CN108132216A - Single-ended in-situ type gas in pipelines detection device and its method of work - Google Patents
Single-ended in-situ type gas in pipelines detection device and its method of work Download PDFInfo
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- CN108132216A CN108132216A CN201711437964.2A CN201711437964A CN108132216A CN 108132216 A CN108132216 A CN 108132216A CN 201711437964 A CN201711437964 A CN 201711437964A CN 108132216 A CN108132216 A CN 108132216A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path
- G01N2021/151—Gas blown
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path
- G01N2021/155—Monitoring cleanness of window, lens, or other parts
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
- G01N2021/391—Intracavity sample
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Abstract
The present invention provides a kind of single-ended in-situ type gas in pipelines detection device and its method of works, the gas-detecting device includes light source, detector, purge unit and extends to the first pipe in the pipeline, and the part extending into pipeline of first pipe has the notch back to pipeline interior air-flow direction；Single-ended in-situ type gas in pipelines detection device further comprises：First isolated part is arranged in the measurement light light path that the light source is sent out to penetrate the measurement light, and the gas being isolated in the light source and pipeline；It is measured on light direction along described, the flexible seal member in one or both sides of first isolated part；Driving unit transfers energy to first isolated part so that the first isolated part takes place along the vibration back and forth for measuring light optical path direction.The present invention has many advantages, such as that accuracy of detection is high.
Description
Technical field
The present invention relates to gas detection, more particularly to single-ended in-situ type gas in pipelines detection device and its method of work.
Background technology
For the gas analysis instrument of in situ measurement, in order to protect the optical system of analytical instrument, avoid by process gas
In dust, greasy dirt polluted, it will usually carry out purging protection with clean high pressure nitrogen or instrument grade compressed air.
There are following advantages compared to through laser analyzer for single-ended local laser gas analyzer：
1. it is easy for installation, a hole installation need to be only opened, only unilateral platform need to be taken, only need to put unilateral cable, only need one side valve
The materials such as door reduce project installation expense；
2. installation is small to space requirement, for the insufficient occasion of part installation space, single-ended installation can only be carried out；
3. weight of equipment is light, a people can be operated, and reduce maintenance difficulties and workload；
4. light modulation is convenient, dimmed without both sides, a people can be operated, and reduce maintenance difficulties and workload.
But single-ended laser gas analyzer is in use, and there is also following problems：
1. since reflection end is inserted into inside pipeline, reflecting optics are easy to be polluted by process gas, pollution
After reflective light intensity is caused to be reduced to critical point, instrument will be unable to normally measure；
After 2. reflecting optics are contaminated, due to band gas inside pipeline, it is more difficult to safeguard.
For the above-mentioned in-situ type gas analysis instrument with purging structure, when the pressure of gas in pipelines is relatively stable
When, analytical instrument can accurately reflect the actual concentration of gas in pipelines；When the pressure of gas in pipelines fluctuates, analysis
The gas concentration value of instrument output fluctuates therewith, cannot really reflect the actual concentration of gas in pipelines.
The above problem perplexs the manufacturer of in-situ type gas analysis instrument always, could not also find and the above problem occurs
Reason.To solve the above-mentioned problems, it is proposed that the solution of sampling type, that is, the gas in sampling pipe, by filtering,
Cooling, decompression, water removal etc. obtain clean, low temperature, low pressure, the gas without liquid water after pretreatments, recycle analytical instrument
Detection.Although the program can accurately know the actual concentration of gas in pipelines, delay time length, pre-processing structure are also brought
Complicated, of high cost, many deficiencies such as reliability is low.
Invention content
In order to solve the deficiency in above-mentioned prior art, the present invention provides gaseous contamination light in a kind of purging line
The single-ended in-situ type gas in pipelines detection device of device, good reliability.
A kind of single-ended in-situ type gas in pipelines detection device, the single-ended in-situ type gas in pipelines detection device include
Light source, detector, purge unit and the first pipe in the pipeline is extended to, the purge unit is connected in first pipe
Portion；The part extending into pipeline of first pipe has the notch back to pipeline interior air-flow direction；The single-ended in-situ type
Gas in pipelines detection device further comprises：
First isolated part, first isolated part are arranged in the measurement light light path that the light source is sent out to penetrate
Measurement light is stated, and the gas being isolated in the light source and pipeline；It is measured on light direction along described, first isolated part
The flexible seal member in one or both sides；
Driving unit, the driving unit transfer energy to first isolated part so that the first isolated part is sent out
The raw vibration back and forth along the measurement light optical path direction.
According to above-mentioned single-ended in-situ type gas in pipelines detection device, optionally, gas in the single-ended in-situ type pipeline
Body detection device further comprises：
Speculum, the speculum are arranged on first pipe and extend into the end in pipeline；
Second isolated part, second isolated part are arranged in the measurement light light path that the light source is sent out to penetrate
Measurement light is stated, and the gas being isolated in the speculum and pipeline；It is measured on light direction along described, second isolated part
The flexible seal member in one or both sides；
The gas that the purge unit provides purges the side back to speculum of second isolated part.
According to above-mentioned single-ended in-situ type gas in pipelines detection device, optionally, the driving unit is by energy transmission
To second isolated part so that the second isolated part takes place along the vibration back and forth for measuring light optical path direction.
According to above-mentioned single-ended in-situ type gas in pipelines detection device, it is preferable that the driving unit is ultrasonic wave energy
Generator is measured, is connect with first isolated part.
According to above-mentioned single-ended in-situ type gas in pipelines detection device, optionally, gas in the single-ended in-situ type pipeline
Body detection device further comprises：
Second pipe, second pipe are arranged on the inner or outer side of the first pipe；
Power unit, the power unit drive second pipe to move back and forth along the length direction of first pipe,
Partly block the notch so that the notch becomes larger or becomes smaller along the length for measuring light optical path direction.
According to above-mentioned single-ended in-situ type gas in pipelines detection device, optionally, the purge unit includes：
Flow adjustment module, the flow adjustment module adjust purge gas flow so that are folded on the basis of bare flow
Add periodic changes in flow rate.
According to above-mentioned single-ended in-situ type gas in pipelines detection device, it is preferable that the changes in flow rate is that flow increases.
According to above-mentioned single-ended in-situ type gas in pipelines detection device, it is preferable that the tool of first pipe is jaggy
Part is the section along the airflow direction in the pipeline is arc-shaped or V-arrangement or [shape.
According to above-mentioned single-ended in-situ type gas in pipelines detection device, optionally, gas in the single-ended in-situ type pipeline
Body detection device further comprises：
Adjustable plate, the adjustable plate are arranged in the measurement light light path, and in first isolated part back to
The side of light source；The adjustable plate has a perforative through-hole, and distribution of the through-hole on adjustable plate is intermediate to dredge, is four careful.
The present invention also aims to provide the work side according to above-mentioned single-ended in-situ type gas in pipelines detection device
Method, the goal of the invention are achieved by the following technical programs：
According to the method for work of above-mentioned single-ended in-situ type gas in pipelines detection device, the method for work is：
Purge gas enters in the first pipe, flows into later in the pipeline so that in first isolated part and pipeline
It is the purge gas between gas, prevents the gas in the pipeline from contacting first isolated part；
Ability is transmitted to first isolated part by driving unit so that the first isolated part takes place along the measurement
The vibration back and forth of light optical path direction prevents particulate contamination on first isolated part.
Compared with prior art, the device have the advantages that being：
1. being passed through clean purge gas between isolated part and optical device, the unholiness gas in pipeline is prevented
(pollutant containing the pollution optical device such as particulate matter) contact optical device and isolated part, improve gas-detecting device
Operation stability and reliability；
Using the pollutant on the vibration removal isolated part of isolated part, such as particulate matter realizes self-cleaning function, into
One step improves the operation stability and reliability of gas-detecting device；
2. for problems of the prior art, applicant is analyzed as follows：
In the in-situ type gas-detecting device with purge unit, purge gas constantly toward being blown into tested pipeline,
An area of isolation is formed between measured medium and instrumental optics system.The flow velocity that purge gas is blown into pipeline is determined and " is blown
The effect of scavenging body protective effect " and " length (measuring light path) of optical path ".
The flow velocity of purge gas is determined by the difference that gas pressure is tested in source purge gas and pipeline, the bigger stream of pressure difference
Speed is bigger, and the kinetic energy purged in optical glass surface is bigger, and purging effort is stronger, and dust is not easy to adhere to；Lead to simultaneously in gas circuit
Flow is also bigger in the case that diameter is constant, and barriering effect is better, and tested gas is just less susceptible to contact by protection surface；And it measures
Light path also can in the case where pipe flow speed is certain shorter, so as to which measurement concentration value be made to become smaller.
So in purge system, difference that gas pressure is tested in source purge gas and pipeline be one it is very crucial because
Element, in practical application, the tested gas pressure in pipeline is often in variation, and the pressure of source purge gas is then constant
, their pressure difference will change in this way, be not stop variation so as to cause practical purging flow velocity, not only purge in this way
Protecting effect is bad, and instrument causes concentration irregular variation due to light path changes.
The above-mentioned reason known by applicant to the analysis of existing issue, creatively devises equalizing feature, makes
It obtains the pressure of purge gas entered in pipeline and the difference of gas in pipelines pressure is remained unchanged namely ensure that in pipeline and surveyed
Measure the stabilization of light path, so as to eliminate due to gas in pipelines fluctuation of pressure and caused by gas detected value unusual fluctuations；
3. without sampling, pretreatment unit, structure complexity is reduced, reduces cost, also improves reliability.
Description of the drawings
With reference to attached drawing, the disclosure will be easier to understand.Skilled addressee readily understands that be：This
A little attached drawings are used only for the technical solution illustrated the present invention, and are not intended to and protection scope of the present invention is construed as limiting.
In figure：
Fig. 1 is the structure diagram of in-situ type gas in pipelines detection device according to embodiments of the present invention.
Specific embodiment
Fig. 1 and following description describe the present invention optional embodiment with instruct those skilled in the art how to implement and
Reproduce the present invention.In order to instruct technical solution of the present invention, simplified or some conventional aspects be omitted.Those skilled in the art should
The understanding is originated from the modification of these embodiments or replacement will within the scope of the invention.Under those skilled in the art should understand that
Stating feature can combine to form multiple modifications of the invention in various ways.The invention is not limited in following optional as a result,
Embodiment, and be only limited by the claims and their equivalents.
Embodiment 1：
Fig. 1 schematically illustrates the structure letter of the single-ended in-situ type gas in pipelines detection device of the embodiment of the present invention
Figure, as shown in Figure 1, the single-ended in-situ type gas in pipelines detection device includes：
Light source, detector and the first pipe 4 in the pipeline 1 is extended to, first pipe 4 is extend into pipeline 1
Part have back to pipeline interior air-flow direction notch；The tool part jaggy of first pipe is in along the pipeline
Airflow direction section is arc-shaped or V-arrangement or [shape；
First isolated part 2, such as slide, first isolated part 2 is arranged on the measurement light light path that the light source is sent out
On to penetrate the measurement light, and the gas being isolated in the light source and pipeline；It is measured on light direction along described, described first
The flexible seal member in one or both sides of isolated part；
Speculum, the speculum are arranged on first pipe and extend into the end in pipeline；
Second isolated part 7, second isolated part are arranged in the measurement light light path that the light source is sent out to penetrate
The measurement light, and the gas being isolated in the speculum and pipeline；It is measured on light direction along described, second isolation part
The flexible seal member in one or both sides of part；
Purge unit, the purge unit are connected inside first pipe 4, the gas purging institute that the purge unit provides
State the side back to speculum of the second isolated part so that between the first isolated part and gas in pipelines, the second isolation part
It is clean purge gas between part and gas in pipelines；
Driving unit 5, such as ultrasonic energy generator, the driving unit transfers energy to first isolation part
Part so that the first isolated part takes place along the vibration back and forth for measuring light optical path direction；The driving unit passes energy
It is delivered to second isolated part so that the second isolated part takes place along the vibration back and forth for measuring light optical path direction；
Second pipe 6, second pipe are arranged on the inner or outer side of the first pipe；
Power unit, the power unit drive second pipe to move back and forth along the length direction of first pipe,
Partly block the notch so that the notch becomes larger or becomes smaller along the length for measuring light optical path direction；
Valve 3, such as ball valve, the valve 3 is arranged between first isolated part and the first pipe, and inside is suitable for measuring
Light passes through；
Air source, the air source provide clean, the dry purge gas for not containing under test gas ingredient, such as nitrogen；Air source
Outlet connection flow adjustment module and equalizing feature；
Flow adjustment module, the flow adjustment module adjust purge gas flow so that are folded on the basis of bare flow
Add periodic changes in flow rate, the changes in flow rate is that flow increases；
Switching part, the entrance of the switching part are respectively communicated with flow adjustment module and equalizing feature, outlet
Inside one pipe；So that the inside of the first pipe selectively communicates with flow adjustment module and equalizing feature；
Adjustable plate, the adjustable plate are arranged in the measurement light light path, and in first isolated part back to
The side of light source；The adjustable plate has a perforative through-hole, and distribution of the through-hole on adjustable plate is intermediate to dredge, is four careful；
Equalizing feature, the equalizing feature include：
Cylindrical member, one end of the cylindrical member connect the inside of the pipeline by pipeline；
Piston, the piston are arranged in the cylindrical member；
Spring, one end of the spring are fixed on the piston, and the other end is fixed in the cylindrical member；
Gas access and gas vent, the gas access and gas vent are arranged on opposite two of the cylindrical member
Side, the gas vent connect the switching part；Overlapping area S between the side of the piston and gas vent1And gas
The sectional area S of outlet2The ratio between M ∈ [0,1], and the changes delta S of the overlapping area1The relationship between the deformation quantity Δ x of the spring
It is：ΔS1=k Δs x, k are constants, andPEnterFor the gas pressure intensity at the gas access, K is the spring
The coefficient of stiffiness, S3The area of section being perpendicularly to the direction of movement for the piston.
The method of work according to above-mentioned in-situ type gas in pipelines detection device of the embodiment of the present invention, the work side
Method is：
In the operating condition, by the switching of switching part, purge gas passes sequentially through gas access, cylindrical member, gas
Enter in the first pipe behind outlet and switching part, finally enter in pipeline, so that the first isolated part and gas in pipelines
Between, it is clean purge gas between the second isolated part and gas in pipelines；The gas pressure intensity of the gas outlet
PGo outWith gas in pipelines pressure PPipeDifference be Δ P；
Gas pressure intensity at the gas access remains unchanged；
Gas pressure intensity P in pipelinePipeIt changes, variable quantity is Δ PPipe；Spring pushes piston movement, the overlapping area
(namely blocking the area of gas vent) S1It changes so that the gas pressure intensity P of the gas outletGo outIt changes, becomes
Change amount is Δ PGo out=Δ PPipeNamely the gas pressure intensity P of gas outletGo outWith gas in pipelines pressure PPipeDifference still for Δ P, so as to
So that measurement light path of the measurement light in pipeline is constant, due to the change of gas in pipelines pressure when eliminating gas in pipelines detection
The irregular variation of such as concentration of gas parameter caused by change；
Meanwhile ability is transmitted to first isolated part by the driving unit so that edge occurs for the first isolated part
The vibration back and forth for measuring light optical path direction, prevents particulate contamination on first isolated part；
Under maintenance state, by the switching of switching part, the purge gas that air source provides enters flow adjustment mould
Block, the flow adjustment module adjust purge gas flow so that periodic flow is superimposed on the basis of bare flow and is become
Change, the changes in flow rate is that flow increases；It goes that the first isolated part and second is promoted to be isolated by the variation of purge gas flow
The particulate matter adhered on component is fallen, so as to clean isolated part.
Embodiment 2：
According to embodiments of the present invention 1 single-ended in-situ type gas in pipelines detection device and its method of work gas in pipeline
Application examples in bulk concentration detection.
In the application examples, in-situ type gas in pipelines detection device includes：
Light source, such as semiconductor laser with tunable, the purge unit for measuring light and passing through pipeline side that the light source is sent out
Enter in the pipeline afterwards, be detected after the purge unit of pipeline opposite side is passed through after interacting with the gas in pipeline
Device receives；
The optical signal received is converted to electric signal by detector, the detector；Light source and detector are arranged on pipeline
Opposite both sides；
Analytic unit, the analytic unit handles the electric signal using absorption spectroscopy techniques, so as to know the pipeline
The content of interior gas；
In equalizing feature, the sectional area of gas feed is S2, and the gas access and gas vent are perpendicular to institute
The projection stated in the plane of the central axis of gas vent overlaps；The gas access and gas vent perpendicular to central shaft
The rectangular cross-section of line, the wide extending direction of rectangle is parallel with the direction of motion of piston, the extending direction of the length of rectangle and work
The direction of motion of plug is vertical, and k is the sizes values of the length of the rectangle；The other end closing of the cylindrical member, one end of spring
It is fixed on the blind end；One end of the spring is fixed on the side back to the pipeline of the piston.
The method of work according to above-mentioned in-situ type gas in pipelines detection device of the embodiment of the present invention, the work side
Method is：
Purge gas enters after passing sequentially through gas access, cylindrical member, gas vent and purge unit in pipeline；The gas
The gas pressure intensity P in body exitGo outWith gas in pipelines pressure PPipeDifference be Δ P；It is not contained in pipeline in the purge gas
Under test gas or the under test gas containing known concentration；
Gas pressure intensity at the gas access remains unchanged；
Gas pressure intensity P in pipelinePipeIt changes, variable quantity is Δ PPipe；Spring pushes piston movement, the faying surface
Product S1It changes,So that the gas pressure intensity of the gas outlet
PGo outIt changes, variable quantity isNamely the gas pressure intensity P of gas outletGo outAnd gas in pipelines
Pressure PPipeDifference still for Δ P so that it is constant to measure measurement light path of the light in pipeline, when eliminating gas in pipelines detection
The irregular variation of gas parameter such as concentration caused by the variation of gas in pipelines pressure.
Claims (10)
1. a kind of single-ended in-situ type gas in pipelines detection device, the single-ended in-situ type gas in pipelines detection device includes light
Source, detector, purge unit and the first pipe in the pipeline is extended to, the purge unit is connected in first pipe
Portion；The part extending into pipeline of first pipe has the notch back to pipeline interior air-flow direction；It is characterized in that：It is described
Single-ended in-situ type gas in pipelines detection device further comprises：
First isolated part, first isolated part are arranged in the measurement light light path that the light source is sent out to penetrate the survey
Measure light, and the gas being isolated in the light source and pipeline；It is measured on light direction along described, the side of first isolated part
Or the flexible seal member in both sides；
Driving unit, the driving unit transfer energy to first isolated part so that edge occurs for the first isolated part
The vibration back and forth for measuring light optical path direction.
2. single-ended in-situ type gas in pipelines detection device according to claim 1, it is characterised in that：The single-ended original position
Formula gas in pipelines detection device further comprises：
Speculum, the speculum are arranged on first pipe and extend into the end in pipeline；
Second isolated part, second isolated part are arranged in the measurement light light path that the light source is sent out to penetrate the survey
Measure light, and the gas being isolated in the speculum and pipeline；It is measured on light direction along described, the one of second isolated part
The flexible seal member in side or both sides；
The gas that the purge unit provides purges the side back to speculum of second isolated part.
3. single-ended in-situ type gas in pipelines detection device according to claim 2, it is characterised in that：The driving unit
Transfer energy to second isolated part so that the second isolated part takes place along the measurement light optical path direction back and forth
Vibration.
4. single-ended in-situ type gas in pipelines detection device according to claim 3, it is characterised in that：The driving unit
It is ultrasonic energy generator, is connect with first isolated part.
5. single-ended in-situ type gas in pipelines detection device according to claim 1, it is characterised in that：The single-ended original position
Formula gas in pipelines detection device further comprises：
Second pipe, second pipe are arranged on the inner or outer side of the first pipe；
Power unit, the power unit drive second pipe to move back and forth along the length direction of first pipe, part
Ground blocks the notch so that the notch becomes larger or becomes smaller along the length for measuring light optical path direction.
6. single-ended in-situ type gas in pipelines detection device according to claim 1, it is characterised in that：The purge unit
Including：
Flow adjustment module, the flow adjustment module adjust purge gas flow so that week is superimposed on the basis of bare flow
The changes in flow rate of phase property.
7. single-ended in-situ type gas in pipelines detection device according to claim 6, it is characterised in that：The changes in flow rate
It is that flow increases.
8. single-ended in-situ type gas in pipelines detection device according to claim 6, it is characterised in that：First pipe
Has part jaggy the section along the airflow direction in the pipeline is arc-shaped or V-arrangement or [shape.
9. single-ended in-situ type gas in pipelines detection device according to claim 1, it is characterised in that：The single-ended original position
Formula gas in pipelines detection device further comprises：
Adjustable plate, the adjustable plate are arranged in the measurement light light path, and in first isolated part back to light source
Side；The adjustable plate has a perforative through-hole, and distribution of the through-hole on adjustable plate is intermediate to dredge, is four careful.
10. according to the method for work of any single-ended in-situ type gas in pipelines detection devices of claim 1-9, the work
It is as method：
Purge gas enters in the first pipe, flows into later in the pipeline so that first isolated part and gas in pipelines
Between be the purge gas, prevent gas in the pipeline from contacting first isolated part；
Ability is transmitted to first isolated part by driving unit so that the first isolated part takes place along the measurement light light
The vibration back and forth in road direction prevents particulate contamination on first isolated part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711437964.2A CN108132216B (en) | 2017-12-26 | 2017-12-26 | Single-end in-situ pipeline gas detection device and working method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711437964.2A CN108132216B (en) | 2017-12-26 | 2017-12-26 | Single-end in-situ pipeline gas detection device and working method thereof |
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| CN108132216A true CN108132216A (en) | 2018-06-08 |
| CN108132216B CN108132216B (en) | 2023-06-30 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110006492A (en) * | 2019-03-26 | 2019-07-12 | 北京科益虹源光电技术有限公司 | A kind of gas collecting monitoring method and system for excimer laser |
| CN113551097A (en) * | 2021-06-04 | 2021-10-26 | 清华大学 | In-situ cross-penetration tubular pretreatment device based on gas streaming |
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