shifting.Then, the interference complex amplitude acquiring unit 301 interferes complex amplitude H by describedi(x, y), which is sent to, to spread out Penetrate complex amplitude acquiring unit 302.
Secondly, the diffraction complex amplitude acquiring unit 302 is by the partially coherent light field EPThe luminous intensity of (x, y) substitutes into institute State the interference complex amplitude H that interference complex amplitude acquiring unit 301 is sentiOptical bleaching is carried out in the phase of (x, y), diffraction is obtained and answers Amplitude H (x, y), the diffraction complex amplitude H (x, y) are the COMPLEX AMPLITUDE of the diffraction optical element.Then, the diffraction is answered The diffraction complex amplitude H (x, y) is sent to and realizes unit 303 by amplitude acquiring unit 302.
Finally, the realization unit 303 spreads out the phase bit position Φ (x, y) of the diffraction complex amplitude H (x, y) as described in Penetrate the transmissivity distribution of optical element.The diffraction optical element can be in the degree of coherence light identical with the partially coherent light source Under conditions of source is as light is reproduced, reconstruction image I is observed at the pre-determined distancer(x,y)。
In the specific embodiment of the invention, partially coherent light Coherent Part codified and modulation, incoherent part can be averaged The characteristics of speckle, is applied to design of diffractive optical element field, weakens optical field amplitude while wavefront modification is realized and mutually rises at random The phenomenon that cancellation, it is suppressed that speckle enhances picture quality.
Based on any of the above-described embodiment, a kind of design device of diffraction optical element further includes image complex amplitude and obtains list It is first to the related light filed acquisition unit in part, described image complex amplitude acquiring unit and partly correlation light filed acquisition unit respectively with institute State the acquiring unit electrical connection of interference complex amplitude;Described image complex amplitude acquiring unit is used to treat diffraction image using the calculating of point source method Image light field complex amplitude at pre-determined distance;The part correlation light filed acquisition unit is used to carry out in Fu partially coherent light source Leaf transformation, fetching portion coherent states field.
Specifically, image complex amplitude acquiring unit treats diffraction image and pre-determined distance known to, using point source method meter Light field complex amplitude H of the complex amplitude light field of diffraction image at pre-determined distance is treated described in calculationC(x, y), and the light field is shaken again Width HC(x, y) is sent to interference complex amplitude acquiring unit.
The related light filed acquisition unit in part is to the partially coherent light source application Fourier transformation part, corresponding fetching portion Coherent states field EP(x, y), and by the partially coherent light field EP(x, y) is sent to interference complex amplitude acquiring unit.Wherein, it is described Fourier transformation (Fourier Transform, FT) is spectrum information optical Information Processing in coherence imaging system, In incoherent imaging system, image quality problem is interpreted as the variation of spectrum information, and propagation, diffraction and the imaging of light are dissected with this Etc. basic opticals problem.In the specific embodiment of the invention, the Fourier transformation is used for input the partially coherent light source Light field is converted to it in the corresponding output light field E of domain spaceP(x,y)。
In the specific embodiment of the invention, image light field complex amplitude and portion are obtained by point source method and Fourier transformation respectively Divide coherent states field, the design for the diffraction element parameter provides calculating basis.
Based on any of the above-described specific embodiment, a kind of design device of diffraction optical element further includes image preprocessing list Member, described image pretreatment unit are electrically connected with described image complex amplitude acquiring unit;For in diffraction image is treated add in Machine phase.
Specifically, diffraction image I is treated in image pre-processing unit reading0(x, y), and treating diffraction image I0It is added in (x, y) Random phase is distributed, and obtains image complex amplitudeIn the specific embodiment of the invention, by being answered in image Random phase is added in amplitude initialization flow, forms diffusing reflection convenient for imaging surface, image is observed in realization from different angles Purpose.
Based on any of the above-described specific embodiment, a kind of design device of diffraction optical element, the point source method should in calculating Reference light is coherent light.In the specific embodiment of the invention, the coherent light is preferably plane wave.
Based on any of the above-described specific embodiment, a kind of design device of diffraction optical element, the partially coherent light source is Gauss light source.
Specifically, the Gauss light source sends out Gaussian beam, and the Gaussian beam refers in the plane comprising the direction of propagation Optical field distribution be in Gaussian function curve shape continuous laser beam.In the specific embodiment of the invention, the Gauss light source is half The sphere shape light that diameter is ρ, intensity is Gaussian Profile, the phase random distribution in light source range, degree of coherence are decided by initial height The radius ρ of this light beam.
Fig. 4 is a kind of structure diagram of the design equipment of diffraction optical element of the specific embodiment of the invention, such as Fig. 4 institutes Show, which includes:At least one processor 401;And at least one processor with the processor 401 communication connection 402, wherein:The memory 402 is stored with the program instruction that can be performed by the processor 401, and the processor 401 calls Described program instruction is able to carry out the method that the network equipments configuration that the various embodiments described above are provided is verified, such as including:Superposition It treats the partially coherent light field of image light field complex amplitude and partially coherent light source of the diffraction image at pre-determined distance, it is multiple to obtain interference Amplitude;The luminous intensity of the partially coherent light field is substituted into the phase of the interference complex amplitude, obtain diffraction complex amplitude;By institute The phase for stating diffraction complex amplitude designs the diffraction optical element as transmissivity.
The embodiment of the present invention also provides a kind of non-transient computer readable storage medium storing program for executing, the non-transient computer readable storage Medium storing computer instructs, and it is adaptively square which makes computer perform the video code rate that corresponding embodiment is provided Method, such as including:The part phase of image light field complex amplitude and partially coherent light source of the diffraction image at pre-determined distance is treated in superposition Dry light field obtains interference complex amplitude;The luminous intensity of the partially coherent light field is substituted into the phase of the interference complex amplitude, obtained Take diffraction complex amplitude;The diffraction optical element is designed using the phase of the diffraction complex amplitude as transmissivity.
One of ordinary skill in the art will appreciate that:Realizing all or part of step of above method embodiment can pass through The relevant hardware of program instruction is completed, and aforementioned program can be stored in a computer read/write memory medium, the program When being executed, step including the steps of the foregoing method embodiments is performed;And aforementioned storage medium includes:ROM, RAM, magnetic disc or light The various media that can store program code such as disk.
Finally, the present processes are only preferable embodiment, are not intended to limit the scope of the present invention.It is all Within the spirit and principles in the present invention, any modification, equivalent replacement, improvement and so on should be included in the protection of the present invention Within the scope of.

Claims (10)

1. a kind of design method of diffraction optical element, which is characterized in that including:
The partially coherent light of image light field complex amplitude and partially coherent light source of the diffraction image at pre-determined distance is treated in S1, superposition , obtain interference complex amplitude;
The luminous intensity of the partially coherent light field is substituted into the phase of the interference complex amplitude, obtains diffraction complex amplitude by S2;
The phase of the diffraction complex amplitude is designed the diffraction optical element by S3.
2. it according to the method described in claim 1, it is characterized in that, further includes:
S0 treats the image light field complex amplitude at diffraction image pre-determined distance using the calculating of point source method;Partially coherent light source is carried out Fourier transformation, fetching portion coherent states field.
3. it according to the method described in claim 2, it is characterized in that, is further included before the step S0:Add in diffraction image is treated Enter random phase.
4. according to the method described in claim 2, it is characterized in that, the reference light of the point source method application in calculation is relevant Light.
5. the method according to any claim in Claims 1-4, which is characterized in that the partially coherent light source is Gauss light source.
6. a kind of design device of diffraction optical element, which is characterized in that including:
Interfere complex amplitude acquiring unit, image light field complex amplitude and part phase of the diffraction image at pre-determined distance are treated for being superimposed The partially coherent light field of dry light source obtains interference complex amplitude;
Diffraction complex amplitude acquiring unit, for the luminous intensity of the partially coherent light field to be substituted into the phase of the interference complex amplitude In, obtain diffraction complex amplitude;
Unit is realized, for designing the diffraction optical element using the phase of the diffraction complex amplitude as transmissivity;
The diffraction complex amplitude acquiring unit is electrically connected respectively with the interference complex amplitude acquiring unit and realization unit.
7. device according to claim 6, which is characterized in that further include image complex amplitude acquiring unit light related to part Field acquiring unit, the related light filed acquisition unit of described image complex amplitude acquiring unit and part obtain respectively with the interference complex amplitude Unit is taken to be electrically connected;
Described image complex amplitude acquiring unit is used to treat that the image light field at diffraction image pre-determined distance is answered using the calculating of point source method Amplitude;The part correlation light filed acquisition unit is used to carry out Fourier transformation, fetching portion coherent light to partially coherent light source .
8. device according to claim 7, which is characterized in that further include image pre-processing unit, described image pretreatment Unit is electrically connected with described image complex amplitude acquiring unit;For adding in random phase in diffraction image is treated.
9. a kind of design equipment of diffraction optical element, which is characterized in that including:
At least one processor;And at least one processor being connect with the processor communication, wherein:The memory is deposited The program instruction that can be performed by the processor is contained, the processor calls described program instruction to be able to carry out such as claim 1 to 5 any method.
10. a kind of non-transient computer readable storage medium storing program for executing, which is characterized in that the non-transient computer readable storage medium storing program for executing is deposited Computer instruction is stored up, the computer instruction makes the computer perform the method as described in claim 1 to 5 is any.
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