CN108118294A - Air cylinder structure and with its compressor - Google Patents
Air cylinder structure and with its compressor Download PDFInfo
- Publication number
- CN108118294A CN108118294A CN201711440174.XA CN201711440174A CN108118294A CN 108118294 A CN108118294 A CN 108118294A CN 201711440174 A CN201711440174 A CN 201711440174A CN 108118294 A CN108118294 A CN 108118294A
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- Prior art keywords
- diamond
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- film layer
- air cylinder
- film
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- MEYZYGMYMLNUHJ-UHFFFAOYSA-N tunicamycin Natural products CC(C)CCCCCCCCCC=CC(=O)NC1C(O)C(O)C(CC(O)C2OC(C(O)C2O)N3C=CC(=O)NC3=O)OC1OC4OC(CO)C(O)C(O)C4NC(=O)C MEYZYGMYMLNUHJ-UHFFFAOYSA-N 0.000 claims abstract description 22
- 230000007704 transition Effects 0.000 claims abstract description 21
- 229910052799 carbon Inorganic materials 0.000 claims description 37
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 35
- 239000004615 ingredient Substances 0.000 claims description 28
- 229910003481 amorphous carbon Inorganic materials 0.000 claims description 10
- 229910052804 chromium Inorganic materials 0.000 claims description 8
- 229910003460 diamond Inorganic materials 0.000 claims description 8
- 239000010432 diamond Substances 0.000 claims description 8
- 229910052719 titanium Inorganic materials 0.000 claims description 8
- 229910052721 tungsten Inorganic materials 0.000 claims description 8
- 229910052726 zirconium Inorganic materials 0.000 claims description 8
- 229910000831 Steel Inorganic materials 0.000 claims description 6
- 230000003247 decreasing effect Effects 0.000 claims description 6
- 239000000203 mixture Substances 0.000 claims description 6
- 239000010959 steel Substances 0.000 claims description 6
- 229910052750 molybdenum Inorganic materials 0.000 claims description 5
- 229910052757 nitrogen Inorganic materials 0.000 claims description 5
- 229910052727 yttrium Inorganic materials 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 229910052796 boron Inorganic materials 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 229910052731 fluorine Inorganic materials 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 230000007423 decrease Effects 0.000 claims description 2
- 238000005299 abrasion Methods 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 187
- 239000010408 film Substances 0.000 description 139
- 239000002131 composite material Substances 0.000 description 29
- 239000012528 membrane Substances 0.000 description 29
- 239000011651 chromium Substances 0.000 description 12
- 239000010936 titanium Substances 0.000 description 10
- 239000011248 coating agent Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 238000012360 testing method Methods 0.000 description 6
- 229910000997 High-speed steel Inorganic materials 0.000 description 5
- 239000011435 rock Substances 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000010276 construction Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910001018 Cast iron Inorganic materials 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 229910019590 Cr-N Inorganic materials 0.000 description 2
- 229910019588 Cr—N Inorganic materials 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005461 lubrication Methods 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 2
- 229910001315 Tool steel Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000002346 layers by function Substances 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000879 optical micrograph Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0605—Carbon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0635—Carbides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0664—Carbonitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
- C23C28/322—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer only coatings of metal elements only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
- C23C28/341—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one carbide layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
- C23C28/343—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one DLC or an amorphous carbon based layer, the layer being doped or not
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/12—Casings; Cylinders; Cylinder heads; Fluid connections
- F04B39/122—Cylinder block
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- General Engineering & Computer Science (AREA)
- Compressor (AREA)
Abstract
The present invention provides a kind of air cylinder structure and with its compressor.Air cylinder structure includes：Cylinder body, the outer circumferential surface of cylinder body are provided with anti-attrition layer and transition zone, and transition zone is located between the outer circumferential surface and anti-attrition layer of cylinder body, wherein, anti-attrition layer includes at least one of diamond-like tunic layer and doped diamond-like film layer.Using the air cylinder structure of the structure, the wearability of cylinder is effectively improved, the coefficient of friction that can be effectively reduced between cylinder and other parts reduces the abrasion of air cylinder structure, ensure that the reliability of the compressor of the air cylinder structure with the structure.
Description
Technical field
The present invention relates to compressor apparatus technical field, in particular to a kind of air cylinder structure and with its compression
Machine.
Background technology
At present, refrigeration compressor mainly has piston compressor, rotor-type compressor, screw compressor etc., suitable for difference
Cold occasion.Wherein, one kind being proposed in the prior art and turning cylinder compressor, in cylinder compressor is turned, cylinder is the pump of most critical
One of body part, cylinder upper surface and upper flange, cylinder lower face and limiting plate, cylinder outer circle and cylinder sleeve, cylinder limit shaft
It is secondary that friction is formed with limiting plate, cylinder piston hole and piston, the secondary theoretical friction power loss being related to of these frictions accounts for entirely pumping
75% or so of body part friction power loss.In the prior art, cylinder compressor is turned in use, cylinder is with usage time
It elapses, is worn on the outer surface of cylinder, cause the situation of the reduced performance of compressor.
The content of the invention
It is a primary object of the present invention to provide a kind of air cylinder structure and with its compressor, to solve in the prior art
The problem of cylinder outer surface is easily worn.
To achieve these goals, according to an aspect of the invention, there is provided a kind of air cylinder structure, including：Cylinder sheet
Body, the outer circumferential surface of cylinder body are provided with anti-attrition layer and transition zone, transition zone be located at cylinder body outer circumferential surface and anti-attrition layer it
Between, wherein, anti-attrition layer includes at least one of diamond-like tunic layer and doped diamond-like film layer.
Further, transition zone includes bottoming film layer, and bottoming film layer is arranged on the outer circumferential surface of cylinder body, anti-attrition layer position
In the outside of bottoming film layer, bottoming film layer is Cr film layers, Ti film layers, Zr film layers, W film layers, Mo film layers or Y film layers.
Further, transition zone further include middle part film layer, middle part film layer be located at cylinder body outer circumferential surface and anti-attrition layer it
Between.
Further, middle part film layer includes at least one of Me-N film layers, Me-C-N film layers, Me-C film layers, wherein, Me
For Cr, Ti, Zr, W, Mo or Y.
Further, middle part film layer includes Me-N film layers, Me-C-N film layers and Me-C film layers, sets to Me-N even film layers
In on the outer surface of bottoming film layer, it is arranged on the outer surface of Me-N film layers to Me-C-N even film layers, Me-C even film layers
It is arranged on the outer surface of Me-C-N film layers, anti-attrition layer is evenly arranged on the outer surface of Me-C-N film layers.
Further, anti-attrition layer includes diamond-like tunic layer and doped diamond-like film layer, doped diamond-like film layer
It is evenly arranged on the surface of middle part film layer, diamond-like tunic layer is evenly arranged in the appearance of doped diamond-like film layer
On face.
Further, diamond-like tunic layer is the diamond-like of hydrogeneous amorphous carbon, alternatively, diamond-like tunic layer
For the diamond-like of tetrahedral amorphous carbon, alternatively, diamond-like tunic layer is the class of hydrogeneous tetrahedral amorphous carbon
Diamond.
Further, doped diamond-like film layer is mixes M diamond-like carbon film layers, alternatively, doped diamond-like film layer is to mix
MC diamond-like carbon film layers, wherein, M Cr, Ti, Zr, W, Mo, Y, Al, Ag, Cu, Si, B, N or F, MC are the carbide of the class containing M
Diamond-like.
Further, when doped diamond-like film layer for when mixing M diamond-like carbon film layers, the ingredient of M and the ingredient of C are equably
It sets, when doped diamond-like film layer for when mixing MC diamond-like carbon film layers, the ingredient of MC and the ingredient of C are equably set.
Further, when doped diamond-like film layer for when mixing M diamond-like carbon film layers, the ingredient of M and the ingredient of C are from gradual
The direction of outer surface away from cylinder body is in the set-up mode for being gradually incremented by or gradually successively decreasing, when doped diamond-like film layer is
When mixing MC diamond-like carbon film layers, the ingredient of MC and the ingredient of C are from the direction for the outer surface for being gradually distance from cylinder body in gradually passing
The set-up mode for increasing or gradually successively decreasing.
Further, doped diamond-like film layer includes mixing M diamond-like carbon film layers and mixes MC diamond-like carbon film layers, mixes M classes
It diamond film layer and mixes MC diamond-like carbon film layers and is alternately arranged.
Further, cylinder body is made of steel, alternatively, cylinder body is made of the steel after Nitrizing Treatment.
Further, the thickness of anti-attrition layer and transition zone is L1, wherein, 0.5 μm≤L1≤1.9 μm, alternatively, 4 μm≤L1
≤10μm。
According to another aspect of the present invention, a kind of air cylinder structure is provided, including anti-attrition layer, anti-attrition layer includes doping eka-gold
Hard rock film layer, doped diamond-like film layer are evenly arranged on the outer surface of cylinder body.
According to another aspect of the present invention, a kind of compressor is provided, including air cylinder structure, air cylinder structure is above-mentioned gas
Cylinder structure.
It applies the technical scheme of the present invention, using the air cylinder structure of the structure, is effectively improved the wearability of cylinder, energy
The coefficient of friction being enough effectively reduced between cylinder and other parts reduces the abrasion of air cylinder structure, ensure that with the knot
The reliability of the compressor of the air cylinder structure of structure.
Description of the drawings
The accompanying drawings which form a part of this application are used for providing a further understanding of the present invention, and of the invention shows
Meaning property embodiment and its explanation do not constitute improper limitations of the present invention for explaining the present invention.In the accompanying drawings：
Fig. 1 shows the schematic cross-sectional view of the first embodiment of air cylinder structure according to the present invention；
Fig. 2 shows the schematic cross-sectional view of the second embodiment of air cylinder structure according to the present invention；
Fig. 3 shows the schematic cross-sectional view of the 3rd embodiment of air cylinder structure according to the present invention；
Fig. 4 shows the schematic cross-sectional view of the fourth embodiment of air cylinder structure according to the present invention；
Fig. 5 shows the schematic cross-sectional view of the 5th embodiment of air cylinder structure according to the present invention；
Fig. 6 shows the schematic cross-sectional view of the sixth embodiment of air cylinder structure according to the present invention；
Fig. 7 shows the schematic cross-sectional view of the 7th embodiment of air cylinder structure according to the present invention；
Fig. 8 shows the schematic cross-sectional view of the 8th embodiment of air cylinder structure according to the present invention；
Fig. 9 shows the schematic cross-sectional view of the 9th embodiment of air cylinder structure according to the present invention；
Figure 10 shows the schematic cross-sectional view of the tenth embodiment of air cylinder structure according to the present invention；
Figure 11 shows the schematic cross-sectional view of the 11st embodiment of air cylinder structure according to the present invention；
Figure 12 shows the structure diagram of the pump housing of compressor according to the present invention；
Figure 13 shows the structure diagram of the embodiment of cylinder according to the present invention；
Figure 14 shows the schematic cross-sectional view of the embodiment of cylinder according to the present invention.
Wherein, above-mentioned attached drawing is marked including the following drawings：
10th, cylinder body；20th, bottoming film layer；30th, middle part film layer；40th, doped diamond-like film layer；50th, diamond-like rock layers
Film layer.
11st, shaft；12nd, upper flange；13rd, cylinder jacket；14th, piston；15th, cylinder；151st, cylinder piston hole；152nd, limiting cylinder
Position axis；16th, lower flange.
Specific embodiment
It should be noted that in the case where there is no conflict, the feature in embodiment and embodiment in the application can phase
Mutually combination.The present invention will be described in detail below with reference to the accompanying drawings and in conjunction with the embodiments.
It should be noted that term used herein above is merely to describe specific embodiment, and be not intended to restricted root
According to the illustrative embodiments of the application.As used herein, unless the context clearly indicates otherwise, otherwise singulative
It is also intended to include plural form, additionally, it should be understood that, when in the present specification using term "comprising" and/or " bag
Include " when, indicate existing characteristics, step, operation, device, component and/or combination thereof.
It should be noted that term " first ", " second " in the description and claims of this application and attached drawing etc.
It is the object for distinguishing similar, without being used to describe specific order or precedence.It should be appreciated that the art so used
Language can exchange in the appropriate case, so that presently filed embodiment described herein for example can be with except illustrating herein
Or the order beyond those of description is implemented.In addition, term " comprising " and " having " and their any deformation, it is intended that
Cover it is non-exclusive include, for example, containing the process of series of steps or unit, method, system, product or equipment need not limit
In those steps or unit for clearly listing, but may include not list clearly or for these processes, method, production
The intrinsic other steps of product or equipment or unit.
For ease of description, spatially relative term can be used herein, as " ... on ", " ... top ",
" ... upper surface ", " above " etc., for describing such as a device shown in the figure or feature and other devices or spy
The spatial relation of sign.It should be appreciated that spatially relative term is intended to comprising the orientation except device described in figure
Outside different azimuth in use or operation.For example, if the device in attached drawing is squeezed, it is described as " in other devices
It will be positioned as " under other devices or construction after the device of part or construction top " or " on other devices or construction "
Side " or " under other devices or construction ".Thus, exemplary term " ... top " can include " ... top " and
" in ... lower section " two kinds of orientation.The device can also other different modes positioning (being rotated by 90 ° or in other orientation), and
And respective explanations are made to the opposite description in space used herein above.
Now, the illustrative embodiments according to the application are more fully described with reference to the accompanying drawings.However, these are exemplary
Embodiment can be implemented by many different forms, and should not be construed to be limited solely to embodiment party set forth herein
Formula.It should be appreciated that thesing embodiments are provided so that disclosure herein is thoroughly and complete, and these are shown
The design of example property embodiment is fully conveyed to those of ordinary skill in the art, in the accompanying drawings, for the sake of clarity, it is possible to expand
The big thickness of layer and region, and make identical device is presented with like reference characters, thus they are retouched by omitting
It states.
With reference to shown in Fig. 1 to Figure 14, according to an embodiment of the invention, a kind of air cylinder structure is provided.
Specifically, air cylinder structure includes cylinder body 10.The outer circumferential surface of cylinder body 10 is provided with anti-attrition layer and transition zone,
Transition zone is located between the outer circumferential surface and anti-attrition layer of cylinder body 10.Wherein, anti-attrition layer includes diamond-like tunic layer 50 and mixes
At least one of Heterodiamondoid film layer 40.
In the present embodiment, using the air cylinder structure of the structure, the wearability of cylinder is effectively improved, it can be effectively
The coefficient of friction between cylinder and other parts is reduced, the abrasion of air cylinder structure is reduced, ensure that the cylinder with the structure
The reliability of the compressor of structure.
Wherein, as shown in Figure 1, Figure 2, shown in Fig. 4 to Fig. 6 and Fig. 9, transition zone includes bottoming film layer 20.Bottoming film layer 20 is set
In on the outer circumferential surface of cylinder body 10, anti-attrition layer is located at the outside of bottoming film layer 20, bottoming film layer 20 is Cr film layers, Ti film layers,
Zr film layers, W film layers, Mo film layers or Y film layers.In order to express easily, bottoming film layer 20 can be denoted as Me layers, wherein, Me can be with
For Cr (chromium) or Ti (titanium) or Zr (zirconium) or W (tungsten) or Mo (molybdenum) or Y (yttrium).
As shown in Figure 1, Figure 2, shown in Fig. 3, Fig. 5, Fig. 7 and Figure 10, transition zone further includes middle part film layer 30, and middle part film layer 30 is located at
Between the outer circumferential surface and anti-attrition layer of cylinder body 10.The wearability of cylinder can be further improved by so setting.
Middle part film layer 30 includes at least one of Me-N film layers, Me-C-N film layers, Me-C film layers.Preferably, middle part film
Layer 30 includes Me-N film layers, Me-C-N film layers and Me-C film layers, is arranged to Me-N even film layers the outer surface of bottoming film layer 20
On, it is arranged on the outer surface of Me-N film layers to Me-C-N even film layers, is arranged at Me-C-N film layers to Me-C even film layers
On outer surface, anti-attrition layer is evenly arranged on the outer surface of Me-C-N film layers.Wherein Me is Cr (chromium) or Ti (titanium) or Zr
(zirconium) or W (tungsten) or Mo (molybdenum) or Y (yttrium), N are nitrogen, and C is carbon, Me, C in Me and N or Me-C-N film layers in Me-N film layers
With the Me in N or Me-C film layers and the ingredient of C by being uniformly distributed close to cylinder body 10 to the direction away from cylinder body 10.
As shown in Fig. 3, Fig. 4, Fig. 8, anti-attrition layer includes diamond-like tunic layer 50 and doped diamond-like film layer 40, doping
Diamond-like carbon film layer 40 is evenly arranged on the surface of middle part film layer 30, and diamond-like tunic layer 50 is evenly arranged in doping
On the outer surface of diamond-like carbon film layer 40.
Specifically, diamond-like tunic layer 50 is the diamond-like of hydrogeneous amorphous carbon, alternatively, diamond-like tunic layer
50 be the diamond-like of tetrahedral amorphous carbon, alternatively, diamond-like tunic layer 50 is hydrogeneous tetrahedral amorphous carbon
Diamond-like.Doped diamond-like film layer 40 is mixes M diamond-like carbon film layers, alternatively, doped diamond-like film layer 40 is to mix MC
Diamond-like carbon film layer, it is preferable that when doped diamond-like film layer 40 is to mix M diamond-like carbon film layers, the ingredient of M and the ingredient of C
It equably sets, when doped diamond-like film layer 40 for when mixing MC diamond-like carbon film layers, the ingredient of MC and the ingredient of C are equably set
It puts.Alternatively, when doped diamond-like film layer 40 for when mixing M diamond-like carbon film layers, the ingredient of M and the ingredient of C are from being gradually distance from gas
The direction of the outer surface of cylinder body 10 is in the set-up mode for being gradually incremented by or gradually successively decreasing, when doped diamond-like film layer 40 is to mix
During MC diamond-like carbon film layers, the ingredient of MC and the ingredient of C are from the direction for the outer surface for being gradually distance from cylinder body 10 in gradually passing
The set-up mode for increasing or gradually successively decreasing.Certainly, when doped diamond-like film layer 40 is to mix M diamond-like carbon film layers and mix MC diamond-likes
During stone film layer, mix M diamond-like carbon film layers and mix MC diamond-like carbon film layers and be alternately arranged.Wherein, M Cr, Ti, Zr, W, Mo, Y,
Al, Ag, Cu, Si, B, N or F, MC are the diamond-like (DLC) of the carbide of the class containing M.M and C (carbon) or MC- in M-DLC layers
The ingredient of MC and C (carbon) in DLC layer are uniformly distributed by close cylinder body 10 to the direction away from cylinder body 10 or gradient
Distribution or stratiform are alternately distributed.It so sets to reduce stress in thin film, and then improves film layer and the combination power of matrix.
In the present embodiment, in order to improve the wear-resisting property of cylinder, cylinder body 10 can be arranged to be made of steel,
Alternatively, cylinder body 10 is made of the steel after Nitrizing Treatment.
Preferably, the thickness of anti-attrition layer and transition zone is L1, wherein, 0.5 μm≤L1≤1.9 μm, alternatively, 4 μm≤L1≤
10μm。
According to another embodiment of the application, as shown in figure 11, a kind of air cylinder structure is provided.The air cylinder structure includes
Anti-attrition layer, anti-attrition layer include doped diamond-like film layer 40, and doped diamond-like film layer 40 is evenly arranged in cylinder body 10
Outer surface on.In this embodiment, the doped diamond in the ingredient and above-described embodiment of doped diamond-like film layer 40
The ingredient of film layer 40 is identical, so sets the wear-resisting property that can equally play the role of increasing cylinder.
Air cylinder structure in above-described embodiment can be also used for compressor apparatus technical field, i.e., according to the present invention another
Aspect provides a kind of compressor.The compressor includes air cylinder structure, and air cylinder structure is the air cylinder structure in above-described embodiment.
Specifically, DLC (Diamond Like Carbon, diamond-like) coating has that coefficient of friction is low, anti abrasive spy
Point, the cylinder use demand with turning in the cylinder piston compressor are agreed with very much.And it can obviously reduce through overdoping, addition transition zone
The internal stress of DLC film, and then improve the combination power of itself and matrix.So as to turn the cylinder surface plating DLC of the cylinder piston compressor
Coating will be expected to reduce cylinder with secondary coefficient of friction, improving the wearability of cylinder, so reduce compressor friction power loss,
Improve compressor service life.
Diamond-like refers in particular to hydrogeneous amorphous carbon (a-C in the present embodiment:) or tetrahedral amorphous state carbon (ta-C) or hydrogeneous H
Tetrahedral amorphous state carbon (ta-C:H).Diamond-film-like has the characteristics that coefficient of friction is low, anti abrasive, and through overdoping, addition
The means such as transition zone can obviously reduce the internal stress of diamond-film-like, and then improve the combination power of itself and matrix.So as to turn cylinder
The cylinder surface of piston compressor sets diamond-like composite membrane (bottoming film layer, middle part film layer, doped diamond-like film layer, class
Diamond layer film layer) cylinder can be reduced with secondary coefficient of friction, improving the wearability of cylinder, and then reducing rubbing for compressor
It wipes power consumption, improve compressor service life.
Diamond-like composite membrane is provided with by the outer surface of cylinder body 10 in this present embodiment, passes through the diamond-like
The effect of composite membrane is expected to improve the anti-wear and wear-resistant performance of compresser cylinder：On the one hand, diamond-like composite membrane can reduce pressure
The specific wear rate of contracting machine cylinder, so as to greatly improve the service life of compresser cylinder itself and compressor；On the other hand, eka-gold
Hard rock composite membrane can significantly reduce the coefficient of friction of cylinder, so as to reduce compressor mechanical consumption, promote compressor efficiency.
Diamond-like composite membrane in the present embodiment includes bottoming film layer 20, middle part film layer 30, doped diamond-like film layer
40 and diamond-like tunic layer 50 in one or more than one kinds of, bottoming film layer 20, middle part film layer 30, doped diamond
One or more than one kinds of in film layer 40 and diamond-like tunic layer 50 by interior to be coated on successively on cylinder body 10,
And the outermost layer of diamond-like composite membrane is doped diamond-like film layer 40 or diamond-like tunic layer 50.
Preferably, the middle part film layer 30 in above-described embodiment is Me-C layers, wherein, Me is Cr or Ti or Zr or W or Mo, C
For carbon, and the Me contents in Me-C layers are close to direction of the cylinder body 10 to separate cylinder body 10 by gradually decreasing, correspondingly
C content in Me-C layers, should convenient for reducing film layer by being gradually increased close to cylinder body 10 to the direction away from cylinder body 10
Power, and then improve film layer and the combination power of matrix.
Preferably, diamond-like composite membrane includes bottoming film layer 20, middle part film layer 30, doped diamond-like film layer 40, should
Bottoming film layer 20, middle part film layer 30 and doped diamond-like film layer 40 are sequentially coated on the outer of cylinder body 10 from inside to outside
Week.There is bottoming film layer 20, middle part film layer 30, doped diamond-like film layer by diamond-like composite membrane in this present embodiment
40 so that the combination power of diamond-like composite membrane and cylinder body 10 is stronger, significantly improves the reliable of diamond-like composite membrane
Property so that it (is the three of non-coating diamond-like composite membrane cylinder that compresser cylinder hardness, which can reach more than 20GPa, in the present embodiment
Times or more), and the relatively non-coating cylinder of specific wear rate can reduce by 3 orders of magnitude, so as to greatly improve compresser cylinder itself and
The service life of rotary compressor.
The experiment shows and (is shown in Table 1)：The cylinder for being provided with diamond-like composite membrane is compound with respect to diamond-like is not provided with
Coefficient of friction under different loads can be reduced 20-30% and (use high-speed steel with cylinder, secondary use is cast to rubbing by the cylinder of film
Exemplified by iron), so as to substantially reduce friction power loss, improve compressor efficiency.Experimental condition：Linear velocity is 1m/s, load (pressure)
Respectively 1,3,5bar, using 68DA oil lubrications.
1 compresser cylinder of table is provided with the coefficient of friction before and after diamond-like composite membrane (under different pressure)
| 1bar | 3bar | 5bar | |
| High-speed steel-cast iron | 0.126 | 0.063 | 0.049 |
| It is provided with high-speed steel-cast iron of diamond-like composite membrane | 0.100 | 0.049 | 0.036 |
| The coefficient of friction range of decrease | 20.6% | 22.2% | 26.6% |
The combination power of diamond-like composite membrane and cylinder body 10 can reach HF2 grades (HF1-4 grades for qualification, 1 grade etc.
Grade highest), be《German engineer handbook》Higher level in VDI 3198-1992 standards, it is compound to greatly reduce diamond-like
The possibility that film peels off.
The thickness of diamond-like composite membrane in the present embodiment is 0.5 μm to 10 μm, it is therefore preferable to 1um to 4um.
Wherein, compresser cylinder is preferably the cylinder for turning the cylinder piston compressor.A kind of preferred structure is as follows：First in gas
Cylinder surfaces deposit Cr prime coats using vacuum cathode arc, then deposit Cr-N/ using anode layer ion source aid magnetron sputtering
Cr-C-N/Cr-C transition zones (structure of this layer is Cr-N layers, Cr-C-N layers, Cr-C layers of being sequentially overlapped from inside to outside), finally
Cr-DLC functional layers (mixing Cr diamond-likes rock layers) are deposited on transition zone.The material of cylinder is high-speed tool steel in the present embodiment
SKH51 (the JIS trades mark), and pass through quenching+lonneal processing+nitrogen treatment.Obtained diamond-like composite membrane has following spy
Property：
The thickness of diamond-like composite membrane is about 2um；
The hardness of diamond-like composite membrane is about 20GPa (being more than the three times of non-coating cylinder)；
The combination power of diamond-like composite membrane is HF2 grades：Applied using Rockwell apparatus on the cylinder after coating
The pressure of 150kg, and pass through optical microphotograph sem observation load mould, then with VDI 3198-1992 standards load mould relatively and (standard of grading
Load mould is divided into 6 grades, and 1-4 grades are qualified, and 5-6 grades are unqualified)；
Friction test shows：The high-speed steel (SKH51 materials) for being provided with diamond-like composite membrane is not provided with eka-gold relatively
Coefficient of friction can be reduced 20-30% (data refer to table 1) by the high-speed steel of hard rock composite membrane；It is rubbed using thrust ring type secondary,
It is secondary for HT250 thrust rings, experimental condition to rubbing：Linear velocity is 1m/s, pressure is respectively 1,3,5bar, using 68DA oil lubrications.
Wear test shows：Friction test specimen (SKH51 materials) specific wear rate for being provided with diamond-like composite membrane is 4.7*
10-16m3·N-1·m-1；Under same test conditions, the test specimen specific wear rate for being not provided with diamond-like composite membrane is 6.2*10- 13m3·N-1·m-1；So as to which the high-speed steel (SKH51 materials) for being provided with diamond-like composite membrane is not provided with diamond-like relatively
The high-speed steel of composite membrane can reduce specific wear rate more than 3 orders of magnitude；Using ball disk-type friction pair, to the secondary selection radius that rubs
For hard alloy (WC-Co6%) ball of 5mm, load 20N, linear velocity 0.2m/s, testing time 30min；
Installation effect：The cylinder of diamond-like composite membrane is provided with compared with the cylinder for being not provided with diamond-like composite membrane
A kind of efficiency for turning cylinder compressor can be improved 2%-6%.As shown in figure 12, which includes shaft 22, upper flange
12nd, cylinder jacket 13, piston 14, cylinder 15, lower flange 16.Wherein, as shown in Figs. 13 and 14, cylinder has cylinder piston hole 151
With cylinder limit shaft 152.
Than that described above, it is also necessary to which explanation is " one embodiment ", " another implementation spoken of in the present specification
Example ", " embodiment " etc. refer to that the specific features, structure or the feature that combine embodiment description are included in the application summary
Property description at least one embodiment in.It is not centainly to refer to same reality that statement of the same race, which occur, in multiple places in the description
Apply example.Furthermore, it is understood that when describing a specific features, structure or feature with reference to any embodiment, what is advocated is knot
Other embodiment is closed to realize that this feature, structure or feature are also fallen within the scope of the present invention.
In the above-described embodiments, all emphasize particularly on different fields to the description of each embodiment, there is no the portion being described in detail in some embodiment
Point, it may refer to the associated description of other embodiment.
The foregoing is only a preferred embodiment of the present invention, is not intended to limit the invention, for the skill of this field
For art personnel, the invention may be variously modified and varied.Within the spirit and principles of the invention, that is made any repaiies
Change, equivalent substitution, improvement etc., should all be included in the protection scope of the present invention.
Claims (15)
1. a kind of air cylinder structure, which is characterized in that including：
Cylinder body (10), the outer circumferential surface of the cylinder body (10) are provided with anti-attrition layer and transition zone, and the transition zone is located at
Between the outer circumferential surface and the anti-attrition layer of the cylinder body (10), wherein, the anti-attrition layer includes diamond-like tunic layer
(50) and at least one of doped diamond-like film layer (40).
2. air cylinder structure according to claim 1, which is characterized in that the transition zone includes bottoming film layer (20), described
Bottoming film layer (20) is arranged on the outer circumferential surface of the cylinder body (10), and the anti-attrition layer is located at the bottoming film layer (20)
Outside, the bottoming film layer (20) are Cr film layers, Ti film layers, Zr film layers, W film layers, Mo film layers or Y film layers.
3. air cylinder structure according to claim 2, which is characterized in that the transition zone further includes middle part film layer (30), institute
Middle part film layer (30) is stated to be located between outer surface and the anti-attrition layer of the cylinder body (10).
4. air cylinder structure according to claim 3, which is characterized in that the middle part film layer (30) includes Me-N film layers, Me-
At least one of C-N film layers, Me-C film layers, wherein, Me Cr, Ti, Zr, W, Mo or Y.
5. air cylinder structure according to claim 4, which is characterized in that the middle part film layer (30) includes the Me-N films
Layer, the Me-C-N film layers and the Me-C film layers are arranged to the Me-N even film layers the outer of the bottoming film layer (20)
It on surface, is arranged on the outer surface of the Me-N film layers to the Me-C-N even film layers, sets to the Me-C even film layers
It is placed on the outer surface of the Me-C-N film layers, the anti-attrition layer is evenly arranged on the outer surface of the Me-C-N film layers.
6. air cylinder structure according to claim 3, which is characterized in that the anti-attrition layer includes the diamond-like tunic layer
(50) and the doped diamond-like film layer (40), the doped diamond-like film layer (40) are evenly arranged in the middle part film
On the surface of layer (30), the diamond-like tunic layer (50) is evenly arranged in the outer of the doped diamond-like film layer (40)
On surface.
7. air cylinder structure according to claim 1, which is characterized in that
The diamond-like tunic layer (50) is the diamond-like of hydrogeneous amorphous carbon, alternatively,
The diamond-like tunic layer (50) is the diamond-like of tetrahedral amorphous carbon, alternatively,
The diamond-like tunic layer (50) is the diamond-like of hydrogeneous tetrahedral amorphous carbon.
8. air cylinder structure according to claim 1, which is characterized in that the doped diamond-like film layer (40) is to mix M classes
Diamond film layer, alternatively, the doped diamond-like film layer (40) is mixes MC diamond-like carbon film layers, wherein, M Cr, Ti, Zr,
W, Mo, Y, Al, Ag, Cu, Si, B, N or F, MC are the diamond-like of the carbide of the class containing M.
9. air cylinder structure according to claim 8, which is characterized in that when the doped diamond-like film layer (40) is to mix M
During diamond-like carbon film layer, the ingredient of M and the ingredient of C are equably set, when the doped diamond-like film layer (40) is to mix MC classes
During diamond film layer, the ingredient of MC and the ingredient of C are equably set.
10. air cylinder structure according to claim 8, which is characterized in that when the doped diamond-like film layer (40) is to mix M
During diamond-like carbon film layer, the ingredient of M and the ingredient of C are from the direction for the outer surface for being gradually distance from the cylinder body (10) in gradual
The set-up mode for being incremented by or gradually successively decreasing, when the doped diamond-like film layer (40) is to mix MC diamond-like carbon film layers, MC's
The ingredient of ingredient and C are in gradually incremental from the direction for the outer surface for being gradually distance from the cylinder body (10) or that gradually successively decreases sets
Put mode.
11. air cylinder structure according to claim 8, which is characterized in that the doped diamond-like film layer (40) includes mixing M
Diamond-like carbon film layer and mix MC diamond-like carbon film layers, it is described mix M diamond-like carbon film layers and mix MC diamond-like carbon film layers alternately set
It puts.
12. air cylinder structure according to claim 1, which is characterized in that the cylinder body (10) be made of steel or
Person, the cylinder body (10) are made of the steel after Nitrizing Treatment.
13. air cylinder structure according to claim 1, which is characterized in that
The thickness of the anti-attrition layer and the transition zone is L1, wherein, 0.5 μm≤L1≤1.9 μm, alternatively, 4 μm≤L1≤10 μ
m。
14. a kind of air cylinder structure, which is characterized in that including anti-attrition layer, the anti-attrition layer includes doped diamond-like film layer (40),
The doped diamond-like film layer (40) is evenly arranged on the outer surface of cylinder body (10).
15. a kind of compressor, including air cylinder structure, which is characterized in that the air cylinder structure is any one of claim 1 to 13
The air cylinder structure, alternatively, the air cylinder structure is the air cylinder structure described in claim 14.
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