CN108139030B - 用于分配工作气体的设备 - Google Patents

用于分配工作气体的设备 Download PDF

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Publication number
CN108139030B
CN108139030B CN201680043671.3A CN201680043671A CN108139030B CN 108139030 B CN108139030 B CN 108139030B CN 201680043671 A CN201680043671 A CN 201680043671A CN 108139030 B CN108139030 B CN 108139030B
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pressure regulator
gas
pressure
multifunctional
rear wall
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CN201680043671.3A
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CN108139030A (zh
Inventor
阿济兹·欧尔顿
埃尔韦·迪尔菲
瓦莱尔·劳伦
史蒂法纳·西乌夫
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Air Liquide Electronics Systems SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
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Air Liquide Electronics Systems SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
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Publication of CN108139030A publication Critical patent/CN108139030A/zh
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/08—Mounting arrangements for vessels
    • F17C13/084—Mounting arrangements for vessels for small-sized storage vessels, e.g. compressed gas cylinders or bottles, disposable gas vessels, vessels adapted for automotive use
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/02—Special adaptations of indicating, measuring, or monitoring equipment
    • F17C13/025—Special adaptations of indicating, measuring, or monitoring equipment having the pressure as the parameter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00—Vessel construction, in particular geometry, arrangement or size
    • F17C2201/01—Shape
    • F17C2201/0104—Shape cylindrical
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00—Vessel construction, in particular geometry, arrangement or size
    • F17C2201/03—Orientation
    • F17C2201/032—Orientation with substantially vertical main axis
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00—Vessel construction, in particular geometry, arrangement or size
    • F17C2201/05—Size
    • F17C2201/056—Small (<1 m3)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00—Vessel construction, in particular geometry, arrangement or size
    • F17C2201/05—Size
    • F17C2201/058—Size portable (<30 l)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/01—Mounting arrangements
    • F17C2205/0103—Exterior arrangements
    • F17C2205/0111—Boxes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/01—Mounting arrangements
    • F17C2205/0123—Mounting arrangements characterised by number of vessels
    • F17C2205/013—Two or more vessels
    • F17C2205/0134—Two or more vessels characterised by the presence of fluid connection between vessels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0323—Valves
    • F17C2205/0326—Valves electrically actuated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0323—Valves
    • F17C2205/0329—Valves manually actuated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0323—Valves
    • F17C2205/0335—Check-valves or non-return valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0338—Pressure regulators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0341—Filters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/01—Pure fluids
    • F17C2221/016—Noble gases (Ar, Kr, Xe)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/03—Mixtures
    • F17C2221/032—Hydrocarbons
    • F17C2221/033—Methane, e.g. natural gas, CNG, LNG, GNL, GNC, PLNG
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/03—Mixtures
    • F17C2221/032—Hydrocarbons
    • F17C2221/035—Propane butane, e.g. LPG, GPL
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0107—Single phase
    • F17C2223/0123—Single phase gaseous, e.g. CNG, GNC
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0146—Two-phase
    • F17C2223/0153—Liquefied gas, e.g. LPG, GPL
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/03—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the pressure level
    • F17C2223/033—Small pressure, e.g. for liquefied gas
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/03—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the pressure level
    • F17C2223/036—Very high pressure (>80 bar)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2225/00—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
    • F17C2225/01—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the phase
    • F17C2225/0107—Single phase
    • F17C2225/0123—Single phase gaseous, e.g. CNG, GNC
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2225/00—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
    • F17C2225/03—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the pressure level
    • F17C2225/033—Small pressure, e.g. for liquefied gas
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2225/00—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
    • F17C2225/03—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the pressure level
    • F17C2225/035—High pressure, i.e. between 10 and 80 bars
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/04—Methods for emptying or filling
    • F17C2227/041—Methods for emptying or filling vessel by vessel
    • F17C2227/042—Methods for emptying or filling vessel by vessel with change-over from one vessel to another
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/04—Methods for emptying or filling
    • F17C2227/044—Methods for emptying or filling by purging
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/04—Methods for emptying or filling
    • F17C2227/045—Methods for emptying or filling by vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/03—Control means
    • F17C2250/032—Control means using computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/03—Control means
    • F17C2250/034—Control means using wireless transmissions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/04—Indicating or measuring of parameters as input values
    • F17C2250/0404—Parameters indicated or measured
    • F17C2250/043—Pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2260/00—Purposes of gas storage and gas handling
    • F17C2260/01—Improving mechanical properties or manufacturing
    • F17C2260/018—Adapting dimensions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2260/00—Purposes of gas storage and gas handling
    • F17C2260/04—Reducing risks and environmental impact
    • F17C2260/044—Avoiding pollution or contamination
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use
    • F17C2270/0518—Semiconductors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/32—Hydrogen storage

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

本发明涉及一种用于供应气体的设备(1)，该设备设有隔绝腔室以及门(101)，该隔绝腔室包括后壁(102)和两个侧壁(100)，该门围绕竖直轴线(X)枢转以便允许打开和关闭该腔室，所述设备(1)包括两个多功能块(3)，这两个多功能块保护流体回路、在所述腔室内部被附接至所述后壁上、并且各自包括：单个高压调节器(4)；由三个低压阀(V1，V2，V3)构成的吹扫系统；用于流体地连接至缸(B，B’)的内容物的器具(6)；以及允许为装备供应气体的出口，其特征在于，该高压调节器(4)位于该吹扫系统的上游，并且在所述后壁上每个多功能块的壁凹部的表面积小于270cm2、优选地小于220cm2。

Description

用于分配工作气体的设备
技术领域
本发明涉及一种用于分配工作气体的装置以及一种用于将用在如半导体、光伏、LED、平面屏幕工业等各种不同的工业或者如采矿和制药工业等任何其他工业的过程中的气体从缸馈送到用于这些过程的装备或反应器从而来供应这种气体的设备。
背景技术
执行这些过程通常需要使用高品质的危险气体，例如用于自动吹扫和连续分配。例如，电子电路的制造需要使用被称为“工作”气体的各种不同的气体，例如像Cl2、NH3、HCl、HBr、NF3和WF6等，这些气体由于其毒性和/或其可燃性而多数被认为是对人有危险的。
许多工业设备要求装备能够自动控制向这些装备中的某些装备供应气体和流体。具体地，集成电路的制造通常包括多个过程，例如像气相沉积，其中气体被馈送到包含半导体衬底的反应腔室中。在此腔室中仔细地控制用于使发展形成集成电路的三维设计的各种不同材料层沉积的温度和压力。
由于构成蒸汽气氛的各种不同试剂的比例最终决定了共同构成微小硅片上的单个大电路的元件(尤其是晶体管、电容器和电阻器)的物理尺寸，所以必须连续监测被运送进出反应腔室的所有物质。
集成电路故障的最大原因之一可以归因于微小尘粒污染了制造的电路中的工作区域。微小异物可能损坏非常昂贵的电路并使其无法使用。为了免受这种类型的颗粒污染，半导体制造商在受保护的“绝尘室”环境中制造其产品。
进入绝尘室的空气首先被过滤，因而几乎完全消除了不期望的气体颗粒。在这些环境中工作的技术人员穿戴防止引入可能损害其精细工作的物质的特殊的面罩和套装。与此高度专业化的环境的维护和正确操作相关的成本很可观。因此，必须尽可能高效地使用绝尘室的所有空间。
除此关键要求之外，必须非常小心地对所使用的化学产品进行分配。在半导体工业中使用的液体化工产品和特殊气体往往是有毒的。选择用于分配这些潜在危险产品的装置必须确保可靠的使用，免受腐蚀和泄漏。
标准“气柜”首先是常规地并可靠地用于长期生产和分配应用。这些系统完全安装在专用房间中的大型柜中，这些专用房间可能距离与之连接的装备数十米。
在如半导体、光伏、LED、平面屏幕工业等各种不同的工业或者如采矿和制药工业等任何其他工业中的从缸到用于这些过程的装备或反应器的过程中，布局优化的、可与任何气体缸一起使用的、具有智能自动化控制的安全气体分配设备的开发将构成重大的技术进步。使用如此创新的装置将满足这类工业长期以来的需求。
发明内容
本发明的目的是减轻以上涉及的现有技术的缺点的一些或全部。
为此目的，本发明在于一种用于供应气体的设备，该设备设有隔绝腔室以及门，该隔绝腔室包括后壁和两个侧壁，该门围绕竖直轴线枢转以便允许打开和关闭该腔室，所述设备包括两个多功能块，这两个多功能块容纳流体回路、在所述腔室内部被附接至所述后壁上、并且各自包括：
-单个高压调节器，
-由三个低压阀构成的吹扫系统，
-用于流体地连接至缸的内容物的器具，
-允许为装备供应气体的出口，
其特征在于，该高压调节器位于该吹扫系统的上游，并且在所述后壁上由每个多功能块占据的面积小于270cm2、优选地小于220cm2。
特殊气体是指通常在半导体工业中使用的所有气体。这些气体可能是惰性气体、有毒气体、腐蚀性气体、或自燃性气体。这些特殊气体可以选自：以液态形式包含在缸B中的HF、WF6、BCl3、ClF3、DCS、3MS、C4F6、C4F8O、C4F8、丁烷、SO2、Cl2、C3F8、NH3、丙烷、SF6、HBr、C2F6、CH3F、HCl、CHF3、N2O；或者以压缩形式包含在缸B中的F2、PH3、B2H6、NO、NF3、SiH4、CF4、CH4、CO。取决于有待分配的气体的性质及其状态(液态的或压缩的)，缸B和B’内部的压力因此在0巴至200巴之间(包括端值)。
此外，本发明的实施例可以包括以下特征中的一个或多个：
-如上限定的设备，其特征在于，在该腔室中包含有两个气体缸，这两个缸中的每一个被连接至这两个多功能块之一。
-如上限定的设备，还包括真空发生器。
-如上限定的设备，其特征在于，该吹扫系统是十字形吹扫系统，该十字形吹洗系统包括第一管或加压管、使得能够建立真空的第二管或出口管、以及使得能够将有待分配的气体引导到装备的第三管或抽取管，这三个管连接在位于该压力调节器下游的点A处。
-如上限定的设备，其特征在于，这些多功能块还包括在该压力调节器上游的压力传感器。
-如上限定的设备，其特征在于，这些多功能块还包括在该压力调节器下游的压力传感器。
-如上限定的设备，其特征在于，该压力传感器在该吹扫系统的上游。
-如上限定的设备，其特征在于，该设备在其外壁之一上包括连接器，该连接器可以被连接至抽取系统。
-如上限定的设备，其特征在于，该设备包括控制系统，该控制系统使得能够致动气动阀并控制这些压力传感器和吹扫循环。
-如上限定的设备，其特征在于，该控制系统包括选自以下各项的通信端口：无线发射器-接收器、以太网端口、蜂窝无线电发射器-接收器、WIFI发射器-接收器、以及蓝牙发射器-接收器。
根据本发明的一个具体方面，该压力调节器的出口压力小于10巴。
具体地，当P1小于8巴、并且当被供应的装备允许时，该多功能块不包括高压压力调节器。
过滤器可以可选地整合在压力调节器的上游和/或下游。这样使得能够在适当的情况下保护压力调节器并确保分配气体的纯度。这是与使用标准“气柜”相比的另一个优点。
附图说明
在阅读参考图1和图2的以下说明时，其他具体特征和优点将变得明显。
图1是根据本发明的设备中采用的多功能块的简化框图。
图2是根据本发明的设备的简化图，该设备的门是关闭的。
具体实施方式
在图1中示出了特殊气体分配系统1’，该特殊气体分配系统由气体缸B以及适配成用于固定到缸B上的特殊气体分配装置2组成。
装置2包括真空发生器5和多功能块3，该多功能块包括单个高压压力调节器4、吹扫系统、以及用于连接至缸B的内容物的器具6，该吹扫系统包括三个阀V1、V2和V3。
压力调节器4在吹扫系统的上游，使得来自缸B的处于压力P1下的气体在此压力P1下到达压力调节器4。在压力调节器4的出口处，气体在几巴量级的压力下(即，在低压下)流动。
因此，阀V1、V2和V3以及倾向于被包含在多功能块3中的所有其他部件在低压下与气体接触。这在可靠性、安全性、和部件使用寿命方面具有相当大的优势。这样也减少了泄漏的风险。
另外，这种特征使得如隔膜阀致动器、气体管道、和密封件等部件能够微型化，并且简化其安排。
吹扫系统包括第一管道7，阀V1位于该第一管道上，该第一管道旨在当阀V1打开时接收吹扫气体G从而对回路加压。所述吹扫气体G可以选自氮、氩、和氦。氮优选地用于吹扫。包括阀V2的第二管道8旨在将第一管道7连接至真空发生器5，该真空发生器可以是微型电动泵或文氏管。该连接也可以是打开的，以能够连接至外部真空系统。
这些第一管道7和第二管道8在压力调节器4的下游的点A处连接至包括阀V3的管道9、并且旨在当阀V3打开时对装备E进行供应。
传统的吹扫系统通常还包括在压力调节器上游的被称为隔离阀的阀。
这种隔离阀在理论上是在由于系统故障而可能发生事故危险的情况下发生泄漏或警报时所必需的。事实上，这种阀的功能是在这种情况下关闭分配系统。这在此是不必要的，因为块3的体积很小，以致缸B与压力调节器4之间泄漏的风险相当低。
而且，由于根据本发明的系统的应用的持续时间非常有限，所以这个阀是无用的，因为暗示着在装置旁边一直存在在发生警报的情况下能够停止该应用的操作者。在缸包括气动阀的的情况下，该气动阀也可以由根据本发明的装置来控制。因此根据本发明的装置不包含任何在高压下对与气体接触敏感的元件。
根据本发明的分配装置2还可以包括能够在泄漏情况下抽取气体的通风口10。事实上，在半导体工业使用的特殊气体是危险的。正因为如此，标准特殊气体分配装置被封闭在气柜形式的设备1中。在此，装置的微型化使得能够以简化方式将少量部件封装在小体积的多功能块3中，从而提供必要的保护。
分配装置2还可以在其多功能块3中包括例如布置在压力调节器的上游和/或下游的压力传感器11。
分配装置2经由系统15来控制，该系统能够控制气动阀V1、V2、和V3以及使吹扫顺序自动化。
此系统15包括例如电源、用于致动气动阀的电磁阀、逻辑控制器、紧急停止按钮、以及用于显示系统状态的屏幕(例如LCD屏幕)。
该控制系统由例如可编程逻辑控制器组成。
该控制系统15包括选自以下各项的通信端口：无线发射器-接收器、以太网端口、蜂窝无线电发射器-接收器、WIFI发射器-接收器、以及蓝牙发射器-接收器。
在图2中示出了根据本发明的设备1。设备1包括外壳，该外壳具有两个侧壁100’、可以围绕轴线(X)枢转以打开和关闭该外壳的门101、以及后壁102。外壳内部有两个气体缸B和B’，并且每个气体缸经由连接器具6连接至如图1所示的多功能块3。如图2中所示的设备1的门101是关闭的、并且在其外壳内部包含两个如图1中所示的多功能块3。
由于在根据本发明的设备中采用用于分配气体的多功能块3而得到的小体积确保了对有毒气体、腐蚀性气体、易燃性气体、和自燃性气体的安全和快速的操纵。
本发明能够减少多功能块3中的颗粒捕集器的数量。本发明采用的装置具有安装、故障排除、和修改手段快速且简单的特征。运输和操纵这些块3确实很简单。
所描述的本发明具有适合于预期应用的简化结构，这样能够使产品的成本和总体尺寸最小化。根据本发明的设备的主要部件(即，结合有压力调节器4和专门为此应用而开发的这三个阀V1、V2和V3的块3)是新颖性特征，使得能够显著节省空间并且减小总体尺寸。
该结构经过了专门的设计，以便在保留必要功能的同时使成本、总体尺寸、和部件数量最小化。
为了能够不间断地分配气体，将各自固定至一个气体缸(B和B’)上的两个块3整合到根据本发明的设备1中(例如将它们并排地布置在该设备的外壳的后壁上)，使得能够当其达到其最低填充水平(切换阈值)时从第一缸切换到第二缸。
因此，此装备得益于使用块3(在低压阀上游的高压压力调节器，吹扫量减少，成本低)以及在被称为“气柜”的设备中开发的切换装置。
气体分配的连续性是这类装备的用户要求，使得他们能够防止生产中断。根据本发明的设备与迄今为止已知的系统(例如微型设备)的不同之处在于，它们可以安装在缸上，由于它们占用的空间几乎不比缸本身占用的空间更多，所以它们占地面积非常小，这适合于以不连续的方式使用少量气体的使用者(如有时在空间方面具有约束的实验室)。

Claims (11)

1.一种用于供应气体的设备(1)，该设备设有隔绝腔室以及门(101)，该隔绝腔室包括后壁(102)和两个侧壁(100)，该门围绕竖直轴线(X)枢转以便允许打开和关闭该隔绝腔室，所述设备(1)包括两个多功能块(3)，这两个多功能块容纳流体回路、在所述隔绝腔室内部被附接至所述后壁上、并且各自包括：
-单个高压调节器(4)，
-由三个低压阀(V1，V2，V3)构成的吹扫系统，
-用于流体地连接至缸(B，B’)的内容物的器具(6)，
-允许为装备供应气体的出口，
其特征在于，该高压调节器(4)位于该吹扫系统的上游，并且在所述后壁上由每个多功能块占据的面积小于270cm2，并且其中，各自被固定至一个缸的这两个多功能块(3)被适配成用于允许从一个缸自动切换到另一个缸，以便使得能够不间断地分配气体。
2.如权利要求1所述的设备，其特征在于，所述缸包括容纳在该隔绝腔室中的两个气体缸，这两个气体缸中的每一个被连接至这两个多功能块之一。
3.如权利要求1或2所述的设备，还包括真空发生器(5)。
4.如权利要求1或2所述的设备，其特征在于，该吹扫系统是十字形吹扫系统，该十字形吹扫系统包括第一管(7)、使得能够建立真空的第二管(8)、以及使得能够将有待分配的气体引导到装备(E)的第三管(9)，第一管、第二管和第三管连接在位于该高压调节器(4)下游的点处。
5.如权利要求1或2所述的设备，其特征在于，这些多功能块(3)还包括在该高压调节器(4)上游的压力传感器(11)。
6.如权利要求1或2所述的设备，其特征在于，这些多功能块(3)还包括在该高压调节器(4)下游的压力传感器(11)。
7.如权利要求6所述的设备，其特征在于，该压力传感器(11)在该吹扫系统的上游。
8.如权利要求1或2所述的设备，其特征在于，该设备在其外壁之一上包括连接器(10)，该连接器能够被连接至抽取系统。
9.如权利要求4所述的设备，其特征在于，该设备包括控制系统(15)，所述多功能块(3)还包括在该高压调节器(4)上游的压力传感器和在该高压调节器(4)下游的压力传感器，该控制系统使得能够致动低压阀(V1，V2，V3)并控制这些压力传感器和吹扫系统。
10.如权利要求9所述的设备，其特征在于，该控制系统(15)包括选自以下各项的一个通信端口：无线发射器-接收器、以太网端口、蜂窝无线电发射器-接收器、WIFI发射器-接收器、以及蓝牙发射器-接收器。
11.如权利要求1所述的设备，其特征在于，在所述后壁上由每个多功能块占据的面积小于220cm2。
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FR3039622B1 (fr) 2018-03-02
CN108139030A (zh) 2018-06-08
EP3329177B1 (fr) 2020-11-04
WO2017021615A1 (fr) 2017-02-09
JP2018523073A (ja) 2018-08-16
US20180224068A1 (en) 2018-08-09
SG11201800699SA (en) 2018-02-27
FR3039622A1 (fr) 2017-02-03
KR20180053642A (ko) 2018-05-23

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